Laser processing system and laser processing method

Abstract

The invention provides a laser processing system and a laser processing method, and relates to the technical field of laser processing, and the laser processing system comprises a laser assembly used for emitting laser; the focusing assembly comprises a plurality of focusing pieces which are coaxially arranged in the first direction; the first sensor is used for monitoring the temperature of any focusing piece and generating a first sensing signal according to the corresponding focusing piece; the control assembly is in communication connection with the first sensor and is configured to output a first adjusting signal according to the first sensing signal; and the first driving part is in communication connection with the control assembly so as to receive the first adjusting signal, and the first driving part drives the corresponding focusing part to move in the first direction according to the first adjusting signal so as to adjust the position of the light spot. In this way, the position of the focusing piece is adjusted through the driving effect of the first driving piece, the stability during laser machining is improved, and meanwhile the laser machining efficiency and quality are improved.

Description

Technical Field

[0001] The present invention relates to the field of laser processing technology, and in particular to a laser processing system and a laser processing method. Background Art

[0002] As a high-precision processing method, laser has been widely used in aerospace, semiconductor, microelectronics, instrumentation and other fields. However, the processing quality of conventional power laser is not high and cannot meet the needs of users.

[0003] Therefore, in the related technology, high-power lasers are used to process the workpieces. Although high-power lasers can achieve higher processing quality, high-power lasers will produce high-intensity thermal effects during the transmission of multiple lens groups, which will cause the lens structure to undergo thermal deformation when the temperature rises, thereby changing the refractive index of the laser, and further causing the size of the laser spot to change, thereby reducing the stability of the laser processing, and also reducing the laser processing efficiency and quality. Summary of the invention

[0004] The problem solved by the present invention is how to improve the processing efficiency and quality of laser.

[0005] In order to solve the above problems, the present invention provides a laser processing system and a laser processing method.

[0006] In the first aspect, the present invention provides a laser processing system, comprising: a laser component for emitting laser; a focusing component, comprising a plurality of focusing components coaxially arranged along a first direction, the plurality of focusing components being used to focus the laser to form a light spot; a first sensor, being used to monitor the temperature of any of the focusing components and to generate a first sensing signal according to the corresponding focusing component; a control component, being communicatively connected to the first sensor and configured to output a first adjustment signal according to the first sensing signal; a first driving component, being communicatively connected to the control component to receive the first adjustment signal, a driving end of the first driving component being drivingly connected to any of the focusing components and being used to drive the corresponding focusing component to move along the first direction according to the first adjustment signal to adjust the position of the light spot.

[0007] Optionally, the laser processing system also includes: a laser collimation assembly connected to the laser assembly, the laser collimation assembly having a plurality of coaxially arranged lenses, and the plurality of lenses are used to collimate the laser; a second sensor, used to monitor the temperature of any of the lenses and generate a second sensing signal, the control assembly is communicatively connected to the second sensor, and is used to output a second adjustment signal according to the second sensing signal; a second driving member, communicatively connected to the control assembly to receive the second adjustment signal, the driving end of the second driving member is drivingly connected to any of the lenses, and is used to drive any of the lenses to move axially according to the second adjustment signal.

[0008] Optionally, the laser processing system also includes a laser adjustment component arranged between the laser collimation component and the focusing component, and the laser adjustment component includes: a variable aperture connected to the output end of the laser collimation component, the variable aperture being used to filter edge stray light in the collimated laser; a first reflector being used to reflect the filtered laser to adjust the exit angle of the laser; a semi-reflective and semi-mirror being arranged opposite to the first reflector, the semi-reflective and semi-mirror being used to reflect the laser after reflection by the first reflector to form a light spot, and the semi-reflective and semi-mirror being also used to transmit auxiliary light.

[0009] Optionally, the laser processing system also includes a monitoring component connected to the focusing component, and the monitoring component includes: an identification component, used to monitor the position of the light spot; an auxiliary light source generating component, used to generate the auxiliary light, at least part of the auxiliary light is used to be transmitted to the identification component, and another part of the auxiliary light is used to be transmitted toward the light spot through the semi-reflective and semi-transparent lens; a lens barrel, connected to the identification component, the lens barrel having a cavity for transmitting the auxiliary light; a second reflecting component, used to reflect the auxiliary light generated by the auxiliary light source generating component, and transmit the auxiliary light to the identification component through the cavity.

[0010] Optionally, the laser processing system also includes: a jet generating component for generating a high-pressure jet; a gas supply component for generating a protective gas; a laser coupling component having a coupling chamber, wherein the jet generating component, the gas supply component and the focusing component are respectively connected to the laser coupling component, and the coupling chamber is used to couple the focused laser, the high-pressure jet and the protective gas to form a coupled energy beam.

[0011] Optionally, the laser coupling component includes: an optical window for introducing the focused laser into the coupling chamber; a gas connector, which is connected to the coupling chamber, and the output end of the gas supply component is connected to the gas connector to input the protective gas into the coupling chamber; a liquid connector, which is connected to the coupling chamber, and the output end of the jet generating component is connected to the liquid connector to input the high-pressure jet into the coupling chamber; a nozzle, which is connected to the coupling chamber, and the nozzle is used to spray the coupled energy beam to process the workpiece to be processed.

[0012] Optionally, the jet generating assembly includes: a fluid pipeline, one end of which is connected to the liquid connector; a box body for containing fluid; a pump body, respectively connected to the box body and the other end of the fluid pipeline, and the pump body is used to drive the fluid flow in the box body; and a third driving member, which is connected to the pump body to control the start and stop of the pump body.

[0013] Optionally, the gas supply assembly includes: a gas pipeline, one end of which is connected to the gas connector; a gas storage component for storing the protective gas; and an air pump, respectively connected to the gas storage component and the other end of the gas pipeline, and the air pump is used to drive the flow of the protective gas.

[0014] Optionally, the laser processing system also includes a processing workbench, which is arranged corresponding to the nozzle, and the processing workbench includes: a clamping assembly, used to clamp and fix the workpiece to be processed; a displacement platform, used to receive the clamping assembly, and the displacement platform is used to drive the clamping assembly to move along at least one of the first direction, the second direction and the third direction, and the first direction, the second direction and the third direction intersect each other.

[0015] Compared with the related art, the beneficial effects of the laser processing system of the present invention are:

[0016] The present invention emits laser through a laser component, and uses a focusing component to focus the laser to form a light spot. The light spot can be used to process the workpiece. At the same time, the focusing component includes a plurality of focusing components coaxially arranged along a first direction, so that more precise focusing of the laser can be achieved. The first sensor can monitor the temperature of any focusing component, and generate a first sensor signal according to the corresponding focusing component. In this way, when the temperature of one or more focusing components changes and causes the size of the light spot to change, the control component can output a first adjustment signal through the first sensor signal. Since the control component is communicatively connected to the first driving component, and the first driving component is drivingly connected to any focusing component, the driving component can receive the first adjustment signal and drive the corresponding focusing component to move to adjust the size of the light spot so that the size of the light spot meets the preset requirements. In this way, the position of the focusing component is adjusted by the driving action of the first driving component, which not only increases the stability during laser processing, but also improves the processing efficiency and quality of the laser.

[0017] In a second aspect, the present invention provides a laser processing method, which is applicable to the above-mentioned laser processing system, including: starting a laser component to make the laser component output an indication laser, and the indication laser passes through a laser collimation component, a laser adjustment component and a focusing component in sequence; starting a monitoring component and adjusting the focal length of the lens barrel of the monitoring component; starting a first sensor and a second sensor, using the first sensor to monitor the temperature of the focusing component and generate a first sensor signal, and using the second sensor to monitor the temperature of the laser collimation component and generate a second sensor signal; starting a jet generating component, an air supply component and a laser coupling component, switching the indication laser output by the laser component to a processing laser, and the processing laser, the high-pressure jet generated by the jet generating component and the air supply component The generated protective gas is coupled in the laser coupling component to form a laser coupled energy beam; the processing workbench, the control component, the first driving component and the second driving component are started, the processing workbench is used to control the workpiece to be processed to move to the processing position, the control component receives the first sensor signal and drives the focusing component of the focusing component to move, the control component also receives the second sensor signal and drives the lens of the laser collimation component to move, so as to adjust the processing power of the laser coupled energy beam, and use the laser coupled energy beam to process the workpiece to be processed; the laser component, the gas supply component and the jet generating component are turned off, the processed workpiece to be processed is removed, and the monitoring component, the control component, the first sensor, the second sensor, the first driving component and the second driving component are turned off.

[0018] Since the technical improvements and technical effects of the laser processing method are the same as those of the laser processing system, the laser processing method will not be described in detail. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1A structural block diagram of a laser processing system in an embodiment of the present invention;

[0020] Figure 2 A schematic diagram of the structure of a laser processing system according to an embodiment of the present invention;

[0021] Figure 3 Schematic diagram of the structure of the first driving member and the focusing assembly in an embodiment of the present invention;

[0022] Figure 4 The laser collimation assembly in the embodiment of the present invention;

[0023] Figure 5 Flow chart of the laser processing method in an embodiment of the present invention.

[0024] Description of reference numerals:

[0025] Laser component 10, light guide fiber 11,

[0026] Focusing assembly 20, focusing member 21,

[0027] Control component 30,

[0028] The first driving member 40,

[0029] Laser collimation assembly 50, lens 51,

[0030] Laser adjustment component 60, variable aperture 61, first reflector 62, semi-reflective mirror 63,

[0031] Monitoring component 70, identification element 71, auxiliary light source generating element 72, lens barrel 73, second reflecting element 74,

[0032] Jet generating assembly 80, fluid pipeline 81, box 82, pump body 83, third driving member 84, pressure monitor 85, accumulator 86, overflow valve 87, temperature regulating member 88, filter 89,

[0033] Gas supply assembly 90, gas storage member 91, air pump 92, pressure regulating valve 93, gas filter 94, laser coupling assembly 100, coupling chamber 101, coupling energy beam 102, optical window 103, gas connector 104, liquid connector 105, nozzle 106,

[0034] Processing table 110, clamping assembly 111, displacement platform 112,

[0035] Workpiece to be processed 120, first direction Z. DETAILED DESCRIPTION

[0036] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. Although certain embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be interpreted as being limited to the embodiments described herein. On the contrary, these embodiments are provided to provide a more thorough and complete understanding of the present invention. It should be understood that the drawings and embodiments of the present invention are only for exemplary purposes and are not intended to limit the scope of protection of the present invention.

[0037] The Z axis in the drawings represents the vertical direction, that is, the up and down position, and the positive direction of the Z axis represents the upper side, and the reverse direction of the Z axis represents the lower side. It should also be noted that the aforementioned Z axis is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

[0038] The term "including" and its variations used in this document are open inclusions, that is, "including but not limited to"; the term "based on" means "based at least in part on"; the term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one other embodiment"; the term "some embodiments" means "at least some embodiments"; the term "optionally" means "optional embodiments". The relevant definitions of other terms will be given in the following description. It should be noted that the concepts of "first", "second", etc. mentioned in the present invention are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0039] It should be noted that the modifications of "one" and "plurality" mentioned in the present invention are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0040] like Figures 1 to 4 As shown, the present invention provides a laser processing system, including: a laser component 10, used to emit laser; a focusing component 20, including a plurality of focusing components 21 coaxially arranged along a first direction, and the plurality of focusing components 21 are used to focus the laser to form a light spot; a first sensor, used to monitor the temperature of any focusing component 21, and generate a first sensing signal according to the corresponding focusing component 21; a control component 30, which is communicatively connected to the first sensor and configured to output a first adjustment signal according to the first sensing signal; a first driving component 40, which is communicatively connected to the control component 30 to receive the first adjustment signal, and a driving end of the first driving component 40 is drivingly connected to any focusing component 21, and is used to drive the corresponding focusing component 21 to move along the first direction according to the first adjustment signal to adjust the position of the light spot.

[0041] In this embodiment, when the focusing assembly 20 is thermally deformed, the size of the light spot will increase, so the first adjustment signal drives the corresponding focusing member 21 to move along the first direction to reduce the size of the light spot to meet the processing requirements.

[0042] In this embodiment, the first direction is Z, and the second direction and the third direction are not shown.

[0043] The first sensor in this embodiment is not shown.

[0044] In this embodiment, the laser emitted by the laser component 10 is a red laser with an output central wavelength of 1064±10nm, a pulse width of 20 to 300ns, a pulse frequency adjustment range of 1 to 300kHz, a peak average power of 3000W, and the laser component 10 may include a laser and a light-guiding optical fiber 11, which can output the high-power infrared laser light source generated by the laser in the form of an optical fiber.

[0045] Optionally, in other embodiments, the laser can also be set to a green laser. The specific setting should be selected according to customer needs, which can improve the applicability and scope of application of the device.

[0046] In this embodiment, the first sensor is specifically a temperature sensor, and the first driving member 40 can be a micro-motor or an adjusting screw, as long as the movement requirement of driving the focusing member 21 can be met.

[0047] The present invention emits laser through the laser component 10, and uses the focusing component 20 to focus the laser to form a light spot. The light spot can be used to process the workpiece 120. At the same time, the focusing component 20 includes a plurality of focusing components 21 coaxially arranged along the first direction, so that more accurate focusing of the laser can be achieved. The first sensor can monitor the temperature of any focusing component 21 and generate a first sensing signal according to the corresponding focusing component 21. In this way, when the temperature of one or more focusing components 21 changes and causes the size of the light spot to change, the control component 30 can output a first adjustment signal through the first sensing signal. Since the control component 30 is communicatively connected to the first driving component 40, and the first driving component 40 is drivingly connected to any focusing component 21, the driving component can receive the first adjustment signal and drive the corresponding focusing component 21 to move, so as to adjust the size of the light spot so that the size of the light spot meets the preset requirements. In this way, the position of the focusing component 21 is adjusted by the driving action of the first driving component 40, which not only increases the stability during laser processing, but also improves the processing efficiency and quality of the laser.

[0048] like Figure 1 and Figure 2As shown, optionally, the laser processing system also includes: a laser collimation component 50, connected to the laser component 10, the laser collimation component 50 has a plurality of coaxially arranged lenses 51, and the plurality of lenses 51 are used to collimate the laser; a second sensor, used to monitor the temperature of any lens 51 and generate a second sensing signal, the control component 30 is communicatively connected to the second sensor, and is used to output a second adjustment signal according to the second sensing signal; a second driving member, communicatively connected to the control component 30 to receive the second adjustment signal, the driving end of the second driving member is drivingly connected to any lens 51, and drives any lens 51 to move axially according to the second adjustment signal. By setting the above structure, multiple lenses 51 are used to collimate the laser, so that the divergent light path of the laser is changed into a parallel light path, thereby facilitating the subsequent coupling of the laser with the gas and liquid, thereby improving the coupling efficiency of the three. At the same time, the second driving member is used to adjust the position of the lens 51, which can reduce the impact of thermal distortion of the lens 51 caused by high-power laser, thereby ensuring the stable output of the collimated light beam. In addition, adjusting the position of the lens 51 also helps to maintain the stability of the spot size and spot quality, providing a strong guarantee for the focusing lens to focus the spot to a smaller size.

[0049] The second sensor and the second driving member in this embodiment are not shown.

[0050] In this embodiment, the laser alignment component 50 has an input end, which is connected to the laser component 10 through the input end, and the input end is specifically a QBH (Quick Buttons and Holder) interface end. Since the QBH interface end has the advantages of quick locking and positioning, it can ensure the stability and reliability of the connection between the laser alignment component 50 and the laser component 10. At the same time, the QBH interface end can carry higher-power lasers, thereby improving the applicability and scope of application of the laser alignment component 50, and facilitating the connection of the laser alignment component 50 with laser components 10 of different powers to meet the usage requirements in different environments.

[0051] Optionally, the laser processing system also includes a laser adjustment component 60 arranged between the laser collimation component 50 and the focusing component 20, and the laser adjustment component 60 includes: a variable aperture 61, connected to the output end of the laser collimation component 50, and the variable aperture 61 is used to filter the edge stray light in the collimated laser; a first reflector 62, used to reflect the filtered laser to adjust the output angle of the laser; a semi-reflective half-mirror 63, arranged opposite to the first reflector 62, the semi-reflective half-mirror 63 is used to reflect the laser reflected by the first reflector 62 to form a light spot, and the semi-reflective half-mirror 63 is also used to transmit auxiliary light. By setting the above structure and utilizing the variable aperture 61, the beam quality of the laser can be improved to obtain a collimated laser beam with higher roundness and spot quality. The first reflector 62 and the half-reflective mirror 63 cooperate with each other to change the transmission direction of the laser, thereby meeting the transmission requirements of the laser. At the same time, the half-reflective mirror 63 can also transmit auxiliary light, thereby facilitating the transmission of the auxiliary light to the relative position of the light spot and the nozzle 106, so as to facilitate the observation of the relative position of the light spot and the nozzle 106.

[0052] In this embodiment, the first reflector 62 is opposite to the mirror surface of the half-reflecting half-mirror 63, so that the laser transmission direction can be changed by the first reflector 62 and the half-reflecting half-mirror 63, which is convenient for the optical path design of the laser and the design of the relative optical path position of each structure. Of course, the axis of the first reflector 62 and the axis of the half-reflecting half-mirror 63 can also be set to other angles, and the relative position of the first reflector 62 and the half-reflecting half-mirror 63 can also be set to other forms, as long as it can meet the use requirements of the device, which will not be elaborated here.

[0053] like Figure 1 and Figure 2 As shown, optionally, the laser processing system further includes a monitoring component 70 connected to the focusing component 20, and the monitoring component 70 includes: an identification component 71, which is used to monitor the position of the light spot; an auxiliary light source generating component 72, which is used to generate auxiliary light, at least part of the auxiliary light can be transmitted to the identification component 71, and the other part of the auxiliary light is used to be transmitted toward the light spot through the semi-reflective semi-mirror 63; a lens barrel 73, which is connected to the identification component 71, and the lens barrel 73 has a cavity for the transmission of the auxiliary light; a second reflecting component 74, which is used to reflect the auxiliary light generated by the auxiliary light source generating component 72, and transmit the auxiliary light to the identification component 71 through the cavity. Through the above arrangement, the auxiliary light generated by the auxiliary light source generating component 72 facilitates the identification component 71 to monitor the position of the light spot, so as to improve the accuracy during processing.

[0054] In this embodiment, the auxiliary light is visible light. Since the laser transmission optical path and the monitoring optical path of the entire laser processing system are both in a closed space, visible light illumination is required for monitoring.

[0055] It should be noted that the identification element 71 is specifically a CCD (charge coupled device) camera, which is a photoelectric conversion element that can convert the sensed light signal into an electrical signal and output an image through a computer. Of course, the identification element 71 can also be other types of cameras such as CMOS complementary metal oxide semiconductor, which will not be described in detail here.

[0056] like Figure 1 and Figure 2 As shown, optionally, the laser processing system further includes: a jet generating assembly 80 for generating a high-pressure jet; a gas supply assembly 90 for generating a shielding gas; and a laser coupling assembly 100 having a coupling chamber 101. The jet generating assembly 80, the gas supply assembly 90 and the focusing assembly 20 are respectively connected to the laser coupling assembly 101. The coupling chamber 101 is used to couple the focused laser, the high-pressure jet and the shielding gas to form a coupled energy beam 102. By setting the above structure, the coupling chamber 101 can couple the focused laser beam with the high-pressure jet generated by the jet generating assembly 80, and form a water-guided laser coupled energy beam 102 through total reflection. At the same time, the shielding gas can effectively blow away the surface of the workpiece 120 to be processed during the processing, as well as the slag and liquid formed during the processing, thereby improving the safety of the laser processing process.

[0057] like Figure 1 and Figure 2 As shown, optionally, the laser coupling component 100 includes: an optical window 103, used to introduce the focused laser into the coupling chamber 101; a gas connector 104, which is connected to the coupling chamber 101, and the output end of the gas supply component 90 is connected to the gas connector 104 to input the protective gas into the coupling chamber 101; a liquid connector 105, which is connected to the coupling chamber 101, and the output end of the jet generating component 80 is connected to the liquid connector 105 to input the high-pressure jet into the coupling chamber 101; a nozzle 106, which is connected to the coupling chamber 101, and the nozzle 106 is used to spray the coupling energy beam 102 to process the workpiece 120 to be processed. By setting the above structure, the high-pressure jet is introduced into the coupling chamber 101 through the liquid connector 105, and the nozzle 106 can discharge the high-pressure jet in the form of a high-pressure fine jet with a diameter of 30μm-200μm. The focused laser is projected from the optical window 103 through the coupling chamber 101 to the surface of the nozzle 106, realizing the combination of the laser beam and the high-pressure fine jet to form a water-guided laser coupling energy beam 102. At the same time, the gas connector 104 is used to receive the high-purity protective gas provided by the gas supply system to form a protective gas hood, thereby effectively blowing away the slag and liquid accumulated on the surface of the workpiece 120 to be processed and inside the structure formed during the processing.

[0058] In this embodiment, the optical window 103 is a sapphire window. Since sapphire has high transmittance, excellent optical uniformity, and good resistance to laser damage, it can increase the service life of the laser coupling component 100 and reduce material loss of the device.

[0059] In this embodiment, the nozzle 106 is made of sapphire. Since sapphire has good wear resistance, it can withstand high-pressure and high-velocity water erosion, which is beneficial to extending the service life of the nozzle 106.

[0060] like Figure 1 and Figure 2 As shown, optionally, the jet generating assembly 80 includes: a fluid pipeline 81, one end of which is connected to the liquid connector 105; a box 82, which is used to contain fluid; a pump body 83, which is respectively connected to the box 82 and the other end of the fluid pipeline 81, and the pump body 83 is used to drive the fluid flow in the box 82; and a third driving member 84, which is drivingly connected to the pump body 83 to control the start and stop of the pump body 83. In this arrangement, the third driving member 84 can be used to control the start and stop of the pump body 83 and the pumping power of the pump body 83, thereby realizing accurate driving and control of the fluid in the box 82 to meet the use requirements in different environments.

[0061] In addition, the jet generating assembly 80 also includes a pressure monitor 85, an accumulator 86, an overflow valve 87, a temperature regulating member 88 and a filter 89. The pressure monitor 85 is arranged on the fluid pipeline 81 to monitor the hydraulic pressure in the fluid pipeline 81 in real time. The accumulator 86 is connected to the fluid pipeline 81, so that when the pressure in the pipeline is too high, the accumulator 86 is used to store part of the hydraulic pressure to prevent the possibility of rupture of the fluid pipeline 81; the overflow valve 87 is connected to the fluid pipeline 81. When the pressure in the fluid pipeline 81 is too high, the overflow valve 87 is opened to discharge part of the liquid, thereby ensuring the structural safety of the fluid pipeline 81; the temperature regulating member 88 is connected to the fluid pipeline 81. When the power of the laser is strong, the temperature regulating member 88 can cool the fluid and provide a fluid with a lower temperature to adjust the state of the coupled energy beam 102 so that the coupled energy beam 102 can meet the user's usage requirements. The filter 89 is arranged in the fluid pipeline 81 to filter impurities in the fluid pipeline 81.

[0062] The third driving member 84 in this embodiment is specifically a three-phase motor. In other embodiments, the third driving member 84 can also be a single-phase motor, and the specific setting should be selected according to the use scenario of the device.

[0063] like Figure 1 and Figure 2As shown, optionally, the gas supply component 90 includes: a gas pipeline, one end of which is connected to the gas connector 104; a gas storage component 91 for storing protective gas; an air pump 92, which is respectively connected to the gas storage component 91 and the other end of the gas pipeline, and the air pump 92 is used to drive the flow of protective gas. In this embodiment, the gas supply component 90 also includes a pressure regulating valve 93 and a gas filter 94, the pressure regulating valve 93 is connected to the gas pipeline, the gas filter 94 is arranged in the gas pipeline, the pressure regulating valve 93 is used to adjust the compressed protective gas to a set pressure for transportation, and the gas filter 94 is used to filter impurities in the protective gas to ensure the purity of the gas. By setting the above structure, the protective gas output by the gas supply component 90 can meet the coupling requirements, and the protective gas can be used to protect the workpiece 120 to improve the safety during the processing.

[0064] The gas pipeline in this embodiment is not shown.

[0065] like Figure 1 and Figure 2 As shown, optionally, the laser processing system also includes a processing workbench 110, which is arranged corresponding to the nozzle 106, and the processing workbench 110 includes: a clamping assembly 111, used to clamp and fix the workpiece 120 to be processed; a displacement platform 112, used to receive the clamping assembly 111, and the displacement platform 112 is used to drive the clamping assembly 111 to move along at least one of the first direction, the second direction and the third direction, and the first direction, the second direction and the third direction are mutually intertwined.

[0066] In this embodiment, the clamping assembly 111 is a hydraulic clamping tool, which can stably clamp the workpiece 120 to prevent the workpiece 120 from being displaced during the processing and thus reducing the processing efficiency of the workpiece 120.

[0067] The displacement platform 112 can be used to drive the clamping assembly 111 and the workpiece 120 to be flexibly shifted in three-dimensional space, ensuring that the workpiece 120 to be processed is accurately transported to a predetermined processing area, thereby improving the processing efficiency of the workpiece 120 to be processed.

[0068] In this embodiment, the first direction, the second direction and the third direction are perpendicular to each other.

[0069] In addition, the control component 30 in this embodiment can control the laser parameters, the identification member 71 parameters, the jet pressure parameters, the protective gas parameters and the displacement parameters of the displacement platform 112. The laser parameters include the laser output power, pulse width delay, etc.; the identification member 71 parameters are adjusted to ensure that the observation focus is always aligned with the surface of the nozzle 106, and the coupling state of the light spot and the nozzle 106 is monitored in real time; the jet pressure parameters include the liquid pressure, delivery frequency and temperature, etc.; the protective gas parameters include the gas flow rate and pressure, etc.; the displacement parameters of the displacement platform 112 include the displacement trajectory, speed and number of times, etc.

[0070] like Figure 5 As shown, the present invention provides a laser processing method, which is applicable to the above-mentioned laser processing system, comprising:

[0071] S100: Start the laser assembly 10, so that the laser assembly 10 outputs a pointing laser, and the pointing laser passes through the laser collimation assembly 50, the laser adjustment assembly 60 and the focusing assembly 20 in sequence;

[0072] S200: Start the monitoring component 70 and adjust the focal length of the lens barrel 73 of the monitoring component 70; in this embodiment, the focal length of the lens barrel 73 is adjusted so that the identification member 71 can clearly see the surface of the nozzle 106.

[0073] S300: starting the first sensor and the second sensor, using the first sensor to monitor the temperature of the focusing assembly 20 and generate a first sensing signal, and using the second sensor to monitor the temperature of the laser collimation assembly 50 and generate a second sensing signal;

[0074] S400: Start the jet generation assembly 80, the gas supply assembly 90 and the laser coupling assembly 100, switch the indication laser output by the laser assembly 10 to the processing laser, and couple the processing laser, the high-pressure jet generated by the jet generation assembly 80 and the protective gas generated by the gas supply assembly 90 in the laser coupling assembly 100 to form a laser coupling energy beam 102; in this embodiment, the water outlet pressure of the jet generation group is set to 15Mpa, and observe whether the fine jet emitted by the nozzle 106 is uniform and without scattering. If there is a problem with the fine jet, replace the nozzle 106 with a new one.

[0075] At the same time, if the workpiece 120 to be processed is a ceramic or composite material, the gas storage component 91 of the gas supply component 90 is replaced with an argon gas cylinder; if the workpiece 120 to be processed is a metal material, the gas storage component 91 of the gas supply component 90 is replaced with an oxygen gas cylinder; if the workpiece 120 to be processed is a semiconductor material such as a silicon wafer, the gas storage component 91 of the gas supply component 90 is replaced with a nitrogen gas cylinder.

[0076] S500: starting the processing workbench 110, the control component 30, the first driving member 40 and the second driving member, the processing workbench 110 is used to control the workpiece 120 to move to the processing position, the control component 30 receives the first sensor signal and drives the focusing member 21 of the focusing component 20 to move, and the control component 30 also receives the second sensor signal and drives the lens 51 of the laser collimation component 50 to move, so as to adjust the processing power of the laser coupling energy beam 102, and use the laser coupling energy beam 102 to process the workpiece 120;

[0077] S600: Turn off the laser assembly 10, the gas supply assembly 90 and the jet generating assembly 80, remove the processed workpiece 120, and turn off the monitoring assembly 70, the control assembly 30, the first sensor, the second sensor, the first driving member 40 and the second driving member.

[0078] If during the laser adjustment or processing, the optical signal collected by the identification component 71 in the computer can observe the state of the coupled energy beam 102 and the morphology of the nozzle 106 in real time; if the nozzle 106 is observed to be cracked or damaged, the control system sends a shutdown signal to the laser component 10, the jet generating component 80, and the gas supply module, and then replaces the nozzle 106, and repeats steps S100-S500.

[0079] During the processing, if a large number of sputtering water beams are observed around the workpiece 120 to be processed, it means that there is too much water accumulated on the surface of the workpiece 120 to be processed. The control component 30 sends an air pressure enhancement signal to the air supply module, and the pressure of the pressure regulating valve 93 is automatically increased. After the number of sputtering water beams returns to the initial processing state, the control component 30 sends an air pressure recovery signal to the air supply module. The processing process does not need to be interrupted during this feedback process.

[0080] During the processing, if a water jet is observed to penetrate the lower surface of the workpiece 120, it means that the workpiece 120 is penetrated by the laser. The control component 30 controls the air supply module to send a signal to appropriately reduce the air pressure, and sends a hydraulic lifting signal to the jet generating component 80 to continue the processing.

[0081] Since the technical improvements and technical effects of the laser processing method are the same as those of the laser processing system, the laser processing method will not be described in detail.

[0082] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. A laser processing system, characterized in that: include: A laser assembly (10) for emitting laser light; A focusing assembly (20) comprising a plurality of focusing elements (21) coaxially arranged along a first direction, wherein the plurality of focusing elements (21) are used to focus the laser to form a light spot; A first sensor, used for monitoring the temperature of any of the focusing components (21), and generating a first sensing signal according to the corresponding focusing component (21); a control component (30), connected in communication with the first sensor and configured to output a first adjustment signal according to the first sensing signal; A first driving member (40) is connected to the control component (30) for communication so as to receive the first adjustment signal. A driving end of the first driving member (40) is connected to any of the focusing members (21) for driving and is used to drive the corresponding focusing member (21) to move along a first direction according to the first adjustment signal so as to adjust the size of the light spot.

2. The laser processing system according to claim 1, characterized in that: The laser processing system also includes: A laser collimation assembly (50) connected to the laser assembly (10), wherein the laser collimation assembly (50) comprises a plurality of coaxially arranged lenses (51), and the plurality of lenses (51) are used to collimate the laser; a second sensor, used for monitoring the temperature of any of the lenses (51) and generating a second sensing signal, the control component (30) being in communication connection with the second sensor and used for outputting a second adjustment signal according to the second sensing signal; A second driving member is connected to the control assembly (30) for receiving the second adjustment signal, and a driving end of the second driving member is connected to any of the lenses (51) for driving and is used to drive any of the lenses (51) to move axially according to the second adjustment signal.

3. The laser processing system according to claim 2, characterized in that: The laser processing system further comprises a laser adjustment component (60) arranged between the laser collimation component (50) and the focusing component (20), wherein the laser adjustment component (60) comprises: A variable iris (61) is connected to the output end of the laser collimation component (50), and the variable iris (61) is used to filter edge stray light in the collimated laser; A first reflector (62) is used to reflect the filtered laser light to adjust the emission angle of the laser light; A semi-reflective mirror (63) is arranged opposite to the first reflective element (62), and the semi-reflective mirror (63) is used to reflect the laser after being reflected by the first reflective element (62) to form a light spot. The semi-reflective mirror (63) is also used to transmit auxiliary light.

4. The laser processing system according to claim 3, characterized in that: The laser processing system further comprises a monitoring component (70) connected to the focusing component (20), wherein the monitoring component (70) comprises: An identification member (71) for monitoring the position of the light spot; An auxiliary light source generating element (72) is used to generate the auxiliary light, part of the auxiliary light is used to be transmitted to the identification element (71), and another part of the auxiliary light is used to be transmitted toward the light spot through the semi-reflective and semi-mirror lens (63); A lens barrel (73) connected to the identification member (71), the lens barrel (73) having a cavity for transmitting the auxiliary light; The second reflecting element (74) is used to reflect the auxiliary light generated by the auxiliary light source generating element (72) and transmit the auxiliary light to the identification element (71) through the cavity.

5. The laser processing system according to any one of claims 1 to 4, characterized in that: The laser processing system also includes: A jet generating assembly (80) for generating a high-pressure jet; A gas supply assembly (90) for generating a protective gas; The laser coupling component (100) comprises a coupling chamber (101), the jet generating component (80), the gas supply component (90) and the focusing component (20) are respectively connected to the laser coupling component (100), and the coupling chamber (101) is used to couple the focused laser, the high-pressure jet and the protective gas to form a coupled energy beam (102).

6. The laser processing system according to claim 5, characterized in that: The laser coupling assembly (100) comprises: An optical window (103) for introducing the focused laser light into the coupling chamber (101); A gas connector (104) is connected to the coupling chamber (101), and an output end of the gas supply assembly (90) is connected to the gas connector (104) so ​​as to input the protective gas into the coupling chamber (101); A liquid joint (105) is connected to the coupling chamber (101), and the output end of the jet generating assembly (80) is connected to the liquid joint (105) so as to input the high-pressure jet into the coupling chamber (101); A nozzle (106) is connected to the coupling chamber (101), and the nozzle (106) is used to eject the coupling energy beam (102) to process the workpiece (120).

7. The laser processing system according to claim 6, characterized in that: The jet generating assembly (80) comprises: A fluid pipeline (81), one end of the fluid pipeline (81) being connected to the liquid connector (105); A box (82) for containing a fluid; A pump body (83) is connected to the box body (82) and the other end of the fluid pipeline (81) respectively, and the pump body (83) is used to drive the fluid in the box body (82) to flow; A third driving member (84) is drivingly connected to the pump body (83) to control the start and stop of the pump body (83).

8. The laser processing system according to claim 6, characterized in that: The air supply assembly (90) comprises: a gas pipeline, one end of which is connected to the gas connector (104); A gas storage member (91) for storing the protective gas; An air pump (92) is connected to the air storage component (91) and the other end of the gas pipeline respectively, and the air pump (92) is used to drive the protective gas to flow.

9. The laser processing system according to claim 6, characterized in that: The laser processing system further comprises a processing workbench (110), wherein the processing workbench (110) is arranged corresponding to the nozzle (106), and the processing workbench (110) comprises: A clamping assembly (111) for clamping and fixing the workpiece (120) to be processed; The displacement platform (112) is used to receive the clamping assembly (111), and the displacement platform (112) is used to drive the clamping assembly (111) to move along at least one of the first direction, the second direction and the third direction, wherein the first direction, the second direction and the third direction intersect each other.

10. A laser processing method, applicable to the laser processing system according to any one of claims 1 to 9, characterized in that: include: Starting the laser assembly (10) so that the laser assembly (10) outputs a pointing laser, the pointing laser sequentially passing through a laser collimation assembly (50), a laser adjustment assembly (60), and a focusing assembly (20); Starting the monitoring component (70) and adjusting the focal length of the lens barrel (73) of the monitoring component (70); Starting a first sensor and a second sensor, using the first sensor to monitor the temperature of the focusing assembly (20) and generate a first sensing signal, and using the second sensor to monitor the temperature of the laser collimation assembly (50) and generate a second sensing signal; Starting the jet generating component (80), the gas supply component (90) and the laser coupling component (100), switching the indication laser output by the laser component (10) to the processing laser, and coupling the processing laser, the high-pressure jet generated by the jet generating component (80) and the protective gas generated by the gas supply component (90) in the laser coupling component (100) to form a laser coupling energy beam (102); Starting a processing workbench (110), a control component (30), a first driving member (40), and a second driving member, wherein the processing workbench (110) is used to control the workpiece (120) to be processed to move to a processing position, the control component (30) receives the first sensing signal and drives the focusing member (21) of the focusing component (20) to move, and the control component (30) also receives the second sensing signal and drives the lens (51) of the laser collimation component (50) to move, so as to adjust the processing power of the laser coupling energy beam (102), and use the laser coupling energy beam (102) to process the workpiece (120); The laser assembly (10), the gas supply assembly (90) and the jet generating assembly (80) are turned off, the workpiece to be processed (120) is removed after processing, and the monitoring assembly (70), the control assembly (30), the first sensor, the second sensor, the first driving member (40) and the second driving member are turned off.

Images