Multi-parameter sensor, multi-parameter measuring method and electronic equipment

Abstract

The invention relates to the technical field of sensors, in particular to a multi-parameter sensor, a multi-parameter measuring method and electronic equipment. The multi-parameter sensor includes: a base layer; the flow channel layer is arranged on the substrate layer, a first electrode flow channel and a second electrode flow channel are arranged in the flow channel layer and are filled with liquid metal, the first electrode flow channel and the second electrode flow channel are arranged in parallel in a temperature-strain measurement area of the flow channel layer, and the first electrode flow channel and the second electrode flow channel are arranged in parallel in a pressure measurement area of the flow channel layer. The first electrode flow channel is independently arranged; the first electrode flow channel is at least provided with three first inlets and outlets, the second electrode flow channel is at least provided with two second inlets and outlets, and each first inlet and outlet and each second inlet and outlet are formed in the flow channel layer; wherein in the temperature-strain measurement area, the at least two first inlets and outlets of the first electrode flow channel and the at least two second inlets and outlets of the second electrode flow channel are arranged in an adjacent or staggered manner. The manufacturing cost of the multi-parameter sensor is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of sensors, and particularly to a multi-parameter sensor, a multi-parameter measurement method, and an electronic device. Background Art

[0002] Existing dual-parameter sensors have significant advantages compared to single-parameter sensors. By integrating multiple measurement units or utilizing the multifunctional characteristics of materials, they can measure two physical quantities, thereby improving the function and application range of the sensors.

[0003] However, the measurement units need to involve different physical principles, signal processing methods, and material selections. The selection, preparation, and processing of multifunctional materials are relatively complex, and strict control of the composition, structure, and performance of the materials is required to meet the measurement requirements of the sensors. This results in a relatively complex design of dual-parameter sensors, high manufacturing costs, and difficulty in large-scale popularization and application. Summary of the Invention

[0004] Based on the above technical problems, the present invention provides a multi-parameter sensor, a multi-parameter measurement method, and an electronic device.

[0005] According to one aspect of the present invention, a multi-parameter sensor is provided, including: A base layer; A flow channel layer disposed on the base layer. A first electrode flow channel and a second electrode flow channel are provided inside the flow channel layer. The first electrode flow channel and the second electrode flow channel are filled with liquid metal. In the temperature-strain measurement area of the flow channel layer, the first electrode flow channel and the second electrode flow channel are arranged in parallel. In the pressure measurement area of the flow channel layer, the first electrode flow channel is provided alone; The first electrode flow channel is provided with at least three first inlets and outlets, and the second electrode flow channel is provided with at least two second inlets and outlets. Each first inlet and outlet and each second inlet and outlet are disposed on the flow channel layer; Wherein, in the temperature-strain measurement area, at least two first inlets and outlets of the first electrode flow channel and at least two second inlets and outlets of the second electrode flow channel are adjacent or staggered.

[0006] In addition, the multi-parameter sensor according to one aspect of the present invention further includes: An anti-stretching film layer disposed below the base layer and / or above the flow channel layer, and covering the range of the pressure measurement area.

[0007] In addition, for the multi-parameter sensor according to one aspect of the present invention, the base layer, the flow channel layer, and the anti-stretching film layer are all flexible film structures, and the total thickness of the base layer, the flow channel layer, and the anti-stretching film layer is less than 2 mm.

[0008] In addition, for the multi-parameter sensor according to one aspect of the present invention, the thickness of the flow channel layer exceeds the depth of the first electrode flow channel and the second electrode flow channel in the direction perpendicular to the plane of the flow channel layer by more than 40 μm.

[0009] In addition, for the multi-parameter sensor according to one aspect of the present invention, the spacing between the first electrode flow channel and the second electrode flow channel arranged in parallel is in the micrometer range, and the spacing is evenly distributed.

[0010] In addition, for the multi-parameter sensor according to one aspect of the present invention, the first electrode flow channel and the second electrode flow channel are arranged in a comb structure or a serpentine bend.

[0011] According to another aspect of the present invention, a multi-parameter measurement method is provided, which uses the above multi-parameter sensor for multi-parameter measurement; The multi-parameter measurement method includes: In the temperature-strain measurement area, a first capacitor is formed between the first electrode flow channel and the second electrode flow channel through the flow channel layer. Select any one of the first electrode flow channel or the second electrode flow channel, measure the first resistance of the electrode flow channel through its corresponding first inlet or second inlet, and measure the first capacitor through the first inlet of the first electrode flow channel and the second inlet of the second electrode flow channel; In the pressure measurement area, measure the second resistance of the second electrode flow channel through the second inlet of the second electrode flow channel; Based on the mapping relationship between the first resistance and the current temperature and current strain, the mapping relationship between the first capacitor and the current temperature and current strain, and the mapping relationship between the second resistance and the current pressure and current temperature, determine the current temperature, current strain, and current pressure measured by the multi-parameter sensor.

[0012] In addition, for the multi-parameter measurement method according to another aspect of the present invention, based on the mapping relationship between the first resistance and the current temperature and current strain, the mapping relationship between the first capacitor and the current temperature and current strain, and the mapping relationship between the second resistance and the current pressure and current temperature, determining the current temperature, current strain, and current pressure measured by the multi-parameter sensor includes: Obtain the initial first resistance corresponding to the first resistance, the initial first capacitor corresponding to the first capacitor, the initial second resistance corresponding to the second resistance, and the initial temperature corresponding to the initial first resistance and the initial strain corresponding to the initial first capacitor; Based on the initial first resistance, the first resistance, the initial first capacitor, the first capacitor, the initial temperature, and the initial strain, determine the current temperature and current strain; Based on the initial second resistance, the second resistance, the initial temperature, and the current temperature, determine the current pressure.

[0013] In addition, according to the multi-parameter measurement method of another aspect of the present invention, when measuring the current temperature and the current pressure simultaneously, the multi-parameter measurement method further includes: In the temperature-strain measurement area, measure the first capacitance formed between the first electrode channel and the second electrode channel through the flow channel layer through the first inlet / outlet of the first electrode channel and the second inlet / outlet of the second electrode channel; In the pressure measurement area, measure the second resistance of the second electrode channel through the second inlet / outlet of the second electrode channel; Based on the mapping relationship between the first capacitance and the current temperature, determine the current temperature measured by the multi-parameter sensor; Based on the mapping relationship between the second resistance and the current temperature and the current pressure, determine the current pressure measured by the multi-parameter sensor.

[0014] The present invention also provides an electronic device, including a memory, a processor, and a computer program stored on the memory and executable on the processor. When the processor executes the computer program, the above multi-parameter measurement method is implemented.

[0015] The multi-parameter sensor, measurement method, and electronic device provided by the present invention, by providing a first electrode channel and a second electrode channel filled with liquid metal in the flow channel layer, the area where the first electrode channel and the second electrode channel are arranged in parallel constitutes the temperature-strain measurement area, and the area where the first electrode channel is arranged alone constitutes the pressure measurement area, can simultaneously measure three physical quantities of temperature, strain, and pressure, realizing multi-parameter measurement. Compared with the dual-parameter sensor that requires integrating multiple measurement units or using the multifunctional characteristics of materials, the structure is simplified and the manufacturing cost is reduced. Description of the Drawings

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0017] Figure 1 is a cross-sectional view of the multi-parameter sensor provided by the present invention.

[0018] Figure 2 is one of the schematic flowcharts of the multi-parameter measurement method provided by the present invention.

[0019] Figure 3 is another schematic flowchart of the multi-parameter measurement method provided by the present invention.

[0020] Figure 4 is a top view schematic diagram of the multi-parameter sensor provided by Embodiment 1 of the present invention.

[0021] Figure 5 It is a top view schematic diagram of the multi-parameter sensor provided in the second embodiment of the present invention.

[0022] Figure 6 It is a schematic structural diagram of the electronic device provided by the present invention. Specific embodiments

[0023] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the present invention will be clearly and completely described below with reference to the accompanying drawings in the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present invention without making creative efforts shall fall within the protection scope of the present invention.

[0024] Figure 1 It is a cross-sectional view of the multi-parameter sensor provided by the present invention.

[0025] As Figure 1 shown, the multi-parameter sensor includes a base layer 1 and a flow channel layer 2 provided on the base layer 1. The flow channel layer 2 includes a first electrode flow channel 4 and a second electrode flow channel 5 provided inside it. Both the first electrode flow channel 4 and the second electrode flow channel 5 are filled with liquid metal. The liquid metal includes, but is not limited to, one or more of mercury, gallium, gallium-based alloys, bismuth, and bismuth-based alloys that are liquid at room temperature.

[0026] Further, the length of the first electrode flow channel 4 is greater than the length of the second electrode flow channel 5. The first electrode flow channel and the second electrode flow channel filled with liquid metal respectively form independent electrodes. The flow channel layer 2 includes a temperature-strain measurement area and a pressure measurement area. In the temperature-strain measurement area of the flow channel layer 2, the first electrode flow channel 4 and the second electrode flow channel 5 are arranged in parallel. In the pressure measurement area of the flow channel layer 2, the first electrode flow channel 4 is arranged alone. Among them, the first electrode flow channel is provided with at least three first inlets and outlets (such as Figure 1 shown as 401, 402, 403), and the first inlets and outlets are the electrode measurement points of the electrode formed by the first electrode flow channel filled with liquid metal. The second electrode flow channel is provided with at least two second inlets and outlets (such as Figure 1 shown as 501, 502), and the second inlets and outlets are the electrode measurement points of the electrode formed by the second electrode flow channel filled with liquid metal. The above-mentioned first inlets and outlets and second inlets and outlets are all provided on the flow channel layer 2. In the temperature-strain measurement area, at least two first inlets and outlets of the first electrode flow channel and at least two second inlets and outlets of the second electrode flow channel are arranged adjacent to or staggered from each other to facilitate the measurement of temperature and strain.

[0027] Here, in the temperature-strain measurement area, by measuring the first resistance of the electrode formed by the corresponding electrode flow channel through the first inlet / outlet of the first electrode flow channel or the second inlet / outlet of the second electrode flow channel in the temperature-strain measurement area, and the first capacitance formed between the first electrode flow channel and the second electrode flow channel through the flow channel layer, it can be used to measure two parameters of temperature and strain. In the pressure measurement area, by measuring the second resistance of the electrode formed by the first electrode flow channel in this area, it can be used to measure pressure. Thus, the measurement of three physical quantities, namely temperature, strain, and pressure, is achieved.

[0028] Preferably, one or more first inlets / outlets are provided at the end or the extended part of the second electrode flow channel for the first electrode flow channel. By adjusting the position and number of the first inlets / outlets, the performance of the multi-parameter sensor can be optimized to meet specific application requirements.

[0029] Preferably, the positions and numbers of the above-mentioned first inlets / outlets and second inlets / outlets can be defined according to actual application requirements to ensure the best performance and adaptability of the multi-parameter sensor.

[0030] In summary, according to the technical solution provided by the embodiment of the present invention, by providing a first electrode flow channel and a second electrode flow channel filled with liquid metal in the flow channel layer, the area where the first electrode flow channel and the second electrode flow channel are arranged in parallel constitutes the temperature-strain measurement area, while the area where the first electrode flow channel is arranged alone constitutes the pressure measurement area. It can simultaneously measure three physical quantities, namely temperature, strain, and pressure, realizing the measurement of multiple parameters. Compared with a dual-parameter sensor that requires integrating multiple measurement units or utilizing the multifunctional characteristics of materials, the structure is simplified and the manufacturing cost is reduced.

[0031] Furthermore, the multi-parameter sensor further includes an anti-stretching film layer 3, which can be provided below the base layer 1 or above the flow channel layer 2, or both below the base layer 1 and above the flow channel layer 2. And the anti-stretching film layer 3 only covers the range of the pressure measurement area. When measuring strain and pressure simultaneously, the temperature-strain measurement area may deform due to temperature and strain changes. Without the protection of the anti-stretching film layer 3, this deformation may be transmitted to the pressure measurement area, resulting in inaccurate pressure measurement. The function of the anti-stretching film layer 3 is to isolate this deformation, ensuring that the deformation of the pressure measurement area is only caused by external pressure, thereby improving the measurement accuracy.

[0032] In summary, according to the technical solution provided by the embodiment of the present disclosure, by providing an anti-stretching film layer below the base layer and / or above the flow channel layer within the range of the pressure measurement area, additional protection and support are provided for the multi-parameter sensor to ensure that the accuracy of pressure measurement is not affected by the deformation of the temperature-strain measurement area when the multi-parameter sensor measures strain and pressure simultaneously. This design enables the multi-parameter sensor to provide accurate and reliable measurement results under complex environmental conditions.

[0033] Furthermore, the base layer, the flow channel layer, and the anti-stretching film layer are all flexible film structures.

[0034] Among them, the manufacturing materials of the flow channel layer 2 and the base layer 1 are inner flexible silicone materials, including but not limited to polydimethylsiloxane (PDMS), Eco-flex, human silicone, etc. The anti-stretching film 3 is a flexible film material with a low elongation rate, including but not limited to polyethylene terephthalate (PET) film, polyimide (PI) film, polytetrafluoroethylene (PTFE) film, polyvinyl chloride (PVC) film, ethylene-tetrafluoroethylene copolymer (ETFE) film, polycarbonate (PC) film, etc.

[0035] Preferably, the total thickness of the base layer 1, the flow channel layer 2, and the anti-stretching film layer 3 is less than 2 mm, which helps to ensure the flexibility of the multi-parameter sensor, so that the minimum bending radius that the multi-parameter sensor should be able to reach is not greater than 10 mm.

[0036] In summary, according to the technical solution provided by the embodiment of the present invention, the base layer, the flow channel layer, and the anti-stretching film layer of the multi-parameter sensor of the present application are all flexible film structures, making the multi-parameter sensor have excellent flexibility, being more adaptable to various complex application scenarios, and being able to solve the problem that traditional rigid sensors are difficult to be used on complex curved surfaces due to their rigid structures, which limits their application in wearable devices.

[0037] Furthermore, the thickness of the flow channel layer 2 exceeds the depth of the first electrode flow channel 4 and the second electrode flow channel 5 in the direction perpendicular to the plane of the flow channel layer by more than 40 μm.

[0038] Specifically, setting the thickness of the flow channel layer 2 to be at least 40 μm higher than the depth of the first electrode flow channel 4 and the second electrode flow channel 5 in the direction perpendicular to the plane of the flow channel layer can ensure the structural integrity of the first electrode flow channel and the second electrode flow channel, and prevent the flow channel from deforming or cracking when subjected to external forces.

[0039] Furthermore, the spacing between the parallel first electrode flow channel 4 and the second electrode flow channel 5 is in the micron order, and the spacing is evenly distributed.

[0040] Specifically, inside the flow channel layer 2, a part of the first electrode flow channel 4 is arranged in parallel with the second electrode flow channel 5. The spacing between the parallel first electrode flow channel 4 and the second electrode flow channel 5 is on the order of micrometers, and the spacing is evenly distributed. The even distribution can ensure that in the temperature-strain measurement area, the environmental conditions and response characteristics of each measurement point of the first electrode flow channel 4 and the second electrode flow channel 5 are as consistent as possible. This helps to reduce the measurement error caused by uneven spacing of the measurement points, thereby improving the measurement accuracy of the entire sensor. Using an even spacing setting can simplify the manufacturing and calibration processes of the sensor. Manufacturers can more easily control the spacing and arrangement of the electrode flow channels, thereby reducing production costs and improving production efficiency. At the same time, the even spacing design also makes the calibration process simpler and more straightforward, helping to ensure the accuracy and consistency of the sensor.

[0041] Furthermore, the first electrode flow channel 4 and the second electrode flow channel 5 can be arranged in various ways, including but not limited to parallel straight lines, grid-like, spiral, comb-like structures, and serpentine bends. These arrangement methods have their own advantages and disadvantages and are suitable for different application scenarios.

[0042] Preferably, the first electrode flow channel and the second electrode flow channel are arranged in a comb-like structure or a serpentine bend. By arranging the first electrode flow channel and the second electrode flow channel in a comb-like structure or a serpentine bend within the fixed flow channel layer 2, the lengths of the first electrode flow channel forming the electrode and the second electrode flow channel forming the electrode can be increased, thereby improving the accuracy of the measured resistance / capacitance.

[0043] Interference will occur between different measurement units of existing dual-parameter sensors, which will further cause large errors in the measurement of the two parameters due to mutual interference during the measurement process. Even if different physical principles and sensing materials are selected to make dual-parameter sensors, it is still difficult to solve the problem of mutual interference between the two parameters, which leads to a decrease in the measurement accuracy of existing dual-parameter sensors. Based on the above technical problems, the present invention also provides a multi-parameter measurement method. Figure 2 It is one of the flow schematic diagrams of the multi-parameter measurement method provided by the present invention.

[0044] As Figure 2 shown, the multi-parameter measurement method provided by the embodiments of the present invention uses the multi-parameter sensor described above for multi-parameter measurement. Specifically, the multi-parameter measurement method includes the following steps: Step 201: In the temperature-strain measurement area, a first capacitor is formed between the first electrode flow channel and the second electrode flow channel through the flow channel layer. Select any one of the first electrode flow channel or the second electrode flow channel, and measure the first resistance of the electrode flow channel through its corresponding first inlet or second inlet. Measure the first capacitor through the first inlet of the first electrode flow channel and the second inlet of the second electrode flow channel.

[0045] In an embodiment of the present invention, the temperature-strain measurement area is a specific area in the multi-parameter sensor, designed to measure temperature and strain simultaneously. The first resistance describes the resistance value of the first electrode flow channel or the second electrode flow channel filled with liquid metal in the temperature-strain measurement area to form an independent electrode. The first capacitance describes the capacitance value formed between the first electrode flow channel and the second electrode flow channel filled with liquid metal in the temperature-strain measurement area through the flow channel layer. Among them, in the temperature-strain measurement area where the first electrode flow channel and the second electrode flow channel are arranged in parallel, any one of the first electrode flow channel and the second electrode flow channel is selected, and the first resistance of the corresponding electrode flow channel is measured through the first entrance and exit of the arbitrarily selected first electrode flow channel or the second entrance and exit of the second electrode flow channel, and the first capacitance formed between the first electrode flow channel and the second electrode flow channel through the flow channel layer is measured through the first entrance and exit of the first electrode flow channel and the second entrance and exit of the second electrode flow channel.

[0046] Step 202: In the pressure measurement area, measure the second resistance of the second electrode flow channel through the second entrance and exit of the second electrode flow channel.

[0047] In an embodiment of the present invention, the second resistance describes the resistance value of the second electrode flow channel filled with liquid metal in the pressure measurement area to form an independent electrode. In the pressure measurement area, measure the second resistance of the second electrode flow channel through the second entrance and exit of the independently arranged second electrode flow channel.

[0048] Step 203: Based on the mapping relationship between the first resistance and the current temperature and current strain, the mapping relationship between the first capacitance and the current temperature and current strain, and the mapping relationship between the second resistance and the current pressure and current temperature, determine the current temperature, current strain, and current pressure measured by the multi-parameter sensor.

[0049] In an embodiment of the present invention, the "mapping relationship" refers to the quantitative relationship between the output signal (such as resistance or capacitance value) of the multi-parameter sensor and the measured physical quantity (such as current temperature, current strain, current pressure). This relationship can be obtained through experimental calibration, theoretical calculation, or data fitting. By combining the above mapping relationships and using the measured first resistance, first capacitance, and second resistance, the current temperature, current strain, and current pressure are deduced inversely.

[0050] In summary, according to the technical solution provided by the embodiments of the present invention, a first electrode flow channel and a second electrode flow channel filled with liquid metal are provided in the flow channel layer. By measuring the resistance (the first resistance and the second resistance) and capacitance (the first capacitance) of the electrode flow channels and combining the mapping relationship, it is possible to simultaneously measure the temperature (the current temperature), strain (the current strain), and pressure (the current pressure). This synchronous measurement method not only improves the measurement efficiency but also eliminates the possible mutual interference problem between different measurement units in the traditional dual-parameter sensor, thereby achieving accurate measurement of temperature, strain, and pressure.

[0051] The above-mentioned first resistance, second resistance, and first capacitance are the resistance and capacitance when the multi-parameter sensor simultaneously measures the current temperature, current strain, and current pressure. Among them, the current temperature, current pressure, and current strain are all physical quantities measured by the multi-parameter sensor for the object to be measured, that is, the measured parameters.

[0052] Figure 3 It is the second schematic flow chart of the multi-parameter measurement method provided by the present invention.

[0053] As Figure 3 shown, the multi-parameter measurement method provided by the embodiments of the present invention determines the current temperature, current strain, and current pressure measured by the multi-parameter sensor based on the mapping relationship between the first resistance and the current temperature and current strain, the mapping relationship between the first capacitance and the current temperature and current strain, and the mapping relationship between the second resistance and the current pressure and current temperature, including: Step 301: Obtain the initial first resistance corresponding to the first resistance, the initial first capacitance corresponding to the first capacitance, the initial second resistance corresponding to the second resistance, and the initial temperature corresponding to the initial first resistance and the initial strain corresponding to the initial first capacitance.

[0054] In an embodiment of the present invention, the initial first resistance refers to the resistance value of the first electrode flow channel or the second electrode flow channel in the temperature-strain measurement area under the initial state (such as room temperature conditions). This initial value is the reference for subsequent measurement of temperature and strain changes. The initial first resistance can be obtained by selecting any one of the first electrode flow channel or the second electrode flow channel in the temperature-strain measurement area and measuring the resistance value using its corresponding first inlet and outlet or second inlet and outlet (i.e., the initial first resistance). The initial first capacitance refers to the capacitance value formed between the first electrode flow channel and the second electrode flow channel through the flow channel layer in the temperature-strain measurement area under the initial state. This initial value is the reference for subsequent measurement of temperature and strain changes. The initial first capacitance can be obtained by measuring the capacitance value using the first inlet and outlet of the first electrode flow channel and the second inlet and outlet of the second electrode flow channel in the temperature-strain measurement area (i.e., the initial first capacitance). The initial second resistance refers to the resistance value of the second electrode flow channel in the pressure measurement area under the initial state. This initial value is the reference for subsequent measurement of pressure changes. The initial second resistance can be obtained by measuring the resistance value using the second inlet and outlet of the second electrode flow channel in the pressure measurement area (i.e., the initial second resistance). The initial temperature refers to the temperature value corresponding to the initial resistance in the temperature-strain measurement area. The initial strain refers to the strain value corresponding to the initial first capacitance in the temperature-strain measurement area.

[0055] Exemplarily, the initial temperature can be selected as room temperature, and the initial strain and initial pressure can be selected as 0.

[0056] Step 302: Determine the current temperature and the current strain based on the initial first resistance, the first resistance, the initial first capacitance, the first capacitance, the initial temperature, and the initial strain.

[0057] In an embodiment of the present invention, the initial first resistance, the first resistance, the initial capacitance, the current capacitance, the initial temperature, and the initial strain are used to determine the current temperature and the current strain. This process is based on the mapping relationship between the first resistance and the first capacitance and the current temperature and the current strain. This design not only improves the measurement accuracy but also simplifies the measurement process, making it more efficient and reliable.

[0058] Exemplarily, when the measured physical quantities (i.e., parameters) are the current strain and the current temperature, in the temperature-strain measurement area, the changes in temperature and strain will affect the resistance and capacitance of the electrodes mutually. At this time, the current temperature and the current strain can be decoupled and calculated from the measured first resistance and first capacitance through the following relationships: Formula 1; Formula 2; Wherein, is the current temperature, is the initial temperature, is the first resistance, is the initial first resistor, is the current strain, is the initial strain, is the first capacitor, is the initial first capacitor, is the temperature sensing ability of the resistor, is the strain sensing ability of the capacitor, is the strain sensing ability of the resistor, is the temperature sensing ability of the capacitor, can be obtained respectively according to the material properties of the multi-parameter sensor.

[0059] Step 303: Determine the current pressure based on the initial second resistor, the second resistor, and the current temperature.

[0060] In an embodiment of the present invention, the initial second resistor, the second resistor, and the current temperature are used to determine the current pressure. This process can be based on the mapping relationship between the second resistor and the current pressure and the current temperature.

[0061] Exemplarily, after obtaining the current temperature in the manner of step S302, the current pressure can be calculated by the following formula using the initial second resistor, the second resistor, and the current temperature.

[0062] Formula 3; Formula 4; is the current pressure, is the current temperature, is the initial temperature, is the second resistor, is the initial second resistor, is the temperature sensing ability of the resistor, E is the elastic modulus of the multi-parameter sensor material, and E and can be obtained respectively according to the material properties of the multi-parameter sensor.

[0063] In summary, according to the technical solution provided by the embodiment of the present invention, by using the mapping relationship between the changes in resistance and capacitance and temperature, strain, and pressure, through a decoupling method, that is, separating the influences of temperature, strain, and pressure from the measured resistance and capacitance values, the simultaneous measurement of multiple parameters such as temperature, strain, and pressure is achieved, thereby realizing the accurate measurement of temperature, strain, and pressure.

[0064] Furthermore, the above Formula 1 and Formula 2 are also applicable to the simultaneous measurement of the current temperature and the current strain.

[0065] Furthermore, when simultaneously measuring the current temperature and the current pressure, the multi-parameter measurement method further includes: In the temperature-strain measurement area, the first capacitance formed between the first electrode channel and the second electrode channel through the channel layer is measured through the first inlet / outlet of the first electrode channel and the second inlet / outlet of the second electrode channel. In the pressure measurement area, the second resistance of the second electrode channel is measured through the second inlet / outlet of the second electrode channel. Based on the mapping relationship between the first capacitance and the current temperature, the current temperature measured by the multi-parameter sensor is determined. Based on the mapping relationship between the second resistance and the current temperature and the current pressure, the current pressure measured by the multi-parameter sensor is determined.

[0066] Specifically, in the temperature-strain measurement area, the first capacitance formed between the first electrode channel and the second electrode channel through the channel layer is measured through the first inlet / outlet of the first electrode channel or the second inlet / outlet of the second electrode channel. In the pressure measurement area, the second resistance of the second electrode channel is measured through the second inlet / outlet of the second electrode channel. According to the mapping relationship between the first capacitance and the current temperature, the current temperature measured by the multi-parameter sensor is determined. Then, based on the measured second resistance and the obtained current temperature, the current pressure measured by the multi-parameter sensor is determined.

[0067] Exemplarily, when measuring the current temperature and the current pressure simultaneously, the resistance is affected by temperature and pressure. The current temperature and the current strain can be decoupled and calculated from the measured resistance and capacitance through the following relationships.

[0068] Formula 3; Formula 4; Formula 5; Wherein, is the current temperature, is the initial temperature, is the second resistance, is the initial second resistance, C is the first capacitance, C 0 is the initial first capacitance, is the sensitivity of the resistance to temperature, E is the elastic modulus of the multi-parameter sensor material, is the sensitivity of the capacitance to temperature, 、E and can be obtained according to the material properties of the multi-parameter sensor respectively.

[0069] Exemplarily, when the measured physical quantity is only temperature, the following relational formula can be used to calculate the current temperature.

[0070] Formula 6; Wherein, is the current temperature, is the initial temperature, is the first resistor, is the initial first resistor, is the sensing ability of the resistor to temperature, which can be obtained according to the material properties of multi-parameter sensing.

[0071] Exemplarily, when the measured physical quantity is only strain, the following relational formula can be used to calculate the current strain: Formula 7; is the current strain, is the initial strain, is the first capacitor, is the initial first capacitor, is the sensing ability of the capacitor to strain, which can be obtained according to the material properties of multi-parameter sensing.

[0072] Exemplarily, when the measured physical quantity is only pressure, the following relational formula can be used to calculate the current pressure: Formula 8; , is the current pressure, is the second resistor, is the initial second resistor, is the elastic modulus of the multi-parameter sensor material, and E can be obtained according to the material properties of multi-parameter sensing.

[0073] In summary, according to the technical solution provided by the embodiments of the present invention, by using specific electrode channels and inlets and outlets for measurement in different measurement regions and combining the properties of the sensor material, the present invention not only eliminates the possible mutual interference problem between different measurement units in the traditional dual-parameter sensor but also can accurately determine temperature, strain, and pressure, improving the measurement accuracy of the sensor.

[0074] To illustrate in detail the multi-parameter sensor and multi-parameter measurement method provided by the present invention, reference is made to Figure 4 and Figure 5 .

[0075] Example 1: Referring to Figure 4 , Figure 4 is a top view schematic diagram of the multi-parameter sensor provided by Embodiment 1 of the present invention.

[0076] The multi-parameter sensor provided in this embodiment, which can realize parallel measurement of temperature, strain and pressure, includes a base layer 1, a flow channel layer 2, and an anti-stretching film 3. Among them, the flow channel layer 2 includes a first electrode flow channel 4 and a second electrode flow channel 5 arranged inside. Both the first electrode flow channel 4 and the second electrode flow channel 5 are filled with liquid metal. The first electrode flow channel 4 and the second electrode flow channel 5 are arranged in a serpentine bending pattern.

[0077] Among them, the first electrode flow channel 4 is longer than the second electrode flow channel 5, and the overlapping part of the two is the temperature-strain measurement area, and the separate part of the first electrode flow channel 4 is the pressure measurement area. The anti-stretching film 3 is below the base layer 1 and only covers the pressure measurement area.

[0078] In the first embodiment, the first electrode flow channel 4 has three first inlets and outlets (401, 402, 403), where 401 and 403 are located at both ends of the first electrode flow channel, and 402 is located at the end of the second electrode flow channel. The second electrode flow channel 5 has two second inlets and outlets (501, 502) at both ends of the second electrode flow channel.

[0079] The method for measuring multi-parameters using the multi-parameter sensor of the first embodiment is as follows: During measurement, the first electrode flow channel is used as the main temperature sensor, and the first resistance measured through the first inlets and outlets 401 and 402 of the first electrode flow channel is denoted as ; The first electrode flow channel including the first inlets and outlets (401, 402) and the second electrode flow channel including the second inlets and outlets (501, 502) are used as the stretching sensor, and the first capacitance measured between any one of the inlets and outlets in the first electrode flow channel and the second electrode flow channel, such as 401 and 501, 402 and 502, 401 and 502, 402 and 501, etc., is denoted as ; The first electrode flow channel including the first inlets and outlets (402 and 403) is used as the pressure sensor, and the resistance signal measured through the first inlets and outlets 402 and 403 is denoted as .

[0080] Obtain the initial first resistance, initial first capacitance and initial second resistance, and record them as , and ; At the same time, the initial temperature is recorded as , and the initial strain is recorded as . Decouple the strain and temperature according to the following formula to obtain the current temperature and the current strain : Then, the decoupled current temperature Substitute into the following formula to obtain the current pressure : where T is the current temperature, T 0 is the initial temperature, R is the first resistance, R 0 is the initial first resistance, is the current strain, is the initial strain, C is the first capacitance, is the initial first capacitance, is the sensing ability of the resistance to temperature, is the sensing ability of the capacitance to strain, is the sensing ability of the resistance to strain, is the sensing ability of the capacitance to temperature, can be obtained respectively according to the material properties of the multi-parameter sensor.

[0081] Embodiment 2: Refer to Figure 5 , Figure 5 which is a top view schematic diagram of the multi-parameter sensor provided in Embodiment 2 of the present invention.

[0082] Compared with Embodiment 1, the main difference in this embodiment is that the anti-stretching film 3 only covers the pressure measurement areas (301 and 302) above the flow channel layer 2 and below the base layer 1. The first electrode flow channel 4 has four first inlets and outlets, which are respectively located at both ends (401, 404) of the first electrode flow channel 4 and in the middle (402, 403) of the first electrode flow channel 4, and the two middle first inlets and outlets are in a bifurcated structure. The second electrode flow channel 5 has four second inlets and outlets, which are respectively located at both ends of the second electrode flow channel 5 (one end 501 and 502, the other end 503 and 504), and are all in a bifurcated structure.

[0083] The measurement method of this embodiment is as follows: During measurement, using the second inlets and outlets (501, 502, 503, 504) as the temperature sensor, the first resistance measured through any second inlet and outlet at one end of the second electrode flow channel 5 (one of 501 and 502, or one of 503 and 504, taking 501 as an example here) and any second inlet and outlet at the other end (if 501 has been selected at one end first, then any one of 503 and 504 can be selected here, taking 503 as an example here) is denoted as ; the first capacitance measured through one of the remaining two second inlets and outlets of the second electrode flow channel (502 and 504 in this example) and 401 of the first electrode flow channel, and any one of the first inlets and outlets 402 or 403 (taking 402 as an example here) is denoted as ; the second resistance measured through the first inlets and outlets 403 and 404 of the first electrode flow channel is denoted as .

[0084] In the same manner as in the first embodiment, the current temperature, current strain, and current pressure measured by the multi-parameter sensor are calculated and obtained.

[0085] Figure 6 An example of a schematic physical structure diagram of an electronic device is shown as Figure 6 shown. The electronic device may include: a processor 610, a communication interface 620, a memory 630, and a communication bus 640. Among them, the processor 610, the communication interface 620, and the memory 630 complete mutual communication through the communication bus 640. The processor 610 can call the logical instructions in the memory 630 to execute the above multi-parameter measurement method.

[0086] In addition, when the logical instructions in the above-mentioned memory 630 are implemented in the form of a software functional unit and sold or used as an independent product, they can be stored in a computer-readable storage medium. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or a part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of the present invention. The foregoing storage medium includes: various media such as a USB flash drive, a mobile hard disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a magnetic disk, or an optical disc that can store program codes.

[0087] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. A person of ordinary skill in the art can understand and implement it without creative labor.

[0088] Through the description of the above embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on such an understanding, the essence of the above technical solution, or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0089] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-parameter sensor, characterized in that: include: Basal layer; A flow channel layer is arranged on the base layer, wherein a first electrode flow channel and a second electrode flow channel are arranged inside the flow channel layer, wherein the first electrode flow channel and the second electrode flow channel are filled with liquid metal, wherein the first electrode flow channel and the second electrode flow channel are arranged in parallel in a temperature-strain measurement area of ​​the flow channel layer, and wherein the first electrode flow channel is arranged alone in a pressure measurement area of ​​the flow channel layer; The first electrode flow channel is provided with at least three first inlets and outlets, and the second electrode flow channel is provided with at least two second inlets and outlets, and each of the first inlets and outlets and each of the second inlets and outlets are provided on the flow channel layer; Wherein, in the temperature-strain measurement area, at least two of the first inlets and outlets of the first electrode flow channel and at least two of the second inlets and outlets of the second electrode flow channel are arranged adjacent to or alternately.

2. The multi-parameter sensor according to claim 1, characterized in that: Also includes: The anti-stretching film layer is arranged below the base layer and / or above the flow channel layer, and covers the range of the pressure measuring area.

3. The multi-parameter sensor according to claim 2, characterized in that: The base layer, the flow channel layer and the anti-stretching film layer are all flexible film structures, and the total thickness of the base layer, the flow channel layer and the anti-stretching film layer is less than 2 mm.

4. The multi-parameter sensor according to claim 3, characterized in that: The thickness of the channel layer exceeds the depth of the first electrode channel and the second electrode channel in a direction perpendicular to the plane of the channel layer by more than 40 μm.

5. The multi-parameter sensor according to claim 3, characterized in that: The spacing between the first electrode flow channel and the second electrode flow channel arranged in parallel is in the micrometer order, and the spacing is distributed at equal intervals.

6. The multi-parameter sensor according to claim 3, characterized in that: The first electrode flow channel and the second electrode flow channel are arranged in a comb-tooth structure or a serpentine shape.

7. A multi-parameter measurement method, characterized in that: Using the multi-parameter sensor according to any one of claims 1 to 6 to perform multi-parameter measurement; The multi-parameter measurement method comprises: In the temperature-strain measurement area, a first capacitor is formed between the first electrode flow channel and the second electrode flow channel through the flow channel layer, any one of the first electrode flow channel or the second electrode flow channel is selected, and the first resistance of the electrode flow channel is measured through the corresponding first inlet and outlet or the second inlet and outlet, and the first capacitor is measured through the first inlet and outlet of the first electrode flow channel and the second inlet and outlet of the second electrode flow channel; In the pressure measurement area, measuring a second resistance of the second electrode flow channel through a second inlet and outlet of the second electrode flow channel; Based on the mapping relationship between the first resistor and the current temperature and the current strain, the mapping relationship between the first capacitor and the current temperature and the current strain, and the mapping relationship between the second resistor and the current pressure and the current temperature, the current temperature, the current strain and the current pressure measured by the multi-parameter sensor are determined.

8. The multi-parameter measurement method according to claim 7, characterized in that: The determining the current temperature, the current strain, and the current pressure measured by the multi-parameter sensor based on the mapping relationship between the first resistor and the current temperature and the current strain, the mapping relationship between the first capacitor and the current temperature and the current strain, and the mapping relationship between the second resistor and the current pressure and the current temperature includes: Obtaining an initial first resistance corresponding to the first resistance, an initial first capacitance corresponding to the first capacitance, an initial second resistance corresponding to the second resistance, an initial temperature corresponding to the initial first resistance, and an initial strain corresponding to the initial first capacitance; determining the current temperature and the current strain based on the initial first resistance, the first resistance, the initial first capacitance, the first capacitance, the initial temperature, and the initial strain; The current pressure is determined based on the initial second resistance, the second resistance, the initial temperature, and the current temperature.

9. The multi-parameter measurement method according to claim 7, characterized in that: When the current temperature and the current pressure are measured simultaneously, the multi-parameter measurement method further includes: In the temperature-strain measurement area, measuring a first capacitance formed by the flow channel layer between the first electrode flow channel and the second electrode flow channel through a first inlet and outlet of the first electrode flow channel and a second inlet and outlet of the second electrode flow channel; In the pressure measurement area, measuring a second resistance of the second electrode flow channel through a second inlet and outlet of the second electrode flow channel; Determine the current temperature measured by the multi-parameter sensor based on a mapping relationship between the first capacitance and the current temperature; The current pressure measured by the multi-parameter sensor is determined based on a mapping relationship between the second resistor and the current temperature and the current pressure.

10. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein: When the processor executes the computer program, the multi-parameter measurement method according to any one of claims 7 to 9 is implemented.

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