Vacuumizing device and polycrystalline silicon coral material water quenching crushing method and system

Abstract

The invention discloses a vacuumizing device, a polycrystalline silicon coral material water-quenching crushing method and a polycrystalline silicon coral material water-quenching crushing system, relates to the technical field of polycrystalline silicon production, and mainly aims at removing water residues in a water-quenched polycrystalline silicon coral material and ensuring the quality of a polycrystalline silicon packaging finished product. The main technical scheme of the invention is as follows: the water quenching crushing method for the polycrystalline silicon coral material comprises the following steps: step 1, heating a coral material rod to 400-450 DEG C; 2, the heated coral charge bar is immersed in pure water to be quenched, and the water outlet temperature of the coral charge bar is controlled to be 100-120 DEG C; 3, the quenched coral charge bar is put into a closed cavity, and the closed cavity is vacuumized; and 4, mechanically crushing, screening and packaging the vacuumized coral charge bar.

Description

Technical Field

[0001] The present invention relates to the technical field of polysilicon production, and in particular to a vacuum pumping device, a method and a system for water quenching and crushing polysilicon coral material. Background Art

[0002] Polysilicon is the basic raw material for solar cells and integrated circuits. To produce polysilicon, the improved Siemens process is mainly used. The final product of this production method is rod-shaped polysilicon deposited by chemical vapor deposition in a reduction furnace. However, according to actual needs, the rod-shaped polysilicon generally needs to be crushed into lump polysilicon. Previously, most of the rod-shaped polysilicon was crushed manually. With the sharp increase in polysilicon production capacity, not only does it lead to an excessive number of personnel for crushing and packaging, increasing the crushing cost, but also it is difficult to guarantee the product quality of polysilicon. Often, unknown impurities are introduced into the high-purity polysilicon product, reducing the quality of the polysilicon product.

[0003] At present, the process method of silicon material crushing has developed from the previous crushing forms such as manual crushing, jaw crushing, and roll crushing to the current water quenching and crushing.

[0004] However, there is also a kind of coral material in silicon material, that is, during the production process of the silicon rod itself, there are internal looseness and large cracks, which are prone to infiltrate more pure water, making it difficult for the moisture to volatilize. As a result, there is a large amount of water vapor in the product during the packaging process, affecting the product quality, or the situation where the silicon material temperature is too high to be packaged. Summary of the Invention

[0005] In view of this, the present invention provides a vacuum pumping device, a method and a system for water quenching and crushing polysilicon coral material, and the main purpose is to remove the residual moisture in the water quenched polysilicon coral material and ensure the quality of the packaged polysilicon finished product.

[0006] To achieve the above object, the present invention mainly provides the following technical solutions:

[0007] On the one hand, the present invention provides a method for water quenching and crushing polysilicon coral material, and the method includes the following steps:

[0008] Step 1, heating the coral material rod to 400 - 450 °C;

[0009] Step 2, immersing the heated coral material rod in pure water for rapid cooling, and controlling the outlet water temperature of the coral material rod at 100 - 120 °C;

[0010] Step 3, putting the rapidly cooled coral material rod into a closed chamber and pumping the closed chamber to vacuum;

[0011] Step 4, mechanically crushing, screening and packaging the coral material rod after vacuum pumping.

[0012] The object of the present invention and the technical problems to be solved can be further realized by the following technical measures.

[0013] Optionally, in the first step, it takes 30 - 35 minutes for the coral material rod to be preheated to complete heating.

[0014] Optionally, in the second step, it is quenched in pure water below 20°C, and the cooling time is 10 - 15 seconds.

[0015] Optionally, in the third step, the closed chamber is evacuated for 18 - 23 seconds, so that the vacuum degree of the closed chamber reaches 90 - 100 Pa.

[0016] Optionally, in the fourth step, when crushing the coral material rod, the surface temperature of the coral material rod is controlled at 60 - 70°C.

[0017] Optionally, in the fourth step, the packaging temperature of the coral material is controlled to be less than 40°C.

[0018] On the other hand, the present invention also provides a vacuum pumping device, which includes: a support frame and a lifting mechanism;

[0019] The upper part of the support frame is equipped with a closed chamber, the upper end of the closed chamber is connected to a vacuum pump, the lower end of the closed chamber is provided with an opening, and the support frame below the closed chamber is fixedly connected to a bearing platform;

[0020] The lifting mechanism includes a driving gear, a rack and a sealing plate. The driving gear is rotatably connected to the bearing platform, the rack is slidably connected to the bearing platform through a guide rail, the driving gear meshes with the rack, the upper end of the rack is fixedly connected to the sealing plate, and the upper surface of the sealing plate is fixedly connected to a limiting groove body for placing the coral material rod, and the sealing plate fits the opening.

[0021] Optionally, it further includes two guide rods, the two guide rods are respectively arranged on both sides of the rack, the upper ends of the guide rods are fixedly connected to the sealing plate, and the guide rods are slidably connected to the bearing platform.

[0022] Optionally, a plurality of through holes are evenly distributed on the groove wall of the limiting groove body.

[0023] On the other hand, the present invention also provides a polysilicon coral material water quenching and crushing system, which includes: a heating device, a water cooling device, the aforementioned vacuum pumping device and a crushing and packaging device arranged in sequence.

[0024] By means of the above technical solutions, the present invention has at least the following advantages:

[0025] The application document with application number CN116673108A mentioned that when heating the polysilicon rods, the temperature is raised to 500-800°C and maintained for 10-20 minutes. However, if the temperature of the polysilicon rods is too high, there is a risk of ignition, and the subsequent cooling time is too long, resulting in low production capacity. In the present application, the coral material rods are heated to 400-450°C, and the subsequent cooling time is relatively short, thus avoiding low production capacity.

[0026] Since the internal structure of coral rods is relatively loose and there are many internal cracks, the internal moisture cannot evaporate under the ordinary water quenching process, resulting in more moisture in the finished product packaging during the packaging process, which is unacceptable to downstream customers. This coral material processing process successfully solved the water vapor problem.

[0027] This coral material processing technology replaces the original single crusher crushing form of coral material through water quenching, vacuuming and crushing. The proportion of worthless powder has dropped by 2-4% from the original basis, greatly reducing the loss in the production process and reducing production costs.

[0028] This coral material processing process quickly extracts the water vapor from the loose parts of the coral material through vacuuming, and at the same time the temperature of the silicon material drops rapidly. The entire cycle is controlled within 60-65 seconds, ensuring the production capacity of the coral material in the automatic packaging process, which is not less than 2.5 tons / hour. The normal production capacity task is guaranteed. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A schematic diagram of the steps of a method for water quenching and crushing polycrystalline silicon coral material provided by an embodiment of the present invention;

[0030] Figure 2 A schematic diagram of the structure of a polycrystalline silicon coral material water quenching and crushing system provided in an embodiment of the present invention;

[0031] Figure 3 A schematic structural diagram of a vacuum pumping device provided in an embodiment of the present invention;

[0032] Figure 4 for Figure 3 Enlarged view of part A.

[0033] The figure marks in the drawings of the specification include: support frame 1, closed chamber 2, opening 3, bearing platform 4, rack 5, sealing plate 6, guide rail 7, limiting groove 8, coral material rod 9, stepper motor 10, guide rod 11, through hole 12, loading section 13, heating furnace 14, water cooling device 15, manipulator 16, vacuum tube 17. DETAILED DESCRIPTION

[0034] To further illustrate the technical means and effects adopted by the present invention to achieve the intended invention purpose, the following will, in conjunction with the accompanying drawings and preferred embodiments, elaborate in detail on the specific implementation manners, structures, features, and their effects of the application according to the present invention. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. In addition, the specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0035] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0036] As Figure 1 shown, on the one hand, a method for water quenching and crushing polysilicon coral material provided by an embodiment of the present invention includes the following steps:

[0037] Step 1: Heat the coral material rod 9 to 400 - 450 °C;

[0038] Step 2: Immerse the heated coral material rod 9 in pure water for rapid cooling, and control the water outlet temperature of the coral material rod 9 to be 100 - 120 °C;

[0039] Step 3: Put the rapidly cooled coral material rod 9 into the closed chamber 2, and evacuate the closed chamber 2;

[0040] Step 4: Mechanically crush, screen, and package the evacuated coral material rod 9.

[0041] In the specific implementation manner, in Step 1, it takes 30 - 35 min for the coral material rod 9 to be preheated to complete heating.

[0042] In the specific implementation manner, in Step 2, it is rapidly cooled in pure water below 20 °C, and the cooling time is 10 - 15 s.

[0043] In the specific implementation manner, in Step 3, evacuate the closed chamber 2 for 18 - 23 s, so that the vacuum degree of the closed chamber 2 reaches 90 - 100 Pa.

[0044] In the specific implementation manner, in Step 4, when crushing the coral material rod 9, control the surface temperature of the coral material rod 9 to be 60 - 70 °C.

[0045] In the specific implementation manner, in Step 4, control the packaging temperature of the coral material to be less than 40 °C.

[0046] Specifically, initially, the coral material rod 9 is heated to 400 - 450 °C, then rapidly cooled with pure water to 100 - 120 °C, and then evacuated in the sealed chamber 2. The air pressure in the sealed chamber 2 is continuously less than the standard atmospheric pressure. The temperature of the water in the cracks of the coral material in the sealed chamber 2 remains above the boiling point, enabling the water in the cracks to be rapidly vaporized and extracted. Therefore, the time required for the above process is not very long, taking into account both the finished product quality and production efficiency of the coral material.

[0047] Moreover, with the heat absorption during water vaporization, the temperature of the coral material rod 9 can also rapidly decrease. When the coral material rod 9 is broken, its temperature naturally drops to 60 - 70 °C.

[0048] Specifically, by controlling and adjusting the heating temperature of the coral material during the water quenching process and using the method of evacuating the vacuum, the problem of excessive water content during the process of water quenching and breaking the coral material is solved. At the same time, the temperature control of this method enables the cooling rate of the coral material to meet the production capacity requirements of the finished product.

[0049] Such as Figure 2 、 Figure 3 and Figure 4 As shown, on the other hand, another embodiment of the present invention further provides a vacuum pumping device, which includes: a support frame 1 and a lifting mechanism;

[0050] The upper part of the support frame 1 is installed with a sealed chamber 2. The upper end of the sealed chamber 2 is connected to a vacuum pump. The lower end of the sealed chamber 2 is provided with an opening 3. The support frame 1 below the sealed chamber 2 is fixedly connected to a bearing platform 4;

[0051] The lifting mechanism includes a driving gear, a rack 5 and a sealing plate 6. The driving gear is rotatably connected to the bearing platform 4. The rack 5 is slidably connected to the bearing platform 4 through a guide rail 7. The driving gear meshes with the rack 5. The upper end of the rack 5 is fixedly connected to the sealing plate 6. The upper surface of the sealing plate 6 is fixedly connected to a limit groove body 8 for placing the coral material rod 9. The sealing plate 6 fits with the opening 3.

[0052] In this embodiment, specifically, after the pure water rapid cooling of the coral material rod 9 is completed, the manipulator 16 grabs the coral material rod 9 and places it into the limit groove body 8. Then, the driving gear is started. The driving gear drives the rack 5 to rise. The rack 5 drives the sealing plate 6 to rise. The sealing plate 6 and the opening 3 are docked, so that the lower end opening 3 of the sealed chamber 2 is sealed. At this time, the vacuum pump is started to extract the air in the sealed chamber 2, enabling the water in the cracks of the coral material rod 9 to be rapidly vaporized and evacuated from the sealed chamber 2;

[0053] About 20 s after the vacuum pump is started, the driving gear is started in the reverse direction. The rack 5 drives the sealing plate 6 to descend to the bearing platform 4, and the manipulator 16 then moves the coral material rod to the subsequent breaking process.

[0054] Specifically, it further includes a stepper motor 10. The stepper motor 10 is fixedly installed on the bearing platform 4. The output shaft of the stepper motor 10 is coaxially connected to the driving gear. By adjusting the stepping angle of the stepper motor 10 through the controller, the rotation angle of the driving gear can be accurately controlled, and further the lifting distance of the rack 5 can be accurately controlled.

[0055] Specifically, the guide rail 7 is fixedly connected to the bearing platform 4, and the rack 5 is slidably connected to the guide rail 7.

[0056] Specifically, the upper end of the sealed chamber 2 is connected to a vacuum pump through a vacuum tube 17.

[0057] In the specific embodiment, it further includes two guide rods 11. The two guide rods 11 are respectively arranged on both sides of the rack 5. The upper ends of the guide rods 11 are fixedly connected to the sealing plate 6, and the guide rods 11 are slidably connected to the bearing platform 4.

[0058] In this embodiment, specifically, it further includes two guide sleeves. The guide sleeves are fixedly connected to the bearing platform 4, and each guide rod 11 is slidably connected to one of the guide sleeves;

[0059] During the process of the rack 5 driving the sealing plate 6 to lift and lower, the two guide rods 11 also lift and lower accordingly, avoiding the horizontal rotation of the sealing plate 6 and improving the horizontal stability of the sealing plate 6.

[0060] In the specific embodiment, a plurality of through holes 12 are evenly distributed on the groove wall of the limit groove body 8.

[0061] In this embodiment, the sealing plate 6 abuts against the opening 3 at the lower end of the sealed chamber 2. When the vacuum pump extracts the air in the sealed chamber 2, the water vapor in the cracks on the lower surface of the coral material rod 9 can volatilize through the plurality of through holes 12, avoiding the blockage of this part of the water vapor in the cracks of the coral material rod 9 and ensuring the integrity of the removal of the water vapor from the coral material rod 9.

[0062] As Figure 2 shown, on the other hand, another embodiment of the present invention further provides a polycrystalline silicon coral material water quenching and crushing system, which includes: a heating device, a water cooling device 15, the aforementioned vacuum pumping device, and a crushing and packaging device arranged in sequence.

[0063] In this embodiment, the heating device includes a feeding section 13 and a heating furnace 14 for heating the coral material rod 9. A gas collecting hood is arranged on the heating furnace 14, and the interior of the heating furnace 14 includes a feeding end, a deoxidation section, a heating section, and a discharging end arranged in sequence;

[0064] The water cooling device 15 includes a water tank and a spray head for water cooling and spraying of the coral material rod 9;

[0065] The crushing and packaging device includes a pulse crusher, a screening mechanism and a metering and bagging mechanism;

[0066] The inner surface of the pulse crusher is coated with tungsten carbide alloy to prevent metal and impurities from mixing into the silicon material;

[0067] The metering and bagging mechanism includes a rough metering unit, a bagging unit, a shaping and metering unit, a heat sealing unit, a secondary bagging and sealing unit, a labeling and shaping unit, a metal detector and a reweighing and rejection unit arranged in sequence.

[0068] Specifically, the coral rod 9 is heated to 400 - 450 °C, quenched rapidly, then the water is vaporized by vacuumizing and the temperature is lowered, followed by pulse crushing, screening and packaging. Using this system, these processes can be carried out continuously. Among them, the time from water quenching to feeding the crusher is controlled within 60 - 65 s, which can meet the process connection of the front and back processes, ensure the continuity of coral rod processing, and can meet the normal automatic line packaging production capacity task.

[0069] The above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of changes or substitutions, which should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A method for water quenching and crushing polycrystalline silicon coral material, characterized in that: The steps include: Step 1: Heat the coral rod to 400-450℃; Step 2: Immerse the heated coral rod in pure water for rapid cooling, and control the outlet water temperature of the coral rod to 100-120°C; Step 3, placing the rapidly cooled coral rod into a closed chamber, and evacuating the closed chamber; Step 4: Mechanically crush, screen and package the vacuumed coral rods.

2. The method for water quenching and crushing polycrystalline silicon coral material according to claim 1, characterized in that: In step 1, it takes 30-35 minutes for the coral material rod to be preheated and heated completely.

3. The method for water quenching and crushing polycrystalline silicon coral material according to claim 1, characterized in that: In the step 2, the product is rapidly cooled in pure water below 20° C. for 10-15 seconds.

4. The method for water quenching and crushing polycrystalline silicon coral material according to claim 1, characterized in that: In the step three, the sealed chamber is evacuated for 18-23 seconds so that the vacuum degree of the sealed chamber reaches 90-100 Pa.

5. The method for water quenching and crushing polycrystalline silicon coral material according to claim 4, characterized in that: In the step 4, when the coral rods are crushed, the surface temperature of the coral rods is controlled at 60-70°C.

6. The method for water quenching and crushing polycrystalline silicon coral material according to claim 4, characterized in that: In step 4, the packaging temperature of the coral material is controlled to be less than 40°C.

7. A vacuum pumping device, characterized in that: include: A support frame, wherein a closed chamber is installed on the upper part of the support frame, the upper end of the closed chamber is connected to a vacuum pump, the lower end of the closed chamber is provided with an opening, and the support frame below the closed chamber is fixedly connected to a bearing platform; A lifting mechanism, the lifting mechanism includes a driving gear, a rack and a sealing plate, the driving gear is rotatably connected to the carrying platform, the rack is slidably connected to the carrying platform through a guide rail, the driving gear is meshed with the rack, the upper end of the rack is fixedly connected to the sealing plate, the upper surface of the sealing plate is fixedly connected to a limiting groove body for placing coral material rods, and the sealing plate fits into the opening.

8. The vacuum pumping device according to claim 7, characterized in that: It also includes two guide rods, which are respectively arranged on both sides of the rack, the upper ends of the guide rods are fixedly connected to the sealing plate, and the guide rods are slidably connected to the bearing platform.

9. The vacuum pumping device according to claim 7, characterized in that: The groove wall of the limiting groove body is evenly distributed with a plurality of through holes.

10. A polysilicon coral material water quenching and crushing system, characterized in that: include: A heating device, a water cooling device, a vacuum device as claimed in claim 7 and a crushing and packaging device are arranged in sequence.

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