Semiconductor welding equipment with flux recovery function

Abstract

This invention discloses a semiconductor welding device with flux recovery function, belonging to the technical field of welding equipment. It includes: a welding mechanism comprising a cylinder fixed to a frame, a piston rod on the cylinder passing through the frame and connected to a crossbeam, and extensions on both sides of the crossbeam connected to a welding device, the welding device having an inclined welding head connected thereon; and a first filtration and recovery mechanism comprising a ventilation duct positioned directly above the welding head, one end of which is fitted with a Y-shaped pipe, and an exhaust fan fixedly connected to the upward extension of the Y-shaped pipe. This invention solves the technical problem that after volatile flux is cooled by air, it turns into fine particles, and flux residue accumulates in the pipe, affecting the normal gas transport function within the pipe. Furthermore, if the residual flux cannot be recovered in time, it can cause secondary pollution to the welded products.

Description

Technical Field

[0001] This invention belongs to the field of welding equipment technology, and specifically relates to semiconductor welding equipment with flux recovery function. Background Technology

[0002] Flux: A chemical substance in the welding process that helps and promotes the welding process, while also providing protection and preventing oxidation. Fluxes can be divided into solid, liquid, and gaseous forms, and mainly function in several ways, including "assisting heat conduction," "removing oxides," "reducing the surface tension of the materials being welded," "removing oil and dirt from the surface of the materials being welded and increasing the welding area," and "preventing re-oxidation." Among these functions, two are particularly crucial: "removing oxides" and "reducing the surface tension of the materials being welded."

[0003] Flux recovery methods mainly include physical, chemical, and biological methods. During semiconductor soldering, a large amount of flux is added to the solder paste. The volatile flux turns into fine particles after cooling in the air. Flux residue accumulates in pipelines, affecting the normal gas transport function. Furthermore, if residual flux cannot be recovered in time, it can cause secondary pollution to the soldered products. Flux residue adsorbed on the surface of the soldered parts absorbs dust and moisture from the air, creating a moisture layer on the circuit board surface. This reduces the insulation resistance of the circuit board and causes corrosion or the formation of metal dendrites. When dendrites bridge the lines or solder areas, short circuits occur, significantly impacting product quality. Summary of the Invention

[0004] The purpose of this invention is to provide a semiconductor welding device with flux recovery function to solve the technical problem that after the volatile flux is cooled by air, it turns into fine particles, and the flux residue accumulates more and more in the pipeline, which affects the normal gas transport function in the pipeline. At the same time, if the residual flux cannot be recovered in time, it will also cause secondary pollution to the welded products.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] Semiconductor welding equipment with flux recovery function includes:

[0007] A welding mechanism, comprising a cylinder fixed on a frame, a piston rod on the cylinder passing through the frame and connected to a crossbeam, and extensions on both sides of the crossbeam connected to a welding device, wherein an inclined welding head is connected to the welding device.

[0008] The first filtration and recycling mechanism includes a ventilation duct positioned directly above the welding head. A Y-shaped pipe adapted to the ventilation duct is installed at one end of the ventilation duct. An exhaust fan is fixedly connected to the upward extension of the Y-shaped pipe. Filter plates are connected to both sides of the top of the inner wall of the ventilation duct via telescopic rods. Guide grooves are connected to the outer wall of the filter plates along the height direction of the ventilation duct, and filter holes are opened on the filter plates.

[0009] The filter plates are connected by a drive assembly via a movable plate. The drive assembly includes a servo motor fixed at the center of the side plate. One end of the output shaft of the servo motor extends sequentially to the central rotating tooth and the turntable. Both ends of the central rotating tooth are meshed with gear plates that move in opposite directions. One end of the gear plate is connected to a scraper on the outer wall of the filter plate via a first bracket. The protrusion on the turntable and the slider are connected by a swing rod. The outer wall of the slider is connected with a groove along the height direction of the side plate, and both ends of the slider are connected to the filter plate via a second bracket.

[0010] Furthermore, both sides of the swing rod are mounted on the protrusion and the slider by means of rotational connection. The upper and lower ends of the filter plate are respectively provided with positioning blocks connected to the first bracket and the second bracket. A first collection box with a slot is provided directly below the filter plate and placed on the ventilation duct. The first collection box is a movable pull-out design.

[0011] Furthermore, the top of the first collection box is provided with a discharge port placed on the ventilation duct, and the connection between the movable plate and the filter plate is provided with a positioning hole and is connected by bolt assembly for locking and fixing. The top of the ventilation duct is integrally formed with a movable cavity connected to the filter plate.

[0012] Furthermore, it also includes a second filtration and recovery mechanism located at one end of the Y-shaped tube in the horizontal direction. The second filtration and recovery mechanism includes a box filled with water. The inner wall of the box is integrally formed with a partition. An inclined plate is provided below the feed inlet on the box. One end of the inclined plate is in contact with and attached to a support plate. The support plate is detachably installed on the first conveyor belt. The upper and lower ends of the first conveyor belt are correspondingly connected to a first rotating wheel and a second rotating wheel.

[0013] Furthermore, one end of the second rotating wheel is connected to a rotating guide assembly placed between the partition and the inclined plate. The rotating guide assembly includes a first rotating shaft movably connected to the side wall of the box. The outer wall of the first rotating shaft is equipped with a ring array of baffles, and the outer wall of the first rotating shaft is fixed on a first rotating tooth. The outer wall of the first rotating tooth meshes with a second rotating tooth fixed on a second rotating shaft. The second rotating shaft and the second rotating wheel are connected by a second conveyor belt, and one end of the support plate is in contact with the guide plate near the inner wall of the box.

[0014] Furthermore, a second collection box is fixed to the outer wall of the box below the guide plate. The vertical center lines of the second rotating wheel and the first rotating wheel are both kept on the same axis. The baffle and the second conveyor belt are arranged in parallel and staggered. The outer wall edge of the baffle is provided with an arc-shaped groove placed at the bottom of the partition.

[0015] Furthermore, a guide cavity is formed between the baffle, the inclined plate, and the inner wall of the box. As the baffle rotates, the second conveyor belt drives the support plate to rotate in opposite directions with the baffle and conveys the recycled particles to the guide plate.

[0016] Furthermore, the bottom of the frame is connected to the ground by columns on all four sides, and the frame is provided with a support platform placed between the welding heads. The bottom of the ventilation duct is provided with a support column placed on the frame, and one end of the ventilation duct has a conical opening placed directly above the support platform.

[0017] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0018] (1) A welding mechanism is set up so that after the cylinder is started, it can drive the welding device at both ends of the crossbeam to perform welding work between the semiconductor and the edge of the workpiece. The crossbeam acts as a synchronization medium so that the welding device can perform welding work synchronously, ensuring welding accuracy and improving product quality.

[0019] (2) A first filtration and recovery mechanism is set up. The gas residue generated during the welding process will be introduced into the ventilation duct by the exhaust fan. After the flux is cooled by the air, it becomes fine particles and is blocked by the filter plate. At this time, the drive component is started, and the servo motor drives the central rotating tooth and the turntable to rotate at the same time. Under the meshing transmission of the gear, the central rotating tooth can drive the scrapers at both ends of the gear plate to move up and down, thereby playing a role in moving and cleaning the front end of the filter plate. This can effectively prevent the filter holes on the filter plate from becoming blocked and affecting the filtration quality of the filter plate. At the same time, during the rotation of the turntable, in conjunction with the rotation connection of the swing rod, the entire filter plate can be driven to move up and down on the telescopic rod. Through the up and down shaking process, the particles blocked on the filter plate can be shaken off into the first collection box, realizing the recovery of flux, reducing resource waste, and saving raw materials and costs.

[0020] (3) A second filtration and recovery mechanism is set up. The exhaust fan on the Y-shaped pipe can discharge the cleaned gas and discharge it into the box by gravity of the particles. The flux particles settle in the water and fall onto the inclined plate, and slide down to the support plate on the first conveyor belt. The particles can drive the baffle to rotate during the sliding process. The baffle drives the first tooth on the first rotating shaft to rotate during the rotation process. Under the meshing transmission of the gear, in conjunction with the transmission of the conveyor belt, the first conveyor belt can rotate in a cycle and transport the particles to the second collection box through the guide plate. Thus, the particles can be automatically collected during the sedimentation process in the water. The water setting can settle and gather the particles at the same time to complete the collection work. Moreover, the rotating guide component uses the driving force of the falling particles to convert into the rotational force of the conveyor belt. It has strong automation performance, does not require an additional power source, is energy-saving and environmentally friendly, and can play a secondary recycling role for flux. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of the semiconductor welding equipment with flux recovery function according to the present invention. Figure 1 ;

[0023] Figure 2 This is a schematic diagram of the structure of the semiconductor welding equipment with flux recovery function according to the present invention. Figure 2 ;

[0024] Figure 3 This is a front view of the semiconductor welding equipment with flux recovery function according to the present invention;

[0025] Figure 4 This is a schematic diagram of the internal structure of the ventilation duct of the present invention;

[0026] Figure 5 This is a schematic diagram showing the connection between the telescopic plate and the filter plate of the present invention;

[0027] Figure 6 This is a schematic diagram of the structure of the driving component of the present invention;

[0028] Figure 7 This is a schematic diagram of the structure of the housing of the present invention;

[0029] Figure 8 This is a schematic diagram of the meshing transmission between the first and second rotating teeth of the present invention.

[0030] Reference numerals: 1. Welding mechanism; 2. Cylinder; 3. Crossbeam; 4. Welder; 5. First filtration and recovery mechanism; 6. Ventilation duct; 7. Y-shaped pipe; 8. Exhaust fan; 9. Telescopic rod; 10. Filter plate; 11. Filter holes; 12. Moving plate; 13. Drive assembly; 14. Servo motor; 15. Central rotating gear; 16. Turntable; 17. Gear plate; 18. Scraper; 19. Slider; 20. Swing rod; 21. Positioning block; 22. 23. First collection box; 24. Second filtration and recovery mechanism; 25. Box body; 26. Partition plate; 27. Inclined plate; 28. Support plate; 29. ​​First conveyor belt; 20. First rotating wheel; 31. Second rotating wheel; 32. Rotation guide assembly; 33. First rotating shaft; 34. Baffle plate; 35. First rotating tooth; 36. Second rotating shaft; 37. Second conveyor belt; 38. Guide plate; 39. Second collection box; 40. Arc-shaped trough. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Reference manual attached Figure 1 and attached Figure 2 As shown, a semiconductor welding equipment with flux recovery function includes: a welding mechanism 1, which includes a cylinder 2 fixed on a frame, a piston rod on the cylinder 2 passing through the frame and connected to a crossbeam 3, and extensions on both sides of the crossbeam 3 connected to a welder 4, with an inclined welding head connected to the welder 4.

[0033] The tapered opening on the ventilation duct 6 can effectively expand the contact surface of the flux gas, allowing the flux gas to be effectively introduced into the ventilation duct 6. During the flow, the flux gas turns into fine particles after the air cools down, and may even be adsorbed on the filter plate 10. The top of the ventilation duct 6 is actually provided with a protruding end, and a movable cavity is formed in the protruding end. This allows the filter plate 10 to move freely up and down, thereby avoiding affecting the normal movement of the transmission components.

[0034] The welding mechanism 1 is set up so that after the cylinder 2 is started, it can drive the welding device 4 at both ends of the crossbeam 3 to perform welding work between the semiconductor and the edge of the workpiece. The crossbeam 3 acts as a synchronization medium, so that the welding device 4 can perform welding work synchronously, ensuring welding accuracy and improving product quality.

[0035] The first filtration and recovery mechanism 5 includes a ventilation duct 6 located directly above the welding head. A Y-shaped pipe 7 adapted to the ventilation duct 6 is installed at one end of the ventilation duct 6. An exhaust fan 8 is fixedly connected to the upward extension of the Y-shaped pipe 7. Filter plates 10 are connected to both sides of the top of the inner wall of the ventilation duct 6 through telescopic rods 9. Guide grooves are connected to the outer wall of the filter plates 10 along the height direction of the ventilation duct 6, and filter holes 11 are opened on the filter plates 10.

[0036] Among them, the filter plates 10 are connected by a moving plate 12 and a drive assembly 13. The drive assembly 13 includes a servo motor 14 fixed at the center of the side plate. One end of the output shaft of the servo motor 14 extends sequentially to the central rotating tooth 15 and the turntable 16. Both ends of the central rotating tooth 15 are meshed with gear plates 17 that move in opposite directions. One end of the gear plate 17 is connected to the scraper 18 on the outer wall of the filter plate 10 through a first bracket. The protrusion on the turntable 16 and the slider 19 are connected by a swing rod 20. The outer wall of the slider 19 is connected with a groove along the height direction of the side plate, and both ends of the slider 19 are connected to the filter plate 10 through a second bracket.

[0037] refer to Figure 3 , Figure 4 , Figure 5 and Figure 6 Both sides of the swing rod 20 are mounted on the protrusion and the slider 19 by means of rotational connection. The upper and lower ends of the filter plate 10 are respectively provided with positioning blocks 21 connected to the first bracket and the second bracket. The filter plate 10 is provided with a first collection box 22 placed on the ventilation duct 6 and having a slot. The first collection box 22 is a movable pull-out design.

[0038] The side plate is fixedly connected to the inner wall of the ventilation duct 6, and the slider 19 is movably connected to the side plate. At the same time, the servo motor 14 is fixed to the side plate, so the drive assembly 13 can be started. During the rotation of the turntable 16, the rotational power of the turntable 16 can be converted into the linear up-and-down movement of the slider 19 in the groove through the rotational connection of the swing rod 20. During the movement of the slider 19, the filter plates 10 at both ends can be moved up and down through the second bracket. During the up-and-down movement of the filter plates 10, the adsorbed flux particles can be effectively separated and then collected in the first collection box 22. The first collection box 22 is a movable pull-out design, which effectively facilitates personnel operation and improves work efficiency.

[0039] Furthermore, the movable plate 12 between the filter plates 10 serves two purposes: firstly, it connects the filter plates 10 at both ends; secondly, it synchronizes the movement of both plates, ensuring the stability of the device. The telescopic rod 9 on the filter plate 10, together with the slider 19 on the side plate, provides support and connection, preventing overload on the filter plate 10 by a single support component and ensuring the safety of the device. Additionally, after the servo motor 14 starts, it drives the scraper 18 on the first bracket via the gear plate 17 to clean the filter plate 10, effectively preventing clogging of the filter holes 11 and ensuring the filtration quality of the filter plate 10.

[0040] Meanwhile, the groove on the side plate can prevent the slider 19 from deviating from its position during movement. The forward and reverse rotation of the servo motor 14 can drive the turntable 16 to rotate synchronously. In this way, the turntable 16 can ensure the normal up and down movement of the filter plate 10 during forward and reverse rotation, and also allow the scraper 18 to perform corresponding cleaning work during the contact and contact with the filter plate 10.

[0041] The first filtration and recovery mechanism 5 is set up. The gas residue generated during the welding process is introduced into the ventilation duct 6 by the exhaust fan 8. After the flux is cooled by the air, it becomes fine particles and is blocked by the filter plate 10. At this time, the drive component 13 is started, and the servo motor 14 drives the central rotating gear 15 and the turntable 16 to rotate simultaneously. Under the meshing transmission of the gear, the central rotating gear 15 can drive the scrapers 18 at both ends of the gear plate 17 to move up and down, thereby cleaning the front end of the filter plate 10. This can effectively prevent the filter holes 11 on the filter plate 10 from becoming blocked, which would affect the filtration quality of the filter plate 10. At the same time, during the rotation of the turntable 16, in conjunction with the rotational connection of the swing rod 20, the entire filter plate 10 can be moved up and down on the telescopic rod 9. Through the up and down shaking process, the particles blocked on the filter plate 10 can be shaken off into the first collection box 22, realizing the recovery of flux, reducing resource waste, and saving raw materials and costs.

[0042] refer to Figure 1 , Figure 7 and Figure 8 The top of the first collection box 22 is provided with a discharge port placed on the ventilation duct 6. The connection between the moving plate 12 and the filter plate 10 is provided with a positioning hole and is connected by bolt assembly. The top of the ventilation duct 6 is integrally formed with a movable cavity connected to the filter plate 10.

[0043] The semiconductor welding equipment with flux recovery function also includes a second filtration and recovery mechanism 23 located at one end of the Y-shaped tube 7 in the horizontal direction. The second filtration and recovery mechanism 23 includes a box 24 filled with water. A partition 25 is integrally formed and connected to the inner wall of the box 24. An inclined plate 26 is provided below the inlet on the box 24. One end of the inclined plate 26 is in contact with and attached to the support plate 27. The support plate 27 is detachably installed on the first conveyor belt 28. The upper and lower ends of the first conveyor belt 28 are correspondingly connected to a first rotating wheel 29 and a second rotating wheel 30.

[0044] One end of the second rotating wheel 30 is connected to a rotating guide assembly 31 placed between the partition plate 25 and the inclined plate 26. The rotating guide assembly 31 includes a first rotating shaft 32 movably connected to the side wall of the box 24. The outer wall of the first rotating shaft 32 is equipped with a ring array of baffles 33, and the outer wall of the first rotating shaft 32 is fixed on the first rotating tooth 34. The outer wall of the first rotating tooth 34 meshes with a second rotating tooth 36 fixed on the second rotating shaft 35. The second rotating shaft 35 and the second rotating wheel 30 are connected by a second conveyor belt 37. One end of the support plate 27 is close to the inner wall of the box 24 and is in contact with the guide plate 38.

[0045] The second filtration and recovery mechanism 23 is set up. The exhaust fan 8 on the Y-shaped pipe 7 can discharge the cleaned gas and discharge the particles into the box 24 by gravity. The flux particles settle in the water and fall onto the inclined plate 26, and slide down the inclined plate 26 to the support plate 27 on the first conveyor belt 28. During the sliding process, the particles can drive the baffle 33 to rotate. The rotation of the baffle 33 drives the first rotating tooth 34 on the first rotating shaft 32 to rotate. Under the meshing transmission of the gear, in conjunction with the transmission of the conveyor belt, the first conveyor belt 28 can be rotated in a cycle, and the particles can be transported to the second collection box 39 through the guide plate 38. Thus, the particles can be automatically collected during the sedimentation process in the water. The water setting can settle and gather the particles at the same time to complete the collection work. Moreover, the rotating guide component 31 uses the driving force of the falling particles to convert into the rotational force of the conveyor belt. It has strong automation performance, does not require an additional power source, is energy-saving and environmentally friendly, and can play a secondary recycling role for flux.

[0046] Below the guide plate 38, there is a second collection box 39 fixed on the outer wall of the box 24. The vertical center lines of the second rotating wheel 30 and the first rotating wheel 29 are both kept on the same axis. The baffle 33 and the second conveyor belt 37 are arranged in parallel and staggered. The outer edge of the baffle 33 is provided with an arc-shaped groove 40 placed at the bottom of the partition 25. The baffle 33, the inclined plate 26 and the inner wall of the box 24 together form a guide cavity. As the baffle 33 rotates, the second conveyor belt 37 drives the support plate 27 to rotate in opposite directions with the baffle 33 and conveys the recycled particles to the guide plate 38.

[0047] Specifically, when the first conveyor belt 28 on the first rotating wheel 29 and the second rotating wheel 30 has insufficient rotational power, a drive motor can be installed on the corresponding rotating wheel. Under the drive of the drive motor, the first conveyor belt 28 can maintain normal rotational power, and the power can be transmitted to the second rotating shaft 35. Under the transmission action of gear meshing, the first rotating shaft 32 on the first rotating tooth 34 can keep rotating in the opposite direction, and drive the baffle 33 to remove the accumulated flux particles to the support plate 27. This can prevent the slipping flux particles from ensuring the normal power transmission of the conveyor belt.

[0048] In addition, the partition 25 on the inner wall of the housing 24 can not only separate the support plate 27 and the inclined plate 26, but also the arc groove 40 at the bottom of the partition 25 can allow the baffle 33 of the annular array to maintain normal rotation and prevent the baffle 33 from interfering with the partition 25 during movement. At the same time, one end of the inclined plate 26 is set vertically close to the support plate 27, so that when the inclined plate 26 contacts and adheres to the support plate 27, it can guide the flux particles onto the support plate 27 and enter the second collection box 39 through the action of rotational conveying.

[0049] The frame is connected to the ground on all four sides by columns, and a support platform is provided on the frame between the welding heads. The bottom of the ventilation duct 6 is provided with a support column on the frame, and one end of the ventilation duct 6 has a conical opening directly above the support platform. The support platform is mainly used to place semiconductors and solder parts, and the support column on the ventilation duct 6 can provide corresponding support force. The top of the support column can also be equipped with an arc plate that contacts and connects with the bottom surface of the ventilation duct 6 as needed. This can distribute the applied force by expanding the contact surface and improve the stability of the connection.

[0050] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

[0051] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to specific implementations. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A semiconductor welding device with flux recovery function, characterized in that, include: Welding mechanism (1), the welding mechanism (1) includes a cylinder (2) fixed on a frame, the piston rod of the cylinder (2) passes through the frame and is connected to a crossbeam (3), the extension sections on both sides of the crossbeam (3) are connected to a welder (4), and the welder (4) is connected to an inclined welding head; The first filtration and recovery mechanism (5) includes a ventilation duct (6) located directly above the welding head. A Y-shaped pipe (7) is installed at one end of the ventilation duct (6) and is fixedly connected to the upward extension of the Y-shaped pipe (7). A filter plate (10) is connected to both sides of the top of the inner wall of the ventilation duct (6) by a telescopic rod (9). A guide groove is connected to the outer wall of the filter plate (10) along the height direction of the ventilation duct (6), and filter holes (11) are opened on the filter plate (10). Among them, the filter plates (10) are connected by a drive assembly (13) through a moving plate (12). The drive assembly (13) includes a servo motor (14) fixed at the center of the side plate. One end of the output shaft of the servo motor (14) extends sequentially to the central rotating tooth (15) and the turntable (16). Both ends of the central rotating tooth (15) are meshed with gear plates (17) that move in opposite directions. One end of the gear plate (17) is connected to the scraper (18) on the outer wall of the filter plate (10) through a first bracket. The protrusion on the turntable (16) and the slider (19) are connected by a swing rod (20). The outer wall of the slider (19) is connected with a groove along the height direction of the side plate, and both ends of the slider (19) are connected to the filter plate (10) through a second bracket. It also includes a second filtration and recovery mechanism (23) placed at one end of the Y-shaped tube (7) in the horizontal direction. The second filtration and recovery mechanism (23) includes a box (24) filled with water. The inner wall of the box (24) is integrally formed and connected with a partition (25). An inclined plate (26) is provided below the feed inlet on the box (24). One end of the inclined plate (26) is in contact with and attached to the support plate (27). The support plate (27) is detachably installed on the first conveyor belt (28). The first conveyor belt (28) has a first rotating wheel (29) and a second rotating wheel (30) correspondingly connected to its upper and lower ends. The second rotating wheel (30) is connected at one end to a rotating guide assembly (31) placed between the partition (25) and the inclined plate (26). The rotating guide assembly (31) includes a first rotating shaft (32) movably connected to the side wall of the housing (24). The outer wall of the first rotating shaft (32) is equipped with a ring array of baffles (33).

2. The semiconductor welding equipment with flux recovery function according to claim 1, characterized in that, Both sides of the swing rod (20) are mounted on the protrusion and the slider (19) by means of rotational connection. The filter plate (10) has positioning blocks (21) at the upper and lower ends respectively connected to the first bracket and the second bracket. The filter plate (10) has a first collection box (22) placed on the ventilation duct (6) and with a slot. The first collection box (22) is a movable pull-out design.

3. The semiconductor welding equipment with flux recovery function according to claim 2, characterized in that, The first collection box (22) has a material discharge port on the top of the ventilation duct (6). The movable plate (12) and the filter plate (10) are connected by a positioning hole and locked by a bolt assembly. The top of the ventilation duct (6) is integrally formed and connected to the filter plate (10).

4. The semiconductor welding equipment with flux recovery function according to claim 1, characterized in that, The outer wall of the first rotating shaft (32) is fixed on the first rotating tooth (34), and the outer wall of the first rotating tooth (34) meshes with the second rotating tooth (36) fixed on the second rotating shaft (35). The second rotating shaft (35) and the second rotating wheel (30) are connected by the second conveyor belt (37), and one end of the support plate (27) is in contact with the guide plate (38) near the inner wall of the box (24).

5. The semiconductor welding equipment with flux recovery function according to claim 4, characterized in that, Below the guide plate (38) is a second collection box (39) fixed on the outer wall of the box (24). The vertical center lines of the second rotating wheel (30) and the first rotating wheel (29) are both on the same axis. The baffle (33) and the second conveyor belt (37) are arranged in parallel and staggered. The outer edge of the baffle (33) is provided with an arc groove (40) placed at the bottom of the partition (25).

6. The semiconductor welding equipment with flux recovery function according to claim 5, characterized in that, A guide cavity is formed between the baffle (33), the inclined plate (26) and the inner wall of the box (24). As the baffle (33) rotates, the second conveyor belt (37) drives the support plate (27) to rotate in opposite directions with the baffle (33) and conveys the recycled particles to the guide plate (38).

7. The semiconductor welding equipment with flux recovery function according to claim 1, characterized in that, The bottom of the frame is connected to the ground by columns, and the frame is provided with a support platform between the welding heads. The bottom of the ventilation duct (6) is provided with a support column on the frame, and one end of the ventilation duct (6) is provided with a conical opening located directly above the support platform.

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