Polishing machine monitoring system and using method

Abstract

The invention relates to the technical field of magnetorheological polishing, and discloses a polishing machine monitoring system and a using method, the polishing machine monitoring system comprises a plurality of temperature sensors which are respectively arranged in a polishing head, a motor, a transmission gear box and a polishing liquid cooling system; the plurality of pressure sensors are respectively arranged at the inlet and the outlet of the polishing solution supply pipeline and each branch pipeline; the flow sensor is arranged on the polishing solution supply pipeline; the device is arranged on a machine body frame, a motor base, a polishing head support and a key transmission part of the polishing machine. The data acquisition node unit is responsible for collecting data of the sensors and performing preliminary data preprocessing; and the data concentrator center is responsible for summarizing the data of the data acquisition nodes and transmitting the data to the control system for analysis and processing. According to the invention, various types of sensors are widely distributed at various key parts of the polishing machine, so that comprehensive monitoring of various operating parameters such as temperature, pressure, flow and vibration of equipment is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetorheological polishing, and particularly to a polishing machine monitoring system and a usage method thereof. Background Art

[0002] In modern manufacturing, as a key processing device, the performance and reliability of a polishing machine directly affect the quality and production progress of products. However, there are many defects in the traditional fault monitoring means of polishing machines. On the one hand, the number of sensors is limited, and it is impossible to comprehensively cover all key parts of the device and various operating parameters. For example, in some old models of polishing machines, only a simple temperature sensor may be set at the motor part, and there are no effective monitoring means for the wear of the polishing head, the flow stability of the polishing liquid, and the vibration of the fuselage structure. On the other hand, the sensor layout often lacks systematicness and scientificity, resulting in the existence of monitoring blind spots in some areas.

[0003] This incomplete and unreasonable monitoring method makes many potential faults unable to be detected in time. Once a fault occurs, it may spread rapidly, resulting in an extended equipment downtime, a significant increase in maintenance costs, and even the scrapping of an entire batch of products, bringing serious economic losses to the enterprise.

[0004] Moreover, due to the inability to obtain accurate equipment operation data, it is difficult to achieve preventive maintenance of the equipment, further reducing the service life and overall operation efficiency of the equipment, and unable to meet the requirements of the current production environment for the reliability and stability of the equipment. Summary of the Invention

[0005] In view of the deficiencies of the prior art, the present invention provides a polishing machine monitoring system and a usage method thereof to solve the above technical problems.

[0006] In the first aspect, a polishing machine monitoring system is provided, including:

[0007] Multiple temperature sensors are respectively arranged in the polishing head, motor, transmission gearbox, and polishing liquid cooling system to monitor the temperature of each component in real time;

[0008] Multiple pressure sensors are respectively arranged at the inlet, outlet, and each branch pipe position of the polishing liquid supply pipe to monitor the pressure state of the polishing liquid;

[0009] A flow sensor is arranged on the polishing liquid supply pipe to monitor the flow change of the polishing liquid;

[0010] Multiple vibration sensors are respectively arranged on the fuselage frame, motor base, polishing head support, and key transmission components of the polishing machine to monitor the vibration characteristics of the polishing machine;

[0011] The data acquisition node unit is responsible for collecting the data of the above sensors and performing preliminary data preprocessing;

[0012] The data concentrator center is responsible for aggregating the data of the data acquisition nodes and transmitting it to the control system for analysis and processing.

[0013] Furthermore, the temperature sensor includes a micro-thermocouple sensor, a thermistor temperature sensor built into the motor, and an optical fiber temperature sensor in the gearbox.

[0014] Furthermore, it also includes a wireless network communication module, which is used for wireless data transmission between the sensor and the data acquisition node and implements encryption protection for the transmitted data.

[0015] Furthermore, during the data communication process, the wireless network communication module uses the AES encryption algorithm to ensure the secure transmission of sensor data.

[0016] Furthermore, it also includes a fault diagnosis module, which can diagnose the operating status of the polishing machine based on the collected sensor data and provide targeted fault solutions.

[0017] Furthermore, it also includes a predictive maintenance module, which predicts the maintenance requirements of the polishing machine based on the stored historical sensor data and plans and executes maintenance tasks in advance.

[0018] In a second aspect, a method for using the polishing machine monitoring system is provided. Based on the polishing machine monitoring system described in any of the foregoing items, it is characterized by including the following steps:

[0019] Step S01: Real-time capture the data of each sensor through the data acquisition node;

[0020] Step S02: The data acquisition node preprocesses the acquired data and then sends the processed data to the data concentrator;

[0021] Step S03: After receiving the data, the data concentrator transmits it to the control system, and the control system performs data analysis, fault diagnosis, status monitoring, and alarm processing.

[0022] Furthermore, it also includes the following steps:

[0023] The control system dynamically adjusts the process parameters of the polishing machine according to the received real-time data.

[0024] The invention adopting the above technical solution has the following advantages:

[0025] 1. The present invention realizes the comprehensive monitoring of various operating parameters such as equipment temperature, pressure, flow rate, and vibration by widely distributing various types of sensors at key parts of the polishing machine. The high-precision characteristics of different types of sensors and the reasonable layout enable any subtle abnormal conditions to be captured in a timely manner, effectively avoiding the omission of faults caused by insufficient sensor coverage or unreasonable layout in traditional monitoring methods, greatly improving the comprehensiveness and timeliness of equipment fault monitoring, and providing a solid guarantee for the stable operation of the equipment.

[0026] 2. The present invention provides rich sensor data and a high-precision data acquisition and transmission hardware system, providing accurate and detailed information basis for fault diagnosis. The control system can quickly and accurately locate the fault location based on these data, and accurately judge the fault type by combining the pre-established fault diagnosis models and algorithms. For example, through the comprehensive analysis of multiple parameters such as the temperature and vibration of the polishing head, and the pressure and flow rate of the polishing liquid, it can accurately judge whether it is due to polishing head wear, motor failure, pipeline blockage or other complex fault reasons, providing a clear repair direction for maintenance personnel, greatly shortening the repair time, improving the repair efficiency, and reducing the repair cost.

[0027] 3. The large amount of equipment operation data accumulated by the distributed sensor network hardware system of the present invention not only helps in the timely discovery and handling of faults, but also provides strong support for the preventive maintenance of the equipment. By deeply analyzing the long-term historical data, such as the trend changes of the data, periodic laws, and the correlations between different parameters, the operation characteristics of the equipment, the performance change trends, and the aging conditions of each component can be comprehensively understood. Based on these analysis results, a more scientific and reasonable equipment maintenance plan can be formulated, such as regularly replacing vulnerable parts, optimizing equipment operation parameters, and arranging equipment maintenance in advance, to achieve the preventive maintenance of the equipment, effectively extending the service life of the equipment, reducing the probability of sudden equipment failures, and improving the production efficiency and equipment management level of the enterprise.

[0028] 4. Since the system of the present invention can timely discover and handle equipment faults, it avoids production interruptions and product quality degradation caused by equipment downtime or faulty operation, thus significantly improving the production efficiency of the polishing machine. At the same time, accurate fault monitoring and diagnosis contribute to maintaining the stable operation state of the polishing machine, ensuring the consistency of polishing process parameters, thereby improving the polishing quality of the product, reducing the rejection rate, and enhancing the competitiveness of the enterprise in the market. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific embodiments of the present invention, the drawings required for use in the specific embodiments will be briefly introduced below. In all the drawings, the components or parts do not necessarily draw according to the actual scale.

[0030] Figure 1 This is a flowchart of the polishing machine monitoring system and its usage method of the present invention. Specific embodiments

[0031] Hereinafter, embodiments of the technical solution of the present invention will be described in detail with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, so they are only examples and cannot be used to limit the protection scope of the present invention.

[0032] As Figure 1 shown, the polishing machine monitoring system of the present invention includes:

[0033] Multiple temperature sensors are respectively arranged in the polishing head, motor, transmission gearbox and polishing liquid cooling system to monitor the temperature of each component in real time;

[0034] Multiple pressure sensors are respectively arranged at the inlet, outlet and each branch pipe position of the polishing liquid supply pipe to monitor the pressure state of the polishing liquid;

[0035] A flow sensor is arranged on the polishing liquid supply pipe to monitor the flow change of the polishing liquid;

[0036] Multiple vibration sensors are respectively arranged on the fuselage frame, motor base, polishing head bracket and key transmission components of the polishing machine to monitor the vibration characteristics of the polishing machine;

[0037] The data acquisition node unit is responsible for collecting the data of the above sensors and performing preliminary data preprocessing;

[0038] The data concentrator center is responsible for aggregating the data of the data acquisition nodes and transmitting it to the control system for analysis and processing.

[0039] Specifically, for the temperature sensors:

[0040] High-precision temperature sensors are installed in the polishing head, motor, transmission gearbox and polishing liquid cooling system. For the polishing head, a special micro-thermocouple sensor is used, whose hot end can closely fit the surface of the polishing head, and the cold end is isolated from the external environment through a special heat insulation structure to ensure the accuracy of measurement. The temperature measurement range of this thermocouple sensor is from -50°C to 1000°C, and the resolution can reach 0.1°C. It can monitor the temperature change of the polishing head during the high-speed rotation and friction process in real time, and timely detect the abnormal temperature rise caused by improper polishing process parameters, abnormal polishing materials or cooling system failures, etc., to prevent the polishing head from being damaged due to overheating and affecting the polishing quality.

[0041] Inside the motor, a built-in thermistor temperature sensor is selected and installed near the stator winding of the motor, which can accurately measure the winding temperature during motor operation. It has a fast response speed and can react instantaneously to temperature changes, with a temperature measurement accuracy of ±0.5°C. When situations such as excessive motor load, poor heat dissipation, or winding short circuit occur, the temperature sensor can quickly transmit the temperature change signal to the monitoring system so that timely measures can be taken to avoid motor burnout.

[0042] Inside the transmission gearbox, multiple distributed fiber optic temperature sensors are installed. Fiber optic sensors have the advantages of strong anti-electromagnetic interference, corrosion resistance, high temperature resistance, etc., and can adapt to the complex and harsh working environment inside the gearbox. By arranging fiber optic sensors near different gear shafts and at key parts of the box body, the temperature distribution inside the gearbox can be comprehensively monitored, and local temperature increases caused by gear wear, insufficient lubrication, or bearing failures can be detected in a timely manner, preventing the further deterioration of gearbox failures and ensuring the stable operation of the polishing machine transmission system.

[0043] Pressure sensors and flow sensors:

[0044] Pressure sensors are installed at the inlet, outlet, and each branch pipe of the polishing liquid supply pipeline. High-precision piezoresistive pressure sensors are used, with a pressure measurement range of 0 - 20 MPa and an accuracy as high as ±0.005 MPa. These pressure sensors can real-time monitor the pressure changes of the polishing liquid in the pipeline to ensure a stable supply pressure of the polishing liquid. For example, when the polishing liquid pump fails, the pipeline is blocked or leaks, the pressure sensor can quickly detect the abnormal pressure and feedback the signal to the control system so that timely adjustments or repairs can be made.

[0045] An electromagnetic flow sensor is also installed on the polishing liquid pipeline. Its measurement principle is based on Faraday's law of electromagnetic induction, and it can accurately measure the flow rate of the polishing liquid. The flow measurement range is 0 - 20 L / min, and the accuracy is ±0.05 L / min. By monitoring the flow rate of the polishing liquid, it can ensure that the supply volume of the polishing liquid meets the process requirements and avoid affecting the polishing effect due to too large or too small flow rate. In addition, the flow sensor can work in coordination with the pressure sensor. By analyzing the pressure-flow relationship, it can further judge the operating state of the pipeline system, such as whether there are pipeline wear, valve failures, etc.

[0046] Vibration sensors:

[0047] High-performance vibration sensors are installed at key parts such as the body frame of the polishing machine, the motor base, the polishing head support, and the transmission components. A three-dimensional vibration sensor based on MEMS (Micro-Electro-Mechanical System) technology is used, which can simultaneously measure the vibration acceleration in three directions (X, Y, Z). Its measurement range is ±10g (g is the acceleration due to gravity), and the resolution can reach 0.01 m / s 2By monitoring the vibrations of these parts, abnormal vibrations caused by component loosening, imbalance, wear, or resonance can be detected in a timely manner.

[0048] For example, when the polishing head generates intense vibrations due to poor dynamic balance, the vibration sensor can accurately capture the change characteristics of the vibration signal, including information such as vibration frequency, amplitude, and phase, providing important basis for fault diagnosis. This enables timely dynamic balance adjustment of the polishing head or replacement of worn components, ensuring the smooth operation of the polishing machine and improving the polishing accuracy.

[0049] Data acquisition hardware

[0050] Data acquisition node:

[0051] Each data acquisition node is responsible for collecting data from a group of nearby sensors. The data acquisition node is centered around a high-performance and low-power ARM Cortex-M7 microcontroller, which has rich peripheral interfaces such as multiple ADC (Analog-to-Digital Converter) channels, SPI (Serial Peripheral Interface), UART (Universal Asynchronous Receiver-Transmitter), etc., enabling convenient connection with various sensors and communication modules.

[0052] The data acquisition node is equipped with a high-precision and high-speed ADC chip with a sampling resolution of 24 bits, and the sampling frequency can be flexibly adjusted between 1 kHz - 10 kHz to meet the requirements of different sensors for data acquisition speed and accuracy.

[0053] For example, for vibration sensors, a relatively high sampling frequency (such as 5 kHz - 10 kHz) can be set to accurately capture the high-frequency components of the vibration signal; for temperature sensors and pressure sensors, a relatively low sampling frequency (such as 1 kHz - 2 kHz) can be set according to the actual situation to reduce system power consumption while ensuring data accuracy.

[0054] The connection between the data acquisition node and the sensor uses shielded cables to reduce the influence of external electromagnetic interference on the sensor signal. For some sensors in special positions or with inconvenient wiring, a wireless transmission module (such as Bluetooth 5.0 or ZigBee Pro) is used for data transmission. The wireless transmission module is connected to the data acquisition node through the SPI interface to ensure the stability and reliability of data transmission. The data acquisition node performs preliminary processing on the collected sensor data, such as data filtering, amplification, calibration, etc., removes noise interference, improves data quality, and then packages the processed data into a specific format and sends it to the data concentrator through a wired or wireless network.

[0055] Data concentrator:

[0056] The data concentrator serves as the data aggregation center of the entire sensor network. It is responsible for receiving data from each data acquisition node and transmitting it to the control system for further analysis and processing. The data concentrator uses a high-performance industrial computer or an embedded industrial control board, such as an industrial control board based on the Intel Atom processor, which has powerful data processing capabilities and rich network interfaces.

[0057] The data concentrator is equipped with a large-capacity storage device, such as a 2TB solid-state drive (SSD), for storing a large amount of sensor historical data. These historical data can be used for equipment fault analysis, performance evaluation, and predictive maintenance, etc. The data concentrator has multiple network interfaces, including Ethernet interfaces, RS-485 interfaces, etc., which can communicate with data acquisition nodes and the control system at high speed and stably.

[0058] The data concentrator runs specialized data reception and forwarding software. This software uses multi-threaded programming technology and can handle data transmission requests from multiple data acquisition nodes simultaneously to ensure the real-time and integrity of data. After receiving the data sent by the data acquisition node, the data concentrator first performs data verification and error detection. If data errors or losses are found, it will promptly notify the data acquisition node to resend. Then it stores the correct data on the local hard disk and forwards the data to the control system according to the requirements of the control system for fault diagnosis, status monitoring, and alarm processing operations.

[0059] In some embodiments, the temperature sensors include miniature thermocouple sensors, thermistor temperature sensors built into the motor, and fiber optic temperature sensors in the gearbox.

[0060] In some embodiments, it further includes a wireless network communication module for wireless data transfer between the sensor and the data acquisition node and implementing encryption protection for the transmitted data.

[0061] In some embodiments, during the data communication process, the wireless network communication module uses the AES encryption algorithm to ensure the secure transmission of sensor data.

[0062] Specifically, data transmission and communication

[0063] Wired network communication:

[0064] The wired network communication between the data acquisition node and the data concentrator adopts the industrial Ethernet or RS-485 bus standard. Industrial Ethernet has the advantages of high speed, stability, and strong compatibility, and can meet the rapid transmission requirements of a large amount of data. The data acquisition node is connected to the Ethernet switch through an Ethernet controller (such as ENC28J60), and then the switch transmits the data to the data concentrator. During the data transmission process, the TCP / IP protocol is used for data encapsulation and transmission to ensure the reliability and sequentiality of the data.

[0065] The RS-485 bus is suitable for some occasions where the requirement for transmission speed is not high but the distance is far. For example, in a large polishing machine workshop, when some data acquisition nodes are far from the data concentrator, the RS-485 bus can be used for data transmission. The RS-485 bus adopts the differential signal transmission mode and has strong anti-interference ability. The data acquisition node is connected to the RS-485 bus through an RS-485 transceiver (such as MAX485), and the data concentrator communicates with the bus through an RS-485 interface card to achieve two-way data transmission.

[0066] Wireless network communication:

[0067] For the communication between the sensor using the wireless transmission module and the data acquisition node, Bluetooth 5.0 or ZigBee Pro wireless communication technology is adopted. Bluetooth 5.0 has the characteristics of low power consumption, high transmission rate, long-distance transmission, etc., and is suitable for the transmission of sensor data with short distance and large data volume. ZigBee Pro has the advantages of self-organizing network, low power consumption, large network capacity, etc., and is suitable for the deployment of large-scale sensor networks.

[0068] During the wireless communication process, the AES (Advanced Encryption Standard) encryption algorithm is used to encrypt the sensor data to ensure the security of data transmission and prevent the data from being stolen or tampered with. At the same time, by setting reasonable wireless communication frequency bands, channels and powers, the performance of the wireless communication network is optimized, signal interference and collisions are reduced, and the success rate and stability of data transmission are improved.

[0069] In some embodiments, a fault diagnosis module is further included, which can diagnose the operating state of the polishing machine according to the collected sensor data and provide targeted fault solutions.

[0070] In some embodiments, a predictive maintenance module is further included, which predicts the maintenance requirements of the polishing machine based on the stored historical sensor data and plans and executes maintenance tasks in advance.

[0071] In some other embodiments, a method for using the polishing machine monitoring system is provided. Based on the polishing machine monitoring system of any one of the foregoing, it includes the following steps:

[0072] Step S01, capturing the data of each sensor in real time through the data acquisition node;

[0073] Step S02, the data acquisition node preprocesses the acquired data and then sends the processed data to the data concentrator;

[0074] Step S03, after receiving the data, the data concentrator transfers it to the control system, and the control system performs data analysis, fault diagnosis, status monitoring and alarm processing.

[0075] In some embodiments, the following steps are further included:

[0076] The control system dynamically adjusts the process parameters of the polishing machine according to the received real-time data.

[0077] Sensor installation:

[0078] Installation of temperature sensors:

[0079] For the thermocouple temperature sensor of the polishing head, first select a suitable installation position on the surface of the polishing head, usually near the contact area between the polishing head and the workpiece or on the heat sink. Use high-temperature adhesive to firmly paste the hot end of the thermocouple at the selected position, and ensure that the hot end is in full contact with the surface of the polishing head to ensure good heat conduction. The cold end of the thermocouple is protected by a heat-insulating sleeve and installed at a position far from the heat source and with relatively stable temperature, such as inside the machine housing of the polishing machine. The wire connecting the thermocouple and the data acquisition node uses a cable with high temperature resistance and good shielding performance to reduce signal interference.

[0080] The thermistor temperature sensor inside the motor is installed in the wire slot or on the surface of the stator winding during the motor assembly process. It is fixed by a special fixing fixture to ensure that the sensor is in close contact with the winding and can accurately measure the winding temperature. The sensor wire is led out through the wire outlet hole of the motor and connected to the data acquisition node. Pay attention to the protection and fixation of the wire during connection to prevent wire breakage or poor contact caused by motor vibration.

[0081] The fiber optic temperature sensor in the transmission gearbox is installed through the installation holes pre-designed on the box body. Insert the probe of the fiber optic sensor into the inside of the gearbox, making it close to key parts such as the gear shaft and bearings, and use sealant to seal the installation holes to prevent lubricating oil leakage.

[0082] The fiber optic cable is led out along the wiring channel inside the gearbox and connected to the data acquisition node. Pay attention to avoiding excessive bending or extrusion of the fiber optic during the wiring process to prevent affecting the optical signal transmission.

[0083] Installation of pressure sensors and flow sensors:

[0084] The piezoresistive pressure sensor on the polishing liquid pipeline is installed at a suitable position on the pipeline by means of threaded connection or flange connection. Before installation, first clean the pipeline to remove impurities and dirt inside the pipeline, and then install the pressure sensor on the vertical or horizontal section of the pipeline, ensuring that the pressure sensing diaphragm of the sensor is perpendicular to the flow direction of the polishing liquid inside the pipeline to obtain accurate pressure measurement values. The cable connecting the pressure sensor and the data acquisition node uses a shielded cable and is well protected against water and moisture to prevent sensor failure or signal abnormality caused by liquid erosion.

[0085] The electromagnetic flow sensor is installed on the straight pipe section of the polishing liquid pipeline. It is required that there are straight pipe sections with a certain length before and after the pipeline to ensure the stable fluid flow state and improve the flow measurement accuracy. The flow sensor is connected to the pipeline through a flange. When connecting, pay attention to the selection and installation of the gasket to prevent leakage. The signal cable of the flow sensor is connected to the data acquisition node, and the wiring is carried out in accordance with the cable connection specification to ensure correct signal transmission.

[0086] Installation of vibration sensors:

[0087] On the body frame of the polishing machine, select a part with high structural strength and capable of reflecting the overall vibration situation, such as the crossbeam or column of the frame, and use bolts to fix the MEMS three-dimensional vibration sensor at the selected position. During the installation process, pay attention to adjusting the installation direction of the sensor so that its X, Y, and Z axes are consistent with the main vibration direction of the body to accurately measure the vibration situation of the body.

[0088] The connecting cable between the sensor and the data acquisition node uses a shielded cable and is fixed on the surface of the body to avoid cable shaking or being pulled by external forces.

[0089] The vibration sensor on the motor base is installed near the connecting bolts between the motor and the base, and can be installed by magnetic adsorption or bolt fixation. Magnetic adsorption installation is suitable for the case where the motor base is made of metal material and the surface is flat, and the sensor is adsorbed on the base by a strong magnet; the bolt fixation method is more firm and reliable, and is suitable for occasions with long-term operation or large vibration. Pay attention to the direction adjustment and cable connection of the sensor during installation to ensure accurate transmission of vibration signals.

[0090] The installation methods of the vibration sensors on the polishing head bracket and transmission components are similar. Select appropriate installation positions and fixation methods according to the structural characteristics of the components to ensure that the sensors can monitor the vibration situation of the components and transmit the vibration data to the data acquisition node in a timely manner.

[0091] Installation of data acquisition node and data concentrator

[0092] Installation of data acquisition node:

[0093] According to the distribution of the sensors, install the data acquisition node at a position close to the sensor cluster, such as inside the control cabinet of the polishing machine or in a dedicated chassis nearby. Pay attention to good ventilation and heat dissipation of the data acquisition node during installation to avoid affecting its performance and stability due to high temperature.

[0094] Connect and debug the connection cable or wireless transmission module between the data acquisition node and the sensor according to the design requirements to ensure that the data acquisition node can normally collect sensor data.

[0095] After the connection is completed, power on the data acquisition node for testing to check whether its working status is normal, such as whether the microcontroller starts up normally, whether the ADC can collect data normally, and whether the communication module can establish a connection with the data concentrator.

[0096] Installation of the data concentrator:

[0097] The data concentrator is installed in the monitoring room of the polishing workshop or near the control system, and an environment that is dry, well-ventilated, and free from strong electromagnetic interference is selected. Fix the data concentrator on a dedicated cabinet or workbench, and connect external devices such as power supply and network cables.

[0098] After the installation is completed, perform hardware initialization configuration on the data concentrator, such as setting network parameters and formatting the storage device partition, then install the data receiving and forwarding software, and perform software configuration and debugging to ensure that the data concentrator can receive data from the data acquisition node normally and forward the data accurately to the control system.

[0099] System debugging and operation

[0100] System debugging:

[0101] After the system installation is completed, first calibrate and debug the sensors. Use standard temperature sources, pressure sources, flow sources, vibration tables and other devices to calibrate the corresponding sensors, and adjust the zero point, range and sensitivity parameters of the sensors to ensure the accuracy of the sensor measurement data.

[0102] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention, and they should all be covered by the scope of the claims and the description of the present invention.

Claims

1. A polishing machine monitoring system, characterized in that: include: Multiple temperature sensors are respectively installed in the polishing head, motor, transmission gear box and polishing liquid cooling system to monitor the temperature of each component in real time; A plurality of pressure sensors are respectively arranged at the inlet, outlet and each branch pipeline of the polishing liquid supply pipeline to monitor the pressure state of the polishing liquid; A flow sensor is arranged on the polishing liquid supply pipeline and is used to monitor the flow change of the polishing liquid; Multiple vibration sensors are respectively arranged on the body frame, motor base, polishing head bracket and key transmission components of the polishing machine to monitor the vibration characteristics of the polishing machine; The data acquisition node unit is responsible for collecting the data from the above sensors and performing preliminary data preprocessing; The data concentrator center is responsible for aggregating the data from the data acquisition nodes and passing it to the control system for analysis and processing.

2. The polishing machine monitoring system according to claim 1, characterized in that: The temperature sensors include a micro-thermocouple sensor, a thermistor temperature sensor built into the motor, and an optical fiber temperature sensor in the gear box.

3. The polishing machine monitoring system according to claim 1, characterized in that: It also includes a wireless network communication module, which is used for wireless data transmission between sensors and data acquisition nodes, and implements encryption protection on the transmitted data.

4. The polishing machine monitoring system according to claim 3, characterized in that: During the data communication process, the wireless network communication module uses the AES encryption algorithm to ensure the secure transmission of sensor data.

5. The polishing machine monitoring system according to claim 1, characterized in that: It also includes a fault diagnosis module, which can diagnose the operating status of the polishing machine based on the collected sensor data and provide targeted fault solutions.

6. The polishing machine monitoring system according to claim 1, characterized in that: It also includes a predictive maintenance module that predicts the maintenance needs of the polishing machine based on the stored historical sensor data, and plans and executes maintenance tasks in advance.

7. A method for using a polishing machine monitoring system, based on the polishing machine monitoring system according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step S01, capturing data from each sensor in real time through a data acquisition node; Step S02: The data acquisition node pre-processes the acquired data and then sends the processed data to the data concentrator; Step S03: After receiving the data, the data concentrator transmits it to the control system, which performs data analysis, fault diagnosis, status monitoring and alarm processing.

8. The method for using the polishing machine monitoring system according to claim 7, characterized in that: The following steps are also included: The control system dynamically adjusts the process parameters of the polishing machine based on the real-time data received.

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