Disassembling and assembling structure

Abstract

The disassembly and assembly structure comprises a first moving assembly, the first moving assembly is connected with a second moving assembly through a connecting assembly, and a clamping jaw assembly is arranged at the end of the second moving assembly; when moving up and down, the first moving assembly can drive the second moving assembly to move in the radial direction through the connecting assembly, and then the diameter of a circle defined by the clamping jaw assemblies is adjusted. Through the precise clamping function of the clamping jaw assembly, the breaking risk caused by uneven force during manual operation is avoided. And meanwhile, accurate positioning and clamping of the heating disc are achieved through an automatic mechanical structure, the problems of complexity and low error-tolerant rate of manual operation are solved, rapid and efficient operation is achieved, the working efficiency is remarkably improved, and the labor intensity of operators is reduced. That is, according to the embodiment, the problems that the heating disc is prone to fragmentation, complex in operation and low in efficiency are effectively solved, and reliable technical support is provided for disassembly and assembly of the heating disc in semiconductor thin film deposition equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical fixing, and particularly to a disassembly and assembly structure. Background Art

[0002] In semiconductor equipment, especially in thin film deposition equipment, the heating plate in the reaction chamber is one of the core components at the back end. The heating plate has a high unit price, a long manufacturing cycle, and is prone to fragmentation. Therefore, protection should be provided in all aspects such as material transportation, use, storage, maintenance, and passive disassembly and assembly of the heating plate caused by replacing other materials, so as to minimize the damage risk of the heating plate as much as possible.

[0003] However, the heating plates of current mainstream machines are relatively large in size and are made of hard and brittle ceramics. Therefore, there is a high risk of fragmentation in the maintenance, replacement, disassembly, and assembly links. Since the heating plate has a high unit price and a long delivery period, once a problem occurs, it will seriously affect the normal operation of the machine and cause relatively large economic losses. Moreover, most current machines are of a compact design, so the spacing between the heating plate and other components in the reaction chamber is relatively small, which poses a great challenge to manually disassembling, installing, and mounting the heating plate. In addition, manual operation has low reliability, a low error tolerance rate, low efficiency, consumes a lot of man-hours, and the operators are also relatively tired. Therefore, it is necessary to develop a tooling tool for the disassembly and installation of heating plates to improve the safety of the heating plate in the disassembly, assembly, and installation links, while improving work efficiency and reducing the labor intensity of operators. Summary of the Invention

[0004] Embodiments of the present invention provide a disassembly and assembly structure, which solves the technical problems of low reliability and time-consuming and laborious when installing and disassembling manually.

[0005] To solve the above problems, according to one aspect of the present application, embodiments of the present invention provide a disassembly and assembly structure, which includes a first moving component, a connecting component, a second moving component, and a claw component. The first moving component is connected to the second moving component through the connecting component, and the claw component is arranged at the end of the second moving component. Among them, when the first moving component moves up and down, it can drive the second moving component to move radially through the connecting component, thereby adjusting the diameter of the circle formed by the claw component.

[0006] In some embodiments, the first moving component includes a central column, a slider, and a locking unit. The slider is sleeved on the central column, and both the slider and the central column have fixing holes. The locking unit cooperates with the fixing holes, so that the first moving component has a first state of locking the disassembly and assembly structure and a second state of releasing the disassembly and assembly structure.

[0007] In some embodiments, the locking unit includes a fixing member, a first hole formed in the slider, and a second hole formed in the central column; when the fixing member passes through the first hole and the second hole simultaneously, the first moving assembly is in the first state, and vice versa, the first moving assembly is in the second state.

[0008] In some embodiments, there are at least two of the connecting assemblies, and each connecting assembly includes a first connecting rod and a second connecting rod. One end of the first connecting rod is hinged to the slider, the other end of the first connecting rod is connected to one end of the second connecting rod, and the other end of the second connecting rod is connected to the claw assembly through the second moving assembly; wherein, one end of the second connecting rod can be inserted into the other end of the first connecting rod, and the inserted length can be adjusted so that the connecting assembly has different lengths.

[0009] In some embodiments, the second connecting rod includes a rod body. One end of the rod body has a first mating section, and there are at least two third holes on the first mating section. The first connecting rod is of a hollow structure and has a fourth hole thereon. The fourth hole cooperates with different third holes so that the connecting assembly has different lengths; the other end of the rod body has a second mating section, and the second mating section is hinged to the second moving assembly.

[0010] In some embodiments, the connecting assembly further includes a bracket. The bracket has extension sections with the same number as the connecting assemblies. At least two of the extension sections extend radially. The claw assembly is located at the bottom of the extension sections, and the bottom end of the second moving assembly acts on the claw assembly after passing through the through holes of the extension sections; the central column is fixed to the bracket.

[0011] In some embodiments, the connecting assembly further includes a limit block. The limit block is fixed to both sides of the second moving assembly, and its bottom is closely attached to the surface of the extension section.

[0012] In some embodiments, the claw assembly includes at least two claws. The number of claws is the same as the number of extension sections, and they are arranged at the bottom of the extension sections in one-to-one correspondence; wherein, the claw has a bent portion facing inwards.

[0013] In some embodiments, the inner surface of the bent portion has an anti-wear pad.

[0014] In some embodiments, there are three connecting assemblies, and the three connecting assemblies are evenly distributed circumferentially on the outer periphery of the slider and extend radially.

[0015] Compared with the prior art, the disassembly and assembly structure of the present invention has at least the following beneficial effects:

[0016] The disassembly and assembly structure provided by the present invention includes a first moving component, a connecting component, a second moving component, and a claw component. The first moving component is connected to the second moving component through the connecting component, and the claw component is arranged at the end of the second moving component. Wherein, when the first moving component moves up and down, it can drive the second moving component to move radially through the connecting component, thereby adjusting the diameter of the circle formed by the claw component.

[0017] In this embodiment, through the precise clamping function of the claw component, the risk of fragmentation caused by uneven force during manual operation is avoided, and the safety of the heating plate is improved. At the same time, through the automated mechanical structure, the precise positioning and clamping of the heating plate are realized, reducing the complexity of manual operation and the low fault tolerance rate. Moreover, in this embodiment, through the mechanized disassembly and assembly tool, rapid and efficient operation is achieved, significantly improving the work efficiency and reducing the labor intensity of the operator. That is to say, in this embodiment, through the mechanized and automated design, the problems of easy fragmentation, complex operation, and low efficiency of the heating plate are effectively solved, providing reliable technical support for the disassembly and assembly of the heating plate in the semiconductor thin film deposition equipment.

[0018] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly and implement it according to the content of the description, the following describes the preferred embodiments of the present invention in detail in conjunction with the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0020] Figure 1 shows a schematic structural diagram of a disassembly and assembly structure provided by an embodiment of the present invention;

[0021] Figure 2 shows a first schematic structural diagram of a disassembly and assembly structure provided by an embodiment of the present invention in a working state;

[0022] Figure 3 shows a second schematic structural diagram of a disassembly and assembly structure provided by an embodiment of the present invention in a working state;

[0023] Figure 4 shows a schematic structural diagram of a first connecting rod in a disassembly and assembly structure provided by an embodiment of the present invention;

[0024] Figure 5Shows the structural schematic diagram of the second connecting rod in a disassembly and assembly structure provided by an embodiment of the present invention;

[0025] Figure 6 Shows the exploded view of a first moving component in a disassembly and assembly structure provided by an embodiment of the present invention;

[0026] Figure 7 Shows another exploded view of a first moving component in a disassembly and assembly structure provided by an embodiment of the present invention;

[0027] Reference numerals:

[0028] 1. First moving component; 11. Central column; 12. Slide block; 13. Locking unit; 131. Fixed part; 132. First hole; 133. Second hole; 2. Connection component; 21. First connecting rod; 22. Second connecting rod; 23. Limit block; 24. Bracket; 25. Extension section; 211. Fourth hole; 221. Connecting rod body; 222. First mating section; 223. Second mating section; 224. Third hole; 251. Through hole; 3. Second moving component; 4. Claw component; 41. Claw; 42. Bent portion; 43. Wear-resistant pad; 5. Heating plate. Detailed implementation manners

[0029] To further elaborate on the technical means and effects adopted by the present invention to achieve the intended invention purpose, the following combines the drawings and preferred embodiments to detail the specific implementation manners, structures, features, and their effects of the application according to the present invention. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. In addition, the specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0030] In the description of the present invention, it should be clear that the terms "first", "second", etc. in the description and claims of the present invention and the above drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence; the terms "vertical", "horizontal", "longitudinal", "front", "rear", "left", "right", "up", "down", "horizontal", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention, rather than meaning that the indicated device or element must have a specific orientation or position, so it cannot be understood as a limitation to the present invention.

[0031] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] To better understand the above technical solution, the following will describe the above technical solution in detail in conjunction with the accompanying drawings of the specification and specific embodiments.

[0033] This embodiment provides a disassembly and assembly structure, as Figures 1-7 shown. The disassembly and assembly structure includes a first moving component 1, a connecting component 2, a second moving component 3, and a claw component 4. The first moving component 1 is connected to the second moving component 3 through the connecting component 2, and the claw component 4 is disposed at the end of the second moving component 3. Wherein, when the first moving component 1 moves up and down, it can drive the second moving component 3 to move radially through the connecting component 2, thereby adjusting the diameter of the circle formed by the claw component 4.

[0034] In order to explain more clearly below, it is assumed that the object to be disassembled and assembled in this embodiment is the heating plate 5. Of course, the disassembly and assembly structure provided in this embodiment can also disassemble other workpieces.

[0035] The first moving component 1 is located at the top of the entire disassembly and assembly structure and can move up and down. Its main function is to drive the connecting component 2 to make radial adjustments through up and down movements, thereby controlling the clamping or loosening action of the claw component 4. The connecting component 2 connects the first moving component 1 and the second moving component 3 and plays a role in transmitting force. When the first moving component 1 moves up and down, the connecting component 2 moves accordingly, driving the second moving component 3 to move radially. The second moving component 3 is located between the first moving component 1 and the claw component 4 and realizes radial movement through the drive of the connecting component 2. Its main function is to adjust the diameter of the circle formed by the claw component 4 to meet the clamping requirements of the heating plate 5. The claw component 4 is disposed at the end of the second moving component 3 and is used to clamp the heating plate 5. When the second moving component 3 moves radially, the diameter of the circle formed by the claw component 4 changes, thereby realizing the clamping or loosening of the heating plate 5.

[0036] With the disassembly and assembly structure provided in this embodiment, the disassembly process of the heating plate 5 is as follows: The first moving component 1 moves upward, driving the connection component 2 to retract inward, and further causing the second moving component 3 to retract radially inward. As the second moving component 3 retracts radially, the diameter of the circle formed by the claw components 4 becomes smaller, clamping the heating plate 5. After the heating plate 5 is clamped, it can be removed from the reaction chamber by other means to complete the disassembly.

[0037] With the disassembly and assembly structure provided in this embodiment, the installation process of the heating plate 5 is as follows: Place the heating plate 5 inside the circle formed by the claw components 4. After clamping it, move the entire disassembly and assembly structure together with the heating plate 5 to the reaction chamber by means of a robotic arm or manually. Then, the first moving component 1 moves downward, driving the connection component 2 and the second moving component 3 to expand outward, increasing the diameter of the circle formed by the claw components 4. After the claw components 4 release the heating plate 5, place it in the reaction chamber to complete the installation.

[0038] The heating plates of current mainstream machines are large in size and made of brittle ceramics, and are prone to cracking during disassembly and assembly. Through the precise clamping function of the claw components 4 in this embodiment, the risk of cracking caused by uneven force during manual operation is avoided, improving the safety of the heating plate. At the same time, the existing equipment is designed compactly, and the distance between the heating plate and other components in the reaction chamber is small, posing great challenges for manual operation. In response to this, this embodiment realizes the precise positioning and clamping of the heating plate through an automated mechanical structure, reducing the complexity of manual operation and the low fault tolerance rate. Moreover, in response to the problem that manual disassembly and assembly of the heating plate takes a long time and the operators are prone to fatigue, this embodiment realizes fast and efficient operation through mechanized disassembly and assembly tools, significantly improving the work efficiency and reducing the labor intensity of the operators. That is to say, this embodiment effectively solves problems such as easy cracking, complex operation, and low efficiency of the heating plate through mechanized and automated design, providing reliable technical support for the disassembly and assembly of the heating plate in semiconductor thin film deposition equipment.

[0039] In a specific embodiment, the first moving component 1 includes a central column 11, a slider 12, and a locking unit 13. The slider 12 is sleeved on the central column 11, and both the slider 12 and the central column 11 have fixing holes. The locking unit 13 cooperates with the fixing holes, so that the first moving component 1 has a first state of locking the disassembly and assembly structure and a second state of releasing the disassembly and assembly structure.

[0040] The central column 11 is located at the central position of the first moving component 1. As a support and guiding component, its main function is to provide the up-and-down movement track for the slider 12 and ensure the stability of the movement. The slider 12 is sleeved on the central column 11 and can slide up and down along the central column 11. Its main function is to drive the movement of the connecting component 2 (such as retracting inward or expanding outward) through the up-and-down movement, thereby indirectly controlling the clamping or loosening action of the jaw component 4. The locking unit 13 is arranged between the slider 12 and the central column 11, and its main function is to fix the slider 12 at a specific position on the central column 11. When it is necessary to fix the disassembly and assembly structure at a specific position (such as after clamping the heating plate), the slider 12 slides upward along the central column 11. At this time, the locking unit 13 fixes the slider 12 at the current position by cooperating with the fixing hole on the central column 11. When it is necessary to adjust or release the disassembly and assembly structure (such as loosening the heating plate), the locking unit 13 releases the fixation of the slider 12, and then the slider 12 slides downward along the central column 11 to the target position.

[0041] In this embodiment, the central column 11, as a support and guiding component, ensures the stability of the up-and-down movement of the slider 12, thereby improving the movement accuracy of the entire disassembly and assembly structure. The locking unit 13 ensures the stability and safety of the disassembly and assembly structure by fixing the slider 12 at a specific position on the central column 11, thereby improving the reliability of the entire operation.

[0042] In a specific embodiment, the locking unit 13 includes a fixing member 131, a first hole 132 opened on the slider 12, and a second hole 133 opened on the central column 11; when the fixing member 131 passes through the first hole 132 and the second hole 133 simultaneously, the first moving component 1 is in the first state, and vice versa, the first moving component 1 is in the second state.

[0043] The fixing member 131 is located in the locking unit 13 (i.e., between the slider 12 and the central column 11), and its main function is to fix the slider 12 on the central column 11 (such as in the locked state) by passing through the first hole 132 and the second hole 133 simultaneously. The first hole 132 is opened on the slider 12 and is used in cooperation with the fixing member 131; its main function is to provide a position for the fixing member 131 to pass through and be fixed to achieve the locking function of the slider 12. The second hole 133 is opened on the central column 11 and is used in cooperation with the fixing member 131; its main function is to provide a position for the fixing member 131 to pass through and be fixed to achieve the locking function of the slider 12.

[0044] In the first state (i.e., the locked state): The fixing member 131 passes through the first hole 132 formed in the slider 12 and the second hole 133 formed in the central column 11 at the same time; at this time, the fixing member 131 fixes the slider 12 on the central column 11 to ensure the stability and safety of the entire disassembly and assembly structure. In the second state (i.e., the released state): The fixing member 131 does not pass through the first hole 132 formed in the slider 12 and the second hole 133 formed in the central column 11 at the same time. It can be only disposed in the second hole 133 or not disposed in any hole. At this time, the fixing member 131 does not fix the slider 12 on the central column 11 to facilitate the adjustment or release of the entire disassembly and assembly structure.

[0045] In a specific embodiment, there are at least two of the connecting assemblies 2. Each connecting assembly 2 includes a first connecting rod 21 and a second connecting rod 22. One end of the first connecting rod 21 is hinged to the slider 12. The other end of the first connecting rod 21 is connected to one end of the second connecting rod 22. The other end of the second connecting rod 22 is connected to the claw assembly 4 through the second moving assembly 3; wherein, one end of the second connecting rod 22 can be inserted into the other end of the first connecting rod 21, and the insertion length can be adjusted so that the connecting assembly 2 has different lengths.

[0046] One end of the first connecting rod 21 is hinged to the slider 12, and the other end is connected to one end of the second connecting rod 22; its main function is to convert the up and down movement of the slider 12 into the movement of the second connecting rod 22 to control the claw assembly 4. One end of the second connecting rod 22 is connected to the other end of the first connecting rod 21, and the other end is connected to the claw assembly 4 through the second moving assembly 3; its main function is to adjust the length inserted into the first connecting rod 21 to meet the requirements of heating plates of different sizes and control the claw assembly. The second moving assembly is located at the other end of the second connecting rod 22 and is connected to the claw assembly 4; its main function is to transmit the movement of the second connecting rod 22 to the claw assembly 4.

[0047] In this embodiment, one end of the second connecting rod 22 can be inserted into the other end of the first connecting rod 21, and the insertion length can be adjusted so that the connecting assembly 2 has different lengths. For example, if it is inserted deeper, at this time the connecting assembly 2 is shorter, and the circle formed by the claw assembly 4 at its end is smaller. This disassembly and assembly structure is suitable for heating plates with a smaller diameter. On the contrary, if it is inserted shallower, at this time the connecting assembly 2 is longer, and the circle formed by the claw assembly 4 at its end is larger. This disassembly and assembly structure is suitable for heating plates with a larger diameter.

[0048] In a specific embodiment, the second link 22 includes a link body 221. One end of the link body 221 has a first mating section 222, and at least two third holes 224 are provided on the first mating section 222. The first link 21 has a hollow structure with a fourth hole 211 thereon. The fourth hole 211 cooperates with different third holes 224 to make the connection assembly 2 have different lengths. The other end of the link body 221 has a second mating section 223, and the second mating section 223 is hinged to the second moving assembly 3.

[0049] The first mating section 222 is located at one end of the second link 22 inserted into the first link 21, and a plurality of third holes 224 are formed on its surface. Its function is to adjust the insertion depth of the two links by aligning with the fourth hole 211 of the first link 21. The third holes 224 are formed on the first mating section 222 and are used to be fixed to the fourth hole 211 of the first link 21 by pins or bolts. Its function is to provide fixed points at different insertion positions. The fourth hole 211 is formed on the surface of the hollow structure of the first link 21 and is fixed after being aligned with the third hole 224. Its function is to cooperate with the third hole to lock the insertion length of the second link 22. The second mating section 223 is located at the other end of the second link 22 and is connected to the second moving assembly 3 by a hinged manner. Its function is to transfer the movement of the second link 22 to the jaw assembly 4 and at the same time allow rotational freedom to adapt to radial movement.

[0050] When there are two third holes 224, the length of the connection assembly 2 can be adjusted through the following steps: Insert the first mating section 222 of the second link 22 into the hollow end of the first link 21, adjust the insertion depth so that the fourth hole 211 of the first link 21 is aligned with one of the third holes 224, and use a pin or bolt to pass through the aligned fourth hole 211 and third hole 224 to lock the current insertion depth. Select the third hole 224 closer to the end of the second link 22 to be aligned with the fourth hole 211. At this time, the insertion is deeper. As Figure 3 shown, the total length of the connection assembly 2 is shortened. Select the third hole 224 farther from the end to be aligned with the fourth hole 211. At this time, the insertion is shallower. As Figure 2 shown, the total length of the connection assembly 2 is extended.

[0051] Through the above method in this embodiment, the connection assembly 2 can adapt to heating plates 5 with different diameters to realize the adjustment of the clamping range.

[0052] In a specific embodiment, the connection assembly 2 further includes a bracket 24. The bracket 24 has extension segments 25 with the same number as the connection assembly 2. At least two of the extension segments 25 extend radially. The jaw assembly 4 is located at the bottom of the extension segments 25. The bottom end of the second moving assembly 3 acts on the jaw assembly 4 after passing through the through hole 251 of the extension segment 25. The central column 11 is fixed to the bracket 24.

[0053] The bracket 24 is located in the central area of the disassembly and assembly structure and is fixedly connected to the central column 11 of the first moving component 1, serving as the support base of the entire structure. The bracket 24 bears the central column 11 and forms an integral framework with the connecting components 2 and the jaw components 4 through the extension sections 25 to ensure the structural stability. The extension sections 25 extend radially outward from the center of the bracket 24, and the number is the same as that of the connecting components 2. The end of each extension section 25 corresponds to a jaw component 4. The extension sections 25 provide an installation position for the jaw components 4 and limit their movement only in the radial direction to avoid deflection or inclination. The through hole 251 is opened at the end of the extension section 25 (near the jaw component 4) for the bottom end of the second moving component 3 to pass through. The through hole 251 allows the second moving component 3 to pass through the extension section 25 and then connect with the jaw component 4, ensuring that the radial movement of the second connecting rod 22 is directly converted into the opening and closing action of the jaws. And through the cooperation between the inner wall of the through hole 251 and the second moving component 3, the movement track of the jaw component 4 is restricted, improving the operation accuracy.

[0054] In a specific embodiment, the connecting component 2 further includes a limiting block 23, and the limiting block 23 is fixed on both sides of the second moving component 3, and its bottom is closely attached to the surface of the extension section 25.

[0055] In this embodiment, the bottom of the limiting block 23 is in direct contact with the surface of the extension section 25 to form a physical support in the vertical direction, preventing the second moving component 3 from shaking up and down or warping due to uneven force or load offset during movement. The contact surface between the bottom of the limiting block 23 and the surface of the extension section 25 serves as a sliding pair, forcing the second moving component 3 to only translate radially along the extension section 25, eliminating the attitude deviation of the jaw component 4 caused by the inclination or torsion of the second moving component 3. The limiting blocks 23 are symmetrically arranged on both sides of the second moving component 3, and the design of its bottom closely attached to the surface of the extension section 25 can form symmetrically distributed frictional forces and supporting forces to further offset the non-axial torque, ensuring that the movement track of the jaw component 4 is strictly aligned radially. That is to say, the bottom of the limiting block 23 is closely attached to the surface of the extension section 25, and through the dual functions of vertical support and sliding surface guidance, the degree of freedom of the second moving component 3 during movement is restricted, forcing it to only translate along the preset path, thereby avoiding the risk of unstable clamping or heating plate cracking caused by the warping of the jaw component 4.

[0056] In a specific embodiment, the jaw assembly 4 includes at least two jaws 41. The number of the jaws 41 is the same as that of the extension segments 25, and they are correspondingly arranged at the bottom of the extension segments 25. Among them, the jaw has an inward bending portion 42. The bending portion 42 is located at the clamping end of the jaw 41 and bends inward (towards the center direction of the heating plate 5). The bending portion 42 fits the edge of the heating plate 5, and its radian matches the shape of the outer edge of the heating plate 5, increasing the contact area and enhancing the clamping stability. The bending portion 42 forms a "hook-like" structure, restricting the displacement of the heating plate 5 in the vertical direction and avoiding slippage caused by vibration or inclination during the clamping process. In addition, the bending portion 42 can also transfer the clamping force from the end of the jaw 41 to the side wall of the heating plate 5, reducing local stress concentration and lowering the risk of ceramic material fragmentation.

[0057] The inner surface of the bending portion 42 is provided with an anti-wear pad 43. The anti-wear pad 43 is made of a flexible material (such as rubber, polyurethane), absorbing the impact force during clamping and preventing the hard jaw 41 from directly contacting the surface of the heating plate 5 to cause scratches or microcracks.

[0058] In a specific embodiment, there are three connecting components 2. The three connecting components 2 are evenly distributed along the circumferential direction on the outer periphery of the slider 12 and extend radially.

[0059] The three connecting components 2 are evenly distributed along the circumferential direction (spaced 120° apart), and the corresponding three jaws 41 form a three-point clamping structure. The three points have a natural self-centering characteristic geometrically. Even if there are slight dimensional deviations or installation errors in the heating plate 5, the three-point clamping can still automatically adjust to a state of uniform force, ensuring that the clamping center is aligned with the geometric center of the heating plate 5. In addition, the three jaws 41 are symmetrically distributed, and the clamping force can be evenly applied to the circumference of the heating plate 5, avoiding local stress concentration caused by single-point or double-point clamping and reducing the risk of fragmentation of the hard and brittle ceramic material.

[0060] In addition, components such as lift pins and electrostatic chuck electrodes are usually provided on the surface of the semiconductor heating plate 5. These components need to be avoided from being collided during the disassembly and assembly process. When the three jaws 41 are evenly distributed in the circumferential direction, their clamping points can be accurately designed at the gap positions of the wafer support components (for example, avoiding the support column or electrode distribution area), ensuring that the clamping operation does not interfere with the key components. Three points determine a plane, and the three-point clamping can effectively restrict the degrees of freedom of the heating plate 5 in the radial, axial, and rotational directions, preventing it from shaking or shifting during the movement process. This characteristic is especially suitable for the compact reaction chamber environment, avoiding the heating plate 5 from colliding with other components in the chamber.

[0061] As described above, it is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A disassembly and assembly structure, characterized in that: The disassembly and assembly structure includes a first movable component, a connecting component, a second movable component and a claw assembly, wherein the first movable component is connected to the second movable component via the connecting component, and the claw assembly is arranged at the end of the second movable component; wherein when the first movable component moves up and down, it can drive the second movable component to move radially through the connecting component, thereby adjusting the diameter of the circle surrounded by the claw assembly.

2. The disassembly and assembly structure according to claim 1, characterized in that: The first movable component includes a central column, a slider and a locking unit. The slider is sleeved on the central column, and both the slider and the central column have fixing holes. The locking unit cooperates with the fixing holes, so that the first movable component has a first state of locking the disassembly structure and a second state of releasing the disassembly structure.

3. The disassembly and assembly structure according to claim 2, characterized in that: The locking unit includes a fixing member, a first hole opened on the slider, and a second hole opened on the central column; when the fixing member passes through the first hole and the second hole at the same time, the first moving component is in the first state, otherwise the first moving component is in the second state.

4. The disassembly and assembly structure according to claim 2, characterized in that: The connecting components have at least two, each of which includes a first connecting rod and a second connecting rod, one end of the first connecting rod is hinged to the slider, the other end of the first connecting rod is connected to one end of the second connecting rod, and the other end of the second connecting rod is connected to the claw assembly through the second moving component; wherein one end of the second connecting rod can be inserted into the other end of the first connecting rod, and the insertion length can be adjusted so that the connecting components have different lengths.

5. The disassembly and assembly structure according to claim 4, characterized in that: The second connecting rod includes a connecting rod body, one end of which has a first mating section, the first mating section has at least two third holes, the first connecting rod is a hollow structure, and has a fourth hole thereon, the fourth hole cooperates with different third holes so that the connecting assembly has different lengths; the other end of the connecting rod body has a second mating section, and the second mating section is hinged to the second moving assembly.

6. The disassembly and assembly structure according to claim 5, characterized in that: The connecting component also includes a bracket, which has an extension section with the same number as the connecting component, at least two of the extension sections extend radially, the claw assembly is located at the bottom of the extension section, and the bottom end of the second movable component passes through the through hole of the extension section and acts on the claw assembly; the central column is fixed on the bracket.

7. The disassembly and assembly structure according to claim 6, characterized in that: The connecting assembly further comprises a limiting block, which is fixed on both sides of the second moving assembly and has a bottom closely attached to the surface of the extending section.

8. The disassembly and assembly structure according to claim 6, characterized in that: The clamping claw assembly includes at least two clamping claws, the number of which is the same as the number of the extension sections, and the clamping claws are arranged at the bottom of the extension section in a one-to-one correspondence; wherein the clamping claws have an inward bending portion.

9. The disassembly and assembly structure according to claim 8, characterized in that: The inner surface of the bent portion is provided with an anti-wear pad.

10. The disassembly and assembly structure according to any one of claims 4 to 9, characterized in that: There are three connecting assemblies, which are evenly distributed on the outer circumference of the sliding block along the circumferential direction and extend along the radial direction.

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