Liquid ejecting apparatus, liquid ejecting method, and method for manufacturing article

Abstract

The invention provides a liquid ejecting apparatus, a liquid ejecting method, and a method of manufacturing an article. The liquid ejecting apparatus ejects liquid to a plurality of target regions on a substrate for manufacturing a display panel having a plurality of pixels, and includes: an ejection head including a first nozzle and a second nozzle; a drive mechanism for performing scanning drive for relatively scanning the substrate in the first direction with respect to the ejection head; and a control unit that controls the drive mechanism, the plurality of target regions including a first target region and a second target region that exist on a scan line parallel to the first direction, the width of the second target region in the first direction being narrower than the width of the first target region in the first direction. A first scanning drive for supplying the first liquid to the first target region and a second scanning drive for supplying the first liquid to the first target region and supplying the second liquid to the second target region are performed, and a second scanning speed in the second scanning drive is made slower than a first scanning speed in the first scanning drive.

Description

Technical Field

[0001] The present invention relates to a liquid ejection device, a liquid ejection method, and a method for manufacturing an article. Background Art

[0002] In recent years, when manufacturing various functional elements, attempts have been made to use a liquid ejection device (inkjet device) to form a pattern (patterning) by applying a material for the functional element onto a substrate. Patterning using a liquid ejection device has advantages such as high material utilization efficiency because it can be on-demand patterning, a relatively small manufacturing device because it is a non-vacuum process, and the ability to apply materials over a large area and at high speed.

[0003] Consider applying such a liquid ejection device to the manufacturing process of a display device. In display devices, various display methods have been proposed, and in particular, the development of display devices using organic EL elements is underway. Since the materials for organic EL elements are expensive, a liquid ejection device with high material utilization efficiency and the ability to apply materials over a large area and at high speed is suitable for the manufacture of organic EL elements.

[0004] In addition, in recent years, as disclosed in Japanese Patent Laid-Open No. 2002-208485, in order to cope with differences in the luminous efficiency of each of the red (R), green (G), and blue (B) colors in the materials for organic EL elements, an organic EL display has been developed in which the pixel width (pixel width) of each RGB is different.

[0005] When the RGB pixel widths are different, for each pixel, the required landing accuracy (ejection accuracy) of the liquid by the liquid ejection device is different, and for pixels with a narrow pixel width, a higher landing accuracy than that of pixels with a wide pixel width is required. To improve the landing accuracy of the liquid, for example, it is possible to consider reducing the scanning speed of the substrate on which the liquid lands. By scanning the substrate at a low speed, it is possible to reduce the landing error caused by deviations in the ejection speed during each ejection of the liquid.

[0006] In addition, when the RGB pixel widths are different, it is necessary to change the amount of liquid (inks of each color) ejected from the liquid ejection device according to the RGB pixel widths. Specifically, it is necessary to eject a small amount of liquid onto pixels with a narrow pixel width and a large amount of liquid onto pixels with a wide pixel width. To eject a large amount of liquid onto a pixel, for example, it is possible to consider ejecting the liquid onto the pixel during each scan while repeatedly scanning the substrate multiple times. In addition, to perform multiple scans efficiently (with high productivity), it is necessary to increase the scanning speed of the substrate. Summary of the Invention

[0007] Problems to be Solved by the Invention

[0008] However, in the prior art, the scanning speed is not changed according to the pixel width of RGB, but the substrate is scanned at a low speed based on pixels with a narrow pixel width, that is, pixels that require landing accuracy, which may lead to a reduction in productivity.

[0009] The present invention provides a liquid ejection device that is advantageous in terms of productivity.

[0010] Solution to the problem

[0011] As a liquid ejection device according to an aspect of the present invention, liquid is ejected onto a plurality of target areas on a substrate for manufacturing a display panel having a plurality of pixels. The liquid ejection device is characterized in that it includes: a nozzle head including a first nozzle for ejecting a first liquid and a second nozzle for ejecting a second liquid; a driving mechanism for performing a scanning drive for relatively scanning the substrate in a first direction with respect to the nozzle head; and a control unit. The plurality of target areas include a first target area and a second target area existing on a scanning line parallel to the first direction, and the width of the second target area in the first direction is narrower than the width of the first target area in the first direction. The control unit controls the driving mechanism to perform a first scanning drive for supplying the first liquid to the first target area and a second scanning drive for supplying the first liquid to the first target area and supplying the second liquid to the second target area, and makes the second scanning speed in the second scanning drive slower than the first scanning speed in the first scanning drive.

[0012] As another aspect of the present invention, a liquid ejection method using a liquid ejection device is a liquid ejection method. The liquid ejection device includes a nozzle head including a first nozzle for ejecting a first liquid and a second nozzle for ejecting a second liquid, and ejects liquid onto a plurality of target areas on a substrate for manufacturing a display panel having a plurality of pixels. The liquid ejection method is characterized in that it has a step of performing a scanning drive for relatively scanning the substrate in a first direction with respect to the nozzle head. The plurality of target areas include a first target area and a second target area existing on a scanning line parallel to the first direction, and the width of the second target area in the first direction is narrower than the width of the first target area in the first direction. In the step, a first scanning drive for supplying the first liquid to the first target area and a second scanning drive for supplying the first liquid to the first target area and supplying the second liquid to the second target area are performed, and the second scanning speed in the second scanning drive is slower than the first scanning speed in the first scanning drive.

[0013] A method for manufacturing an article according to another aspect of the present invention is characterized in that the method for manufacturing the article includes: a step of ejecting a liquid onto a substrate using the above-described liquid ejecting device; a step of processing the substrate onto which the liquid has been ejected; and a step of manufacturing an article from the processed substrate.

[0014] A further object or other aspect of the present invention will be clarified in the embodiments described below with reference to the accompanying drawings.

[0015] Effects of the Invention

[0016] According to the present invention, for example, a liquid ejecting device advantageous in terms of productivity can be provided. Description of the Drawings

[0017] Figure 1A and Figure 1B is a schematic diagram showing the structure of a liquid ejecting device according to one aspect of the present invention.

[0018] Figure 2 is a diagram showing an example of the arrangement of pixel regions.

[0019] Figure 3A , 3B and 3C are diagrams showing an example of the state of pixel regions.

[0020] Figure 4 is a flowchart for explaining the operation sequence of the liquid ejecting device.

[0021] Figure 5 is a diagram showing the positional relationship between the ejection head and the substrate held by the substrate stage.

[0022] Figure 6 is a diagram showing the relationship between the pixel region and the ink supplied to the pixel region.

[0023] Figure 7 is a flowchart for explaining the ejection data generation process.

[0024] Figure 8 is a diagram showing an example of the structure of a pixel of an OLED. Detailed Embodiments

[0025] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. In addition, the following embodiments do not limit the invention described in the claims. Although a plurality of features are described in the embodiments, not all of these plurality of features are essential for the invention, and the plurality of features can also be arbitrarily combined. Moreover, in the drawings, the same or identical structures are denoted by the same reference numerals, and redundant explanations are omitted.

[0026] Figure 1A and Figure 1BThis is a schematic diagram showing the structure of a liquid ejection device 1 as one aspect of the present invention. Figure 1A The liquid ejection device 1 is shown from the side. Figure 1B The liquid ejection device 1 is shown from above. The liquid ejection device 1 is realized, for example, as an inkjet device that ejects a liquid (ejected liquid) such as ink. In addition, in the present embodiment, "ink" refers to a liquid used to form a pattern or film on a substrate. In addition, the composition of the ink is not particularly limited, and for example, a liquid containing a solute and a solvent for forming an organic film can be used.

[0027] In this specification and the drawings, directions are represented by an XYZ coordinate system in which the direction parallel to the ejection direction of the liquid ejected from the liquid ejection device 1 is the Z axis, and two directions orthogonal to each other in a plane perpendicular to the Z axis are the X axis and the Y axis. In addition, the directions parallel to the X axis, Y axis, and Z axis in the XYZ coordinate system are set as the X direction, Y direction, and Z direction, respectively, and the plane parallel to the plane on which the substrate is disposed is the XY plane.

[0028] The liquid ejection device 1 has a substrate stage 3 that holds and drives the substrate 2. The substrate 2 is appropriately selected from a glass substrate, a plastic substrate, etc. according to the target product of article manufacturing, but in the present embodiment, it is a substrate for manufacturing a display panel having a plurality of pixels. The substrate 2 is typically a plate-like member, but as long as it is a member that functions as a substrate, it is not limited to a specific form. For example, the substrate 2 can be a deformable thin film or a circular substrate.

[0029] As Figure 1B shown, a pixel region 201 and an alignment mark 203 are provided on the substrate 2. The pixel region 201 is a region for supplying (disposing) the ink 4 ejected from the liquid ejection device 1 to form (arrange) a plurality of functional elements, which are a plurality of pixels in the present embodiment. As Figure 2 shown, the pixel region 201 includes a plurality of pixel regions 202 (target regions) arranged in the RGB order along the Y direction as the scanning direction. Figure 2 This is a diagram showing an example of the arrangement of the pixel regions 202. In the present embodiment, the pixel region 202 includes pixel regions 202r, 202g, and 202g existing on a scanning line parallel to the scanning direction. The pixel region 202r is a target region (second target region) to which red (R) ink 4r should be supplied. The pixel region 202g is a target region (first target region) to which green (G) ink 4g should be supplied, and the pixel region 202b is a target region (first target region) to which blue (B) ink 4b should be supplied. The width in the scanning direction (pixel width) of the pixel region 202r is different from the pixel widths of the pixel regions 202g and 202b. In Figure 2In the figure, three by two pixel regions 202 are shown on the substrate, but in reality, there are a very large number of pixel regions arranged. Alignment marks 203 are used when measuring the position of the substrate 2 held by the substrate stage 3. When measuring the position of the substrate 2, the camera 9 takes a picture (detects) the alignment marks 203 of the substrate 2 and measures the positions of the alignment marks 203.

[0030] The liquid ejection device 1 has a nozzle head 5 that ejects liquid, specifically droplets of ink 4, toward a predetermined position on the substrate 2. In the present embodiment, the nozzle head 5 has a function of ejecting ink 4r, ink 4g, and ink 4b as the ink 4, respectively.

[0031] The nozzle head 5 includes a nozzle head having a plurality of nozzles, and the plurality of nozzles are arranged along the X direction, which is the sub-scanning direction orthogonal (crossing) to the scanning direction, in the order of RGB. Specifically, the nozzle head 5 is constituted by arranging a nozzle head 5r for ejecting ink 4r (second liquid), a nozzle head 5g for ejecting ink 4g (first liquid), and a nozzle head 5b for ejecting ink 4b (first liquid) in the scanning direction. The nozzle head 5r includes a nozzle 51r (second nozzle) for ejecting ink 4r, the nozzle head 5g includes a nozzle 51g (first nozzle) for ejecting ink 4g, and the nozzle head 5b includes a nozzle 51b (first nozzle) for ejecting ink 4b.

[0032] The nozzle head 5, that is, the nozzle head 5r, the nozzle head 5g, and the nozzle head 5b each have a width greater than the width of the pixel region 201 in the sub-scanning direction. Therefore, by relatively scanning (driving) the substrate 2 (the substrate stage 3 holding the substrate 2) and the nozzle head 5 in the scanning direction, the nozzle head 5 can eject the ink 4 onto the entire surface of the pixel region 201. In the present embodiment, the substrate stage 3 functions as a driving mechanism for performing scanning driving to relatively scan the substrate 2 with respect to the nozzle head 5 in the scanning direction.

[0033] The liquid ejection device 1 has, for example, a control unit 11 constituted by a computer (information processing device) including a CPU, a memory, and the like. The control unit 11 uniformly controls each part of the liquid ejection device 1 according to a program stored in the memory and causes the liquid ejection device 1 to operate. For example, the control unit 11 performs scanning driving for relatively scanning the substrate stage 3 (substrate 2) with respect to the nozzle head 5 in the scanning direction multiple times, and in each scanning driving, controls the nozzle head 5 and the substrate stage 3 to supply the ink 4 to the pixel region 201 on the substrate. In addition, the control unit 11 determines the number of times of scanning driving (scanning times) to supply a predetermined amount (required ejection number, that is, the target amount of the ink 4 to be supplied to the pixel region 201) of the ink 4 to the pixel region 201.

[0034] <First Embodiment>

[0035] Refer toFigure 3A , Figure 3B , Figure 3C and Figure 4 Describe the first embodiment. As Figure 3A , 3B and Figure 3C shown, in this embodiment, the RGB ratio of the pixels, that is, the ratio of the widths (pixel widths) in the scanning direction of the pixel regions 202r, 202g, and 202b is 1.0:1.5:1.5. The pixel width of the pixel region 202r is 20.0 μm, and the pixel widths of the pixel regions 202g and 202b are 30.0 μm respectively. Therefore, compared with the pixel regions 202g and 202b, the pixel region 202r requires a high landing accuracy, but the required number of discharges, that is, the target amount of ink 4 to be supplied to the pixel region 202 is small. Here, the landing accuracy refers to the position accuracy of the ink 4 supplied from the print head 5 (nozzle) to the pixel region 202.

[0036] In addition, as long as the ratio of the widths in the scanning direction of the pixel regions 202r, 202g, and 202b is other than the same ratio (1.0:1.0:1.0), it can also be other ratios. In addition, in this embodiment, the pixel width of the pixel region 202r is narrower than the pixel widths of the pixel regions 202g and 202b, and the pixel widths of the pixel regions 202g and 202b are the same, but it is not limited thereto. For example, the pixel width of the pixel region 202r can also be greater than the pixel widths of the pixel regions 202g and 202b, or the pixel widths of the pixel regions 202g and 202b can be different from each other.

[0037] In this embodiment, the number of discharges of the ink 4r required for the pixel region 202r is set to 1 discharge, the number of discharges of the ink 4g required for the pixel region 202g is set to 2 discharges, and the number of discharges of the ink 4b required for the pixel region 202b is set to 2 discharges. The number of discharges of the ink 4 required for the pixel region 202 is determined by the area of the pixel region 202, the volume of the ink 4, the concentration of the ink 4, etc. In this embodiment, there are no particular limitations on the volume and concentration of the ink 4r supplied to the pixel region 202r, the ink 4g supplied to the pixel region 202g, and the ink 4b supplied to the pixel region 202b. For the number of discharges of the ink 4 required for each pixel region 202, as long as there is a difference between RGB. In addition, in one scan drive, the number of times of discharging the ink 4 to the pixel region 202 is not limited, and the ink 4 can also be discharged to the pixel region 202 multiple times, for example, discharged twice.

[0038] In addition, in the present embodiment, by performing two scanning drives, inks 4r, 4g, and 4b are supplied to pixel regions 202r, 202g, and 202b, respectively. Specifically, in the first scanning drive, instead of ejecting ink 4r from ejection head 5r to pixel region 202r, one shot of ink 4g and one shot of ink 4b are ejected from ejection heads 5g and 5b to pixel regions 202g and 202b, respectively. In other words, in the first scanning drive, ink 4r is not supplied to pixel region 202r, but ink 4g and ink 4b are supplied to pixel regions 202g and 202b, respectively. In the second scanning drive, one shot of ink 4r is ejected from ejection head 5r to pixel region 202r, and one shot of ink 4g and one shot of ink 4b are ejected from ejection heads 5g and 5b to pixel regions 202g and 202b, respectively. In other words, in the second scanning drive, ink 4r, ink 4g, and ink 4b are supplied to pixel regions 202r, 202g, and 202b, respectively. In addition, the number of scanning times for performing the scanning drive is not limited to 2 times, and it may be 2 times or more.

[0039] Refer to Figure 4 , and explain the operation sequence of liquid ejection device 1. Figure 4 is a flowchart for explaining the operation sequence of liquid ejection device 1. As described above, each part of liquid ejection device 1 is uniformly controlled by control unit 11 to perform this operation.

[0040] In S101, substrate 2 is carried into liquid ejection device 1 via a substrate conveyance mechanism (not shown). Substrate 2 carried into liquid ejection device 1 is held by substrate stage 3.

[0041] In S102, alignment (registration) of substrate 2 is performed. Specifically, substrate stage 3 is driven so that alignment mark 203 provided on substrate 2 is located below camera 9 (in the imaging field). Alignment mark 203 of substrate 2 held by substrate stage 3 is imaged by camera 9, and the position of alignment mark 203 is measured. Then, based on the measurement results of the positions of all alignment marks 203 obtained by camera 9, the position of substrate 2 is obtained, and substrate 2 is aligned by driving substrate stage 3 in the X direction, Y direction, and rotational direction about the Z axis.

[0042] In S103, a first scan drive is performed: ink 4r is not supplied to the pixel region 202r, while ink 4g is supplied to the pixel region 202g and ink 4b is supplied to the pixel region 202b. Specifically, while the substrate 2 (substrate stage 3 holding the substrate 2) is scanned in the scanning direction relative to the ejection head 5, one shot of ink 4g and 4b each is ejected from the ejection heads 5g and 5b (nozzles 51g and 51b) to the pixel regions 202g and 202b, respectively. At this time, ink 4r is not ejected from the ejection head 5r (nozzle 51r) to the pixel region 202r. In addition, the scanning speed (first scanning speed) of the substrate stage 3 relative to the ejection head 5 in the first scan drive is 300 mm / sec.

[0043] Figure 3B It is a diagram showing the states of the pixel regions 202r, 202g, and 202b after the first scan drive is performed. Refer to Figure 3B , ink 4r is not supplied to the pixel region 202r, while ink 4g and 4b, each being half of the target amount (1 shot out of 2 shots), are supplied to the pixel regions 202g and 202b, respectively.

[0044] In S104, a second scan drive is performed: ink 4r is supplied to the pixel region 202r, ink 4g is supplied to the pixel region 202g, and ink 4b is supplied to the pixel region 202b. Specifically, while the substrate 2 is scanned in the scanning direction relative to the ejection head 5, one shot of ink 4r, 4g, and 4b each is ejected from the ejection heads 5r, 5g, and 5b (nozzles 51r, 51g, and 51b) to the pixel regions 202r, 202g, and 202b, respectively. In addition, the scanning speed (second scanning speed) of the substrate stage 3 relative to the ejection head 5 in the second scan drive is set to 100 mm / sec, which is slower than the scanning speed in the first scan drive.

[0045] Figure 3C It is a diagram showing the states of the pixel regions 202r, 202g, and 202b after the first scan drive and the second scan drive are performed. Refer to Figure 3C , ink 4r, 4g, and 4b of the target amounts (pixel region 202r: 1 shot, pixel regions 202g and 202b: 2 shots) are supplied to the pixel regions 202r, 202g, and 202b, respectively.

[0046] In this embodiment, during the first scan drive, while the substrate 2 is scanned at a high speed relative to the ejection head 5, ink 4g is supplied to the pixel region 202g, and ink 4b is supplied to the pixel region 202b. Then, during the second scan drive, while the substrate 2 is scanned at a low speed relative to the ejection head 5, ink 4r is supplied to the pixel region 202r, ink 4g is supplied to the pixel region 202g, and ink 4b is supplied to the pixel region 202b. However, during the first scan drive, the substrate 2 may be scanned at a low speed relative to the ejection head 5, and during the second scan drive, the substrate 2 may be scanned at a high speed relative to the ejection head 5. In this case, during the first scan drive, ink 4r is supplied to the pixel region 202r, ink 4g is supplied to the pixel region 202g, and ink 4b is supplied to the pixel region 202b. During the second scan drive, ink 4g is supplied to the pixel region 202g, and ink 4b is supplied to the pixel region 202b.

[0047] In addition, for example, when the pixel widths of the respective pixel regions 202 are such that R < G < B, ink 4r, 4g, and 4b may be supplied to the pixel regions 202r, 202g, and 202b, respectively, by performing three scan drives. Specifically, during the first scan drive, while the substrate 2 is scanned at a high speed relative to the ejection head 5, ink 4b is supplied to the pixel region 202b. During the second scan drive, while the substrate 2 is scanned at a medium speed relative to the ejection head 5, ink 4g is supplied to the pixel region 202g, and ink 4b is supplied to the pixel region 202b. During the third scan drive, while the substrate 2 is scanned at a low speed relative to the ejection head 5, ink 4r is supplied to the pixel region 202r, ink 4g is supplied to the pixel region 202g, and ink 4b is supplied to the pixel region 202b.

[0048] In S105, the substrate 2 is unloaded from the liquid ejection device 1 via a substrate transfer mechanism (not shown).

[0049] Thus, in this embodiment, according to the pixel widths of the pixel regions 202r, 202g, and 202b, the scan speeds of the first scan drive and the second scan drive are made different. Specifically, the scan speed of the second scan drive is made slower than the scan speed of the first scan drive. In other words, when the pixel widths of RGB are different, the pixels with a narrow pixel width are scanned at a low speed, and the pixels with a wide pixel width are scanned at a high speed. Thereby, in this embodiment, compared with the prior art in which pixels with a narrow pixel width are scanned at a low speed, the productivity of the liquid ejection device 1 can be improved.

[0050] <Second Embodiment>

[0051] Refer to Figure 5, as a second embodiment, a method for determining the scanning speed based on information related to the pixel width of the pixel region 202 will be described. Figure 5 FIG. Figure 5 shows the positional relationship between the ejection head 5 and the substrate 2 held by the substrate stage 3. The main causes related to the deviation of the position (landing position) of the ink 4 supplied from the ejection head 5 to the pixel region 202 include, for example, the pixel width of the pixel region 202, the ejection characteristics of the ejection head 5 (nozzles), and the like. The ejection characteristics include, for example, the deviation of the ejection speed of the ink 4 ejected from the ejection head 5, the volume of the ink 4 (droplets) ejected from the ejection head 5, and the ejection angle of the ink 4 ejected from the ejection head 5. In the present embodiment, the description will focus on the pixel width of the pixel region 202 and the deviation of the ejection speed of the ink 4.

[0052] In the present embodiment, the distance HD between the substrate 2 and the ejection head 5 is 1 mm, the average ejection speed of the ink 4 ejected from the ejection head 5 is 4.5 m / sec, and the deviation of the ejection speed of the ink 4 ejected from the ejection head 5 is ±0.5 m / sec.

[0053] If the ejection speed of the ink 4 is biased towards the high-speed side at 5.0 m / sec, the time from when the ink 4 is ejected from the ejection head 5 until it lands on the substrate 2 is 200.0 μsec. If the scanning speed is 300 mm / sec, the scanning distance SD from when the ink 4 is ejected until it lands on the substrate 2 is 60.0 μm. On the other hand, if the ejection speed of the ink 4 is biased towards the low-speed side at 4.0 m / sec, the time from when the ink 4 is ejected from the ejection head 5 until it lands on the substrate 2 is 250.0 μsec. If the scanning speed is 300 mm / sec, the scanning distance SD from when the ink 4 is ejected until it lands on the substrate 2 is 75.0 μm. Therefore, if the scanning speed is set to 300 mm / sec, a landing position deviation (landing error) due to the deviation of the ejection speed of the ink 4 is generated within a range of 15.0 μm. In addition, if the scanning speed is set to 100 mm / sec, the scanning distance SD from when the ink 4 is ejected until it lands on the substrate 2 becomes shorter. Therefore, the landing error due to the deviation of the ejection speed of the ink 4 is generated within a range of 5.0 μm. In this way, when the scanning speed is 100 mm / sec, compared with the case where the scanning speed is 300 mm / sec, the landing error is reduced by 10.0 μm within the range. This means that if the scanning speed is 100 mm / sec, compared with the case where the scanning speed is 300 mm / sec, even if the pixel width of the pixel region 202 is about 10.0 μm narrower, the ink 4 can still land.

[0054] In the present embodiment, the relationship between the range Eμm of the landing error caused by the deviation of the ejection speed of the ink 4 and the scanning speed Vmm / sec is expressed by the following formula (1).

[0055] E = 0.05 × V ··· (1)

[0056] Next, a method for determining the scanning speed based on the pixel width (relevant information) of the pixel region 202 will be described. In the present embodiment, the landing error mainly caused by the deviation of the ejection speed of the ink 4 is the value obtained by subtracting 15.0 μm from the pixel width of the pixel region 202. Here, 15.0 μm is a value determined by the landing error caused by main causes other than the deviation of the ejection speed of the ink 4, the width of the ink 4 (droplets) when landing on the substrate 2, and the like.

[0057] In the present embodiment, the pixel width of the pixel region 202r is 20.0 μm, and the pixel widths of the pixel regions 202g and 202b are 30.0 μm. Therefore, the allowable amount of the landing error caused by the deviation of the ejection speed in the pixel region 202r is 5.0 μm, and the allowable amount of the landing error caused by the deviation of the ejection speed in each of the pixel regions 202g and 202b is 15.0 μm.

[0058] As described above, the scanning speed can be calculated by Equation (1). Therefore, it can be understood that as long as the scanning speed when supplying the inks 4g and 4b to the pixel regions 202g and 202b respectively is 300 mm / sec or less, and the scanning speed when supplying the ink 4r to the pixel region 202r is 100 mm / sec or less.

[0059] In the first scan drive (first scan drive) where the ink 4r is not supplied to the pixel region 202r and the inks 4g and 4b are supplied to the pixel regions 202g and 202b respectively, the scanning speed is set to 300 mm / sec. Further, in the second scan drive (second scan drive) where the inks 4r, 4g, and 4b are supplied to the pixel region 202r, the pixel region 202g, and the pixel region 202b respectively, the scanning speed is set to 100 mm / sec.

[0060] Thus, according to the present embodiment, it is possible to determine the scanning speed in each scan drive based on the information related to the pixel width of the pixel region 202 and the ejection characteristics (deviation of the ejection speed or deviation of the ejection angle) of the ejection head 5 (nozzles).

[0061] <Third Embodiment>

[0062] Refer to Figure 6 , as a third embodiment, a method for determining the scanning speed based on the information related to the volume of the droplets (balls) of the ink 4 ejected from the ejection head 5 (nozzles) will be described. Figure 6 is a diagram showing the relationship between the pixel region 202 and the ink 4 supplied to the pixel region 202. In the present embodiment, as Figure 6As shown, the tolerance of the landing error mainly caused by the deviation of the ejection speed of Ink 4 is the value obtained by subtracting the diameter of the droplet (sphere) of Ink 4 from the pixel width of the pixel region 202.

[0063] The diameter BD μm of the droplet of Ink 4 is represented by the following formula (2) based on the volume BApL of Ink 4.

[0064]

[0065] For example, if the volume of Ink 4 is 2.0 pL, the diameter BD of the droplet of Ink 4 is 15.6 μm. Therefore, in the present embodiment, when supplying Ink 4r to the pixel region 202r, the value obtained by subtracting 15.6 μm from the pixel width 20.0 μm of the pixel region 202r, that is, 4.4 μm, is used as the tolerance of the landing error mainly caused by the deviation of the ejection speed of Ink 4. Then, as described in the second embodiment, the scanning speed is obtained according to formula (1). Specifically, from 4.4÷0.05, it can be seen that when supplying Ink 4r to the pixel region 202r, a scanning speed of 88.0 mm / sec or less is sufficient. Similarly, the scanning speeds when supplying Ink 4g and 4b to the pixel regions 202g and 202b are obtained respectively. The value obtained by subtracting 15.6 μm from the pixel widths 30.0 μm of the pixel regions 202g and 202b respectively, that is, 14.4 μm, is used as the tolerance of the landing error mainly caused by the deviation of the ejection speed of Ink 4. Therefore, from 14.4÷0.05, it can be seen that when supplying Ink 4g and 4b to the pixel regions 202g and 202b respectively, a scanning speed of 288 mm / sec or less is sufficient.

[0066] In addition, for example, if the volume of Ink 4 is 1.6 pL, the diameter BD of the droplet of Ink 4 is 14.5 μm. Therefore, it can be seen that when supplying Ink 4r to the pixel region 202r, a scanning speed of 110.0 mm / sec or less is sufficient. Similarly, it can be seen that when supplying Ink 4g and 4b to the pixel regions 202g and 202b respectively, a scanning speed of 310.0 mm / sec or less is sufficient.

[0067] In addition, in the present embodiment, the tolerance of the landing error is obtained based on the diameter of the droplet of Ink 4, but it is not limited thereto. For example, the tolerance of the landing error may also be obtained based on the diameter of the droplet of Ink 4 when the Ink 4 ejected from the nozzle head 5 lands on the substrate 2.

[0068] Thus, according to the present embodiment, the scanning speed in each scanning drive can be determined based on information related to the pixel width of the pixel region 202 and the diameter of the ink 4 (droplets) ejected from the ejection head 5 (nozzles). For example, the difference between the pixel width of the pixel region 202 and the diameter of the ink 4 (droplets) ejected from the ejection head 5 (nozzles) can be used as the allowable amount (allowable value) of the landing error to determine the scanning speed in each scanning drive.

[0069] <Fourth Embodiment>

[0070] As a fourth embodiment, a method of determining the scanning speed based on the position accuracy of the ink 4 supplied from the ejection head 5 (nozzles) to the pixel region 202, that is, the landing accuracy of the ink 4, will be described.

[0071] The landing accuracy of the ink 4 can be obtained, for example, by actually ejecting the ink 4 onto the substrate 2 and measuring the landing position (deviation) of the ink 4 using a camera 9 or the like. In addition, since the landing accuracy of the ink 4 varies depending on the scanning speed, it is necessary to measure the landing position of the ink 4 at each scanning speed while changing the scanning speed to obtain the landing accuracy. In other words, the deviation of the landing position of the ink 4 supplied from the ejection head 5 to the pixel region 202 corresponding to each of a plurality of different scanning speeds, that is, the landing accuracy of the ink 4, is obtained. Then, the scanning speed in each scanning drive can be determined (selected) based on the required landing accuracy (necessary landing accuracy) according to the pixel width of the pixel region 202 and the landing accuracy of the ink 4 corresponding to the plurality of scanning speeds.

[0072] For example, assume that the required landing accuracy of the pixel region 202r is ±10 μm, and the required landing accuracy of each of the pixel regions 202g and 202b is ±15 μm. In addition, the landing accuracy of the ink 4 corresponding to a scanning speed of 200 mm / sec is ±10 μm, and the landing accuracy of the ink 4 corresponding to a scanning speed of 400 mm / sec is ±15 μm. In this case, in the first scanning drive (first scanning drive) where the ink 4r is not supplied to the pixel region 202r and the inks 4g and 4b are supplied to the pixel regions 202g and 202b, respectively, the scanning speed is set to 400 mm / sec. In addition, in the second scanning drive (second scanning drive) where the inks 4r, 4g, and 4b are supplied to the pixel regions 202r, 202g, and 202b, respectively, the scanning speed is set to 200 mm / sec.

[0073] Thus, according to the present embodiment, the scanning speed in each scanning drive can be determined based on information related to the pixel width of the pixel region 202 and the landing accuracy of the ink 4 corresponding to the plurality of scanning speeds.

[0074] <Fifth Embodiment>

[0075] Next, referring to Figure 7 , as a fifth embodiment, a process for generating ejection data for controlling the scanning drive of the substrate stage 3 and the ejection of the ink 4 from the ejection head 5 (ejection data generation process) will be described. Figure 7 FIG. Figure 7 is a flowchart for explaining the ejection data generation process. The ejection data generation process is executed by the control unit 11.

[0076] In S201, for each RGB, pixel information related to the pixel region 202 is acquired. The pixel information includes the width of the pixel region 202 in the scanning direction, that is, information related to the pixel width, and information related to the target amount of the ink 4 to be supplied to the pixel region 202. The pixel information is obtained, for example, through an input by the user via the operation screen or an input from an external server.

[0077] In S202, for each RGB, based on the pixel information acquired in S201, the number of times of scanning drive to be performed, that is, the number of scans, is determined. For example, the number of scans SN is determined by the following formula (3). In addition, in formula (3), the pixel width of the pixel region 202 is set to PW, the target amount of the ink 4 to be supplied to the pixel region 202 is set to PV, the ejection amount of the ink 4 ejected from the ejection head 5 is set to NV, and the number of nozzles of the ejection head 5 assigned to the pixel region 202 is set to NN.

[0078] SN = PV / (NN × NV) · · · (3)

[0079] For example, consider a case where the number of nozzles NN is 3, the ejection amount NV is 2.0 pL, the target amount PV in the pixel region 202r is 6.0 pL, and the target amount PV in each of the pixel regions 202g and 202b is 12.0 pL. In this case, the number of scans SN required for the pixel region 202r is 1, and the number of scans SN required for the pixel regions 202g and 202b is 2. In addition, when the target amount PV is not an integer multiple of the number of nozzles NN × ejection amount NV, the number of nozzles NN or the ejection amount NV can also be adjusted. For example, when the target amount PV in the pixel region 202r is 6.3 pL, the ejection amount NV of the ink 4r ejected from the nozzles of the ejection head 5r can be changed from 2.0 pL to 2.1 pL.

[0080] In S203, for each RGB, based on the pixel information acquired in S201 and the number of scans determined in S202, the scanning speed in each scanning drive is determined. The method for determining the scanning speed is as described in the first to fourth embodiments, and thus the detailed description thereof is omitted here.

[0081] In S204, for each RGB, ejection data for controlling the scan drive of the substrate stage 3 and the ejection of the ink 4 in the ejection head 5 is generated based on the scan speed determined in S204. As described above, the number of scans SN required for the pixel region 202r is 1, and the number of scans SN required for the pixel regions 202g and 202b is 2. Therefore, the ejection data generated for the pixel region 202r in the first scan drive becomes ejection data for not ejecting the ink 4r. Alternatively, ejection data for the pixel region 202r in the first scan drive may not be generated.

[0082] The ejection data generated in S204 is used in the first scan drive and the second scan drive respectively performed in S103 and S104 in the operation sequence of the liquid ejection device 1 described with reference to Figure 4 .

[0083] <Sixth Embodiment>

[0084] As a sixth embodiment, a case where the inks 4r, 4g, and 4b supplied to the pixel regions 202r, 202g, and 202b respectively are the same ink will be described. Figure 8 FIG. is an example showing the structure of a pixel of an organic light emitting diode (OLED). As the structure of a pixel of an OLED, for example, as Figure 8 shown, an HIL (hole injection layer), an HTL (hole transport layer), an EML (emission layer), an ETL (electron transport layer), and an EIL (electron injection layer) are stacked on the substrate 2. Here, for layers other than the EML (emission layer), the same ink 4 may be supplied to the pixel regions 202r, 202g, and 202b. In this case, the ejection head 5 does not need to include the ejection heads 5r, 5g, and 5b, and the same ink 4 may be ejected from one ejection head to the pixel regions 202r, 202g, and 202b respectively. In other words, the nozzles 51r, 51g, and 51b may be arranged on one ejection head.

[0085] <Seventh Embodiment>

[0086] The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing articles such as display panels for organic ELs or the like, micro-devices such as semiconductor devices, or elements having a fine structure. The method for manufacturing an article according to the present embodiment includes: a step of ejecting a liquid (ink) onto a substrate using a liquid ejecting device 1; and a step of processing the substrate onto which the liquid has been ejected in this step, specifically, drying it to obtain a substrate having a dried film formed thereon. In addition, the method for manufacturing an article according to the present embodiment further includes a step of manufacturing an article from the substrate having the dried film formed thereon. Furthermore, the method for manufacturing the article includes other known steps (firing, cooling, cleaning, oxidation, film formation, evaporation, doping, planarization, etching, resist stripping, cutting, bonding, encapsulation, etc.). The method for manufacturing an article according to the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the conventional methods.

[0087] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the claims are appended to disclose the scope of the invention.

Claims

1. A liquid ejecting device for ejecting liquid to a plurality of target areas on a substrate for manufacturing a display panel having a plurality of pixels, characterized in that: The liquid ejection device comprises: A spray head, comprising a first nozzle for spraying a first liquid and a second nozzle for spraying a second liquid; A driving mechanism for performing a scanning drive to scan the substrate relative to the ejection head in a first direction; as well as Control Department, The plurality of target areas include a first target area and a second target area that are located on a scanning line parallel to the first direction. The width of the second target area in the first direction is narrower than the width of the first target area in the first direction. The control unit controls the driving mechanism to perform a first scanning drive for supplying the first liquid to the first target area, and a second scanning drive for supplying the first liquid to the first target area and the second liquid to the second target area, and makes a second scanning speed in the second scanning drive slower than the first scanning speed in the first scanning drive.

2. The liquid ejection device according to claim 1, characterized in that: The control unit In the first scanning drive, the ejection head is controlled so that the first liquid is ejected from the first nozzle and the second liquid is not ejected from the second nozzle. In the second scanning drive, the ejection head is controlled so that the first liquid is ejected from the first nozzle and the second liquid is ejected from the second nozzle.

3. The liquid ejection device according to claim 1, characterized in that: The control unit determining the first scanning speed based on information related to the width of the first target area in the first direction and information related to the ejection characteristics of the first nozzle, The second scanning speed is determined based on information related to the width of the second target area in the first direction and information related to the ejection characteristics of the second nozzle.

4. The liquid ejection device according to claim 3, characterized in that: The ejection characteristics include a deviation in ejection speed or a deviation in ejection angle.

5. The liquid ejection device according to claim 1, characterized in that: The control unit determining the first scanning speed according to information related to the width of the first target area in the first direction and the diameter of the first liquid ejected from the first nozzle, The second scanning speed is determined based on information related to the width of the second target area in the first direction and a diameter of the second liquid ejected from the second nozzle.

6. The liquid ejection device according to claim 5, characterized in that: The control unit The first scanning speed is determined by taking the difference between the width of the first target area in the first direction and the diameter of the first liquid ejected from the first nozzle as the allowable value of the positional deviation in the first direction of the first liquid supplied from the first nozzle to the first target area, The second scanning speed is determined by using the difference between the width of the second target area in the first direction and the diameter of the second liquid ejected from the second nozzle as an allowable value of positional deviation in the first direction of the second liquid supplied from the second nozzle to the second target area.

7. The liquid ejection device according to claim 1, characterized in that: The control unit The first scanning speed is determined based on information related to the width of the first target area in the first direction and deviations in the first direction of the position of the first liquid supplied from the first nozzle to the first target area corresponding to a plurality of different scanning speeds. The second scanning speed is determined based on information about the width of the second target area in the first direction and deviations in the first direction of the position of the second liquid supplied from the second nozzle to the second target area corresponding to a plurality of different scanning speeds.

8. The liquid ejection device according to claim 1, characterized in that: The control unit The number of scan driving operations is determined based on information on the widths of the first target region and the second target region in the first direction and the amounts of the first liquid and the second liquid to be supplied to the first target region and the second target region, respectively.

9. The liquid ejection device according to claim 1, characterized in that: The first liquid and the second liquid are the same liquid.

10. The liquid ejection device according to claim 9, characterized in that: The first nozzle and the second nozzle are arranged on the same ejection head.

11. A liquid ejection method, which is a liquid ejection method using a liquid ejection device, wherein the liquid ejection device has an ejection head including a first nozzle for ejecting a first liquid and a second nozzle for ejecting a second liquid, and ejects liquid to a plurality of target areas on a substrate for manufacturing a display panel having a plurality of pixels, characterized in that: The liquid ejection method includes a step of performing a scanning drive to scan the substrate relative to the ejection head in a first direction. The plurality of target areas include a first target area and a second target area that are located on a scanning line parallel to the first direction. The width of the second target area in the first direction is narrower than the width of the first target area in the first direction. In the process, a first scanning drive for supplying the first liquid to the first target area and a second scanning drive for supplying the first liquid to the first target area and the second liquid to the second target area are performed, and a second scanning speed in the second scanning drive is slower than the first scanning speed in the first scanning drive.

12. A method for manufacturing an article, characterized in that: The method for manufacturing the article comprises: A step of using the liquid ejection device according to claim 1 to eject liquid onto a substrate; a step of processing the substrate onto which the liquid is ejected; and A process of manufacturing an article from the processed substrate.

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