Vacuum treatment system and method

Abstract

The invention discloses a vacuum treatment system and method. The vacuum treatment system comprises a workpiece clamp module, a signal processing module and a control module, the workpiece clamp module comprises an angle sensing unit, a to-be-processed workpiece is mounted on the workpiece clamp module, and the workpiece clamp module is arranged in a vacuum environment; the workpiece clamp module is used for driving a to-be-processed workpiece to rotate, measuring the rotation angle of the to-be-processed workpiece in a vacuum environment through an angle sensor, and generating and outputting an angle signal to the signal processing module; the signal processing module is used for processing the received angle signal, generating a control signal and outputting the control signal to the control module; and the control module is used for regulating and controlling the output of the vacuum processing source according to the control signal, so that the to-be-processed workpiece receives vacuum processing of a preset design quantity. According to the technical scheme, the situation that the workpiece clamp module is blocked and the like is avoided, the treatment effect of the to-be-treated workpiece is affected, and the vacuum treatment effect can be effectively improved.

Description

Technical Field

[0001] Embodiments of the present invention relate to the technical field of vacuum processing, and in particular, to a vacuum processing system and method. Background Art

[0002] During vacuum processing such as vacuum coating and plasma processing of workpieces such as electronic product casings, a rotary workpiece fixture is generally provided in a vacuum processing device such as a vacuum coating device and a plasma source. The workpiece to be processed is loaded on the rotary workpiece fixture, and the workpiece to be processed placed in the rotary workpiece fixture is subjected to vacuum processing by the action of vacuum processing sources such as a vacuum coating source and a plasma source.

[0003] Currently, the rotary workpiece fixture may have a complex mechanical structure, which may cause abnormal rotation phenomena such as jamming or overshoot during the rotation of the workpiece fixture. In the foregoing case, if the vacuum processing source still performs vacuum processing on the workpiece at the preset output power under normal rotation conditions, it is easy to cause the workpiece to be processed to receive vacuum processing exceeding or lower than the predetermined design amount, thereby affecting the overall processing effect of the workpiece to be processed. Summary of the Invention

[0004] The present invention provides a vacuum processing system and method to solve the problem that the vacuum processing deviates from the predetermined design amount due to abnormal rotation such as jamming or overshoot during the rotation of the workpiece fixture, and improve the vacuum processing effect.

[0005] According to an aspect of the present invention, there is provided a vacuum processing system, including: a workpiece fixture module, a signal processing module, and a control module; the workpiece fixture module includes an angle sensing unit, the workpiece fixture module is installed with a workpiece to be processed, and the workpiece fixture module is disposed in a vacuum environment;

[0006] The workpiece fixture module is electrically connected to the signal processing module, and the signal processing module is electrically connected to the control module;

[0007] The workpiece fixture module is configured to drive the workpiece to be processed to rotate, and measure the rotation angle of the workpiece to be processed in a vacuum environment through the angle sensor, generate and output an angle signal to the signal processing module; the signal processing module is configured to process the received angle signal, generate a control signal and output it to the control module; the control module is configured to adjust the output of the vacuum processing source according to the control signal, so that the workpiece to be processed receives vacuum processing of a predetermined design amount.

[0008] Optionally, the signal processing module includes: a signal conversion unit;

[0009] The first end of the signal conversion unit is electrically connected to the workpiece fixture module, and the second end of the signal conversion unit is electrically connected to the output end of the signal processing module;

[0010] The signal conversion unit is configured to convert the received angle signal into an angle electrical signal and output the angle electrical signal.

[0011] Optionally, the signal processing module further includes: a reference signal output unit and an arithmetic unit;

[0012] The arithmetic unit is electrically connected between the signal conversion unit and the output end of the signal processing module, and the arithmetic unit is electrically connected to the reference signal output unit;

[0013] The reference signal output unit is configured to output a reference angle electrical signal to the arithmetic unit; the arithmetic unit is configured to perform an operation on the received angle electrical signal and the reference angle electrical signal, and generate and output the control signal.

[0014] Optionally, the workpiece fixture module includes: at least one workpiece fixture and a rotating bracket;

[0015] At least one of the workpiece fixtures is fixed on the rotating bracket; when the rotating bracket rotates in a plane, it drives at least one of the workpiece fixtures to rotate together in the plane and drives at least one of the workpiece fixtures to rotate around its own axial direction.

[0016] Optionally, the rotating bracket includes: a transmission gear disk, at least one sub-transmission gear disk, and a driving motor;

[0017] At least one of the sub-transmission gear disks is arranged at intervals along the edge contour on the surface of the transmission gear disk, and the sub-transmission gear disk is connected with the workpiece fixture; the driving motor is connected to the center of the transmission gear disk through a transmission shaft;

[0018] The driving motor is configured to drive the transmission gear disk to drive at least one of the sub-transmission gear disks to rotate in a horizontal plane.

[0019] Optionally, the workpiece fixture includes: a rotating end head, a fixed end head, and a first connecting member;

[0020] The first end of the first connecting member is connected to a rotating bearing in the fixed end head, and the second end of the first connecting member is fixedly connected to the rotating end head; the workpiece to be processed is installed on the first connecting member;

[0021] The rotating end head is connected to the corresponding sub-transmission gear disk through a second connecting member;

[0022] The driving motor is further configured to drive the sub-transmission gear disk to drive the corresponding rotating end and the first connecting member to rotate through the second connecting member, so that the rotating end and the first connecting member rotate around the axis of the first connecting member and the second connecting member.

[0023] Optionally, a slot is formed from the surface of the rotating end towards the inside, and the angle sensing unit is arranged in the slot;

[0024] A cover plate is arranged at the opening position of the slot, and the cover plate is used to seal the slot.

[0025] Optionally, the angle sensing unit includes: a wireless attitude sensor;

[0026] The wireless attitude sensor transmits the measured angle signal of the workpiece to be processed to the signal processing module through wireless communication.

[0027] According to another aspect of the present invention, a vacuum processing method is provided, which is characterized in that it is executed by the vacuum processing system according to any embodiment of the first aspect;

[0028] The vacuum processing method includes:

[0029] Obtaining the initial rotation angle and the current rotation angle of the workpiece fixture for a preset duration; wherein, the initial rotation angle is the rotation angle of the workpiece fixture at the start moment of the preset duration, and the current rotation angle is the rotation angle of the workpiece fixture at the end moment of the preset duration; an angle sensing unit is carried inside the workpiece fixture, the workpiece fixture is installed with the workpiece to be processed, and the workpiece fixture module is arranged in a vacuum environment;

[0030] Determining an angle signal according to the initial rotation angle, the current rotation angle and the preset duration;

[0031] Processing the angle signal to determine a control signal;

[0032] Adjusting the output of the vacuum processing source according to the control signal, so that the workpiece to be processed receives a predetermined designed amount of vacuum processing on the surface.

[0033] Optionally, the processing the angle signal to determine a control signal includes:

[0034] Obtaining a reference angle electrical signal; wherein, the reference angle electrical signal represents the electrical signal corresponding to the target value of the rotation angle of the workpiece fixture;

[0035] Converting the angle signal into an angle electrical signal;

[0036] Perform an operation on the angular electrical signal and the reference angular electrical signal to calculate the control signal.

[0037] In the vacuum processing system provided by the embodiment of the present invention, the workpiece fixture module includes an angle sensing unit, and the workpiece fixture module on which the workpiece to be processed is installed is placed in a vacuum environment, so that the angle sensing unit can monitor the rotation angle of the workpiece to be processed in real time in the vacuum environment. The workpiece fixture module measures and generates an angle signal, which is output to the signal processing module. The signal processing module converts and processes the angle signal, generates a control signal according to the actual rotation angle of the workpiece fixture module, and outputs the control signal to the control module. The control module adjusts the output of the vacuum processing source according to the control signal, and can adjust the output of the vacuum processing source according to the actual rotation of the workpiece fixture module, which is beneficial to avoiding the influence on the vacuum processing effect of the workpiece to be processed caused by abnormal rotation conditions such as jamming or overshoot of the workpiece fixture module, so that the workpiece to be processed receives the vacuum processing of the predetermined design amount, and the vacuum processing effect can be effectively improved.

[0038] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present invention, nor is it used to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. Description of the Drawings

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0040] Figure 1 is a schematic structural diagram of a vacuum processing system provided by an embodiment of the present invention;

[0041] Figure 2 is a schematic structural diagram of another vacuum processing system provided by an embodiment of the present invention;

[0042] Figure 3 is a schematic structural diagram of a workpiece fixture module provided by an embodiment of the present invention;

[0043] Figure 4 is a schematic structural diagram of a rotating bracket provided by an embodiment of the present invention;

[0044] Figure 5 is a schematic structural diagram of a workpiece fixture provided by an embodiment of the present invention;

[0045] Figure 6It is a schematic flowchart of a vacuum processing method provided according to an embodiment of the present invention;

[0046] Figure 7 It is a specific schematic flowchart of step S130 in a vacuum processing method provided according to an embodiment of the present invention;

[0047] Figure 8 It is a timing schematic diagram of signal processing provided according to an embodiment of the present invention. Detailed implementation manners

[0048] In order to enable those skilled in the art to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0049] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily need to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of the present invention described herein can be implemented in an order different from those illustrated or described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0050] An embodiment of the present invention provides a vacuum processing system. Figure 1 It is a schematic structural diagram of a vacuum processing system provided according to an embodiment of the present invention. As Figure 1 shown, the vacuum processing system includes: a workpiece fixture module 10, a signal processing module 20, and a control module 30. Exemplarily, the vacuum processing source of the vacuum processing system may include a sputtering target, or a coating target. The vacuum processing system can be used for vacuum sputtering coating of a workpiece to be processed.

[0051] The workpiece fixture module 10 includes an angle sensing unit. The workpiece fixture module 10 mounts a workpiece to be processed, and the workpiece fixture module 10 is arranged in a vacuum environment; the workpiece fixture module 10 is electrically connected to the signal processing module 20, and the signal processing module 20 is electrically connected to the control module 30.

[0052] The workpiece fixture module 10 is used to drive the workpiece to be processed to rotate, and measure the rotation angle of the workpiece to be processed in a vacuum environment through an angle sensing unit, generate and output an angle signal to the signal processing module 20; the signal processing module 20 is used to process the received angle signal, generate a control signal and output it to the control module 30; the control module 30 is used to regulate the output of the vacuum processing source according to the control signal; exemplarily, the predetermined designed amount of the output power of the coating target can be a constant value or other variation rules, so that the workpiece to be processed receives the predetermined designed amount of vacuum processing.

[0053] Exemplarily, an angle sensing unit is installed inside the workpiece fixture module 10, the workpiece to be processed is fixedly installed on the workpiece fixture module 10, and the whole workpiece fixture module 10 is placed in a vacuum environment. During the process of vacuum coating, the workpiece fixture module 10 can drive the installed workpiece to be processed to rotate together in the vacuum environment to perform vacuum sputtering coating on the surface to be processed of the workpiece to be processed. Therefore, in the embodiment of the present invention, the angle sensing unit can realize angle measurement in a vacuum environment, which is beneficial to improving the measurement accuracy of the angle sensing unit to monitor the rotation angle of the workpiece fixture module 10 in real time and master the real-time rotation state of the workpiece fixture module 10.

[0054] Exemplarily, refer to Figure 1 , Figure 1 The arrows in indicate the transmission direction of the signals. After measuring the rotation angle of the workpiece to be processed, the angle sensing unit carried inside the workpiece fixture module 10 generates an angle signal and outputs it to the signal processing module 20. After converting and processing the angle signal, the signal processing module 20 obtains an electrical signal for regulating the output energy of the coating target, that is, a control signal, and outputs the control signal to the control module 30. The control module 30 controls the output energy of the coating target according to the received control signal, adjusts the sputtering rate and sputtering amount of the coating target, etc., so as to regulate the coating thickness on the surface of the workpiece to be processed. Hereinafter, the energy of the coating target is the output energy of the coating target.

[0055] When the vacuum processing system is operating normally, during a vacuum coating process, the workpiece fixture module 10 should drive the installed workpiece to be processed to rotate uniformly along a fixed direction. Exemplarily, refer to Figure 1, centered around the workpiece fixture module 10, coating targets 00 are provided on two opposite sides of the workpiece fixture module 10. The coating targets 00 sputter with a certain output energy, and the workpiece to be processed rotates at a constant speed, so that the coating thickness on the workpiece to be processed can be kept uniform. However, during the vacuum coating process, the workpiece fixture module 10 may have unsmooth rotation, that is, there may be a jamming phenomenon; or after the jamming phenomenon occurs, there may be an overshoot phenomenon of the workpiece fixture module 10, that is, the rotation speed of the workpiece fixture module 10 is too fast. When the above situations occur in the workpiece fixture module 10, the coating thickness on the surface of the workpiece to be processed will change. Exemplarily, when the workpiece fixture module 10 has a jamming situation, the coating thickness on the surface of the workpiece to be processed will increase; and when the workpiece fixture module 10 has a situation of too fast rotation speed, the coating thickness on the surface of the workpiece to be processed will decrease. Therefore, it will cause the overall coating thickness on the surface of the workpiece to be processed to be uneven, affecting the coating effect. By using the vacuum processing system provided by the embodiments of the present invention, according to the angle signal generated by the actual measured rotation angle of the workpiece fixture module 10 by the angle sensing unit, the angle signal is converted and processed, so that the control module 30 can adjust the sputtering energy of the coating target 00 according to the actual rotation situation of the workpiece fixture module 10, thereby keeping the coating thickness of the workpiece to be processed uniform and improving the coating effect.

[0056] The vacuum processing system provided by the embodiments of the present invention, the workpiece fixture module 10 includes an angle sensing unit, and the workpiece fixture module 10 with the workpiece to be processed installed is placed in a vacuum environment, so that the angle sensing unit can monitor the rotation angle of the workpiece to be processed in real time in the vacuum environment. The workpiece fixture module 10 measures and generates an angle signal, which is output to the signal processing module 20. The signal processing module 20 converts and processes the angle signal, generates a control signal according to the actual rotation angle of the workpiece fixture module 10, and outputs the control signal to the control module 30. The control module 30 adjusts the output of the vacuum processing source according to the control signal, and can realize adjusting the output of the vacuum processing source according to the actual rotation situation of the workpiece fixture module 10, which is beneficial to avoiding the influence on the vacuum processing effect of the workpiece to be processed due to abnormal rotation situations such as jamming or overshoot of the workpiece fixture module 10, so that the workpiece to be processed receives a predetermined designed amount of vacuum processing, and can effectively improve the vacuum processing effect.

[0057] Optionally, Figure 2 is a schematic structural diagram of another vacuum processing system provided by the embodiments of the present invention. On the basis of the above embodiments, as Figure 2 shown, the signal processing module 20 includes: a signal conversion unit 21.

[0058] The first end of the signal conversion unit 21 is electrically connected to the workpiece fixture module 10, and the second end of the signal conversion unit 21 is electrically connected to the output terminal X1 of the signal processing module 20; the signal conversion unit 21 is configured to convert the received angle signal into an angle electrical signal and output the angle electrical signal.

[0059] Exemplarily, if the rotation angle of the workpiece to be processed measured by the angle sensor installed inside the workpiece fixture module 10 is an angle signal, subsequent processing cannot be performed. The signal conversion unit 21 can convert the received angle signal into an angle electrical signal so as to process the angle electrical signal, thereby obtaining a control signal for regulating the sputtering energy of the coating target 00.

[0060] Optionally, based on the above embodiments, continue to refer to Figure 2 , the signal processing module 20 further includes: a reference signal output unit 22 and an arithmetic unit 23.

[0061] The arithmetic unit 23 is electrically connected between the signal conversion unit 21 and the output terminal X1 of the signal processing module 20, and the arithmetic unit 23 is electrically connected to the reference signal output unit 22; the reference signal output unit 22 is configured to output a reference angle electrical signal to the arithmetic unit 23; the arithmetic unit 23 is configured to perform an operation on the received angle electrical signal and the reference angle electrical signal, generate and output a control signal.

[0062] Exemplarily, the reference signal output unit 22 outputs a reference angular electrical signal with a constant level, which represents a constant expected angular velocity set according to the actual requirement of the coating thickness of the workpiece to be processed by the user. That is, when the workpiece fixture module 10 rotates normally and uniformly, the rotation angle per unit time is a fixed value. The operation unit 23 performs operations such as superposition or multiplication on the angular electrical signal of the actual rotation angle of the workpiece to be processed output by the signal conversion unit 21 and the reference angular electrical signal, so as to obtain a control signal. The control signal will change with the actual angular electrical signal of the workpiece to be processed, so that the control module 30 can adjust the sputtering energy of the coating target 00 according to the control signal to ensure the uniformity of the coating thickness on the surface of the workpiece to be processed. Exemplarily, if the workpiece fixture module 10 jams during rotation, the rotation rate of the workpiece fixture module 10 decreases compared to normal rotation and may even decrease to zero. At this time, the operation unit 23 performs operations such as superposition or multiplication on the angular electrical signal and the reference angular electrical signal to obtain a control signal, and the level of the control signal is lower than that of the reference angular electrical signal. Therefore, the sputtering energy of the coating target 00 can be reduced according to the control signal, thereby reducing the sputtering rate or sputtering amount of the coating target 00, so that the coating thickness of the workpiece to be processed on the jammed workpiece fixture module 10 will not be too thick, which is beneficial to improving the overall coating effect. If the workpiece fixture module 10 rotates too fast after jamming, the rotation rate of the workpiece fixture module 10 increases compared to normal rotation. At this time, the control signal obtained by the operation unit 23 performing operations such as superposition or multiplication on the angular electrical signal and the reference angular electrical signal has a higher level than that of the reference angular electrical signal. Therefore, the sputtering energy of the coating target 00 can be increased according to the control signal, thereby increasing the sputtering rate or sputtering amount of the coating target 00, so that the coating thickness of the workpiece to be processed on the jammed workpiece fixture module 10 will not be too thin, which is beneficial to improving the overall coating effect.

[0063] The vacuum coating system provided in this embodiment uses the signal conversion unit 21 to convert the angle signal measured by the angle sensor into an angular electrical signal. The operation unit 23 performs operations such as superposition or multiplication on the angular electrical signal and the reference angular electrical signal output by the reference signal output unit 22 to obtain a control signal that changes with the angular electrical signal, so that the control module 30 can adjust the sputtering energy of the coating target 00 according to the control signal, so that the coating thickness on the surface of the workpiece to be processed remains uniform, which is beneficial to improving the overall coating effect.

[0064] Optionally, Figure 3 is a schematic structural diagram of a workpiece fixture module provided by an embodiment of the present invention. On the basis of the above embodiments, as Figure 3 shown, the workpiece fixture module 10 includes: at least one workpiece fixture 11 and a rotating bracket 12.

[0065] At least one workpiece fixture 11 is fixed on the rotating bracket 12; when the rotating bracket 12 rotates in a plane, it drives at least one workpiece fixture 11 to rotate together in the plane, and drives at least one workpiece fixture 11 to rotate around its own axial direction.

[0066] Exemplarily, the rotating bracket 12 is used to fix at least one workpiece fixture 11. At least one workpiece fixture 11 is arranged around the edge of the rotating bracket 12, and at least one workpiece fixture 11 is arranged at intervals. A workpiece to be processed is installed on each workpiece fixture 11. The rotating bracket 12 can rotate in the plane around the axis of the rotating bracket 12. The rotating bracket 12 can drive the workpiece fixtures 11 to rotate together in the plane, and the rotating bracket 12 can also drive the workpiece fixtures 11 to rotate around the axis direction of the workpiece fixtures 11 in a fixed direction, so that the surface of the workpiece to be processed installed on the workpiece fixtures 11 is evenly coated with a film.

[0067] Optionally, Figure 4 is a schematic structural diagram of a rotating bracket provided by an embodiment of the present invention. On the basis of the above embodiments, as Figure 4 shown, the rotating bracket 12 includes: a transmission gear disk 121, at least one sub-transmission gear disk 122, and a driving motor 123.

[0068] At least one sub-transmission gear disk 122 is arranged at intervals on the edge contour of the surface of the transmission gear disk 121. The sub-transmission gear disk 122 is connected with the workpiece fixture 11; the driving motor 123 is connected to the center of the transmission gear disk 121 through a transmission shaft 124; the driving motor 123 is used to drive the transmission gear disk 121 to drive at least one sub-transmission gear disk 122 to rotate in the horizontal plane.

[0069] Exemplarily, the transmission gear disk 121 is the base of the rotating bracket 12. The center position of the transmission gear disk 121 is electrically connected to the driving motor 123 through a transmission shaft 124. Under the driving action of the driving motor 123, the transmission gear disk 121 can rotate around the central axis in the horizontal plane, thereby driving at least one workpiece fixture 11 fixed on the transmission gear disk 121 to rotate around the central axis of the transmission gear disk 121 in the horizontal plane. At least one sub-transmission gear disk 122 is further arranged on the edge of the transmission gear disk 121. The number of at least one workpiece fixture 11 corresponds to the number of sub-transmission gear disks 122, or the number of workpiece fixtures 11 is less than the number of sub-transmission gear disks 122, so as to ensure that the workpiece fixtures 11 and the sub-transmission gear disks 122 are arranged in one-to-one correspondence. The sub-transmission gear disk 122 can not only fix the workpiece fixture 11 and the rotating bracket 12 into one body, but also drive the workpiece fixture 11 to rotate itself through the driving motor 123, so as to drive the workpiece to be processed installed on the workpiece fixture 11 to rotate, thereby ensuring that multiple surfaces to be plated on the workpiece to be processed are evenly coated with a film.

[0070] Optionally,Figure 5 This is a schematic structural diagram of a workpiece fixture provided by an embodiment of the present invention. On the basis of the above embodiments, as Figure 5 shown, the workpiece fixture 11 includes: a rotating end 111, a fixed end 112, and a first connecting member 113.

[0071] The first end of the first connecting member 113 is connected to a rotating bearing 114 inside the fixed end 112, and the second end of the first connecting member 113 is fixedly connected to the rotating end 111; the workpiece to be processed is installed on the first connecting member 113; the rotating end 111 is connected to a corresponding sub-driving gear disk 122 through a second connecting member 115.

[0072] The driving motor 123 is further configured to drive the sub-driving gear disk 122 to drive the corresponding rotating end 111 and the first connecting member 113 to rotate through the second connecting member 115, so that the rotating end 111 and the first connecting member 113 rotate around the axis of the first connecting member 113 and the second connecting member 115.

[0073] Exemplarily, the rotating end 111 of the workpiece fixture 11 is fixed integrally with the first connecting member 113, and the rotating end 111 and the sub-driving gear disk 122 are connected through the second connecting member 115. When the driving motor 123 drives the second connecting member 115 inside the sub-driving gear disk 122 to rotate around its own axis direction, the second connecting member 115 drives the rotating end 111 and the connected first connecting member 113 to rotate around the axis direction together. The first connecting member 113 rotates in cooperation with the rotating bearing 114 installed inside the fixed end 112, so that the workpiece to be processed installed on the first connecting member 113 rotates together with the first connecting member 113 to uniformly coat each surface to be plated on the workpiece to be processed. It should be noted that the workpiece to be processed is installed on the first connecting member 113 at a certain angle, rather than being installed perpendicular to the axis direction of the first connecting member 113. In this embodiment, for the convenience of representing the workpiece to be processed, then in Figure 5 it, the workpiece to be processed is represented as perpendicular to the axis direction of the first connecting member 113, that is, referring to Figure 5 the workpiece to be processed 116 in it. Exemplarily, the workpiece to be processed can be a mobile phone, and the surfaces to be plated are the frames on the four sides of the mobile phone. Then, installing the workpiece to be processed at a certain angle with respect to the axis direction of the first connecting member 113 is beneficial to reducing the centrifugal force when the workpiece to be processed rotates around the axis direction with the workpiece fixture 11, so as to improve the stability of the workpiece to be processed.

[0074] Optionally, on the basis of the above embodiments, continue to refer to Figure 5 , a slot 117 is opened from the surface of the rotating end 111 towards the inside, and an angle sensing unit is arranged in the slot 117; a cover plate 118 is arranged at the opening position of the slot 117, and the cover plate 118 is used to seal the slot 117.

[0075] Exemplarily, the angle sensing unit includes: a wireless attitude sensor; the wireless attitude sensor transmits the measured angle signal of the workpiece to be processed to the signal processing module through wireless communication. The attitude sensor is a high-performance three-dimensional motion attitude measurement system based on MEMS (Microelectromechanical systems) technology. The attitude sensor includes auxiliary motion sensors such as a three-axis gyroscope, a three-axis accelerometer, and a three-axis electronic compass. Through the low-power ARM (Advanced RISC Machine) processor embedded in the attitude sensor, calibrated angular velocity, acceleration, and magnetic data are output, and motion attitude measurement is performed through a quaternion-based sensor data algorithm, and zero-drift three-dimensional attitude data represented by quaternions and Euler angles is output in real time. For the wireless attitude sensor, it includes a high-precision accelerometer, gyroscope, magnetometer, and temperature and barometer. The wireless attitude sensor has no connecting wire harness and can be directly installed in the workpiece fixture 11, so that the workpiece fixture 11 equipped with the angle sensor is an independent whole. For the vacuum coating equipment, after the vacuum coating process is completed, the workpiece fixture 11 needs to be removed from the vacuum coating equipment as a whole. Therefore, using a wireless attitude sensor as the angle sensor is more convenient for the installation and removal of the workpiece fixture 11 compared to an angle sensor with a connecting wire harness.

[0076] A slot 117 is provided on the surface of the rotating end 111 of the workpiece fixture 11. The angle sensor is placed in the slot 117, and the opening of the slot 117 is sealed with a cover plate 118, so that the angle sensor is arranged in the workpiece fixture 11, and the angle sensor can rotate together with the workpiece fixture 11 to measure the rotation angle of the workpiece to be processed installed on the first link 113 of the workpiece fixture 11. It should be noted that the inside of the slot 117 where the angle sensor is arranged does not need to maintain a vacuum environment, and only the entire workpiece fixture 11 needs to be placed in a vacuum environment.

[0077] The workpiece fixture module 10 provided in this embodiment installs at least one workpiece fixture 11 by setting a rotating bracket 12. A workpiece to be processed is installed on the workpiece fixture 11. During the rotation of the rotating bracket 12, the rotating bracket 12 drives the workpiece to be processed on the workpiece fixture 11 to rotate together, so as to sputter a uniform film layer on each surface to be coated of the workpiece to be processed. And the angle sensing unit mounted inside the rotating end 111 of the workpiece fixture 11 can measure the rotation angle of the workpiece to be processed in real time in a vacuum environment, which is beneficial to improving the measurement accuracy of the angle sensing unit.

[0078] The embodiment of the present invention also provides a vacuum processing method. Figure 6It is a schematic flowchart of a vacuum treatment method provided by an embodiment of the present invention. The vacuum treatment method can be executed by the vacuum treatment system provided by any of the above embodiments, so that a predetermined designed amount of vacuum treatment is received on the surface of the workpiece to be processed. As Figure 6 shown, the vacuum treatment method specifically includes the following steps:

[0079] S110. Obtain the initial rotation angle and the current rotation angle of the workpiece fixture for a preset duration; wherein, the initial rotation angle is the rotation angle of the workpiece fixture at the starting moment of the preset duration, and the current rotation angle is the rotation angle of the workpiece fixture at the ending moment of the preset duration; an angle sensing unit is carried inside the workpiece fixture, the workpiece fixture is installed with the workpiece to be processed, and the workpiece fixture module is arranged in a vacuum environment.

[0080] Exemplarily, during the vacuum coating process, the angle sensing unit carried inside the workpiece fixture measures the rotation angle of the workpiece to be processed at a certain data measurement period, and the data measurement period can have a preset duration. At the beginning of a data measurement period, that is, at the starting moment of the preset duration, the angle sensing unit measures the rotation angle of the workpiece to be processed to obtain the initial rotation angle; at the end of a data measurement period, that is, at the ending moment of the preset duration, the angle sensing unit measures the rotation angle of the workpiece to be processed again to obtain the current rotation angle.

[0081] S120. Determine an angle signal according to the initial rotation angle, the current rotation angle and the preset duration.

[0082] Exemplarily, according to the initial rotation angle and the current rotation angle measured by the angle sensing unit, and the duration between the two measured rotation angles, that is, the preset duration, the angle signal of the actual rotation angle of the workpiece fixture within the preset duration can be determined. In this way, by measuring the real-time rotation angle of the workpiece fixture through the angle sensing unit, it is convenient to master the real-time rotation situation of the workpiece fixture, so as to determine whether the workpiece fixture rotates normally.

[0083] S130. Process the angle signal to determine a control signal.

[0084] Exemplarily, according to the determined angle signal of the actual rotation angle of the workpiece fixture within the preset duration, the angle signal is converted and processed to obtain a control signal.

[0085] S140. Regulate the output of the vacuum treatment source according to the control signal, so that a predetermined designed amount of vacuum treatment is received on the workpiece to be processed.

[0086] Exemplarily, with the workpiece to be processed as the center, vacuum treatment sources are arranged on both sides of the workpiece to be processed in the vertical direction. The vacuum treatment sources output a predetermined designed amount of vacuum treatment material with a certain output energy, and the vacuum treatment material is deposited on the surface of the workpiece to be processed. According to the determined control signal, the output energy of the vacuum treatment source is adjusted, so that according to the actual rotation condition of the workpiece to be processed, the designed amount of the vacuum treatment material on the surface of the workpiece to be processed can be adjusted, so that a predetermined designed amount of the vacuum treatment material is received on the surface of the workpiece to be processed, which is beneficial to improving the overall vacuum treatment effect.

[0087] For the vacuum treatment method provided by an embodiment of the present invention, according to the acquired initial rotation angle and current rotation angle of the workpiece fixture, and the preset time duration between the initial rotation angle and the current rotation angle, the angle signal of the workpiece fixture can be determined, so as to determine the actual rotation condition of the workpiece fixture. After the angle signal is converted and processed, a control signal is obtained. According to the control signal, the output energy of the vacuum treatment source can be adjusted, so that according to the actual rotation condition of the workpiece fixture, the designed amount of the vacuum treatment material for vacuum treatment on the surface of the workpiece to be processed can be adjusted, so that a predetermined designed amount of the vacuum treatment material is received on the surface of the workpiece to be processed, which is beneficial to improving the overall vacuum treatment effect.

[0088] Optionally, Figure 7 is a specific flowchart of step S130 in a vacuum treatment method provided by an embodiment of the present invention. On the basis of the above embodiment, as Figure 7 shown, the processing of the angle signal in step S130 to determine the control signal specifically includes the following steps:

[0089] S131. Obtain a reference angle electrical signal; wherein, the reference angle electrical signal represents the electrical signal corresponding to the target value of the rotation angle of the workpiece fixture.

[0090] Exemplarily, the reference angle electrical signal can be a constant numerical value of the angle electrical signal set by the user according to actual needs to represent the rotation angle target value of the workpiece fixture.

[0091] S132. Convert the angle signal into an angle electrical signal.

[0092] Exemplarily, the actual rotation angle of the workpiece fixture can be calculated by using formula (1), and formula (1) can be expressed in the following form:

[0093] B = [(n 2 - n 1 ) / t - W 0 × k(1)

[0094] wherein, n 1 represents the initial rotation angle, n 2represents the current rotation angle, t represents the preset duration, and W 0 is the rotational angular velocity of the workpiece fixture in the ideal rotation state, k represents the conversion coefficient, and B represents the value of the angular electrical signal.

[0095] It should be noted that k can be a positive number or a negative number. When k is a positive number, it means that the workpiece fixture rotates in the positive direction, that is, from a small rotation angle to a large rotation angle. For example, the workpiece fixture rotates from 0° to 90°. When k is a negative number, it means that the workpiece fixture rotates in the reverse direction, that is, from a large rotation angle to a small rotation angle. For example, the workpiece fixture rotates from 90° to 0°. In this way, the angle signal measured by the angle sensing unit can be converted into an angular electrical signal by the above method.

[0096] S133. Perform an operation on the angular electrical signal and the reference angular electrical signal to calculate the control signal.

[0097] Exemplarily, the angular electrical signal representing the actual rotation angle of the workpiece fixture obtained by calculation is operated on with the reference angular electrical signal. Thus, by comprehensively considering the reference angular electrical signal and the actual angular electrical signal of the workpiece fixture, the control signal for regulating the energy of the coating target is determined, and the energy of the coating target can be accurately regulated, thereby improving the uniformity of the film layer sputtered on the surface of the workpiece to be processed and improving the coating effect. Among them, the method of operating on the angular electrical signal and the reference angular electrical signal can include superposition and multiplication. The following will separately explain the two operation methods.

[0098] Exemplarily, Figure 8 is a timing schematic diagram of a signal processing provided by an embodiment of the present invention. As Figure 8 shown, Figure 8 includes four timing coordinate diagrams, which are the timing coordinate diagram of the rotation angle of the workpiece fixture, the timing coordinate diagram of the reference angular electrical signal, the timing coordinate diagram of the angular electrical signal, and the timing coordinate diagram of the control signal. In the above each timing coordinate diagram, the horizontal axis represents time. The vertical axis of the timing coordinate diagram of the rotation angle of the workpiece fixture is the angle value, and the vertical axes of the remaining timing coordinate diagrams represent the electrical signal level values. Among them, the solid line 01 is the curve of the change in the rotation angle of the workpiece fixture, and the solid line 01 shows the situation where the workpiece fixture rotates in the positive direction; the solid line 02 is the change curve of the reference angular electrical signal. In this embodiment, the reference angular electrical signal is a constant value a; the solid line 03 is the change curve of the angular electrical signal; the solid line 04 is the change curve of the control signal.

[0099] In some embodiments, k in formula (1) can be equal to a / W 0 . At this time, when the workpiece fixture rotates in the ideal rotation state, (n 2 - n 1 ) / t is equal to W 0, the angular electrical signal B is 0, and the control signal obtained by adding the angular electrical signal and the reference angular electrical signal is still the reference angular electrical signal. The energy of the coating target is the value when rotating in the ideal rotation state; when the workpiece fixture jams and stops rotating, (n 2 -n 1 ) / t is equal to 0. At this time, the angular electrical signal B is -a, the control signal obtained by adding the angular electrical signal and the reference angular electrical signal is 0, and the energy of the coating target is 0, that is, the vacuum coating stops. It can be understood that k can also be obtained based on experience, or obtained by combining theoretical formulas and empirical data. From Figure 8 It can be seen that when the workpiece fixture rotates normally, the angular electrical signal is a constant voltage value. Therefore, the control signal is also a constant voltage value. When the workpiece fixture jams during rotation, the rotation angle of the workpiece fixture no longer changes, that is, Figure 8 the segment 05 of the solid line 01 in

[0100] In this case, the reference angular electrical signal still outputs a constant voltage value, and within the time period corresponding to the segment 05, the voltage value of the angular electrical signal decreases. At this time, adding the voltage value of the reference angular electrical signal and the voltage value of the angular electrical signal, then when the workpiece fixture jams, the voltage value of the control signal also decreases. Therefore, when the workpiece fixture jams, the energy of the coating target can be regulated according to the control signal with a lower voltage value, and the sputtering energy of the coating target is reduced to 0 to stop the vacuum coating, thereby effectively avoiding the situation of too thick coating thickness when the workpiece fixture jams.

[0101] Exemplarily, the actual rotation angle of the workpiece fixture can be calculated using formula (2), and formula (2) can be expressed in the following form:

[0102] B = (n 2 -n 1 ) / t×k (2)

[0103] where, n 1 represents the initial rotation angle, n 2 represents the current rotation angle, t represents the preset time duration, k represents the conversion coefficient, and k is equal to 1 / W 0 , W 0is the angular velocity of the workpiece fixture in the ideal rotation state, and B represents the value of the angular electrical signal.

[0104] Combined with formula (2) and Figure 8 it can be known that when the workpiece fixture rotates in the ideal rotation state, (n 2 -n 1 ) / t is equal to W 0 , the angular electrical signal B is 1, and the control signal obtained by multiplying the angular electrical signal by the reference angular electrical signal is still the reference angular electrical signal, and the energy of the coating target is the value when rotating in the ideal rotation state; when the workpiece fixture jams and stops rotating, (n 2 -n 1 ) / t is equal to 0. At this time, the angular electrical signal B is 0, the control signal obtained by multiplying the angular electrical signal by the reference angular electrical signal is 0, and the energy of the coating target is 0, that is, the vacuum coating is stopped. It can be understood that k can also be obtained according to experience, or obtained by combining theoretical formulas and empirical data.

[0105] The vacuum processing method provided by the foregoing embodiment can determine the control signal in combination with the actual rotation of the workpiece fixture by comprehensively considering the angular electrical signal and the reference angular electrical signal of the workpiece fixture, so as to adjust the energy of the coating target, thereby ensuring uniform coating thickness and being beneficial to improving the overall coating effect.

[0106] The above specific implementation manners do not constitute a limitation to the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A vacuum processing system, characterized in that, it includes: a workpiece fixture module, a signal processing module and a control module; the workpiece fixture module includes an angle sensing unit, the workpiece fixture module mounts a workpiece to be processed, and the workpiece fixture module is arranged in a vacuum environment; the workpiece fixture module is electrically connected to the signal processing module, and the signal processing module is electrically connected to the control module; the workpiece fixture module is used to drive the workpiece to be processed to rotate, and measure the rotation angle of the workpiece to be processed in the vacuum environment through the angle sensing unit, generate and output an angle signal to the signal processing module; the signal processing module is used to process the received angle signal, generate a control signal and output it to the control module; the control module is used to adjust the output of the vacuum processing source according to the control signal, so that the workpiece to be processed receives a predetermined designed amount of vacuum processing.

2. The vacuum processing system according to claim 1, characterized in that, the signal processing module includes: a signal conversion unit; the first end of the signal conversion unit is electrically connected to the workpiece fixture module, and the second end of the signal conversion unit is electrically connected to the output end of the signal processing module; the signal conversion unit is used to convert the received angle signal into an angle electrical signal and output the angle electrical signal.

3. The vacuum processing system according to claim 2, characterized in that, the signal processing module further includes: a reference signal output unit and an operation unit; the operation unit is electrically connected between the signal conversion unit and the output end of the signal processing module, and the operation unit is electrically connected to the reference signal output unit; the reference signal output unit is used to output a reference angle electrical signal to the operation unit; the operation unit is used to perform an operation on the received angle electrical signal and the reference angle electrical signal, generate and output the control signal.

4. The vacuum processing system according to claim 1, characterized in that, the workpiece fixture module includes: at least one workpiece fixture and a rotating bracket; at least one of the workpiece fixtures is fixed on the rotating bracket; when the rotating bracket rotates in a plane, it drives at least one of the workpiece fixtures to rotate together in the plane, and drives at least one of the workpiece fixtures to rotate around its own axial direction.

5. The vacuum processing system according to claim 4, characterized in that, the rotating bracket includes: a transmission gear disk, at least one sub-transmission gear disk and a driving motor; at least one of the sub-transmission gear disks is arranged at intervals on the edge contour of the surface of the transmission gear disk, and the sub-transmission gear disk is connected with the workpiece fixture; the driving motor is connected to the center of the transmission gear disk through a transmission shaft; the driving motor is used to drive the transmission gear disk to drive at least one of the sub-transmission gear disks to rotate in a horizontal plane.

6. The vacuum processing system according to claim 5, characterized in that, the workpiece fixture includes: a rotating end, a fixed end and a first connecting piece; The first end of the first connecting member is connected to the rotary bearing within the fixed end head, and the second end of the first connecting member is fixedly connected to the rotary end head; the workpiece to be processed is installed on the first connecting member; The rotary end head is connected to the corresponding sub-transmission gear disk through a second connecting member; The drive motor is further configured to drive the sub-transmission gear disk to drive the corresponding rotary end head and the first connecting member to rotate through the second connecting member, so that the rotary end head and the first connecting member rotate around the axis of the first connecting member and the second connecting member.

7. The vacuum processing system according to claim 6, wherein, A slot is opened from the surface of the rotary end head towards the inside, and the angle sensing unit is arranged in the slot; A cover plate is arranged at the opening position of the slot, and the cover plate is used to seal the slot.

8. The vacuum processing system according to claim 1, wherein, The angle sensing unit includes: a wireless attitude sensor; The wireless attitude sensor transmits the measured angle signal of the workpiece to be processed to the signal processing module through wireless communication.

9. A vacuum processing method, wherein, It is executed by the vacuum processing system according to any one of claims 1-8; The vacuum processing method includes: Obtaining the initial rotation angle and the current rotation angle of the workpiece fixture for a preset duration; wherein, the initial rotation angle is the rotation angle of the workpiece fixture at the starting moment of the preset duration, and the current rotation angle is the rotation angle of the workpiece fixture at the ending moment of the preset duration; an angle sensing unit is carried inside the workpiece fixture, the workpiece fixture is installed with the workpiece to be processed, and the workpiece fixture module is arranged in a vacuum environment; Determining an angle signal according to the initial rotation angle, the current rotation angle and the preset duration; Processing the angle signal to determine a control signal; Adjusting the output of the vacuum processing source according to the control signal, so that the workpiece to be processed receives a predetermined designed amount of vacuum processing.

10. The vacuum processing method according to claim 9, wherein, The processing the angle signal to determine a control signal includes: Obtaining a reference angle electrical signal; wherein, the reference angle electrical signal represents the electrical signal corresponding to the target value of the rotation angle of the workpiece fixture; Converting the angle signal into an angle electrical signal; Performing an operation on the angle electrical signal and the reference angle electrical signal to calculate the control signal.

Images