Efficient surface spraying equipment for machine tool cutter production

Abstract

The invention provides efficient surface spraying equipment for machine tool cutter production, and belongs to the technical field of machine tool cutter surface treatment. Comprising a film covering cylinder chamber and four sputtering devices, the four sputtering devices are all installed in the film covering cylinder chamber, clamping grooves are formed in the inner walls of the periphery of the film covering cylinder chamber, the four sputtering devices are installed in the four clamping grooves correspondingly, and a uniform plating assembly is arranged in the middle of the film covering cylinder chamber. By arranging the bombardment assembly and cooperatively using the uniform plating assembly, the coil is electrified to magnetize the silicon steel strip, and 600V high voltage is applied to the cathode cable and the anode cable, so that glow discharge is generated between the conductive column and the cathode box, and the target material is impacted into a large number of nano-sized target material atoms; and finally, the neutral target atoms are deposited on the cutter to form a film, so that a compact and uniform coating is formed, and the problems that an existing cutter coating is small in application range, poor in plating effect and high in manufacturing cost are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of surface treatment of machine tool tools, and particularly relates to an efficient spraying device for the surface in the production of machine tool tools. Background Art

[0002] A turning tool is a tool with a cutting part used for turning machining. The turning tool is one of the most widely used tools in cutting machining. In order to improve the service life of machine tool tools such as turning tools and enhance their surface physical properties, it is usually necessary to coat or spray a coating on their surfaces, so as to increase their wear resistance, improve the oxidation resistance, reduce friction, improve the anti-metal fatigue performance or increase the thermal shock resistance.

[0003] Currently, the tool coating mainly adopts the chemical vapor deposition method, that is, heating the substrate in a chemical reaction vessel and exposing the substrate to the gas stream. These gases decompose on the surface of the heated substrate to form a coating. Generally speaking, the temperature required for the coating is about 1000 °C. However, the high temperature during coating will have an adverse effect on the substrate, and there are not many applicable coating materials (because the coating materials are provided in a gaseous form), and the process cycle time is long. In order to make the coating on the substrate surface uniform, a large amount of coating materials need to be consumed. At the same time, for the coating made by this method, the adhesion between its surface and the tool is not enough, resulting in a substantial increase in the manufacturing cost of the tool. Therefore, the present application provides an efficient spraying device for the surface in the production of machine tool tools to meet the requirements. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide an efficient spraying device for the surface in the production of machine tool tools. By setting up a bombardment component and cooperating with a uniform plating component, energizing the coil to magnetize the silicon steel strip, and applying a high voltage of 600 V to the cathode cable and the anode cable, a glow discharge is generated between the conductive column and the cathode box, the target material is impacted into a large number of target atoms with nano-size, and finally the neutral target atoms are deposited on the tool to form a film, thereby forming a dense and uniform coating, so as to solve the problems of small application range of the existing tool coating, poor plating effect and high manufacturing cost.

[0005] To solve the above technical problems, the present invention provides the following technical solutions: An efficient spraying device for the surface of a machine tool cutter, including a film covering cylinder chamber and a sputtering device. There are four groups of the sputtering devices, and they are all installed inside the film covering cylinder chamber. Slots are opened on the inner walls around the film covering cylinder chamber, and the four groups of sputtering devices are respectively installed in the four groups of slots. A uniform plating component is arranged in the middle of the film covering cylinder chamber; the uniform plating component includes a limiting disc, the outer wall of the limiting disc is fixedly connected to the inner wall in the middle of the film covering cylinder chamber, the inner walls in the middle of both ends of the film covering cylinder chamber are rotatably connected with a rotating shaft, and the rotating shaft is an insulating shaft. A plurality of four-sided conductive plates are sleeved on the outer wall of the rotating shaft. An anode cable is clamped in the inner wall in the middle of the rotating shaft. Conductive columns are fixedly installed on the inner walls in the middle of the four sides of the four-sided conductive plate, and the other ends of the conductive columns are in contact with the anode cable. The four-sided conductive plate is electrically connected to the anode cable through the conductive column.

[0006] Optionally, a turntable is arranged in the middle between two adjacent four-sided conductive plates, and the turntable is fixedly connected to the outer wall of the rotating shaft. The outer wall of the turntable at the frontmost end is rotatably connected to the inner wall in the middle of the limiting disc. A main gear is fixedly installed on the outer end wall of the turntable at the frontmost end, and the main gear is located inside the limiting disc. A cross is fixedly installed in the middle of the main gear. Rotating rods are rotatably connected to the four ends of the cross, and a tool holder is fixedly installed in the middle of the rotating rod.

[0007] Optionally, driven gears are rotatably connected to the inner walls on the four sides of the outer end of the limiting disc. The four groups of driven gears are all meshed with the main gear. A triangular push block is fixedly installed on the tooth surface at the outer end of the driven gear.

[0008] Optionally, turning grooves are opened on the inner walls on the four sides of the limiting disc. Snap rings are fixedly installed at both ends of the rotating rod, and the snap rings are in movable contact with the inner wall of the limiting disc. The outer end corners of the triangular push block can be in contact with the side walls of the snap rings, and the snap rings cooperate with the turning grooves through the outer end corners of the triangular push block.

[0009] Optionally, an inner buckling disc is movably clamped in the inner wall of the turntable. A triangular rotating plate is rotatably connected to the outer end surface of the inner buckling disc. The side walls of two adjacent triangular rotating plates are meshed. A tool seat is fixedly installed on the outer wall of the triangular rotating plate.

[0010] Optionally, an internal gear ring is fixedly installed on the inner end wall of the turntable. A sub-gear is fixedly installed on the inner wall of the triangular rotating plate, and the sub-gear is meshed with the internal gear ring.

[0011] Optionally, the sputtering device includes a magnetic isolation box, the magnetic isolation box is clamped with the corresponding slot, a cathode box is clamped in the inner wall of the magnetic isolation box, a cathode cable is fixedly installed on the outer wall of the cathode box, a bombardment component is arranged inside the cathode box, a fixed target plate is fixedly installed on the outer end wall of the magnetic isolation box, and a target material is clamped in the inner wall of the fixed target plate.

[0012] Optionally, the bombardment assembly includes a cooling box, which is clamped to the inner wall of the cathode box. A plurality of groups of cooling fins are fixedly installed on the inner wall of the cooling box. The same cooling pipe is clamped to the inner walls of the plurality of groups of cooling fins, and the four groups of cooling pipes are interconnected. The same grooved base box is clamped to the inner walls of the plurality of groups of cooling fins. A silicon steel strip is fixedly installed on the inner wall of the middle part of the grooved base box. A winding is sleeved on the outer wall of the silicon steel strip, and a coil is wound around the outer wall of the winding.

[0013] Optionally, a grooved cover plate is fixedly installed on the outer wall of the grooved base box, and the grooved cover plate can expose the silicon steel strip. A magnetic focusing cover is fixedly installed on the outer wall of the cooling box, and the magnetic focusing cover is aligned with the target.

[0014] Optionally, a motor is fixedly installed on the outer wall of the film covering cylinder chamber, and the output end of the motor is fixedly connected to the end wall of the rotating shaft. A vacuum pipe is opened on the outer wall of the film covering cylinder chamber, and an air inlet pipe is opened on the other outer wall of the film covering cylinder chamber. The two ends of the cooling pipe, the anode cable, and the four cathode cables are all hermetically penetrated through the outer wall of the film covering cylinder chamber.

[0015] Compared with the prior art, the present invention has at least the following beneficial effects: In the above solution, by setting the bombardment assembly, an electric current is applied to the coil to magnetize the silicon steel strip, and a high voltage of 600V is applied to the cathode cable and the anode cable, so that glow discharge occurs between the conductive column and the cathode box. During the process that electrons are accelerated and fly towards the four conductive plates under the action of the electric field, they collide with argon atoms, ionizing a large number of argon ions and electrons. The electrons fly towards the four conductive plates and continuously collide with argon atoms during this process, generating more argon ions and electrons and accelerating to bombard the target, hitting the target into a large number of target atoms with a nanoscale size. At the same time, during the process that electrons are accelerated and fly towards the four conductive plates, they are affected by the Lorentz magnetic force of the magnetic field and continuously collide with argon atoms during the movement process, ionizing a large number of argon ions to bombard the target. After multiple collisions, the energy of the electrons gradually decreases, and the neutral target atoms are deposited on the tool to form a film, thereby forming a dense coating, having the effect of low-temperature plating. At the same time, compared with the existing coating methods, it can not only coat hard materials on the surface of the tool, such as titanium nitride (TiN), titanium carbonitride (TiCN), titanium aluminum nitride (TiAlN), etc., but also wastes less materials.

[0016] In the above solution, by setting the uniform plating component, during the plating process, the motor is started to drive the rotating shaft to rotate, so that the turntable and the main gear rotate. As the main gear rotates, it meshes with the four groups of driven gears, so that the triangular push blocks on the driven gears rotate. At the same time, the main gear can also drive the cross to rotate. When the rotating rods at the four ends of the cross move to the edge of the turning groove, the triangular push blocks on the driven gears can push the snap rings on the rotating rods, so as to push the rotating rods into the turning groove, so that the tool holders on the rotating rods can rotate periodically while following the four-sided conductive plate to rotate. Similarly, the auxiliary gear inside the inner snap disc can mesh with the rotating internal gear ring, so as to drive the triangular rotating plate to rotate. With the meshing of the triangular rotating plate itself, the tool holders outside the triangular rotating plate can rotate periodically while following the four-sided conductive plate to rotate, which can make the coating formed on the surface of the tool more uniform during the coating process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings incorporated herein and constituting a part of the specification illustrate embodiments of the present invention and, together with the specification, are further used to explain the principles of the present invention and enable those skilled in the relevant art to implement and use the present invention.

[0018] Figure 1 Schematic three-dimensional structure diagram of an efficient spraying device for the surface of a machine tool tool during production; Figure 2 Side view of an efficient spraying device for the surface of a machine tool tool during production; Figure 3 Exploded view of an efficient spraying device for the surface of a machine tool tool during production; Figure 4 Plan view of an efficient spraying device for the surface of a machine tool tool during production; Figure 5 Installation position diagram of the sputtering device; Figure 6 Exploded view of the sputtering device; Figure 7 Assembly schematic diagram of the cathode box and the magnetic isolation box; Figure 8 Assembly schematic diagram of the bombardment component and the cathode box; Figure 9 Exploded view of the bombardment component; Figure 10 Installation schematic diagram of the cooling pipe, the cooling fins and the grooved base box; Figure 11 Installation schematic diagram of the silicon steel strip and the coil; Figure 12 Schematic structure diagram of the uniform plating component; Figure 13 Exploded view of the uniform plating component; Figure 14 Isometric side view of the even plating component; Figure 15 Assembly schematic diagram of the cross and the main gear; Figure 16 Plan view of the even plating component; Figure 17 Installation position diagram of the turntable and the four-sided conductive plate; Figure 18 Exploded view of the components inside the turntable; Figure 19 Installation schematic diagram of the triangular rotating plate and the tool holder; Figure 20 Exploded side view of the components inside the turntable; Figure 21 Structural schematic diagram of the components on the cross; Figure 22 Plan view of the connection of the four-sided conductive plate, the conductive column and the anode cable.

[0019] Reference numerals: 100, film covering cylinder chamber; 110, even plating component; 111, limit disc; 112, turning groove; 113, rotating shaft; 114, anode cable; 115, four-sided conductive plate; 116, conductive column; 120, turntable; 121, internal gear ring; 122, internal snap disc; 123, triangular rotating plate; 124, sub-gear; 125, tool holder; 130, main gear; 131, driven gear; 132, triangular push block; 133, cross; 134, rotating rod; 135, snap ring; 136, tool rest; 140, card slot; 150, motor; 160, vacuum tube; 170, air inlet pipe; 200, sputtering device; 210, magnetic isolation box; 211, cathode cable; 212, fixed target plate; 213, target material; 220, cathode box; 230, bombardment component; 231, cooling box; 232, cooling fins; 233, cooling pipe; 234, grooved base box; 235, silicon steel strip; 236, winding; 237, coil; 238, grooved cover plate; 239, magnetic collecting cover.

[0020] As shown in the figure, in order to clearly implement the structure of the embodiments of the present invention, specific structures and devices are marked in the figure, but this is only for schematic needs and is not intended to limit the present invention to this specific structure, device and environment. According to specific needs, those of ordinary skill in the art can adjust or modify these devices and environments. Detailed implementation manners

[0021] The following will describe in detail a high - efficiency spraying device for the surface of a machine - tool cutter provided by the present invention in combination with the accompanying drawings and specific embodiments. At the same time, it should be noted here that in order to make the embodiments more detailed, the following embodiments are the best and preferred embodiments. For some well - known technologies, those skilled in the art can also adopt other alternative ways for implementation; moreover, the accompanying drawings are only for more specifically describing the embodiments and are not intended to specifically limit the present invention.

[0022] It should be noted that in the specification, references to "one embodiment", "an embodiment", "exemplary embodiments", "some embodiments", etc. indicate that the described embodiments may include specific features, structures, or characteristics, but not necessarily every embodiment includes such specific features, structures, or characteristics. Additionally, when combining embodiments to describe a specific feature, structure, or characteristic, implementing such a feature, structure, or characteristic in combination with other embodiments (whether explicitly described or not) should be within the knowledge of those skilled in the relevant art.

[0023] Generally, terms can be understood at least in part from their use in context. For example, at least in part depending on the context, the term "one or more" used herein can be used to describe any feature, structure, or characteristic in a singular sense, or can be used to describe a combination of features, structures, or characteristics in a plural sense. Additionally, the term "based on" can be understood as not necessarily intended to convey a set of exclusive factors, but rather, at least in part depending on the context, can allow for the existence of other factors that may not be explicitly described.

[0024] It can be understood that the meanings of "on...", "above...", and "over..." in the present invention should be interpreted in the broadest manner, such that "on..." not only means "directly on" something, but also includes the meaning of being "on" something with intervening features or layers therebetween, and "above..." or "over..." not only means "above" or "over" something, but also can include the meaning of being "above" or "over" something with no intervening features or layers therebetween.

[0025] In addition, spatial - related terms such as "under...", "below...", "lower", "above...", "upper", etc. are used herein for convenience of description to describe the relationship between one element or feature and another or more elements or features, as shown in the accompanying drawings. Spatial - related terms are intended to cover different orientations in the use or operation of the device other than the orientation depicted in the drawings. The device can be oriented in other ways, and the spatial - related descriptive terms used herein can be similarly interpreted accordingly.

[0026] As Figures 1 to 22As shown, an embodiment of the present invention provides an efficient spraying device for the surface of a machine tool tool, including a film covering cylinder chamber 100 and a sputtering device 200. There are four groups of sputtering devices 200, and they are all installed inside the film covering cylinder chamber 100. Slots 140 are provided on the inner walls around the film covering cylinder chamber 100, and the four groups of sputtering devices 200 are respectively installed in the four groups of slots 140. A uniform plating component 110 is arranged in the middle of the film covering cylinder chamber 100; the uniform plating component 110 includes a limiting disk 111, and the outer wall of the limiting disk 111 is fixedly connected to the inner wall in the middle of the film covering cylinder chamber 100. The film covering cylinder chamber 100 provides support for the limiting disk 111. Rotating shafts 113 are rotatably connected to the inner walls in the middle of both ends of the film covering cylinder chamber 100, and the rotating shafts 113 are insulating shafts. The film covering cylinder chamber 100 provides support for the insulating shafts, and the rotating shafts 113 play a role in protecting the anode cable 114. Multiple groups of four-sided conductive plates 115 are sleeved on the outer wall of the rotating shafts 113. The anode cable 114 is clamped to the inner wall in the middle of the rotating shafts 113. Conductive columns 116 are fixedly installed on the inner walls in the middle of the four sides of the four-sided conductive plates 115, and the other ends of the conductive columns 116 are in contact with the anode cable 114. The conductive columns 116 have a conductive function. The two ends of the conductive columns 116 are connected to the rotating shafts 113, and the rotating shafts 113 provide support for the conductive columns 116. The outer ends of the conductive columns 116 are equipped with four-sided conductive plates 115, which is convenient for generating a glow discharge effect with the cathode box 220. The four-sided conductive plates 115 are electrically connected to the anode cable 114 through the conductive columns 116. In the present invention, when the vacuum degree in the film covering cylinder chamber 100 reaches 4×10⁻⁴ Pa of vacuum and the flow rate of argon gas on the surface of the target 213 reaches 20 L / min, the coil 237 is energized to magnetize the silicon steel strip 235, and a high voltage of 600 V is applied to the cathode cable 211 and the anode cable 114. At this time, under the action of the electric field, argon gas is dissociated into positively charged argon particles and negatively charged particles by the high voltage. Electrons and positive ions move towards the anode and cathode respectively, and accumulate near the two poles to form a space charge region. Since the drift velocity of positive ions is much smaller than that of electrons, the charge density of the positive ion space charge region is much larger than that of the electron space charge region, making almost all of the inter-pole voltage concentrated in a narrow region near the cathode, resulting in a glow discharge between the conductive column 116 and the cathode box 220. During the process of electrons accelerating towards the four-sided conductive plates 115 under the action of the electric field, they collide with argon atoms, ionizing a large number of argon ions and electrons. The electrons fly towards the four-sided conductive plates 115, and continuously collide with argon atoms during this process, generating more argon ions and electrons. According to Fleming's left-hand rule, the argon ions are accelerated by the electric field to bombard the target 213, hitting the target 213 into a large number of target 213 atoms with nanometer size.

[0027] As Figures 12 to 17As shown, a turntable 120 is provided in the middle of two adjacent sets of the four-sided conductive plates 115, and the turntable 120 is fixedly connected to the outer wall of the rotating shaft 113. The outer wall of the turntable 120 at the frontmost end is rotatably connected to the inner wall of the middle part of the limit disk 111. The limit disk 111 and the rotating shaft 113 support the turntable 120. A main gear 130 is fixedly installed on the outer end wall of the turntable 120 at the frontmost end, and the main gear 130 is located inside the limit disk 111. A cross 133 is fixedly installed in the middle of the main gear 130. The main gear 130 supports the cross 133. Rotating rods 134 are rotatably connected to the four ends of the cross 133. A tool holder 136 is fixedly installed in the middle of the rotating rod 134. The tool holder 136 can move along with the movement of the cross 133. At the same time, special-shaped tools and long tools can be installed on the tool holder 136. Driven gears 131 are rotatably connected to the inner walls of the four outer sides of the limit disk 111. The four driven gears 131 are all meshed with the main gear 130. Triangular push blocks 132 are fixedly installed on the outer tooth surfaces of the driven gears 131. Turning grooves 112 are provided on the inner walls of the four sides of the limit disk 111. Snap rings 135 are fixedly installed at both ends of the rotating rod 134. There is a rotatable ring (not marked in the figure) in the snap ring 135, and the rotatable ring in the snap ring 135 contacts the inner wall of the limit disk 111, and the snap ring 135 is in movable contact with the inner wall of the limit disk 111. The outer corner of the triangular push block 132 can contact the side wall of the snap ring 135, and the snap ring 135 cooperates with the turning groove 112 through the outer corner of the triangular push block 132. In the present invention, the motor 150 is started to drive the rotating shaft 113 to rotate, so that the turntable 120 and the main gear 130 rotate. As the main gear 130 rotates, it meshes with the four driven gears 131, so that the triangular push blocks 132 on the driven gears 131 rotate. At the same time, the main gear 130 can also drive the cross 133 to rotate. When the rotating rods 134 at the four ends of the cross 133 move to the edge of the turning groove 112, the triangular push blocks 132 on the driven gears 131 can push the snap rings 135 on the rotating rods 134, so as to push the rotating rods 134 into the turning grooves 112, so that the tool holder 136 on the rotating rod 134 can rotate periodically while following the rotation of the four-sided conductive plate 115 itself.

[0028] As Figures 18 to 21As shown, an inner snap plate 122 is movably clamped to the inner wall of the turntable 120. The inner snap plate 122 coincides with the center line of the turntable 120, but the inner snap plate 122 does not rotate when the turntable 120 rotates. A triangular rotating plate 123 is rotatably connected to the outer end surface of the inner snap plate 122. The side walls of two adjacent groups of triangular rotating plates 123 are engaged. While the triangular rotating plate 123 is driven by the secondary gear 124 to rotate, two adjacent groups of triangular rotating plates 123 can also be engaged, so as to cooperate with the secondary gear 124 to rotate. A tool holder 125 is fixedly installed on the outer wall of the triangular rotating plate 123. The tool holder 125 can install cylindrical short tools. An internal gear ring 121 is fixedly installed on the inner end wall of the turntable 120. A secondary gear 124 is fixedly installed on the inner wall of the triangular rotating plate 123. The secondary gear 124 is engaged with the internal gear ring 121. In the present invention, the motor 150 is started to drive the rotating shaft 113 to rotate, so that the turntable 120 and the main gear 130 rotate. The secondary gear 124 inside the inner snap plate 122 can be engaged with the rotating internal gear ring 121, so as to drive the triangular rotating plate 123 to rotate. Cooperating with the self-engagement of the triangular rotating plate 123 itself, the tool holder 125 outside the triangular rotating plate 123 can rotate periodically while following the four-sided conductive plate 115 to rotate. Particularly, the tool on the tool holder 125 and the tool holder 136 undergoes a sputtering reaction between the cathode box 220 and the four-sided conductive plate 115. At the same time, electrons are affected by the magnetic field Lorentz force during the process of accelerating towards the four-sided conductive plate 115, and are confined in the plasma region near the surface of the target 213, and move in a circular motion around the surface of the target 213 under the action of the magnetic field. The movement path of this electron is very long, and it continuously collides with argon atoms during the movement process, ionizing a large number of argon ions to bombard the target 213. After multiple collisions, the energy of the electrons gradually decreases, and the neutral target atoms are deposited on the tool to form a film. The tool is uniformly coated during the process of following the rotation of the four-sided conductive plate 115 and its own rotation.

[0029] As Figures 5 to 13 shown, the sputtering device 200 includes a magnetic isolation box 210. The magnetic isolation box 210 is engaged with the corresponding card slot 140. A cathode box 220 is clamped to the inner wall of the magnetic isolation box 210. The magnetic isolation box 210 provides support for the cathode box 220. A cathode cable 211 is fixedly installed on the outer wall of the cathode box 220. The cathode cable 211 supplies power to the cathode box 220, so that the cathode box 220 serves as the cathode of the magnetic field. A bombardment assembly 230 is provided inside the cathode box 220. A fixed target plate 212 is fixedly installed on the outer end wall of the magnetic isolation box 210. The fixed target plate 212 can provide an installation position for the target 213. At the same time, the bombardment assembly 230 can bombard the target 213. The target 213 is clamped to the inner wall of the fixed target plate 212. The target 213 can be selected according to the required performance of the tool. For example, the target 213 can be made of silicon oxide target, silicon nitride target, aluminum oxide target and aluminum nitride target.

[0030] AsFigures 6 to 11 As shown, the bombardment assembly 230 includes a cooling box 231, which is clamped to the inner wall of the cathode box 220. The cooling box 231 supports the cooling fins 232. A plurality of groups of cooling fins 232 are fixedly installed on the inner wall of the cooling box 231. The same cooling pipe 233 is clamped to the inner walls of the plurality of groups of cooling fins 232, and the four cooling pipes 233 communicate with each other. The same grooved base box 234 is clamped to the inner walls of the plurality of groups of cooling fins 232. The cooling fins 232 can dissipate heat for the grooved base box 234, and the cooling pipe 233 can dissipate heat for the cooling fins 232. During the sputtering reaction, a large amount of heat will be generated by the silicon steel strip 235, and external components are needed to cool it down. A silicon steel strip 235 is fixedly installed on the inner wall of the middle part of the grooved base box 234. The grooved base box 234 can dissipate heat for the silicon steel strip 235. A winding 236 is sleeved on the outer wall of the silicon steel strip 235, and a coil 237 is wound around the outer wall of the winding 236. When the coil 237 is energized, a magnetic field can be generated, thereby magnetizing the silicon steel strip 235 and turning it into a magnetic block. A grooved cover plate 238 is fixedly installed on the outer wall of the grooved base box 234, and the grooved cover plate 238 can expose the silicon steel strip 235. The grooved cover plate 238 can protect the coil 237. A magnetic collecting cover 239 is fixedly installed on the outer wall of the cooling box 231, and the magnetic collecting cover 239 is aligned with the target 213. The magnetic collecting cover 239 is made of permalloy, and has the function of concentrating the magnetic field generated by the magnet and the stray magnetic field on the magnetic collecting cover 239 to reduce external electromagnetic interference. The bottom of the magnetic collecting cover 239 is installed on the top of the inner wall of the grooved cover plate 238, and the bottom of the magnetic collecting cover 239 does not contact the silicon steel strip 235. It can gather the magnetic field of the silicon steel strip 235 and shield external electromagnetic interference at the same time. In the present invention, the coil 237 is energized to magnetize the silicon steel strip 235, and at the same time, cooling water is injected into the cooling pipe 233, and a high voltage of 600V is applied to the cathode cable 211 and the anode cable 114. At this time, under the action of the electric field, argon gas is dissociated into positively charged argon particles and negatively charged particles by high voltage. The electrons and positive ions move towards the anode and the cathode respectively, and accumulate near the two poles to form a space charge region. Since the drift velocity of the positive ions is much smaller than that of the electrons, the charge density of the positive ion space charge region is much larger than that of the electron space charge region, so that almost all of the inter-electrode voltage is concentrated in a narrow region near the cathode, causing a glow discharge between the conductive column 116 and the cathode box 220. The electrons collide with argon atoms during the process of accelerating and flying towards the four-sided conductive plates 115 under the action of the electric field, ionizing a large number of argon ions and electrons. The electrons fly towards the four-sided conductive plates 115, and continuously collide with argon atoms during this process, generating more argon ions and electrons. According to Fleming's left-hand rule, the argon ions are accelerated by the electric field to bombard the target 213, hitting the target 213 into a large number of target 213 atoms with a nanoscale size, and the atoms leave the surface of the target 213 in the opposite direction in the range of 1-100 nm.

[0031] AsFigures 2 to 4 As shown, a motor 150 is fixedly installed on the outer wall of the film-coated cylinder chamber 100. The film-coated cylinder chamber 100 supports the motor 150, and the output end of the motor 150 is fixedly connected to the end wall of the rotating shaft 113. One end of the rotating shaft 113 is inserted with an anode cable 114, so the output end of the motor 150 is fixedly connected to the other end of the rotating shaft 113. A vacuum tube 160 is provided on the outer wall of the film-coated cylinder chamber 100. The vacuum tube 160 can only evacuate the vacuum outward and needs to be used in conjunction with a vacuum pump. An air inlet pipe 170 is provided on the other outer wall of the film-coated cylinder chamber 100. The air inlet pipe 170 can inject argon inward and needs to be used in conjunction with a machine for injecting argon. The two ends of the cooling pipe 233, the anode cable 114, and the four cathode cables 211 all penetrate through the outer wall of the film-coated cylinder chamber 100 in a sealed manner. In the present invention, the tool to be processed is installed on the tool holder 125 or the tool rest 136 according to its type and specifications, and a suitable metal target 213 is selected according to the use of the tool and installed on the fixed target plate 212. After determining the position of the target 213, the film-coated cylinder chamber 100 is closed to make it in a sealed state, and the vacuum pump is started to evacuate the film-coated cylinder chamber 100 to a vacuum state through the vacuum tube 160. When the vacuum degree reaches 4×10-4 Pa of vacuum, the vacuum pump is closed, and argon is introduced into the film-coated cylinder chamber 100 through the air inlet pipe 170. At the same time, it is ensured that the pressure of the introduced argon is about 0.3 Pa, and the flow rate of argon on the surface of the target 213 is 20 L / min.

[0032] The working principle of the technical solution provided by the present invention is as follows: When using the present invention, the staff in the art needs to install the tool to be processed on the tool holder 125 or the tool rest 136 according to the type and specification, and select a suitable metal target 213 according to the usage purpose of the tool and install it on the fixed target plate 212. After determining the position of the target 213, close the film covering cylinder chamber 100 to make it in a sealed state, and start the vacuum pump to pump the inside of the film covering cylinder chamber 100 to a vacuum state through the vacuum tube 160. When the vacuum degree reaches 4×10⁻⁴ Pa of vacuum, turn off the vacuum pump, and introduce argon into the film covering cylinder chamber 100 through the inlet pipe 170, while ensuring that the pressure of the introduced argon is about 0.3 Pa. When the flow rate of argon on the surface of the target 213 reaches 20 L / min, energize the coil 237 to magnetize the silicon steel strip 235, and at the same time inject cooling water into the cooling pipe 233, and apply a high voltage of 600 V to the cathode cable 211 and the anode cable 114. At this time, under the action of the electric field, argon is dissociated into positively charged argon particles and negatively charged particles by the high voltage. The electrons and positive ions move towards the anode and cathode respectively, and accumulate near the two poles to form a space charge region. Since the drift velocity of the positive ions is much smaller than that of the electrons, the charge density of the positive ion space charge region is much larger than that of the electron space charge region, making almost all of the inter-pole voltage concentrated in a narrow region near the cathode, resulting in a glow discharge between the conductive column 116 and the cathode box 220. During the process that the electrons are accelerated and fly towards the four-sided conductive plate 115 under the action of the electric field, they collide with argon atoms, ionizing a large number of argon ions and electrons. The electrons fly towards the four-sided conductive plate 115 and continuously collide with argon atoms during this process, generating more argon ions and electrons. According to Fleming's left-hand rule, the argon ions are accelerated by the electric field and bombard the target 213, hitting the target 213 into a large number of target 213 atoms with a nanometer size. The atoms leave the surface of the target 213 in the opposite direction within the range of 1 - 100 nm. During this process, start the motor 150 to drive the rotating shaft 113 to rotate, so that the turntable 120 and the main gear 130 rotate. As the main gear 130 rotates, it meshes with the four groups of driven gears 131, so that the triangular push blocks 132 on the driven gears 131 rotate. At the same time, the main gear 130 can also drive the cross 133 to rotate. When the rotating rods 134 at the four ends of the cross 133 move to the side of the turning groove 112, the triangular push blocks 132 on the driven gears 131 can push the retaining rings 135 on the rotating rods 134, so as to push the rotating rods 134 into the turning groove 112, making the tool rest 136 on the rotating rods 134 rotate periodically while following the four-sided conductive plate 115. Similarly, the secondary gear 124 inside the inner snap plate 122 can mesh with the rotating internal gear ring 121, so as to drive the triangular rotating plate 123 to rotate. Cooperating with the meshing of the triangular rotating plate 123 itself, the tool holder 125 outside the triangular rotating plate 123 rotates periodically while following the four-sided conductive plate 115.The tool holder 125 and the tool on the tool rest 136 undergo a sputtering reaction with the cathode box 220 and the four-sided conductive plate 115. At the same time, electrons are affected by the Lorentz magnetic force of the magnetic field during the process of accelerating towards the four-sided conductive plate 115, and are confined in the plasma region near the surface of the target 213, and move in a circular motion around the surface of the target 213 under the action of the magnetic field. The movement path of these electrons is very long, and they continuously collide with argon atoms during the movement, ionizing a large number of argon ions to bombard the target 213. After multiple collisions, the energy of the electrons gradually decreases, and the neutral target atoms are deposited on the tool to form a film. During the rotation of the tool following the four-sided conductive plate 115 and its own rotation, the tool is evenly coated with a film.

[0033] The present invention covers any alternatives, modifications, equivalent methods, and solutions made within the spirit and scope of the present invention. For the public to have a thorough understanding of the present invention, specific details are described in detail in the following preferred embodiments of the present invention. However, those skilled in the art can fully understand the present invention without the description of these details. In addition, well-known methods, processes, procedures, components, and circuits are not described in detail to avoid unnecessary confusion to the essence of the present invention.

[0034] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. An efficient spraying device for the surface of machine tool production, comprising a coating chamber and a sputtering device, wherein the sputtering device is provided with four groups and all are installed inside the coating chamber, characterized in that: The inner walls of the coating chamber are all provided with slots, and the four groups of sputtering devices are respectively installed in the four groups of slots. A blanket coating assembly is arranged in the middle of the coating chamber. The plating component includes a limit plate, the outer wall of the limit plate is fixedly connected to the middle inner wall of the coating cylinder chamber, the middle inner walls at both ends of the coating cylinder chamber are rotatably connected with a rotating shaft, and the rotating shaft is set as an insulating shaft, the outer wall of the rotating shaft is sleeved with multiple groups of four-sided conductive plates, the middle inner wall of the rotating shaft is clamped with an anode cable, the middle inner walls of the four sides of the four-sided conductive plates are fixedly installed with conductive columns, and the other end of the conductive column is in contact with the anode cable, and the four-sided conductive plates are electrically connected to the anode cable through the conductive columns.

2. The high-efficiency spraying equipment for the surface of machine tool production according to claim 1 is characterized in that: A turntable is provided in the middle of the two adjacent groups of four conductive plates, and the turntable is fixedly connected to the outer wall of the rotating shaft, the outer wall of the turntable located at the front end is rotatably connected to the inner wall in the middle of the limiting plate, a main gear is fixedly installed on the outer end wall of the turntable located at the front end, and the main gear is located inside the limiting plate, a cross is fixedly installed in the middle of the main gear, the four ends of the cross are rotatably connected to rotating rods, and a tool holder is fixedly installed in the middle of the rotating rod.

3. The high-efficiency spraying equipment for the surface of machine tool production according to claim 2 is characterized in that: The inner walls of the four sides of the outer end of the limit plate are rotatably connected with driven gears, and the four groups of driven gears are all meshed with the main gear. A triangular push block is fixedly installed on the tooth surface of the outer end of the driven gear.

4. The high-efficiency spraying equipment for the surface of machine tool production according to claim 3 is characterized in that: The inner walls on the four sides of the limit plate are provided with turning grooves, and clamping rings are fixedly installed at both ends of the rotating rod, and the clamping rings are in active contact with the inner wall of the limit plate, the outer end corners of the triangular push block can contact the side walls of the clamping ring, and the clamping ring cooperates with the turning groove through the outer end corners of the triangular push block.

5. The high-efficiency spraying equipment for the surface of machine tool production according to claim 4 is characterized in that: The inner wall of the turntable is movably connected with an inner buckle plate, the outer end surface of the inner buckle plate is rotatably connected with a triangular turn plate, the side walls of two adjacent groups of the triangular turn plates are meshed, and the outer wall of the triangular turn plate is fixedly installed with a knife seat.

6. The high-efficiency spraying equipment for the surface of machine tool production according to claim 5 is characterized in that: An inner gear ring is fixedly mounted on the inner end wall of the rotating disk, and a sub-gear is fixedly mounted on the inner wall of the triangular rotating plate, and the sub-gear is meshed with the inner gear ring.

7. The high-efficiency spraying equipment for the surface of machine tool production according to claim 6 is characterized in that: The sputtering device includes a magnetic isolation box, which is engaged with a corresponding slot, a cathode box is connected to the inner wall of the magnetic isolation box, a cathode cable is fixedly installed on the outer wall of the cathode box, a bombardment assembly is arranged inside the cathode box, a solid target plate is fixedly installed on the outer end wall of the magnetic isolation box, and a target material is connected to the inner wall of the solid target plate.

8. The high-efficiency spraying equipment for the surface of machine tool production according to claim 7 is characterized in that: The bombardment assembly includes a cooling box, which is clamped with the inner wall of the cathode box. Multiple groups of cooling fins are fixedly installed on the inner wall of the cooling box. The inner walls of the multiple groups of cooling fins are clamped with the same cooling pipe, and four groups of cooling pipes are interconnected. The inner walls of the multiple groups of cooling fins are clamped with the same grooved base box, and a silicon steel bar is fixedly installed on the inner wall in the middle of the grooved base box. The outer wall of the silicon steel bar is sleeved with a winding, and the outer wall of the winding is wound with a coil.

9. The high-efficiency spraying equipment for the surface of machine tool production according to claim 8, characterized in that: A grooved cover plate is fixedly installed on the outer wall of the grooved base box, and the grooved cover plate can leak out the silicon steel bars. A magnetic collecting cover is fixedly installed on the outer wall of the cooling box, and the magnetic collecting cover is aligned with the target material.

10. The high-efficiency spraying equipment for the surface of machine tool production according to claim 9, characterized in that: A motor is fixedly installed on the outer wall of the coating cylinder chamber, and the output end of the motor is fixedly connected to the end wall of the rotating shaft. A vacuum tube is opened on the outer wall of the coating cylinder chamber, and an air intake pipe is opened on the other outer wall of the coating cylinder chamber. The pipe openings at both ends of the cooling pipe, the anode cable, and four groups of cathode cables are all sealed and penetrate the outer wall of the coating cylinder chamber.

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