Valve and manufacturing equipment

Abstract

The invention provides a valve and manufacturing equipment, and relates to the technical field of production and manufacturing. The valve comprises a shell, a valve plate, a driving shaft, a first driving assembly and a second driving assembly. The first driving assembly and the second driving assembly are arranged in the shell; the first end of the driving shaft is arranged in the shell and connected with the first driving assembly and the second driving assembly, the driving shaft penetrates through the first driving assembly, and the first driving assembly penetrates through the second driving assembly; the second end of the driving shaft extends out of the shell and is connected with the valve plate; the first driving assembly is used for providing driving force parallel to the valve face of the external valve port in the first direction for the driving shaft. The second driving assembly is used for providing driving force in the second direction perpendicular to the valve face for the driving shaft. Wherein the driving shaft is used for driving the valve plate to move based on driving force, and the valve plate is used for controlling opening or closing of the valve port. And the valve plate can be driven in two directions, so that the friction condition during opening or closing of the valve port is effectively reduced.

Description

Technical Field

[0001] This application relates to the field of manufacturing technology, and more particularly, to a valve and manufacturing equipment. Background Art

[0002] During the production process of integrated circuit equipment, such as in the production of semiconductor and photovoltaic devices, there are high requirements for the cleanliness of equipment and the environment, and strict requirements for the number of particles generated by components in the equipment, especially moving components, during operation.

[0003] Existing gate valves and transfer valves for vacuum environments usually drive the valve plate to move and seal through a mechanical structure, and the sealing action is achieved through structures such as swing rods or ball bearings. When the valve sealing action is achieved through such structures, particulate contaminants will be generated due to friction between the connecting rod mechanism or ball bearings and other parts, resulting in adverse effects on the environmental cleanliness of the entire valve, and thus having an adverse impact on the production of devices. Summary of the Invention

[0004] In view of this, the purpose of the embodiments of this application is to provide a valve and manufacturing equipment to improve the pollution problem caused by friction during the movement of the valve plate in the prior art.

[0005] To solve the above problems, in a first aspect, the embodiments of this application provide a valve, which includes: a housing, a valve plate, a drive shaft, a first drive assembly, and a second drive assembly;

[0006] The first drive assembly and the second drive assembly are arranged inside the housing;

[0007] The first end of the drive shaft is arranged inside the housing to connect the first drive assembly and the second drive assembly. The drive shaft passes through the first drive assembly, and the first drive assembly passes through the second drive assembly; the second end of the drive shaft extends outside the housing and is connected to the valve plate;

[0008] Wherein, the first drive assembly is used to provide a driving force for the drive shaft in a first direction parallel to the valve surface of the external valve port; the second drive assembly is used to provide a driving force for the drive shaft in a second direction perpendicular to the valve surface;

[0009] Wherein, the drive shaft is used to drive the valve plate to move based on the driving force, and the valve plate is used to control the opening or closing of the valve port.

[0010] In the above implementation process, by setting two driving components in different directions to respectively provide driving forces for the driving shaft in two different directions, and driving the valve plate to move in two directions through the driving shaft, the friction between the valve plate and the valve port when the valve plate directly moves to the valve port for opening and closing can be reduced, thereby reducing particulate pollutants generated by friction and improving the environmental cleanliness of the entire valve. Moreover, in order to further improve the force uniformity and stability of the driving shaft in two directions, the first driving component and the second driving component are arranged in the same area, and the first driving component is arranged through the second driving component, and the driving shaft is arranged through the first driving component, which can unify the force position of the driving shaft through the nested position, effectively improving the stability and effectiveness when the driving shaft drives the valve plate to move.

[0011] Optionally, the second driving component includes: at least two second-type cylinders symmetrically distributed around the driving shaft;

[0012] Among them, the second-type cylinder includes: a fixing member, a moving member, and a first air hole structure;

[0013] The fixing member includes a table structure and a fixing shaft; the first end of the fixing shaft is fixedly connected to the table structure, and the second end of the fixing shaft is fixed in the housing; the moving member is movably arranged between the fixing member and the housing, and the moving member is connected to the driving shaft;

[0014] Among them, a first cavity is formed between the first surface of the table structure facing away from the fixing shaft and the moving member, a second cavity is formed between the moving member and the second surface of the table structure, and a third cavity is formed between the moving member and the fixing surface of the housing close to the fixing shaft;

[0015] The first air hole structure is arranged on the moving member and communicates with the first cavity, the second cavity, and the third cavity; the first air hole structure is configured to input gas into the cavity or discharge the gas inside the cavity;

[0016] Among them, the moving member is configured to move in the second direction based on the pressure change in multiple cavities and drive the driving shaft to drive the valve plate to move in the second direction.

[0017] In the above implementation process, the second driving component may include a plurality of second - type cylinders symmetrically distributed around the driving shaft. In the second - type cylinders, three cavities are formed by a fixing member, a moving member, and a housing. Gas is input into the cavities or discharged from the cavities through a first air - hole structure connected to the cavities to change the pressure conditions in the plurality of cavities. Through the pressure changes in the plurality of cavities, a movement in the second direction is generated, and the connected moving member is driven to move in the second direction. Since the moving member is also connected to the driving shaft, when the moving member moves, it can also drive the driving shaft to move, realizing the driving function. A compact multi - layer cylinder can be formed through a plurality of cavities within a limited cylinder size range, effectively increasing the output force value of the driving force in the second direction when the driving shaft is driven, being applicable to various driving scenarios where the cylinder size is restricted in the second direction and meeting various driving requirements.

[0018] Optionally, the first air - hole structure includes: a first - type air - hole and a second - type air - hole;

[0019] The first - type air - hole is connected to the first cavity;

[0020] The second - type air - hole is connected to the second cavity;

[0021] When the first cavity intakes air through the first - type air - hole, the moving member moves in the direction of closing the valve port based on the pressure change in the first cavity and drives the driving shaft to move in the direction of closing the valve port; wherein, the valve - port closing direction is the direction in the second direction that is away from the fixed shaft and close to the valve port;

[0022] When the second cavity intakes air through the second - type air - hole, the moving member is configured to move in the direction of opening the valve port based on the pressure change in the second cavity and drives the driving shaft to move in the direction of opening the valve port; wherein, the valve - port opening direction is the direction in the second direction that points to the fixed shaft and is away from the valve port.

[0023] In the above implementation process, in order to achieve the driving function in two reciprocating directions in the second direction, the first air hole structure may include independent first-type air holes and second-type air holes. The two types of air holes are respectively connected to the first cavity and the second cavity to provide gas transmission channels for the first cavity and the second cavity respectively, and can respectively achieve reciprocating motion in two directions according to the first cavity and the second cavity, so as to achieve automatic reset after completing the triggering function of driving. When the first cavity intakes air through the first-type air holes, the first cavity generates a pressure change based on the intake situation, and the volume in the first cavity becomes larger and expands. Since the first cavity is formed by the first surface of the table structure and the moving part, and the table structure is fixed, the volume change of the first cavity can drive the movable moving part to move in the valve closing direction and drive the driving shaft to move in the valve closing direction, realizing the driving function in the valve closing direction. When the second cavity intakes air through the second-type air holes, the second cavity generates a pressure change based on the intake situation, and the volume in the second cavity becomes larger and expands. Since the second cavity is formed by the second surface of the table structure and the moving part, and the table structure is fixed, the volume change of the second cavity can drive the movable moving part to move in the valve opening direction and drive the driving shaft to move in the valve opening direction, realizing the driving function in the valve opening direction.

[0024] Optionally, a through hole is provided in the fixing member, and the through hole communicates the first cavity and the third cavity;

[0025] In the case where the first cavity intakes air through the first-type air holes, the third cavity intakes air through the through hole; the moving part is configured to move in the valve closing direction based on the pressure change of the third cavity and drive the driving shaft to move in the valve closing direction;

[0026] The table structure is fixed on the fixed shaft through a punched connecting member; the first end of the through hole is provided on the first surface of the table structure, and the second end of the through hole is provided at the second end of the fixed shaft.

[0027] In the above implementation process, through holes are provided in the fixing member, and the first cavity and the third cavity can be interconnected based on the through holes. Therefore, when the first cavity intakes air through the first type of air holes, due to the air ventilation function of the through holes, the third cavity can also intake air through the through holes, so that the third cavity can generate a pressure change based on the air intake situation, and the volume inside the third cavity becomes larger and expands. Since the third cavity is formed by the moving member and the fixed surface of the housing, and the housing is fixed, the volume change of the first cavity can drive the movable moving member to move in the valve closing direction, and drive the drive shaft to move in the valve closing direction, realizing the driving function in the valve closing direction. Through the setting and connection structure of the first cavity and the third cavity, two driving forces in the valve closing direction can be provided for the moving member when the first cavity intakes air, effectively improving the driving force of the drive shaft in the valve closing direction, and being applicable to various driving scenarios with small sizes but large output force requirements. The table structure is fixed on the fixed shaft through the punched connecting member. The first end of the through hole is arranged on the first surface of the table structure, and the second end is arranged at the second end of the fixed shaft, so that the through hole can normally connect the first cavity and the third cavity without having an adverse effect on the middle second cavity. Setting the through hole in the fixing member to connect the first cavity and the third cavity effectively reduces the structural complexity and device cost.

[0028] Optionally, the first driving assembly includes: one or more first type cylinders symmetrically distributed around the drive shaft, and the first type cylinders are arranged in the central area of the plurality of second type cylinders;

[0029] Wherein, the first type cylinder includes: a cylinder body, a piston member, and a second air hole structure;

[0030] The piston member is arranged inside the cylinder body, and a fourth cavity and a fifth cavity are formed inside the cylinder body based on the piston member, and the piston member is connected to the drive shaft;

[0031] The second air hole structure is arranged on the cylinder body and is communicated with the fourth cavity and the fifth cavity; the second air hole structure is configured to input gas into the cavity or discharge the gas inside the cavity;

[0032] Wherein, the piston member is configured to move in the first direction based on the pressure change in the two cavities and drive the drive shaft to drive the valve plate to move in the first direction.

[0033] In the above implementation process, the first driving component may include a plurality of first-class cylinders symmetrically distributed around the driving shaft, and the first-class cylinders are arranged in the central area of the second-class cylinders to provide stable and uniform driving force through multiple classes of cylinders arranged side by side. The first-class cylinders may include a cylinder body, a movable piston member, and a corresponding second air hole structure. Based on the piston member arranged inside, the cylinder body can form a fourth cavity and a fifth cavity. Based on the communication between the second air hole structure arranged on the cylinder body and the cavity, gas can be input into the cavity or the gas inside the cavity can be discharged to change the pressure conditions in the two cavities, and through the pressure changes in the two cavities, the piston member can be moved in the first direction, and the driving shaft connected to the piston member can be driven to drive the valve plate to move.

[0034] Optionally, the valve further includes: a gas controller;

[0035] The gas controller is connected to the first-class cylinders and the second-class cylinders;

[0036] The gas controller is used to control the working states of the first-class cylinders and the second-class cylinders.

[0037] In the above implementation process, considering that multiple cylinders in the two driving components are driven by gas, accordingly, a corresponding gas controller may also be provided in the valve. The gas controller is connected to the two classes of cylinders, and the transmission of gas is controlled by the gas controller, so as to control the working states of the first-class cylinders and the second-class cylinders. The working states of the cylinders can be automatically controlled by the gas controller according to the actual requirements of the valve port, so as to automatically control the movement position of the valve plate, effectively improving the efficiency when the valve port is opened or closed.

[0038] Optionally, the gas controller includes a branch component, a control valve, and a switch member;

[0039] The control valve is connected to the switch member and the branch component;

[0040] The control valve is used to control the conduction and closing of the branch component based on the triggering situation of the switch member; wherein, the branch component includes a first gas branch and a second gas branch connected to the second air hole structure of the first-class cylinders, and a third gas branch and a fourth gas branch connected to the first air hole structure of the second-class cylinders.

[0041] In the above implementation process, the gas controller may include a branch component for transporting gas, a control valve for controlling the working condition of the branch component, and a switch component for controlling the switch. The control valve is connected to the switch component and the branch component to control the conduction and closing of the branch component according to the triggering condition of the switch component and in combination with its own control logic. The branch component includes two gas branches connected to the first type of cylinder and two gas branches connected to the second type of cylinder to independently control the working states of the two types of driving components.

[0042] Optionally, the gas transmission direction of the first gas branch is opposite to the gas transmission direction of the second gas branch;

[0043] The gas transmission direction of the third gas branch is opposite to the gas transmission direction of the fourth gas branch.

[0044] In the above implementation process, in order to achieve the normal moving function, there is a linkage situation among the pressure conditions of multiple cavities in each type of cylinder. Therefore, the gas transmission directions of the first gas branch and the second gas branch of the first type of cylinder are opposite, and the gas transmission directions of the third gas branch and the fourth gas branch of the second type of cylinder are opposite, so that the multiple cavities in each type of cylinder will not have an adverse impact on each other, effectively reducing adverse situations such as the drive shaft stagnating and being unable to move, and improving the smoothness of driving the drive shaft.

[0045] Optionally, when the valve port is opened to closed, the gas controller is used to control the first driving component to drive the drive shaft to drive the valve plate to move to the relative position of the valve port, and the gas controller is also used to control the second driving component to drive the drive shaft to drive the valve plate to move from the relative position to the closed position of the valve port;

[0046] When the valve port is closed to opened, the gas controller is used to control the second driving component to drive the drive shaft to drive the valve plate to move from the closed position of the valve port to the relative position, and the gas controller is also used to control the first driving component to drive the drive shaft to drive the valve plate to leave the relative position.

[0047] In the above implementation process, when the valve port is open, in order to close the valve port, the gas controller can first control the first driving component to drive the driving shaft to drive the valve plate to move to the relative position of the valve port, and then control the second driving component to drive the driving shaft to drive the valve plate to move from the relative position to the closed position where it fits the valve port, realizing the control process of the valve port from open to closed. When the valve port is closed, the gas controller can first control the second driving component to drive the driving shaft to drive the valve plate to move from the closed position where it fits the valve port to the relative position of the valve port, and then control the first driving component to drive the driving shaft to drive the valve plate to leave the relative position, realizing the control process of the valve port from closed to open. It can drive the two driving components respectively to open and close the valve port, effectively reducing the friction between the valve plate and the valve port, thereby reducing the particulate pollutants generated by friction and improving the environmental cleanliness of the entire valve.

[0048] In a second aspect, an embodiment of the present application provides a manufacturing device, and the manufacturing device includes the valve according to any one of the above first aspects.

[0049] In summary, an embodiment of the present application provides a valve and a manufacturing device, which can drive the valve plate in two directions, effectively reducing the friction when the valve port is opened or closed, thereby reducing the particulate pollutants generated by friction and improving the environmental cleanliness of the entire valve. Description of the Drawings

[0050] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments of the present application. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0051] Figure 1 It is a schematic cross-sectional structure diagram of a valve provided by an embodiment of the present application;

[0052] Figure 2 It is a schematic cross-sectional structure diagram of another valve provided by an embodiment of the present application;

[0053] Figure 3 It is a schematic structure diagram of a second type of cylinder provided by an embodiment of the present application;

[0054] Figure 4 It is a detailed schematic structure diagram of a second type of cylinder provided by an embodiment of the present application;

[0055] Figure 5 It is a schematic structure diagram of a first type of cylinder provided by an embodiment of the present application;

[0056] Figure 6A three-dimensional structure schematic diagram of a valve provided by an embodiment of the present application.

[0057] Icons: 100 - housing; 210 - valve plate; 220 - drive shaft; 300 - first drive assembly; 400 - second drive assembly; F1 - first direction; F2 - second direction; 410 - second type of cylinder; 420 - fixing member; 430 - moving member; 440 - first air hole structure; 421 - table structure; 422 - fixed shaft; A1 - first cavity; A2 - second cavity; A3 - third cavity; 441 - first type of air hole; 442 - second type of air hole; F3 - valve closing direction; 450 - through hole; 451 - punched connecting member; F4 - valve opening direction; 461 - first seal; 462 - second seal; 471 - first guiding member; 472 - second guiding member; 310 - first type of cylinder; 320 - cylinder body; 330 - piston member; 340 - second air hole structure; A4 - fourth cavity; A5 - fifth cavity; 500 - gas controller; 510 - branch assembly; 520 - control valve; 530 - switch member; 511 - first gas branch; 512 - second gas branch; 513 - third gas branch; 514 - fourth gas branch; 230 - valve port. Detailed implementation manners

[0058] Next, the technical solutions in the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the scope of protection of the embodiments of the present application.

[0059] Existing gate valves and transfer valves for vacuum environments usually drive the movement and sealing of the valve plate through mechanical structures, and the sealing action is achieved through structures such as swing rods or balls. When implementing the valve sealing action through such structures, particulate contaminants will be generated due to friction between various parts such as link mechanisms or balls, resulting in adverse effects on the environmental cleanliness of the entire valve, thereby having an adverse impact on the production of devices. For example, in industries such as semiconductors and photovoltaics, extremely few particulate contaminants are required to be generated during the use of all equipment components. The requirements for transfer valves used therein are even more stringent. The main reason is that the transfer valve is usually located at the connection of two chambers. When a wafer needs to be transferred between two chambers, the wafer must pass through the transfer valve. If the transfer valve generates particulate contaminants, it may fall on the wafer, causing the wafer to be contaminated or even scrapped.

[0060] To solve the above problems, the embodiments of the present application provide a valve and a manufacturing device, which can drive the valve plate in two directions, effectively reduce the friction when the valve port is opened or closed, thereby reducing the particulate pollutants generated by friction and improving the environmental cleanliness of the entire valve.

[0061] Please refer to Figure 1 , Figure 1 which is a schematic cross-sectional structure diagram of a valve provided by an embodiment of the present application. The valve may include: a housing 100, a valve plate 210, a drive shaft 220, a first drive assembly 300, and a second drive assembly 400.

[0062] Among them, the first drive assembly 300 and the second drive assembly 400 may include various types of devices or components with driving functions such as cylinders, lead screws, motors, worm gears, and springs. The first drive assembly 300 and the second drive assembly 400 are arranged in the housing 100. The first drive assembly 300 and the second drive assembly 400 can be installed in the housing 100 by means of component installation, or the first drive assembly 300 and the second drive assembly 400 can be integrally fixed in the housing 100 by means of screws, welding, etc.

[0063] It should be noted that the drive shaft 220 can be set as a corresponding moving shaft, drive rod and other structures. The first end of the drive shaft 220 is arranged in the housing 100 and is connected to the first drive assembly 300 and the second drive assembly 400. The first end of the drive shaft 220 can be connected to the first drive assembly 300 and the second drive assembly 400 by means of welding, screws, etc. In order to further improve the force uniformity and stability of the drive shaft 220 in two directions, in the first direction F1 in which the first drive assembly 300 moves, the drive shaft 220 passes through the first drive assembly 300, and the first drive assembly 300 passes through the second drive assembly 400. The second end of the drive shaft 220 extends outside the housing 100 and is connected to the valve plate 210. The first drive assembly 300 and the second drive assembly 400 are arranged in the same area, and the first drive assembly 300 passes through the second drive assembly 400, and the drive shaft 220 passes through the first drive assembly 300, which can unify the force position of the drive shaft 220 through the nested position, effectively improving the stability and effectiveness of the drive shaft 220 driving the valve plate 210 to move.

[0064] Exemplarily, the valve plate 210 may be a flat plate-like structure corresponding to the shape of the external valve port. For example, when the valve port is a circular valve port with a diameter of a, the valve plate 210 may be set as a circular flat plate-like structure with a diameter slightly larger than a to effectively close the valve port. This application only shows a rectangular shape structure of the valve plate 210, and other shape structures will not be elaborated. A rubber sealing ring or other structures corresponding to the shape of the valve port may also be provided on the valve surface of the valve plate 210 in contact with the valve port to improve the sealing performance when the valve port is closed, and buffer the contact between the valve plate 210 and the valve port through the sealing ring, further reducing the friction generated when the valve plate 210 is in direct contact with the valve port.

[0065] Optionally, the first driving assembly 300 is used to provide a driving force for the driving shaft 220 in the first direction F1 parallel to the valve surface of the external valve port, and the second driving assembly 400 is used to provide a driving force for the driving shaft 220 in the second direction F2 perpendicular to the valve surface. By setting two driving assemblies in different directions, driving forces in two different directions are respectively provided for the driving shaft 220, that is, to control the driving shaft 220 to achieve an L-shaped movement path. The driving shaft 220 is used to drive the valve plate 210 to move based on the driving force, so as to drive the valve plate 210 to the closed position of the valve port or away from the closed position of the valve port, so that the valve plate 210 can control the opening or closing of the valve port 520. When the valve plate 210 moves to the closed position of the valve port and is close to the valve port, the valve port is closed. When the valve plate 210 leaves the closed position of the valve port, the valve port is opened.

[0066] It should be noted that parts such as the housing 100, the valve plate 210, the driving shaft 220, the first driving assembly 300, and the second driving assembly 400 can all be made of wear-resistant and lubricating materials, such as hard alloys like tungsten carbide or alloy materials with a chromium coating on the surface. When designing multiple parts, the dimensional tolerances between the parts can be reduced to improve the uniformity of the force on the driving shaft 220 and the valve plate 210.

[0067] In Figure 1 the shown embodiment, it is possible to reduce the friction between the valve plate 210 and the valve port when the valve plate 210 directly moves to the valve port for opening and closing, thereby reducing the particulate contaminants generated by friction and improving the environmental cleanliness of the entire valve.

[0068] Optionally, please refer to Figure 2 , Figure 2A schematic cross-sectional structure diagram of another valve provided by an embodiment of the present application. Among them, the second driving assembly 400 may include a plurality of second type cylinders 410 symmetrically distributed around the driving shaft 220. The present application only shows a schematic structure diagram with 2 second type cylinders 410. The number of the second type cylinders 410 can be set and selected according to the actual thrust requirement when the valve plate 210 is closed. The structures of other numbers of the second type cylinders 410 will not be elaborated here.

[0069] Optionally, please refer to Figure 3 , Figure 3 A schematic structure diagram of a second type cylinder provided by an embodiment of the present application. The second type cylinder 410 may include: a fixing member 420, a moving member 430, and a first air hole structure 440;

[0070] Among them, the fixing member 420 may include a tabletop structure 421 and a fixing shaft 422. The tabletop structure 421 may be set as a planar structure of various shapes, such as a circular tabletop, a rectangular tabletop, etc. The planar shape of the tabletop structure 421 matches the inner wall of the housing 100 to isolate a plurality of cavities in the housing 100 through the tabletop structure 421. The fixing shaft 422 may be set as a shaft-like structure of various shapes, such as a cylindrical shaft, a columnar shaft, etc. The first end of the fixing shaft 422 is fixedly connected to the tabletop structure 421. The tabletop structure 421 may be fixed to the first end of the fixing shaft 422 through connecting members such as welding and screws. The second end of the fixing shaft 422 is fixed in the housing 100. A corresponding fixing platform may be provided on the fixing surface of the housing 100 opposite to the tabletop structure 421. The second end of the fixing shaft 422 may also be fixed to the fixing platform through connecting members such as welding and screws to improve the fixing stability of the entire fixing member 420.

[0071] It should be noted that the moving member 430 is movably arranged between the fixing member 420 and the housing 100. Since the fixing member 420 is a table-like structure, the moving member 430 may be set as a table-like structure with an inner wall fitting the fixing member 420 and a special shape with an outer wall fitting the housing 100.

[0072] Among them, since the inner wall shape of the internal space formed by the tabletop structure 421 and the housing 100 fits, a first cavity A1 is formed between the first surface of the tabletop structure 421 facing away from the fixing shaft 422 and the moving member 430, and a second cavity A2 is formed between the second surface (i.e., the opposite surface of the first surface) of the moving member 430 and the tabletop structure 421. Moreover, in order to give the moving member 430 sufficient movement space, there is a corresponding movement space between the outer wall of the moving member 430 and the housing 100. Therefore, a third cavity A3 may be formed between the moving member 430 and the fixing surface of the housing 100 close to the fixing shaft 422.

[0073] Optionally, the first air hole structure 440 is disposed on the moving member 430 and communicates with the first cavity A1, the second cavity A2, and the third cavity A3. The first air hole structure 440 is configured to input gas into the cavity or discharge the gas inside the cavity. Since the drive shaft 220 is disposed outside the cavity, the drive shaft 220 can be connected to the moving member 430 extending outside the cavity by means of welding, screws, etc. The moving member 430 is configured to move in the second direction F2 based on the pressure change in the plurality of cavities and drive the drive shaft 220 to drive the valve plate 210 to move in the second direction F2.

[0074] Exemplarily, the first air hole structure 440 may be a corresponding circular air hole channel or the like. The first air hole structure 440 may be disposed through the moving member 430, and corresponding air hole branches may also be provided on the housing 100 to accommodate the first air hole structure 440. The first air hole structure 440 may include a plurality of different types of air holes, which are respectively connected to the first cavity A1, the second cavity A2, and the third cavity A3 to respectively provide air inlet and outlet channels for the interiors of the plurality of cavities.

[0075] Optionally, please refer to Figure 4 , Figure 4 FIG. [ID] is a detailed structural schematic diagram of a second type of cylinder provided by an embodiment of the present application. Among them, the first air hole structure 440 may include: a first type of air hole 441 and a second type of air hole 442.

[0076] It should be noted that the first type of air hole 441 is connected to the first cavity A1, and the second type of air hole 442 is connected to the second cavity A2. In order to achieve the driving function in two reciprocating directions, the first air hole structure 440 may include independent first type of air holes 441 and second type of air holes 442. The two types of air holes are respectively connected to the first cavity A1 and the second cavity A2 to respectively provide gas transmission channels for the first cavity A1 and the second cavity A2, and can respectively realize reciprocating movement in two directions according to the first cavity A1 and the second cavity A2, so as to realize automatic reset after completing the triggering function of driving.

[0077] Optionally, the positions and channel routes of the first type of air hole 441 and the second type of air hole 442 on the moving member 430 can be set according to actual situations.

[0078] It should be noted that, when the first cavity A1 takes in air through the first type of air holes 441, the movable member 430 moves in the valve port closing direction based on the pressure change of the first cavity, and drives the drive shaft 220 to move in the valve port closing direction; wherein, the valve port closing direction is the direction away from the fixed shaft 422 and close to the valve port in the second direction F2. When the first cavity A1 takes in air through the first type of air holes 441, the first cavity A1 produces a pressure change based on the air intake situation, and the volume in the first cavity A1 becomes larger and expands. Since the first cavity A1 is formed by the first surface of the table structure 421 and the movable member 430, and the table structure 421 is fixed, the volume change of the first cavity A1 can drive the movable movable member 430 to move in the valve port closing direction, and drive the drive shaft 220 to move in the valve port closing direction, thereby realizing the driving function in the valve port closing direction.

[0079] It should be noted that, when the second cavity A2 takes in air through the second type of air holes 442, the movable member 430 is configured to move in the direction of the valve opening based on the pressure change of the second cavity A2, and drive the drive shaft 220 to move in the direction of the valve opening; wherein, the valve opening direction is the direction pointing to the fixed shaft 422 and away from the valve in the second direction F2. When the second cavity A2 takes in air through the second type of air holes 442, the second cavity A2 produces a pressure change based on the air intake situation, and the volume in the second cavity A2 becomes larger and expands. Since the second cavity A2 is formed by the second surface of the table structure 421 and the movable member 430, and the table structure 421 is fixed, the volume change of the second cavity A2 can drive the movable movable member 430 to move in the direction of the valve opening, and drive the drive shaft 220 to move in the direction of the valve opening, thereby realizing the driving function of the valve opening direction.

[0080] When air is taken in by the second cavity through the second type of air hole 442, the movable member 430 is configured to move in the valve opening direction based on the pressure change of the second cavity, and drive the driving shaft 220 to move in the valve opening direction; wherein, the valve opening direction is the direction on the second direction F2 pointing to the fixed shaft 422 and away from the valve port.

[0081] Optionally, see Figure 4, optionally, in order to increase the driving force in the valve closing direction F3, a through hole 450 may be provided in the fixing member 420, and the through hole 450 communicates the first cavity A1 and the third cavity A3. When the first cavity A1 intakes air through the first type of air holes 441, the third cavity A3 intakes air through the through hole 450; the moving member 430 is configured to move in the valve port closing direction based on the pressure change in the third cavity A3 and drive the drive shaft 220 to move in the valve port closing direction. Since the through hole 450 is provided in the fixing member 420 and the first cavity A1 and the third cavity A3 can be interconnected based on the through hole 450, when the first cavity A1 intakes air through the first type of air holes 441, due to the air ventilation function of the through hole 450, the third cavity A3 can also intake air through the through hole 450, so that the third cavity A3 can generate a pressure change based on the air intake situation. The volume in the third cavity A3 becomes larger and expands. Since the third cavity A3 is formed by the moving member 430 and the fixed surface of the housing 100 and the housing 100 is fixed, the volume change of the first cavity A1 can drive the movable moving member 430 to move in the valve port closing direction and drive the drive shaft 220 to move in the valve port closing direction, realizing the driving function in the valve port closing direction. Through the setting and connection structure of the first cavity A1 and the third cavity A3, two driving forces in the valve port closing direction can be provided for the moving member 430 when the first cavity A1 intakes air, effectively increasing the driving force of the drive shaft 220 in the valve port closing direction, which is applicable to various driving scenarios with small sizes but large output force requirements.

[0082] It should be noted that the force-bearing area of the moving member 430 in the first cavity A1 is the area of the top cover corresponding to the first surface of the moving member 430 and the table structure 421. The top cover of the moving member 430 can be set as a detachable structure for easy assembly of multiple parts. The top cover can be connected to the bottom of the moving member 430 by means of snaps, screws, welding, etc., and corresponding sealing structures such as sealing rings are provided for sealing treatment. In the third cavity A3, since the fixed shaft 422 is fixed on the fixed surface of the housing 100, the force-bearing area of the moving member 430 in the third cavity A3 is the area of the fixed surface minus the area of the middle fixed shaft 422. When the fixing member 420 is fixed stably, the fixed area of the second end of the fixed shaft 422 can be minimized, or the area of the fixed surface of the housing 100 can be increased to increase the force-bearing area of the moving member 430 in the third cavity A3, further increasing the force value of the driving force in the valve port closing direction applied by the third cavity A3 to the moving member 430.

[0083] Optionally, the tabletop structure 421 can be fixed on the fixed shaft 422 through a punched connecting piece 451. The punched connecting piece 451 can be a connecting piece with a hole structure such as a punched screw. Based on the connection of the punched connecting piece 451, the first end of the through hole 450 is arranged on the first surface of the tabletop structure 421, and the second end of the through hole 450 is arranged at the second end of the fixed shaft 422, so that the through hole 450 can normally connect the first cavity A1 and the third cavity A3 without adversely affecting the middle second cavity A2. Arranging the through hole 450 in the fixing member 420 to connect the first cavity A1 and the third cavity A3 effectively reduces the structural complexity and device cost.

[0084] It should be noted that in some driving scenarios of valve control, considering the sealing characteristics of valve closing, therefore, the force value requirement for the driving force in the valve closing direction F3 is relatively high, while in the opposite direction of the valve closing direction F3, that is, the force value requirement for the driving force in the valve opening direction F4 is relatively low. Therefore, only one driving force is required to complete the driving function in the valve opening direction F4.

[0085] Optionally, the first type of air holes 441 and the second type of air holes 442 can be connected to an external air pressure device, such as a gas controller 500, to change the pressure conditions in their respective cavities according to the working conditions of the air pressure device. And, in order to achieve normal movement functions, there is a linkage situation for the pressure conditions between multiple cavities. Therefore, the gas transmission direction in the first type of air holes 441 is opposite to the gas transmission direction in the second type of air holes 442, so that the cavities do not have adverse effects on each other, effectively reducing adverse situations such as the moving part 430 stagnating and being unable to move, and improving the smoothness of the driving function of the air cylinder.

[0086] Exemplarily, when the gas transmission direction in the first type of air holes 441 is the air intake direction, the first cavity A1 and the third cavity A3 intake air, the gas transmission direction in the second type of air holes 442 is the air outlet direction, and the second cavity A2 exhausts air; when the gas transmission direction in the second type of air holes 442 is the air intake direction, the second cavity A2 intakes air, the gas transmission direction in the first type of air holes 441 is the air outlet direction, and the first cavity A1 and the third cavity A3 exhaust air, so that normal air pressure changes can occur in multiple cavities, enabling the moving part 430 to be normally driven.

[0087] It should be noted that the air intake speed / air outlet speed of the first type of air holes 441 and the second type of air holes 442 can be set and adjusted according to the force-bearing area, actual space, etc. in multiple cavities.

[0088] Optionally, to ensure the airtightness of each cavity, the cylinder may further include: a first seal 461 and a second seal 462. Among them, the first seal 461 is disposed between the table structure 421 and the moving member 430, and the first seal 461 is used to isolate the first cavity A1 and the second cavity A2. The second seal 462 is disposed between the moving member 430 and the housing 100, and the second seal 462 is used to isolate the third cavity A3 from the internal space of the housing 100. The first cavity A1 and the second cavity A2 with opposite driving directions can be isolated by the first seal 461, and the first cavity A1 and the second cavity A2 can be sealed to reduce abnormal conditions caused by conduction between the first cavity A1 and the second cavity A2. The internal space of the housing 100 and the third cavity A3 can also be isolated by the third seal, and the third cavity A3 can be sealed to reduce abnormal conditions caused by conduction between the internal space of the housing 100 and the third cavity A3.

[0089] Exemplarily, corresponding first grooves may be provided on the contact surface of the table structure 421 close to the moving member 430 to accommodate the first seal 461, and corresponding second grooves may be provided on the contact surface of the moving member 430 close to the housing 100 to accommodate the second seal 462.

[0090] Exemplarily, to further improve the sealing effect of the two seals, the first seal 461 and the second seal 462 may be set as Z-shaped seals with self-sealing effects, such as Z-shaped sealing rings made of rubber materials, which can effectively reduce the friction during movement and optimize the sealing effect through their own deformation.

[0091] Optionally, considering the relative movement between multiple structures, to reduce the friction during relative movement and limit the movement direction of the moving member 430, the cylinder may further include: a first guide member 471 and a second guide member 472. Among them, the first guide member 471 is disposed between the table structure 421 and the moving member 430, and the second guide member 472 is disposed between the fixed shaft 422 and the moving member 430. The first guide member 471 and the second guide member 472 are used to limit the movement direction of the moving member 430. The movement direction of the moving member 430 can be limited by the two guide members, effectively reducing the adverse situation of deviation in the movement direction of the moving member 430. The friction between the moving member 430 and other parts can also be reduced by the two guide members, effectively improving the service life of the cylinder.

[0092] Optionally, the first guiding member 471 may be set to a corresponding annular structure according to the planar shape of the tabletop structure 421. For example, when the tabletop structure 421 is a circular tabletop, the first guiding member 471 may be set to an annular structure. The second guiding member 472 may be set to a corresponding annular structure according to the outer wall shape of the fixed shaft 422. For example, when the fixed shaft 422 is a cylindrical shaft, the second guiding member 472 may be set to an annular structure. Moreover, in order to further isolate the third cavity A3 and the second cavity A2, a corresponding third sealing member may also be provided at the contact position between the moving member 430 and the second guiding member 472.

[0093] Optionally, the first guiding member 471 and the second guiding member 472 may be made of corresponding wear-resistant materials, such as stainless steel, cemented carbide, ceramic materials, or metal materials with wear-resistant coatings, etc.

[0094] Exemplarily, a corresponding third groove may also be provided on the contact surface of the tabletop structure 421 close to the moving member 430 to accommodate the first guiding member 471, and a corresponding second groove may be provided on the contact surface of the moving member 430 close to the fixed shaft 422 to accommodate the second guiding member 472.

[0095] It should be noted that there are multiple second-type cylinders 410 in the valve of the present application. In order to realize the linkage control of the multiple second-type cylinders 410, the moving members 430 of the multiple second-type cylinders 410 may be fixedly connected, or a whole moving member 430 may be directly provided and internally connected to the multiple second-type cylinders 410 respectively, and the multiple second-type cylinders 410 perform unified linkage control on the driving shaft 220.

[0096] Optionally, please continue to refer to Figure 2 In the first driving assembly 300, there may be multiple first-type cylinders 310 symmetrically distributed around the driving shaft 220, and the first-type cylinders 310 are arranged in the central area of the second-type cylinders 410 to provide stable and uniform driving force through multiple types of cylinders arranged side by side. Only a structural schematic diagram with 2 first-type cylinders 310 is shown in the present application. The number of the first-type cylinders 310 may be set and selected according to the actual thrust requirement when the valve plate 210 is closed. The structures of other numbers of first-type cylinders 310 will not be elaborated here.

[0097] Optionally, please refer to Figure 5 Figure 5 which is a structural schematic diagram of a first-type cylinder provided by an embodiment of the present application. The first-type cylinder 310 may include: a cylinder body 320, a piston member 330, and a second air hole structure 340.

[0098] ​Among them, the piston member 330 is disposed inside the cylinder body 320. A fourth cavity A4 and a fifth cavity A5 are formed inside the cylinder body 320 based on the piston member 330. The piston member 330 is connected to the drive shaft 220. For example, one end of the piston member 330 extending outside the cylinder body 320 can be connected to the drive shaft 220 by means such as welding or screws.

[0099] Optionally, the second air hole structure 340 is disposed on the cylinder body 320 and communicates with the fourth cavity A4 and the fifth cavity A5. The second air hole structure 340 is configured to input gas into the cavity or discharge the gas inside the cavity. The piston member 330 is configured to move in the first direction F1 based on the pressure change in the two cavities and drive the drive shaft 220 to drive the valve plate 210 to move in the first direction F1.

[0100] Exemplarily, the second air hole structure 340 can also be a corresponding circular air hole channel or the like. The second air hole structure 340 can be disposed through the upper cover and the lower cover of the cylinder body 320. Corresponding air hole branches can also be provided on the housing 100 to accommodate the second air hole structure 340. The second air hole structure 340 can include multiple different types of air holes, such as air outlet holes and air inlet holes, which are respectively connected to the fourth cavity A4 and the fifth cavity A5 to respectively provide air inlet and air outlet channels for the inside of the multiple cavities.

[0101] Optionally, please continue to refer to Figure 2 , among which, considering that multiple cylinders in the two drive assemblies are driven by gas, the valve can further include: a gas controller 500.

[0102] Among them, the gas controller 500 is connected to the first type of cylinder 310 and the second type of cylinder 410. The gas controller 500 is used to control the working states of the first type of cylinder 310 and the second type of cylinder 410. The gas controller 500 is connected to the two types of cylinders, and the transmission situation of the gas is controlled through the gas controller 500, so as to control the working states of the first type of cylinder 310 and the second type of cylinder 410. The working states of the cylinders can be automatically controlled by the gas controller 500 according to the actual requirements of the valve port, so as to automatically control the movement position of the valve plate 210, effectively improving the efficiency when the valve port is opened or closed.

[0103] Optionally, the gas controller 500 may include a branch component 510, a control valve 520, and a switch 530. The control valve 520 is connected to the switch 530 and the branch component 510, and is configured to control the on / off state of the branch component 510 based on the triggering condition of the switch 530. The gas controller 500 may include a branch component 510 for transmitting gas, a control valve 520 for controlling the operation of the branch component 510, and a switch 530 for controlling the switch. The switch 530 may be disposed on the housing 100, and the branch component 510 and the control valve 520 may be disposed inside the housing 100. The branch component 510 may be configured as a tubular passage such as an air pipe for gas transmission. The switch 530 may be configured as a trigger button for opening / closing the corresponding valve, and the control valve 520 may be configured as a device with a logic control function that can change the gas flow trajectory.

[0104] Optionally, the branch component 510 may include a first gas branch 511 and a second gas branch 512 connected to the second air hole structure 340 of the first type of cylinder 310, and a third gas branch 513 and a fourth gas branch 514 connected to the first air hole structure 440 of the second type of cylinder 410, so as to independently control the working states of the two types of driving components respectively.

[0105] Exemplarily, two mechanical control valves (A and B) may be provided on the control valve 520. When the valve is in the open state (one of the mechanical control valves, assumed to be A, is triggered) and the valve needs to be closed, the logic is as follows: After the compressed air enters the control valve 520, since the mechanical control valve A is triggered, the compressed air first enters the branch in the first gas branch 511 or the second gas branch 512 that can make the valve plate 210 move in the first direction F1 towards the valve port, so that the valve plate 210 can move in the first direction F1 to the relative position of the valve port. At this time, the mechanical control valve A is released, and the mechanical control valve B is triggered, and the gas path is switched to the branch in the third gas branch 513 or the fourth gas branch 514 that can make the valve plate 210 move in the second direction F2 towards the valve port, so that the valve plate 210 can move in the second direction F2 until it fits and seals with the sealing surface of the valve port, completing the valve closing process. When the valve needs to be opened, the control logic is opposite to the control logic when the valve is closed. A corresponding pneumatic control valve may also be provided on the control valve 520 to isolate multiple gas branches. For example, when there is air pressure in the fourth gas branch 514, no compressed air can enter the first gas branch 511 and the second gas branch 512, so as to improve the stability of the movement process in each direction.

[0106] It should be noted that in order to achieve normal movement functions, there is a linkage situation in the pressure conditions among multiple cavities in each type of cylinder. Therefore, the gas transmission direction of the first gas branch 511 is opposite to that of the second gas branch 512, and the gas transmission direction of the third gas branch 513 is opposite to that of the fourth gas branch 514, so that the multiple cavities in each type of cylinder will not have adverse effects on each other, effectively reducing adverse situations such as the stagnation and immobility of the drive shaft 220, and improving the smoothness of driving the drive shaft 220.

[0107] Exemplarily, when the first gas branch 511 intakes gas, the second gas branch 512 exhausts gas; when the first gas branch 511 exhausts gas, the second gas branch 512 intakes gas. When the third gas branch 513 intakes gas, the fourth gas branch 514 exhausts gas; when the third gas branch 513 exhausts gas, the fourth gas branch 514 intakes gas.

[0108] It should be noted that considering the diversity of the numbers of the two types of cylinders, the branch ends of the first gas branch 511 and the second gas branch 512 and the second air hole structure 340 of the first type of cylinder 310 may include multiple branch paths to be respectively connected to the air hole structures of multiple first type of cylinders 310. The third gas branch 513 may be connected to the first type of air holes 441 in the first air hole structure 440 of the second type of cylinder 410, and the fourth gas branch 514 may be connected to the second type of air holes 442 in the first air hole structure 440. The branch ends of the third gas branch 513 and the fourth gas branch 514 may also include multiple branch paths to be respectively connected to multiple second type of cylinders 410.

[0109] Exemplarily, the branch paths of the multiple gas branches may be provided on the gas branches, may also be realized through the pipeline structure on the housing 100, or may also be realized through the interfaces provided on the first type of cylinder 310 and the second type of cylinder 410.

[0110] It should be noted that when the valve port is opened to closed, the gas controller 500 is used to control the first driving component 300 to drive the drive shaft 220 to drive the valve plate 210 to move to the relative position of the valve port, and the gas controller 500 is also used to control the second driving component 400 to drive the drive shaft 220 to drive the valve plate 210 to move from the relative position to the closed position of the valve port. In order to close the opened valve port, the gas controller 500 may first control the first driving component 300 to drive the drive shaft 220 to drive the valve plate 210, which is far from the valve port in the first direction F1, to move to the relative position of the valve port, and then control the second driving component 400 to drive the drive shaft 220 to drive the valve plate 210 to move from the relative position to the closed position where it fits the valve port, so as to realize the control process of the valve port from opening to closing.

[0111] It should be noted that when the valve port is closed and then opened, the gas controller 500 is used to control the second driving component 400 to drive the driving shaft 220 to drive the valve plate 210 to move from the closed position of the valve port to the relative position, and the gas controller 500 is also used to control the first driving component 300 to drive the driving shaft 220 to drive the valve plate 210 to leave the relative position. When the valve port is closed, the gas controller 500 can first control the second driving component 400 to drive the driving shaft 220 to drive the valve plate 210 to move from the closed position where it fits the valve port to the relative position of the valve port, and then control the first driving component 300 to drive the driving shaft 220 to drive the valve plate 210 to leave the relative position in the first direction F1, realizing the control process of the valve port from closed to open. It can drive the two driving components respectively to realize the opening and closing of the valve port, effectively reducing the friction between the valve plate 210 and the valve port, thereby reducing the particulate pollutants generated by friction and improving the environmental cleanliness of the entire valve.

[0112] Among them, the relative position is a position at a certain distance from the valve port in the second direction F2, and the closed position is the position where it fits the valve port.

[0113] Please refer to Figure 6 , Figure 6 which is a three-dimensional structural schematic diagram of a valve provided by an embodiment of the present application. Among them, the first driving component 300 drives the driving shaft 220 to drive the valve plate 210 to move in the first direction F1, and the second driving component 400 drives the driving shaft 220 to drive the valve plate 210 to move in the second direction F2, and can approach or move away from the valve port 230 in the movement process of an L-shaped action, thereby reducing the friction caused by the direct contact between the valve plate 210 and the valve port 230.

[0114] The embodiment of the present application also provides a manufacturing device, and the manufacturing device may include one or more valves described in the above embodiments.

[0115] In addition, the various parts in the embodiments of the present application may be integrated together to form an independent part, or each part may exist alone, or two or more parts may be integrated to form an independent part.

[0116] The above are only the embodiments of the present application and are not used to limit the protection scope of the present application. For those skilled in the art, the present application may have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application. It should be noted that similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0117] The above are only specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should be covered within the protection scope of the present application.

[0118] It should be noted that, in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, article or device. Without further limitation, the elements defined by the statement "comprising..." do not exclude the presence of additional identical elements in the process, article or device comprising the said elements.

Claims

1. A valve, characterized in that: The valve comprises: a housing, a valve plate, a drive shaft, a first drive assembly and a second drive assembly; The first drive assembly and the second drive assembly are disposed in the housing; The first end of the drive shaft is arranged in the housing to connect the first drive assembly and the second drive assembly, the drive shaft passes through the first drive assembly, and the first drive assembly passes through the second drive assembly; the second end of the drive shaft extends outside the housing and is connected to the valve plate; Wherein, the first driving assembly is used to provide the driving shaft with a driving force in a first direction parallel to the valve surface of the external valve port; the second driving assembly is used to provide the driving shaft with a driving force in a second direction perpendicular to the valve surface; The driving shaft is used to drive the valve plate to move based on a driving force, and the valve plate is used to control the opening or closing of the valve port.

2. The valve according to claim 1, characterized in that: in, The second driving assembly comprises: at least two second-type cylinders symmetrically distributed around the driving shaft; Wherein, the second type of cylinder comprises: a fixed part, a movable part and a first air hole structure; The fixed member includes a table structure and a fixed shaft; the first end of the fixed shaft is fixedly connected to the table structure, and the second end of the fixed shaft is fixed in the housing; the movable member is movably arranged between the fixed member and the housing, and the movable member is connected to the driving shaft; The first surface of the table structure facing away from the fixed axis and the moving element form a first cavity, the moving element and the second surface of the table structure form a second cavity, and the moving element and the fixed surface of the housing close to the fixed axis form a third cavity; The first pore structure is disposed on the moving part and is connected to the first cavity, the second cavity, and the third cavity; the first pore structure is configured to input gas into the cavity or discharge gas inside the cavity; Wherein, the moving member is configured to generate movement in the second direction based on pressure changes in a plurality of cavities, and drive the driving shaft to drive the valve plate to move in the second direction.

3. The valve according to claim 2, characterized in that: in, The first pore structure includes: first type of pores and second type of pores; The first type of pores are connected to the first cavity; The second type of pores are connected to the second cavity; When the first cavity takes in air through the first type of air holes, the moving member moves toward the valve port closing direction based on the pressure change of the first cavity, and drives the driving shaft to move toward the valve port closing direction; wherein the valve port closing direction is a direction in the second direction away from the fixed shaft and close to the valve port; When the second cavity takes in air through the second type of air holes, the movable member is configured to move in the valve opening direction based on the pressure change of the second cavity, and drive the driving shaft to move in the valve opening direction; wherein, the valve opening direction is the direction in the second direction pointing to the fixed axis and away from the valve port.

4. The valve according to claim 3, characterized in that: in, The fixing member is provided with a through hole, and the through hole communicates with the first cavity and the third cavity; In the case where the first cavity takes in air through the first type of air holes, the third cavity takes in air through the through hole; the moving member is configured to move toward the valve port closing direction based on the pressure change of the third cavity, and drive the driving shaft to move toward the valve port closing direction; The table structure is fixed on the fixed shaft through a punching connector; the first end of the through hole is arranged on the first surface of the table structure, and the second end of the through hole is arranged at the second end of the fixed shaft.

5. The valve according to claim 2, characterized in that: in, The first drive assembly comprises: one or more first-type cylinders symmetrically distributed around the drive shaft, the first-type cylinders being arranged in a central area of ​​the plurality of second-type cylinders; Wherein, the first type of cylinder comprises: a cylinder body, a piston member and a second pore structure; The piston member is arranged in the cylinder body, a fourth cavity and a fifth cavity are formed in the cylinder body based on the piston member, and the piston member is connected to the driving shaft; The second pore structure is disposed on the cylinder body and is connected to the fourth cavity and the fifth cavity; the second pore structure is configured to input gas into the cavity or discharge gas inside the cavity; Wherein, the piston member is configured to generate movement in the first direction based on the pressure change in the two chambers, and drive the driving shaft to drive the valve plate to move in the first direction.

6. The valve according to claim 5, characterized in that The valve further comprises: a gas controller; The gas controller is connected to the first type of gas cylinder and the second type of gas cylinder; The gas controller is used to control the working status of the first type of cylinders and the second type of cylinders.

7. The valve according to claim 6, characterized in that in, The gas controller includes a branch assembly, a control valve and a switch member; The control valve connects the switch element and the branch circuit assembly; The control valve is used to control the conduction and closing of the branch assembly based on the triggering status of the switch element; wherein the branch assembly includes a first gas branch and a second gas branch connected to the second pore structure of the first type of cylinder, and a third gas branch and a fourth gas branch connected to the first pore structure of the second type of cylinder.

8. The valve according to claim 7, characterized in that in, The gas transmission direction of the first gas branch is opposite to the gas transmission direction of the second gas branch; The gas transmission direction of the third gas branch is opposite to the gas transmission direction of the fourth gas branch.

9. The valve according to claim 6, characterized in that in, When the valve port is opened to closed, the gas controller is used to control the first drive assembly to drive the drive shaft to drive the valve plate to move to the relative position of the valve port, and the gas controller is also used to control the second drive assembly to drive the drive shaft to drive the valve plate from the relative position to the closed position of the valve port; When the valve port is closed to open, the gas controller is used to control the second drive component to drive the drive shaft to drive the valve plate to move from the closed position of the valve port to the relative position, and the gas controller is also used to control the first drive component to drive the drive shaft to drive the valve plate to leave the relative position.

10. A manufacturing device, characterized in that: The manufacturing equipment comprises the valve according to any one of claims 1-9.

Images