Suction recovery system

Abstract

The invention provides a suction recovery system capable of suppressing gas turbulence in a heat treatment chamber. The suction and recovery system comprises a conveying device for conveying the saggar in the conveying direction; the heat treatment chamber is provided with an input opening and an output opening, and the saggar is conveyed from the input opening to the output opening in the heat treatment chamber; the suction chamber is configured to be closer to the downstream side than the output port, and the saggar output from the output port passes through the suction chamber; a suction nozzle which is disposed in the suction chamber and sucks and recovers the object to be treated in the saggar; a first partition body that is disposed between the heat treatment chamber and the suction chamber and that switches between a communicating state in which the heat treatment chamber and the suction chamber communicate with each other and a non-communicating state in which the heat treatment chamber and the suction chamber do not communicate with each other; a replacement chamber which is disposed on the downstream side of the suction chamber and through which the saggar passing through the suction chamber passes; and a second partition body that is disposed between the suction chamber and the replacement chamber and that switches between a communicating state in which the suction chamber and the replacement chamber communicate with each other and a non-communicating state in which the suction chamber and the replacement chamber do not communicate with each other.

Description

Technical Field

[0001] The technology disclosed in this specification relates to an attracting and recovering system. Background Art

[0002] Patent Document 1 discloses an attracting and recovering system. The attracting and recovering system includes: a heat treatment chamber; an attracting and recovering chamber disposed at an outlet of the heat treatment chamber; and an attracting nozzle that attracts a workpiece in a crucible in the attracting and recovering chamber.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2011 - 236463 Summary of the Invention

[0006] In the above-described attracting and recovering system, the attracting and recovering chamber communicates with the heat treatment chamber. In this state, if the attracting nozzle attracts the workpiece in the crucible, the heat treatment chamber is decompressed. As a result, the gas in the heat treatment chamber becomes turbulent.

[0007] This specification discloses a technology capable of suppressing gas turbulence in the heat treatment chamber.

[0008] In a first aspect of the technology disclosed in this specification, the attracting and recovering system includes: a conveying device that conveys a crucible in a conveying direction; a heat treatment chamber having an input port and an output port, and the crucible is conveyed in the heat treatment chamber from the input port toward the output port; an attracting chamber disposed downstream of the output port for the crucible output from the output port to pass through; an attracting nozzle disposed in the attracting chamber for attracting and recovering the workpiece in the crucible; a first partition disposed between the heat treatment chamber and the attracting chamber and switching between a communicating state in which the heat treatment chamber and the attracting chamber communicate and a non-communicating state in which the heat treatment chamber and the attracting chamber do not communicate; a replacement chamber disposed downstream of the attracting chamber for the crucible passing through the attracting chamber to pass through; and a second partition disposed between the attracting chamber and the replacement chamber and switching between a communicating state in which the attracting chamber and the replacement chamber communicate and a non-communicating state in which the attracting chamber and the replacement chamber do not communicate.

[0009] According to the above configuration, when the first partition is switched to the non-communicating state in which the heat treatment chamber and the attracting chamber do not communicate, the communication between the heat treatment chamber and the attracting chamber is cut off. In this state, even if the attracting nozzle attracts the workpiece in the crucible in the attracting chamber, the decompression of the heat treatment chamber can be suppressed. As a result, the gas turbulence in the heat treatment chamber can be suppressed. Brief Description of the Drawings

[0010] Figure 1 This is a schematic diagram of the suction recovery system of the embodiment as viewed from the right side.

[0011] Figure 2 This is a schematic diagram of the suction recovery system of the embodiment as viewed from above.

[0012] Figure 3 This is a schematic diagram of the input port side replacement portion when the primary partition is located at the communication position in the suction recovery system of the embodiment.

[0013] Figure 4 This is a schematic diagram of the input port side replacement portion when the secondary partition is located at the communication position in the suction recovery system of the embodiment.

[0014] Figure 5 This is a schematic diagram of a stack release section in the suction recovery system of the embodiment.

[0015] Figure 6 This is a schematic diagram of the stack release portion when the lifting device main body rises in the suction recovery system of the embodiment.

[0016] Figure 7 This is a schematic diagram of the stack release portion when the lifting device body descends in a state where the upper sagger is held by the holding device body in the suction recovery system of the embodiment.

[0017] Figure 8 This is a schematic diagram of the stack release portion when the lifting device main body rises in the suction recovery system of the embodiment.

[0018] Figure 9 This is a schematic diagram of the suction recovery unit when the first partition body is located at the communication position in the suction recovery system of the embodiment.

[0019] Figure 10 This is a schematic diagram of the suction recovery device of the embodiment.

[0020] Figure 11 This is a schematic diagram of a suction recovery unit in the suction recovery system of the embodiment.

[0021] Figure 12 This is a schematic diagram of the outlet-side replacement portion when the second partition body is located at the communication position in the suction recovery system of the embodiment.

[0022] Figure 13 This is a schematic diagram of the outlet-side replacement portion when the third partition body is located at the communication position in the suction recovery system of the embodiment.

[0023] Figure 14It is a schematic diagram of the stacking release part when the lifting device main body descends in the suction recovery system of the embodiment.

[0024] Figure 15 It is a schematic diagram of the suction recovery part in the suction recovery system of the embodiment.

[0025] Figure 16 It is a schematic diagram of the suction recovery part in the suction recovery system of the embodiment.

[0026] Figure 17 It is a schematic diagram of the suction recovery part in the suction recovery system of the embodiment.

[0027] Figure 18 It is a schematic diagram of the suction recovery part in the suction recovery system of the embodiment.

[0028] Symbol Explanation

[0029] 2... Suction recovery system; 4... Saggar; 6... Object to be processed; 10... Conveyor; 12... Furnace body; 30... Heat treatment chamber; 32... Input port; 34... Output port; 40... Attitude adjustment chamber; 44... Stacking release chamber; 48... Suction chamber; 52... Output port side replacement chamber; 60... Attitude adjustment device; 62... Stopper device; 64... Stacking release device; 66... First partition device; 68... Suction recovery device; 70... Saggar moving device; 72... Lifting device; 74... Second partition device; 76... Third partition device; 90... Lifting device main body; 92... Lifting actuator; 94... Gripping device main body; 96... Gripping actuator; 108... First partition body; 110... First actuator; 112... Suction nozzle; 124... First moving device main body; 126... Second moving device main body; 128... First moving actuator; 130... Second moving actuator; 134... Lifting device main body; 136... Lifting actuator; 140... Second partition body; 142... Second actuator; 146... Third partition body; 148... Third actuator; D1... Conveyor direction. Detailed Description of the Embodiment

[0030] The main features of the following-described embodiment are listed in advance. It should be noted that the technical elements described below are independent technical elements and exhibit technical usefulness individually or in various combinations, and are not limited to the combinations described in the claims at the time of application.

[0031] Based on the first solution of the technology disclosed in this specification, the second solution of the technology has an attracting and recovering system including: an attitude adjustment chamber disposed between the heat treatment chamber and the attracting chamber for the cassettes output from the output port to pass through; and an attitude adjustment device for adjusting the attitude of the cassettes in the attitude adjustment chamber. The first partition is disposed between the attitude adjustment chamber and the attracting chamber. According to the above configuration, the suction nozzle sucks the object to be processed in the cassette in a state where the attitude of the cassette has been adjusted. Thus, the object to be processed can be sucked efficiently. In addition, even in the configuration where the attitude adjustment chamber is disposed between the heat treatment chamber and the attracting chamber, by switching to the non-connected state where the heat treatment chamber and the attracting chamber are not connected through the first partition, the gas disorder in the heat treatment chamber can be suppressed.

[0032] Based on the second solution of the technology disclosed in this specification, the third solution of the technology has the conveying device conveying the plurality of cassettes in a stacked state along the conveying direction. The attracting and recovering system includes: a stacking release chamber disposed between the attitude adjustment chamber and the attracting chamber for the plurality of cassettes output from the attitude adjustment chamber to pass through; and a stacking release device for releasing the stacked plurality of cassettes into a state where the plurality of cassettes are not stacked in the stacking release chamber. According to the above configuration, even in the configuration where the plurality of cassettes are conveyed in a stacked state, the gas disorder in the heat treatment chamber can be suppressed.

[0033] Based on the third solution of the technology disclosed in this specification, the fourth solution of the technology has the stacking release device including: a holding device main body for holding the cassette; and a holding actuator for actuating the holding device main body. The holding actuator is disposed outside the stacking release chamber. According to the above configuration, when the holding actuator actuates the holding device main body, wear powder may be generated from the holding actuator. Since the holding actuator is disposed outside the stacking release chamber, the mixing of the wear powder into the object to be processed in the cassette can be suppressed.

[0034] In a fifth aspect of the technology disclosed in this specification, based on the above-described third or fourth aspect, the stacking and releasing device includes: a lifting device main body that lifts the stacked plurality of crucibles; a lifting actuator that operates the lifting device main body; and a gripping device main body that grips one of the stacked plurality of crucibles. The lifting actuator is disposed outside the stacking and releasing chamber. According to the above configuration, when the lifting actuator operates the lifting device main body, wear powder may be generated from the lifting actuator. Since the lifting actuator is disposed outside the stacking and releasing chamber, it is possible to suppress the wear powder from mixing into the object to be processed in the crucible.

[0035] In a sixth aspect of the technology disclosed in this specification, based on any one of the above-described third or fifth aspects, the first partition is disposed between the stacking and releasing chamber and the suction chamber. When the suction chamber and the heat treatment chamber are communicated through the attitude adjustment chamber and the stacking and releasing chamber, if the suction nozzle sucks the object to be processed in the crucible in the suction chamber, the heat treatment chamber is decompressed. According to the above configuration, even if the suction nozzle sucks the object to be processed in the crucible in the suction chamber, it is possible to suppress the heat treatment chamber from being decompressed. Thereby, it is possible to suppress the gas disturbance in the heat treatment chamber.

[0036] In a seventh aspect of the technology disclosed in this specification, based on any one of the above-described first to sixth aspects, the suction nozzle does not move in the left-right direction orthogonal to the conveying direction. The suction and recovery system further includes a crucible moving device that moves the crucible in the left-right direction relative to the suction nozzle when the suction nozzle recovers the object to be processed in the crucible. According to the above configuration, compared with the configuration in which the suction nozzle moves in the left-right direction relative to the crucible, it is easy to ensure the sealing property in the suction chamber, and it is possible to suppress the configuration of the suction and recovery system from becoming complicated.

[0037] In an eighth aspect of the technology disclosed in this specification, based on the above-described seventh aspect, the suction and recovery system further includes a lifting device that lifts the crucible in the suction chamber. The crucible moving device moves the crucible in the left-right direction relative to the suction nozzle with the crucible being lifted by the lifting device. According to the above configuration, when the object to be processed in the crucible is recovered, it is possible to suppress the crucible from moving in the conveying direction.

[0038] Based on any one of the first to eighth aspects of the technology disclosed in this specification, in a ninth aspect, the suction recovery system further includes a first actuator disposed outside the suction chamber to actuate the first partition. According to the above configuration, when the first actuator actuates the first partition, wear powder may be generated from the first actuator. Since the first actuator is disposed outside the suction chamber, it is possible to suppress the wear powder from mixing into the object to be processed in the crucible.

[0039] Based on any one of the first to ninth aspects of the technology disclosed in this specification, in a tenth aspect, the suction recovery system further includes a second actuator disposed outside the replacement chamber to actuate the second partition. According to the above configuration, when the second actuator actuates the second partition, wear powder may be generated from the second actuator. Since the second actuator is disposed outside the suction chamber, it is possible to suppress the wear powder from mixing into the object to be processed in the crucible.

[0040] (Example)

[0041] As Figure 1 and Figure 2 shown, the suction recovery system 2 includes a conveying device 10 and a furnace body 12.

[0042] The conveying device 10 is disposed both inside and outside the furnace body 12. The conveying device 10 includes a plurality of rollers 14 supported at both ends so as to be rotatable. By rotating the plurality of rollers 14, the crucible 4 on the rollers 14 is conveyed in the furnace body 12 in the conveying direction D1. Hereinafter, the conveying direction D1 is referred to as the forward direction, the direction opposite to the forward direction is referred to as the backward direction, the direction orthogonal to the forward direction in the horizontal plane is referred to as the left-right direction, and the direction orthogonal to the forward direction and the left-right direction is referred to as the upward direction. In this embodiment, two crucibles 4 are placed on the plurality of rollers 14 in a stacked state in the vertical direction and are input into the furnace body 12 (refer to Figure 1 ). In addition, two crucibles 4 stacked in the vertical direction are placed on the plurality of rollers 14 in a side-by-side state in the left-right direction (refer to Figure 2 ). On the other hand, as Figure 1 shown, after two crucibles 4 stacked in the vertical direction become a non-stacked state in the vertical direction, they are output to the outside of the furnace body 12.

[0043] The furnace body 12 includes: an input port side replacement portion 16, a heat treatment portion 18, an attitude adjustment portion 20, a stacking release portion 22, a suction recovery portion 24, and an output port side replacement portion 26. The input port side replacement portion 16, the heat treatment portion 18, the attitude adjustment portion 20, the stacking release portion 22, the suction recovery portion 24, and the output port side replacement portion 26 are arranged in sequence in the conveying direction D1.

[0044] The input port side replacement unit 16 has an input port side replacement chamber 36 inside. The input port side replacement unit 16 replaces the gas in the input port side replacement chamber 36 from air with an atmosphere gas, or replaces the gas in the input port side replacement chamber 36 from the atmosphere gas with air. The input port side replacement chamber 36 communicates with the outside of the furnace body 12. The sagger 4 is input from the outside of the furnace body 12 into the input port side replacement chamber 36 and passes through the input port side replacement chamber 36.

[0045] The heat treatment unit 18 has a heat treatment chamber 30 inside. The heat treatment chamber 30 is filled with an atmosphere gas. The atmosphere gas is, for example, nitrogen. The heat treatment chamber 30 is arranged on the downstream side in the conveying direction D1 with respect to the input port side replacement chamber 36. In the heat treatment chamber 30, the object to be processed 6 filled in the sagger 4 is fired, that is, heat-treated, by a heater (not shown). The object to be processed 6 is, for example, a raw material for a ceramic capacitor, or a positive electrode material and a negative electrode material for a lithium ion battery. The heat treatment chamber 30 has an input port 32 arranged at one end in the front-rear direction and an output port 34 arranged at the other end in the front-rear direction. The heat treatment chamber 30 communicates with the input port side replacement chamber 36 through the input port 32. The sagger 4 output from the input port side replacement chamber 36 passes through the heat treatment chamber 30. A plurality of saggers 4 move in the heat treatment chamber 30 from the input port 32 toward the output port 34 in a stacked state and side by side in the left-right direction along the conveying direction D1. A gas supply pipe (not shown) for supplying the atmosphere gas into the heat treatment chamber 30 is provided in the heat treatment chamber 30. By supplying the atmosphere gas into the heat treatment chamber 30 from the gas supply pipe, the gas generated when heat-treating the object to be processed 6 is replaced from around the object to be processed 6. By replacing the gas generated by the object to be processed 6, the firing of the object to be processed 6 is promoted. It should be noted that an exhaust port for discharging the gas in the heat treatment chamber 30 is provided in the heat treatment chamber 30. Therefore, the atmosphere gas supplied into the heat treatment chamber 30 from the gas supply pipe flows in the heat treatment chamber 30 and is discharged to the outside of the heat treatment chamber 30 from the exhaust port. By the gas flowing smoothly in the heat treatment chamber 30, the firing of the object to be processed 6 can be efficiently performed.

[0046] The attitude adjustment unit 20 has an attitude adjustment chamber 40 inside. The attitude adjustment chamber 40 is filled with an atmosphere gas. The attitude adjustment chamber 40 is arranged on the downstream side in the conveying direction D1 with respect to the heat treatment chamber 30. The attitude adjustment chamber 40 communicates with the heat treatment chamber 30 through the output port 34. The sagger 4 output from the output port 34 passes through the attitude adjustment chamber 40.

[0047] The stack release unit 22 has a stack release chamber 44 inside. The stack release chamber 44 is filled with an atmosphere gas. The stack release chamber 44 is configured to be on the downstream side in the transport direction D1 with respect to the attitude adjustment chamber 40. Therefore, the attitude adjustment chamber 40 is disposed between the heat treatment chamber 30 and the stack release chamber 44. The stack release chamber 44 communicates with the heat treatment chamber 30 through the attitude adjustment chamber 40. The stack release chamber 44 allows the cassette 4 output from the attitude adjustment chamber 40 to pass through.

[0048] The suction recovery unit 24 has a suction chamber 48 inside. The suction chamber 48 is filled with an atmosphere gas. The suction chamber 48 is configured to be on the downstream side in the transport direction D1 with respect to the stack release chamber 44. Therefore, the stack release chamber 44 is disposed between the attitude adjustment chamber 40 and the suction chamber 48. The suction chamber 48 communicates with the heat treatment chamber 30 through the stack release chamber 44 and the attitude adjustment chamber 40. The suction chamber 48 allows the cassette 4 output from the stack release chamber 44 to pass through.

[0049] The outlet side replacement unit 26 has an outlet side replacement chamber 52 inside. The outlet side replacement unit 26 replaces the gas in the outlet side replacement chamber 52 from the atmosphere gas with air, or replaces the gas in the outlet side replacement chamber 52 from air with the atmosphere gas. The outlet side replacement chamber 52 is configured to be on the downstream side in the transport direction D1 with respect to the suction chamber 48. Therefore, the suction chamber 48 is disposed between the stack release chamber 44 and the outlet side replacement chamber 52. The outlet side replacement chamber 52 communicates with the heat treatment chamber 30 through the suction chamber 48, the stack release chamber 44, and the attitude adjustment chamber 40. The outlet side replacement chamber 52 allows the cassette 4 output from the suction chamber 48 to pass through. In addition, the end portion on the downstream side in the transport direction D1 of the outlet side replacement chamber 52 communicates with the outside of the furnace body 12. The cassette 4 is output to the outside of the furnace body 12 from the end portion on the downstream side in the transport direction D1 of the outlet side replacement chamber 52.

[0050] The suction recovery system 2 includes: a primary partition device 56, a secondary partition device 58, an attitude adjustment device 60, a stopper device 62, a stack release device 64, a first partition device 66, a suction recovery device 68, a cassette moving device 70 (refer to Figure 2 ), a lifting device 72, a second partition device 74, and a third partition device 76.

[0051] As Figure 1 shown, the primary partition device 56 includes a primary partition body 56a and a primary actuator 56b.

[0052] The primary partition body 56a is disposed at the boundary between the external space of the furnace body 12 and the input port side replacement chamber 36. The primary actuator 56b is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the primary actuator 56b due to the operation of the primary actuator 56b, it is possible to prevent the wear powder from entering the input port side replacement chamber 36. The primary actuator 56b operates the primary partition body 56a. The primary partition body 56a switches between a non-connected position and a connected position by the operation of the primary actuator 56b. When the primary partition body 56a is in the non-connected position, the communication between the input port side replacement chamber 36 and the external space of the furnace body 12 is cut off. In this state, the input port side replacement chamber 36 is not in communication with the external space of the furnace body 12. As Figure 3 shown, when the primary partition body 56a is in the connected position, the lower end of the primary partition body 56a is disposed above the upper end of the crucible 4 located on the upper layer of the roller 14. In this state, the input port side replacement chamber 36 and the external space of the furnace body 12 are in communication. Thus, with respect to the primary partition body 56a, by switching between the non-connected position and the connected position, a non-connected state in which the input port side replacement chamber 36 and the external space of the furnace body 12 are not in communication and a connected state in which the input port side replacement chamber 36 and the external space of the furnace body 12 are in communication are switched between.

[0053] As Figure 1 shown, the secondary partitioning device 58 includes a secondary partition body 58a and a secondary actuator 58b.

[0054] The secondary partition body 58a is disposed inside the furnace body 12. The secondary partition body 58a is disposed at the boundary between the input port side replacement chamber 36 and the heat treatment chamber 30. The secondary actuator 58b is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the secondary actuator 58b due to the operation of the secondary actuator 58b, it is possible to prevent the wear powder from entering the input port side replacement chamber 36 and the heat treatment chamber 30. The secondary actuator 58b operates the secondary partition body 58a. The secondary partition body 58a switches between a non-connected position and a connected position by the operation of the secondary actuator 58b. When the secondary partition body 58a is in the non-connected position, the communication between the input port side replacement chamber 36 and the heat treatment chamber 30 is cut off. In this state, the input port side replacement chamber 36 is not in communication with the heat treatment chamber 30. As Figure 4 shown, when the secondary partition body 58a is in the connected position, the lower end of the secondary partition body 58a is disposed above the upper end of the crucible 4 located on the upper layer of the roller 14. In this state, the input port side replacement chamber 36 and the heat treatment chamber 30 are in communication. Thus, with respect to the secondary partition body 58a, by switching between the non-connected position and the connected position, a non-connected state in which the input port side replacement chamber 36 and the heat treatment chamber 30 are not in communication and a connected state in which the input port side replacement chamber 36 and the heat treatment chamber 30 are in communication are switched between.

[0055] As Figure 1 shown, the attitude adjustment device 60 is arranged in the attitude adjustment unit 20. The attitude adjustment device 60 includes a plurality of (two in this embodiment) attitude adjustment bodies 80 and an actuator 82.

[0056] The attitude adjustment bodies 80 are arranged in the attitude adjustment chamber 40. The two attitude adjustment bodies 80 are arranged side by side in the left - right direction. The actuator 82 is arranged outside the attitude adjustment chamber 40 (the furnace body 12). Therefore, even when wear powder is generated from the driving part or the sliding part of the actuator 82 due to the operation of the actuator 82, it is possible to prevent the wear powder from entering the attitude adjustment chamber 40. For example, when a hydraulic cylinder is used as the actuator 82, the hydraulic cylinder is arranged outside the furnace body 12, and the end of the piston rod to be driven is connected to the attitude adjustment body 80 inside the furnace body 12. By arranging like this, the sliding part of the hydraulic cylinder and the piston rod is arranged outside the furnace body 12, and it is possible to prevent the wear powder generated from the sliding part from entering the attitude adjustment chamber 40. The actuator 82 moves the attitude adjustment body 80 in the up - down direction. The attitude adjustment body 80 switches between the adjustment position and the non - adjustment position through the operation of the actuator 82. When the attitude adjustment body 80 is in the adjustment position, the upper end of the attitude adjustment body 80 is arranged above the roller 14. In this state, the attitude adjustment body 80 abuts against the sagger 4 moving in the conveying direction D1. By the sagger 4 abutting against the attitude adjustment body 80, the attitude of the sagger 4 is adjusted to a specified attitude. In addition, when the attitude adjustment body 80 is in the non - adjustment position, the upper end of the attitude adjustment body 80 is arranged below the roller 14. In this state, the sagger 4 does not abut against the attitude adjustment body 80.

[0057] The stopper device 62 is arranged in the stacking release part 22. The stopper device 62 includes a plurality of (two in this embodiment) stoppers 84 and an actuator 86.

[0058] The stoppers 84 are arranged in the stacking release chamber 44. The two stoppers 84 are arranged side by side in the left - right direction. The actuator 86 is arranged outside the stacking release chamber 44 (the furnace body 12). Therefore, even when wear powder is generated from the actuator 86 due to the operation of the actuator 86, it is possible to prevent the wear powder from entering the stacking release chamber 44. The actuator 86 moves the stopper 84 in the up - down direction. The stopper 84 switches between the stop position and the non - stop position through the operation of the actuator 86. When the stopper 84 is in the stop position, the upper end of the stopper 84 is arranged above the roller 14. In this state, the stopper 84 abuts against the sagger 4 moving in the conveying direction D1. Thereby, the sagger 4 stops. In addition, as Figure 5 shown, when the stopper 84 is in the non - stop position, the upper end of the stopper 84 is arranged below the roller 14.

[0059] The stack releasing device 64 is arranged in the stack releasing part 22. The stack releasing device 64 includes: a lifting device main body 90, a lifting actuator 92, a gripping device main body 94, and a gripping actuator 96.

[0060] The lifting device main body 90 is arranged in the stack releasing chamber 44. The lifting device main body 90 is arranged to be on the upstream side in the conveying direction D1 with respect to the stopper 84. The lifting actuator 92 is arranged outside the stack releasing chamber 44 (the furnace body 12). Therefore, even when wear powder is generated from the lifting actuator 92 due to the operation of the lifting actuator 92, it is possible to suppress the wear powder from entering the stack releasing chamber 44. The lifting actuator 92 moves the lifting device main body 90 in the vertical direction. As Figure 6 shown, when the lifting device main body 90 moves to a position above the roller 14, the plurality of crucibles 4 abutting against the stopper 84 are placed on the lifting device main body 90 while maintaining the stacked state and rise. In addition, as Figure 7 shown, when the lifting device main body 90 moves to a position below the roller 14, the crucible 4 arranged on the lifting device main body 90 descends and is placed on the roller 14.

[0061] The gripping device main body 94 is arranged in the stack releasing chamber 44. The gripping device main body 94 includes a first clamp 100 and a second clamp 102. The first clamp 100 and the second clamp 102 are arranged at the upper part of the stack releasing part 22. The first clamp 100 and the second clamp 102 face each other in the front-rear direction.

[0062] The gripping actuator 96 is arranged outside the stack releasing chamber 44 (the furnace body 12). Therefore, even when wear powder is generated from the gripping actuator 96 due to the operation of the gripping actuator 96, it is possible to suppress the wear powder from entering the stack releasing chamber 44. The gripping actuator 96 includes a first gripping actuator 104 and a second gripping actuator 106. The first gripping actuator 104 operates the first clamp 100, and the second gripping actuator 106 operates the second clamp 102. Thus, the first clamp 100 and the second clamp 102 move in the front-rear direction in a manner of approaching each other, and also move in the front-rear direction in a manner of separating from each other. In a state where the plurality of stacked crucibles 4 are lifted by the lifting device main body 90, when the first clamp 100 and the second clamp 102 move in a manner of approaching each other, the upper crucible 4 is gripped by the first clamp 100 and the second clamp 102. In addition, as Figure 8 shown, when the first clamp 100 and the second clamp 102 move in a manner of separating from each other, the upper crucible 4 is released from the first clamp 100 and the second clamp 102.

[0063] As Figure 1As shown, the first separating device 66 includes a first separator 108 and a first actuator 110.

[0064] The first separator 108 is disposed inside the furnace body 12. The first separator 108 is disposed between the stack release chamber 44 and the suction chamber 48 (boundary). The first actuator 110 is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the first actuator 110 due to the operation of the first actuator 110, it is possible to prevent the wear powder from entering the stack release chamber 44 and the suction chamber 48. The first actuator 110 operates the first separator 108. The first separator 108 is switched between a non-communication position and a communication position by the operation of the first actuator 110. When the first separator 108 is in the non-communication position, the communication between the stack release chamber 44 and the suction chamber 48 is cut off. In this state, the suction chamber 48 is not communicated with the heat treatment chamber 30 through the stack release chamber 44 and the attitude adjustment chamber 40. As Figure 9 shown, when the first separator 108 is in the communication position, the lower end of the first separator 108 is disposed above the upper end of the cassette 4 located on the upper layer of the roller 14. In this state, the stack release chamber 44 and the suction chamber 48 are communicated. Therefore, the suction chamber 48 is communicated with the heat treatment chamber 30 through the stack release chamber 44 and the attitude adjustment chamber 40. Thus, with respect to the first separator 108, by switching between the non-communication position and the communication position, a non-communication state in which the heat treatment chamber 30 and the suction chamber 48 are not communicated and a communication state in which the heat treatment chamber 30 and the suction chamber 48 are communicated are switched.

[0065] As Figure 10 shown, the suction recovery device 68 includes: a plurality (two in this embodiment) of suction nozzles 112, a bag filter 114, a heat exchanger 116, a fan 118, and a filter 120.

[0066] As Figure 1 shown, the suction nozzles 112 are disposed in the suction chamber 48. The suction nozzles 112 are fixed to the suction recovery unit 24. The suction nozzles 112 cannot move in the front-rear direction, up-down direction, and left-right direction. The suction nozzles 112 are disposed above the roller 14. The suction nozzles 112 suck the gas in the suction chamber 48 by the operation of the fan 118 (see Figure 10 ). Thus, when the suction nozzles 112 are disposed directly above the cassette 4, the object to be processed 6 in the cassette 4 and the gas are sucked by the suction nozzles 112.

[0067] As Figure 10 shown, the bag filter 114, the heat exchanger 116, the fan 118, and the filter 120 are disposed outside the furnace body 12. The bag filter 114 is connected to the suction nozzles 112. The bag filter 114 filters the object to be processed 6 sucked by the suction nozzles 112 (see Figure 1)Capture is performed. Thus, the object 6 to be processed is recovered.

[0068] The heat exchanger 116 is connected to the bag filter 114. Regarding the heat exchanger 116, the refrigerant flows through its interior, thereby cooling the gas that has passed through the bag filter 114.

[0069] The fan 118 is connected to the heat exchanger 116. The fan 118 generates an air flow in the suction recovery device 68. The fan 118 sucks the gas to the filter 120.

[0070] The filter 120 is disposed between the fan 118 and the suction chamber 48. The filter 120 removes foreign matters from the gas ejected from the fan 118. Thus, the gas free of foreign matters is sent to the suction chamber 48.

[0071] As Figure 11 shown, the sagger moving device 70 includes: a first moving device main body 124, a second moving device main body 126, a first moving actuator 128, and a second moving actuator 130.

[0072] The first moving device main body 124 and the second moving device main body 126 are disposed in the suction chamber 48. The first moving device main body 124 and the second moving device main body 126 face each other in the left - right direction. The first moving device main body 124 is disposed to be on the left side of the sagger 4. The second moving device main body 126 is disposed to be on the right side of the sagger 4.

[0073] The first moving actuator 128 and the second moving actuator 130 are disposed outside the suction chamber 48 (furnace body 12). Therefore, even when wear powder is generated from the first moving actuator 128 and the second moving actuator 130 due to their actions, it is possible to suppress the wear powder from entering the suction chamber 48. The first moving actuator 128 moves the first moving device main body 124 in the left - right direction. The second moving actuator 130 moves the second moving device main body 126 in the left - right direction. By moving the first moving device main body 124 and the second moving device main body 126 in the left - right direction, the sagger 4 moves in the left - right direction relative to the suction nozzle 112.

[0074] As Figure 9 shown, the lifting device 72 is disposed in the suction recovery unit 24. The lifting device 72 includes a lifting device main body 134 and a lifting actuator 136.

[0075] The lifting device main body 134 is disposed within the suction chamber 48. The lifting device main body 134 is disposed directly below the suction nozzle 112. The lifting actuator 136 is disposed outside the suction chamber 48 (furnace body 12). Therefore, even when wear powder is generated from the lifting actuator 136 due to the operation of the lifting actuator 136, it is possible to suppress the wear powder from entering the suction chamber 48. The lifting actuator 136 moves the lifting device main body 134 in the vertical direction. As Figure 1 shown, when the lifting device main body 134 moves to a position above the roller 14, the sagger 4 is placed on the lifting device main body 134 and rises. Further, as Figure 9 shown, when the lifting device main body 134 moves to a position below the roller 14, the sagger 4 descends and is placed on the roller 14.

[0076] The second partitioning device 74 includes a second partition body 140 and a second actuator 142.

[0077] The second partition body 140 is disposed inside the furnace body 12. The second partition body 140 is disposed between the suction chamber 48 and the outlet side replacement chamber 52 (boundary). The second actuator 142 is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the second actuator 142 due to the operation of the second actuator 142, it is possible to suppress the wear powder from entering the suction chamber 48 and the outlet side replacement chamber 52. The second actuator 142 moves the second partition body 140. The second partition body 140 is switched between a non-communication position and a communication position by the operation of the second actuator 142. When the second partition body 140 is in the non-communication position, the communication between the suction chamber 48 and the outlet side replacement chamber 52 is cut off. In this state, the outlet side replacement chamber 52 is not in communication with the suction chamber 48. As Figure 12 shown, when the second partition body 140 is in the communication position, the lower end of the second partition body 140 is disposed: above the upper end of the sagger 4 on the roller 14. In this state, the suction chamber 48 and the outlet side replacement chamber 52 are in communication. Thus, with respect to the second partition body 140, by switching between the non-communication position and the communication position, the non-communication state in which the suction chamber 48 and the outlet side replacement chamber 52 are not in communication and the communication state in which the suction chamber 48 and the outlet side replacement chamber 52 are in communication are switched. The sealing property between the suction chamber 48 and the outlet side replacement chamber 52 achieved by the second partition body 140 is higher than the sealing property between the stack release chamber 44 and the suction chamber 48 achieved by the first partition body 108 (refer to Figure 9 ).

[0078] The third partitioning device 76 includes a third partition body 146 and a third actuator 148.

[0079] The third partition 146 is disposed between the output port side replacement chamber 52 and the external space of the furnace body 12 (boundary). The third actuator 148 is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the third actuator 148 due to the operation of the third actuator 148, it is possible to prevent the wear powder from entering the output port side replacement chamber 52. The third actuator 148 operates the third partition 146. The third partition 146 switches between a non-connected position and a connected position by the operation of the third actuator 148. When the third partition 146 is in the non-connected position, the communication between the output port side replacement chamber 52 and the external space of the furnace body 12 is cut off. In this state, the output port side replacement chamber 52 is not in communication with the external space of the furnace body 12. As Figure 13 shown, when the third partition 146 is in the connected position, the lower end of the third partition 146 is disposed above the upper end of the sagger 4 on the roller 14. In this state, the output port side replacement chamber 52 and the external space of the furnace body 12 are in communication. Thus, with respect to the third partition 146, by switching between the non-connected position and the connected position, a non-connected state in which the output port side replacement chamber 52 and the external space of the furnace body 12 are not in communication and a connected state in which the output port side replacement chamber 52 and the external space of the furnace body 12 are in communication are switched. The third partition 146 switches from the non-connected position to the connected position when the second partition 140 is in the non-connected position. The airtightness between the output port side replacement chamber 52 and the external space of the furnace body 12 achieved by the third partition 146 is substantially the same as the airtightness between the suction chamber 48 and the output port side replacement chamber 52 achieved by the second partition 140.

[0080] The process of conveying the sagger 4 will be described. First, as Figure 3 shown, when the secondary partition 58a is in the non-connected position, the primary partition 56a moves from the non-connected position to the connected position. Next, a plurality of saggers 4 are input from the outside of the furnace body 12 to the input port side replacement chamber 36 in a stacked state and side by side in the left-right direction by the rotation of the roller 14. Next, the primary partition 56a moves from the connected position to the non-connected position. Next, the gas in the input port side replacement chamber 36 is converted from air to an atmosphere gas.

[0081] Next, as Figure 4 shown, the secondary partition 58a moves from the non-connected position to the connected position. Next, a plurality of saggers 4 are output from the input port 32 to the heat treatment chamber 30 in a stacked state and side by side in the left-right direction by the rotation of the roller 14. Next, the secondary partition 58a moves from the connected position to the non-connected position.

[0082] Next, as Figure 1As shown, a plurality of saggers 4 move from the input port 32 toward the output port 34 in the heat treatment chamber 30 in a stacked state and side by side in the left - right direction by the rotation of the rollers 14. Thereby, the object to be processed 6 filled in the sagger 4 is fired, that is, heat - treated. Next, the plurality of saggers 4 are output from the output port 34 to the attitude adjustment chamber 40.

[0083] Next, the plurality of saggers 4 move in the conveying direction D1 in the attitude adjustment chamber 40 in a stacked state and side by side in the left - right direction by the rotation of the rollers 14. Next, the plurality of saggers 4 abut against the attitude adjustment body 80 located at the adjustment position. Thereby, the attitudes of the plurality of saggers 4 are adjusted to a prescribed attitude. Next, the attitude adjustment body 80 moves from the adjustment position to the non - adjustment position. Thereby, the plurality of saggers 4 are output from the attitude adjustment chamber 40 to the stacking release chamber 44. By controlling the timing of switching the position of the attitude adjustment body 80, the plurality of saggers 4 are output from the attitude adjustment chamber 40 to the stacking release chamber 44 at a prescribed time interval.

[0084] Next, the plurality of saggers 4 move in the conveying direction D1 in the stacking release chamber 44 in a stacked state and side by side in the left - right direction by the rotation of the rollers 14. Next, the plurality of saggers 4 abut against the stopper 84 located at the stop position. Thereby, the plurality of saggers 4 stop. Next, as Figure 5 shown, the stopper 84 moves from the stop position to the non - stop position.

[0085] Next, as Figure 6 shown, the lifting device main body 90 rises to a position above the roller 14. Thereby, the plurality of saggers 4 are placed on the lifting device main body 90 in a stacked state and side by side in the left - right direction and rise. Next, as Figure 7 shown, the first clamp 100 and the second clamp 102 move closer to each other. Thereby, the plurality of saggers 4 located in the upper layer are held by the first clamp 100 and the second clamp 102. On the other hand, the plurality of saggers 4 located in the lower layer are not held by the first clamp 100 and the second clamp 102. Next, the lifting device main body 90 descends to a position below the roller 14. Thereby, the plurality of saggers 4 located in the lower layer are placed on the roller 14 in a side - by - side state in the left - right direction. Next, the first partition 108 moves from the non - communicating position to the communicating position. Next, the plurality of saggers 4 whose stacking is released are output from the stacking release chamber 44 to the suction chamber 48 by the rotation of the roller 14. As described above, the plurality of saggers 4 are released from the stacked state to the unstacked state. First, the lower - layer saggers 4 are output to the suction chamber 48. Next, the first partition 108 moves from the communicating position to the non - communicating position.

[0086] Next, as Figure 8As shown, the lifting device main body 90 rises to the plurality of saggers 4 held by the first clamp 100 and the second clamp 102. Next, the first clamp 100 and the second clamp 102 move in a separated manner from each other. Thereby, the plurality of saggers 4 are placed on the lifting device main body 90. Next, as Figure 14 shown, the lifting device main body 90 descends to a position lower than the roller 14. Thereby, the plurality of released upper saggers 4 are placed on the roller 14 in a state of being arranged side by side in the left - right direction. Next, the first partition 108 moves from the non - connected position to the connected position in a state where the second partition 140 (refer to Figure 1 ) is in the non - connected position. Next, the plurality of saggers 4 are output from the stacking release chamber 44 to the suction chamber 48 by the rotation of the roller 14. Next, the first partition 108 moves from the connected position to the non - connected position.

[0087] Next, as Figure 1 shown, the plurality of saggers 4 move in the conveying direction D1 in the suction chamber 48 in a state of being arranged side by side in the left - right direction by the rotation of the roller 14. Next, the plurality of saggers 4 stop directly below the suction nozzle 112 due to the stop of the roller 14. Next, the lifting device main body 134 rises to a position higher than the roller 14. Thereby, the plurality of saggers 4 are placed on the lifting device main body 134 and rise, and the surface of the object to be processed 6 in the sagger 4 approaches the suction nozzle 112.

[0088] Next, as Figure 11 shown, the fan 118 (refer to Figure 10 ) operates. Thereby, the suction nozzle 112 sucks and recovers the gas in the suction chamber 48 and the object to be processed 6 in the sagger 4. During the period when the suction nozzle 112 sucks the object to be processed 6, the first partition 108 is arranged at the non - connected position. Therefore, the suction chamber 48 is not connected to the heat treatment chamber 30 (refer to Figure 1 ). The heat treatment chamber 30 is depressurized, and thus the gas (airflow) disorder in the heat treatment chamber 30 is suppressed.

[0089] During the period when the suction nozzle 112 sucks the object to be processed 6, the sagger moving device 70 and the lifting device 72 operate. Specifically, as Figure 15 shown, the first moving device main body 124 moves to the right until it abuts against the sagger 4, and the second moving device main body 126 moves to the right. Next, as Figure 16 shown, the first moving device main body 124 moves to the right. Thereby, the sagger 4 moves to the right and abuts against the second moving device main body 126. As a result, the suction nozzle 112 moves to the left relative to the sagger 4. As a result, the surface layer of the object to be processed 6 in the sagger 4 is sucked by the suction nozzle 112. Next, the lifting device main body 134 rises slightly. Thereby, the surface of the object to be processed 6 in the sagger 4 approaches the suction nozzle 112.

[0090] Next, as shown in Figure 17 , the first moving device body 124 moves leftward. Next, as shown in Figure 18 , the second moving device body 126 moves leftward. Thus, the sagger 4 moves leftward and abuts against the first moving device body 124. Therefore, the suction nozzle 112 moves rightward relative to the sagger 4. As a result, the surface layer of the object to be processed 6 in the sagger 4 is attracted by the suction nozzle 112. Next, the lifting device body 134 rises slightly. Thus, the surface of the object to be processed 6 in the sagger 4 approaches the suction nozzle 112. By repeating the operations of the sagger moving device 70 and the lifting device 72 described above, all of the objects to be processed 6 in the sagger 4 are attracted by the suction nozzle 112.

[0091] Next, the lifting device body 134 (refer to Figure 9 ) moves to a position lower than the roller 14. Thus, a plurality of saggers 4 are placed on the roller 14. Next, as shown in Figure 12 , the second partition 140 moves from the non-communication position to the communication position while the third partition 146 is in the non-communication position. Next, a plurality of saggers 4 are output from the suction chamber 48 to the outlet side replacement chamber 52 in a side-by-side state in the left-right direction by the rotation of the roller 14. Next, the second partition 140 moves from the communication position to the non-communication position. Next, the gas in the outlet side replacement chamber 52 is replaced from the atmosphere gas to air.

[0092] Next, as shown in Figure 13 , the third partition 146 moves from the communication position to the non-communication position. Next, a plurality of saggers 4 are output from the outlet side replacement chamber 52 to the outside of the furnace body 12 in a side-by-side state in the left-right direction by the rotation of the roller 14. Next, the third partition 146 moves from the communication position to the non-communication position. Next, the gas in the outlet side replacement chamber 52 is replaced from air to atmosphere gas.

[0093] (Effect)

[0094] In the above embodiment, during the suction of the object to be processed 6 by the suction nozzle 112, the first partition 108 is disposed at the non-communication position. Therefore, the suction chamber 48 is not communicated with the heat treatment chamber 30 (refer to Figure 1 ). Thus, it is possible to suppress the decompression of the heat treatment chamber 30. As a result, it is possible to suppress the gas disturbance in the heat treatment chamber 30.

[0095] (Correspondence)

[0096] The outlet side replacement chamber 52 is an example of the "replacement chamber".

[0097] (Modification)

[0098] The furnace body 12 of one embodiment may not have at least one of the attitude adjustment unit 20 and the stacking release unit 22.

[0099] The suction nozzle 112 of one embodiment may be movable in the left - right direction. In this configuration, the suction nozzle 112 attracts and recovers the object to be processed 6 in the sagger 4 by moving in the left - right direction. Additionally, the suction recovery system 2 may not have the sagger moving device 70.

[0100] In the suction recovery system 2 of one embodiment, a plurality of saggers 4 may be input into the heat treatment chamber 30 from the input port 32 in a state where they are not stacked in the up - down direction (i.e., in a single layer).

[0101] In the suction recovery system 2 of one embodiment, a plurality of saggers 4 may be input into the heat treatment chamber 30 from the input port 32 in a state where they are not arranged side by side in the left - right direction (i.e., in a single row).

[0102] As described above, specific examples of the technology disclosed in this specification have been described in detail. However, these specific examples are merely examples and do not limit the claims. The technology described in the claims includes solutions obtained by various deformations and changes to the above - illustrated specific examples. In addition, the technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations recited in the claims at the time of application. In addition, the technology illustrated in this specification or the drawings achieves multiple purposes simultaneously, and the technology for achieving one of the purposes itself has technical usefulness.

Claims

1. A suction recovery system, wherein: have: A conveying device, which conveys the sagger along a conveying direction; a heat treatment chamber having an input port and an output port, wherein the sagger is transported from the input port toward the output port in the heat treatment chamber; a suction chamber, the suction chamber being arranged downstream of the output port and allowing the sagger output from the output port to pass through; A suction nozzle, which is arranged in the suction chamber and sucks and recovers the processed objects in the sagger; a first separator, which is disposed between the heat treatment chamber and the suction chamber and switches between a connected state in which the heat treatment chamber and the suction chamber are connected and a non-connected state in which the heat treatment chamber and the suction chamber are not connected; a replacement chamber, the replacement chamber being arranged on a downstream side of the suction chamber and allowing the sagger passing through the suction chamber to pass through; as well as A second partition is disposed between the suction chamber and the replacement chamber and switches between a communication state in which the suction chamber and the replacement chamber are in communication and a non-communication state in which the suction chamber and the replacement chamber are not in communication.

2. The suction recovery system according to claim 1, wherein: The suction recovery system comprises: a posture adjustment chamber, the posture adjustment chamber being arranged between the heat treatment chamber and the suction chamber, through which the sagger output from the output port passes; and A posture adjustment device is provided, wherein the posture adjustment device adjusts the posture of the sagger in the posture adjustment chamber, The first partition is disposed between the posture adjustment chamber and the suction chamber.

3. The suction recovery system according to claim 2, wherein: The conveying device conveys the plurality of saggers along the conveying direction in a state where the plurality of saggers are stacked. The suction recovery system comprises: a stack release chamber, the stack release chamber being arranged between the posture adjustment chamber and the suction chamber, and allowing the plurality of saggers output from the posture adjustment chamber to pass through; as well as A stack releasing device is provided for releasing the plurality of stacked saggers in the stack releasing chamber to a state where the plurality of saggers are not stacked.

4. The suction recovery system according to claim 3, wherein: The stack release device comprises: a holding device body, which holds the sagger; and a holding actuator for moving the holding device body; The gripping actuator is disposed outside the stack release chamber.

5. The suction recovery system according to claim 3, wherein: The stack release device comprises: A lifting device body, which lifts and lowers the plurality of stacked saggers; A lifting actuator, which moves the lifting device body; as well as a holding device body for holding one of the plurality of stacked saggers; The lifting actuator is arranged outside the stack release chamber.

6. The suction recovery system according to claim 3, wherein: The first partition is disposed between the stack release chamber and the suction chamber.

7. The suction recovery system according to any one of claims 1 to 6, wherein: The suction nozzle is immobile in the left-right direction orthogonal to the conveying direction. The suction recovery system further includes a sagger moving device that moves the sagger in the left-right direction relative to the suction nozzle when the suction nozzle recovers the processed object in the sagger.

8. The suction recovery system according to claim 7, wherein: The suction recovery system further includes a lifting device, which lifts and lowers the sagger in the suction chamber. The sagger moving device moves the sagger in the left-right direction relative to the suction nozzle in a state in which the sagger is lifted by the lifting device.

9. The suction recovery system according to any one of claims 1 to 6, wherein: The suction recovery system further includes a first actuator that is disposed outside the suction chamber and operates the first partition body.

10. The suction recovery system according to any one of claims 1 to 6, wherein: The suction recovery system further includes a second actuator that is disposed outside the replacement chamber and operates the second partition body.

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