A probe station capable of spraying fluorinated oil

Abstract

The present application relates to a probe station capable of spraying fluorine oil. The probe station comprises: a base, a chuck, a flip cover, and a fluorine oil spraying mechanism. The base has a sample cavity; the chuck is movably connected to the base and located within the sample cavity, and is used to carry the sample to be tested; the flip cover is rotatably connected to the base; the fluorine oil spraying mechanism comprises a fluorine oil bottle and a spray head, the fluorine oil bottle is connected to the spray head, and the fluorine oil bottle is disposed on the side of the flip cover facing away from the sample cavity. The spray head is mounted on the flip cover, and the spray head is partially located within the sample cavity. The fluorine oil bottle is used to supply fluorine oil to the spray head, and the spray head, located at one end of the sample cavity, can spray fluorine oil toward the sample to be tested. The probe station has good detection performance.

Description

Technical Field

[0001] This application relates to the technical field of wafer detection, and particularly relates to a probe station capable of spraying fluorine oil. Background Art

[0002] The probe station is used for testing the electrical parameters of wafers. When high-voltage detection is required for the wafers to be detected, the test voltage can be as high as 3,000 volts. When the probes used to contact the wafers to be detected contact the wafers to be contacted, they will be ionized with the air, resulting in arcing. This may damage the probes or the wafers to be detected, reducing the detection performance of the probe station. Summary of the Invention

[0003] In view of this, this application provides a probe station capable of spraying fluorine oil, and the probe station has good detection performance.

[0004] This application provides a probe station capable of spraying fluorine oil, which includes: a base, a chuck, a flip cover, and a fluorine oil spraying mechanism. The base has a sample chamber; the chuck is movably connected to the base and is located in the sample chamber, and the chuck is used for carrying the sample to be detected; the flip cover is rotatably connected to the base; the fluorine oil spraying mechanism includes a fluorine oil bottle and a nozzle. The fluorine oil bottle is communicated with the nozzle. The fluorine oil bottle is arranged on the side of the flip cover away from the sample chamber, and the nozzle is installed on the flip cover, and a part of the nozzle is located in the sample chamber; the fluorine oil bottle is used to provide fluorine oil to the nozzle, and one end of the nozzle located in the sample chamber can spray fluorine oil to the sample to be detected.

[0005] Further, the fluorine oil spraying mechanism further includes an installation box, and the installation box is arranged on the side of the flip cover away from the sample chamber; the installation box has a first chamber, the fluorine oil bottle is arranged in the first chamber and is spaced from the bottom of the first chamber; the fluorine oil spraying mechanism further includes a liquid leakage inductor, and the liquid leakage inductor is installed at the bottom of the first chamber, and the liquid leakage inductor is used for detecting fluorine oil.

[0006] Further, the installation box includes a side plate, a first bottom plate, and a second bottom plate. The side plate and the first bottom plate enclose the first chamber; the second bottom plate is located in the first chamber, the second bottom plate is connected to the inner side wall of the side plate, the fluorine oil bottle is spaced from the second bottom plate, the second bottom plate is used for arranging the liquid leakage inductor, and the second bottom plate is inclined relative to the base.

[0007] Further, the fluorine oil spraying mechanism further includes an air compressor, and the air compressor is communicated with the nozzle to facilitate conveying compressed gas to the nozzle to detect the flow state of the nozzle.

[0008] Furthermore, the installation box also has a second chamber, which is spaced apart from the first chamber; the fluorine oil spraying mechanism also includes a controller and an air compressor, and the controller is located in the second chamber; the controller has an air inlet end and a first air outlet end, the air inlet end is connected to the air compressor, and the first air outlet end is connected to the fluorine oil bottle; when the air compressor is turned on, the air compressor provides compressed gas to the controller and transmits it to the fluorine oil bottle, so that positive pressure is formed in the fluorine oil bottle, and the fluorine oil bottle provides fluorine oil to the nozzle.

[0009] Furthermore, the controller also includes a second gas outlet end, which is connected to the nozzle; the controller is also used to form atomized gas from compressed gas and transport it to the nozzle.

[0010] Furthermore, the probe station further comprises a gas detection sensor, which is arranged on the outside of the base station and communicated with the sample cavity; the gas detection sensor is used to detect the content of fluorine gas in the sample cavity.

[0011] Furthermore, the probe station further comprises a sealing cover, which is arranged on a side of the flip cover away from the sample cavity to seal the sample cavity.

[0012] Furthermore, the probe station further comprises an air suction device, which is connected to the sealing cover and is used to absorb fluorine gas formed in the sample cavity.

[0013] Furthermore, the probe station also includes a moving mechanism and a control device, the moving mechanism is movably connected to the base, and the moving mechanism is used to carry the chuck; the control device is electrically connected to the controller and the moving mechanism, respectively, and the control device is used to control the movement of the moving mechanism so that the chuck is set corresponding to the nozzle; the control device is also used to control the controller so that the fluorine oil bottle provides fluorine oil to the nozzle, and the nozzle is located at one end of the sample chamber to spray fluorine oil to the sample to be tested.

[0014] Furthermore, the sample to be detected includes a plurality of detection areas arranged in sequence along a first direction, each of the detection areas includes a plurality of detection sites arranged in sequence along a second direction, and the first direction intersects with the second direction; the probe station also includes a probe card, which is installed on the flip cover and spaced apart from the nozzle, and the tip of the probe card protrudes from the surface of the flip cover facing the sample cavity; the control device is used to control the movement of the chuck so that one of the plurality of detection areas corresponds to the nozzle setting, and controls the nozzle to spray fluorine oil toward the sample to be detected, and the control device is also used to control the chuck to move to correspond to the probe card so that the tip of the probe card contacts the detection area.

[0015] In the present application, when the sample to be detected is carried on the chuck, the chuck is movably connected to the base to drive the sample to be detected to move relative to the base, and the sample to be detected is correspondingly arranged with the nozzle. The fluorinated oil bottle is used to supply fluorinated oil to the nozzle, and one end of the nozzle close to the sample to be detected can spray fluorinated oil on the sample to be detected, so as to spray the fluorinated oil on the surface of the sample to be detected and form an insulating film on the surface of the sample to be detected. Further, when the probe station is used to detect the electrical performance of the sample to be detected, when the probe contacts the sample to be detected, the insulating film formed by the fluorinated oil can isolate air, so that even in a high-voltage test environment, the probe and the sample to be detected will not deviate or generate sparks, which is beneficial to improving the detection accuracy of the probe station, and can avoid damaging the sample to be detected and / or the probe due to air ionization, which is beneficial to improving the detection performance of the probe station and prolonging the service life of the probe station. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for implementation will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0017] Figure 1 is a schematic structural diagram of a probe station according to an embodiment of the present application;

[0018] Figure 2 is a schematic diagram of the cooperation relationship between a probe station and a sample to be detected according to an embodiment of the present application;

[0019] Figure 3 is a top view of a partial fluorinated oil spraying structure according to an embodiment of the present application;

[0020] Figure 4 is Figure 3 a cross-sectional view taken along the A-A direction in;

[0021] Figure 5 is Figure 3 a cross-sectional view taken along the B-B direction in;

[0022] Figure 6 is Figure 4 an enlarged view of the C dashed box in;

[0023] Figure 7 is a partial connection schematic diagram of a probe station according to an embodiment of the present application;

[0024] Figure 8 is a circuit block diagram of a probe station according to an embodiment of the present application;

[0025] Figure 9 The circuit block diagram of the probe station according to another embodiment of the present application;

[0026] Figure 10 The structural schematic diagram of the sample to be detected according to an embodiment of the present application.

[0027] Description of the reference numerals:

[0028] 100 - probe station, 110 - base, 111 - sample cavity, 120 - chuck, 130 - flip cover, 140 - fluorine oil spraying mechanism, 141 - fluorine oil bottle, 142 - nozzle, 143 - mounting box, 1431 - first chamber, 1432 - side plate, 1433 - first bottom plate, 1434 - second bottom plate, 1435 - second chamber, 144 - liquid leakage inductor, 145 - air compressor, 146 - controller, 1461 - air inlet end, 1462 - first air outlet end, 1463 - second air outlet end, 147 - first clamping member, 148 - second clamping member, 150 - gas detection sensor, 160 - sealing cover, 170 - suction device, 180 - moving mechanism, 190 - control device, 210 - liquid level sensor, 220 - pipeline assembly, 221 - first pipeline member, 222 - second pipeline member, 230 - switch member, 250 - probe card, 300 - sample to be detected, 310 - detection area, 320 - detection site. Detailed implementation manners

[0029] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0030] The terms "first", "second", etc. in the specification and claims of the present application and the above - mentioned accompanying drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non - exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.

[0031] References herein to "embodiments" or "implementations" mean that a particular feature, structure, or characteristic described in connection with the embodiments or implementations may be included in at least one embodiment of the present application. The appearance of such phrases in various places in the specification does not necessarily refer to the same embodiment, nor do they constitute independent or alternative embodiments that are mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0032] Probe stations are used to test electrical parameters on wafers. When high-voltage testing is required on wafers, the test voltage can reach as high as 3,000 volts. When the probes contacting the wafers, they ionize with the air, causing sparks. This can damage the probes or the wafers, reducing the probe station's performance.

[0033] It can be understood that under high-voltage environment, the electric field strength is significantly enhanced. When the electric field strength reaches a certain level, the electrons in the air molecules will be pulled out by the electric field force and form free electrons. These free electrons are accelerated under the action of the electric field and collide with other molecules in the air, causing more molecules to be ionized.

[0034] It can be understood that, in the terminology of this application, "spark phenomenon" refers to the phenomenon that air or other media are broken down under the action of a high-voltage electric field, generating electric sparks or arcs.

[0035] It can be understood that in the terminology of this application, "high voltage" means that the voltage of the probe used to detect the wafer to be detected is relatively large, which can be but not limited to 1500V, 2000V, 2500V, 3000V, 3200V, etc. The specific value of the high voltage is not limited here.

[0036] See Figure 1 and Figure 2 The present application provides a probe station 100 capable of spraying fluorine oil, the probe station 100 comprising: a base 110, a chuck 120, a flip cover 130 and a fluorine oil spraying mechanism 140, the base 110 having a sample cavity 111; the chuck 120 being movably connected to the base 110 and being located in the sample cavity 111, the chuck 120 being used to carry a sample 300 to be tested; the flip cover 130 being rotatably connected to the base 110; the fluorine oil spraying mechanism 140 comprising A fluorine oil bottle 141 and a nozzle 142 are connected to each other. The fluorine oil bottle 141 is arranged on the side of the flip cover 130 away from the sample chamber 111. The nozzle 142 is installed on the flip cover 130. Part of the nozzle 142 is located in the sample chamber 111. The fluorine oil bottle 141 is used to provide fluorine oil to the nozzle 142. The nozzle 142 is located at one end of the sample chamber 111 and can spray fluorine oil toward the sample 300 to be tested.

[0037] Understandably, the chuck 120 is movably connected to the base 110, and the chuck 120 can move relative to the base 110 in the horizontal direction and the vertical direction. Among them, the horizontal direction is the horizontal plane where the chuck 120 is located, and the chuck 120 can move relative to the base 110 in the left-right direction (as shown by the X direction in Figure 1 ), the front-back direction (as shown by the Y direction in Figure 1 ); the vertical direction (as shown by the Z direction in Figure 1 ) is the direction in which the flip cover 130 and the base 110 are arranged in sequence, that is, the height direction of the probe station 100.

[0038] Optionally, the sample to be detected 300 can be, but is not limited to, a wafer, a circuit board, etc.

[0039] Understandably, the flip cover 130 is rotatably connected to the base 110 to open or close the sample chamber 111. When the flip cover 130 is opened relative to the base 110, it is convenient for the staff to take and place the sample to be detected 300 into the sample chamber 111, or to repair other components in the sample chamber 111; when the probe station 100 is in the working state, the flip cover 130 is closed relative to the base 110 to close the sample chamber 111.

[0040] Understandably, the fluorinated oil bottle 141 is arranged outside the sample chamber 111, and the fluorinated oil bottle 141 is used for storing and placing fluorinated oil.

[0041] Optionally, the probe station 100 further includes a probe card 250. The probe card 250 is installed on the flip cover 130 and is spaced from the nozzle 142. The tip of the probe card 250 protrudes from the surface of the flip cover 130 facing the sample chamber 111 to facilitate contact with the sample to be detected 300; when the probe card 250 is loaded with voltage and contacts the sample to be detected 300, the probe card 250 detects the sample to be detected 300 to obtain the electrical performance information of the sample to be detected 300.

[0042] Understandably, fluorinated oil has good chemical stability, good insulation performance and high thermal stability, and can be used as an insulating liquid material to isolate the air on the surface of the sample to be detected 300.

[0043] In this embodiment, when the sample 300 to be detected is carried on the chuck 120, the chuck 120 is movably connected to the base 110 to drive the sample 300 to be detected to move relative to the base 110, so that the sample 300 to be detected is correspondingly arranged with the nozzle 142. The fluorinated oil bottle 141 is used to supply fluorinated oil to the nozzle 142. One end of the nozzle 142 close to the sample 300 to be detected can spray fluorinated oil on the sample 300 to be detected, so as to spray fluorinated oil on the surface of the sample 300 to be detected and form an insulating film on the surface of the sample 300 to be detected. Further, when the probe station 100 is used to detect the electrical performance of the sample 300 to be detected, when the probe contacts the sample 300 to be detected, the insulating film formed by the fluorinated oil can isolate air, so that even in a high-voltage test environment, the probe and the sample 300 to be detected will not show deviation or arcing phenomena, which is beneficial to improving the detection accuracy of the probe station 100, and can avoid damaging the sample 300 to be detected and / or the probe due to air ionization, which is beneficial to improving the detection performance of the probe station 100 and extending the service life of the probe station 100.

[0044] It can be understood that in the terms of this application, the "deviation phenomenon" refers to that when the probe contacts the sample 300 to be detected, affected by air ionization, the contact point of the probe and the sample 300 to be detected deviates from the test point.

[0045] Optionally, in some embodiments, the nozzle 142 is fixedly arranged on the flip cover 130, and the relative position between the nozzle 142 and the sample 300 to be detected is adjusted by the movement of the chuck 120, so that the nozzle 142 can spray fluorinated oil on the surface of the sample 300 to be detected. In other embodiments, the nozzle 142 can move relative to the flip cover 130, and the relative position between the nozzle 142 and the sample 300 to be detected can be adjusted by the movement of the nozzle 142 and the movement of the chuck 120, so that the nozzle 142 can spray fluorinated oil on the surface of the sample 300 to be detected.

[0046] Please refer to Figure 3 and Figure 4 As shown in, in some embodiments, the fluorinated oil spraying mechanism 140 further includes an installation box 143, and the installation box 143 is arranged on the side of the flip cover 130 away from the sample chamber 111; the installation box 143 has a first chamber 1431, the fluorinated oil bottle 141 is arranged in the first chamber 1431 and is spaced from the bottom of the first chamber 1431; the fluorinated oil spraying mechanism 140 further includes a liquid leakage inductor 144, and the liquid leakage inductor 144 is installed at the bottom of the first chamber 1431, and the liquid leakage inductor 144 is used to detect fluorinated oil.

[0047] Understandably, the mounting box 143 is located outside the sample chamber 111.

[0048] Understandably, the fluorinated oil bottle 141 is disposed in the first chamber 1431 and is spaced from the bottom of the first chamber 1431. It can be that the fluorinated oil bottle 141 is suspended in the first chamber 1431.

[0049] In this embodiment, the fluorinated oil bottle 141 is disposed in the mounting box 143, and the mounting box 143 is disposed on the side of the flip cover 130 away from the sample chamber 111. The mounting box 143 can protect the fluorinated oil bottle 141 and prevent dust. When the fluorinated oil in the fluorinated oil bottle 141 leaks out, the mounting box 143 can temporarily store the fluorinated oil to prevent the fluorinated oil from flowing into the sample chamber 111 and affecting the normal operation of the components in the sample chamber 111. Specifically, the fluorinated oil bottle 141 is disposed in the first chamber 1431 and is spaced from the bottom of the first chamber 1431, so that the fluorinated oil bottle 141 does not directly contact the bottom of the first chamber 1431. When the fluorinated oil bottle 141 leaks oil, the leaked fluorinated oil will flow to the bottom of the first chamber 1431 under the action of gravity. The liquid leakage sensor 144 located at the bottom of the first chamber 1431 can quickly detect the fluorinated oil to determine that the fluorinated oil bottle 141 is leaking oil, thereby reminding the staff to replace the fluorinated oil bottle 141 to avoid wasting too much fluorinated oil and prevent the fluorinated oil from leaking out of the mounting box 143 and polluting the flip cover 130 and / or the sample chamber 111, improving the performance of the probe station 100.

[0050] Optionally, the liquid leakage sensor can be, but is not limited to, a point-type liquid leakage sensor, a cable-type liquid leakage sensor, a film-type liquid leakage sensor, an optoelectronic liquid leakage sensor, a capacitive liquid leakage sensor, a chemical liquid leakage sensor, etc.

[0051] Optionally, please also refer to Figure 5 Figure, the mounting box 143 includes a side plate 1432 and a first bottom plate 1433. The side plate 1432 and the first bottom plate 1433 enclose the first chamber 1431. The fluorinated oil spraying mechanism 140 further includes a first clamping member 147, a second clamping member 148, and a fixing member (not shown in the figure). The first clamping member 147 and the second clamping member 148 are spaced apart and are both disposed around the outer periphery of the fluorinated oil bottle 141. The fixing member sequentially passes through the side plate 1432, the first clamping member 147, and the second clamping member 148 to fix the fluorinated oil bottle 141 to the side plate 1432, and the fluorinated oil bottle 141 is spaced from the first bottom plate 1433.

[0052] In this embodiment, one end of the first clamping member 147 is fixed to the side plate 1432 through the fixing member. The first clamping member 147 also cooperates with the second clamping member 148 to surround and clamp the fluorinated oil bottle 141, and the distance between the first clamping member 147 and the second clamping member 148 is tightened through the fixing member to improve the stability of the fluorinated oil bottle 141 disposed on the side plate 1432. The fluorinated oil bottle 141 is spaced apart from the first bottom plate 1433, which is beneficial to avoid interfering with the liquid leakage sensor disposed at the bottom of the first chamber 1431, so that when fluorinated oil leaks from the fluorinated oil bottle 141, the liquid leakage sensor can quickly detect the fluorinated oil and avoid wasting too much fluorinated oil.

[0053] Optionally, the fluorinated oil spraying mechanism 140 further includes a liquid level sensor 210. The liquid level sensor 210 is installed on the fluorinated oil bottle 141 and is used to detect the remaining amount of fluorinated oil in the fluorinated oil bottle 141, so as to facilitate reminding the staff to add fluorinated oil to the fluorinated oil bottle 141 in time.

[0054] In some embodiments, the installation box 143 includes a side plate 1432, a first bottom plate 1433 and a second bottom plate 1434 that enclose a first chamber 1431. The side plate 1432 and the first bottom plate 1433 enclose the first chamber 1431; the second bottom plate 1434 is located inside the first chamber 1431. The second bottom plate 1434 is connected to the inner side wall of the side plate 1432. The fluorinated oil bottle 141 is spaced apart from the second bottom plate 1434. The second bottom plate 1434 is used to dispose the liquid leakage inductor 144, and the second bottom plate 1434 is inclined relative to the base 110.

[0055] It can be understood that the second bottom plate 1434 is closer to the fluorinated oil bottle 141 than the first bottom plate 1433.

[0056] It can be understood that the second bottom plate 1434 is inclined relative to the base 110. It can be that the first bottom plate 1433 is horizontal relative to the base 110 to improve the stability of the installation box 143 placed on the flip cover 130, and then the second bottom plate 1434 is also inclined relative to the first bottom plate 1433.

[0057] In this embodiment, the side panels 1432 and the first bottom panel 1433 enclose the first chamber 1431. The first bottom panel 1433 serves as the bottom panel of the installation box 143. The first bottom panel 1433 is horizontal relative to the base 110 to provide stable support for the installation box 143. Furthermore, the second bottom panel 1434 connects to the inner sidewalls of the side panels 1432. The fluorine oil bottle 141 and the second bottom panel 1434 are spaced apart. The second bottom panel 1434 is used to mount the leakage sensor 144. This prevents the fluorine oil bottle 141 from interfering with the leakage sensor 144 mounted on the second bottom panel 1434. This allows the leakage sensor to quickly detect any leakage of fluorine oil from the fluorine oil bottle 141, thus preventing excessive waste. Furthermore, the second bottom plate 1434 is tilted relative to the base 110, and the second bottom plate 1434 is tilted relative to the first bottom plate 1433. When fluorine oil leaks out of the fluorine oil bottle 141, under the action of gravity, the fluorine oil will tilt along the second bottom plate 1434 toward one end of the second bottom plate 1434 to concentrate the fluorine oil on one side of the second bottom plate 1434, which is conducive to further improving the sensitivity of the leakage sensor 144 to sensing fluorine oil, so that the leakage sensor 144 can detect fluorine oil more quickly, thereby reducing the waste caused by the leakage of fluorine oil.

[0058] Please also see Figure 4 Optionally, the arrangement direction of the probe card 250 and the mounting box 143 (eg Figure 4 In the direction shown by U in the figure, the second bottom plate 1434 is inclined toward the side away from the fluorine oil bottle 141.

[0059] In this embodiment, the second base plate 1434 is tilted toward a side away from the fluorine oil bottle 141 relative to the arrangement of the probe card 250 and the mounting box 143. In other words, the end of the second base plate 1434 farther from the probe card 250 is farther from the fluorine oil bottle 141. This ensures that if fluorine oil leaks from the fluorine oil bottle 141, it will be concentrated on the side of the second base plate 1434 farther from the probe card 250. If the fluorine oil accidentally leaks from the mounting box 143, it will be a certain distance away from the probe card 250, preventing it from directly soaking the probe card 250 or flowing directly into the sample chamber 111. This reduces the difficulty of cleaning and improves the performance of the probe station 100.

[0060] Please also see Figure 6, optionally, the included angle α formed between the second base plate 1434 and the first base plate 1433 ranges from 1° ≤ α ≤ 5°. Specifically, the value of the included angle α formed between the second base plate 1434 and the first base plate 1433 can be, but is not limited to, 1°, 1.1°, 1.3°, 1.5°, 1.8°, 2°, 2.2°, 2.5°, 2.8°, 3°, 3.2°, 3.5°, 3.8°, 4°, 4.2°, 4.3°, 4.5°, 4.8°, and 5°, etc.

[0061] It can be understood that the included angle formed between the second base plate 1434 and the first base plate 1433 can be the included angle formed between the second base plate 1434 and the horizontal plane, or can also be the included angle formed between the second base plate 1434 and the surface of the base 110 facing the mounting box 143.

[0062] In this embodiment, when the included angle α formed between the second base plate 1434 and the first base plate 1433 satisfies the range 1° ≤ α ≤ 5°, the included angle formed between the second base plate 1434 and the first base plate 1433 is within a reasonable range, and the inclination degree of the second base plate 1434 is within a reasonable range. On the one hand, when the fluorine oil leaks from the fluorine oil bottle 141, it is convenient for the fluorine oil to concentrate on one side of the second base plate 1434, so as to improve the sensitivity of the liquid leakage inductor 144 to sense the fluorine oil. On the other hand, it can avoid occupying too much space in the first chamber 1431 and improve the space utilization rate in the first chamber 1431.

[0063] Please refer to Figure 7 , in some embodiments, the fluorine oil spraying mechanism 140 further includes an air compressor 145, and the air compressor 145 is connected to the nozzle 142 to facilitate the delivery of compressed gas to the nozzle 142 to detect the flow state of the nozzle 142.

[0064] It can be understood that compressed gas refers to gas whose volume is reduced by increasing pressure and stored in a container.

[0065] In this embodiment, the air compressor 145 is used to compress air and deliver compressed gas to the nozzle 142. By observing the gas flow condition at the end of the nozzle 142 located in the sample chamber 111, the flow state of the nozzle 142 can be judged, so as to facilitate the staff to detect the flow state of the nozzle 142, and facilitate the timely cleaning of the nozzle 142 in a blocked state, ensuring that the fluorine oil spraying mechanism 140 can spray fluorine oil on the sample to be detected 300, so as to reduce the arcing phenomenon in the high-pressure detection environment.

[0066] In some embodiments, the mounting box 143 further has a second chamber 1435, which is spaced from the first chamber 1431; the fluorinated oil spraying mechanism 140 further includes a controller 146 and an air compressor 145, and the controller 146 is located in the second chamber 1435; the controller 146 has an air inlet end 1461 and a first air outlet end 1462, the air inlet end 1461 is communicated with the air compressor 145, and the first air outlet end 1462 is communicated with the fluorinated oil bottle 141; when the air compressor 145 is turned on, the air compressor 145 supplies compressed gas to the controller 146 and transmits it to the fluorinated oil bottle 141, so that a positive pressure is formed in the fluorinated oil bottle 141, and the fluorinated oil bottle 141 supplies fluorinated oil to the nozzle 142.

[0067] It can be understood that the air compressor 145, the controller 146, the fluorinated oil bottle 141 and the nozzle 142 are communicated in sequence.

[0068] It can be understood that in Figure 7 the embodiments, both the one shown as D and the one shown as E are the controller 146. Among them, the side shown as D is the front of the controller 146, and the side shown as E is the back of the controller 146.

[0069] It can be understood that in Figure 7 the embodiments, the direction indicated by the arrow is the flow direction of the compressed gas, the fluorinated oil or the atomized gas.

[0070] In this embodiment, the air compressor 145 is communicated with the air inlet end 1461 of the controller 146. The air compressor 145 is used to compress gas and transport the compressed gas to the controller 146. The first air outlet end 1462 of the controller 146 is communicated with the fluorinated oil bottle 141 to transport the compressed gas to the fluorinated oil bottle 141. After the fluorinated oil bottle 141 forms a positive pressure, the fluorinated oil bottle 141 supplies fluorinated oil to the nozzle 142, so that the nozzle 142 at one end of the sample chamber 111 can spray fluorinated oil on the sample to be detected 300, so as to form an insulating film on the surface of the sample to be detected 300 and reduce the arcing phenomenon in the high-voltage detection environment.

[0071] It can be understood that the flow situation between the fluorinated oil bottle 141 and the nozzle 142 can be controlled by turning on and off the air compressor 145. Specifically, when the air compressor 145 is turned on, the compressed gas flows from the air compressor 145 through the controller 146 and then to the fluorinated oil bottle 141, so that a positive pressure is formed in the fluorinated oil bottle 141, and the fluorinated oil bottle 141 supplies fluorinated oil to the nozzle 142. When the air compressor 145 is turned off, a positive pressure cannot be formed in the fluorinated oil bottle 141, and the fluorinated oil bottle 141 stops supplying fluorinated oil to the nozzle 142.

[0072] Optionally, the fluorinated oil spraying mechanism 140 further includes a pipeline assembly 220. The pipeline assembly 220 includes a first pipeline member 221 and a second pipeline member 222. One end of the first pipeline member 221 communicates with the first air outlet end 1462, and the other end of the first pipeline member 221 communicates with the fluorinated oil bottle 141. One end of the second pipeline member 222 communicates with the fluorinated oil bottle 141 and is at least partially immersed below the liquid level of the fluorinated oil, and the other end of the second pipeline member 222 communicates with the nozzle 142.

[0073] It can be understood that the end of the first pipeline member 221 facing away from the first air outlet end 1462 communicates with the fluorinated oil bottle 141 and is above the liquid level of the fluorinated oil. The first pipeline member 221 is used to transport compressed gas.

[0074] It can be understood that the end of the second pipeline member 222 facing away from the nozzle 142 communicates with the fluorinated oil bottle 141 and is below the liquid level of the fluorinated oil. The second pipeline member 222 is used to transport fluorinated oil.

[0075] It can be understood that the first pipeline member 221, the second pipeline member 222 and the fluorinated oil bottle 141 form a communicating structure of "short inlet and long outlet".

[0076] In this embodiment, the opposite ends of the first pipeline member 221 communicate with the first air outlet end 1462 and the fluorinated oil bottle 141 respectively. The end of the first pipeline member 221 facing away from the first air outlet end 1462 communicates with the fluorinated oil bottle 141 and is above the liquid level of the fluorinated oil, so that compressed gas can enter the fluorinated oil bottle 141 through the controller 146 and a positive pressure is formed in the fluorinated oil bottle 141. Further, the opposite ends of the second pipeline member 222 communicate with the fluorinated oil bottle 141 and the nozzle 142 respectively, and the end of the second pipeline member 222 facing away from the nozzle 142 is below the liquid level of the fluorinated oil, so that when a positive pressure is formed in the air above the liquid level of the fluorinated oil, the fluorinated oil is pressed into the second pipeline member 222 and transported to the nozzle 142. This connection method is simple and efficient, facilitating the simplification of the assembly process of the fluorinated oil spraying mechanism 140.

[0077] Optionally, the fluorinated oil spraying mechanism 140 further includes a switch member 230. The switch member 230 is provided on the communication path between the air compressor 145 and the nozzle 142 to open or close the path between the air compressor 145 and the nozzle 142.

[0078] In this embodiment, the switch 230 can open or close the passage between the air compressor 145 and the nozzle 142. When it is necessary to detect the flow state of the nozzle 142, the switch 230 and the air compressor 145 can be opened so that the compressed gas flows from the air compressor 145 to the nozzle 142. When it is necessary to supply fluorinated oil to the nozzle 142, the switch 230 can be closed so that the compressed gas can flow from the air compressor 145 and the controller 146 to the fluorinated oil bottle 141, and the fluorinated oil bottle 141 supplies fluorinated oil to the nozzle 142, which is beneficial to improving the performance of the probe station 100.

[0079] In some embodiments, the controller 146 further includes a second air outlet end 1463, and the second air outlet end 1463 is communicated with the nozzle 142; the controller 146 is further configured to form atomized gas from the compressed gas and transport it to the nozzle 142.

[0080] It can be understood that the atomized gas refers to a mixture in which a liquid is dispersed into tiny droplets and suspended in a gas through an atomization technique. The atomized gas is essentially an aerosol formed by mixing tiny droplets and gaseous gas.

[0081] It can be understood that the air compressor 145, the controller 146, and the nozzle 142 are connected in sequence.

[0082] In this embodiment, the controller 146 is further configured to form atomized gas from the compressed gas. In other words, part of the compressed gas flowing into the controller 146 is used to make the fluorinated oil bottle 141 form a positive pressure to supply fluorinated oil to the nozzle 142; the other part is used to mix with tiny droplets to form atomized gas and transport it to the nozzle 142. When the atomized gas and the fluorinated oil are simultaneously transported to the nozzle 142, the kinetic energy of the atomized gas will further break the fluorinated oil to form finer droplets, so as to increase the specific surface area of the fluorinated oil. When the fluorinated oil is sprayed on the surface of the sample 300 to be detected, the fluorinated oil is more likely to contact the sample 300 to be detected and is more evenly distributed on the surface of the sample 300 to be detected, which is convenient for the fluorinated oil to form an insulating film on the surface of the sample 300 to be detected. Further, when the probe card 250 contacts the sample 300 to be detected, the insulating film formed by the fluorinated oil can prevent the tip of the probe card 250 from ionizing the air and causing a sparking phenomenon, which is beneficial to improving the detection performance of the probe station 100.

[0083] Optionally, the controller 146 can further adjust the first flow rate of the atomized gas transported to the nozzle 142 and the second flow rate of the fluorinated oil transported to the nozzle 142 to adjust the amount of the atomized gas and the amount of the fluorinated oil transported to the nozzle 142, so as to change the form of the fluorinated oil ejected from the nozzle 142 to meet more detection requirements.

[0084] Optionally, the form of the fluorinated oil ejected by the nozzle 142 may be, but is not limited to, a mist shape or a jet shape.

[0085] Optionally, in a specific embodiment, the spraying amount of the fluorinated oil required for the sample 300 to be detected with a diameter of 6 inches is 34 mL to 40 mL.

[0086] Please refer to Figure 1 , in some embodiments, the probe station 100 further includes a gas detection sensor 150, the gas detection sensor 150 is disposed outside the base 110 and communicates with the sample chamber 111; the gas detection sensor 150 is used to detect the content of fluorine gas in the sample chamber 111.

[0087] It can be understood that fluorine gas is obtained by vaporizing fluorinated oil in a high-temperature environment. In the terms of this application, the high-temperature environment refers to a temperature that may cause the fluorinated oil to vaporize, for example, between 220 °C and 260 °C. The specific temperature of the high-temperature environment is not limited herein.

[0088] In this embodiment, when it is necessary to detect the electrical properties of the sample 300 to be detected under high pressure and high temperature conditions, the temperature in the sample chamber 111 may be too high, causing part of the fluorinated oil ejected from the nozzle 142 to vaporize into fluorine gas. However, fluorine gas is chemically active and is a highly toxic gas. In addition, fluorine gas may also contact and react with water in the air to generate hydrogen fluoride, which is also a highly toxic gas. Therefore, the probe station 100 of this embodiment is provided with a gas detection sensor 150 outside the base 110 to detect the content of fluorine gas in the sample chamber 111, facilitating the staff to judge the amount of fluorine gas in the sample chamber 111, reducing the risk of fluorine gas leakage, and improving the use performance and safety performance of the probe station 100.

[0089] In some embodiments, the probe station 100 further includes a sealing cover 160, the sealing cover 160 is disposed on the side of the flip cover 130 facing away from the sample chamber 111 to seal the sample chamber 111.

[0090] In this embodiment, the sealing cover 160 is disposed on the side of the flip cover 130 facing away from the sample chamber 111 to seal the sample chamber 111, further avoiding the leakage of fluorine gas and improving the use performance and safety performance of the probe station 100.

[0091] Please refer to Figure 8 , in some embodiments, the probe station 100 further includes a suction device 170, the suction device 170 communicates with the sealing cover 160 and is used to suck the fluorine gas formed in the sample chamber 111.

[0092] In this embodiment, the suction device 170 is connected to the sealing cover 160. When the gas sensor detects that there is fluorine gas in the sample chamber 111, it is convenient for the staff to turn on the suction device 170 and suck the fluorine gas formed in the sample chamber 111, so as to collect and process the fluorine gas, avoid the leakage of fluorine gas from polluting the working environment, and improve the service performance and safety performance of the probe station 100.

[0093] Optionally, the probe station 100 further includes a control device 190. The control device 190 is electrically connected to the suction device 170 and the gas detection sensor 150 respectively. The control device 190 can receive the detection information of the gas detection sensor 150 to control the opening or closing of the suction device 170. When the gas detection sensor 150 detects that the amount of fluorine gas in the sample chamber 111 exceeds a preset value, the control device 190 controls the suction device 170 to open to suck the fluorine gas formed in the sample chamber 111; when the gas detection sensor 150 detects that the amount of fluorine gas in the sample chamber 111 is 0 or lower than the preset value, the control device 190 controls the suction device 170 to close to save energy.

[0094] It can be understood that the "preset value" is the value at which the amount of fluorine gas in the sample chamber 111 will not pose a threat to the surrounding environment. The specific range of the "preset value" is not limited herein.

[0095] Please refer to Figure 2 and Figure 9 In some embodiments, the probe station 100 further includes a moving mechanism 180 and a control device 190. The moving mechanism 180 is movably connected to the base 110, and the moving mechanism 180 is used to carry the chuck 120; the control device 190 is electrically connected to the controller 146 and the moving mechanism 180 respectively. The control device 190 is used to control the movement of the moving mechanism 180 so that the chuck 120 is disposed corresponding to the nozzle 142; the control device 190 is further used to control the controller 146 so that the fluorine oil bottle 141 supplies fluorine oil to the nozzle 142, and the nozzle 142 sprays fluorine oil on the sample to be detected 300 at one end of the sample chamber 111.

[0096] In this embodiment, the moving mechanism 180 is movably connected to the base 110, and the moving mechanism 180 is used to carry the chuck 120. Before the sample 300 to be detected is detected, the moving mechanism 180 can move the chuck 120 and the sample 300 to be detected to be correspondingly arranged with the nozzle 142, so that the nozzle 142 can spray fluorine oil on the sample 300 to be detected at one end of the sample chamber 111; when it is necessary to detect the sample 300 to be detected, the moving mechanism 180 can move the chuck 120 and the sample 300 to be detected to be correspondingly arranged with the probe card 250, so that the tip of the probe card 250 can contact the sample 300 to be detected and detect the sample 300 to be detected. The fluorine oil forms an insulating film on the surface of the sample 300 to be detected, so that when the tip of the probe card 250 contacts the sample 300 to be detected, even in a high-voltage detection environment, the phenomena of sparking or deviation can be avoided, improving the safety and accuracy of the probe station 100 for detecting the sample 300 to be detected. In this embodiment, the control device 190 is electrically connected to the controller 146 and the moving mechanism 180 to control the nozzle 142 to be arranged corresponding to the chuck 120, and the nozzle 142 can spray fluorine oil on the sample 300 to be detected. The spraying method is efficient and the spraying effect is good, improving the performance of the probe station 100.

[0097] Optionally, the control device 190 is further electrically connected to the air compressor 145 to control the opening and closing of the air compressor 145.

[0098] Please also refer to Figure 10 , in some embodiments, the sample 300 to be detected includes a plurality of detection areas 310 arranged in sequence along a first direction (such as Figure 10 the V direction shown in Figure 10 ), and each detection area 310 includes a plurality of detection sites 320 arranged in sequence along a second direction (such as Figure 10 the W direction shown in

[0099] ), the first direction intersects the second direction; the probe station 100 further includes a probe card 250, the probe card 250 is installed on the flip cover 130 and is spaced from the nozzle 142, and the tip of the probe card 250 protrudes from the surface of the flip cover 130 facing the sample chamber 111; the control device 190 is used to control the movement of the chuck 120 so that one of the plurality of detection areas 310 is arranged corresponding to the nozzle 142, and control the nozzle 142 to spray fluorine oil on the sample 300 to be detected. The control device 190 is further used to control the chuck 120 to move to correspond to the probe card 250 so that the tip of the probe card 250 contacts the detection area 310.Optionally, in some embodiments, the first direction is perpendicular to the second direction.

[0100] It can be understood that in the terms of this application, "a plurality of" means greater than or equal to two, and can be, but is not limited to, three, four, five, six, ten, twelve, etc.

[0101] It can be understood that when the probe card 250 is loaded with voltage, the tip of the probe card 250 contacts the detection site 320 of the sample 300 to be detected, so as to detect the electrical properties of the sample 300 to be detected.

[0102] It can be understood that the control device 190 controls the controller 146 to control the nozzle 142 to spray fluorinated oil on the sample 300 to be detected or stop providing fluorinated oil.

[0103] In this embodiment, the sample 300 to be detected includes a plurality of detection regions 310 arranged in sequence along the first direction. By partitioning the sample 300 to be detected, fluorinated oil is sprayed on a plurality of detection sites 320 in the detection region 310, which can improve the stability of the probe station 100 for detecting the sample 300 to be detected. Specifically, during the process of the nozzle 142 spraying fluorinated oil on the sample 300 to be detected, the control device 190 controls the movement of the chuck 120 so that one of the plurality of detection regions 310 is arranged corresponding to the nozzle 142. Further, the control device 190 controls the nozzle 142 to spray fluorinated oil on the sample 300 to be detected, and the sample 300 to be detected moves slowly driven by the moving mechanism 180 so that each region in the detection region 310 corresponds to the nozzle 142 in sequence, so that the fluorinated oil can cover the entire detection region 310 and the detection sites 320 on the detection region 310. When the fluorinated oil covers the entire detection region 310, the control device 190 controls the controller 146 to stop the nozzle 142 from supplying fluorinated oil. The control device 190 controls the movement of the chuck 120 so that the detection region 310 corresponds to the tip of the probe card 250, and the tip of the probe card 250 contacts the plurality of detection sites 320 in sequence to detect the detection region 310. During the process of spraying fluorinated oil on the sample 300 to be detected and after spraying the fluorinated oil, the sample 300 to be detected moves driven by the moving mechanism 180. If partitioned detection and partitioned fluorinated oil spraying are not performed, the fluorinated oil may flow to other regions during the movement, so that there is no fluorinated oil on some detection sites 320. When the tip of the probe card 250 contacts the detection site 320 without fluorinated oil on the surface, a sparking phenomenon or a deviation phenomenon may occur. In this solution, by performing partitioned fluorinated oil spraying and partitioned detection on the sample 300 to be detected, on the one hand, during the movement of the sample 300 to be detected, the spraying area of the detection region 310 is small, which can slow down the flow of the fluorinated oil sprayed on the detection region 310 to other places, so that the detection sites 320 in the detection region 310 are not exposed to the air, and the generation of the sparking phenomenon is slowed down. On the other hand, the probe card 250 detects the detection sites 320 in sequence, so that the detection time is long. Partitioned fluorinated oil spraying and partitioned detection can avoid the volatilization of the fluorinated oil, ensure that the fluorinated oil can isolate the air on the surface of the detection site 320, and improve the detection performance of the probe station 100.

[0104] Specifically, in Figure 10 the embodiment, when the nozzle 142 sprays one of the plurality of detection regions 310, the moving mechanism Figure 10 180 drives the chuck 120 and the sample 300 to be detected to move along the second direction so that a plurality of detection sites 320 in the detection region 310 are arranged corresponding to the nozzle 142 in sequence.

[0105] Optionally, in some embodiments, the detection area 310 includes a plurality of detection sites 320 arranged in an array to improve the efficiency of detecting the sample 300 to be detected.

[0106] Optionally, the diameter of the spraying area of the nozzle 142 on the surface of the detection site 320 is at least 1.5 times the diameter of the detection site 320 to ensure that the fluorine oil sprayed by the nozzle 142 covers the surface of the detection site 320 .

[0107] Optionally, the probe station 100 further includes an air blowing structure (not shown), which is installed in the sample cavity 111 and can be slidably connected to the base 110, so as to blow air toward the sample to be detected 300 to disperse the fluorine oil in each detection area 310, so as to facilitate blowing away the fluorine oil and performing preliminary cleaning of the sample to be detected 300 after the probe card 250 completes the detection of the detection site 320.

[0108] It is understood that the blowing structure is slidably connected to the inner side wall of the base 110 so that the blowing structure can move relative to the base 110. When it is necessary to blow air to the sample 300 to be tested, the blowing structure moves relative to the base 110 to a position corresponding to the sample 300 to be tested, and blows air to the sample 300 to be tested; after blowing air to the sample 300 to be tested is completed, the blowing structure moves to a position staggered with the sample 300 to be tested, and staggered with the probe card 250 to avoid affecting the detection of the sample 300 by the probe card 250.

[0109] Optionally, in some embodiments, the air blowing structure can perform zoned cleaning of the sample 300 to be tested. That is, after the probe card 250 completes testing of the detection sites 320 in a particular detection zone 310, the air blowing structure blows away the fluorinated oil and performs preliminary cleaning of the sample 300 to be tested. In other embodiments, the air blowing structure can perform zoned cleaning of the sample 300 to be tested. That is, after the probe card 250 completes testing of the detection sites 320 in all detection zones 310, the air blowing structure blows away the fluorinated oil and performs preliminary cleaning of the sample 300 to be tested.

[0110] In this application, the mention of "embodiment" or "implementation manner" means that the specific features, structures, or characteristics described in connection with the embodiments may be included in at least one embodiment of this application. The appearance of the phrase at various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures, or characteristics described in each embodiment of this application can be arbitrarily combined with each other without contradiction to form another embodiment that does not depart from the spirit and scope of the technical solution of this application.

[0111] Finally, it should be noted that the above implementation manners are only used to illustrate the technical solutions of this application and not to limit them. Although the technical solutions of this application have been described in detail with reference to the above preferred implementation manners, those of ordinary skill in the art should understand that modifications or equivalent replacements can be made to the technical solutions of this application without departing from the spirit and scope of the technical solutions of this application.

Claims

1. A probe station capable of spraying fluorinated oil, characterized in that, The probe station comprises: a base having a sample cavity; a chuck, the chuck being movably connected to the base and located in the sample chamber, the chuck being used to carry the sample to be tested; a flip cover rotatably connected to the base; and A fluorine oil spraying mechanism, comprising a fluorine oil bottle and a spray head, wherein the fluorine oil bottle is in communication with the spray head, and is disposed on a side of the flip cover facing away from the sample chamber. The spray head is mounted on the flip cover, and is partially located within the sample chamber. The fluorine oil bottle is used to supply fluorine oil to the spray head, and the spray head is located at one end of the sample chamber and can spray fluorine oil toward the sample to be tested. The fluorine oil spraying mechanism further comprises an installation box, which is disposed on a side of the flip cover facing away from the sample chamber. The installation box has a first chamber, and the fluorine oil bottle is disposed within the first chamber and spaced apart from the bottom of the first chamber. The fluorine oil spraying mechanism further includes a liquid leakage sensor, which is installed at the bottom of the first chamber and is used to detect the fluorine oil; The installation box includes a side panel, a first bottom panel and a second bottom panel, and the side panel and the first bottom panel enclose the first chamber; the second bottom panel is located in the first chamber, and the second bottom panel is connected to the inner side wall of the side panel. The fluorine oil bottle is spaced apart from the second bottom panel, and the second bottom panel is used to set the liquid leakage sensor. The second bottom panel is tilted relative to the base; wherein the range of the angle α formed by the second bottom panel and the first bottom panel is: 1°≤α≤5°.

2. The probe station according to claim 1, wherein The fluorine oil spraying mechanism further includes an air compressor, which is connected to the nozzle to facilitate the delivery of compressed gas to the nozzle to detect the flow status of the nozzle.

3. The probe station according to claim 1, wherein The installation box further comprises a second chamber, the second chamber being spaced apart from the first chamber; The fluorine oil spraying mechanism further includes a controller and an air compressor, wherein the controller is located in the second chamber; the controller has an air inlet and a first air outlet, wherein the air inlet is connected to the air compressor, and the first air outlet is connected to the fluorine oil bottle; When the air compressor is turned on, the air compressor provides compressed gas to the controller and transmits it to the fluorine oil bottle, so that positive pressure is formed in the fluorine oil bottle, and the fluorine oil bottle provides fluorine oil to the nozzle.

4. The probe station according to claim 3, characterized in that, The controller further includes a second gas outlet end, which is connected to the nozzle; the controller is also used to convert the compressed gas into atomized gas and deliver it to the nozzle.

5. The probe station according to any one of claims 1 to 4, characterized in that, The probe station further comprises a gas detection sensor, which is arranged outside the base station and communicated with the sample cavity; the gas detection sensor is used to detect the content of fluorine gas in the sample cavity.

6. The probe station according to claim 5, characterized in that, The probe station further includes a sealing cover, which is arranged on a side of the flip cover facing away from the sample cavity to seal the sample cavity.

7. The probe station according to claim 6, characterized in that, The probe station further includes an air suction device, which is connected to the sealing cover and is used to absorb fluorine gas formed in the sample cavity.

8. The probe station according to claim 3 or 4, characterized in that, The probe station further includes a moving mechanism and a control device. The moving mechanism is movably connected to the base, and the moving mechanism is used to carry the chuck. The control device is electrically connected to the controller and the moving mechanism respectively. The control device is used to control the movement of the moving mechanism so that the chuck is correspondingly arranged with the nozzle. The control device is further used to control the controller so that the fluorine oil bottle provides fluorine oil to the nozzle, and the nozzle located at one end of the sample chamber sprays fluorine oil on the sample to be detected.

9. The probe station according to claim 8, characterized in that, The sample to be detected includes a plurality of detection areas arranged in sequence along a first direction. Each detection area includes a plurality of detection sites arranged in sequence along a second direction, and the first direction intersects with the second direction. The probe station further includes a probe card, and the probe card is installed on the flip cover and is spaced from the nozzle. The tip of the probe card protrudes from the surface of the flip cover facing the sample chamber. The control device is used to control the movement of the chuck so that one of the plurality of detection areas corresponds to the nozzle, and control the nozzle to spray fluorine oil on the sample to be detected. The control device is further used to control the chuck to move to correspond to the probe card so that the tip of the probe card contacts the detection area.

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