Multipolar ion transport device

Abstract

The present application relates to a multipolar ion transmission device, comprising: a plurality of metal rods, the plurality of metal rods being arranged in parallel, the two ends of the metal rods forming an ion inlet and an ion outlet; a fixing ring, the center hole of the fixing ring being sleeved on the two ends of the plurality of metal rods, wherein the center hole has an arc-shaped inner edge that limits the outer contour of the metal rods, and the fixing ring is formed of an insulating dielectric material; a shielding electrode, the shielding electrode being formed of a metal material and covering the surface of the fixing ring, the shielding electrode comprising: a first electrode, the first electrode corresponding to a side surface of the fixing ring facing the ion inlet or the ion outlet, the center of the first electrode having a through hole corresponding to the center hole; a second electrode, the second electrode extending vertically from the edge of the through hole and corresponding to the inner edge of the center hole; a third electrode, the third electrode extending vertically from the outer edge of the first electrode to correspond to the outer edge of the fixing ring.

Description

Technical Field

[0001] The present application relates to the technical field of ion transmission equipment, and in particular to a multipolar ion transmission device. Background Art

[0002] Multipole ion transport devices are used to move and manipulate ions. They apply voltages, such as radio frequency or direct current, to generate a spatial electric field along the ion transport path, thereby manipulating the ion trajectory. For example, a quadrupole field has an electric field strength that is linearly proportional to the distance from the field center (central axis). These devices are typically used for ion transport or mass selection. Other types of multipole ion transport devices include hexapole, octopole, or even numbers of poles.

[0003] like Figure 1 As shown, existing quadrupole ion transport devices, such as quadrupoles, consist of four metal rods arranged in a square cross-section, with each rod located at one corner of the square. Pairs of electrodes in the mutually perpendicular X and Y directions are electrically connected to apply radio frequency and direct current voltages. The quadrupole direct current voltages used to change resolution have opposite polarities in the X and Y directions, while the radio frequency voltages applied in the X and Y directions are 180° out of phase.

[0004] Due to the unique structure and applied voltage, insulating materials such as ceramics and synthetic resins are often required to secure the metal rod. For example, a ceramic ring is machined with a curved shape to fit the metal rod, and the metal rod is screwed to the ceramic ring. Typically, two ceramic rings, one in front and one behind, are used to secure the metal rod.

[0005] Ions pass through the quadrupole and oscillate in the inner region surrounded by the four metal rods. Their trajectories are determined by the Matthew parameters a and q:

[0006] , ,

[0007] Where e is the electron charge, U is the quadrupole direct current, V is the RF amplitude, m is the ion mass, r0 is the quadrupole field radius, and Ω is the RF frequency. For ions to pass stably, a ≈ 0.237 and q ≈ 0.706 must be satisfied. Therefore, at specific voltages of U and V, only certain ions can pass through. Unstable ions cannot pass through the quadrupole rods and are either lost to the metal rods or pass between the rods. Since the ceramic surface is exposed to the ion path, unstable ions will impact the ceramic surface, generating surface charge. As the number of ion deposits increases, the surface charge becomes more severe, interfering with the quadrupole electric field and affecting quadrupole performance, such as reduced sensitivity and resolution. Summary of the Invention

[0008] An embodiment of the present application provides a multipolar ion transport device, comprising a shielding electrode for shielding a fixed ring and an electric field to prevent unstable ions from being deposited on the surface of the fixed ring, and instead attracting or even directing them to other components through the shielding electrode.

[0009] In one embodiment of the present application, a multipolar ion transport device is provided, comprising:

[0010] A plurality of metal rods, wherein the plurality of metal rods are arranged in parallel, and two ends of the metal rods are formed as an ion inlet and an ion outlet;

[0011] a fixing ring, wherein a center hole of the fixing ring is sleeved on both ends of the plurality of metal rods, wherein the center hole has a first arc-shaped inner edge limiting the outer contour of the metal rods and a second arc-shaped inner edge connecting between adjacent first arc-shaped inner edges, and the fixing ring is formed of an insulating dielectric material;

[0012] A shielding electrode, formed of a metal material and covering the surface of the fixing ring, comprising:

[0013] a first electrode, the first electrode corresponding to a surface of the fixing ring facing the ion inlet or the ion outlet, the center of the first electrode having a through hole corresponding to the central hole;

[0014] a second electrode, the second electrode extending vertically from an edge of the through hole and corresponding to a second inner edge of the central hole;

[0015] The third electrode vertically extends from the outer edge of the first electrode to correspond to the outer edge of the fixing ring.

[0016] In one embodiment, the shielding electrode is fixed to a side of the fixing ring facing the ion inlet or the ion outlet.

[0017] In one embodiment, the shielding electrode is formed as a plating layer covering the surface of the fixing ring.

[0018] In one embodiment, the invention is characterized by comprising:

[0019] A metal sleeve is sleeved on the outside of the fixing ring and the shielding electrode, the metal sleeve is electrically connected to the shielding electrode via a metal fastener, and the shielding electrode is fixed to the fixing ring via the metal fastener.

[0020] In one embodiment, the metal sleeve is grounded to conductively ground the shielding electrode.

[0021] In one embodiment, the fixed ring is a ring having an outer edge with an arc chamfer;

[0022] The third electrode corresponds to the arc-shaped chamfer.

[0023] In one embodiment, the shielding electrode comprises:

[0024] A plurality of shielding electrode support blocks, the number of the shielding electrode support blocks being the same as the number of the metal rods;

[0025] Each shielding electrode support block includes:

[0026] a first electrode support block, wherein the first electrode support blocks of the plurality of shielding electrode support blocks are combined to form a shape corresponding to a surface of the fixing ring facing the ion inlet or the ion outlet, wherein each first electrode support block corresponds to one of the arc-shaped chamfers;

[0027] a second electrode support block, the second electrode support block extending vertically from the inner edge of the first electrode support block, wherein the plurality of second electrode support blocks shielding the electrode support blocks are combined to form a shape corresponding to the second inner edge of the central hole;

[0028] A third electrode support block is vertically extended from the outer edge of the first electrode support block and corresponds to one of the arc-shaped chamfers.

[0029] In one embodiment, each shielding electrode support block is fixedly connected to the arc-shaped chamfer via a metal fastener.

[0030] In one embodiment, the width of the third electrode is greater than or equal to half of the width of the arc-shaped chamfer.

[0031] In one embodiment, the distance between the edge of the first electrode and the outer edge of the metal rod is greater than a first threshold;

[0032] and / or

[0033] The distance between the edge of the second electrode and the outer edge of the metal rod is greater than a first threshold.

[0034] This embodiment provides a multipolar ion transport device, including a shielding electrode for shielding a retaining ring from the electric field. This prevents unstable ions from depositing on the retaining ring's surface, instead attracting them through the shielding electrode and even directing them to other components. Furthermore, the shielding electrode is conductively grounded, allowing unstable ions to quickly dissipate through the ground loop after impacting the shielding electrode, thus preventing surface charge deposition. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The following drawings are merely provided to illustrate and explain the present application, and do not limit the scope of the present application.

[0036] Figure 1 Schematic diagram of the structure of an existing multipolar ion transmission device.

[0037] Figure 2 This is a schematic structural diagram of the first embodiment of the multipolar ion transport device of the present application.

[0038] Figure 3 for Figure 2 Schematic diagram of the structure of the blocking electrode.

[0039] Figure 4 for Figure 2 Schematic diagram of a local section.

[0040] Figure 5a and Figure 5b This is a schematic structural diagram of the first embodiment of the multipolar ion transport device of the present application.

[0041] Figure 6 This is a partial cross-sectional view of the multipolar ion transport device of the present application.

[0042] Figure 7 This is a connection diagram of the first embodiment of the multipole ion transmission device.

[0043] Figure 8 This is a schematic structural diagram of the second embodiment of the multipolar ion transport device of the present application.

[0044] Figure 9 This is a schematic structural diagram of the third embodiment of the multipolar ion transport device of the present application.

[0045] Figure 10 This is a schematic diagram of the results of the fourth embodiment of the multipolar ion transport device of the present application. DETAILED DESCRIPTION

[0046] In order to have a clearer understanding of the technical features, purposes and effects of the invention, specific embodiments of the present invention are now described with reference to the accompanying drawings, in which the same reference numerals represent the same parts.

[0047] In this document, “illustrative” means “serving as an example, instance or illustration”, and any diagram or implementation described in this document as “illustrative” should not be interpreted as a more preferred or more advantageous technical solution.

[0048] To simplify the drawings, only the parts relevant to the present invention are schematically shown in each figure and do not represent the actual structure of the product. In addition, to simplify the drawings and facilitate understanding, in some figures, only one of the components with the same structure or function is schematically depicted or labeled.

[0049] In this document, “upper”, “lower”, “front”, “back”, “left”, “right”, etc. are only used to indicate the relative position relationship between related parts, rather than to limit the absolute positions of these related parts.

[0050] In this article, "first", "second", etc. are only used to distinguish each other, and do not indicate the importance and order, or the prerequisite for each other's existence.

[0051] In this document, "equal" and "same" are not strictly limited in the mathematical and / or geometric sense, but also include errors that can be understood by those skilled in the art and are allowed in manufacturing or use. Unless otherwise specified, the numerical ranges herein include not only the entire range within its two endpoints, but also several sub-ranges contained therein.

[0052] An embodiment of the present application provides a multipolar ion transport device, comprising a shielding electrode for shielding a fixed ring and an electric field to prevent unstable ions from being deposited on the surface of the fixed ring, and instead attracting or even directing them to other components through the shielding electrode.

[0053] Example embodiments will now be described more fully with reference to the accompanying drawings.

[0054] First embodiment

[0055] like Figure 2 As shown, one embodiment of the present application provides a multipolar ion transport device, comprising:

[0056] A plurality of metal rods 10 are arranged in parallel, and two ends of the metal rods 10 are formed as an ion inlet 10a and an ion outlet 10b;

[0057] The fixing ring 20 has a central hole which is sleeved on both ends of the plurality of metal rods 10, wherein the central hole has a first arcuate inner edge 20a which limits the outer contour of the metal rod 10 and a second inner edge 20b which is connected between adjacent first arcuate inner edges (combined with the inner edge 20b of the fixing ring 20). Figure 5b As shown), the fixing ring 20 is formed of an insulating dielectric material;

[0058] The shielding electrode 30 is formed of a metal material and covers the surface of the fixing ring 20. The shielding electrode 30 includes:

[0059] a first electrode 31, the first electrode 31 corresponding to a surface of the fixing ring 20 facing the ion inlet 10a or the ion outlet 10b, and a through hole corresponding to the central hole at the center of the first electrode 31;

[0060] A second electrode 32 , the second electrode 32 extending vertically from the edge of the through hole and corresponding to the second inner edge 20 b of the central hole;

[0061] The third electrode 33 extends perpendicularly from the outer edge of the first electrode 31 to correspond to the outer edge of the fixing ring 20 .

[0062] In order to solve the problem of surface charge deposition caused by unstable ions in the prior art, which in turn interferes with the electric field between rods, this embodiment provides a multipolar ion transmission device, including a shielding electrode 30 for shielding the fixed ring 20 and the electric field, so as to prevent unstable ions from being deposited on the surface of the fixed ring 20, but instead being attracted or even directed to other components through the shielding electrode 30.

[0063] in, Figure 1 and Figure 2 The quadrupole ion transmission device is used as an example for illustration. It includes four parallel metal rods 10, each located at a corner of a square cross-section. Pairs of electrodes in the mutually perpendicular X and Y directions are electrically connected to apply radio frequency and direct current voltages. The gap formed by the first ends of the four metal rods 10 serves as an ion inlet 10a, while the gap formed by the other ends serves as an ion outlet 10b.

[0064] Combine Figure 3 As shown, the fixing ring 20 is formed in the form of a cylinder or a cube, which has a center hole, so that the center hole is set on the ends of the four metal rods 10, wherein the center hole has an arc-shaped inner edge that limits the outer contour of the metal rods 10. The metal rods 10 are fixed to the fixing ring 20 by fixing members such as screws. Figure 3 As shown in FIG, the center hole of the fixing ring 20 has at least four first curved inner edges corresponding to the outer contours of the four metal rods 10. The four first curved inner edges are connected by second inner edges, which can be formed into an arc or a plane. The four first curved inner edges are used to limit the relative positions of the metal rods 10.

[0065] In this example, a shielding electrode 30 corresponding to the outer contour of the fixing ring 20 is included. The shielding electrode 30 is made of metal material and covers the surface of the fixing ring 20 exposed to the quadrupole electric field to prevent unstable ions from depositing on the surface of the fixing ring 20 .

[0066] The shielding electrode 30 includes a first electrode 31 for shielding the side surface of the fixing ring 20 facing the ion inlet 10a or the ion outlet 10b, a second electrode 32 for shielding the inner surface of the fixing ring 20, and a third electrode 33 for shielding the outer edge surface of the fixing ring 20.

[0067] The first electrode 31 has the same cross-sectional shape as the fixing ring 20, perpendicular to the direction in which the metal rod extends. It also has a through-hole at its center that corresponds to the center hole of the fixing ring 20. The first electrode 31 extends perpendicular to the direction in which the metal rod extends. The second electrode 32 extends from the inner edge of the through-hole along the direction in which the metal rod extends, shielding the second inner edge of the center hole of the fixing ring 20 and located between adjacent metal rods 10. The second electrode 32 is formed into an arc shape that corresponds to the hole wall or the second inner edge of the center hole. The second electrode 32 can be formed into a continuous annular shape or into multiple discrete arc shapes. When the second electrode 32 is formed into discrete arc shapes, the second electrode 32 may correspond only to the shape of the second inner edge. The third electrode 33 is used to cover the outer edge of the fixing ring 20.

[0068] The thickness direction of the fixing ring 20 is the extension direction of the metal rod, and the extension directions of the second electrode 32 and the third electrode 33 are both the thickness direction of the fixing ring 20 .

[0069] In this example, the fixing ring 20 and the shielding electrode 30 are two independent components. The shielding electrode 30 can be fixed to the side of the fixing ring 20 facing the ion inlet 10 a or the ion outlet 10 b via fasteners.

[0070] Furthermore, if Figure 5a and Figure 5b As shown, it includes: a metal sleeve 40, which is sleeved on the outside of the fixing ring 20 and the shielding electrode 30, the metal sleeve 40 is electrically connected to the shielding electrode 30 via a metal fastener 41, and the shielding electrode 30 is fixed to the fixing ring 20 via the metal fastener 41.

[0071] Among them, such as Figure 7 As shown, the metal sleeve 40 can be connected to the vacuum chamber flange 42, and the vacuum chamber flange 42 is grounded to electrically connect the shielding electrode 30 to the ground. Figure 7 The shown embodiment is connected to the metal sleeve 40 in an axial plug-in manner.

[0072] Optionally, the vacuum chamber base 43 may be as Figure 10 As shown, the shielding electrode 30 is connected to the retaining ring 20 in a radially spliced ​​manner. The shape of the vacuum chamber base 43 corresponds to the outer edge of the retaining ring 20 and is made of metal. To securely connect to the multipole ion transport device, a metal strip 44 is provided. The shape of the metal strip 44 corresponds to the outer edge of the retaining ring 20. The metal strip 44 fastens the retaining ring 20 to the vacuum chamber base 43 via metal screws. This provides a conductive ground connection to the shielding electrode 30, allowing unstable ions that strike the shielding electrode 30 to quickly dissipate through the ground circuit, preventing surface charge deposition.

[0073] The fixing ring 20 is formed in a ring shape with an outer edge having an arc-shaped chamfer, and the third electrode 33 corresponds to the arc-shaped chamfer.

[0074] The third electrode 33 is centered relative to the arc-shaped chamfer, and its width is greater than or equal to half the width of the arc-shaped chamfer. The metal sleeve 40 has screw holes on its surface for metal fasteners 41 to pass through. The metal fasteners 41 sequentially secure the metal sleeve 40, shielding electrode 30, and retaining ring 20 together.

[0075] Combine Figure 4 As shown, in one example, the distance between the edge of the first electrode 31 and the outer edge of the metal rod 10 is greater than the first threshold, and the distance between the edge of the second electrode 32 and the outer edge of the metal rod 10 is greater than the first threshold.

[0076] The first threshold value may be selected as 0.5 mm, for example.

[0077] like Figure 3 As shown, the third electrodes 33 follow the contour of the retaining ring 20 and cover the four corners of the outer arc surface of the retaining ring 20. A single third electrode 33 is centered on the outer arc surface of the retaining ring 20, with a length no less than the thickness of the retaining ring 20 and a width greater than half the arc of the outer arc surface of the retaining ring 20.

[0078] The first electrode 31 covers the ion incident surface of the fixing ring 20. To avoid discharge, the distance between the edge of the first electrode 31 and the outer edge of the metal rod 10 is ≥0.5 mm. Figure 5b In the A-A' tangent section, the second electrode 32 follows the contour of the retaining ring 20 and covers the second inner edge and is centrally located. The length of the second electrode 32 is no less than the thickness of the retaining ring 20. To prevent discharge, the distance between the edge of the second electrode 32 and the outer edge of the adjacent metal rod along the second inner edge of the retaining ring 20 is ≥ 0.5 mm.

[0079] Combine Figure 6 As shown, to ensure that the shielding electrode 30 is firmly covered on the fixing ring 20, the installation can be carried out in the following order.

[0080] 1. The second electrode 32 and the third electrode 33 are pressed Figure 5a The BB' direction is aligned parallel to the second inner edge of the fixing ring 20 and the arc surface of the outer edge of the fixing ring.

[0081] 2. Insert the shielding electrode 30 into the fixing ring 20 along the BB′ direction, ensuring that the first electrode 31 is in close contact with the surface of the fixing ring 20 facing the ion inlet 10 a or the ion outlet 10 b .

[0082] 3. Put the metal sleeve 40 on the periphery of the shielding electrode 30 . The metal sleeve 40 has threaded holes for installing metal fasteners 41 .

[0083] 4. Rotate the metal sleeve 40 so that the screw hole is approximately located at the center of the third electrode 33 .

[0084] 5. Tighten the four metal fasteners 41 , use the metal fasteners 41 to support the shielding electrode, and fix the shielding electrode on the fixing ring 20 .

[0085] In the installed shielding electrode, the second electrode 32 and the third electrode 33 cover the second inner edge and the outer curved surface of the fixing ring 20, and the metal fasteners 41 support the shielding electrode 30. The number of metal fasteners 41 can be no less than four and symmetrically distributed on the metal sleeve 40, ensuring that the shielding electrode 30 is more securely covered on the fixing ring 20.

[0086] In particular, the metal fastener 41 can be made of metal to conductively connect the shielding electrode 30 to the metal sleeve 40. Furthermore, the metal sleeve 40 is installed at the flange of the vacuum chamber, and the vacuum chamber is grounded. In this way, the shielding electrode 30 is naturally conductively grounded, and the unstable ions quickly dissipate through the grounding circuit after hitting the shielding electrode 30, avoiding surface charge. Another advantage of this design is that it avoids the need for additional grounding wires. The introduction of grounding wires will inevitably lead to the complexity of the device structure, increase the difficulty of manufacturing, and bring the risk of poor grounding.

[0087] Second embodiment

[0088] like Figure 8 As shown, one embodiment of the present application provides a multipolar ion transport device, comprising:

[0089] A plurality of metal rods 10 are arranged in parallel, and two ends of the metal rods 10 are formed as an ion inlet 10a and an ion outlet 10b;

[0090] A fixing ring 20, the center hole of which is sleeved on both ends of the plurality of metal rods 10, wherein the center hole has an arc-shaped inner edge that limits the outer contour of the metal rods 10, and the fixing ring 20 is formed of an insulating dielectric material;

[0091] The shielding electrode 30 is formed of a metal material and covers the surface of the fixing ring 20. The shielding electrode 30 includes:

[0092] a first electrode 31, the first electrode 31 corresponding to a surface of the fixing ring 20 facing the ion inlet 10a or the ion outlet 10b, and a through hole corresponding to the central hole at the center of the first electrode 31;

[0093] A second electrode 32 , the second electrode 32 extending vertically from an edge of the through hole and corresponding to a second inner edge of the central hole;

[0094] The third electrode 33 extends perpendicularly from the outer edge of the first electrode 31 to correspond to the outer edge of the fixing ring 20 .

[0095] The shielding electrode 30 includes:

[0096] A plurality of shielding electrode support blocks 30 a , wherein the number of the shielding electrode support blocks 30 a is the same as the number of the metal rods 10 ;

[0097] Each shielding electrode support block 30a includes:

[0098] A first electrode support block 31 a, wherein a plurality of first electrode support blocks 31 a shielding the electrode support blocks 30 a are combined to form a shape corresponding to a surface of the fixing ring 20 facing the ion inlet 10 a or the ion outlet 10 b, wherein each first electrode support block 31 a corresponds to an arc-shaped chamfer;

[0099] A second electrode support block, the second electrode support block vertically extending from the inner edge of the first electrode support block 31a, and a plurality of second electrode support blocks shielding the electrode support block 30a are combined to form a shape corresponding to the second inner edge of the central hole;

[0100] The third electrode support block extends vertically from the outer edge of the first electrode support block 31 a and corresponds to an arc-shaped chamfer.

[0101] Each shielding electrode support block 30 a is fixedly connected to the arc chamfer via a metal fastener 41 .

[0102] For example, Figure 8 As shown, the shielding electrode 30 is divided into four equal parts along D-D' and EE'. Each electrode support block is composed of three parts as in the first embodiment: 1. The ion incident surface covering the fixed ring 20; 2. The ion incident surface profile perpendicular to the fixed ring 20 covers the second inner edge; 3. The ion incident surface profile perpendicular to the fixed ring 20 covers the outer arc surface of the fixed ring.

[0103] Other installation methods and characteristic dimensions are the same as those of the first embodiment.

[0104] Third embodiment

[0105] like Figure 9 As shown, one embodiment of the present application provides a multipolar ion transport device, comprising:

[0106] A plurality of metal rods 10 are arranged in parallel, and two ends of the metal rods 10 are formed as an ion inlet 10a and an ion outlet 10b;

[0107] A fixing ring 20, the center hole of which is sleeved on both ends of the plurality of metal rods 10, wherein the center hole has an arc-shaped inner edge that limits the outer contour of the metal rods 10, and the fixing ring 20 is formed of an insulating dielectric material;

[0108] The shielding electrode 30 is formed of a metal material and covers the surface of the fixing ring 20. The shielding electrode 30 includes:

[0109] a first electrode 31, the first electrode 31 corresponding to a surface of the fixing ring 20 facing the ion inlet 10a or the ion outlet 10b, and a through hole corresponding to the central hole at the center of the first electrode 31;

[0110] a second electrode 32 extending vertically from an edge of the through hole and corresponding to a second inner edge of the central hole;

[0111] The third electrode 33 extends perpendicularly from the outer edge of the first electrode 31 to correspond to the outer edge of the fixing ring 20 .

[0112] The shielding electrode 30 is formed as a plating layer covering the surface of the fixing ring 20 .

[0113] The shielding electrode is replaced with a metal coating. The coating thickness can be selected to be ≥100 nm, ≥200 nm, ≥500 nm, ≥1 μm, ≥5 μm, or ≥10 μm. Similarly, the metal coating consists of three parts: 1. Covering the ion incident surface of the fixing ring 20; 2. Covering the second inner edge with a profile perpendicular to the ion incident surface of the fixing ring 20; 3. Covering the outer curved surface of the fixing ring with a profile perpendicular to the ion incident surface of the fixing ring 20.

[0114] The metal-plated first electrode 31 covers the ion incident surface of the fixing ring 20 . To avoid discharge, the distance between the edge of the metal-plated first electrode 31 and the outer edge of the metal rod 10 is ≥0.5 mm.

[0115] The metal-plated third electrode 33 covers the four corners of the outer arc surface of the fixing ring along the contour of the fixing ring and covers the center thereof. The covering length is equal to the thickness of the fixing ring 20 and the width is greater than 1 / 2 of the arc surface of the fixing ring.

[0116] The metal-plated second electrode 32 is centered on the second inner edge, perpendicular to the profile of the incident surface of the retaining ring. The coverage length of the metal-plated second electrode 32 is equal to the thickness of the retaining ring. To prevent discharge, the distance between the edge of the metal-plated second electrode 32 and the outer edge of the adjacent metal rod along the profile of the incident surface of the retaining ring is ≥0.5 mm.

[0117] Similarly, the metal fastener 41 supports the metal coating covering the outer arc surface of the fixed ring. In particular, the metal fastener 41 can be made of metal, and the metal coating is conductively connected to the metal sleeve. In order to prevent the metal fastener 41 from damaging the metal coating, the metal fastener 41 can be an elastic screw. Furthermore, the metal sleeve is installed at the flange of the vacuum chamber, and the vacuum chamber is grounded. In this way, the metal coating is naturally conductively grounded, and the unstable ions quickly dissipate through the grounding loop after hitting the metal coating, avoiding surface charge. Similarly, this design avoids the need for additional grounding wires. Another advantage of the metal coating is that it is integrated with the fixed ring, making the structure of the entire quadrupole device simpler.

[0118] This embodiment provides a multipolar ion transport device, including a shielding electrode for shielding a retaining ring from the electric field. This prevents unstable ions from depositing on the retaining ring's surface, instead attracting them through the shielding electrode and even directing them to other components. Furthermore, the shielding electrode is conductively grounded, allowing unstable ions to quickly dissipate through the ground loop after impacting the shielding electrode, thus preventing surface charge deposition.

[0119] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A multipolar ion transport device, characterized in that: include: A plurality of metal rods (10), the plurality of metal rods (10) being arranged in parallel, and two ends of the metal rods (10) forming an ion inlet (10a) and an ion outlet (10b); a fixing ring (20), wherein a center hole of the fixing ring (20) is sleeved on both ends of the plurality of metal rods (10), wherein the center hole has a first arc-shaped inner edge for limiting the outer contour of the metal rods (10) and a second inner edge connected between adjacent first arc-shaped inner edges, and the fixing ring (20) is formed of an insulating dielectric material; A shielding electrode (30), the shielding electrode (30) is formed of a metal material and covers the surface of the fixing ring (20), the shielding electrode (30) comprising: a first electrode (31), the first electrode (31) corresponding to a surface of the fixing ring (20) facing the ion inlet (10a) or the ion outlet (10b), the center of the first electrode (31) having a through hole corresponding to the central hole; a second electrode (32), the second electrode (32) extending vertically from an edge of the through hole and corresponding to a second inner edge of the central hole; A metal sleeve (40), wherein the metal sleeve (40) is sleeved on the outside of the fixing ring (20) and the shielding electrode (30), the metal sleeve (40) is electrically connected to the shielding electrode (30) via a metal fastener (41), and the shielding electrode (30) is fixed to the fixing ring (20) via the metal fastener (41), and the metal sleeve (40) is grounded to conductively ground the shielding electrode (30).

2. The multipolar ion transmission device according to claim 1, characterized in that The shielding electrode (30) is fixed to a side of the fixing ring (20) facing the ion inlet (10a) or the ion outlet (10b).

3. The multipolar ion transmission device according to claim 1, characterized in that The shielding electrode (30) is formed as a plating layer covering the surface of the fixing ring (20).

4. The multipolar ion transmission device according to claim 2 or 3, characterized in that: The shielding electrode (30) comprises: A third electrode (33), the third electrode (33) vertically extending from the outer edge of the first electrode (31) to correspond to the outer edge of the fixing ring (20).

5. The multipolar ion transmission device according to claim 4, characterized in that: The fixing ring (20) is formed into a ring shape with an outer edge having an arc-shaped chamfer; The third electrode (33) corresponds to the arc-shaped chamfer.

6. The multipolar ion transmission device according to claim 5, characterized in that: The shielding electrode (30) comprises: a plurality of shielding electrode support blocks (30a), wherein the number of the shielding electrode support blocks (30a) is the same as the number of the metal rods (10); Each shielding electrode support block (30a) comprises: a first electrode support block (31a), wherein the first electrode support blocks (31a) of the plurality of shielding electrode support blocks (30a) are combined to form a shape corresponding to a side surface of the fixing ring (20) facing the ion inlet (10a) or the ion outlet (10b), wherein each first electrode support block (31a) corresponds to one of the arc-shaped chamfers; a second electrode support block, the second electrode support block extending vertically from the inner edge of the first electrode support block (31a), the second electrode support blocks of the plurality of shielding electrode support blocks (30a) being combined to form a shape corresponding to the second inner edge of the central hole; A third electrode support block, the third electrode support block vertically extending from the outer edge of the first electrode support block (31a) and corresponding to one of the arc-shaped chamfers.

7. The multipolar ion transport device according to claim 6, characterized in that: Each shielding electrode support block (30a) is fixedly connected to the arc-shaped chamfer via a metal fastener (41).

8. The multipolar ion transmission device according to claim 5, characterized in that: The width of the third electrode (33) is greater than or equal to half the width of the arc chamfer.

9. The multipolar ion transport device according to claim 2 or 3, characterized in that: The distance between the edge of the first electrode (31) and the outer edge of the metal rod (10) is greater than a first threshold; and / or The distance between the edge of the second electrode (32) and the outer edge of the metal rod (10) is greater than a first threshold value.

10. A multipolar ion transport device, characterized in that: include: A plurality of metal rods (10), the plurality of metal rods (10) being arranged in parallel, and two ends of the metal rods (10) forming an ion inlet (10a) and an ion outlet (10b); a fixing ring (20), wherein a center hole of the fixing ring (20) is sleeved on both ends of the plurality of metal rods (10), wherein the center hole has a first arc-shaped inner edge for limiting the outer contour of the metal rods (10) and a second inner edge connected between adjacent first arc-shaped inner edges, and the fixing ring (20) is formed of an insulating dielectric material; A shielding electrode (30) is formed of a metal material and covers the surface of the fixing ring (20) to prevent unstable ions from being deposited on the surface of the fixing ring (20). The shielding electrode (30) comprises: a first electrode (31), the first electrode (31) corresponding to a surface of the fixing ring (20) facing the ion inlet (10a) or the ion outlet (10b), the center of the first electrode (31) having a through hole corresponding to the central hole; A second electrode (32), the second electrode (32) extends vertically from the edge of the through hole and corresponds to the second inner edge of the central hole.

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