Display panel, preparation method thereof and display device

Abstract

The application discloses a display panel, a preparation method thereof and a display device. The pixel circuit of the display panel comprises a switching module. In the direction perpendicular to the plane where the substrate is located, the switching module comprises a first electrode, a second electrode and a dielectric elastic part between the first electrode and the second electrode. The second electrode is located on the side of the first electrode away from the substrate and is arranged in an insulating manner with the first electrode. The second electrode comprises a first subpart and a second subpart arranged in the same layer. The first electrode is electrically connected with a control signal line used for transmitting a control signal. When the control signal is in a non-enabled state, the dielectric elastic part is in an initial state, the first subpart and the second subpart have a first gap therebetween, and the second subpart is in a suspended state. When the control signal is in an enabled state, the dielectric elastic part is in a first state, the first subpart and the second subpart are in contact, and the first subpart and the second subpart are in an equipotential state. The application can solve the problem caused by the leakage current of the switching device of the pixel circuit and improve the display effect.

Description

Technical Field

[0001] This invention relates to the field of display technology, and in particular to a display panel, its manufacturing method, and a display device. Background Technology

[0002] The pixel circuitry in a display panel drives the light-emitting elements to emit light, enabling the display panel to display specific images. As the requirements for display quality become increasingly stringent, the performance requirements for the pixel circuitry also become more demanding.

[0003] However, existing pixel circuits suffer from problems such as uneven display and flickering due to leakage current in switching devices (e.g., thin-film transistors, TFTs). Currently, common solutions involve using dual-gate TFTs or oxide semiconductor TFTs. However, this approach is not only complex and costly, but also suffers from limitations in reducing leakage current. Furthermore, the intermediate node of a dual-gate TFT couples out a high voltage when the TFT is off, resulting in a large voltage difference with the gate voltage of the driving transistor. Summary of the Invention

[0004] This invention provides a display panel and its manufacturing method, as well as a display device, to solve the problem caused by leakage current in the pixel circuit due to switching devices, and to improve the display effect.

[0005] According to one aspect of the present invention, a display panel is provided, comprising:

[0006] Substrate,

[0007] A driving circuit layer is located on one side of the substrate; the driving circuit layer includes a pixel circuit, the pixel circuit includes a driving transistor and at least one switching module, and the switching module is coupled to the driving transistor.

[0008] Along the first direction, the switching module includes a first electrode, a second electrode, and a dielectric elastic portion located between the first electrode and the second electrode. The second electrode is located on the side of the first electrode away from the substrate and is insulated from the first electrode. The first direction is perpendicular to the plane of the substrate.

[0009] The second electrode includes a first portion and a second portion disposed in the same layer; the first electrode, the dielectric elastic portion, and the first portion overlap when projected along the first direction, while the dielectric elastic portion and the second portion do not overlap when projected along the first direction; the projection range of the dielectric elastic portion on the substrate along the second direction is greater than the projection range of the first electrode on the substrate along the second direction, and the projection range of the first portion on the substrate along the second direction is greater than the projection range of the dielectric elastic portion on the substrate along the second direction; the second direction is the direction from the first portion to the second portion, and is parallel to the plane of the substrate.

[0010] The first electrode is electrically connected to the control signal line, which is used to transmit control signals. When the control signal is disabled, the dielectric elastic part is in the initial state, there is a first gap between the first part and the second part, and the second part is suspended. When the control signal is enabled, the dielectric elastic part is in the first state, the first part and the second part are in contact, and the first part and the second part are at the same potential.

[0011] According to another aspect of the present invention, a method for manufacturing a display panel is provided, comprising:

[0012] Provide substrate;

[0013] A driving circuit layer is formed on one side of the substrate; the driving circuit layer includes a pixel circuit, the pixel circuit includes a driving transistor and at least one switching module, the switching module is coupled to the driving transistor; along a first direction, the switching module includes a first electrode, a second electrode and a dielectric elastic portion located between the first electrode and the second electrode, the second electrode is located on the side of the first electrode away from the substrate and is insulated from the first electrode; the first direction is perpendicular to the plane of the substrate; the second electrode includes a first portion and a second portion disposed in the same layer; the first electrode, the dielectric elastic portion and the first portion overlap when projected along the first direction, the dielectric elastic portion and the second portion do not overlap when projected along the first direction; the projection range of the dielectric elastic portion on the substrate along the second direction is greater than the projection range of the first electrode on the substrate along the second direction, the projection range of the first portion on the substrate along the second direction is greater than the projection range of the dielectric elastic portion on the substrate along the second direction; the second direction is the direction from the first portion to the second portion and is parallel to the plane of the substrate.

[0014] The first electrode is electrically connected to the control signal line, which is used to transmit control signals. When the control signal is disabled, the dielectric elastic part is in the initial state, there is a first gap between the first part and the second part, and the second part is suspended. When the control signal is enabled, the dielectric elastic part is in the first state, the first part and the second part are in contact, and the first part and the second part are at the same potential.

[0015] According to another aspect of the present invention, a display device is provided, comprising a display panel provided in any embodiment of the present invention.

[0016] The technical solution of this invention, through the design of the pixel circuit of the display panel, includes the following switching module: along a first direction perpendicular to the plane of the substrate, the switching module includes a first electrode, a second electrode, and a dielectric elastic portion located between the first electrode and the second electrode. The second electrode is located on the side of the first electrode away from the substrate and is insulated from the first electrode. The second electrode includes a first portion and a second portion disposed on the same layer. The first electrode, the dielectric elastic portion, and the first portion overlap in projection along the first direction, while the dielectric elastic portion and the second portion do not overlap in projection along the first direction. The projection range of the dielectric elastic portion on the substrate along the second direction is greater than the projection range of the first electrode on the substrate along the second direction, and the projection range of the first portion on the substrate along the second direction is greater than the projection range of the dielectric elastic portion on the substrate along the second direction. In the projection range of the second direction, the first electrode is electrically connected to the control signal line that transmits the control signal. Thus, the state of the dielectric elastic module can be adjusted by regulating the voltage of the control signal, thereby controlling the on / off state of the switch module. Specifically, when the control signal is in the disabled state, the dielectric elastic part is in the initial state, with a first gap between the first and second parts, and the second part is in a suspended state, causing the switch module to be turned off. When the control signal is in the enabled state, the dielectric elastic part is in the first state, with the first and second parts in contact, and the first and second parts are at the same potential, realizing the conduction control of the switch module. Since the inside of the second electrode is in an open circuit state when the switch module is turned off, the possibility of leakage current can be eliminated, completely solving the problem caused by leakage current in the switching device.

[0017] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of a display panel provided in an embodiment of the present invention;

[0020] Figure 2 yes Figure 1 A schematic diagram of a sub-pixel structure in a provided display panel;

[0021] Figure 3 yes Figure 2 A top view of the switching module in the sub-pixel in its initial state;

[0022] Figure 4 It is along Figure 3 A schematic diagram of the cross-sectional structure taken from BB';

[0023] Figure 5 yes Figure 2 A top view of the switching module in the sub-pixel in the first state;

[0024] Figure 6 yes Figure 1 A schematic diagram of another structure of subpixels in the provided display panel;

[0025] Figure 7 yes Figure 6 A schematic diagram of the film structure of the pixel circuit in the sub-pixel shown.

[0026] Figure 8 yes Figure 7 A magnified structural diagram of the Q1 region;

[0027] Figure 9 It is along Figure 7 A schematic diagram of a cross-sectional structure taken from CC';

[0028] Figure 10 yes Figure 6 Timing diagram of the middle pixel circuit;

[0029] Figure 11 It is along Figure 7 A schematic diagram of another cross-sectional structure taken from CC';

[0030] Figure 12 It is along Figure 7 A schematic diagram of another cross-sectional structure taken from CC';

[0031] Figure 13 It is along Figure 7 A schematic diagram of another cross-sectional structure taken from CC';

[0032] Figure 14 This is a schematic diagram of the membrane structure of another switching module in its initial state according to an embodiment of the present invention;

[0033] Figure 15 This is a schematic diagram of the membrane structure of another switching module in the first state provided by an embodiment of the present invention;

[0034] Figure 16 It is along Figure 14 A schematic diagram of a cross-sectional structure taken from LL';

[0035] Figure 17 It is along Figure 14 A schematic diagram of a cross-sectional structure taken from LL';

[0036] Figure 18 It is along Figure 14 A schematic diagram of another cross-sectional structure taken from LL';

[0037] Figure 19 It is along Figure 14 A schematic diagram of another cross-sectional structure taken from LL';

[0038] Figure 20 This is a schematic flowchart of a method for manufacturing a display panel according to an embodiment of the present invention;

[0039] Figures 21-30 Is with Figure 11 A schematic diagram of the manufacturing process of a corresponding display panel;

[0040] Figure 31 This is a schematic diagram of the structure of a display device provided in an embodiment of the present invention. Detailed Implementation

[0041] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0042] Various modifications and variations can be made to this application without departing from its spirit or scope, which will be apparent to those skilled in the art. Therefore, this application is intended to cover modifications and variations falling within the scope of the corresponding claims (the claimed technical solutions) and their equivalents. It should be noted that the embodiments provided in this application can be combined with each other without contradiction.

[0043] First, it should be noted that, unless otherwise defined, the technical or scientific terms used in this invention should have the ordinary meaning understood by one of ordinary skill in the art. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. The terms "comprising" and similar terms mean that the element or object preceding the word encompasses the element or object listed after the word and its equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; these relative positional relationships may change accordingly when the absolute position of the described object changes. Furthermore, the shapes and sizes of the components in the accompanying drawings do not reflect actual proportions and are only intended to illustrate the content of this invention.

[0044] Figure 1 This is a schematic diagram of the structure of a display panel provided in an embodiment of the present invention. Figure 2 yes Figure 1 A schematic diagram of a sub-pixel structure in the provided display panel. Figure 3 yes Figure 2 The diagram shows a top view of the switching module in the sub-pixel in its initial state. Figure 4 It is along Figure 3 A schematic diagram of the cross-sectional structure taken from BB'. Figure 5 yes Figure 2 The diagram shows a top view of the switching module in the sub-pixel in its first state, combined with... Figures 1-5The display panel 100 provided in this embodiment of the invention includes a substrate 10 and a driving circuit layer 20, the driving circuit layer 20 being located on one side of the substrate 10; the driving circuit layer 20 includes a pixel circuit 210, the pixel circuit 210 including a driving transistor T0 and at least one switching module K, the switching module K being coupled to the driving transistor T0; along a first direction D1, the switching module K includes a first electrode 21, a second electrode 22, and a dielectric elastic portion 23 located between the first electrode 21 and the second electrode 22, the second electrode 22 being located on the side of the first electrode 21 away from the substrate 10, and being insulated from the first electrode 21; the first direction D1 is perpendicular to the plane of the substrate 10; the second electrode 22 includes a first portion 221 and a second portion 222 disposed in the same layer; the first electrode 21, the dielectric elastic portion 23, and the first portion 221 are arranged along the first direction D1. 1. Projection overlap: The dielectric elastic portion 23 and the second portion 22 do not overlap when projected along the first direction D1; the projection range of the dielectric elastic portion 23 on the substrate 10 along the second direction D2 is larger than the projection range of the first electrode 21 on the substrate 10 along the second direction D2, and the projection range of the first portion 221 on the substrate 10 along the second direction D2 is larger than the projection range of the dielectric elastic portion 23 on the substrate 10 along the second direction D2; the second direction D2 is the direction from the first portion 221 to the second portion 222, and is parallel to the plane of the substrate 10; the first electrode 21 is electrically connected to the control signal line 4, and the control signal line 4 is used to transmit control signals; when the control signal is in an enabled state, the dielectric elastic portion 23 is in the initial state, there is a first gap h between the first portion 221 and the second portion 222, and the second portion 222 is in a suspended state (e.g., Figure 3 When the control signal is enabled, the dielectric elastic part 23 is in the first state, the first part 221 is in contact with the second part 222, and the first part 221 and the second part 222 are at the same potential (e.g., Figure 5 ).

[0045] like Figure 1 and Figure 2As shown, the display panel 100 includes multiple sub-pixels PX, each sub-pixel PX being electrically connected to a light-emitting element 30 and a pixel circuit 210 for driving the light-emitting element 30 to emit light. The light-emitting element 30 can be a light-emitting diode, including but not limited to OLED, micro-LED, and mini-LED. Currently, commonly used pixel circuits consist of several thin-film transistors and storage capacitors electrically connected, such as 2T1C pixel circuits, 7T1C pixel circuits, and 8T1C pixel circuits ("T" represents a thin-film transistor, and "C" represents a capacitor). The thin-film transistors in such pixel circuits can be divided into two categories: switching transistors, which function to switch signal transmission on and off, and driving transistors, which generate the driving current to drive the light-emitting element to emit light. As mentioned above, the leakage current problem of the switching transistors affects the display effect of the display panel. To address this, this embodiment of the invention designs a novel switching device (i.e., the aforementioned switching module K) to replace the switching transistors, solve the leakage current problem, and improve the display effect. In practical applications, the switching module in this embodiment can replace at least some of the switching transistors in the original pixel circuit; this embodiment of the invention does not limit this.

[0046] Specifically, in combination Figures 2-5 From bottom to top, the switch module K sequentially includes a first electrode 21, a dielectric elastic part 23, and a second electrode 22. The first electrode 21 and the second electrode 22 are insulated from each other. The second electrode 22 has two parts: a first part 221 and a second part 222. The projections of the first electrode 21, the dielectric elastic part 23, and the first part 221 along the first direction D1 overlap, while the projections of the second part 22 and the dielectric elastic part 23 along the first direction D1 do not overlap. The projection range of the dielectric elastic part 23 on the substrate 10 along the second direction D2 is larger than the projection range of the first electrode 21 on the substrate 10 along the second direction D2, so as to ensure the insulation between the first electrode 21 and the second electrode 22. In addition, the projection range of the first part 221 on the substrate 10 along the second direction D2 is larger than the projection range of the dielectric elastic part 23 on the substrate 10 along the second direction D2.

[0047] The dielectric elastic portion 23 exhibits electro-deformation characteristics. Based on this structure, since the dielectric elastic portion 23 is located between the first electrode 21 and the first portion 221 of the second electrode 22, the dielectric elastic portion 23 can have different states, specifically an initial state and a first state, by controlling the voltage on the first portion 221 of the first electrode 21 and the second electrode 22. When the dielectric elastic portion 23 has different states, the switch module K has different on / off states: when the dielectric elastic portion 23 is in the initial state, the switch module K is in the off state; when the dielectric elastic portion 23 is in the first state, the switch module K is in the on state. Its working principle will be explained in detail below.

[0048] Reference Figures 2-4 The two ends (end i and end j) of the second electrode 22 of the switching module K are connected in series between two nodes of the circuit. When the switching module K is in the on state, the electrical signal (such as the DATA signal) is transmitted from end i to end j. In other words, end i can be understood as the input end of the switching module K, and end j can be understood as the output end of the switching module K. Therefore, the first part 221 where end i is located is always at the same potential as the node it is connected to, while the potential of the second part 221 where end j is located depends on the on / off state of the switching module K.

[0049] Furthermore, the first electrode 21 is electrically connected to the control signal line 4. Therefore, the potential on the first electrode 21 is determined by the voltage of the control signal transmitted on the control signal line 4. Since the voltage of the first portion 221 of the second electrode 22 can be determined according to the electrical signal it is connected to, the electric field between the first electrode 21 and the first portion 221 of the second electrode 22 can be adjusted by adjusting the voltage of the control signal, thereby adjusting the state of the dielectric elastic part 23 and realizing the on / off control of the switch module K.

[0050] Reference Figure 3 When the control signal on control signal line 4 is disabled, the dielectric elastic part 23 is in its initial state, and there is a first gap h between the first portion 221 and the second portion 222 of the second electrode 22. The second portion 222 is in a suspended state. At this time, the interior of the second electrode 22 is in an open circuit state, the switch module K is turned off, and the electrical signal cannot be transmitted from end i to end j. (Refer to...) Figure 3 When the switch module K is turned off, since there is a gap between the first part 221 and the second part 222, the second electrode 22 is physically disconnected, and the leakage current is completely zero, which can completely solve all problems caused by leakage current.

[0051] Specifically, the initial state refers to the state when the dielectric elastic part 23 has not deformed, at which time there is a gap between the first part 221 and the second part 222. The formation of the gap will be explained later.

[0052] For example, the voltage of the control signal in the disabled state can be designed to have a small difference (the difference can even be 0) from the voltage on the first portion 221. In this way, the electric field between the first electrode 221 and the first portion 221 of the second electrode 22 is close to 0, the dielectric elastic portion 23 is in the initial state and has not been deformed, there is a gap between the first portion 221 and the second portion 222, and the interior of the second electrode 22 is in an open circuit state, so that the switch module K is turned off.

[0053] Reference Figure 5When the control signal on the control signal line 4 is in the enabled state, the dielectric elastic part 23 is in the first state, the first part 221 and the second part 222 are in contact. At this time, the i end and j end of the second electrode 22 are in a closed state, the second part 222 and the first part 221 are at the same potential, the switch module K is turned on, and the signal on the signal line is transmitted from the i end to the j end.

[0054] Specifically, in comparison Figure 5 and Figure 3 Along the first direction D1, the dielectric elastic part 23 is in the first state ( Figure 5 The projection range under the condition is greater than that of the dielectric elastic part 23 in the initial state. Figure 3 The projection range under the first state. That is, compared to the initial state, the size of the dielectric elastic portion 23 in the first state has expanded in the direction parallel to the plane of the substrate. For example, refer to Figure 3 and Figure 5 In the X direction, the length of the dielectric elastic portion 23 in the first state is X1, and the length of the dielectric elastic portion 23 in the initial state is X0, where X1 is greater than X0. In the Y direction, the length of the dielectric elastic portion 23 in the first state is Y1, and the length of the dielectric elastic portion 23 in the initial state is Y0, where Y1 is greater than Y0. It can be understood that the directions parallel to the plane of the substrate are not limited to the X and Y directions shown in the figure. In other directions parallel to the plane of the substrate, the size of the dielectric elastic portion 23 also expands.

[0055] Next refer to Figure 4 Since the projection range of the first portion 221 on the substrate 10 along the second direction D2 is larger than the projection range of the dielectric elastic portion 23 on the substrate 10 along the second direction D2, the first portion 221 covers the sidewall of the dielectric elastic portion 23 along the second direction D2. Since the second direction D2 is parallel to the plane of the substrate 10, when the dielectric elastic portion 23 expands in a direction parallel to the plane of the substrate, it can drive the first portion 221 to expand, so that it contacts the second portion 222, thereby closing the second electrode 22 and realizing the conduction control of the switch module K.

[0056] For example, the voltage of the control signal in the enabled state can be designed to have a large difference and opposite polarity from the voltage on the first portion 221. In this way, an electric field can be formed between the first electrode 21 and the first portion 221. Under the action of the electric field, positive and negative charges will be generated on the upper and lower surfaces of the dielectric elastic portion 23, respectively. The opposite charges on the upper and lower surfaces attract each other, and the like charges on the same surface repel each other. Electrostatic force or Maxwell stress is generated in the dielectric elastic portion 23, which can compress the dielectric elastic portion 23 in the first direction D1 and expand in the direction parallel to the plane of the substrate 10, causing the first portion 221 to contact the second portion 222, so that the second electrode 22 is closed, thereby realizing the conduction control of the switch module K.

[0057] Understandably, after the display panel is manufactured, the dielectric elastic part 23 is in the initial state, and there is a gap between the first part 221 and the second part 222. When the display panel is working, the dielectric elastic part 23 will switch between the initial state and the first state to realize the switching between the off state and the on state of the switch module K.

[0058] It should be noted that different pixel circuits use switching devices with different functions to control the on / off state of different signal transmission paths. The signal line connected in series with the second electrode 22 of any switching module K is determined by the role of the switching module K in the pixel circuit, and this embodiment of the invention does not limit this. Furthermore, the control signal connected to the first electrode 21 can be adaptively designed according to the signal on the signal line connected in series with the second electrode 22 to control the on / off state of the switching module. The following description will focus on specific pixel circuits.

[0059] In summary, the present invention, through the design of the pixel circuit of the display panel, includes the following switching module: along a first direction perpendicular to the plane of the substrate, the switching module includes a first electrode, a second electrode, and a dielectric elastic portion located between the first electrode and the second electrode. The second electrode is located on the side of the first electrode away from the substrate and is insulated from the first electrode. The second electrode includes a first portion and a second portion disposed on the same layer. The first electrode, the dielectric elastic portion, and the first portion overlap in projection along the first direction, while the dielectric elastic portion and the second portion do not overlap in projection along the first direction. The projection range of the dielectric elastic portion on the substrate along the second direction is greater than the projection range of the first electrode on the substrate along the second direction, and the projection range of the first portion on the substrate along the second direction is greater than the projection range of the dielectric elastic portion on the substrate along the second direction. The projection range of the direction is such that the first electrode is electrically connected to the control signal line that transmits the control signal. Thus, the state of the dielectric elastic module can be adjusted by regulating the voltage of the control signal, thereby controlling the on / off state of the switch module. Specifically, when the control signal is in the disabled state, the dielectric elastic part is in the initial state, with a first gap between the first and second parts, and the second part is in a suspended state, causing the switch module to be turned off. When the control signal is in the enabled state, the dielectric elastic part is in the first state, with the first and second parts in contact, and the first and second parts are at the same potential, realizing the conduction control of the switch module. Since the inside of the second electrode is in an open circuit state when the switch module is turned off, the possibility of leakage current can be eliminated, completely solving the problem caused by leakage current in the switching device.

[0060] Based on the above embodiments, referring to Figure 3 Optionally, along the direction (D2) from the first portion 221 to the second portion 222, the width of the first gap h is less than the maximum deformation of the dielectric elastic portion 23. In this way, it can be ensured that the deformation of the dielectric elastic portion 23 is sufficient to drive the first portion 221 to contact the second portion 222, thereby closing the second electrode 22 and realizing the conduction control of the switch module K.

[0061] Reference Figure 4 Optionally, the material of the dielectric elastic part 23 includes at least one of polyacrylate elastomer, polyurethane elastomer, and silicone rubber. These materials have the properties of fast response, high dielectric constant, and low elastic modulus, enabling them to quickly respond to the electric field between the first electrode 21 and the first section 221, causing the first section 221 to contact the second section 222, thus closing the second electrode 22 and achieving the conduction control of the switch module K.

[0062] In one specific embodiment, optionally, the dielectric elastic portion 23 is a polystyrene-b-butyl acrylate-b-polystyrene triblock copolymer with partially reduced graphene oxide added.

[0063] Optionally, when the control signal is in the disabled state, |V1-V2|≤Va; when the control signal is in the enabled state, |V1-V2|≥Vb, and the polarities of V1 and V2 are opposite; where V1 represents the voltage on the first electrode, V2 represents the voltage on the first segment, Va represents the first voltage threshold, Vb represents the second voltage threshold, and Va<Vb.

[0064] The specific values ​​of the first voltage threshold Va and the second voltage threshold Vb can be designed according to the specific material of the dielectric elastic part 23.

[0065] Specifically, the value of the first voltage threshold Va is relatively small. By designing |V1-V2|≤Va, the electric field between the first electrode 21 and the first section 221 can be very small, or even non-existent, which is insufficient to cause the dielectric elastic part 23 to deform. This ensures that there is a gap between the first section 221 and the second section 222, so that the inside of the second electrode 22 is in an open circuit state, ensuring the complete shutdown of the switch module K.

[0066] Specifically, the value of the second voltage threshold Vb is relatively large. Since the voltage V1 on the first electrode 21 and the voltage V2 on the first section 221 have opposite polarities and the difference between them is large, a large electric field can be generated between the first electrode 21 and the first section 221, causing the dielectric elastic part 23 to deform and drive the first section 221 to contact the second section 222, thereby closing the second electrode 22 and realizing the conduction control of the switch module K.

[0067] In one embodiment, optionally, Va≤3V, Vb≥10V.

[0068] Figure 6 yes Figure 1 Another schematic diagram of the sub-pixel structure in the provided display panel. Figure 7 yes Figure 6 The schematic diagram of the film structure of the pixel circuit in the sub-pixel is shown only with the example of all dielectric elastic parts in their initial state. Figure 8 yes Figure 7 A magnified structural diagram of the Q1 region. Figure 9 It is along Figure 7 A cross-sectional structural diagram taken from CC', combined with Figures 6-9As shown, optionally, the driving circuit layer 20 includes a first metal layer M1, a dielectric material layer 230, and a second metal layer M2. The dielectric material layer 230 is located on the side of the first metal layer M1 away from the substrate 10, and the second metal layer M2 is located on the side of the dielectric material layer 230 away from the substrate 10. The first electrode 21 is located on the first metal layer M1, the dielectric elastic portion 23 is located on the dielectric material layer 230, and the second electrode 22 is located on the second metal layer M2. The driving transistor T includes an active layer (poly), and the second metal layer M2 is located on the side of the active layer (poly) close to the substrate 10.

[0069] In the layout design of display panels, the film structure on the side of the active layer furthest from the substrate is more complex, involving various intersecting signal lines, such as... Figure 6 The initialization signal line Vref, the first power signal line ELVDD, and the data signal line Data are shown. The film structure of the active layer near the substrate is relatively simple. By setting the first metal layer M1 where the first electrode 21 is located, the dielectric material layer 230 where the dielectric elastic part 23 is located, and the second metal layer M2 where the second electrode 22 is located in the switch module K on the side of the active layer (poly) near the substrate 10, the design and fabrication difficulty can be reduced.

[0070] The following describes the improvements made to the traditional 7T1C pixel circuit by embodiments of the present invention. The 7T1C pixel circuit includes one driving transistor T and six switching transistors, such as... Figure 6 As shown, six optional switch modules can replace the six switch transistors in the original 7T1C pixel circuit. This configuration reduces the difficulty of layout design and panel fabrication.

[0071] In one embodiment, reference is made to Figure 7Optionally, the first metal layer M1 includes a first control signal line 41, a second control signal line 42, a third control signal line 43, and a fourth control signal line 44 arranged side by side in sequence; the dielectric material layer 230 includes a first dielectric elastic portion 231, a second dielectric elastic portion 232, a third dielectric elastic portion 233, a fourth dielectric elastic portion 234, a fifth dielectric elastic portion 235, and a sixth dielectric elastic portion 236. The first dielectric elastic portion 231 and the first control signal line 41 form a first overlapping region A1 along the first direction D1; the second dielectric elastic portion 232 and the fourth control signal line 44 form a second overlapping region A2 along the first direction D1; the third dielectric elastic portion 233 and the second control signal line 42 form a third overlapping region A3 along the first direction D1; the fourth dielectric elastic portion 234 and the second control signal line 42 form a fourth overlapping region A4 along the first direction D1; and the fifth dielectric elastic portion 235 and the third control signal line 43 form a fifth overlapping region A6 along the first direction D1. The overlapping region A5, the sixth dielectric elastic part 236 and the third control signal line 43 form the sixth overlapping region A6 along the first direction D1; the second metal layer M2 includes a first metal trace 51 and a second metal trace 52. Along the first direction D1, the first metal trace 51 simultaneously overlaps with the first overlapping region A1, the second overlapping region A2, the fourth overlapping region A4 and the sixth overlapping region A6, and the second metal trace 52 simultaneously overlaps with the third overlapping region A3 and the fifth overlapping region A5; when the dielectric elastic part 23 in the dielectric material layer 230 is in the initial state, the first metal trace 51 has a first break U1 and a fourth break U4 located between the first overlapping region A1 and the fourth overlapping region A4, and a sixth break U6 and a second break U2 located between the sixth overlapping region A6 and the second overlapping region A2, and the second metal trace 52 has a third break U3 and a fifth break U5 located between the third overlapping region A3 and the fifth overlapping region A5.

[0072] Combination Figure 7 and Figure 8In region Q1, a portion of the first control signal line 41 is multiplexed as the first electrode 21. This portion of the first control signal line 41 overlaps with the first dielectric elastic portion 231 projected along the first direction D1, forming a first overlapping region A1. The first metal trace 51 has a first break U1 near the first overlapping region A1. Along the extension direction of the first metal trace 51, a portion of the first metal trace 51 located on one side of the first break U1 overlaps with the first overlapping region A1. This portion of the first metal trace 51 serves as the first portion 221 of the second electrode 22. A portion of the first metal trace 51 located on the other side of the first break U1 does not overlap with the first overlapping region A1. This portion of the first metal trace 51 serves as the second portion 222 of the second electrode 22. The first break U1 refers to the first gap h between the first portion 221 and the second portion 222. Based on the above explanation, it is easy to understand that the structure of the first metal layer M1, the second metal layer M2, and the dielectric material layer 230 in region Q1 forms a switching module, specifically... Figure 6 The first switch module K1 in the middle.

[0073] Similarly, combining Figure 6 and Figure 7 As shown, the structure located in region Q2, consisting of the first metal layer M1, the second metal layer M2, and the dielectric material layer 230, forms... Figure 6 The second switch module K2 in the middle; the structure located in region Q3, which is the first metal layer M1, the second metal layer M2 and the dielectric material layer 230, forms Figure 6 The third switch module K3 in the middle; the structure located in region Q4, which is the first metal layer M1, the second metal layer M2 and the dielectric material layer 230, forms Figure 6 The fourth switch module K4 in the middle; the structure located in region Q5, which is the first metal layer M1, the second metal layer M2 and the dielectric material layer 230, forms Figure 6 The fifth switch module K5 in the middle; the structure located in region Q6, which is the first metal layer M1, the second metal layer M2 and the dielectric material layer 230, forms Figure 6 The sixth switch module K6 in the system.

[0074] Furthermore, in combination Figure 7 and Figure 9 Optionally, the orthographic projection of the active layer (poly) on the substrate 10 is located in a first region; the first region is the region enclosed by the orthographic projections of the second control signal line 42, the third control signal line 43, the first metal trace 51, and the second metal trace 52 on the substrate 10; the active layer (poly) includes a first end Z1 and a second end Z2, the first end Z1 overlaps with the first metal trace 51, and the second end Z2 overlaps with the second metal trace 52.

[0075] Specifically, one of the first end Z1 and the second end Z2 of the active layer (poly) corresponds to the source region, and the other corresponds to the drain region. This is achieved by placing the active layer within the area enclosed by the orthographic projections of the second control signal line 42, the third control signal line 43, the first metal trace 51, and the second metal trace 52 onto the substrate 10, and by positioning the active layer on the side of the second metal layer M2 away from the substrate 10. The first end Z1 of the active layer is connected to the first metal trace 51, and the second end Z2 of the active layer is connected to the second metal layer 52. Figure 6 The driving transistor T shown is electrically connected to the third switch module K3, the fourth switch module K4, the fifth switch module K5, and the sixth switch module K5, and no drilling is required, making the process simple.

[0076] In addition, combined Figure 7 and Figure 8 The driving circuit layer 20 further includes a third metal layer M3, a fourth metal layer M4, and a fifth metal layer M5. The third metal layer M3 can be used to set the gate g of the driving transistor T. In this embodiment, the gate g of the driving transistor T is also multiplexed as the bottom electrode e1 of the storage capacitor Cst. The fourth metal layer M4 can be used to set the top electrode e2 of the storage capacitor Cst and the initialization signal line Vref, which is connected to the first metal trace 51 via a via. The fifth metal layer M5 can be used to set the first power signal line ELVDD and the data signal line Data, which are respectively connected to the second metal trace 52 via holes. Furthermore, Figure 7 A via located between the sixth switch module K6 and the second switch module K2 is used to connect the anode of the light-emitting element 30. The cathode of the light-emitting element is electrically connected to the second power signal line ELVSS, which can be located, for example, in a non-display area. Understandably, the voltage on the first power signal line ELVDD is greater than the voltage on the second power signal line ELVSS.

[0077] Figure 10 yes Figure 6 Timing diagram of the mid-pixel circuit, combined with Figure 6 , Figure 7 and Figure 10Optionally, the first control signal line 41 and the fourth control signal line 44 are used to receive the first scan signal Scan1, the second control signal line 42 is used to receive the second scan signal Scan2, and the third control signal line 43 is used to receive the light emission control signal EM. The operation of the pixel circuit includes an initialization stage t1, a data writing stage t2, and a light emission stage t3. The first scan signal Scan1 is enabled in the initialization stage t1 and has a positive voltage polarity. The second scan signal Scan2 is enabled in the data writing stage t2 and has a negative voltage polarity. The light emission control signal EM is enabled in the light emission stage t3 and has a negative voltage polarity.

[0078] Specifically, based on the principles explained above, refer to... Figure 6 , Figure 7 and Figure 10 During the initialization phase t1, since the first scan signal Scan1 is enabled, the first control signal line 41 and the fourth control signal line 44 transmit the control signals under the enabled state. The first switch module K1 corresponding to the first control signal line 41 is turned on, and the second switch module K2 corresponding to the fourth control signal line 44 is turned on. Specifically, the first break U1 and the second break U2 in the first metal trace 51 are closed. In this way, on the one hand, the initialization signal on the initialization signal line Vref can be transmitted to the gate g of the driving transistor T through the first switch module K1 to initialize the gate potential of the driving transistor T. At the same time, the initialization signal on the initialization signal line Vref can be transmitted to the anode of the light-emitting element through the second switch module K2 to initialize the anode potential of the light-emitting element.

[0079] For example, the first portion of the second electrode in the first switch module K1 and the first portion of the second electrode in the second switch module K2 are both connected to the Vref signal line. The voltage of the initialization signal on the Vref signal line is typically -3.3V, meaning the voltage of the first portion of the second electrode is -3.3V. Therefore, during the initialization phase when the first switch module K1 and the second switch module K2 need to be turned on, the first scan signal Scan1 needs to have a high positive voltage, for example, greater than or equal to +7V. During the phase when the first switch module K1 and the second switch module K2 need to be turned off, the voltage difference between the first scan signal Scan1 and the initialization signal can be small, for example, -3.3V can be selected.

[0080] During the data writing phase t2, since the second scan signal Scan2 is enabled, the second control signal line 42 transmits the control signal in the enabled state. The third switch module K3 and the fourth switch module K4 corresponding to the second control signal line 42 are turned on. Specifically, the third break U3 in the second metal trace 52 and the fourth break U4 in the first metal trace 51 are closed. In this way, the data signal on the data signal line Data can be written to the gate of the driving transistor T through the third switch module K3, the driving transistor T and the fourth switch module K4, and the threshold compensation of the driving transistor T is completed at the same time.

[0081] For example, the first portion of the second electrode in the third switch module K3 is electrically connected to the data signal line data, and the voltage of the data signal is generally between +1 and +6V. The voltage of the first portion of the second electrode in the fourth switch module K4 is |Vth| lower than the voltage of the first portion of the second electrode in the third switch module K3 (|Vth| is the threshold voltage of the driving transistor, generally between 1.5V and 2V). Therefore, during the data writing phase where the third switch module K3 and the fourth switch module K4 need to be turned on, the second scan signal Scan2 needs to have a low negative voltage, for example, less than or equal to -9V. During the phase where the third switch module K3 and the fourth switch module K4 need to be turned off, the voltage difference between the second scan signal Scan2 and the data signal can be small, for example, an intermediate value of the data voltage, such as +2.5V.

[0082] During the light-emitting stage t3, since the light-emitting control signal EM is in the enabled state, the third control signal line 43 transmits the control signal in the enabled state. The fifth switch module K5 and the sixth switch module K6 corresponding to the third control signal line 43 are turned on. Specifically, the fifth break U5 in the second metal trace 52 and the sixth break U6 in the first metal trace 51 are closed, driving the transistor T to generate a driving current and flowing into the light-emitting element, driving the light-emitting element to emit light.

[0083] For example, the first portion of the second electrode in the fifth switch module K5 is electrically connected to the first power signal line ELVDD. The voltage of the ELVDD signal is typically +3V or +4.8V. The voltage of the first portion of the second electrode in the sixth switch module K6 is slightly lower than that of the first portion of the second electrode in the fifth switch module K5. Therefore, during the light-emitting phase when both the fifth switch module K5 and the sixth switch module K6 need to be turned on, the light-emitting control signal EM needs to have a low negative voltage (e.g., less than or equal to -7V). During the phase when both the fifth switch module K5 and the sixth switch module K6 need to be turned off, the optional light-emitting control signal EM can be selected with a voltage value slightly lower than ELVDD, such as +2V or +2.5V.

[0084] In summary, the above embodiments have provided a detailed explanation of the working principle and layout design of a specific pixel circuit. The following section provides further supplementary explanation of the structure of the display panel.

[0085] Reference Figure 9 Optionally, the display panel further includes a buffer layer 6, with the first electrode 21 located on the side of the buffer layer 6 away from the substrate 10. The driving transistor T includes an active layer (poly) that is in contact with the buffer layer 6. By providing the buffer layer 6 and making the active layer (poly) in contact with the active layer 6, the quality of the active layer 6 is improved, ensuring the performance of the driving transistor.

[0086] Figure 11 It is along Figure 7 Another cross-sectional structural diagram taken from CC', as shown below. Figure 11 As shown, when the first electrode 21 is located on the side of the buffer layer 6 away from the substrate 10, the display panel may optionally include a photodeformation structure 7. The buffer layer 6 has a first groove 61, and the photodeformation structure 7 is located in the first groove 61. The buffer layer 6 includes a first surface (top surface) in contact with the active layer (poly). The photodeformation structure 7 includes a second surface (top surface) and a third surface (bottom surface) opposite each other. The second surface is located on the side of the third surface away from the substrate 10, and the second surface and the first surface are flush. When the dielectric elastic portion 23 is in the initial state, along the first direction D1, the photodeformation structure 7 overlaps with the area where the first gap h is located, and does not overlap with the first portion 221 and the second portion 222.

[0087] Among them, the photodeformation structure 7 has the property of deforming under illumination of a specific wavelength and restoring its initial state in the absence of illumination, and is used to form the first gap h.

[0088] Specifically, refer to Figure 11 The display panel also includes a planarization layer 8, which is in contact with the first portion 221. When the dielectric elastic portion 23 is in the initial state, a microcavity R is formed between the planarization layer 8, the sidewall of the first portion 221, and the sidewall and extension surface of the second portion 222, so that there is a first gap h between the first portion 221 and the second portion 222.

[0089] The material forming the planarization layer is usually an organic material. By setting the photodeformation structure 7, a specific wavelength of light can be maintained on the photodeformation structure 7 during the preparation of the planarization layer 8, causing it to bulge out of the first groove 61 and expand upward. In this way, the photodeformation structure 7 can support the material forming the planarization layer 8 in the area where the microcavity is located, preventing the material forming the planarization layer 8 from filling the gap between the first part 221 and the second part 222 and their extensions. After the planarization layer 8 is prepared, the light can be turned off, allowing the photodeformation structure 7 to return to its original state and form the microcavity R, forming the first gap between the first part 221 and the second part 222.

[0090] For example, the optional photodeformation structure is an azophenyl polymer, such materials are sensitive to ultraviolet light.

[0091] It should be noted that, Figure 11 The illustration is based on the example where the width of the photodeformation structure 7 along the second direction D2 is equal to the width of the first gap h along the second direction D2. In other embodiments, the width of the photodeformation structure 7 along the second direction D2 can be slightly smaller than the width of the first gap h along the second direction D2, as long as the photodeformation structure 7 is within the projection range of the first gap h and does not overlap with the first portion 221 and the second portion 222.

[0092] It should also be noted that when the film layer below the first electrode 21 is another film layer instead of the buffer layer 6, a groove can be set in the corresponding film layer to accommodate the photodeformation structure 7. This embodiment of the invention does not limit this.

[0093] Figure 12 It is along Figure 7 Another cross-sectional structural diagram taken from CC', as shown below. Figure 12 As shown, optionally, the display panel further includes a first auxiliary extension layer 91, which is located on the side of the first electrode 21 near the substrate 10 and is in contact with the first electrode 21, the dielectric elastic portion 23 and the first portion 221 at least simultaneously.

[0094] The first auxiliary extension layer 91 serves as an extension buffer. By setting the first auxiliary extension layer 91 on the side of the first electrode 21 close to the substrate 10, the first electrode 21 is in contact with the first auxiliary extension layer 91, which can prevent the first electrode 21 from directly contacting the underlying film layer and causing film separation. In addition, by setting the first auxiliary extension layer 91 in contact with the dielectric elastic part 23 and the first segment 221, the extension buffering effect of the first auxiliary extension layer 91 can be used to improve the ductility of the dielectric elastic part 23 during deformation, ensure that the first segment 221 is in contact with the second segment 222, and ensure the quality of the display panel and the reliability of the switching module.

[0095] For example, the material of the first auxiliary layer 91 can be an organic material, such as PI. In addition, the planarization layer 8 is also formed of an organic material. By setting the planarization layer 8 to contact the first portion 221, the planarization layer 8 can also play an extension and buffering role, improve the extensibility of the first portion 221, and help the first portion 221 to contact the second portion 222.

[0096] Reference Figure 12 When the first electrode 21 is located on the side of the buffer layer 6 away from the substrate 10, optionally, the buffer layer 6 has a second groove 62, and the first auxiliary extension layer 91 is located within the second groove 62; the buffer layer 6 includes a first surface (top surface) in contact with the active layer (poly), and the first auxiliary extension layer 91 includes a fourth surface (top surface) in contact with the first electrode 21, with the first surface and the fourth surface being flush. This arrangement is beneficial for the switching module to be formed on a flat film layer, and also helps to reduce the step difference between the first portion 221 and the second portion 222. While ensuring that there is a gap in the horizontal direction between the first portion 221 and the second portion 222, the height of the microcavity R along the first direction D1 is reduced, thereby reducing the fabrication difficulty.

[0097] It should be noted that when the film layer below the first electrode 21 is another film layer instead of the buffer layer 6, a groove can be provided in the corresponding film layer to accommodate the first auxiliary extension layer 91. This embodiment of the invention does not limit this.

[0098] It should also be noted that, Figure 12 The illustration is based solely on the example that the first groove 61 and the second groove 62 are not connected. In other embodiments, the first groove 61 and the second groove 62 may also be connected, and this embodiment of the present invention does not limit this.

[0099] Figure 13 It is along Figure 7 Another cross-sectional structural diagram taken from CC', as shown below. Figure 13 As shown, in other embodiments, the buffer layer 6 may only include the second groove 62, within which a first auxiliary extension layer 91 is disposed. The first auxiliary extension layer 91 simultaneously contacts the first electrode 21, the dielectric elastic portion 23, and the first portion 221. This configuration increases the coverage area of ​​the first auxiliary extension layer 91, ensuring that the first auxiliary extension layer 91 is present along the path of deformation of the dielectric elastic portion 23, which is beneficial for further improving the reliability of the switching module.

[0100] In this embodiment, since the gap between the first portion 221 and the second portion 222 overlaps with the projection of the first auxiliary extension layer 91, the material forming the planarization layer 8 will fill the gap when the planarization layer 8 is prepared. However, a small gap between the first portion 221 and the second portion 222 is sufficient to ensure the switch module K is turned off. Therefore, laser processing can be used to remove the excess planarization layer between the sidewall of the first portion 221 and the sidewall and extension surface of the second portion 222 to form a microcavity, thereby forming a gap between the first portion 221 and the second portion 222.

[0101] Reference Figure 7 , Figure 8 As described above, optionally, a portion of the control signal line 4 is multiplexed as the first electrode 21.

[0102] Specifically, one control signal line 4 can correspond to at least one switch module K. When different switch modules K are electrically connected to the same control signal line 4, different parts of the control signal line 4 can be reused as the first electrode 21 of different switch modules K. This design can reduce the structural complexity of the pixel circuit, improve the compactness of the pixel circuit, and help reduce the layout area of ​​the pixel circuit.

[0103] Reference Figure 7 , Figure 8 As described above, optionally, the display panel also includes connecting traces (e.g., a first metal trace 51 and a second metal trace 52), and the second electrode 22 is disposed on the same layer as the connecting traces and integrally formed.

[0104] The connecting traces include the traces connected to the first portion 221 of the second electrode 22 and the traces connected to the second portion 222 of the second electrode 22. By setting the second electrode 22 and the connecting traces connected to it to be arranged in the same layer and integrally formed, the structural complexity of the pixel circuit can be reduced, the compactness of the pixel circuit can be improved, and the layout area of ​​the pixel circuit can be reduced.

[0105] Continue to refer to Figure 8 Optionally, in the second electrode 22, the orthographic projections of both the first portion 221 and the second portion 222 onto the substrate are straight lines; the first portion 221 overlaps with the projection of the control signal line 4 along the first direction D1, while the second portion 222 does not overlap with the projection of the control signal line 4 along the first direction D1. Specifically, the portion of the control signal line 4 that overlaps with the projection of the dielectric elastic portion 23 is the first electrode 21. In this embodiment, both the first portion 221 and the second portion 222 are set as straight lines, and the second direction D2 is parallel to the extension direction of the straight line. This design results in a simple wiring pattern, which helps to reduce the fabrication difficulty.

[0106] The top view shapes of the first portion 221 and the second portion 222 are not limited thereto. For example, Figure 14 This is a schematic diagram of the membrane structure of another switching module in the initial state provided by an embodiment of the present invention, as shown below. Figure 14 As shown, optionally, in the second electrode 22, the orthographic projection of the first portion 221 on the substrate 10 is linear, and the orthographic projection of the second portion 222 on the substrate 10 is n-shaped; the second portion 222 includes a first sub-portion 2221, a second sub-portion 2222, and a third sub-portion 2223 located between the first sub-portion 2221 and the second sub-portion 2222; along the extension direction of the control signal line 4, the first sub-portion 2221 and the second sub-portion 2222 are respectively disposed on opposite sides of the first portion 221, and the first portion 221, the first sub-portion 2221, and the second sub-portion 2222 all overlap with the projection of the control signal line 4 along the first direction D1; the third sub-portion 2223 does not overlap with the projection of the control signal line 4 along the first direction D1.

[0107] Specifically, in this embodiment, the direction in which the first portion 221 points to the second portion 222, i.e., the second direction D2, generally refers to any direction parallel to the plane where the substrate 10 is located, for example... Figure 14 The X and Y directions are shown. Figure 14 As shown, the projection range of the dielectric elastic portion 23 on the substrate 10 along the second direction D2 is greater than the projection range of the first electrode 21 on the substrate 10 along the second direction D2, and the projection range of the first portion 221 on the substrate 10 along the second direction D2 is greater than the projection range of the dielectric elastic portion 23 on the substrate 10 along the second direction D2.

[0108] Figure 15 This is a schematic diagram of the membrane structure of another switching module in the first state provided by an embodiment of the present invention, combined with... Figure 14 and Figure 15 As can be seen, since the first part 221 is linear and the second part 222 is n-shaped, the first gap between the first part 221 and the second part 222 is n-shaped. Thus, when the dielectric elastic part 23 expands along the second direction D2 (such as the X and Y directions) under the electric field of the first electrode 21 and the first part 221, the first part 21 can also extend along the second direction D2 (such as the X and Y directions). Therefore, when the first part 221 and the second part 222 come into contact, the contact area between them can be significantly increased, which is beneficial to reducing the switching resistance of the switching module.

[0109] Furthermore, referring to Figure 14 and Figure 15When a portion of the control signal line 4 is multiplexed as the first electrode 21 and the second portion 222 is n-type, the first portion 221 and the dielectric elastic portion 23 have an extension path along the X direction. Since the projection range of the first portion 221 in the X direction is greater than the extension range of the dielectric elastic portion 23 in the X direction, there is a risk of short circuit between the first portion 221 and the control signal line 4. To avoid this problem and ensure the normal operation of the switching module, the following two solutions can be adopted.

[0110] As a feasible implementation method, Figure 16 It is along Figure 14 A schematic diagram of a cross-sectional structure taken from LL', combined with Figure 14 and Figure 16 As shown, optionally, the control signal line 4 includes a first trace portion 401, a second trace portion 402, and a third trace portion 403 located between the first trace portion 401 and the second trace portion 402; the third trace portion 403 is adjacent to the first trace portion 401 and the second trace portion 402 respectively; when the dielectric elastic portion 23 is in the initial state, the third trace portion 403 is in contact with the dielectric elastic portion 23, and the third trace portion 403 is not in contact with the first portion 221, at least a portion of the first trace portion 401 and at least a portion of the second trace portion 221 are in contact. 402 are not in contact with the dielectric elastic portion 23. The overlapping area of ​​the first sub-section 2221 and the control signal line 4 is located in the area where the first trace section 401 is located, and the overlapping area of ​​the second sub-section 2222 and the control signal line 4 is located in the area where the second trace section 402 is located. The control signal line 4 includes a fifth surface F5 and a sixth surface F6. The fifth surface F5 is located on the side of the sixth surface F6 away from the substrate 10. An oxide layer is formed on the fifth surface F5 in the area where the first trace section 401 and the second trace section 402 are located (shown in bold).

[0111] Wherein, at least a portion of the first trace portion 401 and at least a portion of the second trace portion 402 are not in contact with the dielectric elastic portion 23. Specifically, for the first trace portion 401, the entire first trace portion 401 may be completely not in contact with the dielectric elastic portion 23 (e.g., Figure 16 Alternatively, a portion of the first trace 401 may contact the dielectric elastic portion 23, while another portion of the first trace 401 may not contact the dielectric elastic portion 23, as shown in the reference. Figure 17 As shown along Figure 14 Another cross-sectional structural diagram taken from LL'. Similarly, for the second routing section 402, specifically, the entire second routing section 402 can be completely non-contact with the dielectric elastic section 23 (e.g., Figure 16Alternatively, a portion of the second trace 402 may contact the dielectric elastic portion 23, while another portion of the second trace 402 may not contact the dielectric elastic portion 23. The positional relationship between the first trace 401, the second trace 402, and the dielectric elastic portion 23 may be the same or different; this embodiment of the invention does not limit this.

[0112] Reference Figure 16 and Figure 17 In this embodiment, an oxide layer is formed on the upper surface of the control signal line 4 in the area where the first routing portion 401 and the second routing portion 402 are located. Therefore, the upper surface of the control signal line 4 in this area is an insulating surface. Although the first portion 221, the first sub-portion 2221, and the second sub-portion 2222 are in contact with the control signal line 4 in this area, they can still be insulated from each other to avoid short circuits. The third routing portion 403 of the control signal line 4 is in contact with the dielectric elastic portion 23 but not with the first portion 221. Therefore, at least a portion of the third routing portion 403 can be reused as the first electrode 21 to ensure the normal operation of the switching module.

[0113] For example, the oxide layer on the upper surface of the control signal line 4 can be formed by surface treatment, which can ensure the flatness of the control signal line 4 and avoid affecting the deformation activity of the dielectric elastic part 23.

[0114] For example, the gap between the first portion 221 and the first sub-portion 2221 and the second sub-portion 2222 can be set as described above. For example, after the planarization layer is formed, the excess planarization layer between the sidewall of the first portion 221 and the sidewall and the extended surface of the second portion 222 can be removed by laser processing to form the gap.

[0115] As another feasible implementation method Figure 18 It is along Figure 14 Another cross-sectional structural diagram taken from LL', as shown below. Figure 18As shown, optionally, the control signal line 4 includes a main body 404 and a protrusion 405, with the protrusion 404 located on the side of the main body 405 away from the substrate 10; the display panel also includes a first insulating layer 901, with the first insulating layer 901 located on the side of the main body 404 away from the substrate 10; the protrusion 405 includes a seventh surface F7 and an eighth surface F8 (F8 is a virtual surface), with the seventh surface F7 located on the side of the eighth surface F8 away from the substrate 10; the first insulating layer 901 includes a ninth surface F9 and a tenth surface F10, with the ninth surface F9 located on the side of the tenth surface F10 away from the substrate 10; the seventh surface F7 and the ninth surface F9 are flush; the dielectric elastic portion 23 is located on the side of the protrusion 405 away from the substrate 10 and is in contact with both the protrusion 405 and the first insulating layer 901; the first portion 221, the first sub-portion 2221, and the second sub-portion 2222 are all in contact with the first insulating layer 901.

[0116] Specifically, this embodiment improves the structure of the control signal line 4, giving it a main body 404 and a protrusion 405. The step difference between the protrusion 405 and the main body 404 is filled by the first insulating layer 901, making the upper surfaces of the protrusion 405 and the first insulating layer 901 flush. Furthermore, the dielectric elastic part 23 is provided to contact both the protrusion 405 and the first insulating layer 901. Additionally, the first branch 221, the first sub-branch 2221, and the second sub-branch 2222 are all in contact with the first insulating layer 901. This ensures the insulation between the first branch 221, the first sub-branch 2221, and the second sub-branch 2222 and the control signal line 4, guaranteeing the normal operation of the switching module. It also allows the deformation of the dielectric elastic part along the X direction to occur on a flat film layer, without affecting the deformation of the dielectric elastic part 23.

[0117] Continue to refer to Figure 18 Optionally, the first insulating layer 901 includes a second auxiliary extension layer 92, and at least the first portion 221 is in contact with the second auxiliary extension layer 92; the material of the second auxiliary extension layer 92 is an organic material.

[0118] For example, Figure 18 The illustration is based on the example where the entire first insulating layer 901 is the second auxiliary extension layer 92, i.e., entirely formed of organic material. In other embodiments, refer to... Figure 19 As shown along Figure 14 Another cross-sectional structural schematic diagram taken from LL' shows that the first insulating layer 901 may include a first insulating portion 9011 and a second insulating portion 9022. The second insulating portion 9022 is located on the side of the first insulating portion 9011 away from the protrusion 405. Optionally, the first insulating portion 9011 can be a second auxiliary extension layer 92, formed of organic material, and the second insulating portion 9022 can be formed of inorganic material.

[0119] In this embodiment, by providing a first insulating layer 901 including a second auxiliary extension layer 92 formed of organic material, the extension and buffering effect of the second auxiliary extension layer 92 can be used to improve the ductility of the dielectric elastic part 23 during deformation, ensuring that the first part 221 contacts the first sub-part 221 and the second sub-part 222, thus ensuring the quality of the display panel and the reliability of the switching module.

[0120] For example, the gap between the first portion 221 and the first sub-portion 2221 and the second sub-portion 2222 can be formed as described above. For example, after forming the planarization layer, the excess planarization layer between the sidewall of the first portion 221 and the sidewall and the extended surface of the second portion 222 can be removed by laser processing to form the gap. Alternatively, a groove can be provided in the first insulating layer 901 corresponding to the area where the gap is located to accommodate the photodeformation structure. The photodeformation structure is used to assist in forming the gap between the first portion 221 and the first sub-portion 2221 and the second sub-portion 2222.

[0121] Based on the same inventive concept, embodiments of the present invention also provide a method for preparing a display panel, used to prepare the display panel provided in any embodiment of the present invention. Figure 20 This is a schematic flowchart of a method for manufacturing a display panel according to an embodiment of the present invention, as shown below. Figure 20 As shown, the preparation method includes:

[0122] S101, Provide substrate.

[0123] S102. A driving circuit layer is formed on one side of the substrate; the driving circuit layer includes a pixel circuit, the pixel circuit includes a driving transistor and at least one switching module, the switching module is coupled to the driving transistor; along a first direction, the switching module includes a first electrode, a second electrode and a dielectric elastic portion located between the first electrode and the second electrode, the second electrode is located on the side of the first electrode away from the substrate and is insulated from the first electrode; the first direction is perpendicular to the plane of the substrate; the second electrode includes a first portion and a second portion disposed in the same layer; the first electrode, the dielectric elastic portion and the first portion overlap in projection along the first direction, the dielectric elastic portion and the second portion do not overlap in projection along the first direction; the projection range of the dielectric elastic portion on the substrate along the second direction is greater than the projection range of the first electrode on the substrate along the second direction, the projection range of the first portion on the substrate along the second direction is greater than the projection range of the dielectric elastic portion on the substrate along the second direction; the second direction is the direction from the first portion to the second portion and is parallel to the plane of the substrate; the first electrode is electrically connected to a control signal line.

[0124] The control signal line is used to transmit control signals. When the control signal is disabled, the dielectric elastic part is in the initial state, there is a first gap between the first part and the second part, and the second part is suspended. When the control signal is enabled, the dielectric elastic part is in the first state, the first part and the second part are in contact, and the first part and the second part are at the same potential.

[0125] Based on the above explanation, in the display panel prepared by the above method, the switching devices in the pixel circuit can be physically turned off when turned off, eliminating the possibility of leakage current. This can solve various problems caused by leakage current in the switching devices and improve the quality of the display panel.

[0126] The following is based on Figure 11 Taking the displayed panel structure as an example, the fabrication process of the driving circuit layer is explained in detail. For example, Figures 21-30 Is with Figure 11 A schematic diagram of the manufacturing process of a corresponding display panel, such as... Figures 21-30 As shown, optionally, a driving circuit layer is formed on one side of the substrate, including the following steps:

[0127] (1) As Figure 21 As shown, a buffer layer 6 is formed on one side of the substrate 10, and a first groove 61 is formed in the buffer layer 6.

[0128] For example, the buffer layer 6 can be a double-layer structure, with the bottom layer material being SiN. x The top layer material is SiO x The depth of the first groove 61 should be less than the thickness of the buffer layer 6.

[0129] (2) Figure 22 As shown, a photodeformation structure 7 is formed in the first groove 61.

[0130] Alternatively, photodeformable particles and an elastic substrate can be mixed to disperse the photodeformable particles in the elastic substrate to form a precursor solution. Then, the precursor solution is fabricated in the first groove using an inkjet printing process, followed by a thermosetting process to form a photodeformable structure.

[0131] In addition, refer to Figure 12 In other embodiments, after forming the photodeformation structure 7, a second groove 62 may be formed in the buffer layer 6, and a first auxiliary extension layer 91 may be formed within the second groove 62. The first auxiliary extension layer 91 may be fabricated within the second groove 62 using a coating process.

[0132] (3) Figure 23 As shown, a first metal layer M1 is formed on the side of the buffer layer 6 away from the substrate 10, and the first metal layer M1 is subjected to a first patterning process to obtain the first electrode 21.

[0133] For example, the first patterning process can employ photolithography and dry / wet etching processes.

[0134] (4) Figure 24 As shown, a transition layer 3 is formed on the side of the buffer layer 6 away from the substrate 10, and the transition layer 3 is subjected to a second patterning process to form a first opening 301; the first opening 301 exposes the first electrode 21; the height of the transition layer 3 is greater than the height of the first electrode 21.

[0135] For example, the material of the transition layer 3 can be SiN. x The second patterning process can be achieved using photolithography and dry / wet etching processes.

[0136] (5) Figure 25 As shown, a dielectric elastic portion 23 is formed within the first opening 301, and the transition layer 3 is removed.

[0137] Optionally, a fully mixed composite latex can be prepared from a partially reduced graphene oxide polystyrene-b-butyl polyacrylate-b-polystyrene triblock copolymer. The composite latex is fabricated in the first opening 301 using an inkjet printing process, and the moisture is evaporated at 20–50°C. Then, it is dried and cooled at 60–100°C and -0.1 MPa to -0.01 MPa to obtain the dielectric elastic part 23.

[0138] For example, a dry etching process can be used to remove the transition layer.

[0139] (6) Figure 26 As shown, a second metal layer M2 is formed on the side of the dielectric elastic portion 23 away from the substrate 10, and the second metal layer M2 is subjected to a third patterning process to obtain the second electrode 22.

[0140] For example, the third patterning process can employ photolithography and dry / wet etching processes. (See reference...) Figure 7 After the third patterning process, a first metal trace 51 and a second metal trace 52 are formed in the second metal layer M2. A portion of the first metal trace 51 and the second metal trace 52 serve as the second electrode in the switch module.

[0141] (7) Figure 27 As shown, device structures such as driving transistors and storage capacitors, as well as signal line structures such as the first power signal line ELVDD, are formed on the second metal layer M2. Adjacent metal layers are separated by dielectric layers, and metal layers of different types are electrically connected by drilling.

[0142] (8) Figure 28As shown, the photodeformation structure 7 is illuminated so that the photodeformation structure 7 extends in a direction away from the substrate 10.

[0143] The elastic substrate of the photodeformable structure can be transparent and possess elastic recovery properties. The photodeformable particles in the photodeformable structure are sensitive to light of a specific wavelength (e.g., ultraviolet light). When light of that specific wavelength irradiates the photodeformable structure, the structure deforms, protruding from the first groove 61 and expanding within the gap between the first portion 221 and the second portion 222 and their extended surfaces. For example, the photodeformable particles can be, for instance, an azophenyl polymer.

[0144] (9) such as Figure 29 As shown, while maintaining illumination, a planarization layer 8 is formed on the side of the second metal layer M2 away from the substrate 10; the planarization layer 8 is in contact with the first portion 221 of the second electrode 22.

[0145] By maintaining illumination, the photodeformation structure 7 can be used to support the forming material of the planarization layer 8 until the planarization layer 8 is formed.

[0146] (10) such as Figure 30 As shown, the light is turned off so that the photodeformation structure 7 retracts into the first groove 61, forming a microcavity R between the planarization layer 8, the sidewall of the first portion 221, and the sidewall and extension surface of the second portion 222.

[0147] After the light is turned off, the photodeformation structure 7 returns to its original state, thereby forming a microcavity, creating a gap between the first part 221 and the second part 222.

[0148] The method for forming the microcavity in the aforementioned driving circuit layer is not unique. Alternatively, instead of using a photo-induced deformation structure, after forming the planarization layer, the excess planarization layer between the sidewalls of the first portion 221 and the sidewalls and their extended surfaces of the second portion 222 can be removed by laser processing to form the microcavity.

[0149] Based on the same inventive concept, embodiments of the present invention also provide a display device. For example, Figure 31 This is a schematic diagram of the structure of a display device provided in an embodiment of the present invention, such as... Figure 31 As shown, the display device 200 includes the display panel 100 provided in any of the above embodiments, and therefore has the same beneficial effects as the above display panel. The similarities can be found in the descriptions of the above embodiments, and will not be repeated here. The display device 200 can be an LED display device. Furthermore, the display device 200 provided in the embodiments of the present invention can be... Figure 31The mobile phone shown can also be any electronic product with display function, including but not limited to the following categories: television, laptop, desktop monitor, tablet computer, digital camera, smart bracelet, smart glasses, in-vehicle display, medical equipment, industrial control equipment, touch interactive terminal, etc. The embodiments of the present invention do not make any special limitations on this.

[0150] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A display panel, characterized in that, include: Substrate, A driving circuit layer is located on one side of the substrate; the driving circuit layer includes a pixel circuit, the pixel circuit includes a driving transistor and at least one switching module, the switching module being coupled to the driving transistor; Along a first direction, the switching module includes a first electrode, a second electrode, and a dielectric elastic portion located between the first electrode and the second electrode. The second electrode is located on the side of the first electrode away from the substrate and is insulated from the first electrode. The first direction is perpendicular to the plane of the substrate. The second electrode includes a first portion and a second portion disposed in the same layer; the first electrode, the dielectric elastic portion, and the first portion overlap when projected along the first direction, while the dielectric elastic portion and the second portion do not overlap when projected along the first direction; the projection range of the dielectric elastic portion on the substrate along the second direction is greater than the projection range of the first electrode on the substrate along the second direction, and the projection range of the first portion on the substrate along the second direction is greater than the projection range of the dielectric elastic portion on the substrate along the second direction; the second direction is the direction from the first portion to the second portion, and is parallel to the plane of the substrate; The first electrode is electrically connected to the control signal line, which is used to transmit control signals. When the control signal is in an enabled state, the dielectric elastic part is in an initial state, with a first gap between the first part and the second part, and the second part is in a suspended state. When the control signal is in an enabled state, the dielectric elastic part is in a first state, with the first part and the second part in contact, and the first part and the second part being at the same potential.

2. The display panel according to claim 1, characterized in that, Along the first direction, the projection range of the dielectric elastic portion in the first state is greater than the projection range of the dielectric elastic portion in the initial state.

3. The display panel according to claim 1, characterized in that, When the control signal is in the disabled state, |V1-V2|≤Va; When the control signal is enabled, |V1-V2|≥Vb, and the polarities of V1 and V2 are opposite; Where V1 represents the voltage on the first electrode, V2 represents the voltage on the first segment, Va represents the first voltage threshold, Vb represents the second voltage threshold, and Va < Vb.

4. The display panel according to claim 3, characterized in that, Va≤3V, Vb≥10V.

5. The display panel according to claim 1, characterized in that, The driving transistor includes an active layer, and the display panel further includes a buffer layer. The first electrode is located on the side of the buffer layer away from the substrate, and the active layer is in contact with the buffer layer.

6. The display panel according to claim 5, characterized in that, The display panel further includes a photodeformation structure, the buffer layer has a first groove, and the photodeformation structure is located in the first groove; The buffer layer includes a first surface in contact with the active layer, and the photodeformation structure includes a second surface and a third surface opposite each other, the second surface being located on the side of the third surface away from the substrate, and the second surface and the first surface being flush. When the dielectric elastic portion is in the initial state, along the first direction, the photodeformation structure overlaps with the region where the first gap is located, but does not overlap with either the first portion or the second portion.

7. The display panel according to claim 5, characterized in that, The display panel further includes a first auxiliary extension layer, which is located on the side of the first electrode near the substrate and is in contact with at least the first electrode, the dielectric elastic portion, and the first portion simultaneously.

8. The display panel according to claim 7, characterized in that, The buffer layer has a second groove, and the first auxiliary extension layer is located within the second groove; The buffer layer includes a first surface in contact with the active layer, and the first auxiliary extension layer includes a fourth surface in contact with the first electrode, the first surface and the fourth surface being flush.

9. The display panel according to claim 1, characterized in that, The display panel further includes a planarization layer, which is in contact with the first portion; When the dielectric elastic portion is in the initial state, a microcavity is formed between the planarization layer, the sidewall of the first portion, and the sidewall and extension surface of the second portion.

10. The display panel according to claim 1, characterized in that, A portion of the control signal line is multiplexed as the first electrode.

11. The display panel according to claim 10, characterized in that, In the second electrode, the orthographic projections of both the first portion and the second portion onto the substrate are linear. The first portion overlaps with the control signal line projected along the first direction, while the second portion does not overlap with the control signal line projected along the first direction.

12. The display panel according to claim 10, characterized in that, In the second electrode, the orthographic projection of the first portion onto the substrate is linear, and the orthographic projection of the second portion onto the substrate is n-shaped; The second portion includes a first sub-portion, a second sub-portion, and a third sub-portion located between the first sub-portion and the second sub-portion; along the extension direction of the control signal line, the first sub-portion and the second sub-portion are disposed on opposite sides of the first portion, and the first portion, the first sub-portion, and the second sub-portion all overlap with the control signal line projected along the first direction; the third sub-portion does not overlap with the control signal line projected along the first direction.

13. The display panel according to claim 12, characterized in that, The control signal line includes a first routing section, a second routing section, and a third routing section located between the first routing section and the second routing section; the third routing section is adjacent to the first routing section and the second routing section respectively; When the dielectric elastic portion is in the initial state, the third trace portion is in contact with the dielectric elastic portion, and the third trace portion is not in contact with the first portion; at least a portion of the first trace portion and at least a portion of the second trace portion are not in contact with the dielectric elastic portion; the overlap area between the first sub-section and the control signal line is located within the area where the first trace portion is located, and the overlap area between the second sub-section and the control signal line is located within the area where the second trace portion is located; The control signal line includes a fifth surface and a sixth surface, the fifth surface being located on the side of the sixth surface away from the substrate; an oxide layer is formed on the fifth surface in the regions where the first trace portion and the second trace portion are located.

14. The display panel according to claim 12, characterized in that, The control signal line includes a main body and a protrusion, the protrusion being located on the side of the main body away from the substrate; The display panel further includes a first insulating layer located on the side of the main body away from the substrate. The protrusion includes a seventh surface and an eighth surface, with the seventh surface located on the side of the eighth surface away from the substrate. The first insulating layer includes a ninth surface and a tenth surface, with the ninth surface located on the side of the tenth surface away from the substrate. The seventh surface and the ninth surface are flush. The dielectric elastic portion is located on the side of the protrusion away from the substrate, and is in contact with both the protrusion and the first insulating layer; The first section, the first sub-section, and the second sub-section are all in contact with the first insulating layer.

15. The display panel according to claim 14, characterized in that, The first insulating layer includes a second auxiliary extension layer, and at least the first portion is in contact with the second auxiliary extension layer; The material of the second auxiliary extension layer is an organic material.

16. The display panel according to claim 1, characterized in that, The display panel also includes connecting traces, and the second electrode is disposed on the same layer as the connecting traces and integrally formed.

17. The display panel according to claim 1, characterized in that, The driving circuit layer includes a first metal layer, a dielectric material layer, and a second metal layer. The dielectric material layer is located on the side of the first metal layer away from the substrate, and the second metal layer is located on the side of the dielectric material layer away from the substrate. The first electrode is located on the first metal layer, the dielectric elastic portion is located on the dielectric material layer, and the second electrode is located on the second metal layer. The driving transistor includes an active layer, and the second metal layer is located on the side of the active layer close to the substrate.

18. The display panel according to claim 17, characterized in that, The first metal layer includes a first control signal line, a second control signal line, a third control signal line, and a fourth control signal line arranged in parallel. The dielectric material layer includes a first dielectric elastic portion, a second dielectric elastic portion, a third dielectric elastic portion, a fourth dielectric elastic portion, a fifth dielectric elastic portion, and a sixth dielectric elastic portion. The first dielectric elastic portion and the first control signal line form a first overlapping region along the first direction. The second dielectric elastic portion and the fourth control signal line form a second overlapping region along the first direction. The third dielectric elastic portion and the second control signal line form a third overlapping region along the first direction. The fourth dielectric elastic portion and the second control signal line form a fourth overlapping region along the first direction. The fifth dielectric elastic portion and the third control signal line form a fifth overlapping region along the first direction. The sixth dielectric elastic portion and the third control signal line form a sixth overlapping region along the first direction. The second metal layer includes a first metal trace and a second metal trace. Along the first direction, the first metal trace simultaneously overlaps with the first overlapping region, the second overlapping region, the fourth overlapping region and the sixth overlapping region, and the second metal trace simultaneously overlaps with the third overlapping region and the fifth overlapping region. When the dielectric elastic portion in the dielectric material layer is in the initial state, the first metal trace has a first break and a fourth break located between the first overlapping region and the fourth overlapping region, and a sixth break and a second break located between the sixth overlapping region and the second overlapping region, and the second metal trace has a third break and a fifth break located between the third overlapping region and the fifth overlapping region.

19. The display panel according to claim 18, characterized in that, The first control signal line and the fourth control signal line are used to receive the first scan signal, the second control signal line is used to receive the second scan signal, and the third control signal line is used to receive the light emission control signal; The operation of the pixel circuit includes an initialization stage, a data writing stage, and a light emission stage in sequence; the first scanning signal is enabled in the initialization stage and has a positive voltage polarity; the second scanning signal is enabled in the data writing stage and has a negative voltage polarity; the light emission control signal is enabled in the light emission stage and has a negative voltage polarity.

20. The display panel according to claim 18, characterized in that, The orthogonal projection of the active layer onto the substrate is located within a first region; the first region is the area enclosed by the orthogonal projections of the second control signal line, the third control signal line, the first metal trace, and the second metal trace onto the substrate. The active layer includes a first end and a second end, the first end being connected to the first metal trace, and the second end being connected to the second metal trace.

21. The display panel according to claim 1, characterized in that, Along the direction from the first portion to the second portion, the width of the first gap is less than the maximum deformation of the dielectric elastic portion.

22. The display panel according to claim 1, characterized in that, The material of the dielectric elastic part includes at least one of polyacrylate elastomer, polyurethane elastomer, and silicone rubber.

23. A method for manufacturing a display panel, characterized in that, include: Provide substrate; A driving circuit layer is formed on one side of the substrate; The driving circuit layer includes a pixel circuit, which includes a driving transistor and at least one switching module. The switching module is coupled to the driving transistor. Along a first direction, the switching module includes a first electrode, a second electrode, and a dielectric elastic portion located between the first electrode and the second electrode. The second electrode is located on the side of the first electrode away from the substrate and is insulated from the first electrode. The first direction is perpendicular to the plane of the substrate. The second electrode includes a first portion and a second portion disposed on the same layer. The first electrode, the dielectric elastic portion, and the first portion overlap when projected along the first direction, while the dielectric elastic portion and the second portion do not overlap when projected along the first direction. The projection range of the dielectric elastic portion on the substrate along a second direction is greater than the projection range of the first electrode on the substrate along the second direction, and the projection range of the first portion on the substrate along the second direction is greater than the projection range of the dielectric elastic portion on the substrate along the second direction. The second direction is the direction from the first portion to the second portion and is parallel to the plane of the substrate. Wherein, the first electrode is electrically connected to the control signal line, which is used to transmit control signals; when the control signal is in an enabled state, the dielectric elastic part is in an initial state, there is a first gap between the first part and the second part, and the second part is in a suspended state; when the control signal is in an enabled state, the dielectric elastic part is in a first state, the first part and the second part are in contact, and the first part and the second part are at the same potential.

24. The preparation method according to claim 23, characterized in that, A driving circuit layer is formed on one side of the substrate, comprising: A buffer layer is formed on one side of the substrate; A first groove is formed in the buffer layer, and a photodeformation structure is formed within the first groove; A first metal layer is formed on the side of the buffer layer away from the substrate, and the first metal layer is subjected to a first patterning process to obtain the first electrode; A transition layer is formed on the side of the buffer layer away from the substrate, and the transition layer is subjected to a second patterning process to form a first opening; the first opening exposes the first electrode; the height of the transition layer is greater than the height of the first electrode; The dielectric elastic portion is formed within the first opening, and the transition layer is removed; A second metal layer is formed on the side of the dielectric elastic portion away from the substrate, and the second metal layer is subjected to a third patterning process to obtain the second electrode; The photodeformation structure is illuminated to cause it to extend in a direction away from the substrate. While maintaining the illumination, a planarization layer is formed on the side of the second metal layer away from the substrate; the planarization layer contacts the first portion of the second electrode; Turning off the light causes the photodeformation structure to retract into the first groove, forming a microcavity between the planarization layer, the sidewall of the first portion, and the sidewall and extension surface of the second portion.

25. A display device, characterized in that, Includes the display panel as described in any one of claims 1-22.

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