Fixture for grinding and polishing the ceramic surface of an electrostatic chuck

Abstract

The present invention provides a fixture for electrostatic chuck ceramic surface grinding and polishing, which includes: a fixture assembly and a lifting assembly, the fixture assembly is composed of a chassis and a support plate, the top edge of the support plate is provided with a surrounding edge, the interior of the surrounding edge is provided with an adjustment mechanism, the top surface of the support plate is provided with an adsorption mechanism, the adjustment assembly is distributed correspondingly to the adjustment mechanism, the lifting assembly is internally movably sleeved with a positioning assembly, and the surface of the support plate is rotatably connected with a positioning mechanism. The present application adopts the combination of vacuum adsorption and clamping positioning to achieve the fixation of the electrostatic chuck ceramic sheet, while achieving stable clamping through the fixture, utilizing the positioning assembly to facilitate the rapid loading and unloading of the ceramic sheet, and achieving the lifting of the ceramic sheet after processing for subsequent removal, and utilizing the positioning assembly to control the rotation of the clamping rod for positioning during the placement process and subsequent clamping and fixing, and utilizing the rotation of the positioning assembly to achieve the sequential expansion of the clamping rod, thereby improving the performance of the fixture.

Description

Technical Field

[0001] The invention relates to a fixture used for grinding and polishing the surface of electrostatic chuck ceramics, belonging to the technical field of electrostatic chuck processing. Background Art

[0002] An electrostatic chuck is a device that uses the electrostatic effect to adsorb and hold objects. Its core principle is to generate an electrostatic field inside the chuck, creating an electrostatic attraction between the chuck surface and the object to be adsorbed, thereby firmly adsorbing the object to the chuck. The ceramic surface of the electrostatic chuck is the working surface of the chuck or the part that comes into direct contact with the adsorbed object. It is made of ceramic material. Ceramic materials are widely used in various industrial and scientific fields due to their unique physical and chemical properties, such as high hardness, high wear resistance, good insulation, and chemical stability. The high hardness of ceramic gives it excellent wear resistance and can keep the chuck surface flat and smooth for a long time, extending the service life of the chuck. Ceramics are an excellent insulating material that can effectively isolate the electrostatic field and prevent charge leakage, thereby enhancing the adsorption capacity of the electrostatic chuck. Ceramics have excellent stability to a variety of chemical substances and are not prone to chemical reactions with the adsorbed object, ensuring the stability and reliability of the chuck in various environments. Special treatment of the ceramic surface can further improve its electrostatic adsorption properties, such as increasing the surface roughness to improve the adsorption force.

[0003] The ceramic surface of the electrostatic chuck is a high-performance working surface material with excellent properties such as wear resistance, insulation, and chemical stability. It is suitable for various application scenarios that require high-precision and high-stability adsorption. In order to improve its electrostatic adsorption performance, the chuck surface needs to be ground and polished. Therefore, the ceramic piece of the electrostatic chuck needs to be clamped and fixed before being ground and polished before assembly.

[0004] Most of the existing electrostatic suction cup ceramic pieces are fixed by vacuum adsorption, but it is difficult to accurately position them before fixing, which leads to deviations during subsequent grinding and polishing, affecting the accuracy of the ceramic pieces and reducing their quality. Although the use of clamps can achieve positioning, it will affect the subsequent grinding and polishing. When fixing ceramic pieces of different thicknesses, it is not easy to limit them again stably, which affects the clamping stability performance of the fixture. In addition, the suction cup ceramic pieces are inconvenient to take and place, and it is not easy to load and unload them during grinding and polishing, resulting in low processing efficiency. Summary of the Invention

[0005] In order to solve the technical problem that an electrostatic chuck ceramic piece is difficult to be stably fixed during grinding and polishing, the present invention provides a fixture for grinding and polishing the surface of an electrostatic chuck ceramic piece.

[0006] The present invention solves the above technical problems through the following technical solutions:

[0007] The present invention provides a fixture for grinding and polishing the surface of an electrostatic chuck ceramic, the fixture for grinding and polishing the surface of an electrostatic chuck ceramic comprising:

[0008] The fixture assembly consists of a chassis and a support plate. The chassis is fixedly connected to the support plate through a pillar. The top edge of the support plate is provided with a surrounding edge for supporting the suction cup ceramic piece, and an adjustment mechanism is provided inside the surrounding edge. The top surface of the support plate located inside the surrounding edge is provided with an adsorption mechanism, and the adsorption mechanism is connected to the interior of the support plate. The top surface of the chassis is fixedly installed with an adjustment component, and the adjustment component is distributed correspondingly below the adjustment mechanism.

[0009] A lifting assembly is fixedly mounted to the edge of the support plate, a positioning assembly is movably sleeved inside the lifting assembly, the positioning assembly is arranged on the outside of the surrounding edge, and the surface of the support plate located on one side of the positioning assembly is rotatably connected to a positioning mechanism, the positioning mechanism is clamped with the edge of the suction cup ceramic sheet, and the positioning mechanism contacts the guide groove opened on the positioning assembly.

[0010] In the present technical solution, the support plate is a circular structure and is provided with several evenly distributed pillars at the bottom. An upper cavity and a lower cavity are respectively opened inside the support plate. The upper cavity and the lower cavity are both connected to the adsorption mechanism. The adsorption mechanism is composed of a vacuum suction cup, and the vacuum suction cup is fixedly installed to the surface of the support plate. There are several vacuum suction cups and they are all fixedly connected to the elastic rubber ring. The elastic rubber ring is fixedly sleeved on the top edge of the vacuum suction cup, and the elastic rubber ring is in contact with the surface of the suction cup ceramic piece. The interior of the support plate is connected with several connecting pipes, and the connecting pipes and the vacuum suction cup are both located inside the surrounding edge.

[0011] In this technical solution, a first vacuum pump and a second vacuum pump are installed on the surface of the chassis at the bottom of the support plate. The first vacuum pump and the second vacuum pump are fixedly connected to the connecting pipe. The two connecting pipes are connected through the interior of the support plate, and the two connecting pipes are respectively connected to the interior of the upper cavity and the lower cavity. The vacuum suction cup is connected to the interior of the upper cavity, and the lower cavity is connected to the top surface of the support plate through the connecting pipe.

[0012] In this technical solution, the support plate is a circular structure, and a circular ring edge is provided on the top of the support plate. A sink groove is opened inside the ring edge. An adjustment mechanism with a ring structure is provided inside the ring edge, and the adjustment mechanism is sealed and slid inside the sink groove. The adjustment mechanism is composed of a sealing ring, and the sealing ring is movably connected to the inside of the sink groove. The bottom of the sealing ring is connected to the inside of the ring edge through several connecting springs.

[0013] In this technical solution, the top of the sealing ring is fixedly connected to a bonding plate, which is an annular structure, and the top surface of the bonding plate is fixedly connected to a plurality of ribs, which are made of rubber and contact the bottom surface of the suction cup ceramic piece.

[0014] In this technical solution, the adjustment assembly is composed of a cylinder, which is fixedly mounted to the surface of the chassis. The telescopic end of the cylinder is fixedly connected to the top plate. Several evenly distributed top rods are fixedly connected to the top surface of the top plate, and each top rod is inserted into the inside of the support plate and in contact with the bonding plate.

[0015] In this technical solution, the lifting assembly consists of an electric push rod and a limit block. The electric push rod is fixedly connected to the bottom edge of the support plate. The telescopic end of the electric push rod passes through the support plate and is fixedly connected to the limit block. A notch corresponding to the lifting assembly is provided on the top edge of the support plate, and the limit block is a square hollow structure. A driving mechanism is provided on one side of the limit block, and the driving mechanism is located inside the notch.

[0016] In the present technical solution, an inclined groove is provided on one side of the bottom of the limit block, a protrusion is provided on one side of the top of the limit block, an opening for moving the positioning component is provided on the protrusion and one side of the limit block, and a driving mechanism is fixedly connected to the side wall of the limit block on the other side of the protrusion. The driving mechanism is composed of a support block, and the support block is fixedly connected to the side wall of the limit block. A micro motor is fixedly connected to the bottom of the support block, and the output end of the micro motor is fixedly connected to a gear, and one side of the gear extends into the interior of the limit block.

[0017] In the present technical solution, the positioning assembly is composed of a lifting plate, which is an arc-shaped structure and is located inside several limit blocks. The lifting plate is located outside the surrounding edge. A convex edge is provided on one side of the top of the lifting plate. The convex edge is located inside the opening and extends above the limit block, and the convex edge contacts the edge of the suction cup ceramic piece. A groove is provided on the top surface of the lifting plate on the side of the convex edge, and the protrusion is slidably connected to the inside of the groove. A gear ring is provided on the inside of the lifting plate, and the gear ring is meshed with the gear. A slope is provided on the outside of the bottom of the lifting plate to contact the inclined groove, and the slope is in contact with the positioning mechanism.

[0018] In this technical solution, the positioning mechanism is composed of a clamping rod, which is a bent structure and is rotatably connected to the support on the support plate. The bent position of the clamping rod is connected to the support, and the bottom end of the clamping rod is connected to the top surface of the support plate through a reset spring. The inner side of the clamping rod is rotatably connected to a guide wheel shaft, and the guide wheel shaft is in contact with the inclined surface opened on the support plate, and the top end of the clamping rod is provided with a hook structure that contacts the surface of the suction cup ceramic sheet.

[0019] On the basis of conforming to the common sense in this field, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0020] The beneficial effects of the present invention are:

[0021] The above-mentioned fixture for electrostatic chuck ceramic surface grinding and polishing adopts the combination of vacuum adsorption and clamping positioning to fix the electrostatic chuck ceramic sheet. While achieving stable clamping through the fixture, the positioning component is used to facilitate the rapid loading and unloading of the ceramic sheet. The ceramic sheet can be lifted up after processing for subsequent removal. The positioning component is used to control the rotation of the clamping rod to facilitate positioning during the placement process and subsequent clamping and fixing, thereby improving the positioning accuracy during the clamping process. The rotation of the positioning component can realize the sequential expansion of the clamping rod, which can avoid the interference of the clamping rod on the grinding and polishing tool during the grinding and polishing process, so that the fixture can provide ceramic sheet clamping and pressing force without affecting the use of the grinding and polishing tool, thereby improving the performance of the fixture. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention.

[0023] Figure 2 It is a schematic diagram of the three-dimensional structure of the support plate of the present invention.

[0024] Figure 3 It is a schematic diagram of the half-section structure of the support plate of the present invention.

[0025] Figure 4 For the present invention Figure 3 Schematic diagram of the locally enlarged structure at point A in the middle.

[0026] Figure 5 It is a schematic diagram of the half-section structure of the chassis of the present invention.

[0027] Figure 6 For the present invention Figure 5 Schematic diagram of the locally enlarged structure at point B in the middle.

[0028] Figure 7 It is a schematic diagram of the three-dimensional structure of the laminating plate of the present invention.

[0029] Figure 8 It is a schematic diagram of the three-dimensional structure of the lifting plate of the present invention.

[0030] Figure 9 It is a schematic diagram of the three-dimensional structure of the limit block of the present invention.

[0031] Figure 10 It is a schematic diagram of the external front view structure of the present invention.

[0032] Figure 11 It is a schematic diagram of the internal front view structure of the present invention.

[0033] Description of Reference Numerals

[0034] In the figure: 100, fixture assembly; 101, chassis; 102, pillar; 103, support plate; 104, surrounding edge; 105, sink; 106, sealing ring; 107, connecting spring; 108, laminating plate; 109, rib; 110, upper cavity; 111, lower cavity; 112, first vacuum pump; 113, second vacuum pump; 114, connecting pipe; 115, vacuum suction cup; 116, elastic rubber ring; 117, connecting pipe; 118, notch; 200, adjustment component; 201. Cylinder; 202. Top plate; 203. Top rod; 300. Lifting assembly; 301. Electric push rod; 302. Limit block; 303. Bevel; 304. Protrusion; 305. Support block; 306. Micro motor; 307. Gear; 400. Positioning assembly; 401. Lifting plate; 402. Convex edge; 403. Groove; 404. Ring gear; 405. Clamping rod; 406. Return spring; 407. Guide wheel shaft; 408. Ceramic suction cup; 409. Guide groove. DETAILED DESCRIPTION

[0035] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples.

[0036] like Figure 1-11 As shown, the fixture for grinding and polishing the surface of electrostatic chuck ceramics includes:

[0037] The fixture assembly 100 is composed of a chassis 101 and a support plate 103. The chassis 101 is fixedly connected to the support plate 103 via pillars 102. The top edge of the support plate 103 is provided with a surrounding edge 104 for supporting the suction cup ceramic piece 408, and an adjustment mechanism is provided inside the surrounding edge 104. The top surface of the support plate 103 located inside the surrounding edge 104 is provided with an adsorption mechanism, and the adsorption mechanism is connected to the interior of the support plate 103. The top surface of the chassis 101 is fixedly mounted with an adjustment component 200, and the adjustment component 200 is distributed correspondingly below the adjustment mechanism.

[0038] The lifting assembly 300 is fixedly mounted to the edge of the support plate 103, and a positioning assembly 400 is movably sleeved inside the lifting assembly 300. The positioning assembly 400 is arranged on the outside of the surrounding edge 104, and the surface of the support plate 103 located on one side of the positioning assembly 400 is rotatably connected to a positioning mechanism, and the positioning mechanism is clamped with the edge of the suction cup ceramic piece 408, and the positioning mechanism contacts the guide groove 409 opened on the positioning assembly 400.

[0039] Preferably, when the clamp is used to clamp the suction cup ceramic piece 408, the limit block 302 drives the lifting plate 401 to move above the edge 104, and the suction cup ceramic piece 408 is placed on the lifting plate 401. As the lifting plate 401 descends, the suction cup ceramic piece 408 is placed on the edge 104. The suction cup ceramic piece 408 overcomes the elasticity of the elastic rubber ring 116 so that it is supported by the vacuum suction cup 115. During the upward movement of the lifting plate 401, it is separated from the clamping rod 405, and the reset spring 406 pushes the clamping rod 405 to unfold. After the suction cup ceramic piece 408 is placed, the lifting plate 401 continues to move downward, and the lifting plate 401 contacts the bottom end of the clamping rod 405 and drives the clamping rod 405 to reset. The top of 405 contacts the suction cup ceramic piece 408 and thus positions and clamps it. At this time, the adjustment component 200 is raised to push the adjustment mechanism upward, so that it drives the suction cup ceramic piece 408 to press against the hook-shaped structure at the top of the clamping rod 405. The bottom of the elastic rubber ring 116 recovers its deformation so that it always fits with the bottom surface of the suction cup ceramic piece 408. At this time, the adsorption mechanism is started to extract the top and internal air of the support plate 103, thereby realizing the negative pressure adsorption function. The negative pressure adsorption and the clamping positioning of the clamping rod 405 are used, and at the same time, the suction cup ceramic piece 408 is pushed upward to press against the clamping rod 405 to ensure the stable clamping performance, and the lifting plate 401 is rotated to make the guide groove 409 (such as Figure 2 and Figure 10 As shown) corresponds to the clamping rod 405, the clamping rod 405 is unfolded, and then the clamping rod 405 is opened in sequence, without affecting the clamping, and can avoid the grinding and polishing tools to ensure smooth processing.

[0040] The support plate 103 is a circular structure and is provided with a number of evenly distributed pillars 102 at the bottom. An upper cavity 110 and a lower cavity 111 are respectively opened inside the support plate 103. The upper cavity 110 and the lower cavity 111 are both connected to the adsorption mechanism. The adsorption mechanism is composed of a vacuum suction cup 115, and the vacuum suction cup 115 is fixedly installed on the surface of the support plate 103. The number of vacuum suction cups 115 is several and they are all fixedly connected with elastic rubber rings 116. The elastic rubber rings 116 are fixedly sleeved on the top edge of the vacuum suction cup 115, and the elastic rubber rings 116 are in contact with the surface of the suction cup ceramic piece 408. The interior of the support plate 103 is connected with Two connecting pipes 117 are connected through, and the connecting pipes 117 and the vacuum suction cup 115 are both located inside the surrounding edge 104; the bottom of the support plate 103 is provided with a first vacuum pump 112 and a second vacuum pump 113 installed on the surface of the chassis 101, and the first vacuum pump 112 and the second vacuum pump 113 are both fixedly connected to the connecting pipe 114, and the two connecting pipes 114 are both connected through the interior of the support plate 103, and the two connecting pipes 114 are respectively connected to the interior of the upper cavity 110 and the lower cavity 111, the vacuum suction cup 115 is connected to the interior of the upper cavity 110, and the lower cavity 111 is connected to the top surface of the support plate 103 through the connecting pipe 117.

[0041] In this technical solution, the support plate 103 is supported by the pillars 102 on the chassis 101. When adsorption is performed, the first vacuum pump 112 is started first to extract the air in the negative pressure suction cup and the elastic rubber ring 116, and the air in the upper cavity 110 is extracted through the connecting pipe 114 to form a negative pressure, thereby achieving stable adsorption of the suction cup ceramic piece 408. When the elastic rubber ring 116 is subjected to gravity, the bottom end of the elastic rubber ring 116 is deformed and moves downward. When the elastic rubber ring 116 regains its elasticity, the elastic rubber ring 116 can return to its original shape, so that the adjustment component 200 pushes the adjustment mechanism upward to achieve clamping and fixation, thereby achieving fixation of suction cup ceramic pieces 408 of different thicknesses. Finally, the second vacuum pump 113 is started, and the air on the top of the support plate 103 enters the lower cavity 111 through the connecting pipe 117, and is extracted through the connecting pipe 114 to achieve negative pressure adsorption inside the bonding plate 108, thereby ensuring the uniformity of the adsorption force.

[0042] The support plate 103 is a circular structure, and a ring-shaped edge 104 is provided on the top of the support plate 103. A sink groove 105 is provided inside the edge 104. An adjusting mechanism of a ring structure is provided inside the edge 104, and the adjusting mechanism is sealed and slidable inside the sink groove 105. The adjusting mechanism is composed of a sealing ring 106, and the sealing ring 106 is movably connected to the inside of the sink groove 105. The bottom of the sealing ring 106 is connected to the inside of the edge 104 through a number of connecting springs 107; the top of the sealing ring 106 is fixedly connected to the bonding plate 108, and the bonding plate 108 is fixedly connected to the bonding plate 108. The plywood 108 is an annular structure, and a plurality of ribs 109 are fixedly connected to the top surface of the plywood 108. The ribs 109 are made of rubber and are in contact with the bottom surface of the suction cup ceramic piece 408. The adjustment assembly 200 is composed of a cylinder 201, and the cylinder 201 is fixedly mounted to the surface of the chassis 101. The telescopic end of the cylinder 201 is fixedly connected to the top plate 202. The top surface of the top plate 202 is fixedly connected to a plurality of evenly distributed push rods 203, and each push rod 203 is inserted through the inside of the support plate 103 and in contact with the plywood 108.

[0043] In this technical solution, the top rod 203 contacts the bonding plate 108, and the bonding plate 108 drives the sealing ring 106 to move upward inside the sink 105, so that it overcomes the elasticity of the connecting spring 107 and drives the ribs 109 on the bonding plate 108 to contact the bottom surface of the suction cup ceramic piece 408, thereby achieving sealing at the contact position, and pushing the suction cup ceramic piece 408 against the hook structure at the top of the clamping rod 405, and meeting the clamping and fixation of suction cup ceramic pieces 408 of different thicknesses, and then using negative pressure adsorption to achieve stable clamping, ensuring stability during the grinding and polishing process.

[0044] The lifting assembly 300 is composed of an electric push rod 301 and a limit block 302. The electric push rod 301 is fixedly connected to the bottom edge of the support plate 103. The telescopic end of the electric push rod 301 passes through the support plate 103 and is fixedly connected to the limit block 302. The top edge of the support plate 103 is provided with a notch 118 corresponding to the lifting assembly 300, and the limit block 302 is a square hollow structure. A driving mechanism is provided on one side of the limit block 302, and the driving mechanism is located inside the notch 118; an inclined slot 303 is provided on one side of the bottom of the limit block 302 A protrusion 304 is provided on one side of the top of the limit block 302, and an opening for moving the positioning component 400 is opened on the protrusion 304 and one side of the limit block 302. The side wall of the limit block 302 located on the other side of the protrusion 304 is fixedly connected to a driving mechanism, and the driving mechanism is composed of a support block 305, and the support block 305 is fixedly connected to the side wall of the limit block 302. A micro motor 306 is fixedly connected to the bottom of the support block 305, and the output end of the micro motor 306 is fixedly connected to a gear 307, and one side of the gear 307 extends to the inside of the limit block 302.

[0045] The positioning assembly 400 is composed of a lifting plate 401. The lifting plate 401 is an arc-shaped structure and is located inside a plurality of limit blocks 302. The lifting plate 401 is located outside the surrounding edge 104. A convex edge 402 is provided on one side of the top of the lifting plate 401. The convex edge 402 is located inside the opening and extends above the limit block 302. The convex edge 402 contacts the edge of the suction cup ceramic piece 408. A groove 403 is provided on the top surface of the lifting plate 401 on the side of the convex edge 402, and the protrusion 304 is slidably connected to the inside of the groove 403. A gear ring 404 is provided on the inside of the lifting plate 401, and the gear ring 404 is meshed with the gear 307. The outer side of the bottom of the lifting plate 401 is provided with an inclined surface in contact with the inclined groove 303, and the inclined surface is in contact with the positioning mechanism; the positioning mechanism is composed of a clamping rod 405, the clamping rod 405 is a bent structure and is rotatably connected to the support on the support plate 103, the bent position of the clamping rod 405 is connected to the support, and the bottom end of the clamping rod 405 is connected to the top surface of the support plate 103 through a reset spring 406, the inner side of the clamping rod 405 is rotatably connected with a guide wheel shaft 407, the guide wheel shaft 407 is in contact with the inclined surface opened in the support plate 103, and the top of the clamping rod 405 is provided with a hook structure in contact with the surface of the suction cup ceramic piece 408.

[0046] In this technical solution, the lifting assembly 300 can drive the limit block 302 to move upward, and a lifting plate 401 with a ring structure is embedded inside the limit block 302, so that when the limit block 302 drives the lifting plate 401 to move upward, the convex edge 402 on the lifting plate 401 supports the suction cup ceramic piece 408, and after moving downward, the suction cup ceramic piece 408 is placed on the surface of the bonding plate 108. When the lifting plate 401 continues to move downward, its inclined surface contacts the guide wheel shaft 407 and pushes the clamping rod 405 to rotate around its middle, so that the top end of the clamping rod 405 approaches and contacts the edge of the suction cup ceramic piece 408, thereby adjusting the position of the suction cup ceramic piece 408. At this time, the guide groove 409 is separated from the clamping rod 405.

[0047] Furthermore, when the tool approaches one of the clamping rods 405 during grinding and polishing, the micro motor 306 is started to drive the gear 307 to rotate, and the cooperation between the gear 307 and the ring gear 404 drives the lifting plate 401 to move inside the limit block 302. At the same time, the inclined surface rotates on the guide wheel shaft 407 to reduce friction, and the guide groove 409 on the lifting plate 401 moves to the corresponding clamping rod 405 position. The clamping rod 405 is not restricted by the lifting plate 401, so that the reset spring 406 pushes the clamping rod 405 to rotate and unfold, thereby allowing the clamping rod 405 to avoid the grinding and polishing tool at this position. When the grinding and polishing tool moves to the next clamping rod 405 position, the guide groove 409 pushes the clamping rod 405 to continue to rotate and reset as the lifting plate 401 continues to rotate, and the next clamping rod 405 opens when it contacts the guide groove 409, thereby avoiding contact between the clamping rod 405 and the grinding and polishing tool, thereby improving the comprehensiveness and continuity of grinding and polishing.

[0048] The present invention is not limited to the above-described embodiments. Any changes in shape or structure fall within the scope of the present invention. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention. Such changes and modifications fall within the scope of the present invention.

Claims

1. A fixture for grinding and polishing the surface of electrostatic chuck ceramics, characterized in that: The fixture for grinding and polishing the surface of electrostatic chuck ceramics includes: A fixture assembly (100) is composed of a chassis (101) and a support plate (103), wherein the chassis (101) is fixedly connected to the support plate (103) via a support column (102), a rim (104) is provided on the top edge of the support plate (103) for supporting the suction cup ceramic sheet (408), and an adjustment mechanism is provided inside the rim (104), and an adsorption mechanism is provided on the top surface of the support plate (103) located inside the rim (104), and the adsorption mechanism is communicated with the inside of the support plate (103), and the chassis (101) is fixedly connected to the support plate (103) via a support column (102), and a rim (104) is provided on the top edge of the support plate (103) for supporting the suction cup ceramic sheet (408). ) The top surface of the chassis (101) is fixedly mounted with an adjustment component (200), and the adjustment component (200) is distributed correspondingly below the adjustment mechanism; the adjustment component (200) is composed of a cylinder (201), and the cylinder (201) is fixedly mounted to the surface of the chassis (101), and the telescopic end of the cylinder (201) is fixedly connected to the top plate (202), and the top surface of the top plate (202) is fixedly connected with a plurality of evenly distributed push rods (203), and each push rod (203) is inserted through the inside of the support plate (103) and contacts the bonding plate (108); A lifting assembly (300), wherein the lifting assembly (300) is fixedly mounted to the edge of the support plate (103), a positioning assembly (400) is movably sleeved inside the lifting assembly (300), the positioning assembly (400) is arranged outside the surrounding edge (104), and a positioning mechanism is rotatably connected to the surface of the support plate (103) located on one side of the positioning assembly (400), the positioning mechanism is engaged with the edge of the suction cup ceramic piece (408), and the positioning mechanism contacts a guide groove (409) provided on the positioning assembly (400); The support plate (103) is a circular structure and has a plurality of evenly distributed pillars (102) at the bottom. An upper cavity (110) and a lower cavity (111) are respectively provided inside the support plate (103). The upper cavity (110) and the lower cavity (111) are both connected to the adsorption mechanism. The adsorption mechanism is composed of a vacuum suction cup (115). The vacuum suction cup (115) is fixedly mounted on the surface of the support plate (103). There are several vacuum suction cups (115) and they are all fixedly connected to the elastic rubber ring (116). The elastic rubber ring (116) is fixedly sleeved on the top edge of the vacuum suction cup (115), and the elastic rubber ring (116) is in contact with the surface of the suction cup ceramic piece (408). The interior of the support plate (103) is connected to a plurality of connecting pipes (117), and the connecting pipes (117) and the vacuum suction cup (115) are both located inside the surrounding edge (104); the support plate (103) is a circular structure, the top of the support plate (103) is provided with a circular surrounding edge (104), the surrounding edge (104) is provided with a sink groove (105), the surrounding edge (104) is provided with a ring-shaped adjustment mechanism, and the adjustment mechanism is sealed and slidable with the inside of the sink groove (105), the adjustment mechanism is composed of a sealing ring (106), the sealing ring (106) is movably connected to the inside of the sink groove (105), and the bottom of the sealing ring (106) is connected to the inside of the surrounding edge (104) through a plurality of connecting springs (107).

2. The fixture for grinding and polishing the surface of an electrostatic chuck ceramic according to claim 1, wherein: A first vacuum pump (112) and a second vacuum pump (113) mounted on the surface of the chassis (101) are provided at the bottom of the support plate (103). The first vacuum pump (112) and the second vacuum pump (113) are both fixedly connected to a connecting pipe (114). Both connecting pipes (114) are connected through the interior of the support plate (103). The two connecting pipes (114) are respectively connected to the interior of the upper cavity (110) and the lower cavity (111). The vacuum suction cup (115) is connected to the interior of the upper cavity (110), and the lower cavity (111) is connected to the top surface of the support plate (103) through a connecting pipe (117).

3. The fixture for grinding and polishing the surface of an electrostatic chuck ceramic according to claim 1, wherein: The top of the sealing ring (106) is fixedly connected to a bonding plate (108), the bonding plate (108) is an annular structure, and the top surface of the bonding plate (108) is fixedly connected to a plurality of ribs (109), the ribs (109) are made of rubber and are in contact with the bottom surface of the suction cup ceramic sheet (408).

4. The fixture for grinding and polishing the surface of an electrostatic chuck ceramic according to claim 1, wherein: The lifting assembly (300) is composed of an electric push rod (301) and a limit block (302), wherein the electric push rod (301) is fixedly connected to the bottom edge of the support plate (103), the telescopic end of the electric push rod (301) passes through the support plate (103) and is fixedly connected to the limit block (302), the top edge of the support plate (103) is provided with a notch (118) corresponding to the lifting assembly (300), and the limit block (302) is a square hollow structure, and a driving mechanism is provided on one side of the limit block (302), and the driving mechanism is located inside the notch (118).

5. The fixture for grinding and polishing the surface of an electrostatic chuck ceramic according to claim 4, characterized in that: An inclined groove (303) is provided on one side of the bottom of the limit block (302), a protrusion (304) is provided on one side of the top of the limit block (302), an opening for moving the positioning assembly (400) is provided between the protrusion (304) and one side of the limit block (302), a driving mechanism is fixedly connected to the side wall of the limit block (302) on the other side of the protrusion (304), and the driving mechanism is composed of a support block (305), the support block (305) is fixedly connected to the side wall of the limit block (302), a micro motor (306) is fixedly connected to the bottom of the support block (305), and the output end of the micro motor (306) is fixedly connected to the gear (307), and one side of the gear (307) extends into the interior of the limit block (302).

6. The fixture for grinding and polishing the surface of ceramics using an electrostatic chuck according to claim 1, wherein: The positioning assembly (400) is composed of a lifting plate (401), the lifting plate (401) is an arc-shaped structure and is located inside a plurality of limit blocks (302), the lifting plate (401) is located outside the surrounding edge (104), a convex edge (402) is provided on one side of the top of the lifting plate (401), the convex edge (402) is located inside the opening and extends above the limit block (302), and the convex edge (402) contacts the edge of the suction cup ceramic piece (408), a groove (403) is provided on the top surface of the lifting plate (401) on the side of the convex edge (402), and the protrusion (304) is slidably connected to the inside of the groove (403), a gear ring (404) is provided on the inside of the lifting plate (401), and the gear ring (404) is meshed with the gear (307), and an inclined surface is provided on the outside of the bottom of the lifting plate (401) to contact the inclined groove (303), and the inclined surface is in contact with the positioning mechanism.

7. The fixture for grinding and polishing the surface of an electrostatic chuck ceramic according to claim 6, wherein: The positioning mechanism is composed of a clamping rod (405), which is a bent structure and is rotatably connected to a support on the support plate (103). The bent position of the clamping rod (405) is connected to the support, and the bottom end of the clamping rod (405) is connected to the top surface of the support plate (103) through a return spring (406). The inner side of the clamping rod (405) is rotatably connected to a guide wheel shaft (407), and the guide wheel shaft (407) is in contact with the inclined surface opened on the support plate (103), and the top end of the clamping rod (405) is provided with a hook structure in contact with the surface of the suction cup ceramic piece (408).

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