A system for treating integrated circuit cleaning wastewater and a method thereof

Abstract

The application provides a kind of integrated circuit cleaning wastewater treatment system and method thereof, system includes rectifying device, comprehensive wet oxidation module, fine separation module and related pipeline.Wastewater pipeline transports cleaning wastewater to rectifying device pretreatment, obtains light component liquid and remaining concentrated liquid, respectively through light component discharge pipeline and concentrated liquid discharge pipeline transportation.Light component liquid is sent to fine separation module separation purification;Remaining concentrated liquid is sent to comprehensive wet oxidation module, after temperature rise by preheater, enters wet oxidation reactor to generate high-temperature gas-liquid mixture, the rest heat is used for steam generator to convert deionized water into steam, realize energy storage.Steam provides heat energy for fine separation module and rectifying device through branch pipeline, high-temperature gas-liquid mixture is cooled down by mixed liquid pipeline back to preheater, finally through feed pipeline is sent to multifunctional tower for gas-liquid separation.The whole system not only realizes the effective recycling of resources, but also improves energy circulation, mass transfer efficiency, etc.

Description

Technical Field

[0001] This invention relates to the field of wastewater treatment technology, and more specifically, to a system and method for treating integrated circuit cleaning wastewater. Background Technology

[0002] In the integrated circuit manufacturing process of the electronics industry, the cleaning process is a crucial step, directly affecting the quality and performance of the product. However, this process also generates a significant amount of wastewater. With the continuous development of integrated circuit manufacturing technology, from the early 90nm process to today's 10nm-20nm process, the number of cleaning steps has increased substantially, leading to a corresponding surge in the production of cleaning wastewater.

[0003] These cleaning wastewaters not only contain conventional pollutants from ultrapure water washing, such as suspended solids and dissolved solids, but also a large amount of organic matter generated from cleaning with electronic-grade organic solvents. These organic compounds have extremely high chemical oxygen demand (COD), often exceeding 300,000 mg / L, posing a significant challenge to wastewater treatment. The wastewater contains both low-boiling-point components such as methanol, ethanol, isopropanol, and piperidine, as well as various complex high-boiling-point organic compounds, further increasing the difficulty of wastewater treatment.

[0004] However, traditional wastewater treatment technologies face numerous challenges when dealing with such complex wastewater. Directly employing conventional wet oxidation processes often fails to effectively treat low-boiling-point components, leading to resource waste and environmental pollution. Furthermore, the low gas-liquid mass transfer efficiency and slow reaction rate during wet oxidation result in long treatment times and high energy consumption. Moreover, the energy utilization in this process is insufficient, failing to achieve reasonable energy recovery and recycling, further increasing the cost of wastewater treatment.

[0005] More seriously, due to the complex composition of the wastewater and the presence of various harmful substances, direct treatment poses certain safety risks. Accidental leaks or improper handling could cause serious harm to the environment and human health.

[0006] In view of this, the present invention is hereby proposed. Summary of the Invention

[0007] The primary objective of this invention is to provide a treatment system for integrated circuit cleaning wastewater, which achieves efficient recovery of low-boiling-point organic matter and effective degradation of high-boiling-point components in the cleaning wastewater. At the same time, it recycles energy to reduce energy consumption, enhances mass transfer efficiency, and accelerates the reaction rate, thereby improving treatment safety and reliability, ensuring subsequent treatment, and comprehensively improving wastewater treatment quality and resource utilization.

[0008] The second objective of this invention is to provide a method for treating integrated circuit cleaning wastewater. This method uses the aforementioned system to treat the cleaning wastewater, which not only improves the overall quality of wastewater treatment but also significantly increases resource utilization, reduces energy waste, and is simple to operate, safe, and environmentally friendly.

[0009] In order to achieve the above-mentioned objectives of the present invention, the following technical solution is adopted:

[0010] This invention provides a treatment system for integrated circuit cleaning wastewater, characterized in that it includes: a distillation unit, a comprehensive wet oxidation module, a fine separation module, a light component discharge pipeline, a concentrated liquid discharge pipeline, and a wastewater pipeline;

[0011] The wastewater pipeline is connected to the distillation unit, and the wastewater pipeline transports cleaning wastewater to the distillation unit for pretreatment to obtain light component liquid and residual concentrate. The two ends of the distillation unit are respectively connected to the light component discharge pipeline and the concentrate discharge pipeline. The light component discharge pipeline transports the light component liquid to the fine separation module for separation and purification. The concentrate discharge pipeline transports the residual concentrate to the integrated wet oxidation module for oxidation treatment.

[0012] The integrated wet oxidation module includes a preheater, a wet oxidation reactor, a steam generator, and a multi-functional tower. The concentrated liquid discharge pipeline is connected to the inlet of the preheater, transporting the remaining concentrated liquid to the preheater for heating. The preheater outlet is connected to the inlet of the wet oxidation reactor via a wet pipeline, transporting the heated remaining concentrated liquid to the wet oxidation reactor to generate a high-temperature gas-liquid mixture. The discharge port at the top of the wet oxidation generator is connected to the steam generator via a gas-liquid discharge pipeline, utilizing the waste heat of the high-temperature gas-liquid mixture to convert deionized water into steam. Energy storage is achieved; the steam generator is connected to the fine separation module through a first branch pipeline, delivering the steam to the fine separation device to provide thermal energy; the steam generator is connected to the distillation device through a second branch pipeline, delivering the steam to the distillation device to provide auxiliary thermal energy; the steam generator is connected to the preheater through a mixed liquid pipeline, delivering the high-temperature gas-liquid mixture to the preheater for cooling; the preheater is connected to the feed inlet on the side wall of the multifunctional tower through a feed pipeline to perform gas-liquid separation of the gas-liquid mixture.

[0013] In the above scheme, the wastewater pipeline transports the cleaning wastewater from the integrated circuits to a distillation unit for pretreatment, separating low-boiling-point components such as methanol, ethanol, and isopropanol (i.e., light component liquid) and high-concentration organic wastewater containing high-boiling-point components (i.e., residual wastewater). The separated light component liquid is discharged from the top outlet of the distillation unit into a fine separation module for further purification of the mixture of methanol, ethanol, isopropanol, and piperidine (low-boiling-point components). During the fine separation process, each component is efficiently separated, and the purity of the recovered methanol, ethanol, isopropanol, and piperidine all reach over 99.9%, with a recovery rate higher than 98%. The residual wastewater discharged from the bottom of the distillation unit enters the integrated wet oxidation module through a concentrated liquid discharge pipeline for oxidation treatment. In this module, the organic pollutants in the residual wastewater are efficiently oxidized and decomposed. At the same time, a large amount of energy is released during the wet oxidation reaction, which is cleverly recovered and utilized for preheating the feed water and powering other devices, thereby achieving energy recycling and improving the energy efficiency of the entire treatment system. It not only effectively removes pollutants from wastewater, but also maximizes energy utilization, which aligns with the concept of green and sustainable development.

[0014] Furthermore, the bottom of the wet oxidation generator is connected to an air inlet pipe to deliver air to the wet oxidation reactor; the wet oxidation reactor is provided with a nano-micro interface unit, which is located on the bottom horizontal cross-section of the wet oxidation reactor. The nano-micro interface unit is an array surface composed of multiple sets of nano-micro interface components, which can convert the air into microbubbles.

[0015] In the above scheme, the air inlet pipe connected to the bottom of the wet oxidation generator continuously supplies compressed air to the wet oxidation reactor. This air is efficiently utilized within the wet oxidation reactor through nano-micro interface units, typically employing 5-7 nano-micro interface components. The unique design of these components allows them to transform the incoming air into extremely small bubbles (10μm-200μm in diameter). These microbubbles have a very large specific surface area, enabling more thorough contact with the remaining wastewater, thereby significantly improving gas-liquid mass transfer efficiency. The oxygen in the microbubbles can rapidly dissolve into the remaining wastewater, providing a sufficient oxygen source for the wet oxidation reaction and promoting the rapid oxidative decomposition of organic pollutants. The detailed air inlet pipe system can also compress the air.

[0016] Furthermore, the wet oxidation reactor also includes a sleeve-type turbulence structure to enhance the thorough mixing of the microbubbles and the remaining concentrate; the sleeve consists of a mixing section, a flow transition section, and a plug flow stabilization section from bottom to top; multiple layers of spiral fins are evenly distributed along the inner wall of the mixing section at an angle of 60 degrees to the axis of the sleeve, and the leading edge of the spiral fins has a wavy structure; multiple turbulence plates are provided on the inner walls of the flow transition section and the plug flow stabilization section, with the angle of the turbulence plates in the plug flow stabilization section gradually changing to 45 degrees and the angle of the turbulence plates in the plug flow stabilization section gradually changing to 30 degrees.

[0017] In the above scheme, the sleeve is positioned around the nano-micro interface unit. From bottom to top, the sleeve is designed as a mixing section, a flow transition section, and a plug flow stabilization section. This segmented design helps to gradually guide and optimize the mixing process between microbubbles and the remaining concentrate. In particular, the multi-layered spiral fins evenly distributed circumferentially on the inner wall of the mixing section, at a 60-degree angle to the sleeve axis, can induce the fluid to form a strong swirling zone, effectively promoting the initial mixing of the incoming air (converted into microbubbles) and the remaining concentrate, generating spiral flow along the inclined direction of the spiral fins. This spiral flow increases the turbulence of the fluid, breaking the laminar flow state, thereby increasing the contact area between the microbubbles and the remaining concentrate, resulting in more thorough mixing. The leading edge of the spiral fins has a wavy structure, which further increases fluid disturbance. When the fluid passes through the wavy leading edge, local eddies and turbulence are generated, which helps disperse the microbubbles and mix them with the concentrate, improving mass transfer efficiency. Multiple baffles on the inner walls of the flow transition section and the plug flow stabilization section can block and guide the fluid. When fluid flows past the baffles, it generates flow around and eddies, increasing the turbulence intensity and continuously stirring and mixing the microbubbles and concentrate during flow, further improving the mixing effect. The baffles in both the flow transition section and the plug flow stabilization section are freely movable, with the angle controlled between 30° and 60°. The design of the flow transition section allows the chaotic fluid entering from the mixing section to gradually transition to a more ordered flow state. During this process, the presence of the baffles not only maintains the turbulent characteristics of the fluid but also promotes further mixing of the microbubbles and concentrate, ensuring that the fluid reaches a relatively uniform distribution before entering the plug flow stabilization section. In the plug flow stabilization section, the angle of the baffles gradually changes to 45 degrees or even 30 degrees. This gradual design allows the fluid to gradually adapt to the changes in the baffles during flow, effectively slowing down the fluid velocity while maintaining a certain degree of turbulence, resulting in a fluid exhibiting an approximate plug flow state. This flow pattern helps to extend the residence time of microbubbles in the reactor, ensuring that the microbubbles and the concentrated liquid can continue to mix and react fully in the stable section of the plug flow, thereby improving oxidation efficiency and treatment quality.

[0018] In the above scheme, the synergistic effect of the air inlet pipe, the nano-micro interface unit, and the sleeve-type turbulence structure enables the wet oxidation reaction to proceed under more optimized conditions. Thorough mixing of microbubbles and concentrated liquid, effective utilization of oxygen, and a stable reaction environment collectively promote the reaction, improve pollutant removal rates, and enhance reaction efficiency. Simultaneously, this synergistic effect shortens the reaction time, increases the reactor's processing efficiency, and allows the wet oxidation reactor to treat residual concentrated liquid more efficiently.

[0019] Furthermore, the distillation apparatus includes a distillation column, which is internally provided with a condensation section and a rectification section; the condensation section generates the light component liquid through conversion; the rectification section adopts either stratified structured packing or theoretical plates; the packing and theoretical plates are located in the middle of the distillation column;

[0020] Preferably, the height of each layer of the layered structured packing is 1.2-1.5 meters, and the total stacking height is 9-15 meters;

[0021] Preferably, the theoretical number of trays is 16-30;

[0022] Preferably, the theoretical number of trays is 20-30.

[0023] The distillation unit in this treatment system effectively separates low-boiling-point components such as methanol, ethanol, isopropanol, and piperidine from integrated circuit cleaning wastewater. The system features a design that incorporates layered, well-organized packing or 16-30 theoretical trays within the distillation unit, creating a gradient gas-liquid mass transfer interface in the rectification section. Combined with phase change control in the condensation section, this design is particularly suitable for the efficient separation of mixtures with high boiling point differences, significantly improving the separation efficiency of light and heavy components. It provides a favorable contact and separation environment for the gas and liquid phases, allowing light components to be recovered with high purity. These recovered light components can be reused in the electronics industry's production processes, reducing raw material procurement costs.

[0024] Furthermore, the fine separation module is a multi-stage separation consisting of multiple distillation columns connected together. The fine separation module is also equipped with a reflux ratio control and product collection unit to regulate the temperature and pressure of the fine separation module and separate the various substances in the light component liquid.

[0025] Multiple distillation columns connected together form a multi-stage synergistic separation system. Combined with precise reflux ratio control and targeted product collection, this system efficiently and accurately separates and purifies light component liquids. Each distillation column further separates and purifies the light component liquid. Different distillation columns can selectively separate different substances based on their boiling point differences, significantly improving separation efficiency and purity. Furthermore, by precisely controlling the temperature and pressure of each distillation column, accurate separation based on the characteristics of different substances is possible. Different light components have different volatility under different temperature and pressure conditions; utilizing this characteristic, fine separation of various substances in light component liquids can be achieved, yielding high-purity single substances or mixtures with specific compositions.

[0026] Furthermore, the multifunctional tower has gas-liquid separation and cold energy recovery functional sections. The multifunctional tower is also equipped with an expansion valve group located around the feed inlet to reduce the pressure of the gas-liquid mixture. The upper section of the gas-liquid separation section is equipped with a swirl plate, and the lower section is equipped with a wire mesh to separate the gas and liquid. The cold energy recovery section is equipped with a cold storage body, which cools the liquid through heat exchange and flows into the liquid collection tank at the bottom of the multifunctional tower.

[0027] The multifunctional tower in this invention integrates gas-liquid separation and cold energy recovery functions, achieving the dual goals of efficient energy recovery and separation treatment. When a high-pressure gas-liquid mixture enters the multifunctional tower, the pressure is reduced by the throttling expansion effect of the expansion valve group. This not only recovers the system's pressure energy and converts part of the pressure into cold energy for recycling and storage in the cold storage body, but also lowers the temperature of the gas-liquid mixture. After cooling, the gas-liquid mixture passes through the gas-liquid separation section, where the guide plate generates a strong swirling flow field and uses centrifugal force to initially separate the gas and liquid, causing more than 90% of the liquid to be thrown towards the tower wall. The remaining droplets are broken by the wire mesh demister and discharged through the gas outlet at the top, transported to the purification unit for treatment. The liquid passes through the cold energy recovery section, where the temperature of the liquid is reduced to a threshold suitable for biochemical treatment by the cold storage body, reducing the need for external cooling energy consumption and lowering operating costs.

[0028] Furthermore, the top of the multifunctional tower is provided with a gas outlet, which transports the gas to the purification unit through a gas discharge pipeline; the bottom of the multifunctional tower is provided with a drain outlet, which transports the liquid to the biochemical treatment unit through a drain pipeline.

[0029] Furthermore, the steam generator is also provided with a water inlet, which is connected to a deionized water inlet pipeline to deliver the deionized water to the steam generator.

[0030] Furthermore, it also includes a recycling tank, which is connected to the fine separation module via a material discharge pipeline to realize the recycling of the various substances.

[0031] This invention also provides a method for treating integrated circuit cleaning wastewater, comprising the following steps:

[0032] The cleaning wastewater is fed into the distillation unit through a wastewater pipeline to separate the light component liquid from the remaining concentrated liquid; the light component liquid is fed into the fine separation module through the light component discharge pipeline to separate the various substances in the light component liquid; the remaining concentrated liquid is fed into the integrated wet oxidation module through the concentrated liquid discharge pipeline for efficient treatment.

[0033] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0034] This system uses a distillation unit as a pretreatment unit, which utilizes the synergistic effect of its condensation and distillation sections to accurately separate the cleaning wastewater into light component liquid and residual concentrated liquid, laying the foundation for subsequent targeted treatment. The fine separation module adopts a multi-stage distillation column series structure, combined with reflux ratio control and product collection unit, to achieve deep separation and purification of each component in the light component liquid, significantly improving the resource recovery value.

[0035] In the residual concentrate treatment stage, the integrated wet oxidation module combines a wet oxidation reactor with a nano-micro interface unit to convert air into microbubbles to enhance the oxidation reaction. Combined with a sleeve-type turbulence structure, it achieves thorough gas-liquid mixing, thereby improving the decomposition efficiency of organic pollutants. The system also integrates a steam generator and a multi-functional tower. The former converts the high-temperature gas-liquid mixture into steam through waste heat recovery, providing auxiliary heat energy for the fine separation module and distillation unit, reducing system energy consumption. The latter, through the coordinated work of the gas-liquid separation section and the cold energy recovery section, achieves efficient separation of gas and liquid while recovering the cold energy of the liquid, forming an energy closed loop.

[0036] The integrated circuit cleaning wastewater treatment method provided by this invention breaks through the bottlenecks of traditional wastewater treatment technology, such as low efficiency, high energy consumption, and difficulty in resource recycling, thereby reducing costs and environmental burden. Attached Figure Description

[0037] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0038] Figure 1 This is a schematic diagram of the structure of an integrated circuit cleaning wastewater treatment system provided in an embodiment of this application.

[0039] Figure label:

[0040] 1-Distillation column, 2-Reboiler, 101-Distillation section, 3-Preheater, 4-Steam generator, 5-Wet oxidation reactor, 501-Nano-micro interface unit, 502-Sleeve, 6-Multifunctional tower, 7-Fine separation module, 8-Wastewater pipeline, 9-Light component discharge pipeline, 10-Concentrated liquid discharge pipeline, 11-Wet pipeline, 12-Gas-liquid discharge pipeline, 13-First branch pipeline, 14-Second branch pipeline, 15-Deionized water inlet pipeline, 16-Mixed liquid pipeline, 17-Feed pipeline, 18-Material discharge pipeline, 19-Recovery tank, 20-Purification unit, 21-Biochemical treatment unit, 22-Drainage pipeline, 23-Gas discharge pipeline, 24-Gas inlet pipeline.

[0041] Specific implementation methods

[0042] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings and specific embodiments. However, those skilled in the art will understand that the embodiments described below are some embodiments of the present invention, but not all embodiments, and are only used to illustrate the present invention, and should not be regarded as limiting the scope of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Where specific conditions are not specified in the embodiments, conventional conditions or conditions recommended by the manufacturer shall be followed. Where the manufacturers of reagents or instruments are not specified, they are all conventional products that can be purchased commercially.

[0043] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0044] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0045] The present invention provides a system for treating integrated circuit cleaning wastewater. This system includes: a distillation unit, a comprehensive wet oxidation module, a fine separation module 7, a light component discharge pipeline 7, a concentrated liquid discharge pipeline 10, and a wastewater pipeline 8. In this system, the distillation unit receives wastewater from the wastewater pipeline 8 and pre-treats the integrated circuit cleaning wastewater (temperature 80-110℃, pressure 0.06-0.1mPa), separating a light component liquid (a mixture containing low-boiling-point components such as methanol, ethanol, isopropanol, and piperidine) and a residual concentrated liquid. In this invention, the distillation column 1 in the distillation unit can use layered structured packing with each layer having a height of 1.2-1.5 meters, a total stacking height of 9-15 meters, or a theoretical number of 16-30 layers, preferably 20-30 layers. The residual concentrated liquid discharged from the distillation column 1 has an extremely high chemical oxygen demand (COD), and is transported to the comprehensive wet oxidation module for treatment. The light component liquid discharged from the top is transported to the fine separation module 7 for treatment.

[0046] In the integrated wet oxidation module, the residual concentrated liquid, heated by preheater 3, enters wet oxidation reactor 5 for treatment (temperature 220-250℃, pressure 4-8 mPa), generating a gas-liquid mixture. After exiting wet oxidation reactor 5, the heated gas-liquid mixture enters steam generator 4 to treat deionized water, utilizing waste heat to convert the deionized water into 0.2-0.5 mPa saturated steam. The generated saturated steam is transmitted via branch pipelines to reboiler 2 (1 / 3-1 / 2) and fine separation module 7 of the distillation unit, achieving energy recycling and reducing energy consumption throughout the process. After recovering heat in steam generator 4, the gas-liquid mixture is further cooled in preheater 3 to recover thermal energy, which is then used to preheat the gas-liquid mixture entering wet oxidation reactor 5. The cooled gas-liquid mixture enters multifunctional tower 6 for treatment (pressure reduced to 0.1-0.3 mPa), recovering system pressure energy and achieving gas-liquid separation. The gas goes to purification unit 20, and the liquid goes to biochemical treatment unit 21.

[0047] In the fine separation module 7 (a 3-4 stage series distillation column), the light component liquid is separated into methanol, ethanol, isopropanol, and piperidine by adjusting the reflux ratio (1.5-3.0). This enables resource reuse, reduces the company's raw material procurement costs, and improves resource utilization.

[0048] To more clearly illustrate the technical solutions in this invention, specific embodiments are described below.

[0049] Example 1

[0050] See Figure 1As shown, an embodiment of the present invention provides a treatment system for integrated circuit cleaning wastewater. The specific treatment process of the system is as follows: the cleaning wastewater enters the distillation unit through the wastewater pipeline 8. The distillation column 1 of the distillation unit is equipped with 20 theoretical plates. Under the conditions of temperature 95°C and pressure 0.08mPa, light components and residual concentrate (COD reduced to about 170,000 mg / L) are separated. The light components are liquefied in the condensation section and enter the fine separation module 7 through the light component discharge pipeline 9. The residual concentrate is transported to the integrated wet oxidation module through the concentrate discharge pipeline 10.

[0051] In the integrated wet oxidation module, the remaining concentrated liquid is first heated by the preheater 3, and then enters the wet oxidation reactor 5 through the wet pipeline 11. The reaction temperature is 240℃ and the pressure is 6 mPa. The nano-micro interface unit 501 at the bottom of the wet oxidation reactor 5 breaks the air supplied by the air inlet pipe 24 into 90μm microbubbles. The nano-micro interface unit 501 and the sleeve 502 of the sleeve-type turbulence structure work together to form a high-temperature gas-liquid mixture. The generated high-temperature gas-liquid mixture enters the steam generator 4 through the gas-liquid discharge pipe 12. In the steam generator 4, the waste heat is used to convert the deionized water supplied by the deionized water inlet pipe 15 into saturated steam at 0.5 mPa and 150℃. 60% of the steam is supplied to the fine separation module 7 through the first branch pipe 13, and 40% of the steam is returned to the distillation unit for auxiliary heating through the second branch pipe 14. The steam recovery rate is 100%. The high-temperature gas-liquid mixture in steam generator 4 enters preheater 3 through mixed liquid pipeline 16, where it is further cooled to recover heat energy for heating the remaining concentrated liquid before entering wet oxidation reactor 5. The cooled gas-liquid mixture enters multifunctional tower 6 through feed pipeline 17, where it is depressurized to 0.3 MPa by expansion valve group. The upper section cyclone plate separates the gas, and the lower section wire mesh captures residual droplets. The liquid enters the cold energy recovery section, where it is cooled to 71°C and discharged into the collection tank. Finally, the liquid enters biochemical treatment unit 21 through drainage pipeline 22, and the gas enters purification unit 20 for treatment through gas discharge pipeline 23.

[0052] In the fine separation module 7, a three-stage series distillation column separates high-purity methanol, ethanol, isopropanol, piperidine, and other components by adjusting the reflux ratio and operating pressure of each stage. These components are then transported to the recovery tank 19 via the material discharge pipeline 18.

[0053] Example 2

[0054] This embodiment provides a treatment system for integrated circuit cleaning wastewater. The specific treatment process of the system is as follows: the cleaning wastewater enters the distillation unit through the wastewater pipeline 8. The distillation column 1 of the distillation unit is equipped with 250Y structured packing with a packing height of 15m. Under the conditions of temperature 90℃ and pressure 0.07mPa, light components and residual concentrate (COD reduced to about 185,000 mg / L) are separated. The light components are liquefied in the condensation section and enter the fine separation module 7 through the light component discharge pipeline 9. The residual concentrate is transported to the integrated wet oxidation module through the concentrate discharge pipeline 10.

[0055] In the integrated wet oxidation module, the remaining concentrated liquid is first heated by the preheater 3, and then enters the wet oxidation reactor 5 through the wet pipeline 11. The reaction temperature is 250℃ and the pressure is 7 mPa. The nano-micro interface unit 501 at the bottom of the wet oxidation reactor 5 breaks the air supplied by the air inlet pipe 24 into 70μm microbubbles. The nano-micro interface unit 502 and the sleeve 502 of the sleeve-type turbulence structure work together to form a high-temperature gas-liquid mixture. The generated high-temperature gas-liquid mixture enters the steam generator 4 through the gas-liquid discharge pipe 12. In the steam generator 4, the waste heat is used to convert the deionized water supplied by the deionized water inlet pipe 15 into saturated steam at 0.5 mPa and 150℃. 62% of the steam is supplied to the fine separation module 7 through the first branch pipe 13, and 38% of the steam is returned to the distillation unit for auxiliary heating through the second branch pipe 14. The steam recovery rate is 100%. The high-temperature gas-liquid mixture in steam generator 4 enters preheater 3 through mixed liquid pipeline 16, where it is further cooled to recover heat energy for heating the remaining concentrated liquid before entering wet oxidation reactor 5. The cooled gas-liquid mixture enters multifunctional tower 6 through feed pipeline 17, where it is depressurized to 0.2 MPa by expansion valve group. The upper section cyclone plate separates the gas, and the lower section wire mesh captures residual droplets. The liquid enters the cold energy recovery section, where it is cooled to 70°C and discharged into the collection tank. Finally, the liquid enters biochemical treatment unit 21 through drainage pipeline 22, and the gas enters purification unit 20 for treatment through gas discharge pipeline 23.

[0056] In the fine separation module 7, a four-stage series distillation column separates high-purity methanol, ethanol, isopropanol, piperidine, and other components by adjusting the reflux ratio and operating pressure of each stage. These components are then transported to the recovery tank 19 via the material discharge pipeline 18.

[0057] Example 3

[0058] The specific implementation method is the same as that in Example 2, except that the sleeve 502 adopts a mixed section design.

[0059] Comparative Example 1

[0060] The specific implementation method is the same as in Example 2, except that the nano-micro interface unit 501 is not used.

[0061] Comparative Example 2

[0062] The specific implementation method is the same as in Example 2, except that the sleeve 502 is not used.

[0063] Comparative Example 3

[0064] The specific implementation method is the same as in Example 2, except that a single-stage distillation column is used in the fine separation module 7.

[0065] Comparative Example 4

[0066] The specific implementation method directly adopts the ordinary wet oxidation method to treat wastewater.

[0067] Experimental Example 1

[0068] In a pilot plant specializing in cleaning for integrated circuit manufacturing, the treatment systems described in Examples 1-3 and Comparative Examples 1-4 were used to treat typical wastewater containing 1.8% methanol, 1.9% ethanol, 4.0% isopropanol, 11.0% piperidine, and 1.9% DMF, with a chemical oxygen demand (COD) of approximately 250,000 mg / L. After the above steps, the COD values ​​of the treated wastewater were measured, and the experimental results are shown in Table 1.

[0069] Table 1. Experimental Results

[0070]

[0071] Based on the above data, the following conclusions can be drawn:

[0072] Based on the data recorded above, the COD removal rates of Comparative Example 1 and Comparative Example 2 were 68% and 65%, respectively, significantly lower than the 75% of the Example. This indicates that the nano-micro interface unit of the present invention significantly increases the gas-liquid mass transfer area by generating 70μm microbubbles (Example 2), and enhances the mixing efficiency by extending the residence time of microbubbles through enhanced turbulent mixing with the sleeve-type turbulence structure, thereby increasing the reaction rate and improving the decomposition efficiency of organic pollutants.

[0073] Compared with Comparative Example 4, the distillation device and fine separation system in Example 2 achieved a separation accuracy of 98% for methanol, ethanol, isopropanol, etc., indicating that direct oxidation of untreated wastewater (COD 250,000 mg / L) would lead to reactor overload and incomplete degradation of organic matter. The distillation device reduces the COD of the remaining concentrated liquid by separating light components, making the wet oxidation reaction more efficient. In the process of wet oxidation reaction, the synergistic effect of nano-micro interface units and sleeve-type turbulence structure improves the decomposition efficiency of organic pollutants.

[0074] As can be seen from Examples 1-3 and Comparative Example 3, the multi-stage series distillation column in the fine module achieves the stepwise separation of components with similar boiling points such as methanol, ethanol, and isopropanol through gradient operating pressure and reflux ratio adjustment (1.5-3.0); the single-stage distillation column (Comparative Example 3) cannot effectively separate multi-component mixtures, resulting in a significant decrease in recovery rate. The light component recovery purity of the multi-stage distillation column in the examples reaches over 99%, which can be directly reused in the production line, further saving raw material costs.

[0075] The integrated circuit cleaning wastewater treatment system of the present invention achieves efficient degradation and resource recovery of high-concentration organic wastewater (light component recovery rate > 98%) and energy recycling through collaborative design.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A system for treating integrated circuit cleaning wastewater, characterized in that, include: Distillation unit, integrated wet oxidation module, fine separation module, light component discharge pipeline, concentrated liquid discharge pipeline, wastewater pipeline; The wastewater pipeline is connected to the distillation unit, and the wastewater pipeline transports cleaning wastewater to the distillation unit for pretreatment to obtain light component liquid and residual concentrate. The two ends of the distillation unit are respectively connected to the light component discharge pipeline and the concentrate discharge pipeline. The light component discharge pipeline transports the light component liquid to the fine separation module for separation and purification. The concentrate discharge pipeline transports the residual concentrate to the integrated wet oxidation module for oxidation treatment. The integrated wet oxidation module includes a preheater, a wet oxidation reactor, a steam generator, and a multi-functional tower. The concentrated liquid discharge pipeline is connected to the preheater inlet, transporting the remaining concentrated liquid to the preheater for heating. The preheater outlet is connected to the wet oxidation reactor inlet via a wet pipeline, transporting the heated remaining concentrated liquid to the wet oxidation reactor to generate a high-temperature gas-liquid mixture. The discharge port at the top of the wet oxidation reactor is connected to the steam generator via a gas-liquid discharge pipeline, utilizing the waste heat of the high-temperature gas-liquid mixture to convert deionized water into steam. The system stores energy; the steam generator is connected to the fine separation module via a first branch pipe, delivering steam to the fine separation module to provide thermal energy; the steam generator is connected to the distillation unit via a second branch pipe, delivering steam to the distillation unit to provide auxiliary thermal energy; the steam generator is connected to the preheater via a mixed liquid pipeline, delivering the high-temperature gas-liquid mixture to the preheater for cooling; the preheater is connected to the feed inlet on the side wall of the multifunctional tower via a feed pipeline to perform gas-liquid separation on the cooled gas-liquid mixture; The multifunctional tower has gas-liquid separation and cold energy recovery sections. The multifunctional tower is also equipped with an expansion valve group located around the feed inlet to reduce the pressure of the cooled gas-liquid mixture. The upper section of the gas-liquid separation section is equipped with a swirl plate, and the lower section is equipped with a wire mesh to separate the gas and liquid. The cold energy recovery section is equipped with a cold storage body, which cools the liquid through heat exchange and flows into the liquid collection tank at the bottom of the multifunctional tower.

2. The integrated circuit cleaning wastewater treatment system according to claim 1, characterized in that, The bottom of the wet oxidation reactor is connected to an air inlet pipe to deliver air into the wet oxidation reactor; the wet oxidation reactor is provided with a nano-micro interface unit, which is located on the bottom horizontal cross section of the wet oxidation reactor. The nano-micro interface unit is an array surface composed of multiple sets of nano-micro interface components, which can convert the air into microbubbles.

3. The integrated circuit cleaning wastewater treatment system according to claim 2, characterized in that, The wet oxidation reactor also includes a sleeve-type turbulence structure to enhance the thorough mixing of the microbubbles and the remaining concentrate. The sleeve consists of a mixing section, a flow transition section, and a plug flow stabilization section from bottom to top. Multiple layers of spiral fins are evenly distributed along the inner wall of the mixing section at a 60-degree angle to the axis of the sleeve. The leading edge of the spiral fins has a wavy structure. Multiple turbulence plates are provided on the inner walls of the flow transition section and the plug flow stabilization section.

4. The integrated circuit cleaning wastewater treatment system according to claim 1, characterized in that, The distillation apparatus includes a distillation column, which has a condensation section and a rectification section inside; the condensation section generates the light component liquid through conversion; the rectification section uses either stratified structured packing or theoretical plates; the packing and theoretical plates are located in the middle of the distillation column. The layered structured packing has a height of 1.2-1.5 meters per layer, with a total stacking height of 9-15 meters; The theoretical number of trays is 16-30.

5. The integrated circuit cleaning wastewater treatment system according to claim 1, characterized in that, The fine separation module consists of multiple distillation columns connected in a multi-stage separation process. The fine separation module is also equipped with a reflux ratio control and product collection unit to regulate the temperature and pressure of the fine separation module and separate the various substances in the light component liquid.

6. The integrated circuit cleaning wastewater treatment system according to claim 1, characterized in that, The multifunctional tower is provided with a gas outlet at the top, through which the gas is transported to the purification unit via a gas discharge pipeline; the multifunctional tower is provided with a drain outlet at the bottom, through which the liquid is transported to the biochemical treatment unit via a drain pipeline.

7. The integrated circuit cleaning wastewater treatment system according to claim 1, characterized in that, The steam generator is also provided with a water inlet, which is connected to a deionized water inlet pipeline to deliver the deionized water to the steam generator.

8. The integrated circuit cleaning wastewater treatment system according to claim 1, characterized in that, It also includes a recycling tank, which is connected to the fine separation module through a material discharge pipeline to realize the recycling of various substances.

9. A method for treating integrated circuit cleaning wastewater according to any one of claims 1-8, characterized in that, Includes the following steps: The cleaning wastewater is fed into the distillation unit through a wastewater pipeline to separate the light component liquid from the remaining concentrated liquid; the light component liquid is fed into the fine separation module through the light component discharge pipeline to separate the various substances in the light component liquid; the remaining concentrated liquid is fed into the integrated wet oxidation module through the concentrated liquid discharge pipeline for efficient treatment.

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