Crystal growth furnace and seed replacement process

Abstract

The application discloses a crystal growth furnace and a seed crystal replacement process, relates to the technical field of crystal growth, and has the technical scheme that the crystal growth furnace comprises an isolation bin, a furnace body, a crystal supply assembly, the crystal supply assembly comprises a receiving cylinder, seed crystals are stacked in the receiving cylinder, a push plate is arranged in the receiving cylinder, a pushing mechanism is arranged on one side of the push plate, a driving assembly is arranged, the driving assembly comprises a driving sleeve, a plurality of extension frames are fixedly arranged on the driving sleeve, a clamping mechanism is arranged on one side of the extension frame, and the driving assembly further comprises a power mechanism; a heat insulation mechanism is arranged and is used for preventing heat from being lost to the isolation bin through the feeding pipe; and a discharging mechanism is arranged and is used for discharging the waste seed crystals. According to the technical scheme, the receiving cylinder and the pushing mechanism are arranged, the seed crystals can be received and placed in a space-saving vertical stacking mode, the seed crystals are pushed upward through the push plate, the damage probability of the seed crystals is greatly reduced, and the integrity of the seed crystals is guaranteed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of crystal growth, in particular to a crystal growth furnace and a seed crystal replacement process. BACKGROUND

[0002] As an important optoelectronic material, sapphire single crystal has a wide range of applications in high-tech fields such as LED chips, optical windows, and lasers. Currently, the growth of sapphire single crystals mainly relies on the Kyropoulos method. The Kyropoulos method involves contacting a seed crystal with a melt and pulling the seed crystal at an extremely slow speed to ultimately form a single crystal ingot. This method is mature, has low costs, and is suitable for mass production. However, as technology advances, there are increasingly high requirements for the quality and size of sapphire single crystals, and traditional sapphire crystal growth furnaces are no longer able to meet current production needs.

[0003] The prior art document with publication number CN115558985A provides a seed crystal replacement device, a sapphire crystal growth furnace, and a seed crystal replacement method. The device places multiple seed crystals in the furnace chamber of the crystal growth furnace by setting a carrier, and also avoids damage to the standby seed crystals caused by long-term exposure to a high-temperature environment, thereby ensuring the quality of the seed crystals.

[0004] Although the above prior art solution achieves individual replacement of seed crystals, it still has the following defects. The above technical solution stacks the seed crystals to be replaced in the hollow rod and uses gravity to transport the seed crystals into the first chuck. During the falling of the seed crystals, the seed crystals may be damaged, and when the upper seed crystals fall downward, the lower seed crystals will also be impacted, increasing the risk of damage to the seed crystals and adversely affecting the normal operation of the crystal growth furnace. In view of this, we propose a crystal growth furnace and a seed crystal replacement process. SUMMARY

[0005] In view of one of the deficiencies of the prior art, the present application provides a crystal growth furnace and a seed crystal replacement process to solve the problem of seed crystal growth.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical solution: a crystal growth furnace, comprising:

[0007] An isolation bin, which is internally hollow and can isolate the external environment, has a sealing cover inserted at the top;

[0008] A furnace body, which is arranged in the isolation bin, comprises a heat-insulating shell, a crucible is installed in the heat-insulating shell, and a feeding pipe is arranged on the heat-insulating shell;

[0009] A seed crystal supply assembly, which comprises a receiving cylinder for placing seed crystals, and the seed crystals are stacked along the length direction of the receiving cylinder; a pushing mechanism is arranged in the receiving cylinder, and the pushing mechanism can push the seed crystals in the receiving cylinder upward;

[0010] The clamping assembly comprises an extension frame arranged inside the isolation bin, and a plurality of clamping mechanisms arranged at the lower part of the extension frame, which can clamp the seed crystal;

[0011] The driving assembly can drive the extension frame to rotate, ascend or descend;

[0012] The unloading mechanism comprises a waste cylinder arranged inside the isolation bin, and is used for unloading the waste seed crystal.

[0013] Preferably, the crystal supply assembly further comprises:

[0014] The push plate is arranged inside the receiving cylinder and is in sliding connection with the receiving cylinder;

[0015] The push mechanism is linked with the push plate and can drive the push plate to slide along the length direction of the receiving cylinder;

[0016] The push plate is linked with the extension frame, and the sliding distance of the push plate is matched with the rotation angle of the extension frame.

[0017] Preferably, the push mechanism comprises:

[0018] The reciprocating screw rod is rotatably arranged at one side of the receiving cylinder, and the push plate extending to the side outside the receiving cylinder is in threaded connection with the reciprocating screw rod;

[0019] The rotating frame is fixedly arranged at one side of the receiving cylinder, and the reciprocating screw rod is rotatably connected to the rotating frame;

[0020] The driving assembly comprises:

[0021] The rotating mechanism can drive the reciprocating screw rod to rotate, and the rotating mechanism is linked with the extension frame and can drive the extension frame to rotate.

[0022] Preferably, the driving assembly comprises:

[0023] The driving sleeve is rotatably arranged inside the isolation bin, is fixedly connected with the extension frame, and the extension frame is evenly arranged with a plurality of driving sleeves around the circumference of the driving sleeve;

[0024] The power mechanism can drive the extension frame to ascend or descend, and when the extension frame descends, the clamping mechanisms at the lower part of the extension frame can extend into the receiving cylinder, the feeding pipe or the waste cylinder.

[0025] Preferably, the power mechanism comprises a rotating mechanism for driving the driving sleeve to rotate and a lifting mechanism for driving the driving sleeve to ascend or descend; the driving sleeve is provided with a spline groove; and the rotating mechanism comprises:

[0026] The spline rod is in sliding connection with the spline groove inside the driving sleeve;

[0027] A groove wheel is sleeved outside the spline rod;

[0028] An electric motor is fixedly arranged inside the isolation bin;

[0029] A receiving rod is connected with the motor shaft of the electric motor;

[0030] A push rod is connected with the receiving rod, and the push rod is engaged with the groove wheel;

[0031] The lifting mechanism comprises:

[0032] The lifting drive is a telescopic cylinder, and the driving sleeve is rotatably connected to the end of the lifting drive.

[0033] Preferably, the rotating mechanism comprises:

[0034] A driving gear is sleeved outside the receiving rod, and the driving gear is an incomplete gear mechanism;

[0035] A connecting gear is rotatably arranged on one side of the driving gear, and the connecting gear is engaged with the driving gear;

[0036] Synchronous wheels are coaxially and fixedly connected with the connecting gear and the reciprocating wire rod respectively, and the two synchronous wheels are connected through a synchronous belt.

[0037] Preferably, the clamping mechanism comprises:

[0038] A connecting assembly comprises a mounting cylinder fixedly arranged at the end of the extension frame, a plurality of limiting clamping columns are slidably arranged on the mounting cylinder, the end of the limiting clamping column towards the mounting cylinder is arranged in a triangular structure, and a first spring is fixedly connected between the limiting clamping column and the mounting cylinder;

[0039] A chuck is arranged at the end of the seed crystal, the outer side of the chuck is made of heat insulation material, and the chuck is slidably connected with the inner wall of the feeding pipe;

[0040] A connecting block is fixedly arranged on the chuck, the end of the connecting block is arranged in an inverted circular structure, the end of the connecting block is slidably connected with the limiting clamping column, a plurality of positioning holes are arranged on the outer wall of the connecting block, and the limiting clamping column is engaged with the positioning hole.

[0041] Preferably, an accommodating hole is arranged at the upper end of the connecting block, the inner side of the accommodating hole is made of silica gel material, and the end of the seed crystal is engaged with the accommodating hole.

[0042] Preferably, the discharging mechanism further comprises:

[0043] Magnets are fixedly arranged on both sides above the waste cylinder, the end of the limiting clamping column is made of a material that can be magnetically attracted, and the limiting clamping column can be attracted by the magnet.

[0044] Preferably, further comprising:

[0045] A heat insulation mechanism for preventing heat loss from the feed pipe to the insulation bin; the heat insulation mechanism comprises:

[0046] A closing assembly for closing the lower port of the feed pipe, the closing assembly comprises:

[0047] A blocking plate in sliding connection with the lower port of the feed pipe;

[0048] A pushing mechanism for sliding the blocking plate, the pushing mechanism comprises:

[0049] A mounting box fixedly embedded inside the heat insulation shell;

[0050] A pushing block inside the mounting box, the pushing block and the mounting box are in sliding connection; the upper side of the pushing block is a slope;

[0051] A pressing rod, which is a vertically arranged rod body, the pressing rod and the heat insulation shell are in sliding connection;

[0052] A driving block fixedly arranged at the bottom end of the pressing rod; the lower end surface of the driving block is a slope structure corresponding to the upper end surface of the pushing block, and the driving block and the pushing block are in sliding connection;

[0053] A second spring arranged between the pressing rod and the mounting box;

[0054] A pushing frame fixedly arranged on the extension frame, the pushing frame can abut against the upper end of the pressing rod.

[0055] Preferably, the heat insulation mechanism further comprises a heat insulation ring, the heat insulation ring is installed below the mounting cylinder, a receiving sleeve is fixedly installed on the extension frame, the heat insulation ring and the receiving sleeve are in sliding connection, a third spring is fixedly connected between the heat insulation ring and the receiving sleeve, and the heat insulation ring is in abutting cooperation with the end of the feed pipe.

[0056] A seed crystal replacement process using the crystal growth furnace described above, comprising the following steps:

[0057] S1, the lifting driving member operates, the extension frame takes out the seed crystal from the receiving cylinder and the heat insulation shell through the clamping assembly and moves upward until the seed crystal is separated from the feed pipe and the receiving cylinder;

[0058] S2, under the action of the second spring, the blocking plate blocks the feed pipe to prevent heat loss;

[0059] S3, the motor operates to drive the sleeve to drive the extension frame and the seed crystal to rotate until the new seed crystal is rotated above the feed pipe;

[0060] S4, in the process of driving the extension frame and the seed crystal to rotate, the waste seed crystal falls into the waste cylinder;

[0061] S5, the lifting drive drives the extension frame to move downward, the blocking plate gradually separates from the lower end of the feeding pipe, and the corresponding extension frame drives the new seed crystal to move into the heat insulation shell and releases the seed crystal.

[0062] Compared with the prior art, the following beneficial effects are achieved:

[0063] 1. The technical scheme of the application can save space by vertically stacking the seed crystals, and the push plate can push the seed crystals upward, greatly reducing the damage probability of the seed crystals and ensuring the integrity of the seed crystals.

[0064] 2. The technical scheme of the application can ensure the stability of the seed crystals during movement and prevent the seed crystals from falling during movement by setting the connecting assembly and the connecting block.

[0065] 3. The technical scheme of the application can facilitate the disposal of waste seed crystals by the staff, and also facilitate the smooth replacement of subsequent seed crystals.

[0066] 4. The technical scheme of the application can not only allow the seed crystals to move stably in the receiving cylinder, but also can avoid the mutual collision of the seed crystals in the receiving hole lined with silica gel, effectively improving the protection of the seed crystals and preventing the seed crystals from being damaged during replacement.

[0067] 5. The technical scheme of the application can play a good heat insulation role by setting the blocking plate and the pushing mechanism, preventing heat loss, improving energy utilization rate, and avoiding temperature rise in the isolation bin to damage the seed crystals. BRIEF DESCRIPTION OF DRAWINGS

[0068] Figure 1 The overall structure of the embodiment of the application is shown in the figure;

[0069] Figure 2 The partial structure of the inner side of the isolation bin of the embodiment of the application is shown in the figure;

[0070] Figure 3 The rear view of the partial structure of the inner side of the embodiment of the application is shown in the figure;

[0071] Figure 4 The structure of the extension frame moving downward is shown in the figure;

[0072] Figure 5 The structure of the seed crystal supply assembly is shown in the figure;

[0073] Figure 6 Structure sectional view of the driving sleeve of the embodiment of the present application;

[0074] Figure 7 Structure sectional view of the mounting cylinder and the connecting block of the embodiment of the present application;

[0075] Figure 8 Structure schematic view of the closed assembly of the embodiment of the present application;

[0076] Figure 9 Structure schematic view of part of the heat insulation ring of the embodiment of the present application;

[0077] In the figure:

[0078] 1, insulation bin; 2, heat insulation shell; 3, crucible; 4, sealing cover;

[0079] 5, connecting assembly; 501, mounting cylinder; 502, limiting clamping column; 503, first spring;

[0080] 6, crystal supply assembly; 601, receiving cylinder; 602, push plate; 603, reciprocating screw rod; 604, rotating frame; 605, connecting gear; 606, driving gear; 607, synchronous belt; 608, synchronous wheel;

[0081] 7, connecting block; 701, containing hole; 702, positioning hole;

[0082] 8, closed assembly; 801, mounting box; 802, push frame; 803, driving block; 804, pressing rod; 805, push block; 806, plugging plate; 807, second spring;

[0083] 9, driving assembly; 901, lifting driving part; 902, driving sleeve; 903, spline rod; 904, receiving rod; 905, motor; 906, groove wheel; 907, pushing rod; 908, spline groove;

[0084] 10, heat insulation ring; 11, seed crystal; 12, chuck; 13, extension frame; 14, receiving sleeve; 15, third spring; 16, feeding pipe; 17, waste cylinder; 18, magnet. DETAILED DESCRIPTION

[0085] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0086] Please refer to Figures 1-9The application provides the following technical scheme:

[0087] A crystal growth furnace comprises an isolation bin 1, a furnace body, a crystal supply assembly 6, a driving assembly 9, a heat insulation mechanism and a discharging mechanism.

[0088] The isolation bin 1 is used for isolating the external environment, and a sealing cover 4 is arranged on the top of the isolation bin 1; the furnace body is arranged in the isolation bin 1 and is used for crystal growth, and the furnace body comprises a heat insulation shell 2, a crucible 3 is arranged in the heat insulation shell 2, and a feeding pipe 16 is arranged through the heat insulation shell 2; the crystal supply assembly 6 comprises a receiving cylinder 601, seed crystals 11 are stacked in the receiving cylinder 601, a push plate 602 is arranged in the receiving cylinder 601, the push plate 602 is connected with a pushing mechanism in a linkage mode, the pushing mechanism is used for driving the push plate 602 to move up and down, so that the seed crystals 11 in the receiving cylinder 601 are moved up one by one; the driving assembly 9 comprises a driving sleeve 902, a plurality of extension frames 13 are fixedly arranged on the driving sleeve 902, a clamping mechanism is arranged at the lower part of each extension frame 13, the clamping mechanism is used for clamping the seed crystals 11, and the driving assembly 9 further comprises a power mechanism, which is used for replacing the seed crystals 11; the heat insulation mechanism is used for preventing heat from being lost to the isolation bin 1 through the feeding pipe 16; and the discharging mechanism is used for discharging the waste seed crystals 11.

[0089] The crystal growth furnace is mainly used for manufacturing sapphire single crystals, and can be adjusted to be applied to other types of single crystals. When the seed crystals 11 need to be replaced, the power mechanism is operated under the control of an external control mechanism, the driving sleeve 902 drives the clamping mechanism to move downwards, one of the extension frames 13 clamps the seed crystal 11 in the heat insulation shell 2 through the clamping mechanism, and the other extension frame 13 clamps the new seed crystal 11 in the receiving cylinder 601 through the clamping mechanism, then the driving sleeve 902 drives the extension frame 13 and the seed crystal 11 to rotate until the new seed crystal 11 is rotated to above the feeding pipe 16, subsequently, the extension frame 13 drives the new seed crystal 11 to move downwards and sends the new seed crystal 11 into the heat insulation shell 2. After the new seed crystal 11 is taken out, the push plate 602 drives the new seed crystal 11 in the receiving cylinder 601 to move upwards under the action of the pushing mechanism, until a part of the uppermost seed crystal 11 is pushed out of the receiving cylinder 601. In this way, the seed crystals 11 can be received and placed in a space-saving vertical stacking mode, and the seed crystals 11 are pushed upwards by the push plate 602, so that the damage probability of the seed crystals 11 is greatly reduced, and the integrity of the seed crystals 11 is guaranteed.

[0090] On the basis of the above-mentioned embodiments, the following Figure 1 , Figure 2 , Figure 4 , Figure 5 and Figure 6The power mechanism of the crystal growth furnace comprises a rotating mechanism and a lifting mechanism.

[0091] The rotating mechanism comprises a spline rod 903 and a motor 905.

[0092] The lifting mechanism comprises a lifting drive 901.

[0093] Under the action of the motor 905, the driving rod 907 rotates and contacts the groove wheel 906, and the spline rod 903 drives the driving sleeve 902, the extension frame 13 and the seed crystal 11 to rotate by a certain angle.

[0094] Based on the above embodiment, referring to Figure 2 、 Figure 4 and Figure 5 the pushing mechanism of the crystal growth furnace comprises a rotating frame 604 and a rotating mechanism.

[0095] The rotating frame 604 is fixedly installed on one side of the storage cylinder 601, and the reciprocating screw rod 603 is rotatably connected to the rotating frame 604.

[0096] During the pushing of the driving rod 907 on the groove wheel 906, the driving gear 606 and the connecting gear 605 are disengaged, and the reciprocating screw rod 603 is in a stationary state. When the driving rod 907 is disengaged from the groove wheel 906, the driving gear 606 and the connecting gear 605 are gradually engaged, the reciprocating screw rod 603 rotates, and the push plate 602 immediately pushes the seed crystal 11 upward.

[0097] On the basis of the above-mentioned embodiments, with reference to Figure 2 and Figure 7 The crystal growth furnace provided by the embodiments of the present application comprises a clamping mechanism, which comprises a connecting assembly 5, a connecting block 7 and a chuck 12.

[0098] The connecting assembly 5 comprises a mounting cylinder 501 fixedly installed at the end of the extension frame 13, a plurality of limiting clamping columns 502 slidably arranged on the mounting cylinder 501, and a first spring 503 fixedly connected between the limiting clamping column 502 and the mounting cylinder 501.

[0099] The connecting block 7 is fixedly installed on the chuck 12, and the chuck 12 is installed at the end of the seed crystal 11. The end of the connecting block 7 is provided in an inverted circular structure, and the end of the connecting block 7 is in sliding fit with the limiting clamping column 502. A plurality of positioning holes 702 are formed in the outer wall of the connecting block 7, and the limiting clamping column 502 is in clamping fit with the positioning hole 702.

[0100] When the extension frame 13 drives the mounting cylinder 501 to move downward and is sleeved outside the connecting block 7, the connecting block 7 will first push the limiting clamping column 502 outward. When the positioning hole 702 is aligned with the limiting clamping column 502, the clamping column 502 enters the positioning hole 702 under the resetting action of the first spring 503, so that the stability of the seed crystal 11 during movement can be ensured, and the seed crystal 11 can be prevented from falling during movement.

[0101] On the basis of the above-mentioned embodiments, a receiving hole 701 is formed in the upper end of the connecting block 7, and the inner side of the receiving hole 701 is made of silica gel.

[0102] The provision of the receiving hole 701 can not only enable the seed crystal 11 to stably move in the receiving cylinder 601, but also can prevent the seed crystals 11 from colliding with each other, effectively improve the protection of the seed crystal 11, and prevent the seed crystal 11 from being damaged during replacement.

[0103] On the basis of the above-mentioned embodiments, with reference to Figure 3 and Figure 7 The unloading mechanism comprises a waste cylinder 17, two magnets 18 are installed on the waste cylinder 17, the end of the limiting clamping column 502 is made of a magnetic metal, and the limiting clamping column 502 is in magnetic fit with the magnet 18.

[0104] In the process of driving the sleeve 902 to drive the extension frame 13 and the seed crystal 11 to rotate, the waste seed crystal 11 is gradually rotated to above the waste cylinder 17, under the magnetic force of the magnet 18, the clamping column 502 moves outward and is separated from the containing hole 701, and the waste seed crystal 11 falls into the waste cylinder 17 immediately, on the one hand, it is convenient for the staff to process the waste seed crystal 11, and on the other hand, it is also beneficial to the smooth replacement of the subsequent seed crystal 11.

[0105] On the basis of the above-mentioned embodiments, with reference to Figure 2 , Figure 4 , Figure 8 and Figure 9 , the crystal growth furnace provided in the embodiment of the application comprises a sealing assembly 8 and a heat insulation ring 10, the outer side of the chuck 12 is made of heat insulation material, and the chuck 12 is in sliding fit with the inner wall of the feeding pipe 16.

[0106] The sealing assembly 8 comprises a sealing plate 806, the sealing plate 806 is in sliding fit with the feeding pipe 16, and the sealing plate 806 and a pushing mechanism are linked, and the pushing mechanism is used to drive the sealing plate 806 to move linearly.

[0107] On the basis of the above-mentioned embodiments, the pushing mechanism of the crystal growth furnace in the present application comprises a mounting box 801 embedded and fixed in the inside of the heat insulation shell 2, a pushing block 805 in sliding connection in the mounting box 801, the upper side of the pushing block 805 being provided in a slope structure, a lower pressing rod 804 being slidably arranged on the heat insulation shell 2, a driving block 803 being fixedly connected at the end of the lower pressing rod 804 and provided in a triangular structure, the driving block 803 being in sliding connection with the pushing block 805, a second spring 807 being fixedly connected between the lower pressing rod 804 and the mounting box 801, a pushing frame 802 being fixedly installed on the extension frame 13, and the pushing frame 802 being in movable contact with the lower pressing rod 804.

[0108] When the extension frame 13 drives the seed crystal 11 to move into the heat insulation shell 2 through the feeding pipe 16, the pushing frame 802 moves along and gradually contacts the lower pressing rod 804, the driving block 803 immediately pushes the pushing block 805, the sealing plate 806 gradually separates from the lower end of the feeding pipe 16, and the seed crystal 11 smoothly enters, and when the seed crystal 11 is clamped out, the sealing plate 806 blocks the feeding pipe 16 under the action of the second spring 807 due to the loss of the limiting of the pushing frame 802, which can play a good heat insulation effect and prevent heat loss, on the one hand, it can improve the energy utilization rate, and on the other hand, it can avoid the temperature rise in the insulation bin 1 and damage to the seed crystal 11.

[0109] On the basis of the above-mentioned embodiment, the heat insulation ring 10 is installed below the mounting cylinder 501, the extension frame 13 is fixedly installed with the receiving sleeve 14, the heat insulation ring 10 is in sliding connection with the receiving sleeve 14, the third spring 15 is in fixed connection between the heat insulation ring 10 and the receiving sleeve 14, and the heat insulation ring 10 is in abutting cooperation with the end portion of the feeding pipe 16.

[0110] When the extension frame 13 drives the seed crystal 11 to move into the heat insulation shell 2, the heat insulation ring 10 first contacts the end portion of the feeding pipe 16, and then the chuck 12 gradually moves into the feeding pipe 16, thereby further reducing the heat loss of the feeding pipe 16 to the outside and improving the protection effect on the external seed crystal 11.

[0111] In addition, the present application also provides a seed crystal replacement process, which is applied to the aforementioned crystal growth furnace and includes the following steps.

[0112] S1, the lifting driving part 901 is operated, one of the driving sleeves 902 drives the extension frame 13 and the seed crystal 11 in the heat insulation shell 2 to move upwards until the seed crystal 11 is separated from the feeding pipe 16;

[0113] S2, under the action of the second spring 807, the blocking plate 806 blocks the feeding pipe 16 to prevent heat loss;

[0114] S3, the motor 905 is operated, the driving sleeve 902 drives the extension frame 13 and the seed crystal 11 to rotate until the new seed crystal 11 is rotated above the feeding pipe 16;

[0115] S4, in the process of driving the extension frame 13 and the seed crystal 11 to rotate by the driving sleeve 902, the waste seed crystal 11 falls into the waste cylinder 17;

[0116] S5, then, the lifting driving part 901 is reversely operated, the blocking plate 806 is gradually separated from the lower end of the feeding pipe 16, and the corresponding extension frame 13 drives the new seed crystal 11 to gradually move into the heat insulation shell 2.

[0117] The implementation principle of the crystal growth furnace in the embodiment of the present application is as follows: in the process of using the technical solution, when the seed crystal 11 needs to be replaced, one of the driving sleeves 902 drives the extension frame 13 and the seed crystal 11 in the heat insulation shell 2 to move upwards under the action of the lifting driving part 901 until the seed crystal 11 is separated from the feeding pipe 16.

[0118] In this process, the pushing frame 802 loses the limit, and the blocking plate 806 blocks the feeding pipe 16 to prevent heat loss under the action of the second spring 807.

[0119] Then, under the action of the motor 905, the dial lever 907 rotates, and after contacting the groove wheel 906, the spline rod 903 drives the driving sleeve 902, the extension frame 13 and the seed crystal 11 to rotate, until the new seed crystal 11 rotates to above the feeding pipe 16.

[0120] Subsequently, the lifting driving part 901 reversely operates, and the corresponding extension frame 13 drives the new seed crystal 11 to gradually move into the heat insulation shell 2, in the process, the pushing frame 802 moves along and gradually contacts the downward pressing rod 804, the driving block 803 immediately pushes the pushing block 805, and the sealing plate 806 gradually separates from the lower end of the feeding pipe 16, so that the seed crystal 11 smoothly enters.

[0121] In the process of rotating the extension frame 13 and the seed crystal 11 by the driving sleeve 902, the waste seed crystal 11 gradually rotates to above the waste cylinder 17, under the magnetic force of the magnet 18, the clamping column 502 moves outward and separates from the containing hole 701, and the waste seed crystal 11 immediately falls into the waste cylinder 17.

[0122] When the extension frame 13 drives the mounting cylinder 501 to move downward, one of the mounting cylinders 501 is sleeved outside the connecting block 7, under the reset action of the first spring 503, the clamping column 502 enters the positioning hole 702, so as to ensure the stability of the seed crystal 11 in the moving process.

[0123] When the dial lever 907 separates from the groove wheel 906, the driving gear 606 gradually meshes with the connecting gear 605, the reciprocating screw rod 603 rotates, and the push plate 602 pushes the seed crystal 11 upward, so that the connecting block 7 of the uppermost seed crystal 11 is pushed out of the containing cylinder 601.

[0124] In the description of the present application and the embodiments thereof, it should be understood that the orientations or positional relationships indicated by the terms "top", "bottom", "height" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0125] In the present application and the embodiments thereof, unless otherwise explicitly specified and limited, the terms "arrangement", "installation", "connection", "linkage", "fixation" and the like should be understood in a broad sense, for example, can be fixed connection, can also be detachable connection, or integrated; can be mechanical connection, can also be electrical connection, or communication; can be directly connected, or indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0126] In the present application and embodiments thereof, unless specifically stated and limited otherwise, "on" or "under" of a first feature with respect to a second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Also, "over", "above", and "on top of" of a first feature with respect to a second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature. "Under", "below", and "underneath" of a first feature with respect to a second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is horizontally lower than the second feature.

[0127] The above disclosure provides many different embodiments or examples for implementing different structures of the present application. For the purpose of simplicity, the elements and settings of the particular examples in the above are described in some detail. This is, of course, done without loss of generality and is intended to provide what is believed to be the most useful and readily understood description of the structures as well as to fully convey the scope of the application. Descriptions of the various embodiments and / or settings are intended merely as illustrative examples and are not intended to limit the scope of the application. Furthermore, the various examples of the present application can be used in different embodiments and / or settings without departing from the scope of the present application. It is also noted that, as used in the specification and the appended claims, the singular forms "a," "an" and "the" include plural referents unless the context clearly dictates otherwise.

[0128] While the preferred embodiments of the application have been described, additional variations and modifications can be made to the preferred embodiments without departing from the spirit and scope of the application. Therefore, it is intended that the appended claims cover all such variations and modifications that come within the scope of the application.

[0129] Obviously, numerous modifications and variations of the present application are possible in light of the above teachings. It is therefore to be understood that within the scope of the appended claims and their equivalents, the application can be practiced otherwise than as specifically described.

Claims

1. A crystal growth furnace, characterized in that: Include: Isolation chamber (1), the isolation chamber (1) is used to isolate the external environment, and a sealing cover (4) is inserted on one side of the isolation chamber (1). The furnace body is located in the isolation chamber (1). The furnace body includes a heat insulation shell (2). A crucible (3) is installed inside the heat insulation shell (2). A feed pipe (16) is provided on one side of the heat insulation shell (2). The crystal supply assembly (6) includes a storage cylinder (601), in which seed crystals (11) are stacked. A pusher plate (602) is provided inside the storage cylinder (601). A pushing mechanism is installed on one side of the pusher plate (602), and the pushing mechanism is used to drive the pusher plate (602) to move up and down. The drive assembly (9) includes a drive sleeve (902), on which a plurality of extension frames (13) are fixedly installed. A clamping mechanism is installed on one side of the extension frame (13) for clamping the seed crystal (11). The drive assembly (9) also includes a power mechanism for replacing the seed crystal (11). A heat insulation mechanism is provided to prevent heat from being lost into the isolation chamber (1) through the feed pipe (16); The unloading mechanism is used to unload the waste seed crystal (11). The power mechanism includes a rotating mechanism, which drives the drive sleeve (902) to rotate. The rotating mechanism includes: The spline rod (903) has a spline groove (908) inside the drive sleeve (902), the spline rod (903) and the spline groove (908) are slidably connected, and a grooved wheel (906) is sleeved on one side of the spline rod (903). The motor (905) has a support rod (904) fixedly connected to the output end of the motor (905), and a toggle rod (907) fixedly connected to the end of the support rod (904). The toggle rod (907) is engaged with the grooved wheel (906). The lifting mechanism is used to drive the drive sleeve (902) to move up and down. The lifting mechanism includes an electric push rod (901), and the drive sleeve (902) is rotatably connected to the end of the electric push rod (901); The push mechanism includes: A rotating frame (604) is fixedly installed on one side of a storage cylinder (601). A reciprocating screw (603) is rotatably connected to the rotating frame (604). A push plate (602) is sleeved on one side of the reciprocating screw (603). The push plate (602) is slidably engaged with the reciprocating screw (603) and slidably connected with the storage cylinder (601). A rotating mechanism is provided to drive the reciprocating lead screw (603) to rotate. The rotating mechanism includes: A drive gear (606) is sleeved and fixed on one side of the support rod (904). The drive gear (606) is an incomplete gear mechanism. A connecting gear (605) meshes with a drive gear (606); Drive wheel (608), drive gear (606) and reciprocating screw (603) are both fixedly connected to drive wheel (608), belt (607) is installed on one side of drive gear (606), drive wheel (608) and belt (607) are frictionally driven; The clamping mechanism includes: The connecting component (5) includes a mounting cylinder (501) fixedly installed at the end of the extension frame (13). A plurality of limiting pins (502) are slidably inserted on the mounting cylinder (501). The inner end of the limiting pins (502) is arranged in a triangular structure. A first spring (503) is fixedly connected between the limiting pins (502) and the mounting cylinder (501). A chuck (12) is installed at the end of the seed crystal (11). The outer side of the chuck (12) is made of heat-insulating material. The chuck (12) slides in conjunction with the inner wall of the feed pipe (16). Connecting block (7), the connecting block (7) is fixedly installed on the clamp (12), the end of the connecting block (7) is rounded, the end of the connecting block (7) is slidably engaged with the limiting pin (502), and multiple positioning holes (702) are opened on the outer wall of the connecting block (7), the limiting pin (502) is engaged with the positioning hole (702).

2. The crystal growth furnace according to claim 1, characterized in that: The upper end of the connecting block (7) is provided with a receiving hole (701), the inner side of the receiving hole (701) is made of silicone material, and the end of the seed crystal (11) is engaged with the receiving hole (701).

3. The crystal growth furnace according to claim 2, characterized in that: The unloading mechanism includes a waste cylinder (17) on which two magnets (18) are installed. The end of the limiting pin (502) is made of magnetic metal and the limiting pin (502) is magnetically engaged with the magnets (18).

4. The crystal growth furnace according to claim 3, characterized in that: The heat insulation mechanism includes: Enclosure component (8), the enclosure component (8) comprising: A sealing plate (806) is slidably fitted with a feed pipe (16); The pushing mechanism is used to drive the sealing plate (806) to move linearly. The pushing mechanism includes an installation box (801) embedded and fixed on one side of the heat insulation shell (2). A pushing block (805) is slidably connected in the installation box (801). One side of the pushing block (805) is set with an inclined structure. A downward pressure rod (804) is slidably passed through the heat insulation shell (2). A driving block (803) is fixedly connected to the end of the downward pressure rod (804). The driving block (803) is set with a triangular structure. The driving block (803) is slidably connected to the pushing block (805). A second spring (807) is fixedly connected between the downward pressure rod (804) and the installation box (801). A pushing frame (802) is fixedly installed on the extension frame (13). The pushing frame (802) is in active contact with the downward pressure rod (804).

5. The crystal growth furnace according to claim 4, characterized in that: The heat insulation mechanism also includes a heat insulation ring (10), which is installed below the mounting cylinder (501). A receiving sleeve (14) is fixedly installed on the extension frame (13). The heat insulation ring (10) and the receiving sleeve (14) are slidably connected. A third spring (15) is fixedly connected between the heat insulation ring (10) and the receiving sleeve (14). The heat insulation ring (10) abuts against the end of the feed pipe (16).

6. A seed crystal replacement process, said process being implemented based on the crystal growth furnace according to any one of claims 1-5, characterized in that, Includes the following steps: S1. The electric push rod (901) operates, and one of the drive sleeves (902) drives the extension frame (13) and the seed crystal (11) in the heat insulation shell (2) to move upward until the seed crystal (11) is separated from the feed pipe (16); S2. Under the action of the second spring (807), the sealing plate (806) blocks the feed pipe (16) to prevent heat loss; S3. The motor (905) runs, driving the sleeve (902) to drive the extension frame (13) and the seed crystal (11) to rotate until the new seed crystal (11) rotates to the top of the feed pipe (16); S4. During the process of the drive sleeve (902) driving the extension frame (13) and the seed crystal (11) to rotate, the discarded seed crystal (11) falls into the waste cylinder (17); S5. Subsequently, the electric push rod (901) reverses its direction, and the sealing plate (806) gradually separates from the lower end of the feed pipe (16). The corresponding extension frame (13) drives the new seed crystal (11) to gradually move into the heat insulation shell (2).

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