Heat transfer structure of low-temperature vacuum sample rotary table

Abstract

The invention discloses a low-temperature vacuum sample rotary table heat transfer structure which is arranged in a vacuum cavity and comprises a first fixing plate, an in-plane angle rotation movement mechanism, a sample rotary table, a U-shaped heat conduction belt, a U-shaped cold head and a heat conduction layer. Due to the fact that the arc-shaped refrigeration pipe of the U-shaped cold head is connected with the semicircular heat conduction arc-shaped plate of the U-shaped heat conduction belt, refrigerants are input into the U-shaped cold head, the U-shaped cold head can conduct heat transfer on the heat conduction arc-shaped plate, and the temperature of the heat conduction arc-shaped plate is reduced. And the heat-conducting arc-shaped plate can cover half of the outer surface of the sample bin. After the in-plane angle rotation movement mechanism is started, the in-plane rotation output end can drive the sample bin to rotate, so that the whole outer surface of the sample bin can be in contact with the heat conduction arc-shaped plate, and the low temperature is kept in the sample bin. The heat transfer structure of the low-temperature vacuum sample rotary table is not provided with a flexible heat conduction channel, winding and knotting of the flexible heat conduction channel and the sample rotary table are avoided, angle deviation of the sample rotary table is avoided, and therefore sample measurement is more accurate.

Description

Technical Field

[0001] The present application relates to the technical field of low-temperature vacuum equipment, and in particular to a heat transfer structure of a low-temperature vacuum sample turntable. Background Art

[0002] Low temperature and vacuum environment play a vital role in basic physics research: under low temperature conditions, the decoherence caused by thermal disturbance is very small, the quantum characteristics of microscopic particles are more obvious, and matter will exhibit strange properties, such as superfluidity and quantum Hall effect; while the vacuum environment can effectively reduce the interference of gas molecules, increase the mean free path of particles, avoid sample contamination, and ensure the purity and performance of the material.

[0003] At present, the low temperature of the vacuum low-temperature sample turntable is realized by using common cold sources including low-temperature fluid cold sources and low-temperature refrigerator cold sources. There are two heat transfer methods: radiation cooling and heat conduction cooling. Radiation cooling usually takes a long time for thermal equilibrium, so the vacuum low-temperature sample turntable generally uses heat conduction to cool the sample. The degrees of freedom of motion of the sample turntable required in the low-temperature experiment are divided into translational degrees of freedom and rotational degrees of freedom. The translational degrees of freedom include the three directions of X, Y, and Z, while the rotational degrees of freedom generally refer to the degrees of freedom of motion in the in-plane angle, pitch angle, and polar angle. The degrees of freedom of motion of the sample turntable in a vacuum environment are usually achieved using a mechanical transmission device or a vacuum motor.

[0004] Since the freedom of movement of the sample turntable is relatively complicated, a flexible copper chain is generally required to be connected to the cold source during low-temperature heat transfer. In the low-temperature sample holder of patent CN110961171A, the refrigeration device and the sample slot are also connected by a flexible heat conduction path. The flexible heat conduction path is usually installed at the rear end of the sample turntable or a fixed position. Especially when it involves in-plane angular rotation, the flexible heat conduction path will rotate with the sample turntable, causing entanglement, knotting and other problems, and generating stress on the sample turntable, thereby causing the sample turntable to deviate in angle and affect the accuracy of sample measurement. Therefore, how to optimize the design of the heat transfer structure and realize the flexible setting of the rotation angle is a problem that needs to be solved urgently. Summary of the invention

[0005] The embodiment of the present application provides a low-temperature vacuum sample turntable heat transfer structure, which can solve the technical problem in the prior art that the sample turntable generates stress and angle deviation due to the winding and tying of the flexible heat conduction path, thereby affecting the accuracy of sample measurement. The technical solution is as follows:

[0006] A low-temperature vacuum sample turntable heat transfer structure is arranged in a vacuum chamber, characterized in that it includes: a first fixed plate; an in-plane angular rotation motion mechanism, fixedly connected to the first fixed plate, and having an in-plane rotation output end; the sample turntable includes a connecting plate, one side of the connecting plate is fixedly connected to the in-plane rotation output end, and the other side is provided with a sample bin having a cylindrical outer surface, and the central axis of the sample bin is colinear with the central axis of the in-plane rotation output end; a U-shaped heat-conducting belt, including a semicircular heat-conducting arc plate and two connecting plates arranged at both ends of the heat-conducting arc plate, the radius of the heat-conducting arc plate is greater than or equal to the radius of the sample bin, the heat-conducting arc plate at least partially covers the outer surface of the sample bin, and the two connecting plates are connected to the first fixed plate; a U-shaped cold head, including an arc-shaped refrigeration tube, one end of the arc-shaped refrigeration tube is a refrigerant outlet, the other end is a refrigerant inlet, at least part of the inner side surface of the arc-shaped refrigeration tube is fixedly connected to the outer surface of the heat-conducting arc plate; and a heat-conducting layer arranged on the outer surface of the sample bin.

[0007] Optionally, the heat-conducting layer is an indium sheet disposed on the outer surface of the sample chamber.

[0008] Optionally, an adaptive telescopic mechanism is further provided between each of the connecting plates and the first fixed plate, and the two adaptive telescopic mechanisms are used to apply a squeezing force to the U-shaped thermal conductive belt close to the sample chamber.

[0009] Optionally, the adaptive telescopic mechanism is a tension spring, and two ends of the tension spring are respectively connected to the connecting plate and the first fixed plate.

[0010] Optionally, the adaptive telescopic mechanism is a compression spring; the ends of the two connecting plates are respectively provided with baffles extending in directions away from each other; the low-temperature sample turntable heat transfer structure also includes a force plate, the force plate includes a first plate, the first end of the first plate is connected to a second plate perpendicular to the first plate, the second end of the first plate is connected to the first fixed plate, the second plate is located above the baffle, and the second plate is provided with a column on the side of the baffle, and the compression spring is sleeved on the column between the baffle and the second plate.

[0011] Optionally, the force-applying plate further includes a third plate, the third plate is connected to the second end of the first plate, and is located on both sides of the first plate respectively with the second plate, and the third plate is used to be connected to the first fixing plate.

[0012] Optionally, a heat insulation layer is provided between the connecting disk and the in-plane rotating output end, and the heat insulation layer is a sapphire wafer or a polytetrafluoroethylene gasket.

[0013] Optionally, the in-plane angular rotation motion mechanism includes a fixed seat and a first vacuum motor, the fixed seat includes a base plate and a mounting plate perpendicular to the base plate, the base plate is connected to the first fixed plate, the first vacuum motor is arranged on the mounting plate, and the output shaft of the first vacuum motor is the in-plane rotation output end.

[0014] Optionally, the low-temperature sample turntable heat transfer structure further includes a polar angle rotation movement mechanism, and the polar angle rotation movement mechanism has a polar angle rotation output end; the polar angle rotation output end is fixedly connected to the first fixed plate.

[0015] Optionally, the polar angle rotation motion mechanism includes a second fixed plate, a second vacuum motor is arranged on one side of the second fixed plate, and the output shaft of the second vacuum motor is the polar angle rotation output end; the other side of the second fixed plate is used to connect to a fixed base or a three-dimensional motion base.

[0016] The beneficial effects brought by the technical solution provided by the embodiment of the present application include at least:

[0017] A low-temperature vacuum sample turntable heat transfer structure is arranged in a vacuum chamber, and includes: a first fixed plate, an in-plane angular rotation motion mechanism, a sample turntable, a U-shaped heat-conducting belt, a U-shaped cold head and a heat-conducting layer. Since the arc-shaped refrigeration tube of the U-shaped cold head is connected to the semicircular heat-conducting arc plate of the U-shaped heat-conducting belt, and refrigerant is input into the U-shaped cold head, the U-shaped cold head can transfer heat to the heat-conducting arc plate, so that the temperature of the heat-conducting arc plate is reduced. Since the radius of the heat-conducting arc plate is greater than or equal to the diameter of the cylindrical sample bin, the heat-conducting arc plate can cover at least half of the outer surface of the sample bin. When the in-plane angular rotation motion mechanism is started, the in-plane rotation output end can drive the sample bin to rotate, so that the entire outer surface of the sample bin can contact the heat-conducting arc plate, thereby maintaining a low temperature in the sample bin. In addition, the heat-conducting layer arranged on the outer surface of the sample bin can improve the heat transfer efficiency between the heat-conducting arc plate and the sample bin. The low-temperature vacuum sample turntable heat transfer structure of the present application has no flexible heat conduction path, which avoids the entanglement and knotting of the flexible heat conduction path and the sample turntable. The sample turntable will not produce angular deviation, so the sample measurement is more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 It is a three-dimensional schematic diagram of the heat transfer structure of the low-temperature vacuum sample turntable provided in an embodiment of the present application;

[0020] Figure 2 It is a cross-sectional view of the heat transfer structure of the low-temperature vacuum sample turntable provided in an embodiment of the present application at the U-shaped heat conduction plate and the U-shaped cold head.

[0021] Description of Reference Numerals

[0022] 1-first fixed plate; 2-in-plane angular rotation motion mechanism; 21-in-plane rotation output terminal; 22-fixed seat; 221-bottom plate; 222-mounting plate; 23-first vacuum motor; 3-sample turntable; 31-connecting plate; 32-sample chamber; 4-heat-conducting belt; 41-heat-conducting arc plate; 42-connecting plate; 43-baffle; 5-U-shaped cold head; 51-arc refrigeration tube; 6-adaptive telescopic mechanism; 61-compression spring; 7-force plate; 71-first plate; 72-second plate; 73-column; 74-third plate; 8-thermal insulation layer; 9-polar angle rotation motion mechanism; 91-polar angle rotation output terminal; 92-second fixed plate; 93-second vacuum motor; 10-thermal conductive layer. DETAILED DESCRIPTION

[0023] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0024] In the present disclosure, unless otherwise stated, directional words such as "upper" and "lower" generally refer to the "upper" and "lower" of the corresponding parts in the use state relative to the direction of gravity, and "inside" and "outside" refer to the "inside" and "outside" relative to the corresponding parts' own contours. In addition, the terms "first", "second", etc. used in the present disclosure are to distinguish one element from another and do not have order and importance. In the following description, when referring to the drawings, unless otherwise explained, the same figure numbers in different drawings represent the same or similar elements.

[0025] According to the embodiments of the present application, according to the embodiments of the present application, reference Figure 1 and 2 As shown, a low-temperature vacuum sample turntable 3 heat transfer structure is provided, which is arranged in a vacuum chamber and includes: a first fixed plate 1, an in-plane angular rotation motion mechanism 2, a sample turntable 3, a U-shaped heat conductive belt 4, a U-shaped cold head 5 and a heat conductive layer 10.

[0026] Among them, the in-plane angular rotation motion mechanism 2 is fixedly connected to the first fixed plate 1, and has an in-plane rotation output end 21. The in-plane angular rotation motion mechanism 2 is used to provide the sample turntable 3 with the freedom of in-plane rotation. The sample turntable 3 includes a connecting disk 31, and one side of the connecting disk 31 is fixedly connected to the in-plane rotation output end 21, and the other side is provided with a sample bin 32 with a cylindrical outer surface, and the central axis of the sample bin 32 is colinear with the central axis of the in-plane rotation output end 21. Here, the in-plane angular rotation motion mechanism 2 refers to a motion mechanism in which the target rotating object is on the central axis of the rotation output end, so that when the in-plane angular rotation motion mechanism 2 outputs a rotational motion, the sample turntable 3 can rotate following the in-plane rotation output end 21.

[0027] The U-shaped heat-conducting belt 4 may include a semicircular heat-conducting arc plate 41 and two connecting plates 42 arranged at both ends of the heat-conducting arc plate 41, the radius of the heat-conducting arc plate 41 is greater than or equal to the radius of the sample chamber 32, the heat-conducting arc plate 41 at least partially covers the outer surface of the sample chamber 32, and the two connecting plates 42 are connected to the first fixed plate 1. The U-shaped cold head includes an arc-shaped refrigeration tube 51, one end of the arc-shaped refrigeration tube 51 is a refrigerant outlet, and the other end is a refrigerant inlet, at least part of the inner side surface of the arc-shaped refrigeration tube 51 is fixedly connected to the outer surface of the heat-conducting arc plate 41; and a heat-conducting layer 10 arranged on the outer surface of the sample chamber 32.

[0028] In the above embodiment, since the arc-shaped refrigeration tube 51 of the U-shaped cold head 5 is connected to the semicircular heat-conducting arc plate 41 of the U-shaped heat-conducting belt 4, a refrigerant is input into the U-shaped cold head 5, and the refrigerant can be liquid nitrogen or liquid helium. The U-shaped cold head 5 can transfer heat to the heat-conducting arc plate 41, so that the temperature of the heat-conducting arc plate 41 is reduced. Since the radius of the heat-conducting arc plate 41 is greater than or equal to the diameter of the cylindrical sample chamber 32, the heat-conducting arc plate 41 can at least cover half of the outer surface of the sample chamber 32. When the in-plane angular rotation motion mechanism 2 is started, the in-plane rotation output end 21 can drive the sample chamber 32 to rotate, so that the entire outer surface of the sample chamber 32 can contact the heat-conducting arc plate 41, thereby maintaining a low temperature in the sample chamber 32. In addition, the heat-conducting layer 10 arranged on the outer surface of the sample chamber 32 can improve the heat transfer efficiency between the heat-conducting arc plate 41 and the sample chamber 32. The low-temperature vacuum sample turntable 3 of the present application has no flexible heat-conducting path, which avoids the entanglement and knotting of the flexible heat-conducting path and the sample turntable 3. The sample turntable 3 will not produce an angular deviation, so the sample measurement is more accurate.

[0029] In the above embodiment, the inner side surface of the arc-shaped cooling tube 51 can be fixedly connected to the outer surface of the heat-conducting arc plate by welding, which can further improve the heat transfer efficiency between the arc-shaped cooling tube 51 and the heat-conducting arc plate.

[0030] According to the embodiments of the present application, reference Figure 2 As shown, the heat-conducting layer 10 can be a thermal grease coated on the outer surface of the sample chamber 32, or it can be an indium sheet arranged on the outer surface of the sample chamber 32. As a metal material with high thermal conductivity, the thermal conductivity of the indium sheet is significantly better than that of the traditional thermal interface material (TIM) glue. Normally, the thermal conductivity of TIM glue is about 3.8W / m·k, while the thermal conductivity of the indium sheet is as high as 82W / m·k. This feature enables the indium sheet to transfer heat more effectively and improve the stability and reliability of the system. In addition, the indium sheet has softness and plasticity: indium is a relatively soft metal with good plasticity. This allows the indium sheet to adapt to irregular surfaces or heat dissipation scenarios that require bending, and it is easier to fit the heat dissipation device, thereby reducing the contact thermal resistance and improving the heat dissipation efficiency.

[0031] According to the embodiments of the present application, reference Figure 1 As shown, an adaptive telescopic mechanism 6 is further provided between each of the connecting plates 42 and the first fixed plate 1, and the two adaptive telescopic mechanisms 6 are used to apply a squeezing force close to the sample chamber 32 to the U-shaped heat-conducting belt 4. By adding the adaptive telescopic mechanism 6, on the one hand, when the sample turntable 3 rotates, uniform heat conduction to the sample turntable can be achieved. On the other hand, the adaptive telescopic mechanism can achieve continuous adhesion between the U-shaped heat-conducting belt 4 and the sample turntable 3 when the angle changes, so as to achieve low-temperature control of the sample turntable 3.

[0032] In one embodiment, the adaptive telescopic mechanism 6 is a tension spring (not shown in the drawings), and the two ends of the tension spring are respectively connected to the connecting plate 42 and the first fixing plate 1. In this way, the two tension springs can continuously apply tension to the connecting plate 42, so that the heat-conducting arc plate 41 fits the outer surface of the sample chamber 32 as much as possible, thereby improving the heat conduction efficiency.

[0033] In one embodiment, reference Figure 2 As shown, the adaptive telescopic mechanism 6 is a compression spring 61; the ends of the two connecting plates 42 are respectively provided with baffles 43 extending in directions away from each other; the heat transfer structure of the low-temperature sample turntable 3 also includes a force plate 7, and the force plate 7 includes a first plate 71 and a second plate 72, the first end of the first plate 71 is connected to a second plate 72 perpendicular to the first plate 71, the second end of the first plate 71 is connected to the first fixed plate 1, the second plate 72 is located above the baffle 43, and the second plate 72 is provided with a column 73 on the side facing the baffle 43, and the compression spring 61 is sleeved on the column 73 between the baffle 43 and the second plate 72. In this case, the two compression springs 61 are always in a compressed state, and can continuously apply a squeezing force to the baffle 43, so that the heat-conducting arc plate 41 is as close to the outer surface of the sample chamber 32 as possible, thereby improving the heat transfer efficiency.

[0034] According to the embodiments of the present application, reference Figure 2 As shown, the force-applying plate 7 further includes a third plate 74, the third plate 74 is connected to the second end of the first plate 71, and is located on both sides of the first plate 71 with the second plate 72, respectively, and the third plate 74 is used to be connected to the first fixing plate 1. The third plate 74 can be connected to the first fixing plate 1 by screws, or can be connected to the first fixing plate 1 by welding, which is not limited in the embodiment of the present application.

[0035] According to the embodiments of the present application, reference Figure 2 As shown, in order to avoid heat transfer between the sample turntable 3 and the in-plane angular rotation motion mechanism 2, a heat insulation layer 8 is provided between the connection plate 31 and the in-plane rotation output end 21, and the heat insulation layer 8 is a sapphire wafer or a polytetrafluoroethylene gasket.

[0036] According to the embodiments of the present application, reference Figure 1 As shown, the in-plane angular rotation motion mechanism 2 may include a fixed seat 22 and a first vacuum motor 23, the fixed seat 22 includes a base plate 221 and a mounting plate 222 perpendicular to the base plate 221, the base plate 221 is connected to the first fixed plate 1, the first vacuum motor 23 is arranged on the mounting plate 222, and the output shaft of the first vacuum motor 23 is the in-plane rotation output end 21.

[0037] According to the embodiments of the present application, reference Figure 1 As shown, the heat transfer structure of the low-temperature sample turntable 3 also includes a polar angle rotation motion mechanism 9, and the polar angle rotation motion mechanism 9 has a polar angle rotation output end 91; the polar angle rotation output end 91 is fixedly connected to the first fixed plate 1. Here, the polar angle rotation motion mechanism 9 refers to a motion mechanism in which the target rotating object is not on the central axis of the rotation output end. The polar angle rotation motion mechanism 9 is used to provide the sample turntable 3 with a degree of freedom to rotate around the Z axis, so that the sample turntable 3 can rotate around the central axis of the polar angle rotation output end 91.

[0038] According to the embodiments of the present application, reference Figure 1 As shown, the polar angle rotation motion mechanism 9 includes a second fixed plate 92, a second vacuum motor 93 is arranged on one side of the second fixed plate 92, and the output shaft of the second vacuum motor 93 is the polar angle rotation output end 91; the other side of the second fixed plate 92 is used to connect a fixed base or a three-dimensional motion base. The fixed base is a fixed mounting table arranged in a vacuum chamber. The heat transfer structure of the low-temperature vacuum sample turntable can be installed on a fixed base or on a three-dimensional motion base to achieve more degrees of freedom of movement. This application does not impose any restrictions on this.

[0039] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, a variety of simple modifications can be made to the technical solution of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0040] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0041] In addition, various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.

Claims

1. A low temperature vacuum sample turntable heat transfer structure, arranged in a vacuum chamber, characterized in that: include: A first fixing plate (1); An in-plane angular rotation mechanism (2) is fixedly connected to the first fixed plate (1) and has an in-plane rotation output end (21); A sample turntable (3) comprises a connection plate (31), one side of the connection plate (31) is fixedly connected to the in-plane rotating output end (21), and the other side is provided with a sample chamber (32) having a cylindrical outer surface, and the central axis of the sample chamber (32) is colinear with the central axis of the in-plane rotating output end (21); A U-shaped heat-conducting belt (4), comprising a semicircular heat-conducting curved plate (41) and two connecting plates (42) arranged at both ends of the heat-conducting curved plate (41), the radius of the heat-conducting curved plate (41) being greater than or equal to the radius of the sample chamber (32), the heat-conducting curved plate (41) at least partially covering the outer surface of the sample chamber (32), and the two connecting plates (42) being connected to the first fixing plate (1); The U-shaped cold head (5) comprises an arc-shaped refrigeration tube (51), one end of the arc-shaped refrigeration tube (51) is a refrigerant outlet (52), and the other end is a refrigerant inlet (53), and at least part of the inner side surface of the arc-shaped refrigeration tube (51) is fixedly connected to the outer surface of the heat-conducting arc plate (41); And a heat-conducting layer (10) arranged on the outer surface of the sample chamber (32).

2. The low temperature vacuum sample turntable heat transfer structure according to claim 1, characterized in that: The heat-conducting layer (10) is an indium sheet arranged on the outer surface of the sample chamber (32).

3. The low temperature vacuum sample turntable heat transfer structure according to claim 1, characterized in that: An adaptive telescopic mechanism (6) is also provided between each of the connecting plates (42) and the first fixed plate (1), and the two adaptive telescopic mechanisms (6) are used to apply a squeezing force close to the sample chamber (32) to the U-shaped heat conducting belt (4).

4. The low temperature vacuum sample turntable heat transfer structure according to claim 3, characterized in that: The adaptive telescopic mechanism (6) is a tension spring, and two ends of the tension spring are respectively connected to the connecting plate (42) and the first fixing plate (1).

5. The low temperature vacuum sample turntable heat transfer structure according to claim 3, characterized in that: The adaptive telescopic mechanism (6) is a compression spring (61); The ends of the two connecting plates (42) are respectively provided with baffles (43) extending in directions away from each other; The heat transfer structure of the low-temperature sample turntable (3) also includes a force plate (7), and the force plate (7) includes a first plate (71), a first end of the first plate (71) is connected to a second plate (72) perpendicular to the first plate (71), a second end of the first plate (71) is connected to the first fixed plate (1), the second plate (72) is located above the baffle (43), a column (73) is provided on the side of the second plate (72) facing the baffle (43), and the compression spring (61) is sleeved on the column (73) between the baffle (43) and the second plate (72).

6. The low temperature vacuum sample turntable heat transfer structure according to claim 5, characterized in that: The force-applying plate (7) further comprises a third plate (74), wherein the third plate (74) is connected to the second end of the first plate (71) and is located on both sides of the first plate (71) together with the second plate (72), and the third plate (74) is used to be connected to the first fixing plate (1).

7. The low temperature vacuum sample turntable heat transfer structure according to claim 1, characterized in that: A heat insulation layer (8) is provided between the connection disk (31) and the in-plane rotation output end (21), and the heat insulation layer (8) is a sapphire wafer or a polytetrafluoroethylene gasket.

8. The low temperature vacuum sample turntable heat transfer structure according to claim 1, characterized in that: The in-plane angular rotation motion mechanism (2) comprises a fixing seat (22) and a first vacuum motor (23); the fixing seat (22) comprises a base plate (221) and a mounting plate (222) perpendicular to the base plate (221); the base plate (221) is connected to the first fixing plate (1); the first vacuum motor (23) is arranged on the mounting plate (222); and the output shaft of the first vacuum motor (23) is the in-plane rotation output end (21).

9. The low temperature vacuum sample turntable heat transfer structure according to claim 1, characterized in that: The heat transfer structure of the low-temperature sample turntable (3) also includes a polar angle rotation movement mechanism (9), and the polar angle rotation movement mechanism (9) has a polar angle rotation output end (91); the polar angle rotation output end (91) is fixedly connected to the first fixing plate (1).

10. The low temperature vacuum sample turntable heat transfer structure according to claim 9, characterized in that: The polar angle rotation mechanism (9) comprises a second fixed plate (92), a second vacuum motor (93) is arranged on one side of the second fixed plate (92), and an output shaft of the second vacuum motor (93) is the polar angle rotation output end (91); The other side of the second fixing plate (92) is used for connecting to a fixed base or a three-dimensional motion base.

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