Glass Substrate Cleaning Equipment and Cleaning Process

Abstract

The present invention belongs to the field of cleaning, and particularly relates to a cleaning device for glass substrates, and more particularly to a glass substrate cleaning device and a cleaning process. The glass substrate cleaning device includes: a cleaning table provided with a plurality of cleaning stations; a cleaning basket disposed in the corresponding cleaning station and having a plurality of glass substrates to be cleaned arranged at equal intervals; and a cleaning assembly for cleaning the glass substrates in the cleaning basket. Among them, the cleaning assembly includes: a switching mechanism; a liquid inlet pipe; and an air inlet pipe sleeved outside the liquid inlet pipe. By providing the switching mechanism to switch the conduction state between the cleaning nozzle and the liquid inlet pipe and the air inlet pipe, when it is necessary to blow dry the water stains, only the air inlet pipe needs to be connected to the cleaning nozzle, thus solving the problem in the related art that when a single pipe is connected to the cleaning nozzle, a large amount of liquid still remains in the pipe during air intake, resulting in too long ventilation time, and thereby improving the cleaning efficiency.

Description

Technical Field

[0001] The present invention belongs to the field of cleaning technology, and particularly relates to a cleaning machine for cleaning glass substrates, and more particularly to a glass substrate cleaning device and a cleaning process. Background Art

[0002] When a glass substrate is processed into a finished product, the glass substrate needs to be thinned and polished. During polishing, debris will adhere to the surface of the glass substrate. Therefore, it is necessary to clean the freshly polished glass substrate.

[0003] In the related art, air supply and liquid supply are carried out through the same pipeline to reduce the amount of cleaning nozzles. After the glass substrate is cleaned, it is necessary to ventilate to remove the water stains completely. However, it is found in actual use that the liquid cannot be completely removed according to the specified ventilation time of the cleaning device, and the ventilation time needs to be extended to completely remove the water stains on the surface of the glass substrate.

[0004] Therefore, how to improve the cleaning efficiency of the water stains on the surface of the glass substrate is a technical problem that needs to be solved urgently at present.

[0005] It should be noted that the above information disclosed in this background art section is only used to understand the background art of the concept of this application. Therefore, the above description is not considered as information of the prior art. Summary of the Invention

[0006] The embodiments of the present disclosure provide at least a glass substrate cleaning device and a cleaning process.

[0007] In a first aspect, the embodiments of the present disclosure provide a glass substrate cleaning device, including:

[0008] A cleaning table, which is provided with a plurality of cleaning stations;

[0009] A cleaning basket, which is arranged in the corresponding cleaning station and is provided with a plurality of glass substrates to be cleaned at equal intervals;

[0010] A cleaning assembly, which is used to clean the glass substrates in the cleaning basket;

[0011] Among them, the cleaning assembly includes:

[0012] A switching mechanism;

[0013] A liquid inlet pipe;

[0014] An air inlet pipe sleeved outside the liquid inlet pipe;

[0015] A plurality of cleaning nozzles, which are conducted with the liquid inlet pipe and / or the air inlet pipe under the control of the switching mechanism;

[0016] A control module, which is configured to control a switching mechanism to connect each cleaning nozzle to a liquid inlet pipe during a cleaning operation for cleaning; and to control each cleaning nozzle to be connected to an air inlet pipe during a drying operation to remove the residual water stains on the glass substrate.

[0017] In an alternative embodiment, the air inlet pipe is sleeved outside the liquid inlet pipe;

[0018] Moreover, an air cavity for ventilation is formed between the liquid inlet pipe and the air inlet pipe;

[0019] During the drying operation, the cleaning nozzle is connected to the air cavity.

[0020] In an alternative embodiment, the switching mechanism includes:

[0021] A push rod motor and a switching plate;

[0022] A first through hole is provided at the position corresponding to the switching plate and the cleaning nozzle;

[0023] The cleaning nozzle is arranged on the air inlet pipe;

[0024] A connecting pipe elastically connected to the cleaning nozzle by a return spring is provided at the top of the cleaning nozzle;

[0025] The switching plate is embedded in the inner wall of the liquid inlet pipe. When the push rod motor pushes the switching plate in the first direction, at this time, the top of the connecting pipe is inserted into the first through hole, and each cleaning nozzle is connected to the liquid inlet pipe; when the push rod motor pulls the switching plate in the second direction, at this time, the top of the connecting pipe is squeezed by the switching plate and moves downward, so that the air cavity is connected to the air holes on the side wall of the connecting pipe, that is, each cleaning nozzle is connected to the air inlet pipe.

[0026] In an alternative embodiment, an auxiliary through hole is provided on the second direction side of each first through hole;

[0027] The push rod motor pushes the switching plate to successively connect the cleaning nozzle to the corresponding auxiliary through hole, and only one cleaning nozzle is connected to the corresponding auxiliary through hole each time, and the cleaning nozzle is connected to the liquid inlet pipe to complete pressurized cleaning.

[0028] In an alternative embodiment, the cleaning assembly further includes:

[0029] A visual detection module, which is used to detect the cleaning effect in the cleaning basket;

[0030] The control module is further configured to control the switching mechanism to enter a pressurized cleaning mode according to the detection result during a detection operation.

[0031] In an alternative embodiment, the control module is further configured to control the switching mechanism to enter a pressurized cleaning mode according to the detection result, that is:

[0032] Compare the received detection result with a preset value, and when it is detected that there are stains on multiple glass substrates in the cleaning basket, control the switching mechanism to make the cleaning component enter the pressurized cleaning mode.

[0033] In an alternative embodiment, the pressurized cleaning mode, that is:

[0034] Through the switching mechanism, control each cleaning nozzle to communicate with the liquid inlet pipe successively at preset time intervals;

[0035] After the current cleaning nozzle performs pressurized cleaning for a preset time, control the vision detection module to perform detection again until all cleaning nozzles are cleaned;

[0036] According to the detection results after the pressurized cleaning of each cleaning nozzle, obtain the position of the glass substrate where the stain is located, and control the corresponding cleaning nozzle to enter the pressurized cleaning mode until it is cleaned.

[0037] In an alternative embodiment, the pressurized cleaning mode, that is:

[0038] Through the switching mechanism, control each cleaning nozzle to communicate with the liquid inlet pipe and the air inlet pipe simultaneously at preset time intervals;

[0039] After the current cleaning nozzle performs pressurized cleaning for a preset time, control the vision detection module to perform detection again until all cleaning nozzles are cleaned;

[0040] According to the detection results after the pressurized cleaning of each cleaning nozzle, obtain the position of the glass substrate where the stain is located, and control the corresponding cleaning nozzle to enter the pressurized cleaning mode until it is cleaned.

[0041] In a second aspect, the embodiments of the present disclosure further provide a cleaning process applied to the glass substrate cleaning device as described above. The cleaning process includes:

[0042] Place the glass substrate to be cleaned into the corresponding cleaning basket;

[0043] Place the cleaning basket into the cleaning station;

[0044] Connect each cleaning nozzle with the liquid inlet pipe through the switching mechanism to enter the cleaning working condition and clean the glass substrate;

[0045] After cleaning, connect each cleaning nozzle with the air inlet pipe through the switching mechanism to enter the air drying working condition and remove the remaining water stains on the glass substrate.

[0046] In an alternative embodiment, after the cleaning operation is completed and before entering the air-drying operation, the cleaning process further includes:

[0047] Entering a detection operation, that is:

[0048] Detecting the cleaning effect in the cleaning basket;

[0049] Controlling the switching mechanism to enter the pressurized cleaning mode according to the detection result.

[0050] In an alternative embodiment, the pressurized cleaning mode is:

[0051] Through the switching mechanism, each cleaning nozzle is sequentially controlled to communicate with the liquid inlet pipe at preset time intervals;

[0052] After the current cleaning nozzle is pressurized and cleaned for a preset time, controlling the visual detection module to perform detection again until all cleaning nozzles are cleaned;

[0053] According to the detection results after the pressurized cleaning of each cleaning nozzle, obtain the position of the glass substrate where the stain is located, and control the corresponding cleaning nozzle to enter the pressurized cleaning mode until it is cleaned.

[0054] The beneficial effect of the present invention is that the glass substrate cleaning equipment and cleaning process of the present invention solve the problem in the related art that when blowing dry water stains, a large amount of liquid still remains in the pipeline during air intake due to the connection of a single pipeline to the cleaning nozzle, resulting in too long air intake time, by setting a switching mechanism to switch the conduction state of the cleaning nozzle with the liquid inlet pipe and the air inlet pipe. Furthermore, the cleaning efficiency is improved.

[0055] Other features and advantages of the present invention will be described in the following specification, and, in part, will be obvious from the specification, or will be understood by implementing the present invention. The objectives and other advantages of the present invention are achieved and obtained by the structures specifically pointed out in the specification and the drawings.

[0056] To make the above objectives, features, and advantages of the present invention more obvious and understandable, specific preferred embodiments are hereby given, and detailed descriptions are made in conjunction with the accompanying drawings as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0058] Figure 1 Schematic structural diagram of the glass substrate cleaning device provided by the embodiment of the present disclosure;

[0059] Figure 2 Cross-sectional view of the cleaning component provided by the embodiment of the present disclosure;

[0060] Figure 3 Electrical control schematic diagram of the cleaning component provided by the embodiment of the present disclosure;

[0061] Figure 4 Schematic diagram of the state when the cleaning component and the cleaning basket are matched provided by the embodiment of the present disclosure;

[0062] Figure 5 is Figure 4 enlarged view of part A in

[0063] Figure 6 Schematic structural diagram when the cleaning nozzle of the embodiment of the present disclosure is connected to both the air inlet pipe and the liquid inlet pipe at the same time;

[0064] Figure 7 Flow chart of the cleaning process of the glass substrate cleaning device provided by the embodiment of the present disclosure.

[0065] In the figure: 100, cleaning table; 110, cleaning station; 111, cover plate; 200, cleaning basket; 210, glass substrate; 300, cleaning component; 310, liquid inlet pipe; 320, air inlet pipe; 330, air cavity; 340, cleaning nozzle; 341, connecting pipe; 342, return spring; 343, air hole; 344 - air inlet; 350, switching mechanism; 351, push rod motor; 352, switching plate; 3521, first through hole; 3522, auxiliary through hole. Detailed implementation manners

[0066] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0067] In this article, when it is mentioned that the first component is located on the second component, this may mean that the first component can be directly formed on the second component, or a third component can be inserted between the first component and the second component. In addition, in the drawings, for the purpose of effectively describing the technical content, the thickness of the components can be exaggerated or reduced.

[0068] It has been found through research that in related technologies, in order to reduce the number of cleaning nozzles, the cleaning nozzles are arranged on a pipeline and then respectively connected to a gas source and a water source. When cleaning is required, the water source is opened to supply water to the pipeline. After the liquid enters the pipeline, it sprays out from the cleaning nozzles to complete the cleaning. When drying is required, the water source is closed, and then the gas source is opened to ventilate the pipeline. After the gas enters the pipeline, it sprays out from the cleaning nozzles to dry the glass substrate. However, due to a large amount of liquid remaining in the pipeline, when the gas is used for drying, a large amount of liquid will be carried by the gas and blown onto the glass substrate. As a result, in the first half of the drying time, the water stains on the surface of the glass substrate will increase, and the ventilation time needs to be extended to dry the glass substrate.

[0069] Based on the above research, the embodiments of the present disclosure provide a glass substrate cleaning device and a cleaning process. By sleeving the air inlet pipe and the liquid inlet pipe, sharing the same set of cleaning nozzles, and setting a corresponding switching mechanism to switch the conduction state of the cleaning nozzles, the amount of cleaning liquid carried out by the cleaning nozzles during ventilation can be reduced without increasing the number of cleaning nozzles, so as to solve the problems of too long drying time and too long overall time consumption of the cleaning process in related technologies.

[0070] Regarding the defects existing in the above solutions, they are all the results obtained by the inventors through practice and careful research. Therefore, the process of discovering the above problems and the solutions proposed by the present disclosure in this article for the above problems should be the contributions made by the inventors to the present disclosure during the process of the present disclosure.

[0071] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0072] The following will describe in detail some embodiments of the present invention with reference to the drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0073] Please refer to Figure 1 and Figure 2 , at least one embodiment discloses a glass substrate cleaning device, including the following structures:

[0074] A cleaning table 100 is provided with a plurality of cleaning stations 110. A cover plate 111 is arranged on each cleaning station 110 to prevent the cleaning liquid from splashing.

[0075] A cleaning basket 200 is arranged in the corresponding cleaning station 110 and is provided with a plurality of glass substrates 210 to be cleaned at equal intervals. It should be noted that the cleaning basket 200 is made of a transparent material to facilitate subsequent visual inspection.

[0076] A cleaning component 300, which is used to clean the glass substrate 210 in the cleaning basket 200.

[0077] Please refer to Figure 2 and Figure 3 , specifically, among them, the cleaning component 300 includes the following structures:

[0078] A switching mechanism 350, which is used to switch the connection state between the switching cleaning nozzle 340, the liquid inlet pipe 310 and the air inlet pipe 320.

[0079] A liquid inlet pipe 310, one end of which is connected to an external water pump and the other end is in a blocked state.

[0080] An air inlet pipe 320 sleeved outside the liquid inlet pipe 310. Specifically, an air cavity 330 for ventilation is formed between the liquid inlet pipe 310 and the air inlet pipe 320.

[0081] A plurality of cleaning nozzles 340, which are conducted with the liquid inlet pipe 310 and / or the air inlet pipe 320 under the control of the switching mechanism 350.

[0082] A control module, which is configured to control the switching mechanism 350 to connect each cleaning nozzle 340 with the liquid inlet pipe 310 during the cleaning operation for cleaning; during the air drying operation, control each cleaning nozzle 340 to be connected with the air inlet pipe 320 to remove the remaining water stains on the glass substrate 210.

[0083] It should be noted that the cleaning nozzle 340 is connected to the liquid inlet pipe 310 during the cleaning operation and is connected to the air cavity 330 of the air inlet pipe 320 during the air drying operation.

[0084] By setting the switching mechanism 350 to switch the conduction state between the cleaning nozzle 340, the liquid inlet pipe 310 and the air inlet pipe 320, when it is necessary to dry the water stains, only need to connect the air inlet pipe 320 with the cleaning nozzle 340, thus solving the problem in the related technology that when a single pipe is connected to the cleaning nozzle 340, a large amount of liquid still remains in the pipe during air intake, resulting in too long ventilation time, and further improving the cleaning efficiency.

[0085] Please continue to refer to Figure 2 and Figure 4 , the switching mechanism 350 includes: a push rod motor 351 and a switching plate 352. By controlling the push rod motor 351 to work through the control module, the switching plate 352 is pushed to move.

[0086] One end of the switching plate 352 is embedded in the side wall of the liquid inlet pipe 310, and the other end is connected to the push rod of the external push rod motor 351.

[0087] A first through hole 3521 is provided at the position corresponding to the cleaning nozzle 340 on the switching plate 352; the cleaning nozzle 340 is provided on the intake pipe 320; a connecting pipe 341 elastically connected to the cleaning nozzle 340 by a return spring 342 is provided at the top of the cleaning nozzle 340.

[0088] Wherein, an outer chamfer is provided at the top of the connecting pipe 341, so as to reduce the collision between the switching plate 352 and the top of the connecting pipe 341 when the switching plate 352 moves.

[0089] When the push rod motor 351 pushes the switching plate 352 in the first direction, at this time, the top of the connecting pipe 341 is inserted into the first through hole 3521, and each cleaning nozzle 340 is communicated with the liquid inlet pipe 310; when the push rod motor 351 pulls the switching plate 352 in the second direction, at this time, the top of the connecting pipe 341 is squeezed by the switching plate 352 and moves downward, so that the air cavity 330 is communicated with the air holes 343 on the side wall of the connecting pipe 341, that is, each cleaning nozzle 340 is communicated with the intake pipe 320. Wherein, the first direction is as shown by F1 in Figure 4 and the second direction is as shown by F2 in Figure 4 .

[0090] Wherein, the number of the air holes 343 is one, and the air holes 343 are obliquely opened from the side wall of the connecting pipe 341 towards the outlet of the cleaning nozzle 340, so as to guide the gas entering the cleaning nozzle 340, and further increase the pressure in the cleaning nozzle 340.

[0091] It should be noted that an air inlet 344 is also opened at the position where the cleaning nozzle 340 is adapted to the air hole 343. When the top of the connecting pipe 341 is squeezed by the switching plate 352 and moves downward, the air cavity 330 is communicated with the air hole 343 on the side wall of the connecting pipe 341. At this time, the air inlet 344 of the cleaning nozzle 340 is communicated with the air hole 343 of the connecting pipe 341, so that the air cavity 330 is communicated with the cleaning head 340, that is, the cleaning nozzle 340 is communicated with the intake pipe 320.

[0092] A simple mechanical structure is set to complete the switching of the gas source and the water source, reduce the length of the pipeline shared by the gas source and the water source, and thus, to the greatest extent, reduce the liquid content carried out by the gas during drying.

[0093] It should be noted that even if the sealing performance between the cleaning nozzle 340 and the air cavity 330 is poor, it will not affect the cleaning effect of the cleaning nozzle 340. Moreover, the gas leaking from the cleaning nozzle 340 can also increase the pressure of the liquid, so as to achieve the purpose of improving the cleaning effect.

[0094] Please refer to Figure 2 、 Figure 4 and Figure 5, in order to enable each cleaning spray head 340 to clean the glass substrate in the cleaning basket 200 individually, an auxiliary through-hole 3522 is provided on the second-direction side of each of the first through-holes 3521; the push rod motor 351 pushes the switching plate 352 to successively connect the cleaning spray head 340 with the corresponding auxiliary through-hole 3522, and only one cleaning spray head 340 is connected with the corresponding auxiliary through-hole 3522 each time, and the cleaning spray head 340 is connected with the liquid inlet pipe 310 to complete the pressurized cleaning.

[0095] By the push of the switching plate 352, one of the multiple cleaning spray heads 340 is opened and the others are closed, so as to increase the water pressure during cleaning and thus improve the cleaning effect.

[0096] Please continue to refer to Figure 3 , the cleaning assembly 300 further includes: a vision detection module, which is used to detect the cleaning effect in the cleaning basket 200; the control module is further configured to control the switching mechanism 350 to enter the pressurized cleaning mode according to the detection result under the detection working condition.

[0097] Specifically, the control module is further configured to control the switching mechanism 350 to enter the pressurized cleaning mode according to the detection result, that is: compare the received detection result with a preset value, and when it is detected that there are stains on the multiple glass substrates 210 in the cleaning basket 200, control the switching mechanism 350 to make the cleaning assembly 300 enter the pressurized cleaning mode.

[0098] Among them, the acquisition method of the preset value is as follows:

[0099] Use a high-resolution camera to obtain the image information of multiple clean glass substrates during cleaning;

[0100] Convert the obtained graphic information into a grayscale image and perform denoising processing to complete the preprocessing of the image;

[0101] Select the highest grayscale value in the grayscale image of each image as the characterization value of the cleaning effect of the image;

[0102] Calculate the average value of the characterization values of the cleaning effects of all images, and use this average value as the preset value for subsequent detection comparison.

[0103] By detecting the cleaning effect of the glass substrate to improve the cleaning effect, when the detection result shows that there are stains on the glass substrate, control each cleaning spray head 340 to perform pressurized cleaning in sequence to determine the location of the stains, which is convenient for subsequent targeted cleaning.

[0104] Specifically, the pressurized cleaning mode, that is:

[0105] Through the switching mechanism 350, each cleaning nozzle 340 is successively controlled to communicate with the liquid inlet pipe 310 at preset time intervals; after the current cleaning nozzle 340 is pressurized for cleaning for a preset time, the vision detection module is controlled to perform detection again until all the cleaning nozzles 340 are cleaned; according to the detection results after the pressurized cleaning of each cleaning nozzle 340, the position of the glass substrate 210 where the stains are located is obtained, and the corresponding cleaning nozzle 340 is controlled to enter the pressurized cleaning mode until it is cleaned.

[0106] Specifically, by pushing the switching plate 352, the corresponding cleaning nozzle 340 is communicated with the liquid inlet pipe 310 or the air inlet pipe 320, so as to realize the pressurized cleaning mode. Since both the air holes 343 and the air inlets 344 are inclined, the gas entering the cleaning nozzle 340 is guided, so that most of the gas flows along the outlet of the cleaning nozzle 340, thereby increasing the liquid.

[0107] As Figure 6 shown, in other embodiments, the pressurized cleaning mode is: through the switching mechanism 350, each cleaning nozzle 340 is successively controlled to communicate with the liquid inlet pipe 310 and the air inlet pipe 320 at the same time at preset time intervals; after the current cleaning nozzle 340 is pressurized for cleaning for a preset time, the vision detection module is controlled to perform detection again until all the cleaning nozzles 340 are cleaned; according to the detection results after the pressurized cleaning of each cleaning nozzle 340, the position of the glass substrate 210 where the stains are located is obtained, and the corresponding cleaning nozzle 340 is controlled to enter the pressurized cleaning mode until it is cleaned.

[0108] The gas and the liquid are simultaneously introduced into the cleaning nozzle 340, so as to pressurize the liquid, improve the flushing ability, and specifically clean stubborn stains. In specific implementation, the connecting pipe part at the top of the cleaning nozzle 340 can be communicated with the auxiliary through hole 3522, and at this time, the air cavity 330 is also communicated with the air hole 343 of the connecting pipe 341.

[0109] Please refer to Figure 7 , at least one embodiment further provides a cleaning process applied to the glass substrate cleaning device as described above, and the cleaning process includes:

[0110] S110: Place the glass substrate 210 to be cleaned into the corresponding cleaning basket 200;

[0111] S120: Place the cleaning basket 200 into the cleaning station 110;

[0112] S130: Through the switching mechanism 350, each cleaning nozzle 340 is communicated with the liquid inlet pipe 310, and enters the cleaning working condition to clean the glass substrate 210;

[0113] S140: After the cleaning is completed, each cleaning nozzle 340 is connected to the intake pipe 320 through the switching mechanism 350, and the drying operation is entered to remove the remaining water stains on the glass substrate 210.

[0114] After the cleaning operation is completed and before entering the drying operation, the cleaning process further includes:

[0115] Enter the detection operation, that is: detect the cleaning effect in the cleaning basket 200; control the switching mechanism 350 to enter the pressurized cleaning mode according to the detection result.

[0116] Among them, the pressurized cleaning mode is: through the switching mechanism 350, each cleaning nozzle 340 is successively controlled to be connected to the liquid inlet pipe 310 at preset time intervals; after the current cleaning nozzle 340 is pressurized and cleaned for a preset time, the vision detection module is controlled to perform detection again until all the cleaning nozzles 340 are cleaned; according to the detection results after the pressurized cleaning of each cleaning nozzle 340, obtain the position of the glass substrate 210 where the stain is located, and control the corresponding cleaning nozzle 340 to enter the pressurized cleaning mode until it is cleaned.

[0117] In summary, the present invention provides a glass substrate cleaning device and a cleaning process. Among them, the glass substrate cleaning device includes: a cleaning table 100, which is provided with a plurality of cleaning stations 110; a cleaning basket 200, which is arranged in the corresponding cleaning station 110 and is provided with a plurality of glass substrates 210 to be cleaned at equal intervals; a cleaning component 300, which is used to clean the glass substrates 210 in the cleaning basket 200; among them, the cleaning component 300 includes: a switching mechanism 350; a liquid inlet pipe 310; an intake pipe 320 sleeved outside the liquid inlet pipe 310; a plurality of cleaning nozzles 340, which are conducted with the liquid inlet pipe 310 and / or the intake pipe 320 under the control of the switching mechanism 350; a control module, which is configured to control the switching mechanism 350 to connect each cleaning nozzle 340 to the liquid inlet pipe 310 for cleaning during the cleaning operation; during the drying operation, control each cleaning nozzle 340 to be connected to the intake pipe 320 to remove the remaining water stains on the glass substrate 210. By setting the switching mechanism 350 to switch the conduction state of the cleaning nozzle 340 with the liquid inlet pipe 310 and the intake pipe 320, when it is necessary to dry the water stains, only the intake pipe 320 needs to be connected to the cleaning nozzle 340, thus solving the problem in the related art that when a single pipe is connected to the cleaning nozzle 340 and air is introduced, a large amount of liquid still remains in the pipe, resulting in too long ventilation time, and thus improving the cleaning efficiency.

[0118] Enlightened by the above-described ideal embodiments of the present invention, through the above description, relevant staff can make various changes and modifications without departing from the technical idea of this invention. The technical scope of this invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A glass substrate cleaning device, characterized in that Comprising: A cleaning table (100) provided with a plurality of cleaning stations (110); A cleaning basket (200) disposed in a corresponding cleaning station (110) and having a plurality of glass substrates (210) to be cleaned arranged at equal intervals; A cleaning assembly (300) for cleaning the glass substrates (210) in the cleaning basket (200); Wherein, the cleaning assembly (300) includes: A switching mechanism (350); A liquid inlet pipe (310); An air inlet pipe (320) sleeved outside the liquid inlet pipe (310); A plurality of cleaning nozzles (340) which are controlled by the switching mechanism (350) to communicate with the liquid inlet pipe (310) and / or the air inlet pipe (320); A control module configured to, in a cleaning operation mode, control the switching mechanism (350) to connect each cleaning nozzle (340) with the liquid inlet pipe (310) for cleaning; in a drying operation mode, control each cleaning nozzle (340) to communicate with the air inlet pipe (320) to remove water stains; An air cavity (330) for ventilation is formed between the liquid inlet pipe (310) and the air inlet pipe (320); The cleaning nozzle communicates with the air cavity (330) in the drying operation mode; The switching mechanism (350) includes: A push rod motor (351) and a switching plate (352); A first through hole (3521) is provided at the corresponding position of the switching plate (352) and the cleaning nozzle (340); The cleaning nozzle (340) is disposed on the air inlet pipe (320); A connecting pipe (341) elastically connected to the cleaning nozzle (340) by a return spring (342) is provided at the top of the cleaning nozzle (340); When the push rod motor (351) pushes the switching plate (352) in a first direction, the connecting pipe (341) is inserted into the first through hole (3521) to connect the cleaning nozzle (340) with the liquid inlet pipe (310); when the push rod motor (351) pulls the switching plate (352) in a second direction, the connecting pipe (341) is squeezed downward by the switching plate (352) to connect the air cavity (330) with the air hole (343) of the connecting pipe (341).

2. The glass substrate cleaning equipment according to claim 1, characterized in that An auxiliary through hole (3522) is provided on the second direction side of each first through hole (3521); The push rod motor (351) pushes the switching plate (352) to successively connect the cleaning nozzle (340) with the corresponding auxiliary through hole (3522), and only one cleaning nozzle (340) communicates with the corresponding auxiliary through hole (3522) each time to complete pressure cleaning.

3. The glass substrate cleaning device according to claim 1, wherein The cleaning assembly (300) further includes: A visual inspection module for inspecting the cleaning effect in the cleaning basket (200); The control module is further configured to, in an inspection operation mode, control the switching mechanism (350) to enter a pressure cleaning mode according to the inspection result.

4. The glass substrate cleaning device according to claim 3, wherein The control module is further configured to control the switching mechanism (350) to enter a pressure cleaning mode according to the inspection result, that is: Compare the received detection result with a preset value. When it is detected that there are stains on multiple glass substrates (210) in the cleaning basket (200), control the switching mechanism (350) to make the cleaning component (300) enter the pressurized cleaning mode.

5. The glass substrate cleaning equipment according to claim 4, characterized in that, The pressurized cleaning mode is as follows: Through the switching mechanism (350), control each cleaning nozzle (340) to communicate with the liquid inlet pipe (310) successively at preset time intervals. After the current cleaning nozzle (340) performs pressurized cleaning for a preset time, control the vision detection module to perform detection again until all cleaning nozzles (340) are cleaned. Based on the detection results after the pressurized cleaning of each cleaning nozzle (340), obtain the positions of the glass substrates (210) where the stains are located, and control the corresponding cleaning nozzles (340) to enter the pressurized cleaning mode until they are cleaned.

6. The glass substrate cleaning device according to claim 4, characterized in that, The pressurized cleaning mode is as follows: Through the switching mechanism (350), control each cleaning nozzle (340) to communicate with the liquid inlet pipe (310) and the air inlet pipe (320) simultaneously at preset time intervals. After the current cleaning nozzle (340) performs pressurized cleaning for a preset time, control the vision detection module to perform detection again until all cleaning nozzles (340) are cleaned. Based on the detection results after the pressurized cleaning of each cleaning nozzle (340), obtain the positions of the glass substrates (210) where the stains are located, and control the corresponding cleaning nozzles (340) to enter the pressurized cleaning mode until they are cleaned.

7. A cleaning process applied to the glass substrate cleaning equipment as described in claim 1, characterized in that, The cleaning process includes: Place the glass substrates (210) to be cleaned into the corresponding cleaning basket (200). Place the cleaning basket (200) into the cleaning station (110). Through the switching mechanism (350), connect each cleaning nozzle (340) to the liquid inlet pipe (310) to enter the cleaning condition and clean the glass substrates (210). After cleaning, through the switching mechanism (350), connect each cleaning nozzle (340) to the air inlet pipe (320) to enter the air-drying condition and remove the remaining water stains on the glass substrates (210). After the cleaning condition is completed and before entering the air-drying condition, the cleaning process further includes: Enter the detection condition, that is: Detect the cleaning effect in the cleaning basket (200). Based on the detection results, control the switching mechanism (350) to enter the pressurized cleaning mode. The pressurized cleaning mode is as follows: Through the switching mechanism (350), control each cleaning nozzle (340) to communicate with the liquid inlet pipe (310) successively at preset time intervals. After the current cleaning nozzle (340) performs pressurized cleaning for a preset time, control the vision detection module to perform detection again until all cleaning nozzles (340) are cleaned. Based on the detection results after the pressurized cleaning of each cleaning nozzle (340), obtain the positions of the glass substrates (210) where the stains are located, and control the corresponding cleaning nozzles (340) to enter the pressurized cleaning mode until they are cleaned.

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