Welding method for aluminum target material and copper back plate

Abstract

The invention relates to a welding method for an aluminum target material and a copper back plate, in particular to the technical field of target material welding, and the welding method comprises the steps that a mixed metal powder layer is arranged between the welding face of the aluminum target material and the welding face of the copper back plate, and then hot isostatic pressing welding is conducted; the mixed metal powder layer comprises, by mass, 10%-15% of aluminum powder, 9%-15% of tin powder, 3%-5% of nickel powder and the balance zinc powder. According to the welding method provided by the invention, the specific mixed metal powder layer is arranged between the welding surfaces of the target material assembly, so that the target material assembly can be effectively connected with the aluminum target material and the copper back plate during special isostatic pressing welding, the welding strength of the target material assembly is remarkably improved, meanwhile, the overall deformation of the welded target material assembly is small, and the service life of the target material assembly is prolonged. And welding of the large-size target material assembly is facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of target material welding, in particular to a welding method for an aluminum target material and a copper back plate, and in particular to a welding method for an aluminum target material and a copper back plate with an equivalent circle diameter ≥1000 mm. Background Art

[0002] At present, with the development of the size of flat panel displays, the deposition substrate is required to develop in the direction of large-scale, and the corresponding target material is also required to have a larger size to meet the needs of LCD display device manufacturing.

[0003] During use, the target material usually needs to be fixedly connected to the back plate before it can be used. Usually, the connection between the target material and the back plate is carried out by welding.

[0004] For example, CN115255642A discloses a method for welding a copper target and an aluminum alloy back plate, the method comprising the following steps: (1) laser cladding the surface of the aluminum alloy back plate with copper additive to obtain a copper-clad aluminum alloy back plate; (2) processing threads on the copper additive portion of the copper-clad aluminum alloy back plate, and performing surface treatment on the copper-clad aluminum alloy back plate and the copper target; (3) buckling the copper target with the cladding surface of the copper-clad aluminum alloy back plate, placing the whole in a sheath after buckling, and performing hot isostatic pressing to complete the welding of the copper target and the aluminum alloy back plate.

[0005] CN119387796A discloses a welding method for a high-purity aluminum target material, belonging to the technical field of alloy target materials; the invention firstly turns a flat thread on the surface to be welded of a copper alloy back plate, then performs aluminum coating within a certain thickness range on the surface to be welded, then assembles the copper alloy back plate coated with aluminum film and a high-purity aluminum target blank, and puts the assembled target material assembly into a package for degassing treatment, and finally performs hot isostatic pressing diffusion welding at a temperature ≥200°C.

[0006] However, the above welding method is preferentially applicable to smaller-sized targets. When welding large-sized targets, such as aluminum targets with an equivalent circular diameter ≥1000mm, the existing welding method will result in large deformation of the target assembly after welding and low welding strength that cannot meet the requirements of large-sized targets due to the large size of the targets. Summary of the invention

[0007] In view of the problems existing in the prior art, the purpose of the present invention is to provide a welding method for an aluminum target and a copper backing plate to solve the defects that the target assembly after welding is greatly deformed and the welding strength is low and cannot meet the requirements of large-size targets.

[0008] To achieve this object, the present invention adopts the following technical solutions:

[0009] The present invention provides a welding method for an aluminum target material and a copper back plate, the welding method comprising:

[0010] A mixed metal powder layer is provided between the welding surfaces of the aluminum target and the copper back plate, followed by hot isostatic pressing welding;

[0011] The mixed metal powder layer comprises, by mass percentage, 10-15% aluminum powder, 9-15% tin powder, 3-5% nickel powder, and the remainder is zinc powder.

[0012] The welding method provided by the present invention, by arranging a specific mixed metal powder layer between the welding surfaces of the target assembly, can achieve effective connection with the aluminum target and the copper back plate during isostatic pressure welding, thereby significantly improving the welding strength of the target assembly. At the same time, the overall deformation of the target assembly after welding is small, which is conducive to the welding of large-size target assemblies.

[0013] As a preferred technical solution of the present invention, the welding surface of the aluminum target is sandblasted and / or threaded.

[0014] Preferably, the welding surface of the copper back plate is sandblasted and / or threaded.

[0015] As a preferred technical solution of the present invention, the roughness Ra of the welding surface after sandblasting is 100-300 μm.

[0016] As a preferred technical solution of the present invention, the pitch of the thread obtained by the thread processing is 10-20mm.

[0017] Preferably, the depth of the thread obtained by the thread machining process is 5-15 mm.

[0018] As a preferred technical solution of the present invention, the aluminum powder D90 particle size is 10-20 μm.

[0019] Preferably, the D90 particle size of the tin powder is 30-60 μm.

[0020] Preferably, the D90 particle size of the nickel powder is ≤6 μm.

[0021] Preferably, the D90 particle size of the zinc powder is 80-90 μm.

[0022] As a preferred technical solution of the present invention, the thickness of the mixed metal powder layer is 1-5 mm.

[0023] As a preferred technical solution of the present invention, when threads are arranged on the welding surface, the thickness of the mixed metal powder layer is equal to the depth of the threads.

[0024] As a preferred technical solution of the present invention, the temperature of the hot isostatic pressing welding is ≥200°C.

[0025] As a preferred technical solution of the present invention, the pressure of the hot isostatic pressing welding is 120-220 MPa.

[0026] As a preferred technical solution of the present invention, the hot isostatic pressing welding time is 1-2 hours.

[0027] Compared with the prior art solutions, the present invention has the following beneficial effects:

[0028] The welding method provided by the present invention adopts a specific mixed metal powder as an intermediate layer for welding an aluminum target and a copper back plate, and at the same time uses hot isostatic pressing welding to achieve welding of a large-size aluminum target and a copper back plate. The welding strength of the target assembly after welding is ≥115.5MPa, and the overall bending deformation is ≤1.9mm. The defect of the large-size target assembly needing to be leveled and the weld seam repaired after welding is avoided, which is beneficial to improving the use effect of the target. DETAILED DESCRIPTION

[0029] To better illustrate the present invention and facilitate understanding of the technical solution of the present invention, typical but non-limiting embodiments of the present invention are as follows:

[0030] This embodiment provides a welding method for an aluminum target and a copper back plate, the welding method comprising:

[0031] A mixed metal powder layer is set between the welding surface of the aluminum target and the copper backing plate, and then hot isostatic pressing welding is performed.

[0032] The aluminum target material includes: pure aluminum target material or aluminum alloy target material, etc. The specific target material can be selected as high-purity target material, ultra-high-purity target material, etc.

[0033] The copper backplane includes: a pure copper backplane or a copper alloy backplane, such as a copper-chromium alloy backplane such as C18000, C18150 or C18200. The specific backplane can be a high-purity backplane, an ultra-high-purity backplane, etc.

[0034] In the present invention, the high purity refers to a purity of ≥99.99%.

[0035] In the present invention, the ultra-high purity refers to a purity ≥ 99.9999%.

[0036] Wherein, the welding surface of the aluminum target is subjected to sandblasting treatment and / or thread processing treatment.

[0037] Wherein, the welding surface of the copper back plate is subjected to sandblasting treatment and / or thread processing treatment.

[0038] In the present invention, sandblasting refers to using compressed air as a power to form a high-speed jet beam to spray material (copper ore sand, quartz sand, corundum, iron sand, sea sand) at high speed onto the surface of the workpiece to be processed to achieve a surface roughening effect. The control parameters in the specific sandblasting process can be reasonably selected according to the conventional technical requirements in the field to ensure that the roughness requirements specified in the present invention are met.

[0039] In the present invention, thread processing refers to forming threads on the target material welding surface or the back plate welding surface by machining processes such as turning and milling.

[0040] In the present invention, the shape of the thread obtained by thread processing can be selected as rectangular thread, triangular thread, trapezoidal thread, serrated thread, etc.

[0041] Among them, the roughness Ra of the welding surface after sandblasting is 100-300μm, for example, it can be 100μm, 120μm, 140μm, 160μm, 180μm, 200μm, 220μm, 240μm, 260μm, 280μm or 300μm, but is not limited to the listed values, and other unlisted values ​​within this range also meet the requirements.

[0042] Among them, the pitch of the thread obtained by the thread processing is 10-20mm, for example, it can be 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm or 20mm, but is not limited to the listed values, and other unlisted values ​​within this range also meet the requirements.

[0043] Among them, the depth of the thread obtained by the thread processing is 5-15mm, for example, it can be 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, 11mm, 12mm, 13mm, 14mm or 15mm, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0044] The mixed metal powder layer comprises, by mass percentage, 10-15% aluminum powder, 9-15% tin powder, 3-5% nickel powder, and the remainder is zinc powder.

[0045] In the present invention, the mixed metal powder layer is prepared by uniformly mixing aluminum powder, tin powder, nickel powder and zinc powder, for example, by using a V-type powder mixer.

[0046] Among them, the mass percentage of aluminum powder in the mixed metal powder layer is 10-15%, for example, it can be 10%, 10.5%, 11%, 11.5%, 12%, 12.5%, 13%, 13.5%, 14%, 14.5% or 15%, etc., but is not limited to the listed values, and other unlisted values ​​within this range also meet the requirements.

[0047] Among them, the mass percentage of tin powder in the mixed metal powder layer is 9-15%, for example, it can be 9%, 9.5%, 10%, 10.5%, 11%, 11.5%, 12%, 12.5%, 13%, 13.5%, 14%, 14.5% or 15%, etc., but is not limited to the listed values, and other values ​​not listed in this range also meet the requirements.

[0048] Among them, the nickel powder in the mixed metal powder layer is calculated as a mass percentage of 3-5%, for example, it can be 3%, 3.2%, 3.4%, 3.6%, 3.8%, 4%, 4.2%, 4.4%, 4.6%, 4.8% or 5%, etc., but is not limited to the listed values, and other unlisted values ​​within this range also meet the requirements.

[0049] Among them, the aluminum powder D90 particle size is 10-20μm, for example, it can be 10μm, 11μm, 12μm, 13μm, 14μm, 15μm, 16μm, 17μm, 18μm, 19μm or 20μm, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0050] The D90 particle size of the tin powder is 30-60 μm, for example, 30 μm, 32 μm, 34 μm, 36 μm, 38 μm, 40 μm, 42 μm, 44 μm, 46 μm, 48 μm, 50 μm, 52 μm, 54 μm, 56 μm, 58 μm or 60 μm, etc., but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0051] The D90 particle size of the nickel powder is ≤6 μm, for example, 6 μm, 5 μm, 4 μm, 3 μm, 2 μm or 1 μm, but is not limited to the listed values, and other values ​​not listed within the range also meet the requirements.

[0052] The D90 particle size of the zinc powder is 80-90 μm, for example, 80 μm, 81 μm, 82 μm, 83 μm, 84 μm, 85 μm, 86 μm, 87 μm, 88 μm, 89 μm or 90 μm, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0053] Among them, the thickness of the mixed metal powder layer is 1-5mm, for example, it can be 1mm, 1.5mm, 2mm, 2.5mm, 3mm, 3.5mm, 4mm, 4.5mm or 5mm, but is not limited to the listed values. Other values ​​not listed in this range also meet the requirements.

[0054] Wherein, when threads are arranged on the welding surface, the thickness of the mixed metal powder layer is equal to the depth of the threads.

[0055] In the present invention, before hot isostatic pressing welding, the target material, the back plate and the mixed metal powder layer are assembled and placed in a sheath for degassing before welding. This is a conventional operation in the art and can be performed according to conventional requirements, such as controlling the absolute vacuum degree at the degassing endpoint to ≤0.1Pa.

[0056] Among them, the temperature of the hot isostatic pressing welding is ≥200°C, for example, it can be 200°C, 220°C, 240°C, 260°C, 280°C, 300°C, 320°C, 340°C, 360°C, 380°C, 400°C, 450°C or 500°C, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0057] Among them, the pressure of the hot isostatic pressing welding is 120-220MPa, for example, it can be 120MPa, 130MPa, 140MPa, 150MPa, 160MPa, 170MPa, 180MPa, 190MPa, 200MPa, 210MPa or 220MPa, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0058] Among them, the hot isostatic pressing welding time is 1-2h, for example, it can be 1h, 1.1h, 1.2h, 1.3h, 1.4h, 1.5h, 1.6h, 1.7h, 1.8h, 1.9h or 2h, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0059] Further, in order to illustrate the welding effect that can be achieved by the welding method provided by the present invention, the following example is used for exemplary description, as follows:

[0060] The target material used in the following embodiments is an aluminum target material with a purity of 99.999%, and the back plate is a pure copper back plate with a purity of 99.99%. The length of the target material is 1200 mm and the width is 1130 mm.

[0061] Example 1

[0062] This embodiment provides a method for welding an aluminum target and a copper back plate, which is as follows:

[0063] A mixed metal powder layer is provided between the welding surfaces of the aluminum target and the copper back plate, followed by hot isostatic pressing welding;

[0064] The mixed metal powder layer comprises, by mass percentage, 13% aluminum powder, 11% tin powder, 4% nickel powder, and the remainder is zinc powder; the thickness of the mixed metal powder layer is 2 mm; the D90 particle size of the aluminum powder is 15 μm; the D90 particle size of the tin powder is 40 μm; the D90 particle size of the nickel powder is 6 μm; and the D90 particle size of the zinc powder is 85 μm;

[0065] The hot isostatic pressing welding was performed at a temperature of 300° C., a pressure of 150 MPa, and a time of 1.8 h.

[0066] Example 2

[0067] This embodiment provides a method for welding an aluminum target and a copper back plate, which is as follows:

[0068] A mixed metal powder layer is provided between the welding surfaces of the aluminum target and the copper back plate, followed by hot isostatic pressing welding;

[0069] The mixed metal powder layer comprises, by mass percentage, 12% aluminum powder, 13% tin powder, 4.5% nickel powder, and the remainder is zinc powder; the thickness of the mixed metal powder layer is 3 mm; the D90 particle size of the aluminum powder is 18 μm; the D90 particle size of the tin powder is 50 μm; the D90 particle size of the nickel powder is 3 μm; and the D90 particle size of the zinc powder is 88 μm;

[0070] The hot isostatic pressing welding is performed at a temperature of 400° C., a pressure of 180 MPa, and a time of 1.5 h.

[0071] Example 3

[0072] This embodiment provides a method for welding an aluminum target and a copper back plate, which is as follows:

[0073] A mixed metal powder layer is provided between the welding surfaces of the aluminum target and the copper back plate, followed by hot isostatic pressing welding;

[0074] The mixed metal powder layer comprises, by mass percentage, 10% aluminum powder, 15% tin powder, 5% nickel powder, and the remainder is zinc powder; the thickness of the mixed metal powder layer is 1 mm; the D90 particle size of the aluminum powder is 10 μm; the D90 particle size of the tin powder is 30 μm; the D90 particle size of the nickel powder is 6 μm; the D90 particle size of the zinc powder is 90 μm;

[0075] The hot isostatic pressing welding is performed at a temperature of 200° C., a pressure of 220 MPa, and a time of 2 hours.

[0076] Example 4

[0077] This embodiment provides a method for welding an aluminum target and a copper back plate, which is as follows:

[0078] A mixed metal powder layer is provided between the welding surfaces of the aluminum target and the copper back plate, followed by hot isostatic pressing welding;

[0079] The mixed metal powder layer comprises, by mass percentage, 15% aluminum powder, 9% tin powder, 3% nickel powder, and the remainder is zinc powder; the thickness of the mixed metal powder layer is 5 mm; the D90 particle size of the aluminum powder is 20 μm; the D90 particle size of the tin powder is 60 μm; the D90 particle size of the nickel powder is 1 μm; and the D90 particle size of the zinc powder is 90 μm;

[0080] The hot isostatic pressing welding is performed at a temperature of 500° C., a pressure of 120 MPa, and a time of 1 hour.

[0081] Example 5

[0082] The only difference from Example 1 is that the welding surface of the aluminum target is sandblasted, and the roughness Ra of the welding surface after sandblasting is 200 μm.

[0083] Example 6

[0084] The only difference from Example 2 is that the welding surface of the aluminum target is sandblasted, and the roughness Ra of the welding surface after sandblasting is 250 μm.

[0085] Example 7

[0086] The only difference from Example 1 is that the welding surface of the copper back plate is threaded, and the resulting thread has a pitch of 15 mm and a depth of 10 mm. Since threads are provided on the welding surface, the thickness of the mixed metal powder layer is equal to the depth of the threads.

[0087] Example 8

[0088] The only difference from Example 2 is that the welding surface of the copper back plate is threaded, and the resulting thread has a pitch of 18 mm and a depth of 12 mm. Since threads are provided on the welding surface, the thickness of the mixed metal powder layer is equal to the depth of the threads.

[0089] Example 9

[0090] The only difference from Example 1 is that the welding surface of the aluminum target is sandblasted, and the roughness Ra of the welding surface after sandblasting is 100μm; the welding surface of the copper back plate is threaded, and the resulting thread has a pitch of 10mm and a depth of 15mm. Since threads are set on the welding surface, the thickness of the mixed metal powder layer is equal to the depth of the threads.

[0091] Example 10

[0092] The only difference from Example 1 is that the welding surface of the aluminum target is sandblasted, and the roughness Ra of the welding surface after sandblasting is 300μm; the welding surface of the copper back plate is threaded, and the resulting thread has a pitch of 20mm and a depth of 5mm. Since threads are set on the welding surface, the thickness of the mixed metal powder layer is equal to the depth of the threads.

[0093] Embodiment 11

[0094] The only difference from Example 1 is that the welding surface of the aluminum target is sandblasted, and the roughness Ra of the welding surface after sandblasting is 200μm; the welding surface of the copper back plate is threaded and sandblasted in sequence, and the resulting thread has a pitch of 20mm and a depth of 5mm. The roughness Ra of the welding surface after sandblasting is 200μm. Since threads are set on the welding surface, the thickness of the mixed metal powder layer is equal to the depth of the threads.

[0095] Comparative Example 1

[0096] The only difference from Example 1 is that the mass percentage of aluminum powder in the mixed metal powder layer is 5%, and the change is achieved by adjusting the content of zinc powder to ensure that the total amount of metal powder remains unchanged.

[0097] Comparative Example 2

[0098] The only difference from Example 1 is that the mass percentage of aluminum powder in the mixed metal powder layer is 20%, and the change is achieved by adjusting the content of zinc powder to ensure that the total amount of metal powder remains unchanged.

[0099] Comparative Example 3

[0100] The only difference from Example 1 is that the mass percentage of tin powder in the mixed metal powder layer is 5%, and the change is achieved by adjusting the content of zinc powder to ensure that the total amount of metal powder remains unchanged.

[0101] Comparative Example 4

[0102] The only difference from Example 1 is that the mass percentage of tin powder in the mixed metal powder layer is 20%, and the change is achieved by adjusting the content of zinc powder to ensure that the total amount of metal powder remains unchanged.

[0103] Comparative Example 5

[0104] The only difference from Example 1 is that the mass percentage of nickel powder in the mixed metal powder layer is 3%, and the change is achieved by adjusting the content of zinc powder to ensure that the total amount of metal powder remains unchanged.

[0105] Comparative Example 6

[0106] The only difference from Example 1 is that the mass percentage of nickel powder in the mixed metal powder layer is 8%, and the change is achieved by adjusting the content of zinc powder to ensure that the total amount of metal powder remains unchanged.

[0107] Comparative Example 7

[0108] The only difference from Example 1 is that the aluminum powder is replaced by an equal amount of zinc powder.

[0109] Comparative Example 8

[0110] The only difference from Example 1 is that the tin powder is replaced by an equal amount of zinc powder.

[0111] Comparative Example 9

[0112] The only difference from Example 1 is that the nickel powder is replaced by an equal amount of zinc powder.

[0113] The target material assemblies obtained in the embodiment and the comparative example were tested for welding bonding strength according to GB / T 39163-2020 “Test method for bonding strength between target material and backing plate”, and the overall bending deformation before and after welding was measured. The results are shown in Table 1 below.

[0114] Table 1

[0115]

[0116]

[0117] As can be seen from Table 1, the welding method provided by the present invention, by arranging a specific mixed metal powder layer between the welding surfaces of the target assembly, can achieve effective connection with the aluminum target and the copper backing plate during isostatic welding, thereby significantly improving the welding strength of the target assembly. At the same time, the overall deformation of the target assembly after welding is small, which is conducive to the welding of large-size target assemblies.

[0118] The preferred embodiments of the present invention are described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, a variety of simple modifications can be made to the technical solution of the present invention, and these simple modifications all belong to the protection scope of the present invention.

[0119] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.

[0120] In addition, various embodiments of the present invention may be arbitrarily combined, and as long as they do not violate the concept of the present invention, they should also be regarded as the contents disclosed by the present invention.

Claims

1. A method for welding an aluminum target and a copper back plate, characterized in that: The welding method comprises: A mixed metal powder layer is provided between the welding surfaces of the aluminum target and the copper back plate, followed by hot isostatic pressing welding; The mixed metal powder layer comprises, by mass percentage, 10-15% aluminum powder, 9-15% tin powder, 3-5% nickel powder, and the remainder is zinc powder.

2. The welding method according to claim 1, characterized in that The welding surface of the aluminum target is subjected to sandblasting and / or thread processing; Preferably, the welding surface of the copper back plate is sandblasted and / or threaded.

3. The welding method according to claim 2, characterized in that: The roughness Ra of the welding surface after the sandblasting treatment is 100-300 μm.

4. The welding method according to claim 2 or 3, characterized in that: The thread pitch obtained by the thread processing is 10-20mm; Preferably, the depth of the thread obtained by the thread machining process is 5-15 mm.

5. The welding method according to any one of claims 1 to 4, characterized in that: The aluminum powder D90 particle size is 10-20 μm; Preferably, the D90 particle size of the tin powder is 30-60 μm; Preferably, the D90 particle size of the nickel powder is ≤6 μm; Preferably, the D90 particle size of the zinc powder is 80-90 μm.

6. The welding method according to any one of claims 1 to 5, characterized in that: The thickness of the mixed metal powder layer is 1-5 mm.

7. The welding method according to any one of claims 2 to 6, characterized in that: When threads are arranged on the welding surface, the thickness of the mixed metal powder layer is equal to the depth of the threads.

8. The welding method according to any one of claims 1 to 7, characterized in that: The temperature of the hot isostatic pressing welding is ≥200°C.

9. The welding method according to any one of claims 1 to 7, characterized in that: The pressure of the hot isostatic pressing welding is 120-220 MPa.

10. The welding method according to any one of claims 1 to 7, characterized in that: The hot isostatic pressing welding time is 1-2 hours.

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