Processing assistance device for laser device and laser processing system

Abstract

The embodiment of the invention discloses a machining auxiliary device of a laser device and a laser machining system. The machining auxiliary device comprises a liquid path auxiliary unit and a gas path auxiliary unit. A gas outlet of the gas path auxiliary unit is used for being connected with a liquid inlet of the laser device and connected with a gas inlet of the laser device; a liquid outlet of the liquid path auxiliary unit is used for being connected with a liquid inlet of the laser device and connected with an air inlet of the laser device. The gas outlet of the gas path auxiliary unit is connected with the liquid inlet of the laser device, and the liquid outlet of the liquid path auxiliary unit is connected with the gas inlet of the laser device, so that the liquid path auxiliary unit, the gas path auxiliary unit and the laser device are integrated, and compared with the mode that the laser device is provided with two auxiliary units, occupied space is reduced.

Description

Technical Field

[0001] The present invention relates to the field of laser processing technology, and in particular to a processing auxiliary device for a laser device and a laser processing system. Background Art

[0002] As a high-performance optoelectronic device, semiconductor lasers have been widely used in many fields such as industry, medicine, and military due to their many advantages such as small size, long life, high electro-optical conversion efficiency, wide wavelength tunable range, and good reliability. However, as the application scenarios continue to increase their output power and performance requirements, heat dissipation has gradually become one of the key factors restricting the development of semiconductor lasers.

[0003] At present, there are two auxiliary systems for semiconductor lasers: heat dissipation water circuit and air assistance. The heat dissipation water circuit system removes the heat generated by the laser chip through circulating coolant, which can effectively reduce the chip temperature and maintain its stable operation. The air-assisted system uses air to blow away the melted material during laser processing, allowing deeper laser processing. At present, the heat dissipation water circuit and air assistance of semiconductor lasers are two separate systems, which occupy a large space in the whole system. Summary of the invention

[0004] The main purpose of the present invention is to provide a processing auxiliary device for a laser device and a laser processing system, which can solve the problem that the processing auxiliary system in the prior art occupies a large space.

[0005] To achieve the above-mentioned object, the present invention provides a processing auxiliary device for a laser device in a first aspect, the processing auxiliary device comprising: Liquid circuit auxiliary unit and gas circuit auxiliary unit; The gas outlet of the gas circuit auxiliary unit is used to be connected to the liquid inlet of the laser device, and is connected to the gas inlet of the laser device; The liquid outlet of the liquid circuit auxiliary unit is used to be connected to the liquid inlet of the laser device, and is connected to the air inlet of the laser device.

[0006] In one feasible implementation, when a drain instruction is received, the liquid outlet of the liquid auxiliary unit is controlled to stop delivering the first liquid to the liquid inlet of the laser device, and the gas outlet of the gas path auxiliary unit is controlled to deliver the first gas to the liquid inlet of the laser device, so that the first gas discharges the first liquid from the liquid outlet of the laser device to perform the drain operation of the first liquid in the laser device.

[0007] In one feasible implementation, when a fire extinguishing command is received, the liquid outlet of the liquid auxiliary unit is controlled to deliver the second liquid to the air inlet of the laser device, and the air outlet of the gas circuit auxiliary unit is controlled to deliver the second gas to the air inlet of the laser device, so that the second gas discharges the second liquid from the air outlet of the laser device to perform a fire extinguishing operation.

[0008] In a feasible implementation, when a cooling instruction is received, the liquid outlet of the liquid circuit auxiliary unit is controlled to transport the third liquid to the liquid inlet of the laser device, so that the third liquid is discharged from the liquid outlet of the laser device to perform a cooling operation on the laser device.

[0009] In a feasible implementation, the air outlet of the laser device is coaxially arranged with the laser generating port of the laser device; When an air-assist instruction is received, the gas outlet of the gas path assist unit is controlled to deliver the third gas to the gas inlet of the laser device, so that the third gas is discharged from the gas outlet of the laser device to perform air-assist operation of the laser device.

[0010] In a feasible implementation, the liquid circuit auxiliary unit includes at least a first two-position three-way solenoid valve and a first three-way valve; the gas circuit auxiliary unit includes at least a second two-position three-way solenoid valve and a second three-way valve; The first liquid outlet of the first two-position three-way solenoid valve is connected to the liquid inlet of the first three-way valve; the second liquid outlet of the first two-position three-way solenoid valve is connected to the liquid inlet of the second three-way valve; the air inlet of the first three-way valve is connected to the first air outlet of the second two-position three-way solenoid valve; the outlet of the first three-way valve is connected to the liquid inlet of the laser device; The second air outlet of the second two-position three-way solenoid valve is connected to the air inlet of the second three-way valve; and the outlet of the second three-way valve is connected to the air inlet of the laser device.

[0011] In a feasible implementation, the liquid circuit auxiliary unit further includes a liquid tank, a liquid pump, a one-way valve and a cooling structure; The liquid outlet of the liquid tank is connected to the liquid inlet of the liquid pump, the liquid outlet of the liquid pump is connected to the liquid inlet of the one-way valve, and the liquid outlet of the one-way valve is connected to the liquid inlet of the first two-position three-way solenoid valve; The liquid outlet of the laser device is connected to the liquid inlet of the cooling structure, and the liquid outlet of the cooling structure is connected to the liquid inlet of the liquid tank.

[0012] In a feasible implementation, the air circuit auxiliary unit further includes an air pump, and an air outlet of the air pump is connected to an air inlet of the second two-position three-way solenoid valve.

[0013] To achieve the above-mentioned objective, a second aspect of the present invention provides a laser processing system, which includes a laser device and a processing auxiliary device for the laser device as shown in the first aspect and any feasible implementation.

[0014] The embodiments of the present invention have the following beneficial effects: The present invention provides a processing auxiliary device for a laser device, the processing auxiliary device comprising: a liquid circuit auxiliary unit and a gas circuit auxiliary unit; the gas outlet of the gas circuit auxiliary unit is used to be connected to the liquid inlet of the laser device and the gas inlet of the laser device; the liquid outlet of the liquid circuit auxiliary unit is used to be connected to the liquid inlet of the laser device and the gas inlet of the laser device. By connecting the gas outlet of the gas circuit auxiliary unit to the liquid inlet of the laser device and connecting the liquid outlet of the liquid circuit auxiliary unit to the gas inlet of the laser device, the liquid circuit auxiliary unit, the gas circuit auxiliary unit and the laser device are integrated, and compared with setting two auxiliary units for the laser device, the space occupied is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] in: Figure 1 It is a structural block diagram of a processing auxiliary device of a laser device in an embodiment of the present invention; Figure 2 Another structural block diagram of a processing auxiliary device for a laser device in an embodiment of the present invention. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] See also Figure 1 , Figure 1 FIG. 1 is a structural block diagram of a processing auxiliary device for a laser device according to an embodiment of the present invention. Figure 1 The device 00 shown includes: a liquid circuit auxiliary unit 10 and a gas circuit auxiliary unit 20; The gas outlet of the gas circuit auxiliary unit 20 is used to be connected to the liquid inlet of the laser device 30, and connected to the gas inlet of the laser device 30; The liquid outlet of the liquid circuit auxiliary unit 10 is used to be connected to the liquid inlet of the laser device 30 , and is connected to the air inlet of the laser device 30 .

[0019] The gas circuit auxiliary unit and the liquid circuit auxiliary unit can be connected in series in the above manner to reduce the space occupied by the separate units. The liquid circuit auxiliary unit can be a water circuit auxiliary unit, and the gas circuit auxiliary unit can be an air circuit auxiliary unit. The liquid circuit auxiliary unit can provide cooling water for cooling when the laser needs cooling; the gas circuit auxiliary unit can output air when the laser needs air assistance, and use air pressure to blow away the melt.

[0020] It can be understood that both the gas circuit auxiliary unit and the liquid circuit auxiliary unit have at least one power device, at least one on-off device and at least one delivery pipeline, wherein the power device can be a pump and the on-off device can be a valve. This application uses this as an example without limitation.

[0021] Furthermore, after connecting the two auxiliary units in series, in addition to the above-mentioned auxiliary processing functions of laser cooling and air assistance, the two auxiliary units can also cooperate with each other to expand the auxiliary processing methods. In addition to laser cooling and air assistance, drainage assistance, fire extinguishing assistance, etc. can also be achieved.

[0022] In one feasible implementation, when a drain instruction is received, the liquid outlet of the liquid auxiliary unit is controlled to stop delivering the first liquid to the liquid inlet of the laser device, and the gas outlet of the gas path auxiliary unit is controlled to deliver the first gas to the liquid inlet of the laser device, so that the first gas discharges the first liquid from the liquid outlet of the laser device to perform the drain operation of the first liquid in the laser device.

[0023] Exemplarily, when there is a need to drain liquid, the two systems can be used to achieve the draining operation of the liquid in the laser device. For example, when the laser device needs to be replaced, the liquid in the laser device is emptied, and the liquid in the laser device can be drained through the gas circuit auxiliary unit. Specifically, the user can activate the "drain button" to issue a drain instruction. When receiving the drain instruction, first, the liquid auxiliary unit needs to stop delivering liquid to the laser device, that is, control the liquid outlet of the liquid auxiliary unit to stop delivering the first liquid to the liquid inlet of the laser device; then the liquid inlet and the liquid outlet are connected, and the gas circuit auxiliary unit can inflate and pressurize the liquid inlet of the laser device to discharge the liquid from the liquid outlet of the laser device, that is, control the gas outlet of the gas circuit auxiliary unit to deliver the first gas to the liquid inlet of the laser device, so that the first gas discharges the first liquid from the liquid outlet of the laser device, to perform the draining operation of the first liquid in the laser device. Solve the problem of difficult dewatering of water pipes and facilitate the replacement of lasers or tubes.

[0024] In a feasible implementation, when a fire extinguishing instruction is received, the liquid outlet of the liquid auxiliary unit is controlled to deliver the second liquid to the air inlet of the laser device, and the air outlet of the gas circuit auxiliary unit is controlled to deliver the second gas to the air inlet of the laser device, so that the second gas discharges the second liquid from the air outlet of the laser device to perform a fire extinguishing operation. When a fire occurs, the liquid in the water circuit can be used to extinguish the fire in time.

[0025] Exemplarily, when there is a need for fire extinguishing, the fire extinguishing operation can be achieved through the cooperation of the two systems. For example, if a certain processing position suddenly catches fire during processing, the fire can be extinguished by discharging the liquid of the laser device through the gas circuit auxiliary unit. Specifically, if a certain processing position suddenly catches fire during processing, a fire extinguishing command will be triggered. First, when the fire extinguishing command is received, it is necessary to deliver the fire-extinguishing liquid to the air inlet of the laser device, that is, control the liquid outlet of the liquid auxiliary unit to transport the second liquid to the air inlet of the laser device, and then connect the air inlet and the air outlet, and the air outlet of the laser device is coaxially arranged with the laser generating port of the laser device. When the processing position catches fire, the gas circuit auxiliary unit can spray out the liquid to extinguish the fire, that is, control the air outlet of the gas circuit auxiliary unit to transport the second gas to the air inlet of the laser device, so that the second gas discharges the second liquid from the air outlet of the laser device to perform the fire extinguishing operation.

[0026] In a feasible implementation, when a cooling instruction is received, the liquid outlet of the liquid circuit auxiliary unit is controlled to transport the third liquid to the liquid inlet of the laser device, so that the third liquid is discharged from the liquid outlet of the laser device to perform a cooling operation on the laser device.

[0027] Exemplarily, the liquid circuit auxiliary unit also cools the laser device. Specifically, when receiving a cooling instruction, the liquid outlet of the liquid circuit auxiliary unit is controlled to transport the third liquid to the liquid inlet of the laser device, so that the third liquid is discharged from the liquid outlet of the laser device to perform a cooling operation on the laser device.

[0028] In a feasible implementation, the air outlet of the laser device is coaxially arranged with the laser generating port of the laser device; When an air-assist instruction is received, the gas outlet of the gas path assist unit is controlled to deliver the third gas to the gas inlet of the laser device, so that the third gas is discharged from the gas outlet of the laser device to perform air-assist operation of the laser device.

[0029] Exemplarily, the air path assist unit also provides air assistance for the laser device. Specifically, the air outlet of the laser device is coaxially arranged with the laser generating port of the laser device. When receiving an air assistance instruction, the air outlet of the air path assist unit is controlled to deliver a third gas to the air inlet of the laser device, so that the third gas is discharged from the air outlet of the laser device to perform air-assisted operation of the laser device, such as blowing away the melt at the processing position so that the laser can fall on a deeper processing position to complete the processing.

[0030] The present invention provides a processing auxiliary device for a laser device, the processing auxiliary device comprising: a liquid circuit auxiliary unit and a gas circuit auxiliary unit; the gas outlet of the gas circuit auxiliary unit is used to be connected to the liquid inlet of the laser device, and to be connected to the gas inlet of the laser device; the liquid outlet of the liquid circuit auxiliary unit is used to be connected to the liquid inlet of the laser device, and to be connected to the gas inlet of the laser device. By connecting the gas outlet of the gas circuit auxiliary unit to the liquid inlet of the laser device, and connecting the liquid outlet of the liquid circuit auxiliary unit to the gas inlet of the laser device, the liquid circuit auxiliary unit, the gas circuit auxiliary unit and the laser device are integrated, and compared with setting two auxiliary units for the laser device, the space occupied is reduced. At the same time, the advantages of each are fully utilized to enhance the product experience to a greater extent, and the functions are diversified.

[0031] See also Figure 2 , Figure 2 FIG. 1 is another structural block diagram of a processing auxiliary device for a laser device according to an embodiment of the present invention. Figure 2 The device shown includes: a liquid circuit auxiliary unit 10 and a gas circuit auxiliary unit 20; the gas outlet of the gas circuit auxiliary unit is used to be connected to the liquid inlet of the laser device, and to be connected to the gas inlet of the laser device; the liquid outlet of the liquid circuit auxiliary unit is used to be connected to the liquid inlet of the laser device, and to be connected to the gas inlet of the laser device.

[0032] Understandably, Figure 2 The contents of the liquid circuit auxiliary unit 10 and the gas circuit auxiliary unit 20 in the device shown are the same as Figure 1 The contents of the liquid circuit auxiliary unit 10 and the gas circuit auxiliary unit 20 are similar, and are not described here to avoid repetition. For details, please refer to Figure 1 The contents of the liquid circuit auxiliary unit 10 and the gas circuit auxiliary unit 20 are shown.

[0033] Furthermore, the liquid circuit auxiliary unit 10 includes at least a first two-position three-way solenoid valve (A) and a first three-way A; the gas circuit auxiliary unit 20 includes at least a second two-position three-way solenoid valve (B) and a second three-way B; it can be understood that the selection of the above valves is related to the number of pipelines. If the system has a large transportation demand and a large number of pipelines, the number of valves and / or the passages of the valves (such as three-way, four-way, five-way) will also increase accordingly. The above is only an example and is not specifically limited. Exemplarily, the first three-way and the second three-way can be T-shaped three-ways.

[0034] The first liquid outlet of the first two-position three-way solenoid valve is connected to the liquid inlet of the first three-way valve; the second liquid outlet of the first two-position three-way solenoid valve is connected to the liquid inlet of the second three-way valve; the air inlet of the first three-way valve is connected to the first air outlet of the second two-position three-way solenoid valve; the outlet of the first three-way valve is connected to the liquid inlet of the laser device (such as Figure 2 The water inlet shown is connected; The second air outlet of the second two-position three-way solenoid valve is connected to the air inlet of the second three-way valve; and the outlet of the second three-way valve is connected to the air inlet of the laser device.

[0035] The liquid circuit auxiliary unit further includes a liquid tank 11, a liquid pump 12, a one-way valve 13 and a cooling structure 14. It can be understood that the number of the above components is related to the scale of the liquid circuit auxiliary unit. If the delivery demand is large, the number of corresponding components will also increase accordingly to adapt to the demand. The above is only an example and is not specifically limited. The liquid tank 11 can be a water tank, and the liquid pump 12 can be a water pump. Among them, the liquid outlet of the liquid tank is connected to the liquid inlet of the liquid pump, the liquid outlet of the liquid pump is connected to the liquid inlet of the one-way valve, the liquid outlet of the one-way valve is connected to the liquid inlet of the first two-position three-way solenoid valve; the liquid outlet of the laser device is connected to the liquid inlet of the cooling structure, and the liquid outlet of the cooling structure is connected to the liquid inlet of the liquid tank.

[0036] In a feasible implementation, the air circuit auxiliary unit further includes an air pump 21, the air outlet of the air pump is connected to the air inlet of the second two-position three-way solenoid valve. It can be understood that the number of the above components is related to the scale of the air circuit auxiliary unit. If the delivery demand is large, the number of corresponding components will also increase accordingly to adapt to the demand. The above is only an example and is not specifically limited.

[0037] For example, see Figure 2 : The water tank, water pump, one-way valve, two-position three-way solenoid valve (A) / A interface, three-way (A), laser (water inlet, water outlet), and cooling structure are connected with pipes to complete the water circuit series connection; Connect the air pump, two-position three-way solenoid valve (B) / D interface, three-way (B), and laser (air inlet) with pipes to complete the air circuit connection; Then use pipes to connect the two-position three-way solenoid valve (A) / B to the three-way (B), and the two-position three-way solenoid valve (B) / C to the three-way (A) to complete the series connection of the water and gas circuits.

[0038] Further Figure 2 Taking the structure shown in the figure as an example, after the water and gas circuits are connected in series, the functional realization principle is as follows: When the cooling command is received: the liquid pump 12 is started, and the liquid in the liquid tank 11 is input into the water inlet (liquid inlet) of the laser device 30 through the one-way valve 13, the outlet A of the two-position three-way valve (A), and the three-way A. Then, the water after cooling the laser enters the cooling structure 14 from the water outlet (liquid outlet) of the laser device 30, and returns to the liquid tank 11 after cooling.

[0039] When the air assist command is received, the air pump 21 starts, and the air is input to the air inlet of the laser device 30 through the outlet D and the three-way valve B of the two-position three-way valve (B), and then emitted from the air outlet of the laser device 30 to blow away the melt.

[0040] When receiving the fire extinguishing command: the liquid pump 12 is started, and the liquid in the liquid tank 11 is input to the air inlet of the laser device 30 through the one-way valve 13, the outlet B of the two-position three-way valve (A), and the three-way B; then the air pump 21 is started, and the air is input to the air inlet of the laser device 30 through the outlet D of the two-position three-way valve (B), and the three-way B, and then water is emitted from the air outlet of the laser device 30 to extinguish the fire. Exemplarily, the two-position three-way solenoid valve (A) / A interface and the two-position three-way solenoid valve (B) / D interface are the normally open interfaces of the solenoid valve, wherein the active fire extinguishing logic is: when the flame detection board (installed on the laser) senses the fire source, the machine stops and the air outlet is aimed at the fire source, the main board starts the water pump and the air pump, and the solenoid valve A is energized (the B port is connected), the liquid enters the gas path from the three-way (B), and then sprays to the fire source at the laser outlet to achieve fire extinguishing.

[0041] When receiving the drainage instruction: the liquid pump 12 stops, and then the air pump 21 starts, and the air is input into the water inlet of the laser device 30 through the outlet C and the three-way A of the two-position three-way valve (B), and then the water is discharged from the liquid outlet of the laser device 30, enters the cooling structure 14, and returns to the liquid tank 11 after cooling. Exemplarily, the two-position three-way solenoid valve (A) / A interface and the two-position three-way solenoid valve (B) / D interface are the normally open interfaces of the solenoid valve, wherein the water path dewatering logic: start the "drain button", the water pump stops, the air pump starts, and the solenoid valve B is energized (C port is connected), and the gas enters the water path from the three-way (A), realizing the pipeline dewatering after the three-way (A).

[0042] The present invention provides a processing auxiliary device for a laser device. Through the above device, two systems are integrated into one structure, which reduces the space occupied by accessories and reduces costs. Liquid in the waterway is cleared by air pressure, which facilitates the replacement of the laser or the tube. When a fire occurs, the liquid in the waterway can be used to extinguish the fire in time.

[0043] A laser processing system in an embodiment of the present invention includes a laser device and Figure 1 or Figure 2 A processing auxiliary device for the laser device.

[0044] The present invention provides a laser processing system, through which two systems are integrated into one structure, the space occupied by accessories is reduced, and the cost is reduced. Liquid in the waterway is cleared by air pressure, which facilitates the replacement of the laser or the tube. When a fire occurs, the liquid in the waterway can be used to extinguish the fire in time.

[0045] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0046] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A processing auxiliary device for a laser device, characterized in that: The processing auxiliary device comprises: Liquid circuit auxiliary unit and gas circuit auxiliary unit; The gas outlet of the gas circuit auxiliary unit is used to be connected to the liquid inlet of the laser device, and is connected to the gas inlet of the laser device; The liquid outlet of the liquid circuit auxiliary unit is used to be connected to the liquid inlet of the laser device, and is connected to the air inlet of the laser device.

2. The device according to claim 1, characterized in that: When a drain instruction is received, the liquid outlet of the liquid auxiliary unit is controlled to stop delivering the first liquid to the liquid inlet of the laser device, and the gas outlet of the gas path auxiliary unit is controlled to deliver the first gas to the liquid inlet of the laser device, so that the first gas discharges the first liquid from the liquid outlet of the laser device to perform a drain operation of the first liquid in the laser device.

3. The device according to claim 1, characterized in that: When a fire extinguishing command is received, the liquid outlet of the liquid auxiliary unit is controlled to deliver the second liquid to the air inlet of the laser device, and the air outlet of the gas circuit auxiliary unit is controlled to deliver the second gas to the air inlet of the laser device, so that the second gas discharges the second liquid from the air outlet of the laser device to perform a fire extinguishing operation.

4. The device according to claim 1, characterized in that: When a cooling instruction is received, the liquid outlet of the liquid circuit auxiliary unit is controlled to deliver the third liquid to the liquid inlet of the laser device, so that the third liquid is discharged from the liquid outlet of the laser device to perform a cooling operation on the laser device.

5. The device according to claim 1, characterized in that: The air outlet of the laser device is coaxially arranged with the laser generating port of the laser device; When an air-assist instruction is received, the gas outlet of the gas path assist unit is controlled to deliver the third gas to the gas inlet of the laser device, so that the third gas is discharged from the gas outlet of the laser device to perform air-assist operation of the laser device.

6. The device according to claim 2, characterized in that: The liquid circuit auxiliary unit includes at least a first two-position three-way solenoid valve and a first three-way valve; the gas circuit auxiliary unit includes at least a second two-position three-way solenoid valve and a second three-way valve; The first liquid outlet of the first two-position three-way solenoid valve is connected to the liquid inlet of the first three-way valve; the second liquid outlet of the first two-position three-way solenoid valve is connected to the liquid inlet of the second three-way valve; the air inlet of the first three-way valve is connected to the first air outlet of the second two-position three-way solenoid valve; the outlet of the first three-way valve is connected to the liquid inlet of the laser device; The second air outlet of the second two-position three-way solenoid valve is connected to the air inlet of the second three-way valve; and the outlet of the second three-way valve is connected to the air inlet of the laser device.

7. The device according to claim 6, characterized in that: The liquid circuit auxiliary unit also includes a liquid tank, a liquid pump, a one-way valve and a cooling structure; The liquid outlet of the liquid tank is connected to the liquid inlet of the liquid pump, the liquid outlet of the liquid pump is connected to the liquid inlet of the one-way valve, and the liquid outlet of the one-way valve is connected to the liquid inlet of the first two-position three-way solenoid valve; The liquid outlet of the laser device is connected to the liquid inlet of the cooling structure, and the liquid outlet of the cooling structure is connected to the liquid inlet of the liquid tank.

8. The device according to claim 6, characterized in that: The air circuit auxiliary unit also includes an air pump, and the air outlet of the air pump is connected to the air inlet of the second two-position three-way solenoid valve.

9. A laser processing system, characterized in that: The system comprises a laser device and a processing auxiliary device for the laser device according to any one of claims 1-8.

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