Processing method of large-area glass lens array

Abstract

The invention relates to the field of optical imaging devices, and discloses a method for processing and forming a large-area lens array on glass through laser-induced wet etching and laser ablation, which comprises the following steps of: cleaning and drying the glass; determining a processing path of laser processing on the surface of the glass; bezier laser is focused in the glass, and first laser modification is carried out according to the processing path; placing the glass in an etching solution for etching; cleaning and drying the glass; and carrying out laser melting modification on the surface of the glass by adopting CO2 flat-topped laser to form a lens on the surface of the glass. The method for forming the large-area glass lens array on the glass surface through laser-induced etching solves the problems that a traditional laser processing method is low in efficiency and high in cost, and is more suitable for processing of the large-area lens array.

Description

Technical Field

[0001] The present invention relates to the field of optical imaging device processing, and in particular to a processing method for a large-area glass lens array. Background Art

[0002] Large-area glass lenses have important application value in modern optical systems and are widely used in laser technology, astronomical telescopes, projection equipment, optical imaging systems and other fields. With the continuous development of optical technology, the demand for large-size, high-precision lenses continues to increase, which puts higher requirements on the processing technology of glass lenses. Large-area glass lenses not only need to have excellent optical properties, such as low dispersion, high transmittance, and excellent anti-reflection properties, but also must maintain high-precision geometry and surface quality, which poses a huge technical challenge in the processing process.

[0003] Traditional glass processing techniques, such as turning, grinding and polishing, are usually unable to meet the high-precision requirements of large-area lenses. Especially when the lens size exceeds a certain range, traditional processes often face problems such as insufficient processing accuracy, surface damage, and uneven thermal expansion. Specifically, the following technical difficulties may arise during the processing of large-area glass lenses:

[0004] 1. Difficulty in controlling high-precision geometric shapes: As the size of the lens increases, how to accurately control its geometric shape becomes a challenge, especially for spherical or aspherical design requirements. Processing errors such as uneven curvature and bending will directly affect the optical performance of the lens.

[0005] 2. Surface quality issues: Large-area glass lenses require a surface finish that reaches the nanometer level. Surface micro-defects such as scratches, bubbles, and cracks may cause serious optical loss or performance degradation. Especially when the size of the glass lens increases, the thermal effects and mechanical effects during the surface polishing process may cause surface deformation or defect generation.

[0006] 3. Heat treatment and stress control: During the processing, glass materials are often affected by external temperature changes, stress distribution and other factors, resulting in uneven thermal expansion of the glass or internal stress accumulation. This stress inhomogeneity will affect the optical performance of the lens and may even cause the lens to break or deform.

[0007] 4. Manufacturing cost and efficiency: The processing of large-area glass lenses usually requires highly sophisticated equipment and processes, and the manufacturing process is complicated and time-consuming. How to improve processing efficiency and reduce costs while ensuring lens quality is the focus of current technology research and development.

[0008] Therefore, developing an efficient, high-precision large-area glass lens processing technology that can solve these problems has become an important research direction in the field of optical processing. In recent years, with the progress of precision machining technology, automatic control technology, surface treatment technology and other fields, some innovative processing methods have gradually emerged, such as ultra-precision polishing, laser processing, precision casting, etc. These technologies provide new solutions for the efficient manufacturing of large-area glass lenses.

[0009] However, despite certain progress in the existing technology, there are still many technical bottlenecks when facing larger and more complex optical design requirements. For example, when the size of a single lens is less than 50μm, or the spacing between lenses (the distance between lens centers) is less than 50μm, traditional mechanical processing cannot be performed due to the limitation of tool size. Although laser processing can perform precise processing, the thermal effects and cracks generated will affect the imaging effect of the lens. At the same time, when the size of the glass lens array is greater than 50mm×50mm, the traditional thermal reflow technology will cause deformation and warping of the lens array device due to uneven overall heating. Therefore, further optimizing the processing technology of large-area glass lens arrays, improving processing accuracy, reducing costs, and improving production efficiency are still technical problems that need to be solved in this field. Summary of the invention

[0010] In view of the problems raised by the background technology, the purpose of the present invention is to provide a method for processing a large-area glass lens array, which solves the problems that arise during the processing of large-size and complex glass lens arrays.

[0011] To achieve this object, the present invention adopts the following technical solutions:

[0012] A method for processing a large-area glass lens array comprises the following steps:

[0013] Step 1: Clean and dry the glass;

[0014] Step 2: determining a processing path for laser processing on the surface of the glass in step 1, wherein the processing path includes a plurality of transverse paths and a plurality of longitudinal paths, wherein the transverse paths are arranged along the transverse extension of the glass, and the longitudinal paths are arranged along the longitudinal extension of the glass, and the transverse paths and the longitudinal paths are perpendicular to each other, and an area enclosed by two adjacent transverse paths and two adjacent longitudinal paths is a square lens forming area;

[0015] Step 3: using Bessel laser to focus on the inside of the glass, and performing first laser modification along the transverse path and the longitudinal path, wherein the Bessel laser is a pulsed laser;

[0016] Step 4: Place the glass from Step 3 in the etching solution for etching, where an inverted trapezoidal groove is formed by etching along the processing path, and a trapezoidal micro-structure is formed in the lens forming area;

[0017] Step 5: Clean and dry the glass from Step 4;

[0018] Step 6: Use a CO 2 flat-top laser to perform laser melting and shaping on the surface of the glass from Step 5, so that the trapezoidal micro-structure forms a lens.

[0019] Preferably, in Step 2, the processing path is composed of several columns of mutually parallel laser modification lines, and the laser modification lines are formed by continuously implementing processing points with pulsed laser. The distance d between two adjacent processing points in the same column of the laser modification lines is less than the spot diameter d1 of the Bessel laser.

[0020] Preferably, in Step 2, the side length of the lens forming area is a, the distance between two adjacent lens forming areas is b, the number of the laser modification lines is n, and the distance between two adjacent columns of the laser modification lines is e, where b = (n - 1)e.

[0021] Preferably, in Step 6, the spot shape of the CO 2 flat-top laser is circular, the spot diameter of the CO 2 flat-top laser is D, and N(a + b) - b < D < N(a + b) + b, where N is the number of lens forming areas covered by the spot of the CO 2 flat-top laser.

[0022] Preferably, the laser power of the CO 2 flat-top laser is 50W - 200W, the pulse width of the CO 2 flat-top laser is 500μs - 1ms, and the frequency of the CO 2 flat-top laser is 500Hz - 1000Hz.

[0023] Preferably, in Step 2, the processing path further includes an auxiliary path, and the auxiliary path is located in any one of the lens forming areas;

[0024] In Step 3, it further includes: focusing a Bessel laser inside the glass and performing second laser modification along the auxiliary path. The modification depth of the first laser modification is c1, and the modification depth of the second laser modification is c2. c2 is several values, where c2 < c1.

[0025] Preferably, in step three, the laser power of the Bessel laser is 8W-40W, the pulse width of the Bessel laser is 700fs-4000fs, the wavelength of the Bessel laser is 1030nm, and the number of pulses of the Bessel laser on any of the processing points is 1-9.

[0026] Preferably, in step 4, the etching solution comprises hydrofluoric acid and auxiliary acid, the content of the hydrofluoric acid is 5% to 10%, and the content of the auxiliary acid is 1% to 20%.

[0027] Preferably, the auxiliary acid comprises any one or more combinations of hydrochloric acid, nitric acid and sulfuric acid.

[0028] Preferably, the cleaning steps in step 1 and step 5 include: cleaning the glass with acetone, anhydrous ethanol and deionized water in sequence.

[0029] Compared with the prior art, one of the above technical solutions has the following beneficial effects:

[0030] 1. The method of laser induced wet etching combined with laser ablation can overcome the shortcomings of low efficiency and high cost of traditional laser ablation processing methods, and is suitable for large-area processing. At the same time, the surface of the generated glass lens is smooth.

[0031] 2. Compared with traditional CNC machine tool processing, the laser induced wet etching combined with laser melting has higher processing accuracy.

[0032] 3. When the traditional thermal reflow technology is applied to a large-area glass microlens substrate, the substrate will warp and deform. However, the flat-top laser melting method can focus on the lens part of the substrate, avoiding the problem of heating the entire glass substrate, thereby solving the problem of deformation and warping of the glass substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 is a front view of a lens array according to an embodiment of the present invention;

[0034] Figure 2 is a distribution diagram of a processing path of an embodiment of the present invention;

[0035] Figure 3 is a schematic diagram of the laser modification line, processing point and Bessel laser spot of the present invention;

[0036] Figure 4 is a schematic diagram of the appearance of glass after being modified and etched by a single-row laser modification line;

[0037] Figure 5 is a schematic diagram of the appearance of glass after being modified and etched by multiple rows of laser modification lines;

[0038] Figure 6 CO of the present invention 2 Schematic diagram of the light intensity distribution of the flat-top laser;

[0039] Figure 7 is a schematic diagram of changes in glass during processing according to an embodiment of the present invention;

[0040] Figure 8 CO is an embodiment of step six of the present invention. 2 Schematic diagram of flat-top laser processing;

[0041] Fig. 9 is another embodiment of CO in step six of the present invention. 2 Schematic diagram of flat-top laser processing;

[0042] Fig.10 It is CO 2 Schematic diagram of the lens array after flat-top laser melting shaping;

[0043] Fig.11 is a schematic diagram of changes in glass during the processing of Example 1;

[0044] Fig.12 Schematic diagram of the changes in glass during the processing of Example 2.

[0045] Wherein: glass 10, processing path 20, laser modification line 201, processing point 202, transverse path 21, longitudinal path 22, auxiliary path 23, inverted trapezoidal groove 200, lens molding area 30, lens 300, trapezoidal microstructure 301 and CO 2 Flat-top laser 40. DETAILED DESCRIPTION

[0046] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0047] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0048] In addition, the terms "first", "second" and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, features defined as "first", "second" and "third" may explicitly or implicitly include one or more of the features.

[0049] It should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] The following is combined with Figures 1 to 12 The technical solution of the present invention is further illustrated by specific implementation methods.

[0051] A method for processing a large-area glass lens array comprises the following steps:

[0052] Step 1: Clean and dry the glass 10.

[0053] Step 2: Determine the processing path 20 for laser processing on the surface of the glass 10 in step 1, the processing path 20 includes a plurality of transverse paths 21 and a plurality of longitudinal paths 22, the transverse path 21 is arranged along the transverse extension of the glass, the longitudinal path 22 is arranged along the longitudinal extension of the glass, the transverse path 21 and the longitudinal path 22 are perpendicular to each other, and the area enclosed by two adjacent transverse paths 21 and two adjacent longitudinal paths 22 is a square lens forming area 30. By defining a clear processing path 20 (including the transverse path 21 and the longitudinal path 22), and using the area enclosed by adjacent paths as the lens forming area 30, in the subsequent steps, the lens 300 will be formed in the lens forming area 30, which can ensure that each lens 300 has a consistent size (diameter) and shape, which helps to reduce the error accumulation during the processing process and improve the overall consistency and optical performance of the lens array.

[0054] Step 3: Use Bessel laser to focus on the inside of the glass, and perform the first laser modification according to the transverse path 21 and the longitudinal path 22. The Bessel laser is a pulsed laser. The focal depth of the Bessel laser is large, and the intensity is almost constant over a long propagation distance, so it can directly process the inside of the glass. By using Bessel laser to focus and modify the glass 10 internally, the processing depth and range of the laser can be very accurately controlled, thereby achieving high-precision processing of large-area glass lens arrays.

[0055] Step 4: The glass of step 3 is placed in an etching solution for etching, wherein the processing path 20 is etched to form an inverted trapezoidal groove 200, and the lens forming area 30 forms a trapezoidal microstructure 301. The modified glass 10 is placed in an etching solution, and the modified cubic structure is removed by the etching solution, so that the surface of the glass 10 forms an inverted trapezoidal groove 200 after etching at the transverse path 21 and the longitudinal path 22, and the lens forming area 30 forms a trapezoidal microstructure 301 protruding relative to the inverted trapezoidal groove 200, and the surface of the glass 10 forms a trapezoidal microstructure array arranged in a vertical and horizontal array.

[0056] Step 5: Clean and dry the glass in step 4, and clean the etching liquid on the surface of the glass 10 .

[0057] Step 6: Use CO 2 The flat-top laser 40 performs laser melting and shaping on the surface of the glass 10 in step 5, so that the trapezoidal microstructure 301 forms a lens 300. 2 The flat-top laser 40 melts and shapes the trapezoidal microstructure 301 with a boss appearance on the surface of the glass 10, so that the trapezoidal microstructure 301 reaches a softening temperature. The glass 10 has better fluidity at this temperature, and under the action of gravity and surface tension, the boss appearance of the trapezoidal microstructure 301 is corrected to become a smooth arc surface, so that the trapezoidal microstructure 301 forms a lens 300 with a smooth surface.

[0058] The laser-induced wet etching and laser melting method adopted by the present invention solve the problems that arise during the processing of large-sized and complex glass lens arrays. The laser-induced wet etching technology modifies the glass material through an ultrafast laser, thereby accelerating the etching of the glass material in the modified area by the etchant. In addition, since the chemical etching rate can be controlled by controlling the etching conditions, complex and precise processing can be achieved. At the same time, compared with the traditional thermal reflux technology, the laser melting technology only heats the trapezoidal microstructure 301 part of the glass, and the laser spot size is controllable, so that uneven heating during the heating process can be avoided, thereby avoiding deformation and warping of the microlens device.

[0059] Furthermore, in step 2, the processing path 20 is composed of a plurality of columns of mutually parallel laser modified lines 201, wherein the laser modified lines 201 are formed by continuously implementing processing points 202 with a pulsed laser, and the distance d between two adjacent processing points 202 in the same column of the laser modified lines 201 is less than the spot diameter d1 of the Bessel laser.

[0060] The processing path 20 is composed of several columns of laser modification lines 201 that are parallel to each other. These laser modification lines 201 are formed by processing points 202 continuously implemented by pulsed laser (Bessel laser), significantly improving the continuity and accuracy of processing. The distance d between two adjacent processing points 202 on the same column of laser modification lines 201 is less than the spot diameter d1 of the Bessel laser, which can ensure that the laser modification is continuous and uniform inside the glass, reducing the problem of discontinuous or irregularly shaped modified areas caused by too large an interval between processing points 202. When the distance d between two processing points 202 is less than the diameter d1 of the Bessel spot, after the wet etching in step three, the edge of the inverted trapezoidal groove 200 can be smooth. Otherwise, there may be an uneven microscopic morphology, thus affecting the subsequent optical imaging effect of the glass.

[0061] Furthermore, in step two, the side length of the lens forming area 30 is a, the distance between two adjacent lens forming areas 30 is b, the number of the laser modification lines 201 is n, and the distance between two adjacent columns of the laser modification lines 201 is e, where b = (n - 1)e.

[0062] As Figure 4 shown, a conical hole will be formed after etching a single processing point 202, and a conical groove will be formed after etching the laser modification lines 201 formed by multiple processing points 202; when as Figure 5 shown, multiple columns of laser modification lines 201 are arranged in parallel and etched, an inverted trapezoidal groove 200 can be formed. For the modification of a single column of laser modification lines 201, the longer the wet etching time, the wider the groove. The distance b between two adjacent lens forming areas 30 is the width of the processing path 20. Therefore, when the width b of the processing path is determined, the more the number n of the laser modification lines 201 in the processing path, which is equivalent to the smaller the distance e, the shorter the required etching time.

[0063] Preferably, the distance e between different columns of laser modification lines 201 is < 10 μm.

[0064] Furthermore, in step six, the spot shape of the CO 2 flat-top laser 40 is circular, the spot diameter of the CO 2 flat-top laser 40 is D, and N(a + b) - b < D < N(a + b) + b, where N is the number of lens forming areas 30 covered by the spot of the CO 2 flat-top laser 40.

[0065] CO 2 The spot of the flat-top laser 40 covers and irradiates on the trapezoidal micro-structure 301 to achieve the effect of melting and shaping. As Figure 8 and Fig. 9 shown, CO 2The flat-top laser 40 irradiates the trapezoidal microstructure array on the glass according to a certain moving path. 2 During the flat-top laser processing 40, when a row of trapezoidal microstructures 301 is processed and the next row of trapezoidal microstructures 301 is to be processed, the CO 2 There is no mandatory restriction on the position and moving distance of the flat-top laser, but the processed trapezoidal microstructure 301 cannot be repeatedly processed.

[0066] like Figure 4 and Figure 5 As shown, CO 2 The number (number of columns) N of the trapezoidal microstructures 301 covered by the flat-top laser spot is different. Different processing speeds need to be selected according to different laser frequencies to ensure that the processing ranges between different pulses can overlap to ensure that the etched trapezoidal microstructures can be fully heated and melted. 2 The spot diameter D of the flat-top laser will only affect the processing efficiency of step six, but will have no effect on the morphology of the final lens array.

[0067] Furthermore, the CO 2 The laser power of the flat-top laser is 50W-200W. 2 The pulse width of the flat-top laser is 500μs-1ms, and the CO 2 The frequency of the flat-top laser is 500Hz-1000Hz.

[0068] Due to CO 2 The characteristics of flat-top lasers make the laser energy distribution more uniform, which can improve the processing efficiency while ensuring the processing quality. In addition, precise parameter settings (such as power, pulse width and frequency) make CO 2 Flat-top lasers can act on glass materials more accurately, more effectively control the size of the heat-affected zone, reduce unnecessary heat-affected zones, improve processing accuracy, and reduce problems such as thermal stress and cracks caused by laser processing.

[0069] Further, in step 2, the processing path further includes an auxiliary path 23, and the auxiliary path 23 is located in any of the lens molding areas 30;

[0070] In step three, it also includes: using Bessel laser to focus on the inside of the glass, and performing second laser modification according to the auxiliary path 23, the modification depth of the first laser modification is c1, the modification depth of the second laser modification is c2, c2 is a number of values, where c2<c1.

[0071] The auxiliary path 23 is distributed in any lens forming area 30. By performing a second laser modification on the surface of part of the lens forming area 30, which is different from the first laser modification of the lateral path 21 and the longitudinal path 22, after etching, the height of the trapezoidal microstructure 301 after the second laser modification is lower than the trapezoidal microstructure 301 without laser modification, and the height (thickness) of the lens after laser melting is also different. By performing a second laser modification on the auxiliary path 23, lenses with different parameters can be processed on a glass 10. This kind of microlenses with different parameters processed on the same lens array are widely used in imaging and other fields. For example, by arranging small lenses with different focal lengths on the same lens array, different optical effects can be achieved, and used for automatic focusing or stereoscopic imaging.

[0072] Further, in step three, the laser power of the Bessel laser is 8W-40W, the pulse width of the Bessel laser is 700fs-4000fs, the wavelength of the Bessel laser is 1030nm, and the pulse number of the Bessel laser for any of the processing points is 1-9.

[0073] When the laser power is too small, the laser cannot effectively process the glass material, resulting in the inability to perform subsequent etching; when the power is too large, many cracks will be generated during the laser processing that are not conducive to subsequent etching. Such cracks will make the edges of the etched inverted trapezoidal grooves irregular.

[0074] It should be noted that the pulse number refers to the number of times the pulsed Bessel laser continuously processes a certain processing point 202 . The more pulse numbers there are, the smoother the edge of the inverted trapezoidal groove 200 is.

[0075] Furthermore, in step 4, the etching solution includes hydrofluoric acid and auxiliary acid, the content of the hydrofluoric acid is 5% to 10%, and the content of the auxiliary acid is 1% to 20%.

[0076] In the etching solution, hydrofluoric acid is the main component for removing glass. When the content of hydrofluoric acid is low, the etching rate is slow, affecting the overall efficiency; when the content of hydrofluoric acid is too high, the etching rate is very fast, and a triangular protrusion structure will appear on the bottom of the inverted trapezoidal structure, thus affecting the light transmittance of the lens.

[0077] In addition, different auxiliary acids have different effects in the etching process. Hydrochloric acid can decompose the etching products of the reaction between hydrofluoric acid and glass, nitric acid can increase the etching rate perpendicular to the glass surface, and sulfuric acid can reduce the surface roughness. When the auxiliary acid content is too small, the auxiliary effect on the etching process is very weak. When the auxiliary acid content is too high, it will affect the accuracy of the etching process, thereby affecting the morphology of the inverted trapezoidal groove formed by the final etching.

[0078] Furthermore, the auxiliary acid includes any one or more combinations of hydrochloric acid, nitric acid and sulfuric acid.

[0079] The etching solution is a mixed solution of hydrofluoric acid and auxiliary acid. Compared with the existing alkaline etching solution, the mixed solution of hydrofluoric acid has a faster reaction rate and can effectively improve the etching efficiency.

[0080] To further illustrate, in the etching step, one or more of ultrasonic wave, stirring and rotation can be selected to assist the etching.

[0081] Furthermore, the cleaning steps in step 1 and step 5 include: cleaning the glass with acetone, anhydrous ethanol and deionized water in sequence.

[0082] In step 1, acetone and anhydrous ethanol are used to remove oil and stains on the surface of the glass 10, and deionized water is used to remove the residual acetone and anhydrous ethanol. In step 5, acetone and anhydrous ethanol are used to remove the residual etching solution on the surface of the glass 10, and deionized water is used to remove the residual acetone and anhydrous ethanol.

[0083] To further illustrate, in the drying steps of step 1 and step 5, a vacuum drying oven may be used for drying, or high-pressure gas may be used for drying, which is not limited here.

[0084] To further illustrate, the glass 10 includes any one of soda-lime glass, aluminosilicate glass, quartz glass, borosilicate glass and lead silicate glass.

[0085] The technical solution of the present invention is further described in detail below in conjunction with specific embodiments. It should be understood that the following embodiments are only used to explain the present invention and are not used to limit the present invention.

[0086] Embodiment 1:

[0087] Step 1: Cleaning the soda-lime glass with acetone, anhydrous ethanol and deionized water in sequence, and using ultrasound to assist in the cleaning process; then drying the glass 10 in a vacuum drying oven;

[0088] Step 2: Determine the transverse path 21 and the longitudinal path 22 of laser processing on the surface of the glass 10 in step 1, and determine the number n of laser modified lines 201 of each processing path, the distance d between adjacent processing points 202, and the distance e between adjacent laser modified lines 201; a plurality of transverse paths 21 and a plurality of longitudinal paths 22 are interlaced and enclosed to form a plurality of lens forming areas 30, and the plurality of lens forming areas 30 are distributed in an array of a plurality of columns (rows), wherein a=45μm, b=30μm, d=2μm, e=5μm, and n=7.

[0089] Step 3: Follow Fig.11A processing method is provided, wherein a Bessel laser is focused on the inside of the glass 10, and laser processing is performed along each laser modification line 201 of the transverse path 21 and the longitudinal path 22; wherein the Bessel laser is a pulsed laser with a repetition frequency of 100 kHz and a wavelength of 1030 nm; the laser power of the Bessel laser is 20 W, the pulse width of the Bessel laser is 1000 fs, the pulse number of the Bessel laser for laser processing the processing point 202 is 1, and the modification depth c1 of the first laser modification is 20 μm.

[0090] Step 4, placing the glass 10 in step 3 in an etching solution and etching for 30 minutes; wherein the etching solution includes hydrofluoric acid and nitric acid, and in terms of mass percentage, the content of hydrofluoric acid is 10%, and the content of nitric acid is 10%; after etching for 30 minutes, the etching is completed, and the planned transverse path 21 and the longitudinal path 22 on the glass 10 are etched to form an inverted trapezoidal groove structure, and the lens forming area 30 is not affected by the etching solution, and the relatively concave inverted trapezoidal structure has a trapezoidal microstructure 301;

[0091] Step 5: Clean the soda-lime glass in step 4 with acetone, anhydrous ethanol and deionized water in sequence, and use ultrasonic waves to assist in the cleaning process; then dry it in a vacuum drying oven.

[0092] Step 6: Utilize CO 2 The flat-top laser 40 melts and shapes the trapezoidal microstructure 301 formed by etching. 2 The repetition rate of the flat-top laser is 100 Hz, CO 2 The laser power of the flat-top laser is 100W, CO 2 The pulse width of the flat-top laser is 1ms, CO 2 The spot diameter of the flat-top laser is 80um. 2 Flat-top laser path Figure 8 shown.

[0093] Embodiment 2:

[0094] Step 1: Clean the quartz glass with acetone, anhydrous ethanol and deionized water in sequence, and use ultrasonic waves to assist in the cleaning process; then dry the glass 10 in a vacuum drying oven;

[0095] Step 2, determine the transverse path 21 and the longitudinal path 22 for laser processing on the surface of the glass 10 in step 1, and determine the auxiliary path 23 in the lens forming area 30 enclosed by the transverse path 21 and the longitudinal path 22; determine the number n of laser modified lines 201 of each processing path (transverse path 21, longitudinal path 22 and auxiliary path 23), the distance d between adjacent processing points 202 and the distance e between adjacent laser modified lines 201; wherein, a=45μm, b=30μm, d=3μm, e=5μm, and n=7.

[0096] Step 3: Follow Fig.12 A processing method is provided, wherein the Bessel laser is focused on the inside of the glass 10. The first laser modification is performed on each laser modification line 201 along the transverse path 21 and the longitudinal path 22, and the modification depth c1=20 μm; the second laser modification is performed on each laser modification line 201 along the auxiliary path 23, and the modification depth c2=5 μm for one group of second laser modifications and c2=10 μm for another group of second laser modifications; wherein the Bessel laser is a pulsed laser with a repetition frequency of 100 kHz and a wavelength of 1030 nm; the laser power of the Bessel laser is 15 W, the pulse width of the Bessel laser is 3000 fs, and the number of pulses of the Bessel laser for laser processing the processing point 202 is 5.

[0097] Step 4, placing the glass 10 of step 3 in an etching solution and etching for 50 minutes; wherein the etching solution includes hydrofluoric acid and nitric acid, and according to mass percentage, the content of hydrofluoric acid is 10%, and the content of nitric acid is 10%; during the 50-minute etching time, the modified area has been etched in the early stage (etching to 30 minutes), but by extending the etching time, the etching of the bottom surface of the inverted trapezoidal groove can be extended, thereby forming a smoother bottom surface morphology.

[0098] Step 5: Clean the soda-lime glass in step 4 with acetone, anhydrous ethanol and deionized water in sequence, and use ultrasonic waves to assist in the cleaning process; then dry it in a vacuum drying oven.

[0099] Step 6: Utilize CO 2 The flat-top laser 40 melts and shapes the trapezoidal microstructure 301 formed by etching. 2 The repetition rate of the flat-top laser is 100 Hz, CO 2 The laser power of the flat-top laser is 100W, CO 2 The pulse width of the flat-top laser is 1ms, CO 2 The spot diameter of the flat-top laser is 80um. 2 Flat-top laser path Figure 8 As shown. The trapezoidal microstructure formed by etching is melted and reshaped by using a flat-top laser. The flat-top laser is a carbon dioxide laser with a repetition frequency of 100Hz, a power of 100W, a pulse width of 1ms, and a spot diameter of 80um. The flat-top laser path is as shown Figure 5 The processed lens array is shown in Fig.12 shown.

[0100] The technical principle of the present invention is described above in conjunction with specific embodiments. These descriptions are only for explaining the principle of the present invention and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanations herein, those skilled in the art can associate other specific implementations of the present invention without paying creative labor, and these methods will fall within the scope of protection of the present invention.

Claims

1. A method for processing a large-area glass lens array, characterized in that: It includes the following steps: Step 1: Clean and dry the glass; Step 2: Determine the processing path of laser processing on the surface of the glass in Step 1. The processing path includes a number of transverse paths and a number of longitudinal paths. The transverse paths extend along the transverse direction of the glass, and the longitudinal paths extend along the longitudinal direction of the glass. The transverse paths and the longitudinal paths are perpendicular to each other. The area enclosed by two adjacent transverse paths and two adjacent longitudinal paths is a square lens forming area; Step 3: Focus the Bessel laser inside the glass and perform the first laser modification according to the transverse paths and the longitudinal paths. The Bessel laser is a pulsed laser; Step 4: Place the glass in Step 3 in an etching solution for etching. An inverted trapezoidal groove is formed by etching at the processing path, and a trapezoidal micro-structure is formed in the lens forming area; Step 5: Clean and dry the glass in Step 4; Step 6: Use a CO2 flat-top laser to perform laser melting and shaping on the surface of the glass in Step 5 to form a lens from the trapezoidal micro-structure.

2. The method for processing a large-area glass lens array according to claim 1, characterized in that: In Step 2, the processing path is composed of a number of columns of laser modification lines parallel to each other. The laser modification lines are formed by continuously implementing processing points with pulsed laser. The distance d between two adjacent processing points in the same column of laser modification lines is less than the spot diameter d1 of the Bessel laser.

3. The method for processing a large-area glass lens array according to claim 2, characterized in that: In Step 2, the side length of the lens forming area is a, the distance between two adjacent lens forming areas is b, the number of laser modification lines is n, and the distance between two adjacent columns of laser modification lines is e, where b=(n - 1)e.

4. The method for processing a large-area glass lens array according to claim 3, characterized in that: In Step 6, the spot shape of the CO2 flat-top laser is circular, the spot diameter of the CO2 flat-top laser is D, and N(a + b)-b < D < N(a + b)+b, where N is the number of lens forming areas covered by the spot of the CO2 flat-top laser.

5. The method for processing a large-area glass lens array according to claim 4, characterized in that: The laser power of the CO2 flat-top laser is 50W - 200W, the pulse width of the CO2 flat-top laser is 500μs - 1ms, and the frequency of the CO2 flat-top laser is 500Hz - 1000Hz.

6. The method for processing a large-area glass lens array according to claim 2, characterized in that: In Step 2, the processing path further includes an auxiliary path, and the auxiliary path is located in any one of the lens forming areas; In Step 3, it further includes: Focus the Bessel laser inside the glass and perform the second laser modification according to the auxiliary path. The modification depth of the first laser modification is c1, and the modification depth of the second laser modification is c2. c2 is a number of values, where c2 < c1.

7. The method for processing a large-area glass lens array according to claim 1, characterized in that: In Step 3, the laser power of the Bessel laser is 8W - 40W, the pulse width of the Bessel laser is 700fs - 4000fs, the wavelength of the Bessel laser is 1030nm, and the number of pulses of the Bessel laser for any one processing point is 1 - 9.

8. The method for processing a large-area glass lens array according to claim 1, characterized in that: In Step 4, the etching solution includes hydrofluoric acid and auxiliary acid. The content of hydrofluoric acid is 5% - 10%, and the content of the auxiliary acid is 1% - 20%.

9. The method for processing a large-area glass lens array according to claim 8, characterized in that: The auxiliary acid includes any one or a combination of hydrochloric acid, nitric acid, and sulfuric acid.

10. The method for processing a large-area glass lens array according to claim 1, characterized in that: The cleaning steps in step 1 and step 5 include: cleaning the glass with acetone, anhydrous ethanol and deionized water in sequence.

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