Reaction furnace with belt conveyor for CVD (chemical vapor deposition) method

Abstract

The invention discloses a reaction furnace with a belt conveyor for a CVD (chemical vapor deposition) method, which is characterized in that the horizontal reaction furnace for continuous production by using the CVD method comprises a discharging device, a belt conveying device and a furnace body, the furnace body comprises an initial section, a reaction section and a discharging section, the conveying device comprises a belt and a roller, the belt is a substrate for preparing sediments by using the CVD method, and an enveloping roller is arranged outside the belt. The rollers comprise a driving roller and a driven roller, the belt comprises an upper-layer belt and a lower-layer belt, and the discharging device is located on the discharging section. Chemical reaction products grow on the upper-layer belt of the reaction section and are discharged at the discharging section through a discharging device; the method has the main advantages that continuous automatic production can be realized, the efficiency is high, and the energy consumption is low.

Description

Technical Field

[0001] The invention relates to the technical field of production equipment for chemical vapor deposition method, in particular to a reaction furnace with a belt conveyor used in CVD method. Background Art

[0002] In the existing chemical vapor deposition method, the substrate used to generate the deposit is discontinuous in the horizontal reactor. For example, the carbon nanotubes generated in the horizontal reactor of the CVD method are all deposited in containers made of substrate materials such as quartz boats or stainless steel boxes. Such containers are arranged one by one in the horizontal furnace and are not interconnected. It is particularly difficult to remove the carbon nanotubes attached to the inner wall of the container.

[0003] Currently, the addition of catalysts and the discharge of carbon nanotubes must first be cooled to room temperature and then completed through manual work. This not only increases a lot of energy consumption, but also makes it difficult to achieve unmanned automated continuous production under such high temperature conditions. Therefore, production capacity is greatly limited.

[0004] As emerging cutting-edge materials, carbon nanotubes and carbon nanotube fibers have received extensive attention and research from the scientific and industrial communities due to their unique physical and chemical properties and wide application potential. At present, there are three methods for preparing carbon nanotube fibers using carbon nanotubes in countries around the world: wet spinning, carbon nanotube array spinning, and floating catalytic spinning. Among them, the carbon nanotube fibers produced by the carbon nanotube array spinning method have the highest cleanliness, but because its base container is discontinuous and small in area, it cannot be produced continuously, and the production capacity is low, resulting in a particularly high price; that is, the existing technical bottleneck is that the area of ​​the carbon nanotube growth base provided by the traditional structure is limited and operates intermittently.

[0005] In summary, it is imperative to find a solution that can provide an unlimited growth substrate area for carbon nanotubes and enable continuous production. Summary of the invention

[0006] In view of the problems existing in the prior art, the object of the present invention is to provide a reaction furnace with a belt conveyor for use in a CVD method to solve the problems mentioned in the above background technology.

[0007] To achieve the above-mentioned purpose, the present invention provides the following technical scheme: the horizontal reactor 1 for continuous production using chemical vapor deposition method comprises a discharge device 1A, a belt conveyor 2 and a furnace body 3, the furnace body 3 comprises an initial section 5, a reaction section 7 and a discharge section 8, the belt conveyor 2 comprises a belt 2A and a roller 4, the belt 2A is a substrate for preparing a deposit by CVD method, the belt 2A is surrounded by a roller 4, the roller 4 comprises an active roller 41 and a passive roller 42, the belt 2A comprises an upper belt 2A1 and a lower belt 2A2, the discharge device 1A is located in the discharge section 8; the chemical reaction product grows on the upper belt 2A1 of the reaction section 7, and is discharged in the discharge section 8 through the discharge device 1A.

[0008] As a further solution of the present invention: the reactor 1 is a reactor for preparing carbon nanotubes, and the belt 2A includes a stainless steel belt.

[0009] As a further solution of the present invention: the active roller 41 is located in the discharge section 8 , and the passive roller 42 is located in the initial section 5 .

[0010] As a further solution of the present invention: the discharging device 1A includes a roller discharging device 1A1; the belt 2A changes from the upper belt 2A1 to the lower belt 2A2 as the active roller 41 rotates, that is, the belt 2A changes from a horizontal state to a curved state, and the carbon nanotube array on the belt 2A uses gravity to fall to complete the discharging.

[0011] As a further solution of the present invention: the discharging device 1A includes a spinning device 1A2, and the carbon nanotube array is discharged through the spinning device 1A2.

[0012] As a further solution of the present invention: the discharging device 1A includes a scraping device 9, and the scraping device 9 includes a scraper 9A, and the scraper 9A is located below the outer side of the belt 2A in the discharging section 8; the carbon nanotubes adhered to the belt 2A are peeled off by the scraping device 9 to complete the discharging.

[0013] In summary, compared with the prior art, the present invention provides a solution for continuous production due to its unique structure using a belt as a substrate, and the specific advantages are as follows: 1) Since the belt in the conveyor runs continuously, the substrate area in the CVD method is not limited; 2) Because the conveyor belt is planar, it is particularly easy to discharge and clean the carbon nanotubes; 3) Low energy consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1It is a schematic diagram of the structure of the discharge device 1A, the belt conveyor 2 and the furnace body 3 constituting the horizontal reaction furnace 1, and is also a schematic diagram of the structure of the initial section 5, the reaction section 7 and the discharge section 8 constituting the furnace body 3, and is also a schematic diagram of the structure of the belt 2A and the roller 4 constituting the belt conveyor 2, and is also a schematic diagram of the structure of the active roller 41 and the passive roller 42 constituting the roller 4, and is also a schematic diagram of the structure of the upper belt 2A1 and the lower belt 2A2 constituting the belt 2A; Figure 2 yes Figure 1 AA section view; Figure 3 is a position diagram of the active roller 41 and the passive roller 42 in the furnace body 3; Figure 4 yes Figure 1 B-direction view; Figure 5 is a schematic structural diagram of a roller discharging device 1A1; Figure 6 is a schematic structural diagram of the wire drawing device 1A2; Figure 7 yes Figure 6 C-direction view Figure 8 It is a schematic structural diagram of the scraping device 9; Fig. 9 It is a structural schematic diagram of the integral furnace body 3.

[0015] Reactor 1, discharging device 1A, roller discharging device 1A1, wire drawing device 1A2, belt conveyor 2, belt 2A, upper belt 2A1, lower belt 2A2, furnace body 3, roller 4, active roller 41, passive roller 42, initial section 5, reaction section 7, discharging section 8, scraper device 9, scraper 9A. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the present invention will be described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0017] See also Figure 1-Figure 9In the embodiment of the present invention, the horizontal reactor 1 for continuous production using chemical vapor deposition method comprises a discharge device 1A, a belt conveyor 2 and a furnace body 3, the furnace body 3 comprises an initial section 5, a reaction section 7 and a discharge section 8, the belt conveyor 2 comprises a belt 2A and a roller 4, the belt 2A is a substrate for preparing a deposit by CVD method, the belt 2A is surrounded by a roller 4, the roller 4 comprises an active roller 41 and a passive roller 42, the belt 2A comprises an upper belt 2A1 and a lower belt 2A2, the discharge device 1A is located in the discharge section 8; the chemical reaction product grows on the upper belt 2A1 of the reaction section 7, and is discharged in the discharge section 8 through the discharge device 1A.

[0018] The reactor 1 is a reactor for preparing carbon nanotubes, and the belt 2A comprises a stainless steel belt.

[0019] The active roller 41 is located at the discharge section 8 , and the passive roller 42 is located at the initial section 5 .

[0020] The discharging device 1A includes a roller discharging device 1A1; the belt 2A changes from the upper belt 2A1 to the lower belt 2A2 as the active roller 41 rotates, that is, the belt 2A changes from a horizontal state to a curved state, and the carbon nanotube array on the belt 2A falls by gravity to complete the discharging.

[0021] The discharging device 1A includes a drawing device 1A2, and the carbon nanotube array is discharged through the drawing device 1A2.

[0022] The discharging device 1A includes a scraping device 9, which includes a scraper 9A. The scraper 9A is located below the outer side of the belt 2A in the discharging section 8. The carbon nanotubes adhering to the belt 2A are peeled off by the scraping device 9 to complete the discharging.

[0023] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "front", "back" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention. In the present invention, it should also be noted that the terms "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, an integrally formed connection, a mechanical connection, or an indirect connection through an intermediate medium, and the specific meaning of the terms in the present invention can be understood based on the specific circumstances.

[0024] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A reactor having a belt conveyor for use in a CVD method, characterized in that The horizontal reaction furnace (1) for continuous production using a chemical vapor deposition method comprises a discharge device (1A), a belt conveyor (2) and a furnace body (3); the furnace body (3) comprises an initial section (5), a reaction section (7) and a discharge section (8); the belt conveyor (2) comprises a belt (2A) and a roller (4); the belt (2A) is a substrate for preparing a deposit using a CVD method; the belt (2A) surrounds a roller (4); the roller (4) comprises an active roller (41) and a passive roller (42); the belt (2A) comprises an upper belt (2A1) and a lower belt (2A2); the discharge device (1A) is located in the discharge section (8); a chemical reaction product grows on the upper belt (2A1) of the reaction section (7) and is discharged through the discharge device (1A) in the discharge section (8).

2. A reaction furnace with a belt conveyor for use in a CVD method according to claim 1, characterized in that The reaction furnace (1) is a reaction furnace for preparing carbon nanotubes, and the belt (2A) includes a stainless steel belt.

3. A reaction furnace with a belt conveyor for CVD method according to claim 2, characterized in that The active roller (41) is located in the discharge section (8), and the passive roller (42) is located in the initial section (5).

4. A reaction furnace with a belt conveyor for CVD method according to claim 3, characterized in that The discharging device (1A) comprises a roller discharging device (1A1); as the active roller (41) rotates, the belt (2A) changes from an upper belt (2A1) to a lower belt (2A2), that is, the belt (2A) changes from a horizontal state to a curved state, and the carbon nanotube array on the belt (2A) falls by gravity to complete the discharging.

5. A reaction furnace with a belt conveyor for CVD method according to claim 3, characterized in that The discharging device (1A) comprises a drawing device (1A2), and the carbon nanotube array is discharged through the drawing device (1A2).

6. A reaction furnace with a belt conveyor for CVD method according to claim 4 or 5, characterized in that The discharging device (1A) comprises a scraping device (9), the scraping device (9) comprises a scraper (9A), and the scraper (9A) is located below the outer side of the belt (2A) in the discharging section (8); the carbon nanotubes adhering to the belt (2A) are peeled off by the scraping device (9), thereby completing the discharging.

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