Regenerated gas generation device for gas purification equipment

Abstract

The invention relates to the technical field of regenerated gas generation devices, in particular to a regenerated gas generation device for gas purification equipment, which comprises a PEM water electrolysis module and a mixed gas box, the input end of the mixed gas box is connected with an N2 supply valve and an H2 supply valve, and the output end of an H2 gas separator is connected with a gas compression pump. Through the cooperation between the H2 supply valve and the PEM electrolysis module, when the pressure is reduced to be lower than the set reference pressure, the PEM electrolysis module can supply power again, and hydrogen and nitrogen are mixed and then supplied to the P-Gas storage container, so that required regeneration gas is provided for the regeneration process of the gas purification device; according to the device, hydrogen is generated in the water electrolysis process and mixed with externally supplied nitrogen, the regeneration requirement of the gas purification device can be efficiently and continuously met, and the complexity of a traditional high-pressure hydrogen storage tank and external gas supply is avoided.

Description

Technical Field

[0001] The invention relates to the technical field of regeneration gas generating devices, in particular to a regeneration gas generating device used in gas purification equipment. Background Art

[0002] Traditionally, the regeneration gas supply method for gas purification devices mainly relies on purchasing gas cylinders and installing them at designated locations, and then transporting the gas from the gas cylinders to the gas purification device through pipelines; in addition, external mixing devices can also be used to mix high-purity hydrogen and high-purity nitrogen and then supply them to the gas purification device. These methods have certain costs and maintenance requirements.

[0003] The traditional technology for regenerating gas purification devices requires the use of a nitrogen mixed gas containing about 4% hydrogen to remove the catalyst of oxygen in the device. Usually, a mixed gas of 4% hydrogen and 96% nitrogen is generated by an MFC (mass flow controller) through externally supplied hydrogen and nitrogen for use in the regeneration process. However, this technology has the following problems:

[0004] High cost and operational complexity

[0005] Mixed gases usually need to be purchased from professional gas mixing manufacturers, which leads to high operating costs through transportation and frequent replacement of gas cylinders.

[0006] Risks of using high-pressure hydrogen

[0007] During the gas mixing process, it is necessary to connect the high-pressure hydrogen storage tank and the gas mixing system, which brings potential safety risks. In addition, when the gas mixing system is implemented separately, it is also necessary to connect the system with the gas purification device, which increases the complexity of the system.

[0008] Insufficient system integration

[0009] Even if the gas mixing system is integrated into the gas purification device, the gas purification device must be separately connected to an external hydrogen supply, which further increases the difficulty of equipment layout and operation. Summary of the invention

[0010] The purpose of the present invention is to solve the problems that the device has high operating costs due to transportation and frequent replacement of gas cylinders, and when the gas mixing system is realized separately, the system needs to be connected to the gas purification device, which increases the complexity of the system; even if the gas mixing system is integrated into the gas purification device, the gas purification device must be separately connected to an external hydrogen supply, which further increases the difficulty of equipment layout and operation. A regeneration gas generating device for use in a gas purification device is proposed.

[0011] To achieve the above object, the present invention provides the following technical solutions:

[0012] A regeneration gas generating device for gas purification equipment is designed, comprising a PEM water electrolysis module and a mixed gas box, wherein an input end of the mixed gas box is connected with an N2 supply valve and an H2 supply valve, the other side of the N2 supply valve is connected with a gas pressure regulating valve 1, and the other side of the H2 supply valve is connected with a gas compression pump, an O2 gas separator and an H2 gas separator are respectively connected with the two sides of the PEM water electrolysis module, the output ends of the O2 gas separator and the H2 gas separator are connected with a water pump, the output end of the water pump is connected with the PEM water electrolysis module through an ultrapure water filter 1 and an ultrapure water filter 2 in sequence, the input end of the O2 gas separator is connected with an ultrapure water supply valve, the output end of the H2 gas separator is connected with a gas compression pump, and a pressure gauge is installed and connected on one side of the mixed gas box.

[0013] Preferably, the output end of the mixed gas box is connected to the gas pressure regulating valve 2 through the ultrapure water filter 3, and the output end of the gas pressure regulating valve 2 is connected to the external gas cylinder.

[0014] Preferably, the PEM water electrolysis module adopts a water electrolysis decomposition device, and the amount of hydrogen generated by the water electrolysis device is 1 lpm, 1.5 lpm, 2 lpm, 3 lpm, 5 lpm, 10 lpm or more. The amount of hydrogen generated is adjusted according to the hydrogen flow required by the gas purification device.

[0015] Preferably, the gas cylinder connected to the output end of the second gas pressure regulating valve stores the generated hydrogen and mixes it with the first gas nitrogen supplied from the outside to prepare and store a mixed gas containing less than 4% hydrogen.

[0016] Preferably, the capacity of the gas cylinder connected to the output end of the gas pressure regulating valve 2 can be set to 1 liter, 5 liters, 10 liters, 20 liters, 30 liters or 50 liters according to the purpose of use and environmental changes, but the specific size of the cylinder capacity is not limited.

[0017] Preferably, an H2 concentration sensor is installed at the output end of the second gas pressure regulating valve to adjust the supply amount of the first gas (nitrogen) according to the hydrogen concentration.

[0018] The invention provides a regeneration gas generating device for use in a gas purification device, which has the following beneficial effects:

[0019] Through the coordination among the H2 supply valve, the PEM electrolysis module, the N2 supply valve and the gas pressure regulating valve 1, the H2 supply valve is used to transport hydrogen to the P-Gas storage container, and the externally connected first gas nitrogen enters the P-Gas storage container through the gas pressure regulating valve 1 and the N2 supply valve. The P-Gas stored in the P-Gas storage container is gradually consumed as the gas purification device regenerates. As the pressure in the P-Gas storage container gradually decreases, when the pressure drops below the set reference pressure, the PEM electrolysis module will re-power and generate hydrogen, and then mix the hydrogen with nitrogen and supply it to the P-Gas storage container, thereby providing the required regeneration gas for the regeneration process of the gas purification device. The device generates hydrogen through a water electrolysis process and mixes it with externally supplied nitrogen to form a suitable regeneration gas, which can efficiently and continuously support the regeneration needs of the gas purification device and avoid the complexity of traditional high-pressure hydrogen storage tanks and external gas supply. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Schematic diagram of the structure of the present invention

[0021] In the figure: 100, PEM water electrolysis module, 1001, N2 supply valve, 1002, H2 supply valve, 1003, ultrapure water supply valve, 201, O2 gas separator, 202, H2 gas separator, 300, mixed gas box, 400, water pump, 500, gas compression pump, 600, filter, 601, ultrapure water filter one, 602, ultrapure water filter two, 603, ultrapure water filter three, 701, gas pressure regulating valve one, 702, gas pressure regulating valve two, 800, pressure gauge, 900, H2 concentration sensor. DETAILED DESCRIPTION

[0022] The present invention will be further described below in conjunction with the accompanying drawings:

[0023] Refer to the attached Figure 1In this embodiment, a regeneration gas generating device used in a gas purification device includes a PEM water electrolysis module 100 and a mixed gas box 300. The input end of the mixed gas box 300 is connected to an N2 supply valve 1001 and an H2 supply valve 1002. The other side of the N2 supply valve 1001 is connected to a gas pressure regulating valve 701. The other side of the H2 supply valve 1002 is connected to a gas compression pump 500. The two sides of the PEM water electrolysis module 100 are respectively connected to an O2 gas separator 201 and an H2 gas separator 202. 2 gas separator 202, the output ends of the O2 gas separator 201 and the H2 gas separator 202 are connected to the water pump 400, the output end of the water pump 400 is connected to the PEM water electrolysis module 100 through the ultrapure water filter 1 601 and the ultrapure water filter 2 602 in sequence, the input end of the O2 gas separator 201 is connected to the ultrapure water supply valve 1003, the output end of the H2 gas separator 202 is connected to the gas compression pump 500, and a pressure gauge 800 is installed and connected to one side of the mixed gas box 300.

[0024] In the PEM electrolysis module 100, after power is supplied, the anode produces oxygen and the cathode produces hydrogen. The oxygen is sent out through the O2 gas separator 201, and the hydrogen is guided through the H2 gas separator 202 and separated from the ultrapure water. The separated hydrogen is compressed by the gas compression pump 500 and delivered to the P-Gas storage container (mixed gas box 300).

[0025] The H2 supply valve 1002 is used to transport hydrogen to the P-Gas storage container (mixed gas box 300), and the externally connected first gas nitrogen enters the P-Gas storage container (mixed gas box 300) through the gas pressure regulating valve 701 and the N2 supply valve 1001.

[0026] When the internal pressure of the gas cylinder is lower than the reference pressure (i.e. 0.1MPa~0.5MPa), the PEM electrolysis module 100 will re-supply power, generate hydrogen, and mix the hydrogen with nitrogen to supply the P-Gas storage container (mixed gas box 300), thereby providing the required regeneration gas for the regeneration process of the gas purification device. When the internal pressure of the gas cylinder is higher than the reference pressure (i.e. 0.1MPa~0.5MPa), the PEM electrolysis module 100 stops supplying power.

[0027] Refer to the attached Figure 1: In this embodiment, the output end of the mixed gas box 300 is connected to the gas pressure regulating valve 2 702 through the ultrapure water filter 3 603, and the output end of the gas pressure regulating valve 2 702 is connected to the external gas cylinder. The PEM water electrolysis module 100 adopts a water electrolysis decomposition device, and the amount of hydrogen generated by the water electrolysis device is 1lpm, 1.5lpm, 2lpm, 3lpm, 5lpm, 10lpm or more. The amount of hydrogen generated is adjusted according to the hydrogen flow rate required by the gas purification device. The gas cylinder connected to the output end of the gas pressure regulating valve 2 702 stores the generated hydrogen and mixes it with the first gas nitrogen supplied from the outside to prepare and store a mixed gas containing less than 4% hydrogen. The capacity of the gas cylinder connected to the output end of the gas pressure regulating valve 2 702 can be set to 1 liter, 5 liters, 10 liters, 20 liters, 30 liters or 50 liters according to the purpose of use and environmental changes, but the specific size of the cylinder capacity is not limited. The output end of the gas pressure regulating valve 2 702 is installed with an H2 concentration sensor 900 to adjust the supply of the first gas nitrogen according to the hydrogen concentration.

[0028] A hydrogen concentration measuring instrument (H2 concentration sensor 900) is installed at the discharge end (output end) of the gas pressure regulating valve 2 702 to adjust the supply of the first gas (nitrogen) according to the hydrogen concentration. In addition, when it is detected that the hydrogen concentration is abnormally higher or lower than the set concentration, an alarm is issued to prompt inspection of the regeneration gas generating device.

[0029] Working principle:

[0030] First, the PEM receives ultrapure water from the water electrolysis module 100 and adjusts the supply of ultrapure water through the ultrapure water supply valve 1003. The ultrapure water enters the gas separator 1 201 and the gas separator 2 202 through the ultrapure water filter 1 601 and the ultrapure water filter 2 602, and is supplied to the gas separator by the ultrapure water circulation pump 400, so that the ultrapure water can circulate in the system.

[0031] In the PEM electrolysis module 100, after power is supplied, the anode produces oxygen and the cathode produces hydrogen. The oxygen is sent out through the O2 gas separator 201, and the hydrogen is guided through the H2 gas separator 202 and separated from the ultrapure water. The separated hydrogen is compressed by the gas compression pump 500 and delivered to the P-Gas storage container (mixed gas box 300).

[0032] In order to control the delivery of hydrogen, an H2 supply valve 1002 is installed to deliver hydrogen to the P-Gas storage container (mixed gas box 300), and the externally connected first gas nitrogen enters the P-Gas storage container (mixed gas box 300) through the gas pressure regulating valve 701 and the N2 supply valve 1001.

[0033] The P-Gas stored in the P-Gas storage container (mixed gas box 300) is gradually consumed during the regeneration process of the gas purification device. As the pressure in the P-Gas storage container (mixed gas box 300) gradually decreases, when the pressure drops below the set reference pressure, the PEM electrolysis module 100 will re-supply power to generate hydrogen, and mix the hydrogen with nitrogen and supply it to the P-Gas storage container (mixed gas box 300), thereby providing the required regeneration gas for the regeneration process of the gas purification device.

[0034] The device generates hydrogen through a water electrolysis process and mixes it with externally supplied nitrogen to form a suitable regeneration gas. It can efficiently and continuously support the regeneration needs of the gas purification device, avoiding the complexity of traditional high-pressure hydrogen storage tanks and external gas supply.

[0035] The design of this case involves a gas purification device for removing oxygen and moisture in the OLED display manufacturing process line. During use, a mixture of hydrogen and nitrogen is required to protect the OLED display. Therefore, the preparation device of the mixture of hydrogen and nitrogen is used in the large-scale production process, and when its purifier is saturated, it is reactivated through a regeneration process. To achieve this regeneration process, a regeneration gas is usually required, and this regeneration gas is generally nitrogen containing 3.5% to 4% hydrogen.

[0036] In the prior art, there are two main ways to provide regeneration gas:

[0037] The first method is to place nitrogen cylinders filled with 3.5% to 4% hydrogen at designated locations and transport the gas from the cylinders to a gas purification device through stainless steel pipes. The regeneration cycle of the gas purification device varies depending on the usage environment, so it is necessary to purchase and replace the cylinders regularly.

[0038] The second method is to place a mixing device for high-purity hydrogen and high-purity nitrogen at a designated location, generate regeneration gas through the device, and transport the gas to the gas purification device through a stainless steel pipeline. In this method, the mixing ratio of high-purity hydrogen and nitrogen is adjusted by a flow control device (such as MFC) to obtain the regeneration gas of the required concentration.

[0039] However, the limitation of these traditional methods is that they require a high-purity hydrogen supply line, which is not always available at the customer's facility. Therefore, the first method is commonly used, which is to purchase and install gas cylinders at regular intervals and supply the gas to the gas purification unit through pipelines.

[0040] The innovation of this case is that the regeneration gas is produced by self-production of hydrogen and mixing it with nitrogen. This process no longer relies on external hydrogen supply, but generates hydrogen through the water electrolysis process. This technology uses electrical energy to decompose water into hydrogen and falls into the category of hydrogen production by electrolysis of water. Specifically, this case uses **polymer electrolyte electrolysis (PEM electrolysis)** technology.

[0041] Polymer electrolyte electrolysis technology (PEM electrolysis) is a technology that produces hydrogen by electrolyzing water. It uses a fluorinated ion polymer membrane as an electrolyte and is equipped with a precious metal catalyst to efficiently produce hydrogen. The structure of the PEM electrolyzer consists of an anode, a cathode, and an ion exchange membrane for gas separation. This technology produces oxygen at the anode and hydrogen at the cathode. The reaction formula is as follows:

[0042] Anode reaction: 2H2O→4H++4e-+O2

[0043] Cathode reaction: 4H++4e-→2H2

[0044] In the present case, the amount of hydrogen produced by the PEM electrolysis module (100) is proportional to the current supply and the coverage area of ​​the catalyst. The number of PEM electrolysis modules (1 or more) can be adjusted according to the required amount of hydrogen. In addition, the hydrogen concentration at the gas supply end is monitored by a hydrogen concentration sensor (900). If the concentration exceeds 4%, the nitrogen flow rate is increased to adjust the concentration of the regeneration gas; when the hydrogen concentration is lower than 3.5%, the nitrogen supply is reduced or stopped, thereby controlling the hydrogen concentration of the regeneration gas.

[0045] According to the demand for hydrogen, by controlling the number and parameters of the PEM electrolysis modules, the amount of hydrogen produced can be accurately adjusted to ensure that the generated regeneration gas always meets the requirements of the gas purification device.

[0046]

[0047] This case uses water electrolysis technology to directly produce hydrogen, and mixes hydrogen with nitrogen to generate and supply regeneration gas for gas purification equipment. Compared with traditional methods, this case has the following advantages:

[0048] Reduced facility installation costs: The device in this case can be installed closely with the gas purification device, reducing the need for external gas cylinders and high-purity gas mixing devices, thereby saving facility installation costs.

[0049] No need to purchase gas cylinders regularly: Traditional methods require regular purchase and replacement of gas cylinders, while the water electrolysis technology used in this case can continuously generate the required hydrogen, avoiding the trouble of purchasing and replacing gas cylinders.

[0050] Improved system cleanliness and shorter regeneration cycle: By electrolyzing water to produce hydrogen, this solution allows the gas purification device to be regenerated more frequently, keeping the system clean and ensuring long-term efficient operation.

[0051] Reduced maintenance costs: Compared with the traditional high-pressure hydrogen and nitrogen mixed supply method, this case reduces the dependence on high-purity gas supply facilities, thus greatly reducing maintenance and operating costs.

[0052] Optimize the performance of gas purification equipment: By self-generating hydrogen and mixing it with nitrogen, this case can accurately adjust the concentration of regeneration gas to better meet the needs of gas purification equipment and maximize the performance of the equipment.

[0053] In summary, this case can effectively reduce the installation and maintenance costs of equipment, improve the operating efficiency of the gas purification system, and provide users with a cleaner and more economical solution.

[0054] Although the present invention has been shown and described with reference to preferred embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein within the scope of the claims.

Claims

1. A regeneration gas generating device for use in a gas purification device, comprising a PEM water electrolysis module (100) and a mixed gas box (300), characterized in that: The input end of the mixed gas box (300) is connected to an N2 supply valve (1001) and an H2 supply valve (1002), the other side of the N2 supply valve (1001) is connected to a gas pressure regulating valve 1 (701), the other side of the H2 supply valve (1002) is connected to a gas compression pump (500), and the two sides of the PEM water electrolysis module (100) are respectively connected to an O2 gas separator (201) and an H2 gas separator (202), the O2 gas separator (201) and the H2 gas separator (202) are connected to the gas pressure regulating valve 1 (701). The output end of the separator (202) is connected to the water pump (400), and the output end of the water pump (400) is connected to the PEM water electrolysis module (100) through ultrapure water filter 1 (601) and ultrapure water filter 2 (602) in sequence. The input end of the O2 gas separator (201) is connected to an ultrapure water supply valve (1003), and the output end of the H2 gas separator (202) is connected to a gas compression pump (500). A pressure gauge (800) is installed on one side of the mixed gas box (300).

2. The regeneration gas generating device used in a gas purification device according to claim 1, characterized in that: The output end of the mixed gas box (300) is connected to the gas pressure regulating valve 2 (702) through the ultrapure water filter 3 (603), and the output end of the gas pressure regulating valve 2 (702) is connected to the external gas cylinder.

3. The regeneration gas generating device used in a gas purification device according to claim 1, characterized in that: The PEM water electrolysis module (100) adopts a water electrolysis decomposition device, and the amount of hydrogen generated by the water electrolysis device is 1 lpm, 1.5 lpm, 2 lpm, 3 lpm, 5 lpm, 10 lpm or more. The amount of hydrogen generated is adjusted according to the hydrogen flow rate required by the gas purification device.

4. The regeneration gas generating device used in a gas purification device according to claim 1, characterized in that: The gas cylinder connected to the output end of the second gas pressure regulating valve (702) stores the generated hydrogen and mixes it with the first gas nitrogen supplied from the outside to prepare and store a mixed gas containing less than 4% hydrogen.

5. The regeneration gas generating device used in a gas purification device according to claim 1, characterized in that: The capacity of the gas cylinder connected to the output end of the gas pressure regulating valve 2 (702) can be set to 1 liter, 5 liters, 10 liters, 20 liters, 30 liters or 50 liters according to the purpose of use and environmental changes, but the specific size of the cylinder capacity is not limited.

6. The regeneration gas generating device used in a gas purification device according to claim 1, characterized in that: The output end of the second gas pressure regulating valve (702) is equipped with a H2 concentration sensor (900) to adjust the supply amount of the first gas (nitrogen) according to the hydrogen concentration.

Images