An electronic-grade fluorine gas refrigeration device and impurity absorption system

Abstract

The present invention discloses an electronic-grade fluorine gas refrigeration device and an impurity absorption system, which relates to the technical field of refrigerators. This electronic-grade fluorine gas refrigeration device includes an evaporator, a compressor, a condenser, and a throttle valve provided on the refrigerator, and also includes a bottom plate and a top plate. This electronic-grade fluorine gas refrigeration device and impurity absorption system facilitate the detection of the pressure of the refrigerant. When the refrigerant is less, it is convenient to add it. Moreover, it is convenient to dry the added refrigerant; it is convenient to adjust the temperature of the fluorine gas after refrigeration. At the same time, the low temperature of the fluorine gas can be used to cool the storage tank; it is convenient to accumulate and temporarily store the fluorine gas after refrigeration. Moreover, it can ensure that the electronic-grade fluorine gas entering the absorption tower body is more uniform; when the refrigerant is less, cooling water can be applied to the surface of the compressor to cool it, ensuring the refrigeration effect and service life, and thus improving the efficiency and effect of subsequent impurity absorption.

Description

Technical Field

[0001] The present invention relates to the technical field of refrigerators, and particularly to an electronic-grade fluorine gas refrigeration device and an impurity absorption system. Background Art

[0002] Electronic-grade fluorine gas is a high-purity fluorine gas and has important applications in fields such as the electronics industry. During the production process, an absorption tower is required to absorb impurities therein. Before absorption, a refrigeration device is usually used to pre-cool the fluorine gas, and a low-temperature refrigerant or other cooling medium is used to lower the temperature of the fluorine gas. The purpose of pre-cooling is to make some impurities in the fluorine gas (such as moisture, hydrogen fluoride, etc.) more easily absorbed or condensed into a liquid at a lower temperature, thereby improving the efficiency of subsequent impurity absorption; Absorption tower: A packed tower or a plate tower is used as the absorption tower. In the absorption tower, an absorbent capable of absorbing impurities in the fluorine gas is filled, such as activated alumina, molecular sieve, alkali solution, etc. The fluorine gas enters from the bottom of the absorption tower and counter-currently contacts the absorbent sprayed from the top of the tower. During the contact process, the impurities in the fluorine gas are adsorbed by the absorbent or removed through a chemical reaction; Refrigeration device, using a compression refrigeration cycle with Freon, etc. as the refrigerant, mainly including a refrigeration compressor, a condenser, a throttle valve, and an evaporator. The refrigeration compressor compresses the low-temperature and low-pressure Freon gas into a high-temperature and high-pressure gas and sends it into the condenser. In the condenser, the high-temperature and high-pressure Freon gas cools and condenses into a liquid. After throttling and depressurizing through the throttle valve, it becomes a low-temperature and low-pressure liquid and enters the evaporator, where it absorbs heat and evaporates, thereby realizing the cooling of the fluorine gas.

[0003] However, when the existing electronic-grade fluorine gas refrigeration device and impurity absorption system are in use, when there is less refrigerant in the refrigeration device, it is not easy to be discovered in time, and at the same time, it is not convenient to supplement the refrigerant, which affects the refrigeration efficiency and effect; The supplemented refrigerant may be mixed with moisture, affecting the use effect and service life of the refrigeration device; The fluorine gas cooled by the refrigeration device may have too high or too low a temperature, which is not convenient to ensure a constant temperature and affects the subsequent impurity absorption effect; When the pre-cooled fluorine gas enters the absorption tower, the amount of fluorine gas is sometimes more and sometimes less, and unevenness is likely to occur, affecting the efficiency and effect of subsequent impurity absorption. Summary of the Invention

[0004] The purpose of the present invention is to provide an electronic-grade fluorine gas refrigeration device and an impurity absorption system to solve the problems raised in the above background art.

[0005] To achieve the above object, the present invention provides the following technical solution: An electronic-grade fluorine gas refrigeration device, including an evaporator, a compressor, a condenser, and a throttle valve provided on a refrigerator. A first pipeline is provided between the compressor and the evaporator, and a second pipeline is provided between the throttle valve and the evaporator. A third pipeline is provided between the condenser and the compressor, and a fourth pipeline is provided between the condenser and the throttle valve. An inlet and an outlet are provided on the evaporator. It further includes a bottom plate and a top plate. The compressor, the condenser, and the throttle valve are provided on the top plate, and an air outlet valve is fixedly connected to the end of the outlet. The other end of the air outlet valve is fixedly connected to an air outlet pipe, and a pressure sensor is fixedly inserted into the side wall of the second pipeline. A storage tank is fixedly connected to the top of the bottom plate, and a refrigerant is filled in the storage tank. A heat preservation shell is fixedly sleeved on the side wall of the storage tank, and an inflation valve is fixedly connected to the top of the storage tank. An inflation pipe is fixedly connected between the inflation valve and the second pipeline, and a control mechanism for controlling the discharge amount of fluorine gas is provided on the side wall of the air outlet pipe. An adjustment mechanism for adjusting the discharge temperature of fluorine gas is provided on the side wall of the outlet. A drying mechanism for drying the filled refrigerant is provided on the side wall of the inflation pipe, and a heat dissipation mechanism for dissipating heat from the compressor is provided above the top plate.

[0006] Preferably, the control mechanism includes two symmetrically arranged fixed cylinders fixedly connected to the top of the bottom plate. A first solenoid valve and a second solenoid valve are fixedly connected to the side wall of each fixed cylinder. The other end of the first solenoid valve is fixedly connected to a first U-shaped pipe. The other end of the second solenoid valve is fixedly connected to a second U-shaped pipe. The first U-shaped pipe is fixed to the end of the air outlet pipe. A first discharge pipe is fixedly connected to the side wall of the second U-shaped pipe. A first L-shaped block is fixedly connected to the top of each fixed cylinder. A moving rod is inserted into the top of the first L-shaped block. The upper end of the moving rod is fixedly connected to a gravity disk. The lower end of the moving rod is fixedly connected to a piston, and the piston slides in the fixed cylinder. A distance sensor is fixedly inserted into the top of the first L-shaped block.

[0007] Preferably, the adjustment mechanism includes a first temperature sensor fixedly inserted into the side wall of the outlet. A third solenoid valve is fixedly connected to the side wall of the outlet. A third U-shaped pipe is fixedly connected between the output end of the third solenoid valve and the inlet. A fourth solenoid valve is fixedly connected to the side wall of the outlet. A fifth solenoid valve is fixedly connected to the top of the heat preservation shell. A second connecting pipe is fixedly connected between the fifth solenoid valve and the air outlet pipe. A first annular cover is fixedly connected to the bottom of the heat preservation shell. A moving cover slides in the first annular cover. A hose is fixedly connected between the moving cover and the fifth solenoid valve. A second temperature sensor is fixedly inserted into the side wall of the hose. A lifting module is provided between the moving cover and the top of the heat preservation shell. The other end of the fourth solenoid valve is fixedly connected to a first connecting pipe, and the other end of the first connecting pipe is fixedly inserted into the first annular cover.

[0008] Preferably, the drying mechanism includes a circular cover inserted on the side wall of the charging pipe, and the circular cover is communicated with the charging pipe. An L-shaped plate is fixedly connected between the circular cover and the storage tank. A motor is fixedly connected to the top of the circular cover. The output end of the motor penetrates into the circular cover and is fixedly connected to a rotating disk. A plurality of arc-shaped grooves penetrating through are formed on the top of the rotating disk. A desiccant is filled in the arc-shaped grooves. An electric heating ring is fixedly inserted on the top of the circular cover. A second discharge pipe is fixedly inserted in the electric heating ring.

[0009] Preferably, the heat dissipation mechanism includes a second annular cover which is hollow and sleeved on the side wall of the compressor. A plurality of rubber pipes arranged in an array are fixedly inserted on the side wall of the second annular cover close to the compressor. A reset mechanism is arranged between the second annular cover and the top plate. The movement of the second annular cover is pushed by a pushing mechanism. A water supply mechanism for supplying water into the second annular cover is arranged above the top plate.

[0010] Preferably, the reset mechanism includes two symmetrically arranged sleeve rods fixedly connected to the bottom of the second annular cover. A sleeve is sleeved on the side wall of each sleeve rod. The lower end of the sleeve is fixed to the top of the top plate. A first spring is sleeved on the side wall of each sleeve.

[0011] Preferably, the pushing mechanism includes a connecting block fixedly connected to the bottom of the second annular cover. A push rod is fixedly connected to the bottom of the connecting block. The lower end of the push rod penetrates through the bottom of the top plate. A fixed box is fixedly inserted on the side wall of the charging pipe. A rotating fan is rotatably connected in the fixed box through a rotating shaft. A disk is fixedly connected to the upper end of the rotating shaft. A plurality of conical rods arranged in an array are fixedly connected to the top of the disk. The lower end of the push rod can slide on the side wall of the conical rod.

[0012] Preferably, the water supply mechanism includes a fixing plate fixedly connected to the top of the top plate. A water tank is fixedly connected to the upper end of the fixing plate. An L-shaped pipe is fixedly connected to the bottom of the water tank. A fixed cover is fixedly connected to the lower end of the L-shaped pipe. A telescopic pipe is fixedly connected between the fixed cover and the second annular cover. An opening and closing assembly is arranged in the fixed cover.

[0013] Preferably, the opening and closing assembly includes a sealing plate inserted in the fixed cover. Through holes are formed in the side wall of the sealing plate. A second spring is fixedly connected between the sealing plate and the fixed cover. A second L-shaped block is fixedly connected to the top of the second annular cover.

[0014] An impurity absorption system includes an electronic-grade fluorine gas refrigeration device and further includes an absorption tower body. The absorption tower body includes an air inlet and an air outlet. The other end of the first discharge pipe is fixed to the air inlet.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] This electronic-grade fluorine gas refrigeration device and impurity absorption system, by setting up an adjustment mechanism, etc., when refrigerating electronic-grade fluorine gas, start the compressor to make the refrigerant in the pipeline circulate, so that the refrigerant can enter the evaporator through the second pipeline for evaporation and heat absorption. When the pressure sensor detects that the pressure of the refrigerant in the pipeline is small, open the charging valve. At this time, the refrigerant in the storage tank can enter the charging pipe through the charging valve. Then, after being dried by the drying mechanism, it enters the second pipeline, so that automatic refilling of the refrigerant can be realized, which is more convenient and fast to use, and ensures the refrigeration efficiency and effect. The refrigerant in the pipeline can return to the condenser through the first pipeline for condensation. At the same time, the electronic-grade fluorine gas is introduced into the evaporator through the inlet for refrigeration operation, and the refrigerated electronic-grade fluorine gas is discharged through the outlet. And, the temperature is detected by the first temperature sensor. When it is detected that the temperature of the electronic-grade fluorine gas is high, the outlet valve can be closed. At the same time, open the third solenoid valve, and increase the refrigeration power of the whole device. At this time, the electronic-grade fluorine gas can circulate to the inlet through the third solenoid valve and the third U-shaped pipe and enter the evaporator again for secondary refrigeration operation to ensure the refrigeration effect. When the first temperature sensor detects that the temperature of the electronic-grade fluorine gas is low, close the outlet valve, open the fourth solenoid valve, and reduce the refrigeration power of the whole device. At this time, the electronic-grade fluorine gas can enter the first annular cover and the movable cover through the fourth solenoid valve and the first connecting pipe, exchange heat with the storage tank, and cool it down, which can avoid the high temperature outside the storage tank and ensure its storage effect. Then, it returns to the outlet pipe through the hose, the fifth solenoid valve and the second connecting pipe. When the second temperature sensor detects that the temperature of the discharged electronic-grade fluorine gas is low, the lifting module can be driven to move the movable cover upward, so as to increase the heat exchange area with the storage tank and avoid waste.

[0017] This electronic-grade fluorine gas refrigeration device and impurity absorption system, by setting a control mechanism, etc., opens the first solenoid valve on the side wall of one of the fixed cylinders. At the same time, closes the second solenoid valve on its side wall. At this time, the refrigerated electronic-grade fluorine gas enters the fixed cylinder through the first U-shaped pipe for accumulation and temporary storage. Under the action of pressure, it can push the piston upward. At the same time, drives the gravity disk upward through the moving rod. Wait for the distance sensor to detect the distance between the gravity disk and the first L-shaped block. When the gravity disk moves to the highest position, the first solenoid valve can be closed and the second solenoid valve can be opened. At this time, under the constant pressure of the gravity disk, the electronic-grade fluorine gas temporarily stored in the fixed cylinder is squeezed out through the second solenoid valve and the second U-shaped pipe, and enters the absorption tower body through the first discharge pipe for impurity absorption treatment. At the same time, opens the first solenoid valve on the side wall of the other fixed cylinder and closes the second solenoid valve. At this time, it can make the refrigerated electronic-grade fluorine gas enter the other fixed cylinder for accumulation and temporary storage. Repeating like this can ensure that the electronic-grade fluorine gas entering the absorption tower body is more uniform, and can improve the efficiency and effect of subsequent impurity absorption.

[0018] This electronic-grade fluorine gas refrigeration device and impurity absorption system, by setting a drying mechanism, etc., the refrigerant discharged from the storage tank can enter the circular cover through the inflation valve and the inflation pipe, and can be dried by the desiccant in the arc-shaped groove. The dried refrigerant can enter the second pipeline through the inflation pipe, so as to ensure the filling effect. And, by starting the motor, the rotation of the motor drives the rotation of the rotating disk, so that the desiccants in the multiple arc-shaped grooves can be rotated to the position of the inflation pipe in turn to dry the passing refrigerant. And, when the desiccant rotates below the electric heating ring, start the electric heating ring to heat the desiccant to facilitate the removal of the adsorbed water vapor. After the water vapor evaporates, it is discharged through the second discharge pipe, thus ensuring the efficiency and effect of subsequent drying.

[0019] This electronic-grade fluorine gas refrigeration device and impurity absorption system, by setting up a heat dissipation mechanism, etc., when the pressure sensor detects that there is less refrigerant in the pipeline, at this time, the compressor will overheat. At the same time, when the refrigerant passes through the charging pipe, it can enter the fixed box and impact on the surface of the rotating fan, thereby causing the rotating fan to rotate. When the rotating fan rotates, it can drive the disc and the conical rod to rotate through the rotating shaft. When the side wall of the conical rod abuts against the lower end of the push rod, it can push the push rod upward. At the same time, it drives the second annular cover to move upward through the connecting block, and the first spring is stretched. When the conical rod passes over the lower end of the push rod, the second annular cover can move downward and reset under the action of the first spring. In this way, the second annular cover can move up and down reciprocally. When the second annular cover moves upward, it drives the second L-shaped block to move upward synchronously and separate from the sealing plate. At this time, the sealing plate can move upward under the action of the second spring, and the through hole coincides with the L-shaped pipe, and the opening and closing assembly is opened. At this time, the cooling water in the water tank can pass through the L-shaped pipe and the through hole, enter the second annular cover through the telescopic pipe, and be applied to the surface of the compressor through the rubber pipe, making the heat dissipation efficiency of the compressor higher and the effect better, ensuring the refrigeration effect and service life. When the second annular cover moves downward, it can drive the second L-shaped block to move downward synchronously. When the second L-shaped block abuts against the top of the sealing plate, it can push the sealing plate downward. At the same time, the first spring is compressed, so that the through hole is staggered from the L-shaped pipe, and the opening and closing assembly is closed, thus avoiding waste of cooling water. Brief Description of the Drawings

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0021] Figure 2 It is a schematic diagram of the overall structure of another perspective of the present invention.

[0022] Figure 3 It is a schematic diagram of a partial cross-sectional structure of the heat preservation shell in the present invention.

[0023] Figure 4 It is Figure 1 an enlarged schematic diagram of part A in

[0024] Figure 5 It is Figure 2 an enlarged schematic diagram of part B in

[0025] Figure 6 It is Figure 2 an enlarged schematic diagram of part C in

[0026] Figure 7 It is Figure 3 an enlarged schematic diagram of part D in

[0027] Figure 8 It isFigure 5 Schematic diagram of the enlarged structure at position E in the middle.

[0028] In the figure: 101, bottom plate; 102, top plate; 103, evaporator; 104, compressor; 105, condenser; 106, throttle valve; 107, inlet; 108, outlet; 109, third pipeline; 110, fourth pipeline; 111, first pipeline; 112, second pipeline; 201, first temperature sensor; 202, third solenoid valve; 203, third U-shaped tube; 204, fourth solenoid valve; 205, first connecting pipe; 206, fifth solenoid valve; 207, second connecting pipe; 301, first annular cover; 302, moving cover; 303, lifting module; 304, hose; 305, second temperature sensor; 401, L-shaped plate; 402, circular cover; 403, rotating disk; 404, motor; 405, arc-shaped groove; 406, electric heating ring; 407, second discharge pipe; 501, second annular cover; 502, rubber tube; 601, sleeve rod; 602, sleeve; 603, first spring; 701, connecting block; 702, push rod; 703, fixed box; 704, rotating shaft; 705, rotating fan; 706, tapered rod; 707, disk; 801, fixed plate; 802, water tank; 803, L-shaped pipe; 804, telescopic pipe; 901, fixed cover; 902, sealing plate; 903, second spring; 904, through hole; 905, second L-shaped block; 10, air outlet valve; 11, air outlet pipe; 12, pressure sensor; 13, charging pipe; 14, storage tank; 15, heat preservation shell; 16, inflation valve; 1701, fixed cylinder; 1702, piston; 1703, first L-shaped block; 1704, moving rod; 1705, gravity disk; 1706, distance sensor; 1707, first solenoid valve; 1708, first U-shaped tube; 1709, second U-shaped tube; 1710, first discharge pipe; 1711, second solenoid valve; 18, absorption tower body; 1801, air inlet; 1802, air outlet. Detailed implementation manners

[0029] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0030] Please refer to Figures 1 - 8, the present invention provides an electronic-grade fluorine gas refrigeration device, which includes an evaporator 103, a compressor 104, a condenser 105 and a throttle valve 106 arranged on a refrigerator. A first pipeline 111 is arranged between the compressor 104 and the evaporator 103, and a second pipeline 112 is arranged between the throttle valve 106 and the evaporator 103. A third pipeline 109 is arranged between the condenser 105 and the compressor 104, and a fourth pipeline 110 is arranged between the condenser 105 and the throttle valve 106. An inlet 107 and an outlet 108 are arranged on the evaporator 103. The device further includes a bottom plate 101 and a top plate 102. The compressor 104, the condenser 105 and the throttle valve 106 are arranged on the top plate 102. The end of the outlet 108 is fixedly connected to an air outlet valve 10, the other end of the air outlet valve 10 is fixedly connected to an air outlet pipe 11, and a pressure sensor 12 is fixedly inserted into the side wall of the second pipeline 112. The top of the bottom plate 101 is fixedly connected to a storage tank 14, and a refrigerant is filled in the storage tank 14. A heat preservation shell 15 is fixedly sleeved on the side wall of the storage tank 14, and an inflation valve 16 is fixedly connected to the top of the storage tank 14. An inflation pipe 13 is fixedly connected between the inflation valve 16 and the second pipeline 112. A control mechanism for controlling the discharge amount of fluorine gas is arranged on the side wall of the air outlet pipe 11. An adjustment mechanism for adjusting the discharge temperature of fluorine gas is arranged on the side wall of the outlet 108. A drying mechanism for drying the filled refrigerant is arranged on the side wall of the inflation pipe 13. A heat dissipation mechanism for dissipating heat from the compressor 104 is arranged above the top plate 102, which is convenient for detecting the pressure of the refrigerant. When the refrigerant is less, it is convenient to refill it. Moreover, it is convenient to dry the filled refrigerant; it is convenient to adjust the temperature of the fluorine gas after refrigeration. At the same time, the low temperature of the fluorine gas can be used to cool the storage tank 14, avoiding the high temperature outside the storage tank 14 and ensuring its storage effect; it is convenient to accumulate and temporarily store the fluorine gas after refrigeration. Moreover, under the constant pressure of the gravity disk 1705, the temporarily stored fluorine gas is extruded, which can ensure that the electronic-grade fluorine gas entering the absorption tower body 18 is more uniform, and can improve the efficiency and effect of subsequent impurity absorption; when the refrigerant is less, cooling water can be applied to the surface of the compressor 104 for cooling, making the heat dissipation efficiency of the compressor 104 higher and the effect better, ensuring the refrigeration effect and service life, and further improving the efficiency and effect of subsequent impurity absorption.

[0031] The control mechanism includes two symmetrically arranged fixed cylinders 1701 fixedly connected to the top of the bottom plate 101. A first solenoid valve 1707 and a second solenoid valve 1711 are fixedly connected to the side wall of each fixed cylinder 1701. The other end of the first solenoid valve 1707 is fixedly connected to a first U-shaped tube 1708. The other end of the second solenoid valve 1711 is fixedly connected to a second U-shaped tube 1709. The end of the first U-shaped tube 1708 is fixed to the air outlet pipe 11. A first discharge pipe 1710 is fixedly connected to the side wall of the second U-shaped tube 1709. A first L-shaped block 1703 is fixedly connected to the top of each fixed cylinder 1701. A moving rod 1704 is inserted into the top of the first L-shaped block 1703. The upper end of the moving rod 1704 is fixedly connected to a gravity disc 1705. The lower end of the moving rod 1704 is fixedly connected to a piston 1702. The piston 1702 slides within the fixed cylinder 1701. A distance sensor 1706 is fixedly inserted into the top of the first L-shaped block 1703. Open the first solenoid valve 1707 on the side wall of one of the fixed cylinders 1701. At the same time, close the second solenoid valve 1711 on its side wall. At this time, the refrigerated electronic-grade fluorine gas enters the fixed cylinder 1701 through the first U-shaped tube 1708 for accumulation and temporary storage. Under the action of pressure, it can push the piston 1702 to move upward. At the same time, drive the gravity disc 1705 to move upward through the moving rod 1704. Wait for the distance sensor 1706 to detect the distance between the gravity disc 1705 and the first L-shaped block 1703. When the gravity disc 1705 moves to the highest position, the first solenoid valve 1707 can be closed and the second solenoid valve 1711 can be opened. At this time, under the constant pressure of the gravity disc 1705, the electronic-grade fluorine gas temporarily stored in the fixed cylinder 1701 is squeezed out through the second solenoid valve 1711 and the second U-shaped tube 1709 and enters the absorption tower body 18 through the first discharge pipe 1710 for impurity absorption treatment. At the same time, open the first solenoid valve 1707 on the side wall of the other fixed cylinder 1701 and close the second solenoid valve 1711. At this time, it can make the refrigerated electronic-grade fluorine gas enter the other fixed cylinder 1701 for accumulation and temporary storage. In this way, it can ensure that the electronic-grade fluorine gas entering the absorption tower body 18 is more uniform, and can improve the efficiency and effect of subsequent impurity absorption.

[0032] The adjusting mechanism includes a first temperature sensor 201 fixedly inserted in the side wall of the outlet 108, and a third solenoid valve 202 is fixedly connected to the side wall of the outlet 108. A third U-shaped tube 203 is fixedly connected between the output end of the third solenoid valve 202 and the inlet 107. A fourth solenoid valve 204 is fixedly connected to the side wall of the outlet 108, and a fifth solenoid valve 206 is fixedly connected to the top of the heat preservation shell 15. A second connecting tube 207 is fixedly connected between the fifth solenoid valve 206 and the air outlet pipe 11. A first annular cover 301 is fixedly connected to the bottom of the heat preservation shell 15. A moving cover 302 is slidably connected inside the first annular cover 301. A hose 304 is fixedly connected between the moving cover 302 and the fifth solenoid valve 206, and a second temperature sensor 305 is fixedly inserted in the side wall of the hose 304. A lifting module 303 is arranged between the moving cover 302 and the top of the heat preservation shell 15. The other end of the fourth solenoid valve 204 is fixedly connected to a first connecting tube 205, and the other end of the first connecting tube 205 is fixedly inserted into the first annular cover 301. When refrigerating the electronic-grade fluorine gas, start the compressor 104 to make the refrigerant in the pipeline circulate, so that the refrigerant can enter the evaporator 103 through the second pipeline 112 for evaporation and heat absorption. When the pressure sensor 12 detects that the pressure of the refrigerant in the pipeline is small, open the charging valve 16. At this time, the refrigerant in the storage tank 14 can enter the charging pipe 13 through the charging valve 16, and then enter the second pipeline 112 after being dried by the drying mechanism of the drying mechanism, so as to realize the automatic filling of the refrigerant, which is more convenient and fast to use, and ensure the refrigeration efficiency and effect. The refrigerant in the pipeline can return to the condenser 105 through the first pipeline 111 for condensation. At the same time, the electronic-grade fluorine gas is introduced into the evaporator 103 through the inlet 107 for refrigeration operation. The refrigerated electronic-grade fluorine gas is discharged through the outlet 108. And the temperature is detected by the first temperature sensor 201. When it is detected that the temperature of the electronic-grade fluorine gas is high, the air outlet valve 10 can be closed. At the same time, open the third solenoid valve 202, and increase the refrigeration power of the whole device. At this time, the electronic-grade fluorine gas can circulate to the inlet 107 through the third solenoid valve 202 and the third U-shaped tube 203, and enter the evaporator 103 again for secondary refrigeration operation to ensure the refrigeration effect. When the first temperature sensor 201 detects that the temperature of the electronic-grade fluorine gas is low, close the air outlet valve 10, open the fourth solenoid valve 204, and reduce the refrigeration power of the whole device. At this time, the electronic-grade fluorine gas can enter the first annular cover 301 and the moving cover 302 through the fourth solenoid valve 204 and the first connecting tube 205, exchange heat with the storage tank 14, and cool it to avoid the high temperature outside the storage tank 14 and ensure the storage effect. Then, it returns to the air outlet pipe 11 through the hose 304, the fifth solenoid valve 206 and the second connecting tube 207. When the second temperature sensor 305 detects that the temperature of the discharged electronic-grade fluorine gas is low,The lifting module 303 can drive the movable cover 302 to move upward, thereby increasing the heat exchange area between it and the storage tank 14 and avoiding waste.

[0033] The drying mechanism includes a circular cover 402 inserted in the side wall of the charging pipe 13, and the circular cover 402 is communicated with the charging pipe 13. An L-shaped plate 401 is fixedly connected between the circular cover 402 and the storage tank 14. A motor 404 is fixedly connected to the top of the circular cover 402. The output end of the motor 404 penetrates into the circular cover 402 and is fixedly connected to a rotating disk 403. A plurality of arc-shaped grooves 405 penetrating through are formed in the top of the rotating disk 403. Desiccant is filled in the arc-shaped grooves 405. An electric heating ring 406 is fixedly inserted in the top of the circular cover 402. A second discharge pipe 407 is fixedly inserted in the electric heating ring 406. The refrigerant discharged from the storage tank 14 can enter the circular cover 402 through the inflation valve 16 and the charging pipe 13, and can be dried by the desiccant in the arc-shaped grooves 405. The dried refrigerant can enter the second pipeline 112 through the charging pipe 13, so as to ensure the filling effect. Moreover, by starting the motor 404, the rotation of the motor 404 drives the rotation of the rotating disk 403, so that the desiccant in the plurality of arc-shaped grooves 405 can sequentially rotate to the position of the charging pipe 13 to dry the passing refrigerant. Moreover, when the desiccant rotates below the electric heating ring 406, the electric heating ring 406 is started to heat the desiccant, which is convenient for removing the adsorbed water vapor. After the water vapor evaporates, it is discharged through the second discharge pipe 407, so as to ensure the efficiency and effect of subsequent drying.

[0034] The heat dissipation mechanism includes a second annular cover 501 which is hollow and sleeved on the side wall of the compressor 104. A plurality of rubber tubes 502 arranged in an array are fixedly inserted in the side wall of the second annular cover 501 close to the compressor 104. A reset mechanism is arranged between the second annular cover 501 and the top plate 102. The movement of the second annular cover 501 is pushed by a pushing mechanism. A water supply mechanism for supplying water into the second annular cover 501 is arranged above the top plate 102. The pushing mechanism and the reset mechanism are used to make the second annular cover 501 reciprocate up and down along the side wall of the compressor 104, so that the rubber tubes 502 slide on the side wall of the compressor 104. Moreover, the cooling water enters the second annular cover 501 through the water supply mechanism and is smeared on the surface of the compressor 104 through the rubber tubes 502, so that the heat dissipation efficiency of the compressor 104 is higher and the effect is better, ensuring the refrigeration effect and service life.

[0035] The reset mechanism includes two symmetrically arranged sleeve rods 601 fixedly connected to the bottom of the second annular cover 501. A sleeve 602 is sleeved on the side wall of each sleeve rod 601. The lower end of the sleeve 602 is fixedly connected to the top of the top plate 102. A first spring 603 is sleeved on the side wall of each sleeve 602, which plays a role in guiding and resetting the movement of the second annular cover 501.

[0036] The pushing mechanism includes a connecting block 701 fixedly connected to the bottom of the second annular cover 501. A pushing rod 702 is fixedly connected to the bottom of the connecting block 701. The lower end of the pushing rod 702 penetrates through the bottom of the top plate 102. A fixed box 703 is fixedly inserted into the side wall of the air charging pipe 13. A rotating fan 705 is rotatably connected in the fixed box 703 through a rotating shaft 704. The upper end of the rotating shaft 704 is fixedly connected to a disc 707. A plurality of tapered rods 706 arranged in an array are fixedly connected to the top of the disc 707. The lower end of the pushing rod 702 can slide on the side wall of the tapered rod 706. When the refrigerant passes through the air charging pipe 13, it can enter the fixed box 703 and impact on the surface of the rotating fan 705, so that the rotating fan 705 rotates. When the rotating fan 705 rotates, it can drive the disc 707 and the tapered rods 706 to rotate through the rotating shaft 704. When the side wall of the tapered rod 706 abuts against the lower end of the pushing rod 702, it can push the pushing rod 702 to move upward. At the same time, the second annular cover 501 is driven to move upward through the connecting block 701.

[0037] The water supply mechanism includes a fixing plate 801 fixedly connected to the top of the top plate 102. A water tank 802 is fixedly connected to the upper end of the fixing plate 801. An L-shaped pipe 803 is fixedly connected to the bottom of the water tank 802. The lower end of the L-shaped pipe 803 is fixedly connected to a fixed cover 901. A telescopic pipe 804 is fixedly connected between the fixed cover 901 and the second annular cover 501. An opening and closing component is arranged in the fixed cover 901. When the second annular cover 501 moves upward, the opening and closing component opens. The cooling water in the water tank 802 can enter the second annular cover 501 through the L-shaped pipe 803 and the through hole 904 and then through the telescopic pipe 804, and is applied to the surface of the compressor 104 through the rubber pipe 502. When the second annular cover 501 moves downward and moves to the bottommost position, the opening and closing component closes, which can avoid waste of cooling water.

[0038] The opening and closing assembly includes a sealing plate 902 inserted in the fixed cover 901, and a through hole 904 is opened on the side wall of the sealing plate 902. A second spring 903 is fixedly connected between the sealing plate 902 and the fixed cover 901, and a second L-shaped block 905 is fixedly connected to the top of the second annular cover 501. When the second annular cover 501 moves upward, it drives the second L-shaped block 905 to move upward synchronously and disengage from the sealing plate 902. At this time, the sealing plate 902 can move upward under the action of the second spring 903, and make the through hole 904 coincide with the L-shaped tube 803, and the opening and closing assembly is opened. When the second L-shaped block 905 is against the top of the sealing plate 902, it can push the sealing plate 902 to move downward. At the same time, the first spring 603 is compressed, so that the through hole 904 and the L-shaped tube 803 are staggered, and the opening and closing assembly is closed.

[0039] An impurity absorption system includes an electronic grade fluorine gas refrigeration device and an absorption tower body 18 . The absorption tower body 18 includes an air inlet 1801 and an air outlet 1802 , and the other end of a first discharge pipe 1710 is fixed to the air inlet 1801 .

[0040] Working principle: When in use, when refrigerating electronic-grade fluorine gas, start the compressor 104 to circulate the refrigerant in the pipeline, so that the refrigerant can enter the evaporator 103 through the second pipeline 112 for evaporation and heat absorption. When the pressure sensor 12 detects that the refrigerant pressure in the pipeline is low, the charging valve 16 is opened. At this time, the refrigerant in the storage tank 14 can enter the charging pipe 13 through the charging valve 16, and then enter the second pipeline 112 after the drying action of the drying mechanism, so that the automatic filling of the refrigerant can be realized, which is more convenient and quick to use, and the efficiency and effect of refrigeration are guaranteed. The refrigerant in the pipeline can return to the condenser 105 through the first pipeline 111 for condensation. At the same time, the electronic-grade fluorine gas is introduced into the evaporator 103 through the inlet 107 for refrigeration operation. The refrigerated electronic-grade fluorine gas is discharged through the outlet 108, and its temperature is detected by the first temperature sensor 201.

[0041] When it is detected that the temperature of the electronic-grade fluorine gas is high, the outlet valve 10 can be closed, and at the same time, the third solenoid valve 202 is opened, and the refrigeration power of the entire device is increased. At this time, the electronic-grade fluorine gas can circulate to the inlet 107 through the third solenoid valve 202 and the third U-tube 203, and enter the evaporator 103 again for secondary refrigeration operation to ensure the refrigeration effect. When the first temperature sensor 201 detects that the temperature of the electronic-grade fluorine gas is low, the outlet valve 10 is closed, the fourth solenoid valve 204 is opened, and the refrigeration power of the entire device is reduced. At this time, the electronic-grade fluorine gas can It can enter the first annular cover 301 and the movable cover 302 through the fourth solenoid valve 204 and the first connecting pipe 205, exchange heat with the storage tank 14, and cool it down, which can avoid the high temperature outside the storage tank 14 and ensure its storage effect. Then, it returns to the outlet pipe 11 through the hose 304, the fifth solenoid valve 206 and the second connecting pipe 207. When the second temperature sensor 305 detects that the temperature of the discharged electronic-grade fluorine gas is low, the lifting module 303 can drive the movable cover 302 to move upward, thereby increasing the heat exchange area between it and the storage tank 14 and avoiding waste.

[0042] When cooling, open the first solenoid valve 1707 on the side wall of one of the fixed cylinders 1701, and at the same time, close the second solenoid valve 1711 on its side wall. At this time, the refrigerated electronic-grade fluorine gas enters the fixed cylinder 1701 through the first U-shaped tube 1708 for temporary accumulation. Under the action of pressure, the piston 1702 can be pushed upward. At the same time, the gravity plate 1705 is driven to move upward through the moving rod 1704. When the distance sensor 1706 detects the distance between the gravity plate 1705 and the first L-shaped block 1703, when the gravity plate 1705 moves to the highest position, the first solenoid valve 1707 can be closed and the second solenoid valve 1711 can be opened. At this time, under the constant pressure of the gravity disk 1705, the electronic-grade fluorine gas temporarily stored in the fixed cylinder 1701 is squeezed out through the second solenoid valve 1711 and the second U-shaped tube 1709, and enters the absorption tower body 18 through the first discharge pipe 1710 for impurity absorption treatment. At the same time, the first solenoid valve 1707 on the side wall of the other fixed cylinder 1701 is opened, and the second solenoid valve 1711 is closed. At this time, the refrigerated electronic-grade fluorine gas can enter the other fixed cylinder 1701 for accumulation and temporary storage. This reciprocating process can ensure that the electronic-grade fluorine gas entering the absorption tower body 18 is more uniform, which can improve the efficiency and effect of subsequent impurity absorption.

[0043] During drying, the refrigerant discharged from the storage tank 14 can enter the circular cover 402 through the charging valve 16 and the charging pipe 13, and can be dried by the desiccant in the arc groove 405. The dried refrigerant can enter the second pipeline 112 through the charging pipe 13, thereby ensuring the filling effect. In addition, by starting the motor 404, the rotation of the motor 404 drives the rotation of the rotating disk 403, so that the desiccant in the multiple arc grooves 405 can be rotated to the position of the charging pipe 13 in turn to dry the refrigerant passing through. In addition, when the desiccant rotates to the bottom of the electric heating ring 406, the electric heating ring 406 is started so that the electric heating ring 406 heats the desiccant to remove the adsorbed water vapor. After the water vapor evaporates, it is discharged through the second discharge pipe 407, thereby ensuring the efficiency and effect of subsequent drying.

[0044] Furthermore, when the pressure sensor 12 detects that there is less refrigerant in the pipeline, the compressor 104 will overheat. At the same time, when the refrigerant passes through the charging pipe 13, it can enter the fixed box 703 and impact the surface of the rotary fan 705, so that the rotary fan 705 rotates. When the rotary fan 705 rotates, the disc 707 and the tapered rod 706 can be driven to rotate through the rotating shaft 704. When the side wall of the tapered rod 706 abuts against the lower end of the push rod 702, the push rod 702 can be pushed to move upward. At the same time, the second annular cover 501 is driven to move upward through the connecting block 701, and the first spring 603 is stretched. When the tapered rod 706 passes over the lower end of the push rod 702, the second annular cover 501 can move downward and reset under the action of the first spring 603. This reciprocating process can make the second annular cover 501 reciprocate up and down. When the second annular cover 501 moves upward, it drives the second annular cover 501 to move upward. The L-shaped block 905 moves upward synchronously and disengages from the sealing plate 902. At this time, the sealing plate 902 can move upward under the action of the second spring 903, and make the through hole 904 coincide with the L-shaped tube 803, and the opening and closing assembly is opened. At this time, the cooling water in the water tank 802 can pass through the L-shaped tube 803 and the through hole 904, enter the second annular cover 501 through the telescopic tube 804, and be smeared on the surface of the compressor 104 through the rubber tube 502, so that the heat dissipation efficiency of the compressor 104 is higher and the effect is better, ensuring the refrigeration effect and service life. When the second annular cover 501 moves downward, it can drive the second L-shaped block 905 to move downward synchronously. When the second L-shaped block 905 is against the top of the sealing plate 902, it can push the sealing plate 902 to move downward. At the same time, the first spring 603 is compressed, so that the through hole 904 and the L-shaped tube 803 are staggered, and the opening and closing assembly is closed, thereby avoiding the waste of cooling water.

Claims

1. An electronic-grade fluorine gas refrigeration device, comprising an evaporator (103), a compressor (104), a condenser (105) and a throttle valve (106) arranged on a refrigerator. A first pipeline (111) is arranged between the compressor (104) and the evaporator (103), and a second pipeline (112) is arranged between the throttle valve (106) and the evaporator (103). A third pipeline (109) is arranged between the condenser (105) and the compressor (104), and a fourth pipeline (110) is arranged between the condenser (105) and the throttle valve (106). An inlet (107) and an outlet (108) are arranged on the evaporator (103), and it is characterized in that: It further includes a bottom plate (101) and a top plate (102). The compressor (104), the condenser (105), and the throttle valve (106) are arranged on the top plate (102). The end of the outlet (108) is fixedly connected to an air outlet valve (10). The other end of the air outlet valve (10) is fixedly connected to an air outlet pipe (11). A pressure sensor (12) is fixedly inserted into the side wall of the second pipeline (112). The top of the bottom plate (101) is fixedly connected to a storage tank (14). The storage tank (14) is filled with a refrigerant. A heat preservation shell (15) is fixedly sleeved on the side wall of the storage tank (14). The top of the storage tank (14) is fixedly connected to an inflation valve (16). An inflation pipe (13) is fixedly connected between the inflation valve (16) and the second pipeline (112). A control mechanism for controlling the discharge amount of fluorine gas is arranged on the side wall of the air outlet pipe (11). An adjusting mechanism for adjusting the discharge temperature of fluorine gas is arranged on the side wall of the outlet (108). A drying mechanism for drying the filled refrigerant is arranged on the side wall of the inflation pipe (13). A heat dissipation mechanism for dissipating heat from the compressor (104) is arranged above the top plate (102); The control mechanism includes two symmetrically arranged fixed cylinders (1701) fixedly connected to the top of the bottom plate (101). A first solenoid valve (1707) and a second solenoid valve (1711) are fixedly connected to the side wall of each fixed cylinder (1701). The other end of the first solenoid valve (1707) is fixedly connected to a first U-shaped pipe (1708). The other end of the second solenoid valve (1711) is fixedly connected to a second U-shaped pipe (1709). The first U-shaped pipe (1708) is fixedly connected to the end of the air outlet pipe (11). A first discharge pipe (1710) is fixedly connected to the side wall of the second U-shaped pipe (1709). A first L-shaped block (1703) is fixedly connected to the top of each fixed cylinder (1701). A moving rod (1704) is inserted into the top of the first L-shaped block (1703). The upper end of the moving rod (1704) is fixedly connected to a gravity disk (1705). The lower end of the moving rod (1704) is fixedly connected to a piston (1702). The piston (1702) slides in the fixed cylinder (1701). A distance sensor (1706) is fixedly inserted into the top of the first L-shaped block (1703); The adjusting mechanism includes a first temperature sensor (201) fixedly inserted into the side wall of the outlet (108), and a third solenoid valve (202) is fixedly connected to the side wall of the outlet (108). A third U-shaped pipe (203) is fixedly connected between the output end of the third solenoid valve (202) and the inlet (107). A fourth solenoid valve (204) is fixedly connected to the side wall of the outlet (108), and a fifth solenoid valve (206) is fixedly connected to the top of the heat preservation shell (15). A second connecting pipe (207) is fixedly connected between the fifth solenoid valve (206) and the air outlet pipe (11). A first annular cover (301) is fixedly connected to the bottom of the heat preservation shell (15). A moving cover (302) is slidably connected inside the first annular cover (301). A hose (304) is fixedly connected between the moving cover (302) and the fifth solenoid valve (206), and a second temperature sensor (305) is fixedly inserted into the side wall of the hose (304). A lifting module (303) is arranged between the moving cover (302) and the top of the heat preservation shell (15). The other end of the fourth solenoid valve (204) is fixedly connected to a first connecting pipe (205), and the other end of the first connecting pipe (205) is fixedly inserted into the first annular cover (301).

2. The electronic-grade fluorine gas refrigeration device according to claim 1, characterized in that: The drying mechanism includes a circular cover (402) inserted into the side wall of the charging pipe (13), and the circular cover (402) is communicated with the charging pipe (13). An L-shaped plate (401) is fixedly connected between the circular cover (402) and the storage tank (14). A motor (404) is fixedly connected to the top of the circular cover (402). The output end of the motor (404) penetrates into the circular cover (402) and is fixedly connected to a rotating disk (403). A plurality of arc-shaped grooves (405) penetrating through are formed in the top of the rotating disk (403). Desiccant is filled in the arc-shaped grooves (405), and an electric heating ring (406) is fixedly inserted into the top of the circular cover (402). A second discharge pipe (407) is fixedly inserted into the electric heating ring (406).

3. An electronic-grade fluorine gas refrigeration device according to claim 1, characterized in that: The heat dissipation mechanism includes a second annular cover (501) of a hollow structure sleeved on the side wall of the compressor (104). A plurality of rubber pipes (502) arranged in an array are fixedly inserted into the side wall of the second annular cover (501) close to the compressor (104). A reset mechanism is arranged between the second annular cover (501) and the top plate (102). The movement of the second annular cover (501) is pushed by a pushing mechanism, and a water supply mechanism for supplying water into the second annular cover (501) is arranged above the top plate (102).

4. An electronic-grade fluorine gas refrigeration device according to claim 3, characterized in that: The reset mechanism includes two symmetrically arranged sleeve rods (601) fixedly connected to the bottom of the second annular cover (501). A sleeve (602) is sleeved on the side wall of each sleeve rod (601). The lower end of the sleeve (602) is fixed to the top of the top plate (102), and a first spring (603) is sleeved on the side wall of each sleeve (602).

5. An electronic-grade fluorine gas refrigeration device according to claim 3, characterized in that: The pushing mechanism includes a connecting block (701) fixedly connected to the bottom of the second annular cover (501), and a pushing rod (702) is fixedly connected to the bottom of the connecting block (701). The lower end of the pushing rod (702) penetrates through the bottom of the top plate (102), and a fixed box (703) is fixedly inserted into the side wall of the air charging pipe (13). A rotating fan (705) is rotatably connected in the fixed box (703) through a rotating shaft (704). The upper end of the rotating shaft (704) is fixedly connected to a disc (707). A plurality of tapered rods (706) arranged in an array are fixedly connected to the top of the disc (707), and the lower end of the pushing rod (702) can slide on the side wall of the tapered rod (706).

6. An electronic-grade fluorine gas refrigeration device according to claim 3, characterized in that: The water supply mechanism includes a fixing plate (801) fixedly connected to the top of the top plate (102), and a water tank (802) is fixedly connected to the upper end of the fixing plate (801). An L-shaped pipe (803) is fixedly connected to the bottom of the water tank (802), and a fixing cover (901) is fixedly connected to the lower end of the L-shaped pipe (803). A telescopic pipe (804) is fixedly connected between the fixing cover (901) and the second annular cover (501), and a closing and opening component is arranged in the fixing cover (901).

7. An electronic-grade fluorine gas refrigeration device according to claim 6, characterized in that: The closing and opening component includes a sealing plate (902) inserted into the fixing cover (901). A through hole (904) is formed in the side wall of the sealing plate (902). A second spring (903) is fixedly connected between the sealing plate (902) and the fixing cover (901), and a second L-shaped block (905) is fixedly connected to the top of the second annular cover (501).

8. An impurity absorption system, comprising the electronic grade fluorine gas refrigeration device according to any one of claims 1-7, characterized in that: It further includes an absorption tower body (18). The absorption tower body (18) includes an air inlet (1801) and an air outlet (1802), and the other end of the first discharge pipe (1710) is fixedly connected to the air inlet (1801).

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