Air cooling and water cooling integrated vertical heating furnace and cooling control method thereof

Abstract

The invention discloses an air-cooling and water-cooling integrated vertical heating furnace and a cooling control method thereof. The vertical heating furnace comprises a furnace body, a temperature control system, a water cooling system and an air cooling system, wherein the water cooling system and the air cooling system surround the outer surface of the furnace body; the air cooling system comprises an upper air cooling area, a middle air cooling area and a lower air cooling area which are independently adjusted, so that cold air uniformly flows through the outer surface of the furnace body; a plurality of temperature sensors are arranged on the side portion of the furnace body in the vertical direction so as to monitor temperature changes of different areas of the furnace body in real time. The water cooling system, the air cooling system and the temperature sensor are all connected with the temperature control system, and the temperature control system controls operation of the water cooling system and the air cooling system according to temperature information fed back by the temperature sensor. The cooling device has the characteristics of compact structure, high stability, high cooling efficiency and the like, ensures that a key area of the heating furnace obtains a stronger cooling effect, and improves the flexibility of a vertical heating furnace system to cope with complex process requirements.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and particularly relates to a vertical heating furnace with integrated water and air cooling and its cooling control method. Background Art

[0002] As an important process equipment in the front process of the semiconductor production line, in the semiconductor manufacturing process, the heating furnace body is usually used for various heat treatment processes, such as oxidation, annealing, etc. With the continuous improvement of process technology and the continuous replacement of products, higher and higher requirements are put forward for the heating furnace body. For example, the requirements for temperature accuracy and uniformity in the process are increasing day by day, and higher requirements are placed on the performance of the furnace body. The length of the constant temperature zone in the heating furnace body determines the effective production area range, and the temperature uniformity directly affects the thickness uniformity of the film formed on the surface of the wafer. The traditional cooling methods of the heating furnace body include air cooling and water cooling, each with its own advantages and disadvantages. The air cooling system is simple and easy to maintain, but the cooling efficiency is relatively limited, especially in high-temperature environments. The water cooling system has a high cooling efficiency, but there are problems such as complex system, high cost, and the risk of water leakage. At present, it is difficult for the existing technology to balance the cooling efficiency, cooling cost and operation stability of the heating furnace body, and it is also impossible to achieve negative feedback regulation and rapid response. Summary of the Invention

[0003] The technical problem to be solved by the present invention: Aiming at the above problems of the existing technology, a vertical heating furnace with integrated water and air cooling with a compact structure, high stability and high cooling efficiency and its cooling control method are provided.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is as follows:

[0005] A vertical heating furnace with integrated water and air cooling, including a furnace body, a temperature control system, and a water cooling system and an air cooling system surrounding the outer surface of the furnace body; the air cooling system includes three independently adjustable air cooling zones, upper, middle and lower, to realize uniform flow of cold air through the outer surface of the furnace body; a plurality of temperature sensors are arranged along the vertical direction on the side of the furnace body to monitor the temperature changes in different areas of the furnace body in real time; the water cooling system, the air cooling system and the temperature sensors are all connected to the temperature control system, and the temperature control system controls the operation of the water cooling system and the air cooling system according to the temperature information fed back by the temperature sensors.

[0006] As a further improvement of the present invention, the air cooling system includes an air cooling main pipe, an air inlet and an air outlet are respectively arranged at both ends of the air cooling main pipe, and the air cooling main pipe is sequentially provided with a first branch pipe, a second branch pipe and a third branch pipe surrounding the outer surface of the furnace body along the vertical direction, and a plurality of air supply pipes are arranged on the first branch pipe, the second branch pipe and the third branch pipe to realize uniform distribution of cold air along the outer surface of the furnace body.

[0007] As a further improvement of the present invention, solenoid valves with independent adjustment are provided on the first branch pipe, the second branch pipe, and the third branch pipe to independently control the air output volume.

[0008] As a further improvement of the present invention, the water cooling system includes a main water cooling pipe and a circulating water pipe surrounding the outer surface of the furnace body. The water inlet end and the water outlet end of the circulating water pipe are respectively connected to the main water cooling pipe, and an inlet, an outlet, and an adjustment flowmeter are respectively provided on the main water cooling pipe.

[0009] As a further improvement of the present invention, both the inlet and the outlet are connected to a liquid leakage sensor.

[0010] As a further improvement of the present invention, the circulating water pipe is arranged in close fit with the outer surface of the furnace body, and the air cooling system is located outside the circulating water pipe.

[0011] As a general technical concept, the present invention also provides a cooling control method applicable to the above-mentioned vertical heating furnace with integrated water and air cooling, including the following steps:

[0012] Step S1: A temperature control system is composed of a PLC controller and a control center. The temperature sensor collects the temperature monitoring data of the furnace body and transmits the collected signal to the PLC controller in a hard contact manner.

[0013] Step S2: The PLC controller processes the signal and transmits it to the control center.

[0014] Step S3: The control center calculates the appropriate adjustment amounts of cooling water and cooling air according to the preset program, and then returns the calculated data to the PLC controller.

[0015] Step S4: The PLC controller transmits the signal to the control terminal to adjust the opening degrees of the solenoid valve and the flowmeter, so as to realize the flow control of the cooling air and the cooling water.

[0016] As a further improvement of the present invention, in step S4, the flow control of the cooling air and the cooling water further includes:

[0017] Step S41: After the water cooling system and the air cooling system start to operate, first perform an initialization operation, and then configure the preset opening degree parameters into each memory unit.

[0018] Step S42: After the parameter configuration is completed, according to the furnace body temperature information collected and fed back by the temperature sensor, first control the solenoid valve to roughly adjust the air inlet flow of each air cooling area, and then control the flowmeter to finely adjust the cooling water flow.

[0019] As a further improvement of the present invention, in step S42, the opening degree of the solenoid valve is set to fully closed, 1 / 4, 1 / 2, 3 / 4, and fully open, and each time the opening degree is opened or closed by 1 / 4.

[0020] As a further improvement of the present invention, in step S42, the adjustment of the cooling water flow rate includes the following steps:

[0021] Step S421: During the operation of the water cooling system and the air cooling system, record and store the operating parameters including temperature, solenoid valve opening degree, and cooling water flow rate as part of the data for calculation, and establish a historical database;

[0022] Step S422: Collect the solenoid valve opening degrees and the readings of the flow meters in each air cooling zone during the current operation of the water cooling system and the air cooling system as another part of the data for calculation;

[0023] Step S423: Based on the machine learning algorithm, establish a function model between the solenoid valve opening degree / cooling water flow rate and the temperature distribution, and between the temperature distribution and the operation time, and calculate the relationship between the operation parameters and the temperature and the operation time;

[0024] Step S424: Based on the machine learning algorithm, compare and analyze the real-time parameters of the cooling water flow rate with the historical data to predict the temperature distribution trend in the next time period;

[0025] Step S425: According to the temperature development trend obtained in step S424, calculate the PID adjustment amount according to the optimal regression principle, set the flow rate of the flow meter, and give the cooling water flow rate for realizing temperature stability; after adjustment, return to step S422 to start the next cycle.

[0026] Compared with the prior art, the advantages of the present invention are as follows:

[0027] 1. For the vertical heating furnace with integrated water cooling and air cooling of the present invention, by arranging the water cooling system and the air cooling system around the outer surface of the furnace body, and setting the air cooling system as three independently adjustable air cooling zones in the upper, middle, and lower parts, the cold air can flow evenly through the outer surface of the furnace body. Through the optimized air duct design, the air flow path is enhanced, the cooling efficiency is improved, and the stable operation of the equipment in a high-temperature environment is ensured; at the same time, a plurality of temperature sensors are arranged along the vertical direction on the side of the furnace body to accurately monitor the temperature changes in different areas of the furnace body. Then, the water cooling system, the air cooling system, and the temperature sensors are connected to the temperature control system. The temperature control system controls the operation of the water cooling system and the air cooling system according to the temperature information fed back by the temperature sensors, can accurately control the cooling effect, reduce heat accumulation, improve the temperature uniformity, and achieve the purpose of rapid cooling.

[0028] 2. The cooling control method of the vertical heating furnace with integrated air and water cooling according to the present invention, based on temperature feedback, first roughly adjusts the cold air flow rate in each air-cooling zone, and then calculates the required cooling water flow rate in real time through the PID algorithm, quickly responds to the temperature fluctuation of the furnace body, and adjusts the air intake and water intake in real time, enhancing the cooling efficiency and ensuring the stable operation of the equipment in a high-temperature environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic structural principle diagram of the vertical heating furnace in a specific embodiment of the present invention;

[0030] Figure 2 It is a schematic structural principle diagram of another perspective of the vertical heating furnace in a specific embodiment of the present invention;

[0031] Figure 3 It is a schematic structural principle diagram of the air-cooling pipeline in a specific embodiment of the present invention;

[0032] Figure 4 It is a schematic structural principle diagram of another perspective of the air-cooling pipeline in a specific embodiment of the present invention;

[0033] Figure 5 It is a schematic structural principle diagram of the water-cooling pipeline in a specific embodiment of the present invention;

[0034] Figure 6 It is a schematic diagram of the cooling control process of the vertical heating furnace in a specific embodiment of the present invention;

[0035] Figure 7 It is a schematic diagram of the principle of the control system in a specific embodiment of the present invention;

[0036] Figure 8 It is a schematic diagram of the control of the solenoid valve and the flow meter in a specific embodiment of the present invention;

[0037] Figure 9 It is a schematic diagram of the cooling water flow control in a specific embodiment of the present invention;

[0038] Figure 10 It is a schematic diagram of the data processing logic of the control center in a specific embodiment of the present invention;

[0039] Legend: 1. Furnace body; 2. Temperature sensor; 3. Leakage sensor; 4. Water-cooling main pipe; 5. Air-cooling main pipe; 6. Outer shell; 7. Water inlet; 8. Water outlet; 9. Circulation water pipe; 10. Air supply pipe; 11. Air inlet; 12. Air outlet; 13. Support base; 51. First branch pipe; 52. Second branch pipe; 53. Third branch pipe. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0040] The present invention will be further described below in conjunction with the accompanying drawings of the specification and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0041] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0042] In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, the meaning of "a plurality" is two or more, unless otherwise specifically defined.

[0043] Embodiment 1

[0044] As Figure 1 and Figure 2 shown, the vertical heating furnace with integrated water and air cooling of the present invention includes a furnace body 1, a temperature control system (not shown in the figure), and a water cooling system and an air cooling system surrounding the outer surface of the furnace body 1. As Figure 1 shown, an outer shell 6 is further provided outside the furnace body 1, and a support base 13 is provided at the bottom of the furnace body 1. The water cooling system and the air cooling system are both covered inside the outer shell 6. The air cooling system includes three independently adjustable air cooling zones, upper, middle, and lower, to enable cold air to flow evenly through the outer surface of the furnace body 1. Five temperature sensors 2 (thermocouples) are arranged along the vertical direction on the side of the furnace body 1 to monitor the temperature changes in different regions of the furnace body 1 in real time. The water cooling system, the air cooling system, and the temperature sensors 2 are all connected to the temperature control system. The temperature control system controls the operation of the water cooling system and the air cooling system according to the temperature information fed back by the temperature sensors 2 to achieve rapid cooling of the furnace body 1. In this embodiment, the five temperature sensors 2 are evenly arranged at the key parts of the furnace body 1 to monitor the temperature changes in five temperature zones in real time. When the temperature of a certain part exceeds the preset value, the water flow or the cooling air volume can be adjusted by adjusting the water cooling system and the air cooling system through the temperature control system, so as to rapidly reduce the temperature of this area.

[0045] In this embodiment, by arranging the water-cooling system and the air-cooling system around the outer surface of the furnace body 1, and setting the air-cooling system into three independently adjustable air-cooling zones, namely the upper, middle, and lower zones, the cold air can flow evenly through the outer surface of the furnace body 1. Through the optimized air duct design, the air flow path is enhanced, and the cooling efficiency is improved, ensuring the stable operation of the equipment in a high-temperature environment. At the same time, a plurality of temperature sensors 2 are arranged vertically on the side of the furnace body 1 to accurately monitor the temperature changes in different areas of the furnace body 1. Then, the water-cooling system, the air-cooling system, and the temperature sensors 2 are connected to the temperature control system. The temperature control system controls the operation of the water-cooling system and the air-cooling system according to the temperature information feedback by the temperature sensors 2, which can accurately control the cooling effect, reduce heat accumulation, improve the temperature uniformity, and achieve the purpose of rapid cooling.

[0046] As Figure 2 , Figure 3 and Figure 4 shown, the air-cooling system includes an air-cooling main pipe 5. An air inlet 11 and an air outlet 12 are respectively arranged at both ends of the air-cooling main pipe 5 to form an air-cooling cycle. The air-cooling main pipe 5 is successively provided with a first branch pipe 51, a second branch pipe 52, and a third branch pipe 53 surrounding the outer surface of the furnace body 1 along the vertical direction to form three independently adjustable air-cooling zones. Four air supply pipes 10 are arranged on each of the first branch pipe 51, the second branch pipe 52, and the third branch pipe 53 to realize the uniform distribution of cold air along the outer surface of the furnace body 1.

[0047] Furthermore, independently adjustable solenoid valves (not shown in the figure) are arranged on each of the first branch pipe 51, the second branch pipe 52, and the third branch pipe 53 to realize the independent control of the air output volume.

[0048] In this embodiment, combined with the heating temperature zone distribution of the vertical heating furnace, the upper, middle, and lower three-way air-cooling channels are evenly distributed along the outer wall of the furnace body 1. Each air duct is equipped with an independently adjustable solenoid valve, enabling the cold air to fully flow through the outer surface of the furnace body 1. Through the zonal regulation of the air duct, energy can be saved, a stronger cooling effect can be ensured in the key areas, and at the same time, the flexibility of the system to meet complex process requirements is improved.

[0049] As Figure 2 and Figure 4 shown, the water-cooling system includes a water-cooling main pipe 4 and a circulating water pipe 9 surrounding the outer surface of the furnace body 1. The water inlet end and the water outlet end of the circulating water pipe 9 are respectively connected to the water-cooling main pipe 4. An inlet 7, an outlet 8, and an adjustable flowmeter (not shown in the figure) are respectively arranged on the water-cooling main pipe 4. In this embodiment, the corresponding coolant can be rotated according to the process environment. Common coolants include deionized water or special coolants to ensure good heat conduction effects. At the same time, materials with high thermal conductivity are used inside the pipeline to further improve the heat conduction effect.

[0050] As Figure 5 shown, the circulating water pipe 9 is arranged in contact with the outer surface of the furnace body 1, and the air-cooling system is located outside the circulating water pipe 9. The circulating water pipe 9 is directly in contact with the outer surface of the furnace body 1, increasing the contact area with the furnace body 1, which is beneficial to the heat transfer from the furnace body 1 to the circulating water by means of heat conduction, and can quickly absorb the heat of the furnace body 1 and take it away, playing a role of preliminary cooling. The air-cooling system is located outside the circulating water pipe 9, and the air is made to flow rapidly through the fan, forming a convection outside the circulating water pipe 9 to further accelerate the heat dissipation. At the same time, the circulating water pipe 9 can also make the cooling of each part of the furnace body 1 more uniform, avoiding the deformation or damage of the structure of the furnace body 1 caused by too fast or too slow local cooling. The uniform arrangement of the air-cooling system outside the circulating water pipe further enhances this uniform cooling effect. The water-cooling system and the air-cooling system are independent of each other and cooperate with each other. Through the synergistic effect of the water-cooling system and the air-cooling system, the temperature gradient on the surface of the furnace body 1 can be effectively reduced, and the thermal stress caused by too large a temperature difference can be reduced. Thus, the service life of the heating furnace is prolonged. Even if one of the cooling methods fails, the other cooling method can still continue to work, providing a certain cooling effect for the furnace body and improving the reliability and safety of the cooling system.

[0051] As Figure 1 shown, both the water inlet 7 and the water outlet 8 are connected to the liquid leakage sensor 3. When the liquid leakage abnormality is detected, the system will immediately alarm and stop heating, avoiding the risk of equipment damage or process interruption caused by water leakage and ensuring the normal and safe operation of the equipment.

[0052] In the specific implementation process, the heating furnace with combined air-cooling and water-cooling of the present invention can be flexibly adjusted according to different process requirements. Through the combination of the air-cooling and water-cooling dual cooling systems, the present invention effectively solves the contradiction between efficiency and complexity in the traditional cooling method, and is particularly suitable for semiconductor manufacturing equipment with strict temperature control requirements, which helps to improve the product yield and ensure the long-term stable operation of the equipment.

[0053] Embodiment 2

[0054] As Figure 6 shown, the cooling control method of the present invention is mainly applicable to the vertical heating furnace in Embodiment 1, and includes the following steps:

[0055] Step S1, as Figure 7 shown, a temperature control system is composed of a PLC controller and a control center (computer); the temperature sensor 2 collects the temperature monitoring data of the furnace body 1 and transmits the collected signal to the PLC controller in a hard contact manner;

[0056] Step S2, the PLC controller processes the signal and transmits it to the control center;

[0057] Step S3: The control center calculates the appropriate adjustment amounts of cooling water and cooling air according to the preset program, and then returns the calculated data to the PLC controller;

[0058] Step S4: The PLC controller transmits the signal to the control terminal to adjust the opening degrees of the solenoid valve and the flowmeter, so as to realize the flow control of the cooling air and the cooling water.

[0059] As Figure 8 shown, in step S4 of this embodiment, the flow control of the cooling air and the cooling water further includes:

[0060] Step S41: After the water-cooling system and the air-cooling system start to operate, first perform the initialization operation, and then configure the preset opening degree parameters to each memory unit;

[0061] Step S42: After the parameter configuration is completed, according to the temperature information of the furnace body 1 collected and fed back by the temperature sensor 2, first control the solenoid valve to roughly adjust the air inlet flow of each air-cooling area, and then control the flowmeter to finely adjust the cooling water flow.

[0062] In step S42 of this embodiment, the opening degrees of the solenoid valve are set to fully closed, 1 / 4, 1 / 2, 3 / 4, and fully open, and each time the opening degree is opened or closed by 1 / 4. Before controlling the solenoid valve to act, first judge whether the solenoid valve is open or closed. After roughly adjusting the air volume, then finely adjust the cooling water flow. Judge whether to increase or decrease the cooling water flow according to the difference between the current temperature and the set temperature, transmit the flow information to the computer, and then judge whether the temperature is stable.

[0063] As Figure 9 shown, in step S42 of this embodiment, the adjustment of the cooling water flow includes the following steps:

[0064] Step S421: During the operation of the water-cooling system and the air-cooling system, record and store the operation parameters including temperature, solenoid valve opening degree, and cooling water flow as part of the calculation data, and establish a historical database;

[0065] Step S422: Collect the opening degrees of the solenoid valves and the readings of the flowmeters in each air-cooling area during the operation of the current water-cooling system and air-cooling system as the other part of the calculation data;

[0066] Step S423: Based on the machine learning algorithm, establish the function models between the solenoid valve opening degree / cooling water flow and the temperature distribution, and between the temperature distribution and the operation time, and calculate the relationship between the operation parameters and the temperature and the operation time;

[0067] Step S424: Based on machine learning algorithms (such as KNN algorithm, random forest model, long short-term method, etc.), compare and analyze the real-time parameters of the cooling water flow rate with the historical data to predict the temperature distribution trend in the next time period;

[0068] Step S425: According to the temperature development trend obtained in step S424, calculate the PID adjustment amount based on the optimal regression principle, set the flow rate of the flow meter, and give the cooling water flow rate to achieve temperature stability. After adjustment, return to step S422 to start the next cycle. Considering the hysteresis of the cooling process, the flow rate adopts PID tuning and negative feedback regulation, and analyzes and adjusts the water flow rate in real time based on the temperature and flow rate data.

[0069] In this embodiment, the data processing logic of the control center is as Figure 10 shown. The data processing process is a process of continuous iteration with time steps. After each run, engineering files and working log files are generated and saved, which can be used as a reference for subsequent program modification. The control center analyzes the relationship between the solenoid valve opening, cooling water flow rate, time, and temperature by processing the current running data and historical data, and re-sets the parameters of the cooling water flow rate.

[0070] The temperature control system of this embodiment has the ability of negative feedback regulation. The air cooling can independently adjust the air volume at the outlet of each air duct through the solenoid valve to roughly adjust the cooling capacity; the water cooling adopts negative feedback regulation and PID tuning to accurately control the water outlet flow rate and stabilize the furnace body temperature.

[0071] The above is only the preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions falling within the idea of the present invention belong to the protection scope of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. A vertical heating furnace with integrated air and water cooling, characterized in that: The invention comprises a furnace body (1), a temperature control system, and a water cooling system and an air cooling system surrounding the outer surface of the furnace body (1); the air cooling system comprises three independently adjustable air cooling zones, namely, upper, middle and lower zones, so as to realize that cold air flows evenly through the outer surface of the furnace body (1); a plurality of temperature sensors (2) are arranged on the side of the furnace body (1) along the vertical direction so as to monitor the temperature changes of different areas of the furnace body (1) in real time; the water cooling system, the air cooling system and the temperature sensor (2) are all connected to the temperature control system, and the temperature control system controls the operation of the water cooling system and the air cooling system according to the temperature information fed back by the temperature sensor (2).

2. The air-water-cooled vertical heating furnace according to claim 1, characterized in that: The air cooling system comprises an air cooling main pipe (5), the two ends of which are respectively provided with an air inlet (11) and an air outlet (12), the air cooling main pipe (5) is provided with a first branch pipe (51), a second branch pipe (52) and a third branch pipe (53) in sequence along the vertical direction and surrounding the outer surface of the furnace body (1), and the first branch pipe (51), the second branch pipe (52) and the third branch pipe (53) are each provided with a plurality of air supply pipes (10) to achieve uniform distribution of cold air along the outer surface of the furnace body (1).

3. The air-water-cooled vertical heating furnace according to claim 2, characterized in that: The first branch pipe (51), the second branch pipe (52) and the third branch pipe (53) are each provided with an independently adjustable solenoid valve to achieve independent control of the air output volume.

4. The air-water-cooled vertical heating furnace according to any one of claims 1 to 3, characterized in that: The water cooling system comprises a water cooling main pipe (4) and a circulating water pipe (9) surrounding the outer surface of the furnace body (1); a water inlet end and a water outlet end of the circulating water pipe (9) are respectively connected to the water cooling main pipe (4); and a water inlet (7), a water outlet (8) and a regulating flow meter are respectively provided on the water cooling main pipe (4).

5. The air-water-cooled vertical heating furnace according to claim 4, characterized in that: The water inlet (7) and the water outlet (8) are both connected to the liquid leakage sensor (3).

6. The air-water-cooled vertical heating furnace according to claim 4, characterized in that: The circulating water pipe (9) is arranged in contact with the outer surface of the furnace body (1), and the air cooling system is located outside the circulating water pipe (9).

7. A cooling control method applicable to the air-water-cooled vertical heating furnace according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step S1, a temperature control system is formed by a PLC controller and a control center, a temperature sensor (2) collects temperature monitoring data of the furnace body (1), and transmits the collected signal to the PLC controller through a hard contact method; Step S2: The PLC controller processes the signal and transmits it to the control center; Step S3: The control center calculates the appropriate cooling water and cooling air adjustment amounts according to a preset program, and then returns the calculated data to the PLC controller; Step S4, the PLC controller transmits the signal to the control terminal to adjust the opening of the solenoid valve and the flow meter to achieve flow control of the cooling air and cooling water.

8. The cooling control method according to claim 7, characterized in that: In step S4, the flow control of cooling air and cooling water further includes: Step S41: When the water cooling system and the air cooling system start to operate, an initialization operation is first performed, and then the preset opening parameters are configured to each memory unit; Step S42, after the parameter configuration is completed, based on the temperature information of the furnace body (1) collected and fed back by the temperature sensor (2), the solenoid valve is first controlled to roughly adjust the air flow rate of each air cooling zone, and then the flow meter is controlled to finely adjust the cooling water flow rate.

9. The cooling control method according to claim 8, characterized in that: In step S42, the opening of the solenoid valve is set to fully closed, 1 / 4, 1 / 2, 3 / 4 and fully open, and 1 / 4 of the opening is opened or closed each time.

10. The cooling control method according to claim 8, characterized in that: In step S42, the adjustment of the cooling water flow rate includes the following steps: Step S421, during the operation of the water cooling system and the air cooling system, the operating parameters including temperature, solenoid valve opening, and cooling water flow are recorded and stored as part of the calculation data, and a historical database is established; Step S422, collecting the solenoid valve opening and flow meter reading of each air cooling zone when the water cooling system and the air cooling system are currently running, as another part of the data for calculation; Step S423: Based on the machine learning algorithm, a function model between the solenoid valve opening / cooling water flow and the temperature distribution, and the temperature distribution and the operating time is established, and the relationship between the operating parameters and the temperature and the operating time is calculated; Step S424: Compare and analyze the real-time parameters of the cooling water flow rate with the historical data based on the machine learning algorithm to predict the temperature distribution trend in the next time period; Step S425, based on the temperature development trend obtained in step S424, calculate the PID adjustment amount according to the optimal regression principle, adjust the flow meter flow, and give the cooling water flow to achieve temperature stability; after adjustment, return to step S422 to start the next cycle.

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