Gas mass flow control equipment and control method thereof

Abstract

The invention discloses gas mass flow control equipment and a control method thereof. The gas mass flow control equipment comprises a gas inlet pipe, a one-way valve I, an electromagnetic reversing valve I, a gas cylinder body I, a gas cylinder body II, an electromagnetic reversing valve II, a one-way valve II, a peristaltic pump and a gas outlet pipe, the electromagnetic reversing valve I and the electromagnetic reversing valve II are two-position three-way electromagnetic reversing valves, the air inlet pipe is communicated with an air inlet P of the electromagnetic reversing valve I through a pipeline and a one-way valve I, a working port A of the electromagnetic reversing valve I is communicated with the air inlet end of the air cylinder body I through a pipeline, and a working port B of the electromagnetic reversing valve I is communicated with the air inlet end of the air cylinder body II through a pipeline. A working port A of the electromagnetic reversing valve II is communicated with the gas outlet end of the gas cylinder body I through a pipeline, a working port B of the electromagnetic reversing valve II is communicated with the gas outlet end of the gas cylinder body II through a pipeline, and a gas outlet T of the electromagnetic reversing valve II is communicated with the gas outlet pipe sequentially through the one-way valve II and the peristaltic pump. The flow and mass of input gas can be directly and effectively controlled, and the effect of replacing an MFC gas mass flow controller is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of gas mass flow control, and particularly relates to a gas mass flow control device and a control method thereof. Background Art

[0002] A bioreactor is a culture system that provides a growth environment for microorganisms or cells. During the culture process, gases such as oxygen, nitrogen, and carbon dioxide need to be introduced into the reactor to maintain the environment; and the flow rate and quality of the introduced gases need to be artificially controlled under conditions favorable for culture, which requires controlling the input amount of the gases. Generally, an MFC (Mass Flow Controller, gas mass flow controller, hereinafter referred to as MFC) is used to control the mass flow rate of the introduced gases.

[0003] However, due to different manufacturers of MFCs, the factory-calibrated CF (Conversion Factor, gas conversion factor, hereinafter referred to as CF) of MFCs is different, resulting in the values displayed by the control being inconsistent with the actual values when different types of gases are input, and further conversion is required. In addition, when the gas to be input is wet or corrosive, it may cause damage to the MFC channels; at this time, additional drying treatment of the gas and the MFC pipeline system is required, and the operation is rather cumbersome. Therefore, the above problems need to be solved urgently. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a gas mass flow control device and a control method thereof, which can directly and effectively control the flow rate and quality of the input gas, so as to replace the MFC gas mass flow controller.

[0005] To solve the above technical problem, the present invention adopts the following technical solutions: A gas mass flow control device of the present invention is characterized in that: it includes an air inlet pipe, a one-way valve I, an electromagnetic reversing valve I, a gas cylinder I, a gas cylinder II, an electromagnetic reversing valve II, a one-way valve II, a peristaltic pump, and an air outlet pipe; both the gas cylinder I and the gas cylinder II are horizontally arranged hollow structures and are arranged side by side at intervals; both the electromagnetic reversing valve I and the electromagnetic reversing valve II are two-position three-way electromagnetic reversing valves, and the air inlet pipe is connected to the air inlet P of the electromagnetic reversing valve I through a pipeline via the one-way valve I, the working port A of the electromagnetic reversing valve I is connected to the air inlet end of the gas cylinder I through a pipeline, and its working port B is connected to the air inlet end of the gas cylinder II through a pipeline; the working port A of the electromagnetic reversing valve II is connected to the air outlet end of the gas cylinder I through a pipeline, and its working port B is connected to the air outlet end of the gas cylinder II through a pipeline, and its air outlet T is connected to the air outlet pipe through a pipeline via the one-way valve II and the peristaltic pump in sequence.

[0006] Preferably, the flow direction of the check valve I needs to ensure that the gas entering through the intake pipe flows into the gas cylinder I or the gas cylinder II under the control of the electromagnetic reversing valve I, so as to realize inflation, and prevent gas backflow from damaging the equipment and pipelines during this process.

[0007] Preferably, a pressure reducing valve and a filter are also connected in series and at intervals on the pipeline connecting the intake pipe and the check valve I, and the pressure reducing valve is arranged on the side close to the intake pipe, so as to adjust the intake pressure through the pressure reducing valve and filter the impurities in the gas through the filter.

[0008] Preferably, the flow direction of the check valve II needs to ensure that the gas coming out of the outlet T of the electromagnetic reversing valve II flows to the peristaltic pump, so as to realize exhaust, and prevent gas backflow from damaging the equipment and pipelines during this process.

[0009] Preferably, a pressure gauge I for detecting the gas pressure in the gas cylinder I is also connected on the pipeline connecting the working port A of the electromagnetic reversing valve II and the gas cylinder I, and a pressure gauge II for detecting the gas pressure in the gas cylinder II is also connected on the pipeline connecting the working port B of the electromagnetic reversing valve II and the gas cylinder II; a temperature probe I is also arranged on the inner side of the gas cylinder I close to its intake end, and the temperature probe I is used to measure the gas temperature in the gas cylinder I; a temperature probe II is also arranged on the inner side of the gas cylinder II close to its intake end, and the temperature probe II is used to measure the gas temperature in the gas cylinder II.

[0010] Preferably, a pressure gauge III and a solenoid valve III are also connected in series and at intervals on the pipeline connecting the check valve II and the peristaltic pump, and the pressure gauge III is arranged on the side close to the check valve II, and the pressure gauge III is used to measure the exhaust pressure; the solenoid valve III adopts a two-position two-way reversing valve, and through the coordinated use of the pressure gauge III and the solenoid valve III, the gas in the pipeline is released when the exhaust pressure is too high, so as to reduce the pipeline pressure and prevent damage to the equipment and pipelines.

[0011] Preferably, it further includes an upper housing and a lower housing; the lower housing is a U-shaped structure with an open groove arranged horizontally in the transverse direction, and its open end faces upward; the intake pipe is embedded and opened on the front surface of the lower housing, and the outlet pipe is embedded and opened on the rear surface of the lower housing; the gas cylinder I and the gas cylinder II are arranged side by side at intervals in the front and rear on the left side position of the inner bottom surface of the lower housing, and the pressure reducing valve, filter, check valve I, electromagnetic directional control valve I, pressure gauge I, pressure gauge II, electromagnetic directional control valve II, check valve II, pressure gauge III, solenoid valve III, peristaltic pump and the pipelines communicating with each other are integrally arranged inside the lower housing; the upper housing is a U-shaped structure matching the lower housing, and its open groove is arranged vertically in the horizontal direction, the open end of the upper housing faces downward, and is screwed and docked with the lower housing up and down to form an integral module.

[0012] A control method for a gas mass flow control device of the present invention is characterized in that it includes the following steps: (1) Exhaust process (1.1) First, the spool of the electromagnetic directional control valve I moves upward, so that the intake port P of the electromagnetic directional control valve I communicates with its working port A. At the same time, the spool of the electromagnetic directional control valve II moves upward, so that the outlet port T of the electromagnetic directional control valve II communicates with its working port A. Then, the solenoid valve III is opened; (1.2) Then, the required gas enters the pressure reducing valve from the intake pipe for pressure adjustment, and then is sent to the filter to filter out impurities in the gas; (1.3) The filtered gas is charged into the gas cylinder I through the electromagnetic directional control valve I, and the initial air in the gas cylinder I is pushed towards the electromagnetic directional control valve II and then discharged through the solenoid valve III; (1.4) After the gas cylinder I finishes exhausting, the spool of the electromagnetic directional control valve I moves downward, so that the intake port P of the electromagnetic directional control valve I communicates with its working port B. At the same time, the spool of the electromagnetic directional control valve II moves downward, so that the outlet port T of the electromagnetic directional control valve II communicates with its working port B; (1.5) Then, the filtered gas is charged into the gas cylinder II through the electromagnetic directional control valve I, and the initial air in the gas cylinder II is pushed towards the electromagnetic directional control valve II and then discharged through the solenoid valve III; (1.6) After the gas cylinder II finishes exhausting, the solenoid valve III is closed; (2) Ventilation operation (2.1) Then, the spool of the electromagnetic directional control valve I moves upward, so that the intake port P of the electromagnetic directional control valve I communicates with its working port A. At the same time, the spool of the electromagnetic directional control valve II moves upward, so that the outlet port T of the electromagnetic directional control valve II communicates with its working port A; (2.2)Set the working pressure values of pressure gauge Ⅰ and pressure gauge Ⅱ to be the same, and then fill the gas cylinder Ⅰ with the filtered gas through the electromagnetic reversing valve Ⅰ until the working pressure value set by pressure gauge Ⅰ is reached; at this time, the spool of the electromagnetic reversing valve Ⅰ moves downward, making the inlet port P of the electromagnetic reversing valve Ⅰ communicate with its working port B; (2.3)Measure the gas temperature in the gas cylinder Ⅰ through the temperature probe Ⅰ, and then according to the formula m = ρ*V = (P*V) / (R*T), the total weight of the gas in the gas cylinder Ⅰ can be calculated as M 1总 ; In the formula, m represents the gas mass per unit volume; ρ represents the gas density; V represents the gas volume; P represents the gas pressure; R represents the gas constant; T represents the gas temperature; (2.4)Then start the peristaltic pump and extract the gas at the set flow rate value. At this time, the gas in the gas cylinder Ⅰ decreases; the gas volume is known, then measure the gas temperature in the gas cylinder Ⅰ through the temperature probe Ⅰ, and then according to the formula m = ρ*V = (P*V) / (R*T), the remaining gas mass M in the gas cylinder Ⅰ can be calculated 1现 ; At this time, according to the formula M 1输入 = M 1总 - M 1现 , the mass of the gas input through the gas cylinder Ⅰ can be calculated as M 1输入 ; (2.5)During this process, fill the gas cylinder Ⅱ with the filtered gas through the electromagnetic reversing valve Ⅰ until the working pressure value set by pressure gauge Ⅱ is reached; at this time, measure the gas temperature in the gas cylinder Ⅱ through the temperature probe Ⅱ, and then according to the formula m = ρ*V = (P*V) / (R*T), the total weight of the gas in the gas cylinder Ⅱ can be calculated as M 2总 ; (2.6)When the pressure value of the gas cylinder Ⅰ reaches the set minimum value, the spool of the electromagnetic reversing valve Ⅰ moves upward, making the inlet port P of the electromagnetic reversing valve Ⅰ communicate with its working port A. At the same time, the spool of the electromagnetic reversing valve Ⅱ moves downward, making the outlet port T of the electromagnetic reversing valve Ⅱ communicate with its working port B; (2.7)Then fill the gas cylinder Ⅰ with gas through the electromagnetic reversing valve Ⅰ until the working pressure value set by pressure gauge Ⅰ is reached; at the same time, extract gas from the gas cylinder Ⅱ through the peristaltic pump and calculate the mass of the gas input through the gas cylinder Ⅱ in the same way as above as M 2输入 ; (2.8)When the pressure value of the gas cylinder Ⅱ reaches the set minimum value, the spool of the electromagnetic reversing valve Ⅰ moves downward, making the inlet port P of the electromagnetic reversing valve Ⅰ communicate with its working port B. At the same time, the spool of the electromagnetic reversing valve Ⅱ moves upward, making the outlet port T of the electromagnetic reversing valve Ⅱ communicate with its working port A, and then repeat the above actions to form a cycle.

[0013] Advantages of the present invention: (1) The present invention can directly and effectively control the flow rate and quality of the input gas, so as to replace the function of the MFC gas mass flow controller.

[0014] (2) Through the cooperative switching of gas cylinder I and gas cylinder II, the present invention ensures the continuous operation without interruption. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 It is a schematic structural diagram of a gas mass flow control device of the present invention.

[0017] Figure 2 It is a schematic diagram of the principle of a gas mass flow control method of the present invention.

[0018] Among them, 1 - intake pipe; 2 - pressure reducing valve; 3 - filter; 4 - check valve I; 5 - electromagnetic directional valve I; 6 - gas cylinder I; 7 - temperature probe I; 8 - pressure gauge I; 9 - gas cylinder II; 10 - temperature probe II; 11 - pressure gauge II; 12 - electromagnetic directional valve II; 13 - check valve II; 14 - pressure gauge III; 15 - solenoid valve III; 16 - peristaltic pump; 17 - outlet pipe; 18 - lower housing. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The technical solutions of the present invention will be clearly and completely described below through specific embodiments.

[0020] A gas mass flow control device of the present invention includes an intake pipe 1, a check valve I 4, an electromagnetic directional valve I 5, a gas cylinder I 6, a gas cylinder II 9, an electromagnetic directional valve II 12, a check valve II 13, a peristaltic pump 16 and an outlet pipe 17; as Figure 1 、 Figure 2 shown, both the gas cylinder I 6 and the gas cylinder II 9 are horizontally arranged hollow structures, and the two are arranged side by side at intervals; both the electromagnetic directional valve I 5 and the electromagnetic directional valve II 12 are two-position three-way electromagnetic directional valves, and the intake pipe 1 is connected to the intake port P of the electromagnetic directional valve I 5 through a pipeline via the check valve I 4. The working port A of the electromagnetic directional valve I 5 is connected to the intake end of the gas cylinder I 6 through a pipeline, and its working port B is connected to the intake end of the gas cylinder II 9 through a pipeline.

[0021] As Figure 1 、Figure 2 As shown in the figure, the flow direction of the one-way valve I 4 needs to ensure that the gas entering through the intake pipe 1 flows into the gas cylinder I 6 or the gas cylinder II 9 under the control of the electromagnetic reversing valve I 5, so as to realize inflation, and prevent gas backflow from damaging the equipment and pipelines during this process.

[0022] Such as Figure 1 , Figure 2 As shown in the figure, a pressure reducing valve 2 and a filter 3 are also connected in series at intervals on the pipeline connecting the intake pipe 1 and the one-way valve I 4, and the pressure reducing valve 2 is arranged on the side close to the intake pipe 1, so as to adjust the intake pressure through the pressure reducing valve 2 and filter the impurities in the gas through the filter 3.

[0023] In the present invention, the working port A of the electromagnetic reversing valve II 12 is connected to the outlet end of the gas cylinder I 6 through a pipeline, and its working port B is connected to the outlet end of the gas cylinder II 9 through a pipeline. Its outlet port T is connected to the outlet pipe 17 through a pipeline, passing through the one-way valve II 13 and the peristaltic pump 16 in sequence; such as Figure 1 , Figure 2 As shown in the figure, a pressure gauge I 8 for detecting the gas pressure in the gas cylinder I 6 is also connected on the pipeline connecting the working port A of the electromagnetic reversing valve II 12 and the gas cylinder I 6, and a pressure gauge II 11 for detecting the gas pressure in the gas cylinder II 9 is also connected on the pipeline connecting the working port B of the electromagnetic reversing valve II 12 and the gas cylinder II 9; a temperature probe I 7 is also provided on the inner side of the gas cylinder I 6 near its intake end, and the gas temperature in the gas cylinder I 6 is measured through the temperature probe I 7; a temperature probe II 10 is also provided on the inner side of the gas cylinder II 9 near its intake end, and the gas temperature in the gas cylinder II 9 is measured through the temperature probe II 10.

[0024] Such as Figure 1 , Figure 2 As shown in the figure, the flow direction of the one-way valve II 13 needs to ensure that the gas coming out of the outlet port T of the electromagnetic reversing valve II 12 flows to the peristaltic pump 16, so as to realize exhaust, and prevent gas backflow from damaging the equipment and pipelines during this process.

[0025] Such as Figure 1 , Figure 2 As shown in the figure, a pressure gauge III 14 and a solenoid valve III 15 are also connected in series at intervals on the pipeline connecting the one-way valve II 13 and the peristaltic pump 16, and the pressure gauge III 14 is arranged on the side close to the one-way valve II 13, and the exhaust pressure is measured through the pressure gauge III 14; the solenoid valve III 15 adopts a two-position two-way reversing valve, and through the combined use of the pressure gauge III 14 and the solenoid valve III 15, the gas in the pipeline is released when the exhaust pressure is too high, so as to reduce the pipeline pressure and prevent damage to the equipment and pipelines.

[0026] In the present invention, the lower housing 18 is a U-shaped structure with an open groove arranged horizontally in the transverse direction, and its open end faces upward; such asFigure 1 As shown, the intake pipe 1 is embedded in the front surface of the lower housing 18, and the exhaust pipe 17 is embedded in the rear surface of the lower housing 18; the gas cylinder I 6 and the gas cylinder II 9 are arranged side by side at intervals in the front-rear direction at the left side position of the inner bottom surface of the lower housing 18, and the pressure reducing valve 2, the filter 3, the check valve I 4, the electromagnetic directional valve I 5, the pressure gauge I 8, the pressure gauge II 11, the electromagnetic directional valve II 12, the check valve II 13, the pressure gauge III 14, the solenoid valve III 15, the peristaltic pump 16 and the pipelines communicating with each other are integrally arranged inside the lower housing 18; the upper housing is a U-shaped structure matching the lower housing 18, and its opening groove is arranged along the horizontal longitudinal direction, the open end of the upper housing is arranged downward, and is butt-jointed and screwed with the lower housing 18 to form an integral module.

[0027] A control method for a gas mass flow control device of the present invention, as Figure 1 、 Figure 2 shown, includes the following steps: (1) Exhaust process (1.1) First, the spool of the electromagnetic directional valve I 5 moves upward, so that the intake port P of the electromagnetic directional valve I 5 is communicated with its working port A, and at the same time, the spool of the electromagnetic directional valve II 12 moves upward, so that the exhaust port T of the electromagnetic directional valve II 12 is communicated with its working port A, and then the solenoid valve III 15 is opened.

[0028] (1.2) Then, the required gas enters the pressure reducing valve 2 from the intake pipe 1 for pressure adjustment, and then is sent to the filter 3 to filter out impurities in the gas.

[0029] (1.3) The filtered gas is filled into the gas cylinder I 6 through the electromagnetic directional valve I 5, and the initial air in the gas cylinder I 6 is pushed towards the electromagnetic directional valve II 12 and then discharged through the solenoid valve III 15.

[0030] (1.4) When the exhaust of the gas cylinder I 6 is completed, the spool of the electromagnetic directional valve I 5 moves downward, so that the intake port P of the electromagnetic directional valve I 5 is communicated with its working port B, and at the same time, the spool of the electromagnetic directional valve II 12 moves downward, so that the exhaust port T of the electromagnetic directional valve II 12 is communicated with its working port B.

[0031] (1.5) Then, the filtered gas is filled into the gas cylinder II 9 through the electromagnetic directional valve I 5, and the initial air in the gas cylinder II 9 is pushed towards the electromagnetic directional valve II 12 and then discharged through the solenoid valve III 15.

[0032] (1.6) When the exhaust of the gas cylinder II 9 is completed, the solenoid valve III 15 is closed.

[0033] (2) Ventilation operation (2.1) Then, the spool of solenoid directional valve I 5 moves upward, causing the inlet port P of solenoid directional valve I 5 to communicate with its working port A. At the same time, the spool of solenoid directional valve II 12 moves upward, causing the outlet port T of solenoid directional valve II 12 to communicate with its working port A.

[0034] (2.2) Set the working pressure values of pressure gauge I 8 and pressure gauge II 11 to be the same. Then, the filtered gas is further filled into gas cylinder I 6 through solenoid directional valve I 5 until the working pressure value set by pressure gauge I 8 is reached. At this time, the spool of solenoid directional valve I 5 moves downward, causing the inlet port P of solenoid directional valve I 5 to communicate with its working port B.

[0035] (2.3) Measure the gas temperature in gas cylinder I 6 through temperature probe I 7. Then, according to the formula m = ρ*V = (P*V) / (R*T), the total weight of the gas in gas cylinder I 6 can be calculated as M 1总 ; In the formula, m represents the gas mass per unit volume; ρ represents the gas density; V represents the gas volume; P represents the gas pressure; R represents the gas constant; T represents the gas temperature.

[0036] (2.4) Then, the peristaltic pump 16 is started and gas is extracted at the set flow rate. At this time, the gas in gas cylinder I 6 decreases. Since the cylinder volume is constant, the mass of the input gas can be calculated through the changing pressure difference. Therefore, the gas volume is known. Then, measure the gas temperature in gas cylinder I 6 through temperature probe I 7. According to the formula m = ρ*V = (P*V) / (R*T), the remaining gas mass M in gas cylinder I 6 can be calculated 1现 ; At this time, according to the formula M 1输入 = M 1总 - M 1现 , the mass M of the gas input through gas cylinder I 6 can be calculated 1输入 .

[0037] (2.5) During this process, the filtered gas is further filled into gas cylinder II 9 through solenoid directional valve I 5 until the working pressure value set by pressure gauge II 11 is reached. At this time, measure the gas temperature in gas cylinder II 9 through temperature probe II 10. According to the formula m = ρ*V = (P*V) / (R*T), the total weight of the gas in gas cylinder II 9 can be calculated as M 2总 .

[0038] (2.6) When the pressure value of gas cylinder I 6 reaches the set minimum value, the spool of solenoid directional valve I 5 moves upward, causing the inlet port P of solenoid directional valve I 5 to communicate with its working port A. At the same time, the spool of solenoid directional valve II 12 moves downward, causing the outlet port T of solenoid directional valve II 12 to communicate with its working port B.

[0039] (2.7) Then, the gas cylinder I 6 is inflated through the electromagnetic reversing valve I 5 until the working pressure value set by the pressure gauge I 8 is reached. At the same time, the peristaltic pump 16 extracts gas from the gas cylinder II 9, and the mass M of the gas input through the gas cylinder II 9 is calculated in the same way as above. 2输入 .

[0040] (2.8) When the pressure value of the gas cylinder II 9 reaches the set minimum value, the spool of the electromagnetic reversing valve I 5 moves downward, making the intake port P of the electromagnetic reversing valve I 5 communicate with its working port B. At the same time, the spool of the electromagnetic reversing valve II 12 moves upward, making the outlet port T of the electromagnetic reversing valve II 12 communicate with its working port A. Then, the above actions are repeated to form a cycle.

[0041] The beneficial effects of the present invention: (1) The present invention can directly and effectively control the flow rate and mass of the input gas, so as to achieve the function of replacing the MFC gas mass flow controller.

[0042] (2) The present invention ensures the continuous operation through the cooperative switching of the gas cylinder I 6 and the gas cylinder II 9.

[0043] The above-described embodiments are only described as the preferred embodiments of the present invention, and do not limit the concept and scope of the present invention. Without departing from the design concept of the present invention, various modifications and improvements made by ordinary engineering and technical personnel in the field to the technical solutions of the present invention should fall within the protection scope of the present invention. The technical content claimed by the present invention has been fully recorded in the claims.

Claims

1. A gas mass flow control device, characterized in that: It includes an air inlet pipe, a one-way valve I, an electromagnetic reversing valve I, a gas cylinder I, a gas cylinder II, an electromagnetic reversing valve II, a one-way valve II, a peristaltic pump and an air outlet pipe; the gas cylinder I and the gas cylinder II are both hollow structures arranged horizontally and transversely, and the two are arranged in parallel and spaced apart; the electromagnetic reversing valve I and the electromagnetic reversing valve II are both two-position three-way electromagnetic reversing valves, and the air inlet pipe is connected with the air inlet P of the electromagnetic reversing valve I through a pipeline via the one-way valve I, the working port A of the electromagnetic reversing valve I is connected with the air inlet end of the gas cylinder I through a pipeline, and its working port B is connected with the air inlet end of the gas cylinder II through a pipeline; the working port A of the electromagnetic reversing valve II is connected with the air outlet end of the gas cylinder I through a pipeline, and its working port B is connected with the air outlet end of the gas cylinder II through a pipeline, and its air outlet T is connected with the air outlet pipe through a pipeline via the one-way valve II and a peristaltic pump in sequence.

2. A gas mass flow control device according to claim 1, characterized in that: The flow direction of the one-way valve I needs to ensure that the gas entering through the intake pipe flows into the gas cylinder I or the gas cylinder II through the control of the electromagnetic reversing valve I, thereby achieving inflation, and in this process, prevent gas backflow from causing damage to equipment and pipelines.

3. A gas mass flow control device according to claim 1, characterized in that: A pressure reducing valve and a filter are sequentially arranged on the pipeline connecting the intake pipe and the one-way valve I, and the pressure reducing valve is arranged on the side close to the intake pipe, so that the intake pressure is adjusted by the pressure reducing valve, and impurities in the gas are filtered by the filter.

4. A gas mass flow control device according to claim 1, characterized in that: The flow direction of the one-way valve II must ensure that the gas coming out of the outlet T of the electromagnetic reversing valve II flows to the peristaltic pump, thereby achieving exhaust, and in this process, prevent gas backflow from causing damage to equipment and pipelines.

5. A gas mass flow control device according to claim 1, characterized in that: A pressure gauge I for detecting the gas pressure in the gas cylinder I is also connected to the pipeline connecting the working port A of the electromagnetic reversing valve II and the gas cylinder I, and a pressure gauge II for detecting the gas pressure in the gas cylinder II is also connected to the pipeline connecting the working port B of the electromagnetic reversing valve II and the gas cylinder II; a temperature probe I is also provided on the side of the air inlet end of the gas cylinder I, and the gas temperature in the gas cylinder I is measured by the temperature probe I; a temperature probe II is also provided on the side of the air inlet end of the gas cylinder II, and the gas temperature in the gas cylinder II is measured by the temperature probe II.

6. A gas mass flow control device according to claim 5, characterized in that: A pressure gauge III and a solenoid valve III are provided in sequence on the pipeline connecting the one-way valve II and the peristaltic pump, and the pressure gauge III is arranged on the side close to the one-way valve II, and the exhaust pressure is measured by the pressure gauge III; the solenoid valve III adopts a two-position two-way reversing valve, and through the coordinated use of the pressure gauge III and the solenoid valve III, the gas in the pipeline is released when the exhaust pressure is too high, thereby reducing the pipeline pressure and preventing damage to the equipment and the pipeline.

7. A gas mass flow control device according to claim 6, characterized in that: It also includes an upper shell and a lower shell; the lower shell is a U-shaped structure with an open groove arranged along the horizontal transverse direction, and its open end is arranged upward; the air inlet pipe is embedded in the front surface of the lower shell, and the air outlet pipe is embedded in the rear surface of the lower shell; the gas cylinder body I and the gas cylinder body II are arranged in parallel on the left side of the inner bottom surface of the lower shell with a front-to-back interval, and the pressure reducing valve, filter, one-way valve I, electromagnetic reversing valve I, pressure gauge I, pressure gauge II, electromagnetic reversing valve II, one-way valve II, pressure gauge III, electromagnetic valve III, peristaltic pump and pipelines connected to each other are integrated inside the lower shell; the upper shell is a U-shaped structure matching the lower shell, and its open groove is arranged along the horizontal longitudinal direction, the open end of the upper shell is arranged downward, and is screwed to the upper and lower shell to form an integral module.

8. A method for controlling a gas mass flow control device according to any one of claims 1 to 7, characterized in that The following steps are involved: (1) Exhaust process (1.1) First, the valve core of the electromagnetic reversing valve I moves upward, so that the air inlet P of the electromagnetic reversing valve I is connected with its working port A. At the same time, the valve core of the electromagnetic reversing valve II moves upward, so that the air outlet T of the electromagnetic reversing valve II is connected with its working port A. Then the electromagnetic valve III is opened; (1.2) Then the required gas enters the pressure reducing valve from the air inlet pipe for pressure adjustment, and then is sent to the filter to remove impurities in the gas; (1.3) The filtered gas is inflated into the gas cylinder I through the electromagnetic reversing valve I, and the initial air in the gas cylinder I is pushed to the electromagnetic reversing valve II, and then discharged through the electromagnetic valve III; (1.4) When the gas cylinder I is exhausted, the valve core of the electromagnetic reversing valve I moves downward, so that the air inlet P of the electromagnetic reversing valve I is connected to its working port B. At the same time, the valve core of the electromagnetic reversing valve II moves downward, so that the air outlet T of the electromagnetic reversing valve II is connected to its working port B. (1.5) Then the filtered gas is inflated into the gas cylinder II through the electromagnetic reversing valve I, and the initial air in the gas cylinder II is pushed to the electromagnetic reversing valve II, and then discharged through the electromagnetic valve III; (1.6) When the gas cylinder II is exhausted, the solenoid valve III is closed; (2) Ventilation operation (2.1) Then the valve core of the electromagnetic reversing valve I moves upward, so that the air inlet P of the electromagnetic reversing valve I is connected with its working port A. At the same time, the valve core of the electromagnetic reversing valve II moves upward, so that the air outlet T of the electromagnetic reversing valve II is connected with its working port A. (2.2) Set the working pressure values ​​of pressure gauge I and pressure gauge II to be the same, and then continue to inflate the filtered gas into gas cylinder I through electromagnetic reversing valve I until the working pressure value set by pressure gauge I is reached; at this time, the valve core of electromagnetic reversing valve I moves downward, so that the air inlet P of electromagnetic reversing valve I is connected with its working port B; (2.3) The temperature of the gas in the gas cylinder I is measured by the temperature probe I. Then, according to the formula m=ρ*V=(P*V) / (R*T), the total weight of the gas in the gas cylinder I can be calculated as M. 1总 ; In the formula, m represents the gas mass per unit volume; ρ represents the gas density; V represents the gas volume; P represents the gas pressure; R represents the gas constant; T represents the gas temperature; (2.4) Then the peristaltic pump starts and extracts gas at the set flow rate. At this time, the gas in the gas cylinder Ⅰ decreases; the gas volume is known, and then the gas temperature in the gas cylinder Ⅰ is measured by the temperature probe Ⅰ. Then, according to the formula m=ρ*V=(P*V) / (R*T), the remaining gas mass M in the gas cylinder Ⅰ can be calculated. 1现 ; At this time, according to formula M 1输入 =M 1总 -M 1现 , the gas mass M input through the gas cylinder Ⅰ can be calculated 1输入 ; (2.5) In this process, the filtered gas is continuously inflated into the gas cylinder II through the electromagnetic reversing valve I until the working pressure value set by the pressure gauge II is reached; at this time, the gas temperature in the gas cylinder II is measured by the temperature probe II, and then according to the formula m=ρ*V=(P*V) / (R*T), the total weight of the gas in the gas cylinder II can be calculated as M. 2总 ; (2.6) When the pressure value of the gas cylinder body I reaches the set minimum value, the valve core of the electromagnetic reversing valve I moves up, so that the air inlet P of the electromagnetic reversing valve I is connected with its working port A, and at the same time, the valve core of the electromagnetic reversing valve II moves down, so that the air outlet T of the electromagnetic reversing valve II is connected with its working port B; (2.7) Then, the gas cylinder I is inflated through the electromagnetic reversing valve I until the working pressure value set by the pressure gauge I is reached; at the same time, the gas is extracted from the gas cylinder II through the peristaltic pump, and the gas mass M input through the gas cylinder II is calculated in the same way as above. 2输入 ; (2.8) When the pressure value of gas cylinder II reaches the set minimum value, the valve core of electromagnetic reversing valve I moves down, so that the air inlet P of electromagnetic reversing valve I is connected with its working port B. At the same time, the valve core of electromagnetic reversing valve II moves up, so that the air outlet T of electromagnetic reversing valve II is connected with its working port A. Then the above actions are repeated to form a cycle.

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