Clamping device and motion system

Abstract

The present invention provides a clamping device and a motion system. The clamping device includes: a base having a first surface and a second surface, the first surface being used to support a workpiece; a fixing assembly provided on the first surface or the second surface, the fixing assembly being used to fix the workpiece; a plurality of failure protection assemblies provided on the second surface in sequence along the circumference of the first surface, the failure protection assembly including a deformable member and a clamping member, the clamping member being connected to the second surface via the deformable member, the deformable member including a piezoelectric element capable of deforming in response to an electrical signal, the clamping member being capable of abutting or separating from the workpiece under the drive of the deformable member, wherein when the deformable member is powered off, the clamping member is in a power-off protection position abutting against the workpiece, and when the deformable member is powered on, the clamping member is in a release position separated from the workpiece. The technical solution of the present invention solves the problem that the clamping device in the prior art is prone to clamping failure when encountering an unexpected situation of gas or power outage.

Description

Technical Field

[0001] The present invention relates to the field of precision measurement technology, and in particular to a clamping device and a motion system. Background Art

[0002] Precision metrology is a crucial component of integrated circuit manufacturing. Image recognition systems accurately identify and judge patterns and markings processed on substrates such as wafers and plates, providing the necessary basis for quality and yield control. As process requirements increase, the requirements for substrate clamping in manufacturing equipment systems are also becoming increasingly stringent, making the design of substrate clamping systems increasingly important.

[0003] There are generally two existing substrate clamping methods. One is the vacuum adsorption clamping method, which relies on the structural design of vacuum adsorption, that is, the substrate is adsorbed and clamped through the vacuum channel in the form of contact adsorption with the bottom area of ​​the substrate. The adsorption force of vacuum adsorption is relatively evenly distributed, and it is not easy to cause the surface bending and deformation of the substrate. It has good protection and is usually used in motion systems with high-precision requirements; the second is the motor-driven clamping method, which clamps the substrate through the motor-driven clamping system. Some motors have extremely strong overload protection capabilities and certain self-locking functions, which can meet the high requirements of the clamping system under high process requirements.

[0004] However, in the precision measurement technology of integrated circuit manufacturing, the above two clamping methods (such as vacuum adsorption and motor-driven clamping) are prone to clamping failure when encountering unexpected conditions such as gas or power outages (that is, in the case of vacuum adsorption, the substrate loses its adsorption holding force when the power is cut off and the gas is cut off, and in the case of motor-driven clamping, the clamping becomes loose when the power is cut off). This makes it easy for slippage or flipping to occur, resulting in damage, etc., which makes it easy for the substrate to fly out or slide, and thus cause damage to the substrate. Summary of the Invention

[0005] The main purpose of the present invention is to provide a clamping device and a motion system to solve the problem that the clamping device in the prior art is prone to clamping failure when encountering an unexpected situation such as a gas or power outage.

[0006] In order to achieve the above-mentioned purpose, the present invention provides a clamping device, comprising: a base, having a first surface and a second surface, the first surface being used to support a workpiece; the first surface being arranged parallel to or overlapping with the second surface; a fixing component being arranged on the first surface or the second surface, the fixing component being used to fix the workpiece; a plurality of failure protection components being arranged on the second surface in sequence along the circumference of the first surface, the failure protection component comprising a deformable member and a clamping member, the clamping member being connected to the second surface through the deformable member, the deformable member comprising a piezoelectric member capable of deforming in response to an electrical signal, the clamping member being capable of abutting or separating from the workpiece under the drive of the deformable member, wherein, when the deformable member is powered off, the clamping member is in a power-off protection position abutting against the workpiece, and when the deformable member is powered on, the clamping member is in a release position separated from the workpiece.

[0007] Furthermore, the deformable component also includes a flexible component, one end of the flexible component is connected to the second surface, the other end of the flexible component is connected to the clamping component, the piezoelectric component is connected to the flexible component and is located between the two ends of the flexible component, and the piezoelectric component can drive the flexible component to produce corresponding deformation.

[0008] Furthermore, the flexible part includes a supporting part, a connecting part and at least one bent part connected between the supporting part and the connecting part, the supporting part is connected to the base, the connecting part is connected to the clamping member, and the piezoelectric part includes at least one piezoelectric diaphragm, which is arranged on the surface of the bent part.

[0009] Furthermore, there are two bending parts and two piezoelectric membranes, and the two piezoelectric membranes are respectively attached to the two bending parts. One end of the two bending parts is connected to the supporting part, and the other end of the two bending parts is connected to the connecting part. The openings of the two bending parts are arranged facing each other.

[0010] Furthermore, the two bent portions are arranged vertically to the second surface, and the bent portion located at the bottom abuts against the second surface. When the piezoelectric diaphragm is switched from a power-off state to a power-on state, the bending curvatures of the two bent portions increase to drive the clamping member away from the base and the workpiece; or, the two bent portions are arranged in a horizontal direction parallel to the second surface. When the piezoelectric diaphragm is switched from a power-off state to a power-on state, the bending curvatures of the two bent portions increase to drive the clamping member away from the workpiece.

[0011] Furthermore, there are two bending parts and two piezoelectric diaphragms, and the two piezoelectric diaphragms are respectively attached to the two bending parts, and the openings of the two bending parts are set opposite to each other; the two bending parts are arranged vertically to the second surface, one end of the upper bending part is connected to the supporting part, and the other end of the upper bending part is connected to the connecting part, and one end of the lower bending part is supported on the second surface, and the other end of the lower bending part is connected to the connecting part.

[0012] Furthermore, when the piezoelectric diaphragm is switched from a power-off state to a power-on state, the bending curvatures of the two curved portions increase to drive the clamping member away from the workpiece; or, when the piezoelectric diaphragm is switched from a power-off state to a power-on state, the bending curvature of the curved portion located above increases and the bending curvature of the curved portion located below decreases to drive the clamping member away from the workpiece and the base.

[0013] Furthermore, the clamping member includes: a clamping frame connected to the deformable member; a clamping piece connected to the clamping frame, the clamping piece is located on a side of the clamping frame away from the deformable member, and the clamping piece is detachably connected to the clamping frame.

[0014] Furthermore, the clamping piece is flat-plate-shaped; or, the clamping piece includes a first segment and a second segment connected and arranged at an angle, the first segment is connected to the clamping frame, the second segment is located on the side of the first segment away from the deformable component, and the second segment is located above the first segment.

[0015] Furthermore, the failure protection assembly includes a plurality of deformable members and a clamping member, and the plurality of deformable members are all connected to the clamping member; or, the failure protection assembly includes a deformable member and a clamping member.

[0016] Furthermore, there are four failure protection components, and the four failure protection components are respectively a first failure protection component, a second failure protection component, a third failure protection component and a fourth failure protection component; wherein, the first failure protection component and the second failure protection component are respectively located on both sides of the first surface and are mirror-symmetrical in the first direction, and the third failure protection component and the fourth failure protection component are respectively located on both sides of the first surface and are mirror-symmetrical in the second direction; or, the first failure protection component and the second failure protection component are respectively located on both sides of the first surface and are mirror-symmetrical in the first direction, the third failure protection component and the fourth failure protection component are respectively located on both sides of the first surface and are mirror-symmetrical in the first direction, the first failure protection component and the third failure protection component are respectively spaced apart in the second direction, and the second failure protection component and the fourth failure protection component are spaced apart in the second direction.

[0017] According to another aspect of the present invention, the present invention provides a motion system, comprising: the above-mentioned clamping device; a lifting device, located below the clamping device, the lifting device having a lifting end for lifting the workpiece; a handover device, the handover device being located above the clamping device, the handover device having a clamping portion movably arranged along a first direction and / or a second direction, the clamping portion having a clamping cavity for clamping the workpiece.

[0018] By applying the technical solution of the present invention, the failure protection component has a pre-deformation capability. When no power is supplied, the clamping member can abut against the workpiece. When the fixing component fixes the workpiece, that is, when power is supplied or ventilation is provided, the clamping member is always in a position abutting against the workpiece. At this time, the clamping device fixes the workpiece through the fixing component. By arranging multiple failure protection components on the second surface of the base, an effective protection circle can be formed around the first surface. Once the motor-driven clamping is powered off or the vacuum adsorption is cut off, the clamping member can still abut against the workpiece under the drive of the deformable component, so that the clamping member is in a power-off protection position, that is, the limit protection mechanism is activated. At this time, the clamping member relies on a pre-set mechanical preload force to tightly abut against the edge of the workpiece to play a certain limit protection role, effectively avoiding the risk of the workpiece flying out or sliding due to adsorption failure or loose clamping, thereby greatly reducing the damage to the workpiece caused by power outage and air outage. When the workpiece needs to be handed over, the fixing component is not powered on or ventilated, and the failure protection component is powered on, so that the clamping member is disengaged and away from the workpiece, and then the handover is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0020] Figure 1 A schematic structural diagram of a first embodiment of the clamping device of the present invention is shown;

[0021] Figure 2 Shown Figure 1 A schematic structural diagram of a failure protection component of a clamping device;

[0022] Figure 3 Shown Figure 1 A schematic structural diagram of a clamping device;

[0023] Figure 4 Shown Figure 1 A schematic structural diagram of the clamping device in a clamping state and a handover state;

[0024] Figure 5 Shown Figure 1 A structural schematic diagram of the clamping device in another clamping state;

[0025] Figure 6 Shown Figure 1 A schematic structural diagram of two piezoelectric diaphragms in series connected to a failure protection component of a clamping device;

[0026] Figure 7 Shown Figure 1 A schematic structural diagram of two piezoelectric diaphragms of a failure protection component of a clamping device connected in parallel;

[0027] Figure 8 A schematic structural diagram of a second embodiment of the clamping device of the present invention is shown;

[0028] Figure 9 Shown Figure 8 A schematic structural diagram of a failure protection component of a clamping device;

[0029] Figure 10 A schematic structural diagram of a third embodiment of the clamping device of the present invention is shown;

[0030] Figure 11 Shown Figure 10 A schematic structural diagram of a failure protection component of a clamping device;

[0031] Figure 12 Shown Figure 10 A schematic structural diagram of the clamping device in a clamping state and a handover state;

[0032] Figure 13 A schematic structural diagram of an embodiment of the clamping device of the present invention is shown;

[0033] Figure 14 A schematic structural diagram of an embodiment of the clamping device of the present invention is shown;

[0034] Figure 15 A schematic structural diagram of an embodiment of the clamping device of the present invention is shown;

[0035] Figure 16 A schematic structural diagram of an embodiment of the clamping device of the present invention is shown;

[0036] Figure 17 A schematic structural diagram of a fourth embodiment of the clamping device of the present invention is shown;

[0037] Figure 18 Shown Figure 17 A schematic structural diagram of a failure protection component of a clamping device;

[0038] Figure 19 A schematic structural diagram of an embodiment of the motion system of the present invention when the workpiece is fixed is shown;

[0039] Figure 20 A structural schematic diagram of an embodiment of the motion system of the present invention during workpiece handover is shown.

[0040] The above drawings include the following reference numerals:

[0041] 1. Workpiece; 100. Clamping device; 101. Base; 21. First surface; 22. Second surface; 10. Failure protection component; 110. Deformable member; 111. Piezoelectric member; 1111. Piezoelectric diaphragm; 112. Flexible member; 1124. Support portion; 1123. Connecting portion; 1121. Bending portion; 120. Clamping member; 121. Clamping frame; 122. Clamping sheet; 1221. First segment; 1222. Second segment; 10a. First failure protection component; 10b. Second failure protection component; 10c. Third failure protection component; 10d. Fourth failure protection component; 200. Lifting device; 300. Handover device; 400. Fixing component. DETAILED DESCRIPTION

[0042] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0043] It should be noted that in the embodiment of the present invention, the workpiece 1 is generally a substrate such as a wafer or a plate, and the substrate is in the shape of a square sheet. Specifically, the substrate is a silicon wafer. Of course, the substrate can also be circular.

[0044] It should be noted that, in the embodiment of the present invention, the first direction X, the second direction Y and the third direction Z are arranged perpendicular to each other, wherein the third direction Z is a vertical direction, that is, an up-down direction.

[0045] like Figures 1 to 18 As shown, an embodiment of the present invention provides a clamping device. The clamping device 100 includes: a base 101 having a first surface 21 and a second surface 22, wherein the first surface 21 is used to support a workpiece 1; the first surface 21 is arranged parallel to or overlapped with the second surface 22; a fixing assembly 400, which is arranged on the first surface 21 or the second surface 22, and is used to fix the workpiece 1; a plurality of failure protection assemblies 10, which are sequentially arranged on the second surface 22 along the circumference of the first surface 21, and the failure protection assemblies 10 include a deformable member 110 and a clamping member 120. The clamping member 120 is connected to the second surface 22 through the deformable member 110. The deformable member 110 includes a piezoelectric element 111 that can deform in response to an electrical signal. The clamping member 120 can abut against or separate from the workpiece 1 under the drive of the deformable member 110. When the deformable member 110 is powered off, the clamping member 120 is in a power-off protection position abutting against the workpiece 1. When the deformable member 110 is powered on, the clamping member 120 is in a release position separated from the workpiece 1.

[0046] In the above technical solution, the failure protection component 10 has a pre-deformation capability. When no power is supplied, the clamping member 120 can be brought into contact with the workpiece 1. When the fixing component 400 fixes the workpiece 1, that is, when power is supplied or ventilation is provided, the clamping member 120 is always in contact with the workpiece 1. At this time, the clamping device 100 fixes the workpiece 1 through the fixing component 400. By arranging a plurality of failure protection components 10 on the second surface 22 of the base 101, an effective protection circle can be formed around the first surface 21. Once the motor-driven clamping is powered off or the vacuum adsorption is cut off, the clamping member 120 can be in a position where the workpiece 1 is in contact with the workpiece 1. The deformable member 110 is driven to still abut against the workpiece 1, so that the clamping member 120 is in the power-off protection position, that is, the limit protection mechanism is activated. At this time, the clamping member 120 relies on the pre-set mechanical preload force to tightly abut against the edge of the workpiece 1 to play a certain limit protection role, effectively avoiding the risk of the workpiece 1 flying out or sliding due to adsorption failure or loose clamping, thereby greatly reducing the damage to the workpiece 1 caused by power outages and air outages; when the workpiece 1 needs to be handed over, the fixing component 400 is not powered or ventilated, and the failure protection component 10 is energized, so that the clamping member 120 is disengaged and away from the workpiece 1, and then the handover is completed.

[0047] It should be noted that, in the embodiment of the present invention, the first surface 21 and the second surface 22 are parallel to each other, and may be coplanar or non-coplanar. Figure 1 As shown, the fixing component 400 is arranged on the first surface 21. The fixing component 400 is an adsorption component, which provides adsorption force to the workpiece 1 through the first surface 21. The first surface 21 is an adsorption surface, which has the function of adsorbing the workpiece 1. An adsorption groove is provided on the adsorption surface. The fixing component 400 is used to pass vacuum into the adsorption groove to achieve adsorption and clamping of the workpiece 1; the second surface 22 is the installation surface, which is the installation reference surface of the deformable component 110.

[0048] like Figure 15 As shown, in one embodiment, the fixing assembly 400 may also be a motor drive module, such as a piezoelectric motor drive module. The piezoelectric motor drive module is disposed on the second surface 22 , and the first surface 21 provides support for the workpiece 1 .

[0049] like Figure 1 and Figure 2 As shown, in an embodiment of the present invention, the deformable component 110 also includes a flexible component 112, one end of the flexible component 112 is connected to the second surface 22, the other end of the flexible component 112 is connected to the clamping component 120, and the piezoelectric component 111 is connected to the flexible component 112 and is located between the two ends of the flexible component 112. The piezoelectric component 111 can drive the flexible component 112 to produce corresponding deformation.

[0050] Through the above-mentioned arrangement, the flexible part 112 serves as a bridge connecting the second surface 22 and the clamping member 120. Under normal circumstances (the piezoelectric part 111 is powered off), it maintains a pre-tightened state to ensure that the clamping member 120 is in close contact with the edge of the workpiece 1, forming a stable power-off protection effect. In this way, the emergency protection capability of the clamping device 100 in the face of sudden power outages can be improved, and the problem of flying or sliding of the workpiece 1 due to sudden loss of adsorption force or clamping force can be avoided; when the piezoelectric part 111 is energized, it can drive the flexible part 112 to deform in a specific direction, prompting the clamping member 120 to move quickly to the release position and separate from the workpiece 1, thereby not hindering the loading and unloading and handover of the workpiece 1, and ensuring the continuity and efficiency of the production process.

[0051] like Figure 2 As shown, in an embodiment of the present invention, the flexible member 112 includes a supporting portion 1124, a connecting portion 1123 and at least one bent portion 1121 connected between the supporting portion 1124 and the connecting portion 1123, the supporting portion 1124 is connected to the base 101, the connecting portion 1123 is connected to the clamping member 120, and the piezoelectric member 111 includes at least one piezoelectric film 1111, and the piezoelectric film 1111 is arranged on the surface of the bent portion 1121.

[0052] In the above technical solution, the support portion 1124 is stably connected to the base 101, ensuring the mechanical stability of the entire clamping system. The bending portion 1121 is deformed under the drive of the piezoelectric diaphragm 1111, and the connecting portion 1123 is connected to the clamping member 120, responsible for transmitting the deformation to move the clamping member 120, thereby achieving precise clamping or rapid release of the workpiece 1. On the one hand, when the piezoelectric element 111 is in the power-off state, the bending portion 1121 maintains the pre-tightened bending state, and with the help of its own pre-tightening force or elastic recovery, ensures that the clamping member 120 is 0 fits tightly against the edge of the workpiece 1, effectively preventing the workpiece 1 from flying out or sliding in the event of a sudden gas or power outage, avoiding the risk of damaging the workpiece 1, and enhancing the system's safety protection capabilities under abnormal circumstances; on the other hand, when the piezoelectric element 111 is energized, the piezoelectric diaphragm 1111 quickly responds to electrical signals, causing the shape of the bent portion 1121 to change (increase or decrease the bending curvature), thereby achieving rapid separation of the clamping member 120 from the workpiece 1, ensuring smooth and unobstructed loading and unloading of the workpiece 1, and greatly improving production efficiency.

[0053] Furthermore, the combined design of the piezoelectric diaphragm 1111 and the bending portion 1121 not only provides a more precise and faster driving response compared to the traditional single motor drive or spring return mechanism, but also allows efficient energy conversion in a limited space, thereby reducing the volume and weight of the entire clamping device 100, optimizing the spatial layout, enhancing its flexibility and adaptability on the automated production line, and preventing the clamping device 100 from colliding with and interfering with other components in the processing equipment during high-precision processing.

[0054] Preferably, the piezoelectric diaphragm 1111 is arranged on the side of the bending portion 1121 with a smaller bending radius, which can effectively reduce the contact between the piezoelectric diaphragm 1111 and other components, such as the clamping member 120 and the second surface 22, and prevent the piezoelectric diaphragm 1111 from being damaged due to frequent touch.

[0055] Preferably, in an embodiment of the present invention, the flexible member 112 is a sheet-like structure, which not only provides the necessary deformation freedom to adapt to the clamping requirements of different sizes and shapes of workpieces 1, but also effectively reduces the overall volume and weight of the clamping device 100 due to its light and thin characteristics, thereby improving space utilization efficiency, facilitating deployment in small or complex production environments, and further expanding its scope of application.

[0056] Specifically, in an embodiment of the present invention, the thickness range of the piezoelectric diaphragm 1111 is 0.1 to 3 mm, and the bending curvature can be achieved from 0 / m to 200 / m; in the present invention, the diaphragm thickness of the piezoelectric diaphragm 1111 is preferably 0.2 to 1 mm, and the bending curvature can be achieved from 0 / m to 100 / m.

[0057] like Figure 2 and Figure 9 As shown, in an embodiment of the present invention, the clamping member 120 includes: a clamping frame 121, connected to the deformable member 110; a clamping piece 122, connected to the clamping frame 121, the clamping piece 122 is located on the side of the clamping frame 121 away from the deformable member 110, and the clamping piece 122 is detachably connected to the clamping frame 121.

[0058] In the above technical solution, the detachable connection between the clamping piece 122 and the clamping frame 121 allows for quick replacement or maintenance of the clamping piece 122 without affecting the stability of the overall structure. This facilitates the processing of workpieces 1 of different sizes and materials. For example, in the field of integrated circuit manufacturing, when processing wafers of different diameters or different types of reticles, the operator can simply replace the clamping piece 122 with one that matches the size and shape of the workpiece 1 without having to adjust the structure of the entire clamping device or replace other components. This greatly enhances the flexibility and adaptability of the clamping device, reduces production costs and maintenance time, and improves the stability and efficiency of the production line.

[0059] Specifically, in an embodiment of the present invention, the clamping piece 122 approaches and contacts the edge of the substrate. This approach can reduce the contact area between the clamping piece 122 and the substrate, and can prevent the clamping piece 122 from directly contacting the functional area of ​​the substrate, thereby causing scratches and other problems.

[0060] like Figure 9 As shown, in one embodiment, the clamping piece 122 is in the shape of a flat plate. In this way, the peripheral side of the workpiece 1 can be pressed. It should be noted that the clamping piece 122 can also be in an arc shape or other shapes to match the edge of the workpiece 1 of different shapes.

[0061] like Figure 2 As shown, in one embodiment, the clamping piece 122 includes a first segment 1221 and a second segment 1222 that are connected and arranged at an angle. The first segment 1221 is connected to the clamping frame 121, and the second segment 1222 is located on a side of the first segment 1221 that faces away from the deformable member 110, and the second segment 1222 is located above the first segment 1221. In this way, the upper side and the peripheral side of the workpiece 1 can be compressed.

[0062] like Figure 8 、 Figure 9 、 Figure 17 and Figure 18 As shown, in one embodiment, the failure protection assembly 10 includes a plurality of deformable members 110 and a clamping member 120 , and the plurality of deformable members 110 are connected to the clamping member 120 .

[0063] In the above technical solution, multiple deformable components 110 are arranged, and each deformable component 110 is connected to a clamping component 120. In this way, multi-point collaborative driving can be achieved, so that in the power-off state, all deformable components 110 can rely on the preload force or elastic properties of their materials to stably maintain the clamping component 120 in a position in close contact with the workpiece 1, thereby forming a stable clamping state, effectively preventing the workpiece 1 from slipping or flying out due to failure of the clamping force when the system is abnormal or the power is interrupted; when the piezoelectric diaphragm 1111 switches from the power-off state to the power-on state, the input of the electrical signal causes the multiple deformable components 110 to deform, and the combined force effect of this synchronous deformation enables the clamping component 120 to quickly and smoothly transition from the position in contact with the workpiece 1 to a completely separated state, that is, the coordinated action of multiple deformable components 110 drives the clamping component 120 to move as a whole, realizing the rapid and damage-free release of the workpiece.

[0064] Furthermore, by providing a clamping member 120 connected to the plurality of deformable members 110 , the contact area between the clamping member 120 and the workpiece 1 can be increased, thereby increasing the clamping stability of the clamping device 100 in a power-off state.

[0065] like Figures 13 to 16 As shown, in the embodiment of the present invention, the failure protection assembly 10 includes a deformable member 110 and a clamping member 120. In this way, the clamping member 120 can be brought into contact with the workpiece 1.

[0066] like Figure 1 、 Figure 10 、 Figure 13 and Figure 14 As shown, in one embodiment, there are four failure protection components 10, and the four failure protection components 10 are respectively a first failure protection component 10a, a second failure protection component 10b, a third failure protection component 10c and a fourth failure protection component 10d; wherein, the first failure protection component 10a and the second failure protection component 10b are respectively located on both sides of the first surface 21 and are mirror-symmetrical in the first direction X, and the third failure protection component 10c and the fourth failure protection component 10d are respectively located on both sides of the first surface 21 and are mirror-symmetrical in the second direction Y.

[0067] Through the above-mentioned arrangement, in the event of a power outage or system abnormality, the four failure protection components 10 can function simultaneously, firmly maintaining the clamping member 120 in contact with the workpiece 1, thereby forming a protective ring that uniformly surrounds the workpiece 1, effectively preventing the workpiece 1 from slipping or flying out after losing the normal clamping force, thereby ensuring the safety of the workpiece 1.

[0068] Furthermore, the four fail-safe components 10 can not only clamp square substrates, but also circular substrates.

[0069] Specifically, in this embodiment, the first failure protection component 10a and the second failure protection component 10b are opposite to each other along the first direction X, and the third failure protection component 10c and the fourth failure protection component 10d are opposite to each other along the second direction Y. In this way, the substrate can be clamped in the first direction and the second direction, and a force is applied to the substrate through pre-deformation to achieve auxiliary position maintenance of the substrate; of course, since the four failure protection components 10 are in a mirror relationship along the first direction and the second direction, the movement operation of the four failure protection components 10 is a centering movement, and this arrangement is also conducive to actual clamping operations.

[0070] like Figure 15 and Figure 16As shown, in one embodiment, there are four failure protection components 10, and the four failure protection components 10 are respectively a first failure protection component 10a, a second failure protection component 10b, a third failure protection component 10c and a fourth failure protection component 10d. The first failure protection component 10a and the second failure protection component 10b are respectively located on both sides of the first surface 21 and are mirror-symmetrical in the first direction X, the third failure protection component 10c and the fourth failure protection component 10d are respectively located on both sides of the first surface 21 and are mirror-symmetrical in the first direction X, the first failure protection component 10a and the third failure protection component 10c are spaced apart in the second direction Y, and the second failure protection component 10b and the fourth failure protection component 10d are spaced apart in the second direction Y.

[0071] Through the above arrangement, the workpiece 1 can be clamped on both sides of the first direction X, and the ability to clamp the protective substrate of the workpiece 1 in the first direction can be improved to prevent the workpiece 1 from slipping or flying out after losing the normal clamping force, thereby ensuring the safety of the workpiece 1.

[0072] like Figure 15 and Figure 16 As shown, in one embodiment, the clamping device 100 includes four fixed assemblies 400, all arranged in a first direction X and divided into two groups arranged in a mirror image in the first direction X. The fixed assemblies 400 have displacement adjustment capabilities, which facilitate precise horizontal position adjustment of the substrate, thereby achieving substrate clamping and positioning. In this embodiment, the primary purpose of this arrangement is to enhance the clamping and protection capabilities of the substrate in the first direction X by adding a pair of failsafe assemblies 10 in the first direction X, while also freeing up space in the second direction Y to prevent interference with substrate detection. In this embodiment, since the fixed assemblies 400 also have displacement adjustment capabilities, during substrate loading and unloading, the failsafe assemblies 10 must wait until the fixed assemblies 400 have completed displacement adjustment before powering off.

[0073] It should be noted that the four deformable components 110 can have the same design parameters or different design parameters, and the design parameters can be selected according to actual needs; similarly, the four clamping components 120 can have the same material and design size or different materials or design sizes, and the selection and design can be made according to actual needs.

[0074] One embodiment of the invention is Figure 13 and Figure 14 As shown, the substrate is in the shape of a circular sheet, and the four failure protection components 10 of the clamping device 100 are distributed along the circumference of the sheet; specifically, the substrate is a silicon sheet or a wafer; another embodiment of the invention is as follows Figure 3 and Figure 15As shown, the substrate is in the shape of a square thick plate, and the four failure protection components 10 of the clamping device 100 are distributed along the four sides of the square plate; specifically, the substrate is a mask.

[0075] Example 1

[0076] like Figures 1 to 5 As shown, in embodiment 1 of the present invention, there are two bending portions 1121 and two piezoelectric films 1111. The two piezoelectric films 1111 are respectively attached to the two bending portions 1121. One end of the two bending portions 1121 is connected to the supporting portion 1124, and the other end of the two bending portions 1121 is connected to the connecting portion 1123. The openings of the two bending portions 1121 are arranged facing each other.

[0077] In the above technical solution, the two bent portions 1121 are connected between the support portion 1124 and the connecting portion 1123, and the openings of the two bent portions 1121 are arranged facing each other, which can form a dynamic structure that can quickly deform in response to changes in electrical signals. In the power-off state, the piezoelectric diaphragm 1111 loses its driving effect, and the bent portion 1121 relies on the natural elasticity of its material or the preset mechanical preload to maintain close contact with the workpiece 1, ensuring that even if the adsorption force or clamping force of the fixing component 400 fails, the workpiece 1 can still be firmly held on the base 1. 01, effectively avoiding the risk of the workpiece 1 flying out or sliding due to the failure of the clamping of the fixing component 400, thereby greatly improving the safety and reliability of the system; when the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the input of the electrical signal causes the piezoelectric diaphragm 1111 to responsively deform, thereby prompting the curvature of the two bending parts 1121 to change, so as to drive the connecting part 1123 and the clamping member 120 to move as a whole away from the workpiece 1, thereby realizing the rapid release of the workpiece 1, facilitating subsequent processing or loading and unloading operations, and improving production efficiency.

[0078] Specifically, compared with the structure of a single bending portion 1121 and a single piezoelectric film 1111 , the first embodiment of the present invention has a better anti-twisting effect by providing two bending portions 1121 and two piezoelectric films 1111 to avoid interfering with the workpiece 1 .

[0079] like Figures 1 to 5 As shown, in the first embodiment of the present invention, the two bending portions 1121 are arranged vertically to the second surface 22 (along the third direction Z), and the bending portion 1121 located at the bottom abuts against the second surface 22. When the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the bending curvatures of the two bending portions 1121 increase to drive the clamping member 120 away from the base 101 and the workpiece 1.

[0080] In the above technical solution, when the clamping device 100 is in the power-off state, the two bent portions 1121 are subjected to the natural elasticity of the material or the preset mechanical preload force, and are maintained in a pre-bent state. In this state, the clamping member 120 is in close contact with the workpiece 1, so that the clamping member 120 is in the power-off protection position, ensuring that even in the event of a sudden power outage or gas outage, the workpiece 1 can be stably fixed, avoiding the problem of flying pieces or slipping due to the disappearance of the adsorption force or clamping force, thereby greatly improving the safety protection capability of the system under abnormal conditions; when the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the input of the electrical signal will prompt the piezoelectric diaphragm 1111 to respond to the deformation, and the bending curvatures of the two bent portions 1121 are both As the curvature increases, the increased curvature will cause the two ends of the curved portion 1121 to shrink inward, and because the curved portion 1121 located below is in contact with the second surface 22, the second surface 22 will push the connecting portion 1123 to swing upward through the curved portion 1121 located below, so that the clamping member 120 is away from the base 101 and the workpiece 1, thereby allowing the clamping member 120 to quickly move from the contact state with the workpiece 1 to a release position completely separated from the workpiece 1. The entire release process is not only fast and smooth, but also efficient, which ensures the free movement of the workpiece during loading and unloading, avoids direct friction between the clamping member 120 and the surface of the workpiece 1, reduces potential damage to the surface of the workpiece 1, and improves the integrity rate and production efficiency of the workpiece 1.

[0081] like Figure 5 As shown, in the first embodiment of the present invention, the initial bending state of the clamping device 100 is shown in FIG. Figure 5 The flexible member 112 is located at the bottom. At this time, the lower portion of the bent portion 1121 of the flexible member 112 is in a free state, and the flexible member 112 of the entire clamping device 100 presents a natural state of "drooping". Figure 5 After the flexible part 112 located at the top and the lower part of the bent part 1121 located at the bottom are pre-tightened by the interference action of the second surface 22, the flexible part 112 presents an almost "horizontal" pre-tightened state; during this pre-tightening process, the bending state of the flexible part 112 changes, wherein the bending curvatures of the two bent parts 1121 become smaller, and this state is close to the pre-tightened bending state of the normal clamping protection process; specifically, the resistance force between the bent part 1121 located at the bottom and the second surface 22 is about ten Newtons.

[0082] like Figure 1 、 Figure 19 and Figure 20As shown, in the first embodiment of the present invention, a motion system of the clamping device 100 is used. During the non-clamping protection process of the clamping device 100, the piezoelectric diaphragm 1111 is in an energized state, and the flexible member 112 is no longer in the initial pre-tightened bending state. After the two piezoelectric diaphragms 1111 are energized, they respectively drive the two bending portions 1121 to bend and deform, and the bending curvatures of the two bending portions 1121 become larger. The lower portion of the bending portion 1121 contacts the second surface 22, causing the connecting portion 1123 to shrink back while presenting an "upward" state of swinging upward. In this way, the flexible member 112 drives the clamping member 120 to swing upward, so that the clamping piece 122 is separated from the substrate. The clamping pieces 122 of the four groups of failure protection components 10 are simultaneously moved out of the vertical activity space range of the substrate. At this time, the fixing assembly 400 releases the substrate, the lifting device 200 rises and drives the substrate to move upward to the handover position, the handover device 300 enters the handover position from the side and takes the substrate, and after the lifting device 200 moves down, the handover device 300 takes away the substrate, thereby completing a piece unloading operation; or, the handover device 300 brings the substrate and enters the handover position from the side, the lifting device 200 moves to the handover position and takes the substrate, and after the handover device 300 is withdrawn, the lifting device 200 falls to the first surface 21, the fixing assembly 400 works, and then the failure protection assembly 10 is powered off and starts protection, thereby completing a piece loading operation; that is, during the non-clamping protection process of the clamping device 100, the clamping device 100 including the clamping piece 122 will not interfere with the substrate loading and unloading operation space.

[0083] It should be noted that, in a power-off state, the two bent portions 1121 provide a downward pressure to the clamping piece 122 of the clamping member 120 through pre-tightening, and the clamping piece 122 acts on the edge area of ​​the substrate to exert a holding force.

[0084] It should be noted that the curvature variation of the two curved portions 1121 can be the same or different. In order to meet the actual operational safety requirements of the upper and lower parts of the substrate, it is preferred that the curvature variation of the upper curved portion 1121 is greater than that of the lower curved portion 1121.

[0085] One embodiment of the invention is Figure 6 As shown, in the piezoelectric film 1111 of the deformable member 110, the electrodes of the two piezoelectric film 1111 are connected in series in the positive direction, that is, the positive electrode of the upper piezoelectric film 1111 and the negative electrode of the lower piezoelectric film 1111 are connected in series, and then the negative electrode of the upper piezoelectric film 1111 and the positive electrode of the lower piezoelectric film 1111 serve as two-pole external power sources; of course, as Figure 7As shown, in another embodiment, the electrodes of the two piezoelectric diaphragms 1111 are connected in parallel in the forward direction, that is, the positive electrode of the upper piezoelectric diaphragm 1111 is connected to the positive electrode of the lower piezoelectric diaphragm 1111, and at the same time, the negative electrode of the upper piezoelectric diaphragm 1111 is connected to the negative electrode of the lower piezoelectric diaphragm 1111, and then the negative electrode of the upper piezoelectric diaphragm 1111 and the positive electrode of the lower piezoelectric diaphragm 1111 serve as two-pole external power sources; it should be realized that the actual use of the above embodiments depends on the specific situation to match the spatial size and functional purpose.

[0086] Example 2

[0087] like Figure 8 and Figure 9 As shown, the difference between Example 2 of the present invention and Example 1 is that the two bending portions 1121 are arranged in a horizontal direction parallel to the second surface 22. When the piezoelectric diaphragm 1111 is switched from a power-off state to a power-on state, the bending curvatures of the two bending portions 1121 increase to drive the clamping member 120 away from the workpiece 1.

[0088] In the above technical solution, when the piezoelectric diaphragm 1111 is in the power-off state, the two bent portions 1121 maintain their pre-tightened bent shape by relying on the pre-tightening or elastic properties of the material. At this time, the clamping member 120 is in close contact with the workpiece 1 and is in the power-off protection position, ensuring that the workpiece 1 can be stably fixed in the event of a sudden power outage or system abnormality, avoiding the problem of the workpiece 1 flying out or sliding due to the failure of the clamping force or adsorption force of the fixing component 400, thereby greatly enhancing the safety protection capability of the system in an emergency and reducing the risks and losses in the production process; once the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state State, the input of the electrical signal prompts the piezoelectric diaphragm 1111 to produce a responsive deformation, which can increase the bending curvature of the two bending parts 1121. This increase in curvature will cause the bending part 1121 to shrink inward along the horizontal direction, prompting the clamping member 120 to move quickly from the state of contact with the workpiece 1 to the release position away from the workpiece 1. The entire release process is not only fast and smooth, but also avoids direct friction of the workpiece 1 during loading and unloading, reduces damage to the surface of the workpiece 1, and improves the integrity and production efficiency of the workpiece 1. At the same time, it can ensure the free movement of the workpiece 1 during the handover operation, thereby optimizing the production process.

[0089] In the second embodiment, the horizontal arrangement of the two curved portions 1121 changes the preload force of the clamping member 120 from downward pressure to horizontal push. The horizontal push clamping member 120 not only has a power-off protection function, but also has the ability to pass a reverse voltage to offset the deformation of the workpiece 1. Specifically, when the workpiece 1 is processed, the workpiece 1 is deformed due to changes in the working temperature. Although the magnitude of this deformation is not large, in the field of nano-scale processing, tiny deformations will also affect the processing quality and effect. When the fixing component 400 is an adsorption device, it does not have the ability to offset the deformation of the workpiece 1 in the horizontal direction. At this time, by applying a reverse voltage to the piezoelectric diaphragm 1111, the curvature of the two curved portions 1121 is reduced, and the two curved portions 1121 are expanded and deformed in the horizontal direction to increase the preload force of the clamping member 120 on the workpiece 1, thereby offsetting the deformation of the workpiece 1.

[0090] The other structures of the second embodiment are the same as those of the first embodiment and will not be described again here.

[0091] Example 3

[0092] like Figures 10 to 12 As shown, in embodiment three of the present invention, there are two bending portions 1121 and two piezoelectric films 1111. The two piezoelectric films 1111 are respectively attached to the two bending portions 1121, and the openings of the two bending portions 1121 are set to face each other; the two bending portions 1121 are arranged vertically to the second surface 22, one end of the upper bending portion 1121 is connected to the supporting portion 1124, and the other end of the upper bending portion 1121 is connected to the connecting portion 1123, and one end of the lower bending portion 1121 is supported on the second surface 22, and the other end of the lower bending portion 1121 is connected to the connecting portion 1123.

[0093] In the above technical solution, when in the power-off state, since the piezoelectric diaphragm 1111 does not respond to the electrical signal, the two bent portions 1121 maintain the pre-tightened bent shape. At this time, the bent portion 1121 located above and the bent portion 1121 located below jointly make the clamping member 120 close to the workpiece 1, so that the clamping member 120 is in the power-off protection position, effectively preventing the workpiece 1 from flying out or slipping when the adsorption force or clamping force fails, thereby improving the ability of the entire system to cope with abnormal situations; and when the piezoelectric diaphragm 1111 switches from the power-off state to the power-on state, the electrical signal drives the two piezoelectric diaphragms 1111 to deform, so that the clamping member 120 is away from the workpiece 1, so that the workpiece 1 can be released, thereby reducing the friction between the workpiece and the clamping device 100 during loading and unloading, avoiding surface damage to the workpiece 1, and improving the integrity rate and production efficiency of the workpiece 1.

[0094] like Figures 10 to 12As shown, in embodiment three of the present invention, when the piezoelectric diaphragm 1111 is switched from a power-off state to a power-on state, the bending curvature of the upper bending portion 1121 increases, and the bending curvature of the lower bending portion 1121 decreases, thereby driving the clamping member 120 away from the workpiece 1 and the base 101.

[0095] In the above technical solution, when the piezoelectric diaphragm 1111 is in the power-off state, the two bending portions 1121 maintain a certain bending curvature by relying on the natural elasticity of the material or the preset mechanical preload, and the bending portion 1121 located above and the bending portion 1121 located below act on the clamping member 120 through the connecting portion 1123 to ensure that the clamping member 120 is in close contact with the workpiece 1, so that the clamping member 120 is in the power-off protection position. This effectively avoids the accidental movement or damage of the workpiece 1 due to failure of the adsorption force or clamping force when the system is abnormal or the power is interrupted, thereby ensuring production safety and reducing potential economic losses. Once the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the input of the electrical signal prompts the piezoelectric diaphragm 1111 to generate In response to the deformation, the curvature of the upper curved portion 1121 increases, which prompts it to shrink inward (shrink in the direction away from the workpiece 1), driving the connecting portion 1123 and the clamping member 120 to move in the direction away from the workpiece 1; at the same time, the curvature of the lower curved portion 1121 decreases, because one end of the curved portion 1121 abuts against the second surface 22. The reduction in curvature actually produces a tendency to expand upward. This asymmetric deformation force allows the clamping member 120 to deflect upward. In this way, the clamping member 120 not only moves away from the workpiece 1, but also moves away from the base 101, achieving a quick and smooth release of the workpiece 1, leaving sufficient space for subsequent loading, unloading or handover operations of the workpiece 1, and significantly improving production efficiency. It should be noted that the upward deflection effect of the clamping member 120 can be achieved by setting the curvature of different curved portions 1121 and adjusting the voltage of the piezoelectric film 1111 on different curved portions 1121.

[0096] like Figures 10 to 12 as well as Figure 19 and Figure 20As shown, in the third embodiment of the present invention, a motion system of the clamping device 100 is used. During the non-clamping protection process of the clamping device 100, the piezoelectric diaphragm 1111 is in an energized state, and the flexible member 112 is no longer in the initial bending state. After the upper piezoelectric diaphragm 1111 is energized, it drives the upper curved portion 1121 to bend and deform, and the curvature of the upper curved portion 1121 becomes larger. After the lower piezoelectric diaphragm 1111 is energized, it drives the lower curved portion 1121 to bend and deform, and the curvature of the lower curved portion 1121 becomes smaller. As described above, the curvature of the upper curved portion 1121 becomes larger while the curvature of the lower curved portion 1121 becomes smaller, causing the connecting portion 1123 to present an "upward" state of swinging upward. In this way, the flexible member 112 drives the clamping member 120 to swing upward, so that the clamping piece 122 and the lining The bottom is detached; the clamping pieces 122 of the four failure protection components 10 of the motion system are simultaneously moved out of the vertical activity space range of the substrate. At this time, the fixing component 400 releases the substrate, the lifting device 200 rises and drives the substrate to move upward to the handover position, the handover device 300 enters the handover position from the side and takes the substrate, and after the lifting device 200 moves down, the handover device 300 takes away the substrate, thereby completing a piece unloading operation; or, the handover device 300 brings the substrate and enters the handover position from the side, the lifting device 200 moves to the handover position and takes the substrate, and after the handover device 300 is withdrawn, the lifting device 200 falls to the first surface 21, the fixing component 400 works, and then the failure protection component 10 is powered off and starts protection, thereby completing a piece loading operation; that is, during the non-clamping protection process of the clamping device 100, the clamping device 100 including the clamping piece 122 will not interfere with the substrate loading and unloading operation space.

[0097] In the third embodiment, the two bent portions 1121 are disposed opposite to each other, further reducing the volume of the failure protection assembly 10 in a direction perpendicular to the second surface 22 .

[0098] Example 4

[0099] like Figures 17 and 18 As shown, the difference between the fourth embodiment of the present invention and the third embodiment is that when the piezoelectric diaphragm 1111 is switched from the power-off state to the power-on state, the curvatures of the two bending portions 1121 are increased to drive the clamping member 120 away from the workpiece 1.

[0100] In the above technical solution, when the piezoelectric diaphragm 1111 is in the power-off state, the two bent portions 1121 rely on the elasticity of the material itself or the preset pre-tightening force to maintain close contact with the workpiece 1, forming a stable clamping state. Even in the event of a sudden power outage or system abnormality, it can effectively prevent the workpiece 1 from slipping or flying out due to failure of the adsorption force or clamping force, ensuring the safety of the workpiece 1 and the stability of the system, and reducing the damage and economic losses caused by accidental movement of the workpiece 1 during the production process; when the piezoelectric diaphragm 1111 is changed from the power-off state to the power-on state, the bending curvature of the two bent portions 1121 increases. In this way, the increase in the curvature of the bent portion 1121 causes the bent portion 1121 to shrink inward (shrink in the horizontal direction away from the workpiece 1), thereby prompting the clamping member 120 to quickly and smoothly transition from the contact state with the workpiece 1 to the completely separated release state.

[0101] The pre-tightening force of the clamping member 120 of the fourth embodiment is also in the form of a horizontal push, and it also has the ability to offset the deformation of the workpiece 1 in the second embodiment, which will not be described in detail here.

[0102] The other structures of the fourth embodiment are the same as those of the third embodiment and will not be described again here.

[0103] It should be noted that the present invention can solve the problem in the prior art that the vacuum adsorption clamping method lacks means to protect the workpiece 1 (substrate) when the power is cut off and the gas is cut off, and the problem that the motor-driven clamping method lacks means to protect the workpiece 1 (substrate) when the clamping is loose when the power is cut off. The flexible part 112 of the clamping device 100 of the present invention is pre-deformed to apply force to the substrate to clamp and protect the substrate without interfering with the normal loading and unloading operations of the substrate.

[0104] It should be noted that the present invention can solve the problems of compact spatial layout and limited size of the clamping method in the prior art. The clamping device 100 of the present invention is small in size, occupies a small volume, and has a more flexible layout.

[0105] It should be noted that the present invention provides a clamping device 100 that can not only improve the clamping and protection capabilities of the substrate, but also has the advantages of extremely small size, light weight, and easy installation and maintenance. It can also realize the characteristics of automatic control and has a wide range of adaptability.

[0106] like Figure 3 、 Figure 19 and Figure 20As shown, an embodiment of the present invention provides a motion system, comprising: the above-mentioned clamping device 100; a lifting device 200, located below the clamping device 100, the lifting device 200 having a lifting end for lifting the workpiece 1; a handover device 300, the handover device 300 is located above the clamping device 100, the handover device 300 has a clamping portion movably arranged along the first direction X and / or the second direction Y, the clamping portion having a clamping cavity for clamping the workpiece 1.

[0107] Specifically, the first surface 21 and the second surface 22 have coaxially arranged intersection holes, and the lifting end of the lifting device 200 can pass through the intersection holes to move the workpiece 1 to the intersection position.

[0108] like Figure 3 、 Figure 19 and Figure 20 As shown, a motion system of the clamping device 100 is used. During the normal clamping and protection process of the clamping device 100, the piezoelectric diaphragm 1111 is in a power-off state, and the flexible member 112 is in a pre-tightened bending state. A force is applied to the workpiece 1 through the clamping member 120, and the clamping piece 122 of the clamping member 120 is close to the edge area of ​​the workpiece 1, thereby achieving clamping and protection of the workpiece 1; the purpose of the clamping device 100 is to protect the workpiece 1 in unexpected situations, mainly targeting situations such as power outages triggered by loss of control of the motion system and gas outages caused by power outages, such as power outages and gas outages caused by improper operation of personnel. In these situations, the workpiece 1 is very easy to fly out and cause damage.

[0109] Specifically, in the embodiment of the present invention, the force exerted by each clamping member 120 on the substrate is approximately several Newtons.

[0110] The above-mentioned motion system has all the advantages of the above-mentioned clamping device, which will not be described in detail here.

[0111] From the above description, it can be seen that the above-mentioned embodiments of the present invention achieve the following technical effects: the failure protection component has a pre-deformation capability, and when power is not supplied, the clamping member can abut the workpiece. When the fixing component is fixing the workpiece, that is, when power is supplied or ventilation is provided, the clamping member is always in a position abutting the workpiece, and the clamping device fixes the workpiece through the fixing component. By arranging multiple failure protection components on the second surface of the base, an effective protection ring can be formed around the first surface. Once the motor-driven clamping power is cut off or the vacuum adsorption is cut off, the clamping member can still abut the workpiece under the drive of the deformable member, so that the clamping member is in a power-off protection position, that is, the limit protection mechanism is activated. At this time, the clamping member relies on a pre-set mechanical preload to tightly abut the edge of the workpiece to provide a certain limit protection effect, effectively avoiding the risk of the workpiece flying out or sliding due to adsorption failure or loose clamping, thereby greatly reducing damage to the workpiece caused by power outage or ventilation. When the workpiece needs to be handed over, the fixing component is de-energized or ventilation is not provided, and the failure protection component is energized, causing the clamping member to disengage and move away from the workpiece, and then the handover is completed.

[0112] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A clamping device, characterized in that: include: A base (101) having a first surface (21) and a second surface (22), wherein the first surface (21) is used to support a workpiece (1); the first surface (21) is arranged on the second surface (22) in a parallel or overlapping manner; a fixing assembly (400), arranged on the first surface (21) or the second surface (22), the fixing assembly (400) being used to fix the workpiece (1); A plurality of failure protection components (10) are sequentially arranged on the second surface (22) along the circumference of the first surface (21), the failure protection components (10) comprising a deformable component (110) and a clamping component (120), the clamping component (120) being connected to the second surface (22) via the deformable component (110), the deformable component (110) comprising a piezoelectric element (111) capable of generating deformation in response to an electrical signal, the clamping component (120) being capable of abutting or separating from the workpiece (1) under the drive of the deformable component (110), wherein when the deformable component (110) is powered off, the clamping component (120) is in a power-off protection position abutting against the workpiece (1), and when the deformable component (110) is powered on, the clamping component (120) is in a release position separated from the workpiece (1).

2. The clamping device according to claim 1, characterized in that The deformable component (110) further includes a flexible component (112), one end of the flexible component (112) is connected to the second surface (22), and the other end of the flexible component (112) is connected to the clamping component (120). The piezoelectric component (111) is connected to the flexible component (112) and is located between the two ends of the flexible component (112). The piezoelectric component (111) can drive the flexible component (112) to produce corresponding deformation.

3. The clamping device according to claim 2, characterized in that The flexible component (112) includes a supporting portion (1124), a connecting portion (1123), and at least one bent portion (1121) connected between the supporting portion (1124) and the connecting portion (1123), wherein the supporting portion (1124) is connected to the base (101), and the connecting portion (1123) is connected to the clamping member (120). The piezoelectric component (111) includes at least one piezoelectric diaphragm (1111), and the piezoelectric diaphragm (1111) is arranged on the surface of the bent portion (1121).

4. The clamping device according to claim 3, characterized in that There are two bending parts (1121), and there are two piezoelectric diaphragms (1111). The two piezoelectric diaphragms (1111) are respectively attached to the two bending parts (1121). One end of the two bending parts (1121) is connected to the supporting part (1124), and the other end of the two bending parts (1121) is connected to the connecting part (1123). The openings of the two bending parts (1121) are arranged to face each other.

5. The clamping device according to claim 4, characterized in that: The two curved portions (1121) are arranged vertically relative to the second surface (22), the curved portion (1121) located at the bottom abuts against the second surface (22), and when the piezoelectric diaphragm (1111) is switched from a power-off state to a power-on state, the curvatures of the two curved portions (1121) increase, thereby driving the clamping member (120) away from the base (101) and the workpiece (1); or, The two bending portions (1121) are arranged in a horizontal direction parallel to the second surface (22); when the piezoelectric diaphragm (1111) is switched from a power-off state to a power-on state, the bending curvatures of the two bending portions (1121) increase, thereby driving the clamping member (120) away from the workpiece (1).

6. The clamping device according to claim 3, characterized in that: There are two bending portions (1121), and there are two piezoelectric membranes (1111). The two piezoelectric membranes (1111) are respectively attached to the two bending portions (1121), and the openings of the two bending portions (1121) are arranged in opposite directions. The two curved portions (1121) are arranged vertically to the second surface (22), one end of the curved portion (1121) located at the upper position is connected to the supporting portion (1124), and the other end of the curved portion (1121) located at the upper position is connected to the connecting portion (1123); one end of the curved portion (1121) located at the lower position is supported on the second surface (22), and the other end of the curved portion (1121) located at the lower position is connected to the connecting portion (1123).

7. The clamping device according to claim 6, characterized in that When the piezoelectric diaphragm (1111) is switched from a power-off state to a power-on state, the curvatures of the two curved portions (1121) are increased to drive the clamping member (120) away from the workpiece (1); or, When the piezoelectric diaphragm (1111) is switched from a power-off state to a power-on state, the bending curvature of the upper curved portion (1121) increases, and the bending curvature of the lower curved portion (1121) decreases, thereby driving the clamping member (120) away from the workpiece (1) and the base (101).

8. The clamping device according to any one of claims 1 to 7, characterized in that The clamping member (120) comprises: A clamping frame (121) connected to the deformable member (110); A clamping piece (122) is connected to the clamping frame (121), the clamping piece (122) is located on a side of the clamping frame (121) away from the deformable member (110), and the clamping piece (122) is detachably connected to the clamping frame (121).

9. The clamping device according to claim 8, characterized in that The clamping piece (122) is in the shape of a flat plate; or, The clamping piece (122) comprises a first segment (1221) and a second segment (1222) which are connected and arranged at an angle, wherein the first segment (1221) is connected to the clamping frame (121), and the second segment (1222) is located on a side of the first segment (1221) away from the deformable member (110), and the second segment (1222) is located above the first segment (1221).

10. The clamping device according to any one of claims 1 to 7, characterized in that The failure protection assembly (10) comprises a plurality of the deformable members (110) and a clamping member (120), wherein the plurality of the deformable members (110) are all connected to the clamping member (120); or, The failure protection assembly (10) comprises a deformable member (110) and a clamping member (120).

11. The clamping device according to any one of claims 1 to 7, characterized in that The number of the plurality of failure protection components (10) is four, and the four failure protection components (10) are respectively a first failure protection component (10a), a second failure protection component (10b), a third failure protection component (10c), and a fourth failure protection component (10d); Wherein, the first failure protection component (10a) and the second failure protection component (10b) are respectively located on both sides of the first surface (21) and are mirror-symmetrical in the first direction (X), and the third failure protection component (10c) and the fourth failure protection component (10d) are respectively located on both sides of the first surface (21) and are mirror-symmetrical in the second direction (Y); or, the first failure protection component (10a) and the second failure protection component (10b) are respectively located on both sides of the first surface (21) and are mirror-symmetrical in the first direction (X), the third failure protection component (10c) and the fourth failure protection component (10d) are respectively located on both sides of the first surface (21) and are mirror-symmetrical in the first direction (X), the first failure protection component (10a) and the third failure protection component (10c) are spaced apart in the second direction (Y), and the second failure protection component (10b) and the fourth failure protection component (10d) are spaced apart in the second direction (Y).

12. A motion system, characterized in that: include: The clamping device (100) according to any one of claims 1 to 11; A lifting device (200) is located below the clamping device (100), and the lifting device (200) has a lifting end for lifting the workpiece (1); A handover device (300) is located above the clamping device (100), the handover device (300) has a clamping portion that is movably arranged along a first direction (X) and / or a second direction (Y), and the clamping portion has a clamping cavity for clamping the workpiece (1).

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