Nondestructive cleaning ceramic chopper device and cleaning method thereof

Abstract

The invention discloses a lossless cleaning ceramic chopper device and a cleaning method thereof, and belongs to the technical field of semiconductor device packaging. The device comprises a mechanical part, a heating part and an airflow part. The mechanical part comprises a chopper fixing support (4), a Z-axis driving guide rail (6), a Z-axis driving module (5), a chopper positioning arm (7), a chopper fixing device (8), a waste metal recovery disc (13) and a base (10). The heating part comprises a flame nozzle fixing bracket (12), a flame nozzle (9), an X-axis driving module (14), a Y-axis driving module (15), a liquefied gas fuel supply bottle (17) and an ignition switch (11); the airflow part comprises a compressed air pipeline (3), a compressed air switch (1) and a compressed air pressure gauge (2); and the compressed air switch (1) is arranged at the air inlet. The problem that a ceramic chopper is blocked and scrapped in the prior art is solved. The method is suitable for the technical field of semiconductor integrated circuit packaging.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor device packaging, and further relates to the field of chip wire bonding of semiconductor devices. Specifically, it relates to a device and method for non-destructively cleaning a ceramic bonding tool. Background Art

[0002] In traditional microelectronics assembly, wire bonding, as a complex assembly and manufacturing process technology, is a key technology for improving the performance of microelectronic circuits such as general microelectronic devices, application-specific integrated circuits, thick and thin film hybrid integrated circuits, multi-chip assemblies, and system integrated circuits. Gold wire bonding has the advantages of high reliability, good flexibility, strong adaptability, and simple process, and is widely used in the wire bonding packaging of integrated circuits and semiconductor discrete devices. As a key tool in "gold wire bonding", the ceramic bonding tool plays an extremely important role in semiconductor packaging technology.

[0003] The structure of the ceramic bonding tool is very precise and complex. It is a typical precision microfabrication product with high value and is a consumable. With the rapid development of the semiconductor industry, the pad size of chips is getting smaller and the wiring density is getting higher. The gold ball bonding process is widely used in high-density hermetic packaging products. The demand for ceramic bonding tools is increasing continuously. In the semiconductor packaging industry, the lifespan of a ceramic bonding tool is generally about 1 million solder joints. However, for the bonding of non-standard hermetic packaging products, the lifespan of the ceramic bonding tool will be greatly shortened. Most bonding tools are only used for about 50,000 solder joints, and the gold solder balls will block the port of the bonding tool, resulting in scrapping. This greatly reduces the service life of the ceramic bonding tool and increases the packaging cost of the product. If the blocked bonding tool can clean the gold solder balls at the port of the bonding tool without damage, the cleaned bonding tool can continue to be used without affecting the performance, product quality, and reliability of the bonding tool.

[0004] In the Chinese patent database, the patents related to the production of integrated circuit ceramic bonding tools include CN117790344A, "A Ceramic Bonding Tool with a Composite CVD Diamond Coating and Its Preparation Method", CN117865654A, "A Ceramic Bonding Tool and Its Preparation Method and Application", CN115784754B, "A Ceramic Bonding Tool and Its Preparation Method", CN116003109B, "A High-Performance Alumina Ceramic Bonding Tool and Its Preparation Method", etc. However, none of these patents involve the cleaning of blocked ceramic bonding tools.

[0005] In view of this, the present invention is specifically proposed. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to solve the problem of non-destructive cleaning of blocked ceramic bonding tools during the existing gold ball bonding process.

[0007] The present invention aims to provide a device and method for non-destructive cleaning of ceramic splitting knives. For splitting knives that have not reached the end of their service life and are blocked, the performance of the ceramic splitting knives will not be affected after non-destructive cleaning, and the ceramic splitting knives can be used normally. The device has the characteristics of high quality, high efficiency, low cost, simplicity and reliability.

[0008] To this end, the present invention provides a non-destructive cleaning ceramic splitting knife device, such as Figures 1-3 As shown. It consists of mechanical part, heating part and air flow part.

[0009] The mechanical part includes a splitting knife fixing bracket 4, a Z-axis driving guide rail 6, a Z-axis driving module 5, a splitting knife positioning arm 7, a splitting knife fixing device 8, a waste metal recovery plate 13, and a base 10. The splitting knife fixing bracket 4 is vertically mounted on the base 10, and is used to support the splitting knife positioning arm; the Z-axis driving guide rail 6 is mounted on the vertical surface of the splitting knife fixing bracket 4, and is used to fix the splitting knife Z-axis driving module; the Z-axis driving module 5 is mounted on the Z-axis driving guide rail 6, and is used to control the Z-axis lifting and lowering of the splitting knife positioning arm; the splitting knife positioning arm 7 is mounted on the Z-axis driving module 5, and is used to fix the splitting knife fixing device; the splitting knife fixing device 8 is mounted on the lower surface of the splitting knife positioning arm 7, and is used to fix the splitting knife to be cleaned; the waste metal recovery plate 13 is mounted directly below the splitting knife fixing device 8, and is used to recover the fallen metal objects.

[0010] The heating part includes a flame nozzle fixing bracket 12, a flame nozzle 9, an X-axis driving module 14, a Y-axis driving module 15, a liquefied gas fuel supply bottle 17, and an ignition switch 11. The flame nozzle 9 is installed in front of the port of the splitter to be cleaned, and its function is to generate high temperature to melt the metal residue at the port of the splitter; the flame nozzle fixing bracket 12 is installed behind the flame nozzle 9, and is used to fix the flame nozzle 9 and the liquefied gas fuel supply bottle 17; the liquefied gas fuel supply bottle 17 is installed at the lower rear of the flame nozzle fixing bracket, and is used to provide liquefied gas fuel; the X-axis driving module 14 and the Y-axis driving module 15 are installed below the flame nozzle fixing bracket 12, and are used to control the XY axis position of the flame nozzle; the ignition switch 11 is installed above the flame nozzle fixing bracket 12, and is used to control the flame nozzle to spray fire.

[0011] The air flow part includes a compressed air pipeline 3, a compressed air switch 1, and a compressed air pressure gauge 2. The compressed air switch 1 is installed at the air inlet to control the on and off of the compressed air; the compressed air switch 1 is installed at the air outlet of the compressed air switch 1 to control the size of the compressed air gas flow.

[0012] The cleaning method of a non-destructive cleaning ceramic splitting knife device is as follows: (1) Install the plugging blade into the blade positioning hole; (2) Use the Z-axis drive module to adjust the height of the clogged splitting knife, and use the X-Y axis drive module to adjust the position of the flame nozzle. (3) Turn on the ignition switch so that the outer flame of the flame ejected from the nozzle is aligned with the port of the clogged splitting knife. The metal at the port of the clogged splitting knife heated by the nozzle is melted. (4) The flame nozzle continues to heat, and the compressed air valve is opened to blow air into the port of the splitting knife, so that the molten metal falls off from the port of the splitting knife and drops into the metal foreign object collection dish. (5) After blowing air, turn off the switches of the flame nozzle and the compressed air control valve, and wait for the splitting knife to cool naturally to complete the cleaning of the clogged splitting knife.

[0013] The present invention solves the problem of clogging and scrapping of ceramic splitting knives in the prior art. This cleaning method is a non-destructive cleaning and will not affect the performance of the ceramic splitting knife. This device not only has a high degree of automation, but also has the characteristics of good cleaning quality, simple and reliable structure, and low equipment manufacturing cost. It is easy to promote and use and is applicable to the field of semiconductor integrated circuit packaging technology. Description of the Drawings

[0014] Figure 1 It is a schematic diagram of the overall structure of the device for non-destructively cleaning ceramic splitting knives.

[0015] Figure 2 It is a schematic diagram of the exploded structure of the splitting knife fixing part.

[0016] Figure 3 It is a schematic diagram of the exploded structure of the heating part.

[0017] In the figure: 1 is the compressed air switch, 2 is the compressed air pressure gauge, 3 is the compressed air pipeline, 4 is the splitting knife fixing bracket, 5 is the Z-axis drive module, 6 is the Z-axis drive guide rail, 7 is the splitting knife positioning arm, 8 is the splitting knife fixing device, 9 is the flame nozzle, 10 is the base, 11 is the ignition switch, 12 is the flame nozzle fixing bracket, 13 is the waste metal recovery dish, 14 is the X-axis drive module, 15 is the Y-axis drive module, 16 is the flame nozzle support column, and 17 is the liquefied gas fuel supply bottle. Detailed Embodiments

[0018] As Figures 1-3 shown, the device for non-destructively cleaning ceramic splitting knives and its cleaning method are specifically implemented as follows: Fix the bonding tool to be cleaned on the bonding tool fixing device 8 using a torque wrench, and adjust the Z-axis drive module 5 so that the port of the bonding tool to be cleaned is in the same plane as the flame nozzle. Adjust the X drive module 14 and the Y-axis drive module 15 so that the flame nozzle of the device is 0.5 cm in front of the port of the bonding tool to be cleaned. Turn on the ignition switch 11, and the flame nozzle 9 starts to spray fire to heat the port of the bonding tool (the surface temperature of the bonding tool reaches 1100 °C - 1500 °C). At this time, the metal blocking the port of the bonding tool begins to melt (the melting point of Au is 1064.43 °C). After the flame nozzle heats the port of the bonding tool for 2 minutes, open the compressed air valve 1, and the flame nozzle continues to heat the port of the bonding tool. Confirm that the compressed air pressure and gas flow rate are 0.1 Mpa ± 0.05 Mpa, and the compressed air pipeline blows air into the port of the bonding tool, allowing the melted metal to fall from the port of the bonding tool into the waste metal recovery dish 13. After waiting for the compressed air to blow for 1 minute, turn off the ignition switch and the compressed air valve switch. After waiting for the bonding tool to cool naturally, use a torque wrench to remove the bonding tool to complete the non-destructive cleaning of the blocked bonding tool.

[0019] Finally, it should be noted that the above embodiments are merely examples for clear illustration. The present invention includes but is not limited to the above embodiments, and it is not necessary and impossible to enumerate all implementation manners here. For those of ordinary skill in the art, other different forms of changes or variations can be made based on the above description. All implementation manners that meet the requirements of the present invention fall within the protection scope of the present invention.

Claims

1. A non-destructive cleaning ceramic splitting knife device, characterized in that: It consists of mechanical part, heating part and air flow part; The mechanical part comprises a splitting knife fixing bracket (4), a Z-axis driving guide rail (6), a Z-axis driving module (5), a splitting knife positioning arm (7), a splitting knife fixing device (8), a waste metal recovery plate (13), and a base (10); The riving knife fixing bracket (4) is vertically mounted on the base (10) and is used to support the riving knife positioning arm; the Z-axis driving guide rail (6) is mounted on a vertical surface of the riving knife fixing bracket (4); The Z-axis driving module (5) is mounted on the Z-axis driving guide rail (6); The riving knife positioning arm (7) is mounted on the Z-axis driving module (5); The splitting knife fixing device (8) is installed on the lower surface of the splitting knife positioning arm (7); The waste metal recovery disc (13) is installed directly below the splitting knife fixing device (8); The heating part comprises a flame spray head fixing bracket (12), a flame spray head (9), an X-axis driving module (14), a Y-axis driving module (15), a liquefied gas fuel supply bottle (17), and an ignition switch (11); The flame spray head (9) is installed directly in front of the port of the splitting knife to be cleaned; The flame spray head fixing bracket (12) is installed directly behind the flame spray head (9), and the flame spray head (9) and the liquefied gas fuel supply bottle (17) are fixed on the flame spray head fixing bracket (12); The liquefied gas fuel supply bottle (17) is installed at the lower rear of the flame nozzle fixing bracket; The X-axis driving module (14) and the Y-axis driving module (15) are installed directly below the flame spray head fixing bracket (12); The ignition switch (11) is installed directly above the flame spray head fixing bracket (12); The air flow part comprises a compressed air pipeline (3), a compressed air switch (1), and a compressed air pressure gauge (2); The compressed air switch (1) is installed at the air inlet; The compressed air switch (1) is installed at the air outlet of the compressed air switch (1).

2. A method for cleaning a non-destructive cleaning ceramic splitting knife device as claimed in claim 1, characterized in that: The cleaning method is as follows: (1) Install the plugging blade into the blade positioning hole; (2) Use the Z-axis drive module to adjust the height of the plugging knife, and use the XY-axis drive module to adjust the position of the flame nozzle; (3) Turn on the ignition switch and aim the outer flame of the nozzle at the blocked splitter port. Aim the nozzle at the splitter port to be cleaned to heat the metal blocking the splitter port and melt it; (4) The flame nozzle continues to heat, and the compressed air valve is opened to blow air into the splitter port, so that the liquid metal falls off from the splitter port and falls into the metal foreign body collection dish; (5) After the air blowing is completed, close the flame nozzle and the compression control valve switch, wait for the splitter to cool naturally, and complete the cleaning of the blocked splitter.

3. A method for cleaning a non-destructive cleaning ceramic splitting knife device as claimed in claim 2, characterized in that: The riving knife port to be cleaned is in the same plane as the flame nozzle.

4. A method for cleaning a non-destructive cleaning ceramic splitting knife device as claimed in claim 2, characterized in that: The flame nozzle is 0.5 cm away from the port of the riving knife to be cleaned.

5. A method for cleaning a non-destructive cleaning ceramic splitting knife device as claimed in claim 2, characterized in that: Heat until the surface temperature of the splitter reaches 1100℃-1500℃.

6. A method for cleaning a non-destructive ceramic splitting knife device as claimed in claim 2, characterized in that: The compressed air pressure gas flow rate is 0.1Mpa±0.05Mpa.

7. A method for cleaning a non-destructive ceramic splitting knife device as claimed in claim 2, characterized in that: After blowing compressed air for 1 minute, turn off the ignition switch and the compressed air valve switch.

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