Recycling and circulating supply system and recycling method for silicon wafer cutting fluid

Abstract

The invention discloses a recycling and circulating supply system for silicon wafer cutting liquid. The recycling and circulating supply system comprises a photovoltaic silicon wafer cutting mortar cylinder, an automatic centrifugal machine, a mortar circulating pump, a raw water circulating barrel, a circulating water filtering assembly, a filter pressing device, a filter pressing collecting barrel and a filter pressing clean liquid circulating pump. Impurities such as large solid particles and metal filings of silicon wafer cutting fluid are preliminarily intercepted through an automatic centrifugal machine, then the filtering performance of a silicon carbide membrane assembly is recovered through the backwashing technology of a circulating water filtering assembly, and meanwhile the impurities backwashed into a concentration barrel are separated from the silicon wafer cutting fluid through the strong pressure effect of a filter pressing device. Solid particles and liquid in the cutting liquid are efficiently separated, the water content of treated silicon powder is reduced, meanwhile, clean liquid in the clean liquid barrel is fed into the cutting liquid clean barrel of the photovoltaic silicon wafer cutting equipment through the silicon wafer cutting liquid circulating pump, dirty liquid obtained after cutting of the equipment flows into the mortar cylinder to be recycled, and therefore the cutting liquid is purified from different angles, and the cutting efficiency is improved. And the recycling efficiency and quality are greatly improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of silicon wafer cutting fluid treatment, and particularly relates to a recycling and circulating supply system for silicon wafer cutting fluid. Background Art

[0002] Photovoltaic power generation refers to a technology that directly converts light energy into electrical energy using solar cells. This power generation system mainly consists of three major components: solar panels, controllers, and inverters. With the continuous development of the photovoltaic market, the production scale of solar cells has steadily increased, driving a steady growth in the demand for upstream silicon wafers in the photovoltaic industry. During the cutting process of photovoltaic solar silicon wafers, silicon wafer cutting fluid, as an auxiliary consumable product that must be used during the silicon wafer cutting process, its usage has expanded with the growth of the photovoltaic solar industry and the silicon wafer processing industry in China. As a result, a large amount of cutting fluid wastewater is generated. Direct discharge of this cutting fluid wastewater will cause waste of cutting fluid, cost loss, and environmental pollution. Therefore, it must be recycled and treated.

[0003] Existing silicon wafer cutting fluids usually use a membrane filtration system. After filtering the silicon wafer cutting fluid for a period of time, a large amount of impurities such as solid particles, metal debris, and oil stains will gradually adhere to the membrane module, resulting in a narrowing of the filtration channel, an increase in filtration resistance, and a decrease in filtration efficiency. During the entire process of treating silicon wafer cutting fluid, not only does the filtration membrane module need to be frequently cleaned, but the processing capacity of the filtration membrane module is small, and at the same time, the water content of the treated silicon powder is high, resulting in a relatively high cost for the recycled water. Summary of the Invention

[0004] (1) Technical Problems to be Solved Aiming at the deficiencies of the prior art, the purpose of the present invention is to provide a recycling and circulating supply system for silicon wafer cutting fluid, which aims to solve the problems that existing silicon wafer cutting fluids usually use a membrane filtration system, not only requiring frequent cleaning of the filtration membrane module, but also having a small processing capacity, and at the same time, the water content of the treated silicon powder is high, resulting in a relatively high cost for the recycled water.

[0005] (2) Technical Solutions To solve the above technical problems, the present invention provides such a recycling and circulating supply system for silicon wafer cutting fluid, including a photovoltaic silicon wafer cutting mortar tank, an automatic centrifuge, a mortar circulation pump, a raw water circulation barrel, a circulating water filtration component, a pressure filtration device, a pressure filtration collection barrel, and a pressure filtration purified liquid circulation pump; The circulating water filtration component includes a concentration barrel, a silicon carbide membrane module, a backwash tank, a gas storage tank, a rinsing PE barrel, a cleaning PE barrel, and a purified liquid barrel. A raw water pipe is installed between the rinsing PE barrel and the silicon carbide membrane module, and a filtered purified liquid pipe is installed on the purified liquid barrel; The photovoltaic silicon wafer cutting mortar cylinder is connected to the raw water circulation barrel through an automatic centrifuge and a mortar circulation pump. The other end of the raw water circulation barrel is connected to the raw water pipe. The concentration barrel is connected to the inlet end of the pressure filtration device. The outlet end of the pressure filtration device is connected to the raw water circulation barrel through a pressure filtration collection barrel and a pressure filtration purified liquid circulation pump.

[0006] Preferably, the automatic centrifuge includes a centrifuge body and a centrifuge transfer water tank. The photovoltaic silicon wafer cutting mortar cylinder is connected to the inlet end of the centrifuge body, the outlet end of the centrifuge body is connected to the centrifuge transfer water tank, and the centrifuge transfer water tank is connected to the mortar circulation pump through a first pipeline.

[0007] Furthermore, a first drain valve is installed on the raw water circulation barrel, and a raw water outlet manual valve and a filtered liquid inlet valve are installed between the raw water circulation barrel and the raw water pipe.

[0008] Even further, a silicon wafer cutting fluid circulation pump is installed on the filtered purified liquid pipe, and a first control valve is installed between the inlet end of the silicon wafer cutting fluid circulation pump and the purified liquid barrel.

[0009] Even further, the pressure filtration device includes a bracket, a mounting frame, a silicon powder recovery barrel, a hydraulic moving assembly, and a plurality of filter cloth assemblies. The mounting frame is fixedly connected to the upper surface of the bracket. The silicon powder recovery barrel is located below the mounting frame. An outlet pipe and an inlet pipe are installed on the left side of the mounting frame. An inlet pump is installed on the inlet pipe. The plurality of filter cloth assemblies are slidably arranged on the mounting frame. A connecting member is installed between adjacent filter cloth assemblies. The hydraulic moving assembly is used to drive the plurality of filter cloth assemblies to move and compress. A guiding cover is fixedly connected to the lower surface of the mounting frame. The bottom end of the guiding cover gradually narrows and is located above the silicon powder recovery barrel. Moving wheels are installed at the four corners of the lower surface of the silicon powder recovery barrel.

[0010] Even further, a limiting block is fixedly connected to one side of the connecting member away from the filter cloth assembly. Both the upper and lower sides of the connecting member are arc-shaped. Round rods are fixedly connected to the front and rear sides of the upper surface of the mounting frame, and the outer surface of the round rod contacts the connecting member.

[0011] Even further, the hydraulic moving assembly includes an oil barrel, a hydraulic pump, a hydraulic cylinder, and a mounting plate. The hydraulic pump is installed on the upper surface of the oil barrel. The hydraulic cylinder is fixedly connected to the right side of the mounting frame. The mounting plate is fixedly connected to the output end of the hydraulic cylinder and is fixedly connected to the right filter cloth assembly.

[0012] Even further, rollers are rotatably connected to the front and rear sides of the mounting plate through bearings. The rollers contact the upper surface of the mounting frame. A lifting ring is fixedly connected to the upper surface of the mounting plate.

[0013] Even further, a second drain valve is installed on the pressure filtration collection barrel, and a second control valve is installed between the pressure filtration collection barrel and the pressure filtration purified liquid circulation pump.

[0014] A recycling method for a recycling and circulating supply system of a silicon wafer cutting fluid, comprising the following steps: Step 1: The silicon wafer cutting fluid in the photovoltaic silicon wafer cutting mortar cylinder is fed into an automatic centrifuge. The large particles in the cutting fluid are intercepted by the automatic centrifuge, and then sent into the raw water circulation barrel and the raw water pipe in the circulating water filtration component through a mortar circulation pump; Step 2: The circulating water filtration component operates, and an anti-flushing program is started to flush the impurities in the silicon carbide membrane component into the concentration barrel, and the treated purified liquid flows into the purified liquid barrel; Step 3: Start the liquid inlet pump to send the liquid in the concentration barrel into multiple filter cloth components and fill the multiple filter cloth components with liquid. Then start the hydraulic pump to extract the hydraulic oil in the hydraulic oil barrel and send it to the hydraulic cylinder. At this time, the hydraulic cylinder drives the mounting plate to move leftward to squeeze the multiple filter cloth components. At this time, the multiple filter cloth components filter the impurities on the filter cloth during the squeezing process, and the discharged water enters the pressure filtration collection barrel through the liquid outlet pipe; Step 4: The water after pressure filtration enters the raw water circulation barrel for circulation through the pressure filtration purified liquid circulation pump. At the same time, the purified liquid in the purified liquid barrel is sent into the cutting fluid purified barrel of the photovoltaic silicon wafer cutting equipment through the silicon wafer cutting fluid circulation pump, and the contaminated liquid after the equipment cutting flows to the photovoltaic silicon wafer cutting mortar cylinder for recycling.

[0015] (3) Beneficial effects Compared with the prior art, the beneficial effects of the present invention are as follows: In the above solution, the large solid particles and metal chips and other impurities in the silicon wafer cutting fluid are initially intercepted by an automatic centrifuge. Then, through the anti-flushing technology of the circulating water filtration component, the silicon carbide membrane component is cleaned by reverse water flow to remove the impurities attached to the silicon carbide membrane component and restore the filtration performance of the silicon carbide membrane component. At the same time, the impurities flushed into the concentration barrel are efficiently separated from the solid particles and liquid in the cutting fluid under the strong pressure of the pressure filtration device, reducing the moisture content of the treated silicon powder. At the same time, the purified liquid in the purified liquid barrel is sent into the cutting fluid purified barrel of the photovoltaic silicon wafer cutting equipment through the silicon wafer cutting fluid circulation pump, and the contaminated liquid after the equipment cutting flows to the photovoltaic silicon wafer cutting mortar cylinder for recycling. Thus, the cutting fluid is purified from different angles, greatly improving the efficiency and quality of recycling and circulation. Description of the drawings

[0016] Figure 1 It is a schematic connection structure diagram of a recycling and circulating supply system for a silicon wafer cutting fluid; Figure 2 For the recycling and circulating supply system of a silicon wafer cutting fluid Figure 1 The upper side enlarged structure schematic diagram in; Figure 3 For the recycling and circulating supply system of a silicon wafer cutting fluid Figure 1 The lower side enlarged structure schematic diagram in; Figure 4 The left - view three - dimensional structural schematic diagram of the pressure - filtration device for the recycling and circulation supply system of silicon wafer cutting fluid; Figure 5 The right - view three - dimensional structural schematic diagram of the pressure - filtration device for the recycling and circulation supply system of silicon wafer cutting fluid; Figure 6 For the recycling and circulation supply system of silicon wafer cutting fluid Figure 5 The enlarged structural schematic diagram at position A in it.

[0017] The labels in the attached drawings are: 1, photovoltaic silicon wafer cutting mortar cylinder; 2, automatic centrifuge; 3, mortar circulation pump; 4, raw water circulation barrel; 5, circulating water filtration component; 6, pressure - filtration device; 7, pressure - filtration collection barrel; 8, pressure - filtration purified liquid circulation pump; 501, concentration barrel; 502, silicon carbide membrane component; 503, back - flushing tank; 504, gas storage tank; 505, rinsing PE barrel; 506, cleaning PE barrel; 507, purified liquid barrel; 508, raw water pipe; 509, filtered purified liquid pipe; 201, centrifuge body; 202, centrifuge transfer water tank; 203, first pipeline; 401, first drain valve; 402, raw water outlet manual valve; 403, filtration inlet valve; 5091, silicon wafer cutting fluid circulation pump; 5092, first control valve; 601, bracket; 602, mounting frame; 603, silicon powder recovery barrel; 604, hydraulic moving component; 605, filter cloth component; 606, liquid outlet pipe; 607, liquid inlet pipe; 608, liquid inlet pump; 609, connecting piece; 610, limit block; 611, round rod; 612, guiding cover; 613, moving wheel; 6041, oil liquid barrel; 6042, hydraulic pump; 6043, hydraulic cylinder; 6044, mounting plate; 6045, roller; 6046, lifting ring; 701, second drain valve; 702, second control valve. Specific embodiments

[0018] This specific embodiment is a recycling and circulation supply system for silicon wafer cutting fluid, and its structural schematic diagram is as Figures 1-6 shown, including a photovoltaic silicon wafer cutting mortar cylinder 1, an automatic centrifuge 2, a mortar circulation pump 3, a raw water circulation barrel 4, a circulating water filtration component 5, a pressure - filtration device 6, a pressure - filtration collection barrel 7, and a pressure - filtration purified liquid circulation pump 8; the circulating water filtration component 5 includes a concentration barrel 501, a silicon carbide membrane component 502, a back - flushing tank 503, a gas storage tank 504, a rinsing PE barrel 505, a cleaning PE barrel 506, and a purified liquid barrel 507. A raw water pipe 508 is installed between the rinsing PE barrel 505 and the silicon carbide membrane component 502. A filtered purified liquid pipe 509 is installed on the purified liquid barrel 507, and the other end of the filtered purified liquid pipe 509 can flow into the purified barrel of the photovoltaic silicon wafer cutting equipment for use. The used cutting waste liquid then flows back into the photovoltaic silicon wafer cutting mortar cylinder 1. The cutting equipment is not shown in the figure; The working method of the circulating water filtration component 5 is disclosed in the patent publication number CN118833905A, which will not be described in detail here. This working method flushes the impurities in the membrane component by backwashing and discharges them to the concentration barrel 501. At the same time, the purified liquid flows from the second inlet and outlet of the membrane component and the purified liquid outlet valve to the purified liquid barrel 507; the working method of the automatic centrifuge 2 is disclosed in the patent publication number CN218981947U, which will not be described in detail here; The photovoltaic silicon wafer cutting mortar cylinder 1 is connected to the original water circulation barrel 4 through the automatic centrifuge 2 and the mortar circulation pump 3. The other end of the original water circulation barrel 4 is connected to the original water pipe 508. The concentration barrel 501 is connected to the inlet end of the pressure filtration device 6. The outlet end of the pressure filtration device 6 is connected to the original water circulation barrel 4 through the pressure filtration collection barrel 7 and the pressure filtration purified liquid circulation pump 8.

[0019] As Figure 1 and Figure 2 shown, in this embodiment, the automatic centrifuge 2 includes a centrifuge body 201 and a centrifuge transfer water tank 202. The photovoltaic silicon wafer cutting mortar cylinder 1 is connected to the inlet end of the centrifuge body 201. The outlet end of the centrifuge body 201 is connected to the centrifuge transfer water tank 202. The centrifuge transfer water tank 202 is connected to the mortar circulation pump 3 through the first pipeline 203; the automatic centrifuge 2 is a prior art, which refers to a centrifuge in which both feeding and discharging are automatic without stopping the machine or reducing the speed of the drum. Since it does not need to stop for discharging, the production capacity can be improved, the process is fully automated, and labor can be saved.

[0020] As Figure 1 and Figure 2 shown, in this embodiment, a first drain valve 401 is installed on the original water circulation barrel 4. An original water outlet manual valve 402 and a filtered inlet valve 403 are installed between the original water circulation barrel 4 and the original water pipe 508. The first drain valve 401 facilitates the discharge of the waste liquid in the original water circulation barrel 4. The original water outlet manual valve 402 and the filtered inlet valve 403 facilitate the control of the liquid flow.

[0021] As Figure 1 and Figure 2 shown, in this embodiment, a silicon wafer cutting fluid circulation pump 5091 is installed on the filtered purified liquid pipe 509. A first control valve 5092 is installed between the inlet end of the silicon wafer cutting fluid circulation pump 5091 and the purified liquid barrel 507; in this way, the purified liquid in the purified liquid barrel 507 is sent into the cutting fluid purified barrel of the photovoltaic silicon wafer cutting equipment through the silicon wafer cutting fluid circulation pump 5091. The contaminated liquid after the equipment cutting flows to the mortar cylinder for recycling. The first control valve 5092 facilitates the control of the liquid flow.

[0022] As Figure 1 、 Figure 3 and Figure 4As shown, in this embodiment, the filter press device 6 includes a bracket 601, a mounting frame 602, a silicon powder recovery barrel 603, a hydraulic moving assembly 604, and a plurality of filter cloth assemblies 605. The mounting frame 602 is fixedly connected to the upper surface of the bracket 601. The silicon powder recovery barrel 603 is located below the mounting frame 602. A liquid outlet pipe 606 and a liquid inlet pipe 607 are installed on the left side of the mounting frame 602. A liquid inlet pump 608 is installed on the liquid inlet pipe 607. The plurality of filter cloth assemblies 605 are slidably arranged on the mounting frame 602. A connecting member 609 is installed between adjacent filter cloth assemblies 605. The hydraulic moving assembly 604 is used to drive the plurality of filter cloth assemblies 605 to move and compress. A guiding cover 612 is fixedly connected to the lower surface of the mounting frame 602. The bottom end of the guiding cover 612 gradually narrows and is located above the silicon powder recovery barrel 603. Moving wheels 613 are installed at the four corners of the lower surface of the silicon powder recovery barrel 603. During the extrusion process, the plurality of filter cloth assemblies 605 can move along the mounting frame 602, while filtering impurities on the filter cloth. The discharged water enters the filter press collection barrel 7 through the liquid outlet pipe 606. The silicon powder on the filter cloth falls into the silicon powder recovery barrel 603 from the guiding cover 612 for collection.

[0023] As Figure 4 , Figure 5 and Figure 6 As shown, in this embodiment, a limiting block 610 is fixedly connected to the side of the connecting member 609 away from the filter cloth assembly 605. Both the upper and lower sides of the connecting member 609 are arc-shaped. Round rods 611 are fixedly connected to the front and rear sides of the upper surface of the mounting frame 602. The outer surface of the round rod 611 contacts the connecting member 609. In this way, the filter cloth assembly 605 can drive the connecting member 609 to slide on the round rod 611. Since both the upper and lower sides of the connecting member 609 are arc-shaped, the friction during sliding is reduced.

[0024] As Figure 4 and Figure 5 As shown, in this embodiment, the hydraulic moving assembly 604 includes an oil barrel 6041, a hydraulic pump 6042, a hydraulic cylinder 6043, and a mounting plate 6044. The hydraulic pump 6042 is installed on the upper surface of the oil barrel 6041. The hydraulic cylinder 6043 is fixedly connected to the right side of the mounting frame 602. The mounting plate 6044 is fixedly connected to the output end of the hydraulic cylinder 6043 and is fixedly connected to the rightmost filter cloth assembly 605. By starting the hydraulic pump 6042, the hydraulic oil in the oil barrel 6041 is pumped out and sent to the hydraulic cylinder 6043. At this time, the hydraulic cylinder 6043 drives the mounting plate 6044 to move leftward to squeeze the plurality of filter cloth assemblies 605, thereby separating solids and liquids.

[0025] As Figure 5 and Figure 6As shown, in this embodiment, rollers 6045 are rotatably connected to both the front and rear sides of the mounting plate 6044 through bearings. The rollers 6045 are in contact with the upper surface of the mounting frame 602. A lifting ring 6046 is fixedly connected to the upper surface of the mounting plate 6044. During the extrusion process of the multiple filter cloth assemblies 605, the rollers 6045 roll on the mounting frame 602, reducing the friction between the mounting plate 6044 and the mounting frame 602 and facilitating better extrusion dehydration.

[0026] As Figure 1 and Figure 3 As shown, in this embodiment, a second drain valve 701 is installed on the pressure filter collection barrel 7, and a second control valve 702 is installed between the pressure filter collection barrel 7 and the pressure filter purified liquid circulation pump 8. The second drain valve 701 and the second control valve 702 facilitate the control of the liquid flow in the pressure filter collection barrel 7.

[0027] For the technical solution provided by the present invention, the silicon wafer cutting fluid in the photovoltaic silicon wafer cutting mortar cylinder 1 is sent into the automatic centrifuge 2. The large particles in the cutting fluid are intercepted by the automatic centrifuge 2, and then sent into the raw water pipe 508 in the raw water circulation barrel 4 and the circulating water filtration assembly 5 through the mortar circulation pump 3. At this time, the circulating water filtration assembly 5 operates, and the backwashing program is started to flush the impurities in the silicon carbide membrane assembly 502 into the concentration barrel 501. The treated purified liquid flows into the purified liquid barrel 507. Then, the liquid feeding pump 608 is started to send the liquid in the concentration barrel 501 into the multiple filter cloth assemblies 605 and fill the multiple filter cloth assemblies 605 with liquid. Then, the hydraulic pump 6042 is started to extract the hydraulic oil in the hydraulic oil barrel 6041 and send it to the hydraulic cylinder 6043. At this time, the hydraulic cylinder 6043 drives the mounting plate 6044 to move leftward to extrude the multiple filter cloth assemblies 605. At this time, the multiple filter cloth assemblies 605 filter the impurities on the filter cloth during the extrusion process. The dewatered water enters the pressure filter collection barrel 7 through the liquid outlet pipe 606, and then the pressure filter purified liquid circulation pump 8 sends the pressure-filtered water into the raw water circulation barrel 4 for circulation. At the same time, the purified liquid in the purified liquid barrel 507 is sent into the cutting fluid purification barrel of the photovoltaic silicon wafer cutting equipment through the silicon wafer cutting fluid circulation pump 5091. The waste liquid after the equipment cutting flows to the photovoltaic silicon wafer cutting mortar cylinder 1 for recovery; The recycling and circulating supply system of the silicon wafer cutting fluid preliminarily intercepts impurities such as large solid particles and metal chips in the silicon wafer cutting fluid through an automatic centrifuge, and then, through the backwashing technology of the circulating water filtration component 5, uses reverse water flow to clean the silicon carbide membrane component 502, removing the impurities attached to the silicon carbide membrane component 502 and restoring the filtration performance of the silicon carbide membrane component 502. In this way, during subsequent operation of the pressure filtration device 6, a relatively high filtration efficiency can be always maintained, reducing the frequency of frequently replacing the filter cloth due to blockage of the circulating water filtration component 5, and lowering the maintenance cost and operation cost of the equipment. At the same time, the impurities backflushed into the concentration barrel 501 are efficiently separated from the solid particles and liquid in the cutting fluid under the strong pressure of the pressure filtration device 6, reducing the content of solid impurities in the cutting fluid. When the cutting fluid processed by the pressure filtration device 6 enters the backwashing system again, due to the reduced impurity content, the backwashing burden is alleviated, improving the backwashing effect, enabling the entire recycling and circulating system to operate more stably and efficiently, reducing the moisture content of the processed silicon powder. Meanwhile, the purified liquid in the purified liquid barrel 507 is sent into the cutting fluid purified liquid barrel of the photovoltaic silicon wafer cutting equipment through the silicon wafer cutting fluid circulation pump 5091, and the waste liquid after equipment cutting flows to the mortar cylinder for recycling, thereby purifying the cutting fluid from different perspectives. This system supports online operation, can realize real-time dynamic monitoring of key cutting fluid indicators such as pH value, conductivity, turbidity, and chemical oxygen demand (COD). At the same time, the system has high recycling performance, and its recovery rate can reach ≥95%, greatly improving the efficiency and quality of recycling and circulation.

[0028] All technical features in this embodiment can be freely combined according to actual needs.

[0029] The above embodiments are the preferred implementation schemes of the present invention. In addition, the present invention can also be implemented in other ways. Any obvious replacement without departing from the concept of the technical solution of the present invention is within the protection scope of the present invention.

Claims

1. A recycling and supply system for silicon wafer cutting fluid, characterized in that: It comprises a photovoltaic silicon wafer cutting mortar cylinder (1), an automatic centrifuge (2), a mortar circulation pump (3), a raw water circulation barrel (4), a circulating water filter assembly (5), a filter press device (6), a filter press collection barrel (7) and a filter press clean liquid circulation pump (8); The circulating water filtration assembly (5) comprises a concentration barrel (501), a silicon carbide membrane assembly (502), a recoil tank (503), a gas storage tank (504), a rinsing PE barrel (505), a cleaning PE barrel (506) and a clean liquid barrel (507); a raw water pipe (508) is installed between the rinsing PE barrel (505) and the silicon carbide membrane assembly (502); and a filtered clean liquid pipe (509) is installed on the clean liquid barrel (507); The photovoltaic silicon wafer cutting mortar cylinder (1) is connected to a raw water circulation barrel (4) via an automatic centrifuge (2) and a mortar circulation pump (3); the other end of the raw water circulation barrel (4) is connected to a raw water pipe (508); the concentration barrel (501) is connected to an inlet end of a filter press device (6); and the outlet end of the filter press device (6) is connected to the raw water circulation barrel (4) via a filter press collection barrel (7) and a filter press clean liquid circulation pump (8).

2. The recycling and supply system for silicon wafer cutting fluid according to claim 1, characterized in that: The automatic centrifuge (2) comprises a centrifuge body (201) and a centrifuge transfer water tank (202); the photovoltaic silicon wafer cutting mortar cylinder (1) is connected to the inlet end of the centrifuge body (201); the outlet end of the centrifuge body (201) is connected to the centrifuge transfer water tank (202); and the centrifuge transfer water tank (202) is connected to the mortar circulation pump (3) via a first pipeline (203).

3. The recycling and supply system for silicon wafer cutting fluid according to claim 2, characterized in that: The raw water circulation barrel (4) is provided with a first drainage valve (401), and a raw water outlet manual valve (402) and a filtered liquid inlet valve (403) are provided between the raw water circulation barrel (4) and the raw water pipe (508).

4. The recycling and supply system for silicon wafer cutting fluid according to claim 3, characterized in that: A silicon wafer cutting fluid circulation pump (5091) is installed on the filtered clean liquid pipe (509), and a first control valve (5092) is installed between the liquid inlet end of the silicon wafer cutting fluid circulation pump (5091) and the clean liquid barrel (507).

5. The recycling and supply system for silicon wafer cutting fluid according to claim 4, characterized in that: The filter press device (6) comprises a support (601), a mounting frame (602), a silicon powder recovery barrel (603), a hydraulic moving assembly (604) and a plurality of filter cloth assemblies (605), wherein the mounting frame (602) is fixedly connected to the upper surface of the support (601), the silicon powder recovery barrel (603) is located at the lower side of the mounting frame (602), a liquid outlet pipe (606) and a liquid inlet pipe (607) are installed on the left side of the mounting frame (602), a liquid inlet pump (608) is installed on the liquid inlet pipe (607), and the plurality of filter cloth assemblies (605) are provided. The filter cloth assembly (605) is slidably arranged on the mounting frame (602), and connecting pieces (609) are installed between adjacent filter cloth assemblies (605). The hydraulic moving assembly (604) is used to drive the multiple filter cloth assemblies (605) to move and compress. The lower surface of the mounting frame (602) is fixedly connected to a guide cover (612), and the bottom end of the guide cover (612) gradually shrinks and is located above the silicon powder recovery barrel (603). Moving wheels (613) are installed at the four corners of the lower surface of the silicon powder recovery barrel (603).

6. The recycling and supply system for silicon wafer cutting fluid according to claim 5, characterized in that: The side of the connecting member (609) away from the filter cloth assembly (605) is fixedly connected to a limiting block (610), the upper and lower sides of the connecting member (609) are both arc-shaped, and the front and rear sides of the upper surface of the mounting frame (602) are fixedly connected to round rods (611), and the outer surface of the round rods (611) is in contact with the connecting member (609).

7. The recycling and supply system for silicon wafer cutting fluid according to claim 6, characterized in that: The hydraulic moving assembly (604) comprises an oil barrel (6041), a hydraulic pump (6042), a hydraulic cylinder (6043) and a mounting plate (6044); the hydraulic pump (6042) is mounted on the upper surface of the oil barrel (6041); the hydraulic cylinder (6043) is fixedly connected to the right side of the mounting frame (602); and the mounting plate (6044) is fixedly connected to the output end of the hydraulic cylinder (6043) and is fixedly connected to the filter cloth assembly (605) on the right side.

8. The recycling and supply system for silicon wafer cutting fluid according to claim 7, characterized in that: The front and rear sides of the mounting plate (6044) are rotatably connected to rollers (6045) via bearings, the rollers (6045) are in contact with the upper surface of the mounting frame (602), and the upper surface of the mounting plate (6044) is fixedly connected to a lifting ring (6046).

9. The recycling and supply system for silicon wafer cutting fluid according to claim 9, characterized in that: A second drain valve (701) is installed on the filter press collection barrel (7), and a second control valve (702) is installed between the filter press collection barrel (7) and the filter press clean liquid circulation pump (8).

10. A recycling method for a recycling and circulating supply system of silicon wafer cutting fluid, characterized in that: The recycling and supply system for silicon wafer cutting fluid according to any one of claims 1 to 9 further comprises the following steps: Step 1: The silicon wafer cutting liquid in the photovoltaic silicon wafer cutting mortar cylinder (1) is sent to the automatic centrifuge (2), the large particles in the cutting liquid are intercepted by the automatic centrifuge (2), and then sent to the raw water circulation barrel (4) and the raw water pipe (508) in the circulating water filter assembly (5) through the mortar circulation pump (3); Step 2: The circulating water filtration component (5) is operated, and a backwashing procedure is started to flush the impurities in the silicon carbide membrane component (502) into the concentration tank (501), and the treated clean liquid flows into the clean liquid tank (507); Step 3: Start the liquid inlet pump (608) to send the liquid in the concentration barrel (501) into the multiple filter cloth assemblies (605), and fill the multiple filter cloth assemblies (605) with liquid. Then start the hydraulic pump (6042) to extract the hydraulic oil in the oil barrel (6041) and send it to the hydraulic cylinder (6043). At this time, the hydraulic cylinder (6043) drives the mounting plate (6044) to move leftward to squeeze the multiple filter cloth assemblies (605). At this time, the multiple filter cloth assemblies (605) filter impurities on the filter cloth during the squeezing process, and the separated water enters the filter press collection barrel (7) through the liquid outlet pipe (606); Step 4: The filtered water is fed into the raw water circulation barrel (4) for circulation through the filter press clean liquid circulation pump (8). At the same time, the clean liquid in the clean liquid barrel (507) is sent into the cutting fluid clean barrel of the photovoltaic silicon wafer cutting equipment through the silicon wafer cutting fluid circulation pump (5091). The dirty liquid after cutting by the equipment flows into the photovoltaic silicon wafer cutting mortar cylinder (1) for recovery.

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