Full-automatic irradiation device for multi-axis heavy ion microporous membrane

Abstract

The invention relates to a full-automatic irradiation device for a multi-axis heavy ion microporous membrane, and the device comprises the following components which are designed in a split manner: a roll film discharging device which comprises a plurality of roll film discharging assemblies which are arranged in a plurality of columns side by side; the rolled film collecting device comprises a plurality of rolled film collecting assemblies which are arranged side by side into a plurality of columns, the number of the columns of the rolled film collecting assemblies is the same as that of the columns of the rolled film discharging assemblies, and a connecting shaft, a steering shaft and a transmission shaft are arranged between the rolled film discharging device and the rolled film collecting device and used for being connected with rolled films. The heavy ion beam vacuum cavity is arranged between the rolled film discharging device and the rolled film receiving device and is used for irradiating the rolled film passing through the connecting shaft; and the robots are arranged at the feeding end of the rolled film discharging device and the discharging end of the rolled film receiving device correspondingly. Full-automatic feeding and discharging can be achieved, multi-angle beam detection and beam follow-up are achieved, the automatic receiving and deviation rectifying function is achieved, and automatic temperature control adjustment of a beam irradiation window body is achieved.

Description

Technical Field

[0001] The present invention relates to a fully automatic irradiation device for multi-axis heavy ion microporous membranes, belonging to the technical field of material irradiation. Background Art

[0002] Heavy ion microporous membranes are the most precise microporous filtration membranes in the world. They are porous plastic films with densely packed small holes on the membrane, and the shape and size of each small hole are almost the same. There are many specifications for heavy ion microporous membranes, with the film thickness ranging from 6 microns to 200 microns, the pore diameter ranging from 0.01 microns to 20 microns, and the pore density range being relatively wide according to actual needs, approximately from 1×10⁴ to 1×10¹² per square centimeter.

[0003] Heavy ion microporous membranes are usually perforated with heavy ions provided by a high-energy accelerator. Heavy ion perforation is the most critical step in the production process of heavy ion microporous membranes. Therefore, ion beam irradiation is a very important production step in the production of heavy ion microporous membranes. The existing irradiation device is a 6-axis drive device, which has the following disadvantages: one is low production capacity, the second is the absence of a deviation correction and multi-angle beam detection device, the third is the absence of a follow-up device, and the fourth is that only manual loading and unloading can be used. Summary of the Invention

[0004] In view of the above technical problems, the present invention provides a fully automatic irradiation device for multi-axis heavy ion microporous membranes, which adopts a modular design, can realize fully automatic loading and unloading, can arbitrarily increase the number of winding and unwinding reels, realize multi-angle beam detection and beam follow-up, and realize an automatic material receiving deviation correction function.

[0005] To achieve the above object, the present invention adopts the following technical solutions: A fully automatic irradiation device for multi-axis heavy ion microporous membranes, comprising the following components with a split design: A film unwinder, including a plurality of film unwinding components, and the plurality of film unwinding components are arranged side by side in a plurality of columns; A film winder, including a plurality of film winding components, and the plurality of film winding components are arranged side by side in a plurality of columns. The number of columns in which the plurality of film winding components are arranged is the same as the number of columns in which the plurality of film unwinding components are arranged. An adapter shaft, a steering shaft, and a transmission shaft are provided between the film unwinder and the film winder for connecting the rolled film; A heavy ion beam vacuum chamber, which is arranged between the film unwinder and the film winder for irradiating the rolled film passing through the adapter shaft; Robots, which are respectively arranged at the feeding end of the film unwinder and the discharging end of the film winder.

[0006] For the multi-axis heavy ion micro-porous membrane full-automatic irradiation device described above, preferably, the heavy ion beam vacuum cavity includes a vacuum window, a fluorescence target, an aluminum foil detector, and a Faraday cup connected in series in sequence.

[0007] For the multi-axis heavy ion micro-porous membrane full-automatic irradiation device described above, preferably, the film unwinding assembly includes an unwinding support and an unwinding turntable arranged on the unwinding support. An unwinding reel for placing a film roll is arranged on the unwinding turntable to realize the unwinding of the film material.

[0008] For the multi-axis heavy ion micro-porous membrane full-automatic irradiation device described above, preferably, the film unwinder further includes an automatic unwinding deviation correction component and an unwinding tension monitoring component. An automatic unwinding deviation correction component and an unwinding tension monitoring component are arranged at the feeding end of each column of the film unwinding assembly.

[0009] For the multi-axis heavy ion micro-porous membrane full-automatic irradiation device described above, preferably, the film winding-up assembly includes a winding-up support and a winding-up turntable arranged on the winding-up support. A winding-up reel for placing a film roll is arranged on the winding-up turntable to realize the recovery of the film material.

[0010] For the multi-axis heavy ion micro-porous membrane full-automatic irradiation device described above, preferably, the film winder further includes an automatic winding-up deviation correction component and a winding-up tension monitoring component. An automatic winding-up deviation correction component and a winding-up tension monitoring component are arranged at the discharging end of each column of the film winding-up assembly.

[0011] For the multi-axis heavy ion micro-porous membrane full-automatic irradiation device described above, preferably, it further includes a beam current collection assembly arranged between the film unwinder and the film winder for collecting and detecting the heavy ion beam of the film passing through the connecting shaft.

[0012] For the multi-axis heavy ion micro-porous membrane full-automatic irradiation device described above, preferably, the beam current collection assembly includes a substrate and a detector arranged on the substrate. The detector collects the heavy ion beam hitting the substrate, converts it into a current signal, and the current signal is acquired by a data acquisition device and transmitted to a controller. The controller controls the film winder to perform follow-up operation according to the signal to realize the irradiation of the required density of the heavy ion micro-porous membrane.

[0013] For the multi-axis heavy ion micro-porous membrane full-automatic irradiation device described above, preferably, it further includes a robot sliding device for assembling the robot. The robot includes a robotic arm for inserting into the core of the film roll, then inflating and expanding to lift the film roll, and then inserting it onto the unwinding reel. Similarly, after the winding-up roll is wound up, the robot takes it down in the same way.

[0014] For the multi-axis heavy ion micro-porous membrane full-automatic irradiation device described above, preferably, the film unwinding device further includes an unwinding cutter, and the film winding device further includes a winding cutter.

[0015] Since the present invention adopts the above technical solutions, it has the following advantages: The present invention adopts a modular design, which can realize fully automatic loading and unloading, can arbitrarily increase the number of winding and unwinding reels, realize multi-angle beam detection and beam follow-up, realize the automatic function of winding material deviation correction, and the beam irradiation window realizes automatic temperature control adjustment. Description of the Drawings

[0016] Figure 1 Schematic diagram of the multi-axis heavy ion micro-porous membrane full-automatic irradiation device provided by an embodiment of the present invention; Figure 2 Schematic diagram of a film unwinding assembly provided by the embodiment of the present invention; Figure 3 Schematic diagram of a film winding assembly provided by the embodiment of the present invention; Figure 4 Schematic diagram of the beam collection assembly provided by the embodiment of the present invention; Figure 5 Schematic diagram of the automatic feeding and tension deviation correction component of the unwinding reel provided by the embodiment of the present invention; Figure 6 Top view of the automatic unloading and tension deviation correction component of the winding reel provided by the embodiment of the present invention; Figure 7 Schematic diagram of the robot automatic loading device provided by the embodiment of the present invention; Figure 8 Schematic diagram of the robotic arm in the loading robot provided by the embodiment of the present invention; Figure 9 Flow chart of the micro-porous membrane irradiation process provided by the embodiment of the present invention; Figure 10 Schematic diagram of the cooling of the vacuum window provided by the embodiment of the present invention; Reference numerals in the drawings are as follows: 1 - heavy ion beam vacuum cavity, 1-1 - vacuum window, 1-1-1 - water cooling pipe, 1-1-2 - temperature monitoring, 1-2 - fluorescent target, 1-3 - aluminum foil detector, 1-4 - Faraday cup; 2 - film unwinding assembly, 2-1 - unwinding bracket, 2-2 - unwinding turntable, 2-3 - unwinding reel, 2-4 - automatic unwinding deviation correction component, 2-5 - unwinding tension monitoring component, 2-6 - unwinding cutter; 3-roll film winding component, 3-1-winding bracket, 3-2-winding turntable, 3-3-winding reel, 3-4-automatic winding deviation correction component, 3-5-winding tension monitoring component, 3-6-winding cutter; 4-beam current acquisition component, 4-1-detector, 4-2-data acquisition device, 4-3-controller, 4-4-film winder; 5-robot sliding device; 6-robot, 6-1-robot arm; 7-film roll, 7-1-reel. Detailed implementation mode

[0017] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the present invention will be clearly and completely described below. Apparently, the described embodiments are some but not all of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0018] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the ordinary meanings understood by those of ordinary skill in the art to which the present invention belongs. The terms "first", "second", "third", "fourth" and similar terms used in the present invention do not denote any order, quantity or importance, but are only used to distinguish different components. The terms such as "comprising" or "including" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. The terms such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect.

[0019] For the convenience of description, spatial relative relationship terms may be used in the text to describe the relationship of one element or feature shown in the figure relative to another element or feature. These relative relationship terms such as "inner", "outer", "inner side", "outer side", "below", "above", etc. are intended to include different orientations of the device in use or operation other than the orientations depicted in the figure.

[0020] Heavy ion microporous membranes are usually punched with heavy ions provided by a high-energy accelerator. Heavy ion punching is the most critical step in the production process of heavy ion microporous membranes. Therefore, ion beam irradiation is a very important production step in the production of heavy ion microporous membranes. The existing irradiation device is a 6-axis drive device, which has the following disadvantages: one is low production capacity, the second is the lack of deviation correction and multi-angle beam detection devices, the third is the lack of a follow-up device, and the fourth is that only manual loading and unloading can be used.

[0021] Based on the above technical problems, the present invention provides a fully automatic irradiation device for multi-axis heavy ion microporous membranes, which adopts a modular design, can realize fully automatic loading and unloading, can arbitrarily increase the number of winding and unwinding reels, realize multi-angle beam detection and beam follow-up, and realize an automatic material receiving deviation correction function.

[0022] As Figure 1 , 7 shown, the fully automatic irradiation device for multi-axis heavy ion microporous membranes according to the present invention includes the following components with a split design: a film unwinder, including a plurality of film unwinding components 2, and a plurality of the film unwinding components 2 are arranged side by side in a plurality of columns; a film winder, including a plurality of film winding components 3, and a plurality of the film winding components 3 are arranged side by side in a plurality of columns, and the number of columns in which the plurality of film winding components 3 are arranged is the same as the number of columns in which the plurality of film unwinding components 2 are arranged. An adapter shaft, a steering shaft and a transmission shaft are arranged between the film unwinder and the film winder for connecting the wound film; a heavy ion beam vacuum chamber 1 is arranged between the film unwinder and the film winder for irradiating the film passing through the adapter shaft; robots 6 are respectively arranged at the feeding end of the film unwinder and the discharging end of the film winder.

[0023] Specifically, as Figure 1 shown, the heavy ion beam vacuum chamber 1 includes a vacuum window 1-1, a fluorescent target 1-2, an aluminum foil detector 1-3 and a Faraday cup 1-4 connected in series in sequence. The function of the vacuum window 1-1 is that the beam can be emitted from the window, and air cannot enter, maintaining the vacuum state of the chamber. The automatic water cooling device is realized at the outlet of the vacuum window 1-1 to realize the automatic temperature reduction function. When the temperature is too high, the temperature automatic monitoring system will send an alarm to the central control software, specifically as Figure 10 . The function of the fluorescent target 1-2 is to observe the specific shape of the heavy ion beam. The function of the aluminum foil detector 1-3 is to online monitor the intensity of the heavy ion beam. The function of the Faraday cup 1-4 is a non-intercepting detector for detecting the size of the heavy ion beam.

[0024] Furthermore, as Figure 2As shown in the figure, the film unwinding assembly 2 includes an unwinding support 2-1 and an unwinding turntable 2-2 arranged on the unwinding support 2-1. An unwinding reel 2-3 for placing the film roll is arranged on the unwinding turntable 2-2 to realize the unwinding of the film material. The unwinding turntable 2-2 can rotate clockwise or counterclockwise, mainly to realize the back-and-forth switching of the three unwinding reels 2-3 on the turntable. The unwinding reel 2-3 can place the film roll, that is, a film material roll is placed on one of the three unwinding reels 2-3 to realize the unwinding of the film material. The unwinding reel 2-3 is controlled by a servo motor and can realize the adjustment of any speed. When each spare unwinding reel 2-3 rotates over, it automatically docks with the moving shaft to realize the unwinding operation. The main function of the film unwinding assembly 2 is to unwind the film material from here, and through the beam window, it is irradiated into a heavy ion microporous membrane. It can be composed of several unwinding film groups, which can be 1 group, 2 groups, or 8 groups or 40 groups, etc.

[0025] As Figure 5 shown in the figure, the film unwinder further includes an automatic deviation correction component 2-4 for unwinding, a tension monitoring component 2-5 for unwinding, and a cutting knife 2-6 for unwinding. An automatic deviation correction component 2-4 for unwinding and a tension monitoring component 2-5 for unwinding are arranged at the feeding end of each column of the film unwinding assembly 2. The main function of the cutting knife 2-6 for unwinding is to automatically cut the film when the winding reel is finished. 2-4 is the automatic deviation correction component for unwinding, which realizes correction when the film runs off track, and 2-5 is the tension monitoring component for unwinding, which realizes the real-time adjustment of the tension.

[0026] As Figure 3 shown in the figure, the film winding assembly 3 includes a winding support 3-1 and a winding turntable 3-2 arranged on the winding support 3-1. A winding reel 3-3 for placing the film roll is arranged on the winding turntable 3-2 to realize the recovery of the film material. The winding turntable 3-2 can rotate clockwise or counterclockwise, and its main function is to realize the back-and-forth switching of the three winding reels 3-3 on the winding turntable 3-2. The winding reel 3-3 can place the reel to realize the winding function. A film material reel is placed on one of the three winding reels 3-3 to realize the recovery of the film material. The winding reel 3-3 is controlled by a servo motor and can realize the adjustment of any speed. When each spare shaft rotates over, it automatically docks with the moving shaft to realize the unwinding operation.

[0027] As Figure 6 shown in the figure, the film winder further includes an automatic deviation correction component 3-4 for winding and a tension monitoring component 3-5 for winding. An automatic deviation correction component 3-4 for winding and a tension monitoring component 3-5 for winding are arranged at the discharging end of each column of the film winding assembly 3. 3-6 is the cutting knife for winding, and its main function is to automatically cut the film when the winding reel is finished. 3-4 is the automatic deviation correction component for winding, which realizes correction when the film runs off track, and 3-5 is the tension monitoring component for winding, which realizes the real-time adjustment of the tension.

[0028] Furthermore, as Figure 1 and 4 shown, the multi-axis heavy ion microporous membrane full-automatic irradiation device of the present invention further includes a beam current acquisition assembly 4, which is arranged between the film unwinder and the film winder, and is used for collecting and detecting the heavy ion beam of the film wound around the connecting shaft. Specifically, the beam current acquisition assembly 4 includes a substrate and a detector 4-1 arranged on the substrate. The detector 4-1 collects the heavy ion beam hitting the substrate and converts it into an electric current signal. The electric current signal is acquired by a data acquisition device 4-2 and transmitted to a controller 4-3. The controller 4-3 controls the film winder 4-4 to perform follow-up operation according to the signal, so as to realize the irradiation with the required density of the heavy ion microporous membrane.

[0029] Furthermore, as Figure 7 and 8 shown, the multi-axis heavy ion microporous membrane full-automatic irradiation device of the present invention further includes a robot sliding device 5 for assembling the robot 6. The robot 6 includes a robotic arm 6-1, which is used to insert into the core 7-1 of the film roll 7, then inflate and expand to lift the film roll 7, and then insert it onto the unwinding reel 2-3. Similarly, after the winding roll is collected, the robot removes it in the same way.

[0030] As Figure 9 shown, the specific engineering process of the multi-axis heavy ion microporous membrane full-automatic irradiation device of the present invention is as follows: The initial film roll is placed on the unwinding reel 2-3 by the robot 6 and connected to the winding reel 3-2. When the system is started, the plastic film passes through the beam port at a certain speed (the beam current acquisition assembly 4 detects the actual irradiation density of the beam and then feeds back the speed to the winding reel 3-2). The heavy ion beam vacuum chamber 1 performs heavy ion irradiation according to the feedback speed. The heavy ion beam hits the passing plastic film to form a heavy ion microporous membrane. When the film roll runs to the set value, the unwinding cutter 2-6 cuts off the unwinding roll, and the winding cutter 3-6 cuts off the winding roll. The robot 6 performs loading and unloading, and the spare roll rotates to the running shaft for the next batch of irradiation production.

[0031] The present invention adopts a modular design, which can realize fully automatic loading and unloading, can arbitrarily increase the number of unwinding and winding reels, realize multi-angle beam detection and beam follow-up, and realize an automatic winding deviation correction function.

[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. However, such modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-axis heavy ion microporous membrane fully automatic irradiation device, characterized in that: It includes the following components of split design: A film roll unloader comprises a plurality of film roll unloading assemblies (2), wherein the plurality of film roll unloading assemblies (2) are arranged side by side in a plurality of rows; A film roll receiver, comprising a plurality of film roll receiver components (3), wherein the plurality of film roll receiver components (3) are arranged side by side in a plurality of rows, the number of rows in which the plurality of film roll receiver components (3) are arranged is the same as the number of rows in which the plurality of film roll unwinding components (2) are arranged, and a connecting shaft, a steering shaft and a transmission shaft are provided between the film roll unwinding device and the film roll receiver for connecting the film roll; A heavy ion beam vacuum chamber (1) is arranged between the roll film discharger and the roll film receiver and is used for irradiating the roll film passing through the connecting shaft; The robots (6) are respectively arranged at the feeding end of the roll film discharger and the discharging end of the roll film receiver.

2. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 1 is characterized in that: The heavy ion beam vacuum chamber (1) comprises a vacuum window (1-1), a fluorescent target (1-2), an aluminum foil detector (1-3) and a Faraday cup (1-4) which are sequentially connected in series.

3. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 1 is characterized in that: The film roll unwinding assembly (2) comprises an unwinding support (2-1) and an unwinding turntable (2-2) arranged on the unwinding support (2-1); the unwinding turntable (2-2) is provided with an unwinding reel (2-3) on which a film roll can be placed, so as to realize the unwinding of film materials.

4. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 3 is characterized in that: The roll film unloader further comprises an automatic unloading deviation correction component (2-4) and an unloading tension monitoring component (2-5), and each row of the roll film unloading components (2) is provided with an automatic unloading deviation correction component (2-4) and an unloading tension monitoring component (2-5) at the feeding end.

5. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 4, characterized in that: The film roll receiving assembly (3) comprises a receiving support (3-1) and a receiving turntable (3-2) arranged on the receiving support (3-1); the receiving turntable (3-2) is provided with a receiving reel (3-3) on which a film roll can be placed, so as to realize the recovery of film materials.

6. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 5, characterized in that: The roll film receiving device further comprises an automatic material receiving deviation correction component (3-4) and a material receiving tension monitoring component (3-5), and each row of the roll film receiving components (3) is provided with an automatic material receiving deviation correction component (3-4) and a material receiving tension monitoring component (3-5) at the discharge end.

7. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 1, characterized in that: It also comprises a beam collection component (4), which is arranged between the roll film discharger and the roll film receiver and is used to collect and detect the heavy ion beam of the roll film passing through the connecting shaft.

8. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 7, characterized in that: The beam collection assembly (4) comprises a substrate and a detector (4-1) arranged on the substrate. The detector (4-1) collects the heavy ion beam that hits the substrate and converts it into a current signal. The current signal is acquired by a data acquisition device (4-2) and transmitted to a controller (4-3). The controller (4-3) controls the film winding machine (4-4) to follow the signal to achieve irradiation of the heavy ion microporous film at the required density.

9. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 1, characterized in that: It also includes a robot sliding device (5) for assembling the robot (6), and the robot (6) includes a robot arm (6-1) for inserting into the reel (7-1) of the film roll (7), then inflating it, lifting the film roll (7), and then inserting it onto the unwinding reel (2-3). Similarly, after the rewinding reel is wound up, the robot removes it in the same way.

10. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 4, characterized in that: The roll film unloader also includes a unloading cutter (2-6), and the roll film receiver also includes a receiving cutter (3-6).

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