High-purity diaphragm valve for electronic special gas

Abstract

The application belongs to the technical field of diaphragm valves, and particularly relates to a high-purity diaphragm valve for electronic special gas; the valve body is provided with an air inlet channel and an air outlet channel, which are respectively communicated with an air inlet and an air outlet from a bottom valve port, a top valve port communicated with the top of the valve body is arranged in the air outlet channel, an air outlet operating assembly is arranged in the top valve port for controlling the opening and closing of the air outlet channel, a lateral valve port communicated with the side of the valve body is arranged in the air inlet channel, an air inlet operating assembly is arranged in the lateral valve port for controlling the opening and closing of the air inlet channel, the air inlet operating assembly and the air outlet operating assembly are both opened, and inert gas is filled in the air inlet channel for purging residual gas in the gas cylinder and the valve body and discharging the residual gas from the air outlet channel; an adjusting assembly is further arranged in the valve body and connected between the air inlet operating assembly and the air outlet operating assembly, and the adjusting assembly automatically adjusts the opening and closing of the air inlet channel according to the air pressure of the bottom valve port in the gas cylinder; the application can avoid gas leakage and improve the use safety.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of diaphragm valves, and particularly relates to a high-purity diaphragm valve for electronic special gas. BACKGROUND

[0002] A diaphragm valve is a valve that uses a flexible diaphragm to isolate the flow passage in the valve from the driving component. Its unique structure design makes it widely used in many industrial fields. The diaphragm valve is mainly composed of a valve body, a valve cover, a diaphragm, a valve rod and a driving device. The core component is the diaphragm, which divides the valve cavity into two parts, the upper part is the driving component, and the lower part is the flow passage. When the driving device drives the valve rod to move up and down, the diaphragm deforms, realizing the opening and closing of the valve. According to the structure form, the diaphragm valve can be divided into weir type, straight-through type, angle type and straight flow type, etc. The diaphragm completely isolates the flow passage in the valve from the driving component, avoiding the possibility of medium leakage to the outside, especially suitable for the working conditions of toxic, harmful, flammable and explosive hazardous media.

[0003] When the diaphragm valve is used in the field of electronic special gas, the electronic special gas is a high-purity gas used in the production of semiconductors, display panels and photovoltaics, mainly used in thin film deposition, etching, cleaning and doping processes. These gases have very high requirements for purity, precision and stability, which directly affect the performance of electronic products. Many electronic special gases are toxic, corrosive or flammable, and strict safety measures are required. When taking and placing electronic special gas from a gas cylinder containing electronic special gas, safety during use needs to be ensured to avoid leakage of internal electronic special gas. In particular, when the electronic special gas in the gas cylinder is released to a pressure that is too low to continue to release, there is still some electronic special gas inside that has not been discharged. In order to ensure safety when the gas cylinder is refilled next time, and to prevent the residual electronic special gas in the gas cylinder from reacting with air and causing corrosion inside the gas cylinder, the gas in the gas cylinder needs to be purged clean. In the prior art, the valve is usually disassembled and cleaned directly, but this method is not only cumbersome to operate, but also causes leakage of residual electronic special gas in the gas cylinder. In order to avoid this problem, a high-purity diaphragm valve for electronic special gas is needed, which can meet the requirements for filling the gas cylinder and can also be used to avoid leakage of electronic special gas when purging and cleaning the gas cylinder. SUMMARY

[0004] To solve the above problems in the prior art, the application provides a high-purity diaphragm valve for electronic special gas.

[0005] The purpose of the application can be achieved by the following technical solutions:

[0006] The application discloses an electronic special gas high-purity diaphragm valve, which comprises a valve body, an air inlet channel and an air outlet channel are formed in the valve body, the air inlet channel is communicated with an air inlet at the bottom of the valve body, the air outlet channel is communicated with an air outlet at the top of the valve body, a top valve port is formed in the air outlet channel, an air outlet operating assembly is arranged in the top valve port to control the opening and closing of the air outlet channel, a side valve port is formed in the air inlet channel, an air inlet operating assembly is arranged in the side valve port to control the opening and closing of the air inlet channel, the air inlet operating assembly and the air outlet operating assembly are opened, inert gas is filled into the air inlet channel to blow away residual gas in the air cylinder and the valve body, and the inert gas is discharged from the air outlet channel.

[0007] Further, the air outlet operating assembly comprises a valve seat, a diaphragm, a compression ring, a valve core, a first spring and a first valve rod, the compression ring is used for extruding the edge of the diaphragm on the step in the air outlet channel, the top of the valve seat penetrates through the diaphragm and is connected with the bottom of the valve core, the first spring is arranged between the compression ring and the valve core and is used for pushing the valve core and the valve seat to reset, the first valve rod is threadedly engaged with the top valve port, and the first valve rod is abutted against the top of the valve core and is used for pushing the valve seat to move up and down and controlling the opening and closing of the air outlet channel.

[0008] Further, the air inlet operating assembly comprises a second valve rod, a second hand wheel and a sealing ring, the second valve rod is threadedly engaged in the side valve port, the sealing ring is arranged between the second valve rod and the side valve port, the second hand wheel is connected to the end of the second valve rod, the second valve rod moves horizontally in the side valve port and controls the opening and closing of the air inlet channel.

[0009] Further, an adjusting assembly is further arranged in the valve body, the adjusting assembly is connected between the air inlet operating assembly and the air outlet operating assembly, and the adjusting assembly automatically adjusts the opening and closing of the air inlet channel according to the air pressure of the bottom valve port in the air cylinder.

[0010] Further, the adjusting assembly comprises a one-way valve and a transmission mechanism, the one-way valve is connected with the transmission mechanism, the one-way valve is spherical and is rotationally arranged in the air inlet channel, the transmission mechanism is arranged in a transmission channel which is communicated between the air inlet channel and the air outlet channel, and the transmission mechanism adjusts the opening and closing of the air inlet channel according to the air pressure of the bottom valve port in the two states of the opening and closing of the air outlet channel.

[0011] Further, the transmission channel comprises a horizontal channel and a vertical channel, the transmission mechanism comprises a driving rod, the driving rod is slidingly arranged in the vertical channel, and the driving rod drives the one-way valve to rotate according to the air pressure to control the opening and closing of the air inlet channel.

[0012] Further, the driving rod comprises a sliding sleeve, a sliding rod and a second spring, the sliding sleeve is slidingly arranged in the vertical channel, the second spring is arranged in the sliding sleeve, the sliding rod is slidingly arranged in the sliding sleeve and abuts against the end of the second spring, a thread is arranged in the sliding sleeve and engages with the sliding rod, the end of the sliding rod is connected with the one-way valve, and the sliding rod rotates with the up-and-down movement of the sliding sleeve.

[0013] Further, the adjusting assembly further comprises a pushing mechanism arranged in the valve seat, a horizontal sliding plate is arranged in the horizontal channel, and the pushing mechanism pushes the horizontal sliding plate to slide horizontally according to the air pressure in the exhaust passage.

[0014] Further, the pushing mechanism comprises a vertical sliding plate, a third spring and a pushing rod, the third spring is connected to the bottom of the valve seat, the vertical sliding plate is slidingly arranged at the bottom of the valve seat and connected with the third spring, the side surface of the vertical sliding plate is an inclined surface, the pushing rod is slidingly arranged at the side surface of the valve seat and abuts against the side surface of the vertical sliding plate, and the pushing rod horizontally extends and retracts with the up-and-down movement of the vertical sliding plate to push the horizontal sliding plate.

[0015] Further, the diameter of the horizontal channel is greater than that of the vertical channel.

[0016] The present application has the following beneficial effects:

[0017] (1) By simultaneously arranging the air inlet passage and the exhaust passage on the valve and connecting them to the bottom valve port, the air inlet passage can be filled with inert gas to purge the gas cylinder and the valve, part of the electronic special gas can be prevented from remaining in the gas cylinder and the valve, the cleaning of the gas cylinder and the valve can be completed without dismounting the valve, the electronic special gas leakage can be prevented, and the use safety is improved.

[0018] (2) By arranging the adjusting assembly, when the air pressure in the gas cylinder is low, the one-way valve is in the state of being in communication with the air inlet passage, at this time, the air inlet operation assembly is opened, the air inlet passage is opened, the electronic special gas can be filled into the gas cylinder, or the inert gas can be filled into the gas cylinder for purging the gas cylinder, when the air pressure in the gas cylinder is high, the one-way valve is in the state of cutting off the air inlet passage, at this time, even if the air inlet operation assembly is opened, the air inlet passage cannot be in communication, and the charging function cannot be realized, the safety of the valve use is improved, and the valve gas leakage can be prevented. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to facilitate the understanding of those skilled in the art, the present application will be further described below with reference to the drawings.

[0020] Figure 1 It is an internal structure schematic diagram of the present application.

[0021] Figure 2 A schematic view of the main structure of the present application; Figure 1 A schematic view of the main structure of the present application;

[0022] Figure 3 A schematic view of the main structure of the present application;

[0023] Figure 4 A schematic view of the main structure of the present application;

[0024] Legend: 1, valve body; 2, pressure ring; 3, diaphragm; 4, first spring; 5, valve seat; 6, valve core; 7, first valve rod; 8, exhaust passage; 9, air inlet passage; 10, second valve rod; 11, third spring; 12, vertical sliding block; 13, push rod; 14, horizontal sliding block; 15, drive rod; 16, one-way valve. DETAILED DESCRIPTION

[0025] In order to further illustrate the technical means and effects adopted by the present application to achieve the predetermined purposes, the specific embodiments, structures, features and effects according to the present application are described in detail below in combination with the drawings and preferred embodiments.

[0026] As shown in Figures 1-4 The electronic special gas high-purity diaphragm valve of the present application includes a valve body 1, an air inlet passage 9 and an exhaust passage 8 are formed on the valve body 1 and respectively communicated with an air inlet and an exhaust outlet from the bottom valve port, an exhaust operation assembly is arranged in the exhaust passage 8 for controlling the opening and closing of the exhaust passage 8, a side valve port is formed in the air inlet passage 9 and communicated with the side of the valve body 1, an air inlet operation assembly is arranged in the side valve port for controlling the opening and closing of the air inlet passage 9, the air inlet operation assembly and the exhaust operation assembly are both opened, and inert gas is filled in the air inlet passage 9 for purging the residual gas in the air cylinder and the valve body 1 and discharging from the exhaust passage 8;

[0027] Because the electronic special gas in the cylinder is released to the pressure is too low to continue to release, there is still part of the electronic special gas in the cylinder is not discharged, in order to ensure the safety of the cylinder in the next filling, therefore, the gas in the cylinder needs to be purged clean, the existing technology is generally through the valve is disassembled directly clean, however, the method will cause the electronic special gas in the cylinder to leak, in order to ensure that the residual electronic special gas in the cylinder can be purged clean and will not cause the electronic special gas to leak, through the valve structure in the embodiment, when the bottom valve port of the valve is connected to the cylinder, and the gas in the cylinder is released to low pressure, the inlet operation assembly and the exhaust operation assembly are opened respectively, then a large amount of inert gas is input into the cylinder through the inlet channel 9, due to the effect of density and pressure, the inert gas fills the cylinder and is gradually discharged from the exhaust channel 8. And by using the gas composition monitoring instrument to monitor the exhaust channel 8, it is confirmed whether the original gas in the cylinder is completely replaced. When the cylinder is filled with inert gas and the original gas is completely discharged, close the inlet channel 9 and the exhaust channel 8, complete the purging process. Through the inert gas purging of the cylinder and the valve, the electronic special gas can be avoided to remain in the cylinder and the valve. At the same time, the flow channel is processed to Ra0.2 or below, to avoid medium residue, and the valve does not need to be disassembled to clean the cylinder and the valve, which can prevent the electronic special gas from leaking and improve the safety.

[0028] It is worth mentioning that, because the inlet operation assembly is arranged in the lateral valve port of the inlet channel 9, the switch for opening and closing the inlet channel 9 is generally formed at an angle of 90° with the inlet channel 9, and in the embodiment, the angle between the opening of the inlet channel 9 and the inlet operation assembly is less than 90°, so that the angle between the front section and the rear section of the inlet channel 9 is greater than 90°, which can reduce the impact force when the external gas enters the inlet channel 9, avoid the local stress of the inlet operation assembly position from increasing, and improve the service life.

[0029] Specifically, the exhaust operation assembly includes a valve seat 5, a diaphragm 3, a compression ring 2, a valve core 6, a first spring 4 and a first valve rod 7. The compression ring 2 extrudes the edge of the diaphragm 3 on the step in the exhaust channel 8, so that the diaphragm 3 is clamped and fixed by the compression ring 2. The diaphragm 3 is isolated from the gas in the inlet operation assembly and the exhaust channel 8. The valve seat 5 penetrates the diaphragm 3 at the top and is connected with the bottom of the valve core 6, so that the diaphragm 3 is clamped in the middle by the valve seat 5 and the valve core 6. The first spring 4 is arranged between the compression ring 2 and the valve core 6 to push the valve core 6 and the valve seat 5 to reset. The first valve rod 7 is threadedly engaged with the top valve port, and the first valve rod 7 abuts against the top of the valve core 6 to push the valve seat 5 to move up and down and control the opening and closing of the exhaust channel 8. The first hand wheel is also connected to the first valve rod 7. The rotation of the first hand wheel drives the up and down movement of the valve rod and the valve core 6, and makes the valve seat 5 adhere to and separate from the exhaust channel 8 according to the up and down movement of the valve core 6, such as Figure 1As shown in the figure, the exhaust passage 8 forms a 90° angle, and the exhaust operating assembly is located at the corner of the exhaust passage 8. When the bottom surface of the valve seat 5 is attached to the exhaust passage 8, the exhaust passage 8 is disconnected, and when the bottom surface of the valve seat 5 is separated from the exhaust passage 8, the exhaust passage 8 is opened. Sealing rings are arranged between the compression ring 2 and the inner wall of the valve body 1 and between the compression ring 2 and the valve stem, which can improve the sealing performance of the exhaust operating assembly.

[0030] The intake operating assembly includes a second valve stem 10, a second hand wheel and a sealing ring. The second valve stem 10 is threadedly engaged in the lateral valve port, the sealing ring is arranged between the second valve stem 10 and the lateral valve port, and the second hand wheel is connected to the end of the second valve stem 10. The second valve stem 10 moves horizontally in the lateral valve port and controls the opening and closing of the intake passage 9. Figure 3 and Figure 4 As shown in the figure, the intake operating assembly and the intake passage 9 also form an included angle, and the opening and closing of the intake passage 9 are controlled by the attachment and separation between the second valve stem 10 and the intake passage 9.

[0031] Although the intake passage 9 and the exhaust passage 8 are simultaneously provided in the valve in the above-mentioned embodiment, and the opening and closing of the intake passage 9 and the exhaust passage 8 are controlled by the intake operation assembly and the exhaust operation assembly, so as to realize the filling of inert gas into the gas cylinder and the purging of the gas cylinder and the valve, however, in the actual use process, there are a large number of human operations and illegal operations, or the device for filling the gas cylinder with gas is powered off, the pipeline is damaged or fails, at this time, the gas cylinder still has a large amount of electronic special gas, and the gas cylinder is purged, which is easy to cause the large amount of high-pressure electronic special gas in the gas cylinder to be reversely output from the intake passage 9 after the intake operation assembly and the exhaust operation assembly are opened after the external pipeline is connected to the intake passage 9, so as to cause the original inert gas container to be contaminated, and the electronic special gas leakage accident caused thereby. In order to avoid the accidents caused by the illegal operation and the human error in the use process, in an embodiment, the valve body 1 is further provided with an adjusting assembly, the adjusting assembly is connected between the intake operation assembly and the exhaust operation assembly, and the adjusting assembly automatically adjusts the opening and closing of the intake passage 9 according to the gas pressure at the bottom valve port in the gas cylinder. Since the bottom valve port is communicated to the inside of the gas cylinder, the intake passage 9 and the exhaust passage 8 are also communicated to the inside of the gas cylinder through the bottom valve port. After the adjusting assembly is arranged between the intake operation assembly and the exhaust operation assembly, if the gas pressure in the gas cylinder is in a high state, the adjusting assembly will block the ventilation of the intake passage 9 under the action of the gas pressure, so as to avoid that whether the gas is filled into the gas cylinder through the intake passage 9 or the inert gas is filled into the gas cylinder through the intake passage 9 for purging, the gas can only be filled into the inside when the gas pressure in the gas cylinder is in a safe range, and when the gas pressure in the gas cylinder is in a high state, the gas cannot be filled into the gas cylinder through the intake passage 9. The safety in use, the leakage of the electronic special gas and the human error or illegal operation can be ensured.

[0032] Specifically, the adjusting assembly comprises a one-way valve 16 and a transmission mechanism, the one-way valve 16 and the transmission mechanism are connected, the one-way valve 16 is rotatably arranged in the intake passage 9, and the transmission mechanism is arranged in a transmission channel communicated between the intake passage 9 and the exhaust passage 8. The transmission mechanism adjusts the opening and closing of the intake passage 9 according to the gas pressure at the bottom valve port in the two states of the opening and closing of the exhaust passage 8. The transmission channel comprises a horizontal channel and a vertical channel, the transmission mechanism comprises a driving rod 15, the driving rod 15 is slidably arranged in the vertical channel, and the driving rod 15 drives the one-way valve 16 to rotate for controlling the opening and closing of the intake passage 9 according to the gas pressure.

[0033] In order to prevent the gas in the gas cylinder from being discharged reversely from the gas cylinder to the gas inlet 9, a one-way valve 16 is arranged in the gas inlet 9, so that the gas can only be filled from the outside of the gas inlet 9 to the inside of the gas cylinder, and cannot be discharged reversely from the inside of the gas cylinder to the gas inlet 9. In order to avoid the one-way valve 16 being corroded by the special electronic gas in the gas cylinder, the one-way valve 16 can be a diaphragm type one-way valve 16. In order to avoid the gas being filled from the gas inlet 9 to the inside of the gas cylinder when the gas pressure in the gas cylinder is still high, a driving rod 15 is arranged in connection with the one-way valve 16. The one-way valve 16 is in the shape of a ball and is arranged horizontally in the gas inlet 9. The gas inlet 9 is communicated with a vertical channel, and the driving rod 15 is arranged in the vertical channel. The one-way valve 16 can rotate around the vertical channel as the shaft. When the gas pressure in the gas cylinder is high, the gas pressure will push the driving rod 15 to rotate, so that the driving rod 15 drives the one-way valve 16 to rotate. Since two opposite sides of the one-way valve 16 can be penetrated each other, and the other two sides perpendicular to each other cannot be penetrated, when the gas pressure in the gas cylinder is high, the driving rod 15 drives the one-way valve 16 to rotate to the side that cannot be penetrated. When the gas pressure in the gas cylinder is low, the driving rod 15 drives the one-way valve 16 to rotate to the side that can be penetrated. Through the structure of the driving rod 15 and the one-way valve 16, the gas in the gas cylinder can be prevented from leaking from the gas inlet 9, and the rotation angle of the one-way valve 16 can be controlled according to the gas pressure in the gas cylinder, so as to realize the double insurance of the one-way valve 16 and the second valve rod 10. Therefore, the structure is suitable for the use of the special electronic gas which is toxic and corrosive.

[0034] Further, the driving rod 15 comprises a sliding sleeve, a sliding rod and a second spring. The sliding sleeve is arranged in the vertical channel and is provided with a guide strip on the outer side wall. A guide groove is arranged in the vertical channel, and the guide strip on the sliding sleeve is arranged in the guide groove to enable the sliding sleeve to move vertically only. The second spring is arranged in the sliding sleeve. The sliding rod is arranged in the sliding sleeve and abuts against the end of the second spring. The bottom of the second spring is provided with a supporting plate for abutting against the sliding rod. A thread is arranged in the sliding sleeve and engages with the sliding rod. The side surface of the top of the sliding rod is provided with a protruding rod which engages with the thread in the sliding sleeve. When the sliding sleeve moves up and down, the sliding rod rotates in the sliding sleeve along the thread. The end of the sliding rod is connected with the one-way valve 16, and the sliding rod rotates with the sliding sleeve. A limiting strip is arranged at the top of the vertical channel.

[0035] Based on the above structure, since the vertical channel and the horizontal channel are communicated to the air inlet 9 and the air outlet 8, the driving rod 15 can isolate the gas exchange of the air inlet 9 and the air outlet 8, so when the air pressure in the air outlet 8 is higher, the air pressure will push the driving rod 15 to move downward through the horizontal channel and the vertical channel, the sliding sleeve will slide downward vertically, the sliding rod will start to rotate under the action of the sliding sleeve sliding downward, and the one-way valve 16 will also rotate to the state that the air inlet 9 cannot be penetrated under the driving action of the sliding rod; and after the gas in the gas cylinder is reduced, since the second spring is arranged in the sliding sleeve, the spring will push the sliding sleeve to reset and move upward after losing the external pressure, so that the one-way valve 16 is rotated again to the state that the air inlet 9 is penetrated.

[0036] Further, the adjusting assembly further comprises a pushing mechanism arranged in the valve seat 5, a horizontal sliding plate is arranged in the horizontal channel, and the pushing mechanism pushes the horizontal sliding plate to slide horizontally according to the air pressure in the air outlet 8; the horizontal sliding plate slides horizontally according to the pushing force of the pushing assembly and the air pressure in the air outlet 8;

[0037] Since in the above embodiment, the driving rod 15 only rotates by the pressure in the air outlet 8, and the air pressure span in the gas cylinder and the air outlet 8 is large, it is easy to cause the sliding sleeve to move up and down in the vertical channel with a large amplitude, thereby causing the rotation angle of the one-way valve 16 to be too large, and the effect of closing the air inlet 9 when the air pressure is high and opening the air inlet 9 when the air pressure is low cannot be formed, and after the horizontal sliding block 14 is arranged in the horizontal channel, limiting strips are arranged at the front and back ends of the horizontal channel, the horizontal sliding block 14 is arranged between the two limiting strips, the horizontal sliding block 14 acts after reaching the upper limit pressure value or the lower limit pressure value of the action, and the action amplitude is limited by the front and back limiting strips, so that the rotation amplitude of the horizontal sliding block 14 pushing the driving rod 15 is just enough to make the air inlet 9 be in the completely open or closed state. And after the air pressure in the gas cylinder gradually decreases, the gas in the vertical channel and the horizontal channel will push the horizontal sliding plate to reset because the second spring will push the sliding sleeve to reset. In order to ensure the pushing effect of the horizontal sliding plate, the horizontal sliding plate is made of a material that can be sealed.

[0038] Since the exhaust operating assembly cuts off the communication between the air outlet 8 and the horizontal channel after closing the air outlet 8, if the air pressure in the gas cylinder is high at this time, but the horizontal sliding block 14 cannot act according to the size of the air pressure, in order to avoid this problem, in an embodiment, the pushing mechanism comprises a vertical sliding plate, a third spring 11 and a push rod 13, the third spring 11 is connected to the bottom of the valve seat 5, the vertical sliding plate is slidingly arranged at the bottom of the valve seat 5 and connected with the third spring 11, the side surface of the vertical sliding plate is an inclined surface, and the push rod 13 is slidingly arranged on the side surface of the valve seat 5 and abuts against the side surface of the vertical sliding plate, the push rod 13 horizontally extends and retracts with the vertical sliding plate moving up and down to push the horizontal sliding plate;

[0039] The bottom of the valve seat 5 forms a hollow structure, and the bottom of the valve seat 5 is communicated with the exhaust passage 8 of the vertical part and is blocked from the exhaust passage 8 of the horizontal part. The vertical slide is in the hollow structure of the bottom of the valve seat 5, and the top of the vertical slide is connected to the top in the hollow structure by the third spring 11. When the air pressure in the exhaust passage 8 of the vertical part is high, the air pressure pushes the vertical slide 12 to move upward, and the inclined side wall of the vertical slide 12 pushes the push rod 13 to move outward, which forms a force on the horizontal slide to push the horizontal slide to move. When the air pressure in the gas cylinder is reduced, the vertical slide resets downward, the second spring pushes the slide sleeve to reset after losing the pushing force, the air pressure in the vertical passage and the horizontal passage pushes the horizontal slide to reset, and the horizontal slide pushes the push rod 13 to reset. Through the above structure, when the air pressure in the gas cylinder is low, the one-way valve 16 is in a state of being communicated with the air inlet passage 9. At this time, the air inlet operation assembly is opened, the air inlet passage 9 is opened, and the electronic special gas can be filled into the gas cylinder, or the inert gas can be filled into the gas cylinder for purging the gas cylinder. When the air pressure in the gas cylinder is high, the one-way valve 16 is in a state of blocking the air inlet passage 9. At this time, even if the air inlet operation assembly is opened, the air inlet passage 9 cannot be communicated, and the filling function cannot be achieved. The safety of the valve can be improved, and the gas leakage of the valve can be prevented.

[0040] In the above embodiment, the horizontal movement of the horizontal slide is needed to push the driving rod 15 to move. The space in the horizontal direction of the general valve is much smaller than the space in the vertical direction. In order to make the movement of the horizontal slide have enough air pressure to push the vertical movement of the driving rod 15, in an embodiment, the diameter of the horizontal passage is larger than the diameter of the vertical passage. The larger diameter of the horizontal passage can push more gas into the vertical passage in the same movement distance, and a larger air pressure can be formed to push the driving rod 15 to move, so as to ensure that the driving rod 15 drives the one-way valve 16 to rotate enough angle to switch the opening and closing states of the air inlet passage 9.

[0041] The above is only a preferred embodiment of the present application, and does not limit the present application in any form. Although the present application has been disclosed as above, it is not intended to limit the present application. Any person skilled in the art can make some changes or modifications to the above disclosed technical content to obtain equivalent embodiments with equivalent changes, as long as the changes or modifications do not deviate from the technical solution of the present application. Any modification, change and modification of the above embodiments according to the technical essence of the present application are still within the scope of the technical solution of the present application.

Claims

1. A high-purity diaphragm valve for electronic special gases, characterized in that: The device includes a valve body with an air inlet and an exhaust outlet connected to the bottom valve port and the exhaust outlet, respectively. The exhaust outlet has a top valve port connected to the top of the valve body, and an exhaust operation component is provided in the top valve port to control the opening and closing of the exhaust outlet. The air inlet has a side valve port connected to the side of the valve body, and an air inlet operation component is provided in the side valve port to control the opening and closing of the air inlet. Both the air inlet operation component and the exhaust operation component are open, and inert gas is introduced from the air inlet to purge residual gas in the gas cylinder and the valve body and discharged from the exhaust outlet. The intake operation assembly includes a second valve stem, a second handwheel, and a sealing ring. The second valve stem is threaded into the side valve port. The sealing ring is disposed between the second valve stem and the side valve port. The second handwheel is connected to the end of the second valve stem. The second valve stem moves horizontally within the side valve port and controls the opening and closing of the intake passage. The valve body is also provided with an adjustment component, which is connected between the air intake operation component and the air exhaust operation component. The adjustment component automatically adjusts the air intake passage opening and closing according to the air pressure at the bottom valve port inside the gas cylinder. The regulating component includes a one-way valve and a transmission mechanism. The one-way valve and the transmission mechanism are connected. The one-way valve is spherical and rotatably disposed in the air intake passage. The transmission mechanism is disposed in the transmission channel connecting the air intake passage and the exhaust passage. The transmission mechanism adjusts the opening and closing of the air intake passage according to the air pressure at the bottom valve port in the two states of opening and closing of the exhaust passage. The transmission channel includes a horizontal channel and a vertical channel. The transmission mechanism includes a drive rod, which is slidably disposed in the vertical channel. The drive rod drives the one-way valve to rotate according to the air pressure to control the opening and closing of the air intake.

2. The high-purity diaphragm valve for electronic special gases according to claim 1, characterized in that: The exhaust operation assembly includes a valve seat, a diaphragm, a pressure ring, a valve core, a first spring, and a first valve stem. The pressure ring presses the edge of the diaphragm onto a step within the exhaust passage. The top of the valve seat passes through the diaphragm and connects to the bottom of the valve core. The first spring is disposed between the pressure ring and the valve core to push the valve core and valve seat to reset. The first valve stem is threadedly engaged with the top valve port and abuts against the top of the valve core to push the valve seat up and down and control the opening and closing of the exhaust passage.

3. The high-purity diaphragm valve for electronic special gases according to claim 1, characterized in that: The drive rod includes a sliding sleeve, a sliding rod, and a second spring. The sliding sleeve is slidably disposed within the vertical channel. The second spring is disposed within the sliding sleeve. The sliding rod is slidably disposed within the sliding sleeve and abuts against the end of the second spring. The sliding sleeve is provided with a thread that engages with the sliding rod. The end of the sliding rod is connected to the one-way valve. The sliding rod rotates as the sliding sleeve moves up and down.

4. A high-purity diaphragm valve for electronic special gases according to claim 2, characterized in that: The adjustment assembly also includes a pushing mechanism disposed within the valve seat. A horizontal sliding plate is disposed within the horizontal channel. The pushing mechanism pushes the horizontal sliding plate to slide horizontally according to the air pressure in the exhaust channel. The horizontal sliding plate slides horizontally according to the thrust of the pushing assembly and the air pressure in the exhaust channel.

5. A high-purity diaphragm valve for electronic special gases according to claim 4, characterized in that: The pushing mechanism includes a vertical slide plate, a third spring, and a push rod. The third spring is connected to the bottom of the valve seat. The vertical slide plate is slidably disposed on the bottom of the valve seat and connected to the third spring. The side of the vertical slide plate is an inclined surface. The push rod is slidably disposed on the side of the valve seat and abuts against the side of the vertical slide plate. The push rod extends and retracts horizontally as the vertical slide plate moves up and down to push the horizontal slide plate.

6. A high-purity diaphragm valve for electronic special gases according to claim 5, characterized in that: The diameter of the horizontal channel is larger than the diameter of the vertical channel.

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