Environmental noise compensation method and system for high-precision measurement equipment

Abstract

The invention relates to the technical field of precision measurement, and discloses an environment noise compensation method and system for high-precision measurement equipment, and the method comprises the steps: obtaining environment noise output signals under the same environment noise condition through a first sensor and a second sensor, calibrating a noise transfer function under the environment noise condition according to the environment noise output signal; acquiring a target signal and a first environmental noise signal by using a first sensor, and acquiring a second environmental noise signal under the same environmental noise condition by using a second sensor; obtaining an environment noise compensation value according to the second environment noise signal and the noise transfer function, and correcting the first environment noise signal by using the environment noise compensation value; and calculating a target signal according to the corrected first environment noise signal. According to the method, the environment noise compensation value is obtained by obtaining the signals collected by the first sensor and the second sensor in real time, the noise interference is eliminated, the real-time target signal is obtained, and the measurement error is reduced to 11.77% from 15.54% of a traditional method.

Description

Technical Field

[0001] The present invention relates to the field of high-precision measurement, and specifically, to an environmental noise compensation method and system for a high-precision measurement device. Background Art

[0002] The working environment of high-precision measurement devices is usually accompanied by environmental noise of varying degrees, including mechanical vibration, noise from working equipment, interference caused by air flow, and electromagnetic noise, etc. These noise signals pose a significant threat to the accuracy of measurement devices. Especially when the amplitude of the target measurement signal is small, the noise may completely mask the useful signal, resulting in a significant increase in measurement error.

[0003] Currently, traditional noise processing methods mainly include: 1. Hardware filtering: reducing high-frequency or low-frequency noise through a hardware filter.

[0004] 2. Signal processing algorithms: using digital filtering or noise reduction algorithms to reduce the interference of electronic noise and white noise.

[0005] 3. Data post-processing, reducing noise after measuring data by calculating the Rms value of environmental noise, etc.

[0006] The above methods are difficult to cope with complex environmental noise, such as random low-frequency interference caused by equipment vibration, external mechanical operation, etc. Especially in dynamic measurement scenarios, the frequency and amplitude of noise interference change randomly, and the effectiveness of existing methods is severely limited. And statistical methods such as calculating the noise Rms value cannot meet the requirements of real-time measurement. Summary of the Invention

[0007] The object of the present invention is to provide an environmental noise compensation method and system for a high-precision measurement device, which can solve at least one of the above-mentioned technical problems. The specific solutions are as follows: According to a specific embodiment of the present invention, a first aspect of the present invention discloses an environmental noise compensation method for a high-precision measurement device, including: respectively using a first sensor and a second sensor to obtain environmental noise output signals under the same environmental noise conditions, and calibrating a noise transfer function under the environmental noise conditions according to the environmental noise output signals; using the first sensor to collect a mixed signal, the mixed signal including: a target signal and a first environmental noise signal, and using the second sensor to collect a second environmental noise signal under the same environmental noise conditions; obtaining an environmental noise compensation value according to the second environmental noise signal and the noise transfer function, and using the environmental noise compensation value to correct the first environmental noise signal; calculating the target signal in the mixed signal according to the corrected first environmental noise signal.

[0008] Preferably, the first sensor and the second sensor compensate for the amplitude and phase of the environmental noise.

[0009] Preferably, the frequency range of the second sensor is 8 Hz to 300 Hz.

[0010] Preferably, the second sensor is a noise compensation sensor.

[0011] Preferably, obtaining the environmental noise signals under the same environmental conditions by using the first sensor and the second sensor respectively, and calibrating the noise transfer function under the environmental conditions according to the environmental noise signals, includes: Measuring the known environmental noise signals by using the first sensor and the second sensor to obtain a first environmental noise output signal and a second environmental noise output signal; Obtaining the noise transfer function according to the first environmental noise output signal and the second environmental noise output signal, and the expression is: , wherein, is the second environmental noise output signal; is the first environmental noise output signal.

[0012] Preferably, multiple groups of the environmental noise compensation values are obtained by using multiple first sensors and multiple second sensors, and the average value of the multiple groups of the environmental noise compensation values is taken as the final environmental noise compensation value.

[0013] Preferably, multiple groups of the environmental noise compensation values are obtained by using multiple first sensors and multiple second sensors, different weights are assigned to the multiple groups of the environmental noise compensation values, and the weighted average is the final environmental noise compensation value.

[0014] According to the specific embodiments disclosed in the present invention, a second aspect of the present invention discloses an environmental noise compensation system for a high-precision measurement device, including: a calibration unit, obtaining environmental noise output signals under the same environmental conditions by using a first sensor and a second sensor respectively, and calibrating the noise transfer function under the environmental conditions according to the environmental noise output signals; A signal acquisition unit, using the first sensor to acquire a mixed signal, the mixed signal including: a target signal and a first environmental noise signal, and using the second sensor to acquire a second environmental noise signal under the same environmental conditions; A noise compensation unit, obtaining an environmental noise compensation value according to the second environmental noise signal and the noise transfer function, and correcting the first environmental noise signal by using the environmental noise compensation value; An output unit calculates the target signal in the mixed signal based on the corrected first environmental noise signal.

[0015] Preferably, the first sensor and the second sensor are coaxially arranged, and the coaxial error does not exceed 0.1 mm.

[0016] Preferably, there are multiple signal acquisition units.

[0017] Compared with the prior art, the above solutions of the disclosed embodiments of the present invention have at least the following beneficial effects: By obtaining in real time the signals collected by the first sensor and the second sensor, the present invention obtains an environmental noise compensation value, and uses the environmental noise compensation value to correct the first environmental noise signal to eliminate noise interference, thereby obtaining a real-time target signal, and reducing the measurement error from 15.54% of the traditional method to 11.77%. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The accompanying drawings herein are incorporated into the specification and form a part of the specification, showing embodiments consistent with the disclosed embodiments of the present invention, and are used together with the specification to explain the principles of the disclosed embodiments of the present invention. Obviously, the accompanying drawings in the following description are only some embodiments of the disclosed embodiments of the present invention, and those of ordinary skill in the art can obtain other drawings based on these drawings without creative efforts. In the drawings: Figure 1 is a flowchart of an environmental noise compensation method for a high-precision measurement device provided by an embodiment of the present invention; Figure 2 is a schematic diagram of the distribution of measurement and sensing components provided by an embodiment of the present invention; Figure 3 is a schematic diagram of an environmental noise compensation system for a high-precision measurement device provided by an embodiment of the present invention; Figure 4 is a schematic diagram of the installation of measurement and sensing components provided by an embodiment of the present invention.

[0019] Reference numerals: 1 - Measurement and sensing component; 11 - First sensor; 12 - Second sensor; 13 - Fixture for measurement and sensing component; 2 - Measurement platform; 3 - High-precision measurement device. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] In order to make the objectives, technical solutions, and advantages of the present disclosure clearer, the following will further describe in detail an environmental noise compensation method and system for a high-precision measurement device disclosed in the present invention with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments disclosed in the present invention, rather than all the embodiments. Based on the embodiments disclosed in the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of the present disclosure.

[0021] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The singular forms "a", "the", and "said" used in the embodiments of the present application and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. "Plurality" generally includes at least two.

[0022] It should be understood that the term "and / or" used herein is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " herein generally represents an "or" relationship between the associated objects before and after.

[0023] It should be understood that although terms such as first, second, and third may be used in the embodiments of the present application, these should not be limited to these terms. These terms are only used to distinguish. For example, without departing from the scope of the embodiments of the present application, the first can also be called the second, and similarly, the second can also be called the first.

[0024] It should also be noted that the term "comprising", "including", or any other variant thereof is intended to cover non-exclusive inclusion, such that a commodity or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such a commodity or device. Without further limitation, an element defined by the statement "including one" does not exclude the existence of another identical element in the commodity or device including the said element.

[0025] The following will Figures 1-4 describe in detail the optional embodiments of the present invention. Embodiment 1

[0026] As Figure 1 shown, according to the specific implementation manners of the present invention, the present invention provides an environmental noise compensation method for a high-precision measurement device, including the following steps: Step S102: Use the first sensor and the second sensor respectively to obtain environmental noise output signals under the same environmental noise conditions, and calibrate the noise transfer function under the environmental noise conditions according to the environmental noise output signals.

[0027] Step S104: Use the first sensor to collect a mixed signal, where the mixed signal includes a target signal and a first environmental noise signal, and use the second sensor to collect a second environmental noise signal under the same environmental noise conditions.

[0028] Step S106: Obtain an environmental noise compensation value according to the second environmental noise signal and the noise transfer function, and use the environmental noise compensation value to correct the first environmental noise signal.

[0029] Step S108: Calculate the target signal in the mixed signal according to the corrected first environmental noise signal.

[0030] In this embodiment, the noise transfer function under any environmental noise conditions can be obtained through calibration. The first environmental noise signal is corrected by using the noise transfer function and the second environmental noise signal containing only the environmental noise signal obtained by the second sensor, and the target signal is obtained in real time. This method can adapt to different environments, compensate for different types of environmental noise, and thus achieve high-precision measurement of the target signal.

[0031] Specifically, the first sensor and the second sensor are different types of sensors. The first sensor is the main sensor, and the collected signal includes both the target signal and the first environmental noise signal at the same time. The linearity, frequency response, and sensitivity of the main sensor need to be determined according to specific test plans and test outlines, as long as they can meet the requirements of precision measurement, and no specific limitations are made.

[0032] The second sensor is a sensor used to correct the first environmental noise signal in the first sensor. Therefore, the second sensor only obtains the environmental noise signal in the same environment and does not contain other signals.

[0033] For a high-precision measurement device as the device under test, it will be affected by various types of environmental noise during operation, such as mechanical vibration noise, electromagnetic interference noise, etc. Therefore, the second sensor can select a force sensor as the noise compensation sensor, and this sensor is not affected by the disturbing force generated by the device under test.

[0034] When measuring the target signal of a high-precision measurement device, the high-precision measurement device can be fixed on the measurement platform by bolts, and the main sensor can be fixed at an appropriate position on the measurement platform. The main sensor can also be directly fixed on the high-precision measurement device to collect the mixed signal of the target signal and the environmental noise signal.

[0035] To maximize the accuracy of the environmental noise compensation value, the installation errors of the second sensor and the main sensor should be minimized. In a preferred embodiment of the present invention, the second sensor and the main sensor are coaxially arranged to reduce the amplitude error and phase error of the environmental noise measurement by the two sensors. Moreover, since the second sensor does not bear the force between the measurement platform and the installation base of the high-precision measurement device, it is ensured that the second sensor only collects the environmental noise signal.

[0036] Further, the steps of obtaining the noise transfer function in step S102 specifically include the following steps: Step S102-1: Measure the known environmental noise signal by using the first sensor and the second sensor to obtain a first environmental noise output signal and a second environmental noise output signal.

[0037] In this embodiment, taking the environmental noise as mechanical vibration noise as an example, the mechanical vibration interference is simulated by controlling the vibration table. The output signals of the main sensor (the first sensor) are respectively recorded and the output signals of the noise compensation sensor (the second sensor) .

[0038] Step S102-2: Obtain the noise transfer function according to the first environmental noise output signal and the second environmental noise output signal, and the expression is: , where, is the second environmental noise output signal; is the first environmental noise output signal.

[0039] In this embodiment, the second sensor can effectively work within the frequency range of 8 Hz to 300 Hz. By calibrating different frequency points, different noise transfer coefficients can be obtained, which can adapt to the environmental noise from low frequency to high frequency and adapt to various complex environments.

[0040] Further, it may also include step S102-3: Perform multiple calibrations to eliminate random errors and determine the average value of as the final noise transfer coefficient, for example, eliminate random errors by the method of calculating the mean square error of multiple calibration results.

[0041] In step S104, the mixed signal is collected by using the first sensor , which can be expressed as: , where, is the target signal, is the first environmental noise signal.

[0042] When collecting the second environmental noise signal under the same environmental noise conditions using the second sensor, the output of the noise compensation sensor is the second environmental noise signal related to the first environmental noise signal using the noise transfer function. It can be expressed as: , where is the noise transfer function.

[0043] In step S106, the environmental noise compensation value can be expressed as .

[0044] In step S108, the finally obtained target signal can be expressed as: ; where is the noise transfer function; is the mixed signal.

[0045] In this embodiment, one first sensor and one second sensor are used as a group of measurement sensing components, and a coaxial design is adopted to reduce the system complexity and lower the hardware cost. At the same time, the measurement error can be reduced from 15.54% of the traditional method to 11.77%. The environmental noise compensation method of the high-precision measurement device of the present application can use one group of measurement sensing components or multiple groups of measurement sensing components for measurement, such as 1 - 4 groups of measurement sensing components.

[0046] As an alternative embodiment, 4 groups of measurement sensing components can be used to compensate for environmental noise.

[0047] As Figure 2 shown, the high-precision measurement device 3 is fixed on the measurement platform 2. At this time, the high-precision measurement device 3 is placed at the center position of the measurement platform 2. Four measurement sensing components 1 are evenly distributed at the four corner positions of the measurement platform 2, and the distance between each measurement sensing component 1 and the high-precision measurement device 3 is equal.

[0048] According to the above method, first, the noise transfer function of each group of measurement sensing components is obtained by taking the mean value through multiple measurements . Then, the measurement signals of the first sensor and the second sensor in each group of measurement sensing components are collected respectively. After the collected measurement signals are amplified by a charge amplifier, they are converted into digital signals. After noise compensation, the target signals ,

[0049] output by each group of measurement sensing components are obtained respectively. The mean value of the four obtained target signals is taken as the target signal of the finally obtained high-precision measurement device 3.

[0050] Further, when the test site is restricted or other factors cause the high-precision measurement device 3 not to be placed at the center position of the measurement platform, different weights can be assigned to the output values of the four groups of measurement and sensing components, and finally weighted and averaged to obtain the target signal as the final result.

[0051] Specifically, each weight can be set according to the distance between each group of measurement and sensing components and the high-precision measurement device. The weight distribution is based on the reciprocal or square reciprocal of the distance, that is or . The measurement data of the sensor closer to the high-precision measurement device should be assigned a higher weight, and the sum of all weights is 1.

[0052] Let the distances of the four groups of measurement and sensing components be and , and the initial weights are respectively: , , and . After denominator normalization, the final weight distribution formula is: .

[0053] In the above manner, it is also possible to overcome the situation where there is noise interference or abnormal data in a certain group of measurement and sensing components, and achieve precise measurement by dynamically adjusting the weights.

[0054] Embodiment 2 The present invention also provides a system embodiment that continues from the above embodiments. Based on the same interpretation of the name meaning as the above embodiments, it has the same technical effects as the above embodiments and will not be elaborated here.

[0055] As Figure 3 shown, the present invention provides an environmental noise compensation system for a high-precision measurement device, including: A calibration unit 302 that respectively uses a first sensor and a second sensor to obtain environmental noise output signals under the same environmental conditions, and calibrates the noise transfer function under the environmental conditions according to the environmental noise output signals. A signal acquisition unit 304 that uses the first sensor to acquire a mixed signal, where the mixed signal includes a target signal and a first environmental noise signal, and uses the second sensor to acquire a second environmental noise signal under the same environmental conditions.

[0056] A noise compensation unit 306 that obtains an environmental noise compensation value according to the second environmental noise signal and the noise transfer function, and uses the environmental noise compensation value to correct the first environmental noise signal.

[0057] An output unit 308 that calculates the target signal in the mixed signal according to the corrected first environmental noise signal.

[0058] As Figure 4 shown, in this embodiment, the first sensor 11 and the second sensor 12 in the signal acquisition unit are coaxially arranged in the measurement sensing component tooling 13 to minimize the amplitude error and phase error of the environmental noise measurement by the two sensors. Preferably, the first sensor and the second sensor form a set of measurement sensing components, and their coaxial error does not exceed 0.1 mm.

[0059] As an alternative implementation, multiple sets of measurement sensing components can be used to compensate for environmental noise. The structures of the measurement sensing component toolings 13 of each set of measurement sensing components are the same.

[0060] Finally, it should be noted that: the various embodiments in this specification are described in a progressive manner, and the key point of each embodiment is to illustrate the differences from other embodiments. The same or similar parts among the various embodiments can be referred to each other. For the system or device disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple, and the relevant parts can be referred to the description of the method part.

[0061] The above embodiments are only used to illustrate the technical solutions disclosed by the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A method for compensating environmental noise of a high-precision measuring device, characterized in that: include: Acquire an environmental noise output signal under the same environmental noise condition using the first sensor and the second sensor respectively, and calibrate the noise transfer function under the environmental noise condition according to the environmental noise output signal; Using the first sensor to collect a mixed signal, the mixed signal includes: a target signal and a first environmental noise signal, and using the second sensor to collect a second environmental noise signal under the same environmental noise condition; Obtaining an environmental noise compensation value according to the second environmental noise signal and the noise transfer function, and using the environmental noise compensation value to correct the first environmental noise signal; The target signal in the mixed signal is obtained by calculation according to the corrected first environmental noise signal.

2. The environmental noise compensation method according to claim 1, characterized in that: The first sensor and the second sensor compensate for the amplitude and phase of the environmental noise.

3. The environmental noise compensation method according to claim 1, characterized in that: The frequency range of the second sensor is 8 Hz to 300 Hz.

4. The environmental noise compensation method according to claim 3, characterized in that: The second sensor is a noise compensation sensor.

5. The environmental noise compensation method according to claim 1, characterized in that: The method of respectively using the first sensor and the second sensor to obtain an environmental noise signal under the same environmental condition, and calibrating the noise transfer function under the environmental condition according to the environmental noise signal, comprises: Using the first sensor and the second sensor to measure the known environmental noise signal to obtain a first environmental noise output signal and a second environmental noise output signal; The noise transfer function is obtained according to the first environmental noise output signal and the second environmental noise output signal, and the expression is: ， in, is a second environmental noise output signal; is the first environmental noise output signal.

6. The environmental noise compensation method according to claim 1, characterized in that: A plurality of the first sensors and a plurality of the second sensors are used to obtain a plurality of groups of the environmental noise compensation values, and an average value of the plurality of groups of the environmental noise compensation values ​​is taken as a final environmental noise compensation value.

7. The environmental noise compensation method according to claim 1, characterized in that: A plurality of the first sensors and a plurality of the second sensors are used to obtain a plurality of groups of the environmental noise compensation values, different weights are assigned to the plurality of groups of the environmental noise compensation values, and a weighted average is obtained as a final environmental noise compensation value.

8. An environmental noise compensation system for high-precision measuring equipment, characterized in that: Implementing the environmental noise compensation method according to any one of claims 1 to 7, comprising: A calibration unit, which uses the first sensor and the second sensor to obtain an environmental noise output signal under the same environmental condition, and calibrates the noise transfer function under the environmental condition according to the environmental noise output signal; A signal acquisition unit, using the first sensor to acquire a mixed signal, the mixed signal including: a target signal and a first environmental noise signal, and using the second sensor to acquire a second environmental noise signal under the same environmental conditions; a noise compensation unit, which obtains an environmental noise compensation value according to the second environmental noise signal and the noise transfer function, and uses the environmental noise compensation value to correct the first environmental noise signal; An output unit is configured to calculate the target signal in the mixed signal according to the corrected first environmental noise signal.

9. The environmental noise compensation system according to claim 8, characterized in that: The first sensor and the second sensor are coaxially arranged, and the coaxial error does not exceed 0.1 mm.

10. The environmental noise compensation system according to claim 8, characterized in that: There are multiple signal acquisition units.

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