Array type robot touch sensor and preparation method and application thereof

Abstract

The invention relates to the technical field of pressure sensing, and discloses an array type robot touch sensor and a preparation method and application thereof.The array type robot touch sensor comprises a cavity packaging layer and a plane packaging layer installed with the cavity packaging layer in a matched mode, a substrate layer is arranged on the plane packaging layer, and at least one cavity is formed between the cavity packaging layer and the substrate layer; a piezoelectric plate is arranged at the top in the cavity, and a copper friction plate is arranged below the piezoelectric plate; an electrode is arranged in the cavity and is positioned on the substrate layer; a composite material friction part is arranged on the electrode, and a gap is formed between the composite material friction part and the copper friction plate; when the cavity packaging layer is pressed, the copper friction plate makes contact with the composite material friction part, electrification is generated through friction, and voltage is generated. According to the novel array type robot touch sensor, high-sensitivity pressure feedback can be generated under weak pressure, good flexibility can be achieved, and therefore the application range of the sensor in a complex environment is greatly expanded, and the working capacity of the sensor in the complex environment is greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of pressure sensing, and particularly relates to an array - type robot tactile sensor, a preparation method thereof, and an application thereof. Background Art

[0002] In the current era of rapid technological development, robot technology, as an important branch in the fields of intelligent manufacturing and automation, is gradually changing the production mode and lifestyle. With the increasingly complex application scenarios of robots, the requirements for their perception, decision - making, and execution capabilities are also constantly increasing. High - performance sensors, as the "sensory system" of robots, are crucial for improving the intelligence level of robots. With the progress of intelligent technology, the requirements for pressure sensors are also constantly increasing, such as being more energy - efficient, compact, multifunctional, flexible, and maintaining stable performance in various environments. Therefore, it is necessary to develop energy - efficient, environmentally friendly, high - resolution, and flexible deformable pressure sensors.

[0003] The pressure - sensing technology based on array - type triboelectric nanogenerators has advantages such as low energy consumption, high sensitivity, and good flexibility, and has gradually become a research hotspot, providing a new sensing technology approach for robots. The array - type pressure sensor is composed of multiple triboelectric units, which can be independent detection units or a combination of multiple units according to different functions. In addition, the array - type structure distribution improves the sensitivity and coverage area of the sensor, and multi - modal perception enables the robot to obtain rich tactile, pressure and other information, improving the accuracy and safety of the robot.

[0004] Their flexibility and adaptability enable these sensors to be applied to a variety of irregular surfaces and objects with complex shapes, thus broadening the application scope of pressure - sensing technology. Although the pressure sensors based on array - type triboelectric nanogenerators show broad application potential, in order to fully exert their performance and solve the limitations of the existing technology, further innovative research and development are needed on how to design a sensitive, flexible, and stable array - type pressure sensor. Summary of the Invention

[0005] The purpose of the present invention is to overcome the above - mentioned problems existing in the prior art, and provide an array - type robot tactile sensor, a preparation method thereof, and an application thereof. The sensor uses triboelectrification and electrostatic induction to generate voltage, and can sense the magnitude of external pressure and contact point positioning, effectively solving the deficiencies of traditional sensors in terms of integration, flexibility, and adaptation to various surface shapes.

[0006] To achieve the above object, on the one hand, the present invention provides an array-type robot tactile sensor, which includes a chamber encapsulation layer and a planar encapsulation layer installed in cooperation with the chamber encapsulation layer. A base layer is provided on the planar encapsulation layer, and at least one chamber is formed between the chamber encapsulation layer and the base layer;

[0007] A piezoelectric sheet is provided at the top inside the chamber, and a copper friction sheet is provided under the piezoelectric sheet;

[0008] An electrode is provided inside the chamber, and the electrode is located on the base layer;

[0009] A composite material friction component is provided on the electrode, and there is a gap between the composite material friction component and the copper friction sheet; the composite material friction component is formed by curing a mixture of PDMS prepolymer, carbon nanotubes, and carbon black;

[0010] When the chamber encapsulation layer is subjected to pressure, the copper friction sheet contacts the composite material friction component, triboelectrification occurs, and a voltage is generated.

[0011] Preferably, the materials of the chamber encapsulation layer and the planar encapsulation layer are PDMS;

[0012] The material of the base layer is PI or FPC;

[0013] The piezoelectric sheet is a lead zirconate titanate piezoelectric ceramic sheet.

[0014] Preferably, the composite material friction component is in a convex structure, and a plurality of parallel strip-shaped grooves are provided on the surface of the composite material friction component.

[0015] Preferably, the width of the strip-shaped groove is 0.01 - 1 mm.

[0016] Preferably, the thickness of the composite material friction component is 3 - 5 mm.

[0017] Preferably, the thickness of the chamber encapsulation layer is 1 - 3 mm;

[0018] The thickness of the piezoelectric sheet is 1 - 3 mm;

[0019] The thickness of the planar encapsulation layer is 1 - 3 mm.

[0020] Preferably, the size of the gap is 2 - 20 mm.

[0021] Preferably, the electrode is connected to a wire.

[0022] On the second aspect, the present invention provides a preparation method for the above array-type robot tactile sensor, including the following steps:

[0023] S1. Pour the PDMS prepolymer into the chamber encapsulation layer mold and the planar encapsulation layer mold respectively, cure it, and then demold to obtain the chamber encapsulation layer and the planar encapsulation layer.

[0024] S2. Mix the PDMS prepolymer with carbon nanotubes and carbon black, pour the mixture into the composite material friction component mold, cure it, and then demold to obtain the composite material friction component.

[0025] S3. Place the metal foil on the base layer for hot pressing, then use the laser etching technology to obtain the electrode. Then place the composite material friction component on the electrode and place the base layer on the planar encapsulation layer.

[0026] S4. Assemble the piezoelectric sheet and the copper friction sheet on the chamber encapsulation layer, and then bond the chamber encapsulation layer and the planar encapsulation layer.

[0027] The third aspect of the present invention provides an application of the above-mentioned array-type robot tactile sensor in pressure detection.

[0028] The beneficial effects of the present invention are as follows:

[0029] The present invention provides an array-type robot tactile sensor with better performance such as sensitivity, flexibility, environmental adaptability, and stability, and a wider application range. By preparing a composite nanomaterial of PDMS, carbon nanotubes and carbon black, the output voltage of the friction layer material during operation is increased. By designing this composite nanomaterial into a convex structure, the contact area between the composite material friction component and the copper friction sheet is different under different external pressures, realizing a high-sensitivity pressure feedback mechanism that can generate different peak voltages under different pressures. In addition, the rigid piezoelectric sheet can improve the sensitivity while ensuring that the copper friction sheet will not deform due to external forces. This array-type robot tactile sensor uses the triboelectric effect and the electrostatic induction effect to generate voltage, can sense the magnitude of external pressure and the contact point positioning, and effectively solves the deficiencies of traditional sensors in terms of integration, flexibility, and adaptation to various surface shapes.

[0030] The present invention combines the piezoelectric principle with the triboelectric phenomenon to create a new type of array-type robot tactile sensor. Through delicate design, it can not only generate a high-sensitivity pressure feedback under weak pressure, but also achieve good flexibility, thus greatly expanding the application range and working ability of the sensor in complex environments. Description of the Drawings

[0031] Figure 1 is a disassembled schematic diagram of the array-type robot tactile sensor of the present invention;

[0032] Figure 2 is a schematic diagram of the array-type robot tactile sensor of the present invention;

[0033] Figure 3 This is a physical diagram of the array - type robot tactile sensor of the present invention;

[0034] Figure 4 This is a physical diagram of the composite material friction part of the present invention;

[0035] Figure 5 This is a physical diagram of the electrode of the present invention;

[0036] Figure 6 This is a graph comparing the open - circuit voltages of the array - type robot tactile sensor of the present invention in Test Example 1 and the pressure sensor based on PDMS material in Comparative Example 1;

[0037] Figure 7 This is a graph of the open - circuit voltages of the array - type robot tactile sensor of the present invention under four pressures in Test Example 2.

[0038] Explanation of reference numerals

[0039] 1 - Chamber encapsulation layer, 2 - Piezoelectric sheet, 3 - Copper friction sheet, 4 - Composite material friction part, 5 - Electrode, 6 - Base layer, 7 - Planar encapsulation layer. Detailed implementation manners

[0040] The following details the specific implementation manners of the present invention in conjunction with the drawings and embodiments. It should be understood that the specific implementation manners described herein are only for explaining and interpreting the present invention, and are not used to limit the present invention.

[0041] In the ranges disclosed herein, the endpoints and any values are not limited to the exact ranges or values. These ranges or values should be understood to include values close to these ranges or values. For numerical ranges, between the endpoint values of each range, between the endpoint values of each range and individual point values, and between individual point values, they can be combined with each other to obtain one or more new numerical ranges, and these numerical ranges should be regarded as specifically disclosed herein.

[0042] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) involved in the embodiments of the present invention, the directional indications are only used to explain the relative positional relationship and movement conditions between components in a specific posture (as shown in the drawings). If the specific posture changes, the directional indications will also change accordingly.

[0043] In addition, if there are descriptions such as "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and should not be construed as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions between the various embodiments provided by the present invention may be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0044] Embodiment 1

[0045] As Figure 1-3 shown, the array-type robot tactile sensor ( Figure 1 is a schematic diagram of the disassembly of the array-type robot tactile sensor, Figure 2 is a schematic diagram of the array-type robot tactile sensor, Figure 3 is a physical diagram of the array-type robot tactile sensor). The array-type robot tactile sensor includes a chamber encapsulation layer 1 and a planar encapsulation layer 7 that is installed in a matching manner with the chamber encapsulation layer 1. A base layer 6 is provided on the planar encapsulation layer 7, and at least one chamber is formed between the chamber encapsulation layer 1 and the base layer 6;

[0046] At the top inside the chamber, a piezoelectric sheet 2 is provided, and a copper friction sheet 3 is provided under the piezoelectric sheet 2;

[0047] An electrode 5 is provided inside the chamber, and the electrode 5 is located on the base layer 6;

[0048] A composite material friction member 4 is provided on the electrode 5, and there is a gap between the composite material friction member 4 and the copper friction sheet 3; the composite material friction member 4 is formed by curing after mixing PDMS prepolymer with carbon nanotubes and carbon black;

[0049] When the chamber encapsulation layer 1 is subjected to pressure, the copper friction sheet 3 contacts the composite material friction member 4, and triboelectrification occurs to generate a voltage.

[0050] In the present invention, the shapes and sizes of the piezoelectric sheet 2, copper friction sheet 3, composite material friction member 4, and electrode 5 inside the chamber are all adapted to the chamber. Further, in this embodiment, nine chambers are formed between the chamber encapsulation layer 1 and the base layer 6, arranged in a 3×3 manner, and each chamber is a cylindrical structure. The diameters of the piezoelectric sheet 2, copper friction sheet 3, composite material friction member 4, electrode 5, and the chamber are all 18 mm. The height of the chamber only needs to be able to accommodate the piezoelectric sheet 2, copper friction sheet 3, composite material friction member 4, and electrode 5, and leave a suitable gap between the composite material friction member 4 and the copper friction sheet 3.

[0051] Furthermore, the materials of the chamber encapsulation layer 1 and the planar encapsulation layer 7 are both PDMS, which is a flexible encapsulation layer. The resilience of PDMS is used to restore the chamber structure after the external pressure is released.

[0052] In the specific implementation, the thickness of the chamber encapsulation layer 1 is 1 - 3 mm; in this embodiment, the thickness of the chamber encapsulation layer 1 is 2 mm.

[0053] In the present invention, the thickness of the planar encapsulation layer 7 is 1 - 3 mm; in this embodiment, the thickness of the planar encapsulation layer 7 is 2 mm.

[0054] The material of the base layer 6 is PI or FPC. Preferably, the base layer 6 is a commonly used polyimide film. The function of the base layer 6 is to serve as the base material for the electrode 5, so that the electrode 5 is arranged on the base layer 6 according to the design rules.

[0055] The function of the piezoelectric sheet 2 in the present invention is firstly to increase the sensitivity of the array - type robot tactile sensor, and secondly to ensure that the copper friction sheet 3 fixed on its surface does not deform when subjected to pressure. Preferably, the piezoelectric sheet 2 is a lead zirconate titanate piezoelectric ceramic sheet.

[0056] Among them, the thickness of the piezoelectric sheet 2 in the present invention is 1 - 3 mm; in this embodiment, the thickness of the piezoelectric sheet 2 is 1 mm.

[0057] Further in the present invention, as Figure 4 shown, the composite material friction component 4 has a convex structure, and there are several parallel - arranged strip - shaped grooves on the surface of the composite material friction component 4. The purpose of designing the composite material friction component 4 into a convex structure is that when the array - type robot tactile sensor is subjected to different magnitudes of force, the contact area between the composite material friction component 4 and the copper friction sheet 3 is different, so that the output voltage is different. As the pressure increases, the contact area increases and the output voltage rises. The reason for arranging several parallel - arranged strip - shaped grooves on the surface of the composite material friction component 4 is that the strip - shaped groove structure on the surface can increase the actual contact area when the composite material friction component 4 contacts and separates from the copper friction sheet 3, enhancing the signal output. In the preferred case, the width of each strip - shaped groove is 0.01 - 1 mm.

[0058] In this embodiment, the width of each strip - shaped groove is 0.1 mm.

[0059] The composite material friction component 4 in the present invention is formed by curing the mixture of PDMS prepolymer, carbon nanotubes and carbon black. Among them, carbon nanotubes can be used as a medium for charge storage, and they can capture and hold more charges. The addition of carbon black can make the charges flow more effectively in the material, thus generating a higher voltage at the output end.

[0060] The thickness of the composite friction component 4 is 3 - 5 mm; in this embodiment, the thickness of the composite friction component 4 is 4 mm.

[0061] In the present invention, the reason for providing a gap between the composite friction component 4 and the copper friction plate 3 is that the composite friction component 4 and the copper friction plate 3 need to come into contact and separate to generate a large electrical signal, and the existence of the gap enables them to come into contact and separate when subjected to pressure; in the preferred case, the size of the gap is 2 - 20 mm.

[0062] In this embodiment, the size of the gap is 3 mm.

[0063] In the present invention, the electrode 5 is a common metal electrode in the art and is prepared from a metal foil, and can be a copper electrode, a silver electrode or an aluminum electrode; the electrode 5 used in this embodiment is a copper electrode.

[0064] In the present invention, the electrode 5 is connected to a wire. Further, when there are multiple chambers formed between the chamber encapsulation layer 1 and the base layer 6, each electrode 5 will be connected to a wire. For the convenience of arrangement and measurement, each wire is grouped on the same side of the array - type robot tactile sensor, or as Figure 5 shown, each electrode 5 is connected to a metal strip. One end of each metal strip is connected to the electrode 5, and the other end extends to the same side of the array - type robot tactile sensor and is connected to the wire. This is to output the voltage to the same side of the array - type robot tactile sensor for easy measurement. At this time, the metal strip and the electrode 5 are of the same material and can both be prepared from a metal foil by laser etching technology; further, each wire is connected to a voltmeter, that is, the number of electrodes 5 is the same as the number of wires and voltmeters.

[0065] When the array - type robot tactile sensor of the present invention is used to detect pressure, when the chamber encapsulation layer 1 is subjected to an external pressure, it will deform, which will cause the copper friction plate 3 to come into contact with the composite friction component 4. Induced charges are generated on the electrode 5 through triboelectrification and electrostatic induction, and are transmitted through the wire connected to the electrode 5 (or transmitted to the wire through the metal strip and then transmitted by the wire). The voltmeter connected to the wire detects the corresponding voltage signal brought by the induced charges, thereby converting the pressure into a voltage signal. By detecting the corresponding voltage value, the magnitude of the pressure received by the chamber can be confirmed (it is necessary to detect the voltage value generated when the chamber is subjected to a known - magnitude pressure in advance to obtain the relationship between the voltage and pressure of the chamber, and then by detecting the voltage value generated by the chamber and according to the relationship between the voltage and pressure of the chamber, the magnitude of the pressure received by the chamber can be confirmed).

[0066] Embodiment 2

[0067] The preparation method of the array - type robot tactile sensor of Example 1 includes the following steps:

[0068] S1. Mix the commercially available PDMS main agent and curing agent in a weight ratio of 10:1, stir well for 1 minute to obtain a PDMS prepolymer; use 3D printing technology to prepare a chamber encapsulation layer mold and a planar encapsulation layer mold respectively, and spray a release agent on the surfaces of these molds; pour the PDMS prepolymer into the chamber encapsulation layer mold and the planar encapsulation layer mold respectively, put it into a vacuum chamber and evacuate for about 15 minutes until the bubbles are completely removed; then put it into a drying oven and heat it to 80 °C for curing for 3 hours. After complete curing, demold to obtain the chamber encapsulation layer 1 and the planar encapsulation layer 7.

[0069] S2. Add carbon nanotubes to the PDMS prepolymer prepared in step S1 (the weight ratio of PDMS prepolymer to carbon nanotubes is 100:2), and stir well to mix. Then add carbon black to it (the weight ratio of PDMS prepolymer to carbon black is 100:1), and stir well to mix to obtain a liquid material. Pour the liquid material into a composite material friction component mold (this composite material friction component mold is also prepared by 3D printing technology, and a release agent is sprayed on the surface of the composite material friction component mold before pouring the liquid material), put it into a vacuum chamber and evacuate for about 10 minutes until the bubbles are completely removed; then put it into a drying oven and heat it to 80 °C for curing for 3 hours. After complete curing, demold to obtain the composite material friction component 4.

[0070] S3. Place the metal foil (copper foil) on the base layer 6 for hot pressing, and then use laser etching technology to obtain the electrode 5 and the metal strip. Then fix the composite material friction component 4 on the electrode 5, and fix the base layer 6 on the planar encapsulation layer 7.

[0071] S4. Assemble the piezoelectric sheet 2 and the copper friction sheet 3 on the chamber encapsulation layer 1 (pre - cut a copper sheet of appropriate size from a whole piece of copper foil as the copper friction sheet 3), and then bond the chamber encapsulation layer 1 and the planar encapsulation layer 7.

[0072] By preparing a composite nanomaterial of PDMS, carbon nanotubes and carbon black, the present invention improves the output voltage of the composite material friction component 4 during operation. By designing this composite nanomaterial into a convex structure, the contact area between the composite material friction component 4 and the copper friction sheet 3 is different under different external pressures, so that different peak voltages can be generated, realizing a high - sensitivity pressure feedback mechanism that can generate different peak voltages under different external pressures. In addition, the rigid piezoelectric sheet 2 can ensure that the copper friction sheet 3 will not deform due to external forces while improving the sensitivity.

[0073] Comparative Example 1

[0074] To prepare a pressure sensor based on PDMS material, the preparation method is implemented according to the method of Example 2. The difference is that in step S2, carbon nanotubes and carbon black are not used, that is, the PDMS prepolymer is directly poured into the composite friction component mold to obtain the composite friction component 4.

[0075] Test Example 1

[0076] The output voltage comparison test was respectively carried out on the array-type robot tactile sensor of Example 1 and the pressure sensor based on PDMS material in Comparative Example 1. The prepared array-type robot tactile sensor and the pressure sensor based on PDMS material were respectively fixed at one end of the linear motor, so that the linear motor applied the same pressure to the two sensors. The output voltage of the two sensors under the same pressure was detected by a voltmeter connected to the wire, and the peak values of their output voltages were compared. The results are as Figure 6 shown (where Figure 6 PDMS represents the pressure sensor based on PDMS material in Comparative Example 1, and PDMS + 2wt% CNT + 1wt% CB represents the array-type robot tactile sensor in Example 1). According to Figure 6 it can be seen that under the same external pressure, the voltage peak generated by the contact separation between the composite friction component 4 and the copper friction plate 3 in the array-type robot tactile sensor of the present invention is 108% higher than the voltage peak generated by the contact separation between the composite friction component 4 prepared from PDMS material and the copper friction plate 3 in the pressure sensor based on PDMS material, indicating that the voltage is significantly increased when the composite friction component 4 of the present invention is in contact with and separated from the copper friction plate 3, and the transmitted electrical signal is significantly increased.

[0077] Test Example 2

[0078] The array-type robot tactile sensor of Example 1 was fixed at one end of the linear motor, and the digital display pressure tester was fixed at the other end of the linear motor. Under the drive of the linear motor, the pressure sensing end of the digital display pressure tester was in contact with and separated from the sensor, and the peak pressure value during the contact separation process could be displayed. When different strokes and frequencies of the linear motor were adjusted, different pressure values could be generated. In this experiment, the frequency was controlled to be the same. By adjusting the four strokes of the linear motor, the array-type robot tactile sensor was subjected to four different pressure values, and the output voltage of the array-type robot tactile sensor under the four different pressure values was detected by a voltmeter connected to the wire. The output voltage detection results are as Figure 7 shown. According to Figure 7It can be seen that the array-type robot tactile sensor of the present invention can output 4 voltage peaks under four external pressures, and the rule is that the output voltage peak continuously increases with the increase of the externally applied pressure. This verifies the feasibility of the array-type robot tactile sensor of the present invention for detecting different pressure magnitudes.

[0079] From the above results, it can be seen that the array-type robot tactile sensor of the present invention utilizes the voltage generated by triboelectrification and electrostatic induction effects to sense the magnitude of external pressure and contact point positioning, effectively solving the deficiencies of traditional sensors in terms of integration, flexibility, and adaptability to various surface shapes.

[0080] It should be understood that the parts not elaborated in detail in this specification all belong to the prior art.

[0081] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited thereto. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solutions of the present invention, including any other suitable combination of each technical feature. These simple modifications and combinations should also be regarded as the content disclosed by the present invention and fall within the protection scope of the present invention.

Claims

1. An array type robot tactile sensor, characterized in that: The array-type robot tactile sensor comprises a chamber encapsulation layer (1) and a plane encapsulation layer (7) mounted in conjunction with the chamber encapsulation layer (1); a base layer (6) is provided on the base layer (7); and at least one chamber is formed between the chamber encapsulation layer (1) and the base layer (6); A piezoelectric sheet (2) is provided on the top of the chamber, and a copper friction sheet (3) is provided under the piezoelectric sheet (2); An electrode (5) is provided in the chamber, and the electrode (5) is located on a base layer (6); A composite material friction component (4) is provided on the electrode (5), and a gap is provided between the composite material friction component (4) and the copper friction plate (3); the composite material friction component (4) is formed by mixing PDMS prepolymer with carbon nanotubes and carbon black and then curing them; When the chamber packaging layer (1) is subjected to pressure, the copper friction plate (3) contacts the composite material friction component (4), and friction generates electricity, thereby generating voltage.

2. The array robot tactile sensor according to claim 1, characterized in that: The material of the chamber encapsulation layer (1) and the plane encapsulation layer (7) is PDMS; The material of the base layer (6) is PI or FPC; The piezoelectric sheet (2) is a lead zirconate titanate piezoelectric ceramic sheet.

3. The array robot tactile sensor according to claim 1 or 2, characterized in that: The composite material friction component (4) is a convex structure, and a plurality of parallel-arranged strip grooves are provided on the surface of the composite material friction component (4).

4. The array robot tactile sensor according to claim 3, characterized in that: The width of the strip groove is 0.01-1 mm.

5. The array robot tactile sensor according to claim 3, characterized in that: The composite material friction component (4) has a thickness of 3-5 mm.

6. The array robot tactile sensor according to claim 1 or 5, characterized in that: The thickness of the cavity packaging layer (1) is 1-3 mm; The thickness of the piezoelectric sheet (2) is 1-3 mm; The thickness of the planar packaging layer (7) is 1-3 mm.

7. The array robot tactile sensor according to claim 1, characterized in that: The size of the gap is 2-20 mm.

8. The array robot tactile sensor according to claim 1, characterized in that: The electrode (5) is connected to a wire.

9. The method for preparing the array robot tactile sensor according to any one of claims 1 to 8, characterized in that: The following steps are involved: S1, pouring PDMS prepolymer into the cavity encapsulation layer mold and the plane encapsulation layer mold respectively, and demoulding after curing to obtain the cavity encapsulation layer (1) and the plane encapsulation layer (7); S2, mixing the PDMS prepolymer with the carbon nanotubes and the carbon black, and pouring the mixture into a composite friction component mold, and demoulding the mixture after curing to obtain a composite friction component (4); S3, placing a metal foil on the base layer (6) for hot pressing, and then using laser etching technology to obtain an electrode (5), and then placing the composite friction component (4) on the electrode (5), and placing the base layer (6) on the planar packaging layer (7); S4, assembling the piezoelectric sheet (2) and the copper friction sheet (3) on the chamber packaging layer (1), and then bonding the chamber packaging layer (1) to the plane packaging layer (7).

10. Application of the array robot tactile sensor according to any one of claims 1 to 8 in pressure detection.

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