Ultrasonic welding head with wear-resistant composite coating as well as preparation method and application of ultrasonic welding head

Abstract

The invention discloses an ultrasonic welding head with a wear-resistant composite coating and a preparation method and application of the ultrasonic welding head. The ultrasonic welding head with the wear-resistant composite coating comprises a substrate material, a Ti / Al transition layer, a ZrO2 doped TiAlN layer and a diamond-like carbon film layer, wherein the Ti / Al transition layer, the ZrO2 doped TiAlN layer and the diamond-like carbon film layer are sequentially arranged on the surface of the substrate material. Wherein the innermost Ti / Al transition layer is formed by co-plating two metals with larger thermal expansion coefficients, so that the interface thermal stress can be reduced, and the binding force of the coating can be improved; the middle layer is a TiAlN layer into which a strengthening phase ZrO2 is introduced, so that the stress value of a crack tip is reduced, and crack propagation is avoided; the outermost layer is a self-lubricating layer composed of a diamond-like carbon film, adhesion can be effectively restrained through chemical inertness and self-lubricating characteristics of the self-lubricating layer, the surface of a welding head is kept clean, and therefore the quality stability of a welding spot is improved, and the composite coating is endowed with excellent binding force and abrasion resistance through matching and combination of the three layers. And the service life of the ultrasonic welding head is prolonged, and the welding quality stability is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of ultrasonic welding heads, and in particular to an ultrasonic welding head with a wear-resistant composite coating, a preparation method thereof, and an application thereof. Background Art

[0002] Ultrasonic welding is a welding method that fuses the surfaces of two objects by high-frequency vibration (usually 20 - 40 kHz). Its core lies in using an ultrasonic generator to convert electrical energy into mechanical vibration, which is transmitted to the welding head through a transducer, and then the welding head transmits the vibration to the object to be welded, so that a firm joint is formed under the combined action of friction and thermal effect. The welding head is the core component of the ultrasonic welding equipment, and its design needs to meet the resonance state to ensure the effective transmission of ultrasonic energy. Currently, common ultrasonic welding heads on the market are mostly made of titanium alloy or high-strength stainless steel, and their wear resistance mainly depends on the matrix material itself. However, in actual applications, as the component directly contacting the object during the welding process, the surface of the welding head is extremely prone to problems such as abrasive wear, material spalling, and fatigue cracks under long-term high-frequency vibration and high-pressure contact conditions, resulting in fluctuations in the bonding strength and dimensional accuracy of the welded workpiece, increasing the equipment maintenance frequency and shortening the service life of the welding head, affecting production efficiency, and greatly limiting its application.

[0003] In related technologies, usually, the performance is improved by adding a wear-resistant coating (such as a metal or ceramic coating). However, it is found in actual applications that although a single metal or ceramic coating can improve the wear resistance or anti-adhesion performance to a certain extent, it is often difficult to balance high adhesion and anti-fatigue performance, and microcrack propagation is likely to occur under long-term high-frequency vibration, thus losing the protection effect. For example, relevant research has found that preparing a TiAlN coating on the substrate surface by multi-arc ion plating technology can effectively improve the comprehensive performance of cermet specimens and can extend the service life to a certain extent, but it has problems such as insufficient structural stability and poor coating toughness, and it is difficult to meet the dual requirements of long life and high reliability. In addition, using a ceramic coating also has problems of internal stress concentration, which is easy to cause coating peeling. At the same time, since the ceramic coating is a hard material, it has poor ductility itself, poor adaptability to alternating loads under ultrasonic vibration, and is also prone to cracking.

[0004] Based on this, there is an urgent need to seek a coating that can simultaneously achieve the triple functions of wear resistance, anti-fatigue, and low adhesion in a working environment with high amplitude and high pressure, so as to improve the service life and welding quality stability of the ultrasonic welding head. Summary of the Invention

[0005] The purpose of the first aspect of the present invention is to provide an ultrasonic welding head with a wear-resistant composite coating.

[0006] The objective of the second aspect of the present invention is to provide a preparation method for an ultrasonic welding head with a wear-resistant composite coating.

[0007] The objective of the third aspect of the present invention is to provide the application of an ultrasonic welding head with a wear-resistant composite coating and its preparation method in the preparation of a welding device.

[0008] To achieve the above objectives, the technical solutions adopted by the present invention are as follows: In the first aspect of the present invention, there is provided an ultrasonic welding head with a wear-resistant composite coating, which includes: a base material, and a Ti / Al transition layer, a ZrO2-doped TiAlN layer, and a diamond-like carbon film layer sequentially provided on the surface of the base material.

[0009] The ultrasonic welding head with a wear-resistant composite coating according to an embodiment of the present invention has at least the following beneficial effects: (1) The wear-resistant composite coating of the present invention consists of three parts. The innermost layer is a transition layer composed of co-depositing two metals with relatively large thermal expansion coefficients. The two combinations can obtain a gradual change in thermal expansion coefficient between the two, which helps to significantly reduce the interfacial thermal stress, thereby reducing the risk of coating peeling or cracking. The middle layer is a TiAlN ceramic layer with the strengthening phase ZrO2 introduced. The introduced ZrO2 component will undergo a phase transformation under the induction of external forces such as stress at the crack tip, changing from the tetragonal phase t-ZrO2 to the monoclinic phase m-ZrO2. On the one hand, the phase transformation causes a 4-7% volume expansion of the t-ZrO2 grains, generating a compressive stress field at the crack tip and effectively reducing the stress value at the crack tip. On the other hand, the phase transformation and volume expansion can absorb or consume the energy for crack tip propagation, preventing the crack from continuing to expand, thereby enhancing the anti-fracture performance of the coating. The outermost layer is a self-lubricating layer composed of a diamond-like carbon film. Its chemical inertness and self-lubricating properties can effectively inhibit adhesion, keep the surface of the welding head clean, and thus improve the stability of the solder joint quality. The design of the three-layer composite structure can effectively improve the mechanical strength of the coating.

[0010] (2) The thickness of the wear-resistant composite coating of the ultrasonic welding head with a wear-resistant composite coating of the present invention is about 1-3 mm. The nano-hardness of the coating is 54-89 GPa, H / E (E is the effective Young's modulus) ≥0.1, H 3 / E 2 ≥0.3, the film-substrate bonding force (Rockwell indentation bonding force ≥ HF 2), the fracture toughness KIC ≥ 6 MPa∙m 1 / 2 , and the friction coefficient ≤ 0.4; this wear-resistant composite coating has the characteristics of high strength and toughness integration, and the coating has good uniformity.

[0011] In some embodiments of the present invention, the thickness of the Ti / Al transition layer is 0.1 - 2 mm. This thickness can be adjusted according to actual circumstances. For example, it can be 0.1, 0.2, 0.4, 0.5, 0.8, 1.0, 1.5, or 2 mm.

[0012] In some embodiments of the present invention, the thickness of the ZrO2 - doped TiAlN layer is 0.8 - 3 mm. This thickness can also be adjusted according to actual circumstances. For example, it can be 0.8, 1.0, 1.2, 1.4, 1.6, 1.8, or 2 mm.

[0013] In some embodiments of the present invention, the thickness of the diamond - like carbon film layer is 0.1 - 2 mm. The thickness of the diamond - like carbon film layer can be adjusted according to actual circumstances. For example, it can be 0.1, 0.2, 0.4, 0.5, 0.8, 1.0, 1.5, or 2 mm.

[0014] In a second aspect of the present invention, there is provided a method for preparing an ultrasonic welding head with a wear - resistant composite coating as described in the first aspect of the present invention, which includes the following steps: S1. Degrease and ion - etch the base material to obtain a pretreated base material; S2. Use physical vapor deposition to sequentially deposit the Ti / Al transition layer, the ZrO2 - doped TiAlN layer, and the diamond - like carbon film layer on the surface of the pretreated base material.

[0015] According to the preparation method of the embodiments of the present invention, it has at least the following beneficial effects: This method uses physical vapor deposition (Physical Vapor Deposition, PVD) to prepare a wear - resistant composite coating on the surface of the ultrasonic welding head, which has the advantages of fast deposition rate, simple operation, low cost, and being suitable for mass production.

[0016] In some embodiments of the present invention, the base material includes 304 stainless steel, 316 stainless steel, aluminum alloy, and titanium - aluminum - vanadium alloy.

[0017] In some embodiments of the present invention, the degreasing treatment includes: placing the base material in a solution containing a degreasing cleaner and ultrasonically treating it for 20 - 30 min, then washing it with clean water and drying it.

[0018] The degreasing treatment helps to remove oil stains and other contaminants on the surface of the base material, avoid welding defects such as pores, welding cracks, or insecure solder joints, and helps to improve the welding quality.

[0019] In some embodiments of the present invention, the parameters of the ion etching treatment are set as follows: the air pressure is 0.5 to 2 Pa; and / or, the ion source power is 0.5 to 2 kW. For example, the air pressure can be 0.5, 1, 1.5, or 2 Pa; the ion source power can be 0.5, 1, 1.2, 1.5, 1.8, or 2 W.

[0020] Ion etching treatment is a technique for processing the surface of materials by an ion beam. By bombarding the surface of the substrate with high-energy ions, it can change its surface structure, increase its surface roughness, and thereby improve the adhesion effect of the coating.

[0021] In some embodiments of the present invention, the ions in the ion etching treatment include one or more combinations of argon ions, nitrogen ions, and krypton ions. For example, it can be argon ions.

[0022] Argon (Ar) is an inert gas with extremely low chemical reactivity. It does not chemically react with the substrate etching material itself and only etches through physical impact. This means that argon ions will not introduce additional chemical changes, thus ensuring the purity and structural stability of the substrate material.

[0023] In some embodiments of the present invention, during the deposition process of the Ti / Al transition layer, the chamber air pressure is 0.5 to 2 Pa. For example, the chamber air pressure can be 0.5, 0.8, 1, 1.2, 1.25, 1.5, 1.8, or 2.0 Pa, etc. A suitable chamber air pressure helps to improve the surface flatness of the Ti / Al transition layer, reduce the probability of pores appearing, and avoid the appearance of particles, roughness, or unevenness on the surface of the deposition layer.

[0024] In some embodiments of the present invention, during the deposition process of the Ti / Al transition layer, the flow rate of the inert gas is 60 to 150 sccm. For example, it can be 60, 70, 80, 90, 100, 120, or 150 sccm, etc.

[0025] In some embodiments of the present invention, during the deposition process of the Ti / Al transition layer, the inert gas is selected from any one or more combinations of argon, helium, xenon, krypton, nitrogen, and hydrogen.

[0026] The Ti / Al transition layer prepared within the range of the inert gas flow rate of the present invention has excellent coating adhesion, and this coating adhesion increases with the increase of the inert gas flow rate. This is because a larger inert gas flow rate can increase the plasma density and ion energy, promote the uniform sputtering of target atoms onto the surface of the substrate material, and thus form a dense structure, improving the coating adhesion.

[0027] In some embodiments of the present invention, during the deposition of the Ti / Al transition layer, the sputtering power of the Al target is 30-100 W. For example, the sputtering power of the Al target can be 30, 40, 50, 60, 70, 80, 90 or 100 W, etc.

[0028] In some embodiments of the present invention, during the deposition of the Ti / Al transition layer, the sputtering power of the Ti target is 40-120 W. For example, the sputtering power of the Ti target can be 40, 50, 60, 70, 80, 90, 100, 110 or 120 W, etc.

[0029] In some embodiments of the present invention, during the deposition of the Ti / Al transition layer, the deposition time is 5-40 min. For example, the deposition time can be 5, 10, 15, 20, 30 or 40 min, etc.

[0030] The Ti / Al transition layer prepared by using the sputtering power and deposition time of the present invention has excellent coating adhesion. The Ti / Al transition layer of the present invention is composed of co-deposition of two metals (titanium and aluminum) with relatively large coefficients of thermal expansion. By adjusting its power, the proportion of the two metal contents can be changed, obtaining a gradual change in the coefficient of thermal expansion between the two, significantly reducing the interfacial thermal stress, thereby reducing the risk of coating peeling or cracking. And by controlling the deposition time, the thickness of the Ti / Al transition layer can be adjusted, and its thickness can be adjusted according to actual needs.

[0031] In some embodiments of the present invention, during the deposition of the ZrO2-doped TiAlN layer, the flow rate of the inert gas is set to 5-500 sccm. For example, it can be 5, 10, 15, 20, 40, 50, 60, 70, 80, 90, 100, 120, 150, 200, 300, 400 or 500 sccm, etc.

[0032] In some embodiments of the present invention, during the deposition of the ZrO2-doped TiAlN layer, the inert gas is selected from any one or a combination of argon, helium, xenon, krypton, hydrogen.

[0033] In some embodiments of the present invention, during the deposition of the ZrO2-doped TiAlN layer, the inert gas is nitrogen.

[0034] In some embodiments of the present invention, during the deposition of the ZrO2-doped TiAlN layer, the flow rate of the argon is 10-40 sccm. For example, the flow rate of the argon can be 10, 15, 20, 30 or 40 sccm, etc.

[0035] In some embodiments of the present invention, during the deposition process of the ZrO2-doped TiAlN layer, the flow rate of nitrogen gas is 100 - 200 sccm. For example, it can be 100, 110, 120, 150, 160, 180, or 200 sccm, etc.

[0036] In some embodiments of the present invention, during the deposition process of the ZrO2-doped TiAlN layer, the sputtering power of the Ti target is 40 - 120 W. For example, the sputtering power of the Ti target can be 40, 50, 60, 70, 80, 100, 110, or 120 W, etc.

[0037] In some embodiments of the present invention, during the deposition process of the ZrO2-doped TiAlN layer, the sputtering power of the Al target is 40 - 120 W. For example, the sputtering power of the Al target can be 40, 50, 60, 70, 80, 100, 110, or 120 W, etc.

[0038] In some embodiments of the present invention, during the deposition process of the ZrO2-doped TiAlN layer, the sputtering power of the ZrO2 target is 5 - 40 W. For example, the sputtering power of the ZrO2 target can be 5, 10, 15, 20, 25, 30, 35, or 40 W, etc.

[0039] In some embodiments of the present invention, during the deposition process of the ZrO2-doped TiAlN layer, the deposition time is 30 - 150 min. For example, the deposition time can be 30, 40, 50, 60, 70, 80, 90, 100, 120, 130, or 150 min, etc.

[0040] In some embodiments of the present invention, during the deposition process of the diamond-like carbon thin film layer, the flow rate of the inert gas is 60 - 120 sccm. For example, the inert gas flow rate can be 60, 70, 80, 90, 100, or 120 sccm, etc. In some embodiments of the present invention, during the deposition process of the diamond-like carbon thin film layer, the inert gas is selected from any one or a combination of argon, helium, xenon, krypton, nitrogen, and hydrogen. For example, it can be argon.

[0041] In some embodiments of the present invention, during the deposition process of the diamond-like carbon thin film layer, the sputtering power of the graphite target is 30 - 120 W. For example, it can be 30, 40, 50, 60, 80, 100, or 120 W, etc.

[0042] In some embodiments of the present invention, during the deposition process of the diamond-like carbon thin film layer, the deposition time is 10 - 60 min. For example, the deposition time can be 10, 20, 30, 40, 50, or 60 min, etc.

[0043] The outermost layer of the wear-resistant composite coating of the present invention is a self-lubricating layer composed of diamond-like carbon film. Its chemical inertness and self-lubricating properties can effectively inhibit adhesion, keep the surface of the welding head clean, and contribute to improving the quality stability of the solder joints.

[0044] The third aspect of the present invention provides an application of the ultrasonic welding head with a wear-resistant composite coating as described in the first aspect of the present invention or a preparation method of the ultrasonic welding head with a wear-resistant composite coating as described in the second aspect of the present invention in the preparation of a welding device.

[0045] Other features and advantages of the present invention will be described in the subsequent specification. Description of the Drawings

[0046] The following further describes the present invention in conjunction with the drawings and embodiments, where: Figure 1 It is a schematic structural diagram of an ultrasonic welding head with a wear-resistant composite coating of the present invention.

[0047] Figure 2 It is a schematic diagram of the preparation process of an ultrasonic welding head with a wear-resistant composite coating of the present invention.

[0048] Figure 3 It is a scanning electron microscope observation diagram of the surface of the wear-resistant composite coating prepared by the present invention. Detailed Embodiments

[0049] The following will clearly and completely describe the concept of the present invention and the technical effects generated in conjunction with the embodiments, so as to fully understand the purpose, features, and effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative efforts shall fall within the scope of protection of the present invention.

[0050] The terms "preferably", "more preferably", etc. in the present invention refer to embodiments of the present invention that can provide certain beneficial effects in certain cases. However, in the same or other cases, other embodiments may also be preferred. In addition, the description of one or more preferred embodiments does not imply that other embodiments are not available, nor is it intended to exclude other embodiments from the scope of the present invention.

[0051] When a numerical range is disclosed herein, the above range is considered continuous and includes the minimum and maximum values of the range, as well as each value therebetween. Further, when the range refers to integers, each integer between the minimum and maximum values of the range is included. In addition, when multiple ranges are provided to describe features or characteristics, the ranges may be combined. In other words, unless otherwise specified, all ranges disclosed herein should be understood to include any and all sub-ranges subsumed therein.

[0052] In the description of the present invention, the reference term "and / or" includes all and any combinations of one or more of the related listed items.

[0053] In the description of the present invention, the descriptions with reference to the terms "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0054] For those conditions not specified in the examples, they are carried out according to conventional conditions or conditions recommended by the manufacturer. For those reagents or instruments whose manufacturers are not specified, they are all conventional products that can be obtained by commercial purchase.

[0055] In an embodiment of the present invention, the Ti target, Al target, ZrO2 target, and graphite target are all high-purity targets with a purity greater than 99.99%.

[0056] In an embodiment of the present invention, the purities of the helium and nitrogen used are both greater than 99%.

[0057] The technical solution of the present invention will be better understood by further combining specific embodiments below.

[0058] (I) Influence of the preparation method of the Ti / Al transition layer Example 1 This example provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof.

[0059] 1. Ultrasonic welding head with a wear-resistant composite coating The structural schematic diagram of the ultrasonic welding head with a wear-resistant composite coating in this example is as Figure 1 shown, and includes: An ultrasonic welding head substrate, and a Ti / Al transition layer, a ZrO2-doped TiAlN layer, and a diamond-like carbon film layer attached to the surface of the ultrasonic welding head substrate in sequence.

[0060] Among them, the material of the ultrasonic welding head substrate is 316 stainless steel, and the thicknesses of the Ti / Al transition layer, the ZrO₂-doped TiAlN layer, and the diamond-like carbon film layer are 0.4 mm, 1.2 mm, and 0.4 mm respectively.

[0061] 2. Preparation method of ultrasonic welding head with wear-resistant composite coating The preparation flow chart of the ultrasonic welding head with the wear-resistant composite coating is as Figure 2 shown, and the specific preparation method includes the following contents.

[0062] (1) Pretreatment: The ultrasonic welding head substrate is placed statically in a commercial special degreasing and cleaning agent container for ultrasonic cleaning for 25 min, then cleaned with deionized water for 8 min, and the cleaned ultrasonic welding head substrate is put into an oven and kept warm at 75 °C for standby.

[0063] (2) Ion etching: The substrate processed in step (1) is fixed on the furnace inner turntable through a fixture, and the rotation speed of the turntable is set to 1.25 r / min; when the chamber vacuum degree is higher than 7×10 -2 Pa, heating starts. When the chamber vacuum degree is higher than 5×10 -3 Pa and the furnace inner temperature reaches 300 °C, argon is introduced into the chamber. After the air pressure is stabilized at 1.25 Pa, the bias power supply is turned on to adjust the negative bias voltage to linearly increase from -200 V to -600 V, and the ion source power is 1 kW for 30 min of argon ion etching.

[0064] (3) Preparation of Ti / Al transition layer: After the etching in step (2) is completed, the ion source is turned off. After moving the baffle to block the target, the target is ignited for 1 - 2 min for cleaning the target surface to remove oxides and contaminants on the target surface; the baffle is removed, the argon gas flow rate is 120 sccm, the throttle valve is controlled to keep the chamber air pressure at 1.25 Pa, then the bias voltage is adjusted to 60 V, the power of the Al target is set to 80 W, the power of the Ti target is set to 60 W, and then the target power supplies of the Ti target and the Al target are started simultaneously, and the deposition time is 20 min to obtain the Ti / Al transition layer.

[0065] (4)ZrO₂-doped TiAlN layer preparation: After the transition layer in step (3) is prepared, turn off the power supplies of the two targets, set the argon gas flow rate to 40 sccm, and simultaneously introduce nitrogen gas, controlling the nitrogen gas flow rate to be 200 sccm. Set the target power of the Ti target to 100 W and the target power of the Al target to 100 W. Connect the ZrO2 target to the radio frequency power supply and set the target power to 20 W. Start the three targets simultaneously and deposit for 120 min to obtain a ZrO2-doped TiAlN hard composite layer.

[0066] (5) Preparation of diamond-like carbon film layer: After the hard composite layer in step (4) is prepared, turn off all target power supplies and stop introducing nitrogen gas. Adjust the argon gas flow rate to 90 sccm, set the target power of the graphite target to 80 W, set the bias voltage to -100 V, and set the deposition time to 40 min. Start the target power supply and wait for the deposition to end. (6) Take out the sample: After the coating preparation is completed, take the sample after 75 min to obtain an ultrasonic welding head with a wear-resistant composite coating, and its transmission electron micrograph is as Figure 3 shown.

[0067] Example 2 This example provides an ultrasonic welding head with a wear-resistant composite coating and its preparation method. The difference from Example 1 is only that: during the preparation of the Ti / Al transition layer, the argon gas flow rate is adjusted to 80 sccm, and the remaining steps are the same.

[0068] Example 3 This example provides an ultrasonic welding head with a wear-resistant composite coating and its preparation method. The difference from Example 1 is only that: during the preparation of the Ti / Al transition layer, the argon gas flow rate is adjusted to 90 sccm, and the remaining steps are the same.

[0069] Example 4 This example provides an ultrasonic welding head with a wear-resistant composite coating and its preparation method. The difference from Example 1 is only that: during the preparation of the Ti / Al transition layer, the argon gas flow rate is adjusted to 100 sccm, and the remaining steps are the same.

[0070] Example 5 This example provides an ultrasonic welding head with a wear-resistant composite coating and its preparation method. The difference from Example 1 is only that: during the preparation of the Ti / Al transition layer, the argon gas flow rate is adjusted to 110 sccm, and the remaining steps are the same.

[0071] Example 6 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 1 lies in the preparation of the Ti / Al transition layer, and the remaining steps are the same.

[0072] Among them, the preparation of the Ti / Al transition layer includes: After the etching in step (2) is completed, turn off the ion source. After moving the baffle to block the target, ignite the target for 1 - 2 minutes to clean the surface of the target to remove oxides and contaminants on the target surface; move the baffle away, introduce argon with a flow rate of 80 sccm, control the throttle valve to maintain the chamber pressure at 1.25 Pa, then adjust the bias voltage to 60 V. After setting the power of the Al target to 80 W and the power of the Ti target to 50 W respectively, start the target power supplies of the Ti target and the Al target simultaneously, and the deposition time is 20 minutes to obtain the Ti / Al transition layer.

[0073] Embodiment 7 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 6 is only that: during the preparation of the Ti / Al transition layer, the power of the Ti target is adjusted to 70 W, and the remaining steps are the same.

[0074] Embodiment 8 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 6 is only that: during the preparation of the Ti / Al transition layer, the power of the Ti target is adjusted to 80 W, and the remaining steps are the same.

[0075] Embodiment 9 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 1 lies in the preparation of the Ti / Al transition layer, and the remaining steps are the same.

[0076] Among them, the preparation of the Ti / Al transition layer includes: After the etching in step (2) is completed, turn off the ion source. After moving the baffle to block the target, ignite the target for 1 - 2 minutes to clean the surface of the target to remove oxides and contaminants on the target surface; move the baffle away, introduce argon with a flow rate of 80 sccm, control the throttle valve to maintain the chamber pressure at 1.25 Pa, then adjust the bias voltage to 60 V. After setting the power of the Al target to 60 W and the power of the Ti target to 60 W respectively, start the target power supplies of the Ti target and the Al target simultaneously, and the deposition time is 20 minutes to obtain the Ti / Al transition layer.

[0077] Embodiment 10 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 9 is only that: during the preparation process of the Ti / Al transition layer, the power of the Al target is adjusted to 70 W, and the remaining steps are the same.

[0078] Embodiment 11 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 9 is only that: during the preparation process of the Ti / Al transition layer, the power of the Al target is adjusted to 90 W, and the remaining steps are the same.

[0079] Embodiment 12 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 9 is only that: during the preparation process of the Ti / Al transition layer, the power of the Al target is adjusted to 100 W, and the remaining steps are the same.

[0080] Embodiment 13 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 1 is that the preparation of the Ti / Al transition layer is different, and the remaining steps are the same.

[0081] Among them, the preparation of the Ti / Al transition layer includes: After the etching in step (2) is completed, turn off the ion source. After moving the baffle to block the target, ignite the target for 1 - 2 minutes to clean the surface of the target to remove oxides and contaminants on the target surface; move the baffle away, introduce argon with a flow rate of 80 sccm, control the throttle valve to keep the chamber pressure at 1.25 Pa, then adjust the bias voltage to 60 V. After setting the power of the Al target to 80 W and the power of the Ti target to 60 W respectively, start the target power supplies of the Ti target and the Al target simultaneously, and the deposition time is 5 minutes to obtain the Ti / Al transition layer.

[0082] Embodiment 14 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 13 is only that: during the preparation process of the Ti / Al transition layer, the deposition time is adjusted to 10 minutes, and the remaining steps are the same.

[0083] Embodiment 15 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 13 is only that: during the preparation process of the Ti / Al transition layer, the deposition time is adjusted to 15 minutes, and the remaining steps are the same.

[0084] Embodiment 16 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 13 is only that: during the preparation process of the Ti / Al transition layer, the deposition time is adjusted to 25 min, and the remaining steps are the same.

[0085] Embodiment 17 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 13 is only that: during the preparation process of the Ti / Al transition layer, the deposition time is adjusted to 30 min, and the remaining steps are the same.

[0086] Comparative Example 1 This comparative example provides an ultrasonic welding head with a coating and a preparation method thereof. The difference from Embodiment 1 is only that: there is no Ti / Al transition layer, and the remaining steps are the same.

[0087] Test Example 1 The differences between the above-mentioned Embodiments 2 - 17, Comparative Example 1 and Embodiment 1 lie in the different parameters during the preparation of the Ti / Al transition layer, and all other steps and the materials used are the same. In this test example, the bonding strength of the ultrasonic welding head coatings of the above different embodiments is tested by a Rockwell indentation tester (Rockwell indentation method for the bonding performance test of fine ceramic layers JC / T 2174 - 2013). The parameter settings during the preparation process of the Ti / Al transition layer in each embodiment and the corresponding detection results of the coating bonding performance are shown in Table 1.

[0088] Table 1: Detection results of the influence of the Ti / Al transition layer preparation method on the coating bonding performance

[0089] It can be seen from the above detection results of the coating bonding performance that, compared with Comparative Example 1, the wear-resistant composite coating of the present invention has excellent coating bonding strength. And when the deposition time of the Ti / Al transition layer is only 5 min, the coating bonding strength can still reach 98 N. However, when the Ti / Al transition layer is absent, due to the difference in the thermal expansion coefficients between the substrate and the ZrO₂-doped TiAlN layer, during the deposition process of the ZrO₂-doped TiAlN layer, internal stress may accumulate in the TiAlN layer, and the doping of ZrO₂ makes the grains finer and the hardness greater, resulting in a further increase in the stress of the deposited layer, thus triggering the detachment between the deposited layer and the substrate, which is not conducive to the improvement of the coating bonding strength.

[0090] Compared with Example 1, in Examples 2 - 5, the argon flow rate during the target detection process was adjusted. The results showed that as the argon flow rate increased, the coating adhesion also increased. When the argon flow rate was 120 sccm, the coating adhesion reached 147 N. It is speculated that as the density of argon molecules in the sputtering chamber increased, the sputtering rate was improved, enabling the target to form a dense and stable Ti / Al deposition layer on the substrate surface.

[0091] Compared with Example 1, in Examples 6 - 8, when the argon flow rate was 80 sccm, the influence of different Ti target powers on the coating adhesion was detected. In Examples 9 - 12, the influence of different Al target powers on the coating adhesion was detected. The results showed that as the target power increased, the coating adhesion increased significantly, which is speculated to be related to the coating density and stability.

[0092] Compared with Example 1, in Examples 13 - 17, when the argon flow rate was 80 sccm, the influence of the deposition time on the coating adhesion was detected. The results showed that as the deposition time increased, the coating adhesion increased significantly.

[0093] The above results indicate that adding a Ti / Al transition layer between the ultrasonic welding head substrate and the ZrO2 - doped TiAlN layer helps to improve the coating adhesion. Based on the Ti / Al transition layer of the present invention, which is composed of a co - deposited transition layer of two metals with relatively large coefficients of thermal expansion, the gradient of the coefficient of thermal expansion between the two can be obtained by changing the proportion of metal content or adjusting the target sputtering parameters, thereby significantly reducing the interfacial thermal stress and reducing the risk of coating peeling or cracking.

[0094] (2) Influence of the preparation method of the ZrO2 - doped TiAlN layer Example 18 This example provides an ultrasonic welding head with a wear - resistant composite coating and its preparation method. The difference from Example 1 lies in the different preparation of the ZrO2 - doped TiAlN layer, and the remaining steps are the same.

[0095] Among them, the preparation of the ZrO2 - doped TiAlN layer includes: After the preparation of the transition layer in step (3), turn off the power supplies of the two targets, set the argon flow rate to 10 sccm, and simultaneously introduce nitrogen, control the nitrogen flow rate to 200 sccm, set the target power of the Ti target to 100 W, and the target power of the Al target to 100 W. Connect the ZrO2 target to the radio frequency power supply, and set the target power to 20 W. Start the three targets simultaneously, and the deposition time is 120 min to obtain a ZrO2 - doped TiAlN hard composite layer.

[0096] Example 19 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 18 is only that: during the preparation process of the ZrO2-doped TiAlN layer, the argon gas flow rate is adjusted to 20 sccm, and the remaining steps are the same.

[0097] Embodiment 20 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 18 is only that: during the preparation process of the ZrO2-doped TiAlN layer, the argon gas flow rate is adjusted to 30 sccm, and the remaining steps are the same.

[0098] Embodiment 21 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 18 is only that: during the preparation process of the ZrO2-doped TiAlN layer, the argon gas flow rate is adjusted to 50 sccm, and the remaining steps are the same.

[0099] Embodiment 22 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 1 is that the preparation of the ZrO2-doped TiAlN layer is different, and the remaining steps are the same.

[0100] Among them, the preparation of the ZrO2-doped TiAlN layer includes: After the preparation of the transition layer in step (3) is completed, turn off the power supplies of the two targets, set the argon gas flow rate to 40 sccm, and at the same time introduce nitrogen gas, control the nitrogen gas flow rate to be 100 sccm, set the target power of the Ti target to 100 W, and set the target power of the Al target to 100 W. Connect the ZrO2 target to the radio frequency power supply, and set the target power to 20 W. Start the three targets simultaneously, and the deposition time is 120 min to obtain a ZrO2-doped TiAlN hard composite layer.

[0101] Embodiment 23 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 22 is only that: during the preparation process of the ZrO2-doped TiAlN layer, the nitrogen gas flow rate is adjusted to 110 sccm, and the remaining steps are the same.

[0102] Embodiment 24 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 22 is only that: during the preparation process of the ZrO2-doped TiAlN layer, the nitrogen gas flow rate is adjusted to 120 sccm, and the remaining steps are the same.

[0103] Embodiment 25 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 22 is only that: during the preparation of the ZrO2-doped TiAlN layer, the nitrogen flow rate is adjusted to 140 sccm, and the remaining steps are the same.

[0104] Embodiment 26 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 22 is only that: during the preparation of the ZrO2-doped TiAlN layer, the nitrogen flow rate is adjusted to 160 sccm, and the remaining steps are the same.

[0105] Embodiment 27 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 22 is only that: during the preparation of the ZrO2-doped TiAlN layer, the nitrogen flow rate is adjusted to 180 sccm, and the remaining steps are the same.

[0106] Embodiment 28 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 1 is that the preparation of the ZrO2-doped TiAlN layer is different, and the remaining steps are the same.

[0107] Among them, the preparation of the ZrO2-doped TiAlN layer includes: After the preparation of the transition layer in step (3) is completed, turn off the power supplies of the two targets, set the argon flow rate to 40 sccm, and simultaneously introduce nitrogen. Control the nitrogen flow rate to be 200 sccm, set the target power of the Ti target to 60 W, and set the target power of the Al target to 100 W. Connect the ZrO2 target to the radio frequency power supply, and set the target power to 20 W. Start the three targets simultaneously, and the deposition time is 120 min to obtain a ZrO2-doped TiAlN hard composite layer.

[0108] Embodiment 29 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 28 is only that: during the preparation of the ZrO2-doped TiAlN layer, the target power of the Ti target is adjusted to 70 W, and the remaining steps are the same.

[0109] Embodiment 30 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 28 is only that: during the preparation of the ZrO2-doped TiAlN layer, the target power of the Ti target is adjusted to 80 W, and the remaining steps are the same.

[0110] Embodiment 31 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 28 is only that: during the preparation of the ZrO2-doped TiAlN layer, the target power of the Ti target is adjusted to 90 W, and the remaining steps are the same.

[0111] Embodiment 32 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 1 is that the preparation of the ZrO2-doped TiAlN layer is different, and the remaining steps are the same.

[0112] Among them, the preparation of the ZrO2-doped TiAlN layer includes: After the preparation of the transition layer in step (3) is completed, turn off the power supplies of the two targets, set the argon gas flow rate to 40 sccm, and at the same time introduce nitrogen gas, control the nitrogen gas flow rate to 200 sccm, set the target power of the Ti target to 100 W, and set the target power of the Al target to 60 W. Connect the ZrO2 target to the radio frequency power supply, and set the target power to 20 W. Start the three targets at the same time, and the deposition time is 120 min to obtain a ZrO2-doped TiAlN hard composite layer.

[0113] Embodiment 33 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 32 is only that: during the preparation of the ZrO2-doped TiAlN layer, the target power of the Al target is adjusted to 70 W, and the remaining steps are the same.

[0114] Embodiment 34 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 32 is only that: during the preparation of the ZrO2-doped TiAlN layer, the target power of the Al target is adjusted to 80 W, and the remaining steps are the same.

[0115] Embodiment 35 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 32 is only that: during the preparation of the ZrO2-doped TiAlN layer, the target power of the Al target is adjusted to 90 W, and the remaining steps are the same.

[0116] Embodiment 36 This embodiment provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Embodiment 1 is that the preparation of the ZrO2-doped TiAlN layer is different, and the remaining steps are the same.

[0117] Among them, the preparation of the ZrO2-doped TiAlN layer includes: After the preparation of the transition layer in step (3) is completed, turn off the power supplies of the two targets, set the argon gas flow rate to 40 sccm, and simultaneously introduce nitrogen gas, controlling the nitrogen gas flow rate to 200 sccm. Set the target power of the Ti target to 100 W and the target power of the Al target to 100 W. Connect the ZrO2 target to the radio frequency power supply and set the target power to 10 W. Start the three targets simultaneously, and the deposition time is 120 min to obtain a ZrO2-doped TiAlN hard composite layer.

[0118] Example 37 This example provides an ultrasonic welding head with a wear-resistant composite coating and its preparation method. The difference from Example 36 is only that: during the preparation of the ZrO2-doped TiAlN layer, the target power of the ZrO2 target is adjusted to 30 W, and the other steps are the same.

[0119] Example 38 This example provides an ultrasonic welding head with a wear-resistant composite coating and its preparation method. The difference from Example 1 is that the preparation of the ZrO2-doped TiAlN layer is different, and the other steps are the same.

[0120] Among them, the preparation of the ZrO2-doped TiAlN layer includes: After the preparation of the transition layer in step (3) is completed, turn off the power supplies of the two targets, set the argon gas flow rate to 40 sccm, and simultaneously introduce nitrogen gas, controlling the nitrogen gas flow rate to 200 sccm. Set the target power of the Ti target to 100 W and the target power of the Al target to 100 W. Connect the ZrO2 target to the radio frequency power supply and set the target power to 20 W. Start the three targets simultaneously, and the deposition time is 60 min to obtain a ZrO2-doped TiAlN hard composite layer.

[0121] Example 39 This example provides an ultrasonic welding head with a wear-resistant composite coating and its preparation method. The difference from Example 38 is only that: during the preparation of the ZrO2-doped TiAlN layer, the deposition time is adjusted to 90 min, and the other steps are the same.

[0122] Comparative Example 2 This comparative example provides an ultrasonic welding head with a coating and its preparation method. The difference from Example 1 is only that: the TiAlN layer is not doped with ZrO2, and the other steps are the same.

[0123] Test Example 2: The differences between the above-mentioned Examples 18 - 39, Comparative Example 2 and Example 1 lie in the different parameters during the preparation of the ZrO2-doped TiAlN layer, while all other steps and materials used are the same. In this test example, the wear resistance of the ultrasonic welding head coatings of the above different examples was tested, and the parameters during the preparation process of the ZrO2-doped TiAlN layer in each example and the corresponding test results of the wear resistance of the coatings are shown in Table 2.

[0124] Table 2: Influence results of the preparation method of the ZrO2-doped TiAlN layer on the coating wear rate

[0125] The above test results of the coating wear rate show that, compared with Comparative Example 2, the wear rate of the wear-resistant composite coating of the present invention is significantly reduced. It is speculated that because after introducing the TiAlN ceramic layer containing the strengthening phase ZrO2, due to the external forces such as the stress at the crack tip, the ZrO2 component introduced will undergo a phase transformation, changing from the tetragonal phase t-ZrO2 to the monoclinic phase m-ZrO2. On the one hand, the phase transformation causes a 4 - 7% volume expansion of the t-ZrO2 grains, generating a compressive stress field at the crack tip and effectively reducing the stress value at the crack tip; on the other hand, the phase transformation and volume expansion can absorb or consume the energy for crack tip propagation, preventing the crack from continuing to expand, thereby enhancing the anti-fracture performance of the coating and ultimately significantly reducing the wear rate.

[0126] Compared with Example 1, in Examples 18 - 20, the argon flow rate during the preparation process of the ZrO2-doped TiAlN layer was adjusted, and in Examples 21 - 27, the nitrogen flow rate was adjusted. The results show that as the argon flow rate or the nitrogen flow rate increases, the coating wear rate decreases, which is speculated to be related to the sputtering density and stability of the deposited layer.

[0127] Compared with Example 1, in Examples 28 - 31, the Ti target sputtering power was adjusted, in Examples 32 - 35, the Al target sputtering power was adjusted, in Examples 36 - 37, the ZrO2 radio frequency power was adjusted, and in Examples 38 - 39, the sputtering time was adjusted. The test results show that as the Ti target power, Al target power, and deposition time increase, the coating wear rate decreases, but as the ZrO2 radio frequency power increases, the wear rate first decreases and then increases slightly. It is speculated that a relatively high radio frequency power may heat the surface of ZrO2, resulting in gasification or thermal decomposition on the surface, and then making its surface uneven, forming surface defects, voids, or microcracks, and these defects ultimately lead to a decrease in the overall anti-wear performance of the coating.

[0128] The above results indicate that adding a ZrO2-doped TiAlN layer between the Ti / Al transition layer and the diamond-like carbon film layer helps to improve the anti-wear performance of the coating.

[0129] (III) Influence of the preparation method of the diamond-like carbon film layer Example 40 This example provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Example 1 lies in the different preparation of the diamond-like carbon film layer, and the remaining steps are the same.

[0130] Among them, the preparation of the diamond-like carbon film layer includes: After the hard composite layer is prepared in step (4), turn off all target power supplies and stop introducing nitrogen. Adjust the argon flow rate to 80 sccm, set the target power of the graphite target to 80 W, the bias voltage to -100 V, and the deposition time to 40 min. Start the target power supply and wait for the deposition to end.

[0131] Example 41 This example provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Example 41 is only that: during the preparation of the diamond-like carbon film layer, the argon flow rate is adjusted to 100 min, and the remaining steps are the same.

[0132] Example 42 This example provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Example 1 lies in the different preparation of the diamond-like carbon film layer, and the remaining steps are the same.

[0133] Among them, the preparation of the diamond-like carbon film layer includes: After the hard composite layer is prepared in step (4), turn off all target power supplies and stop introducing nitrogen. Adjust the argon flow rate to 90 sccm, set the target power of the graphite target to 70 W, the bias voltage to -100 V, and the deposition time to 40 min. Start the target power supply and wait for the deposition to end.

[0134] Example 43 This example provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Example 42 is only that: during the preparation of the diamond-like carbon film layer, the target power of the graphite target is adjusted to 90 W, and the remaining steps are the same.

[0135] Example 44 This example provides an ultrasonic welding head with a wear-resistant composite coating and a preparation method thereof. The difference from Example 1 lies in the different preparation of the diamond-like carbon film layer, and the remaining steps are the same.

[0136] Among them, the preparation of the diamond-like carbon film layer includes: After the preparation of the hard composite layer in step (4), turn off all target power supplies and stop introducing nitrogen. Adjust the argon flow rate to 90 sccm, set the target power of the graphite target to 100 W, the bias voltage to -100 V, and the deposition time to 20 min. Start the target power supply and wait for the deposition to end.

[0137] Example 45 This example provides an ultrasonic welding head with a wear-resistant composite coating and its preparation method. The difference from Example 1 lies in the different preparation of the diamond-like carbon film layer, and the remaining steps are the same.

[0138] Among them, the preparation of the diamond-like carbon film layer includes: After the preparation of the hard composite layer in step (4), turn off all target power supplies and stop introducing nitrogen. Adjust the argon flow rate to 90 sccm, set the target power of the graphite target to 80 W, the bias voltage to -100 V, and the deposition time to 30 min. Start the target power supply and wait for the deposition to end.

[0139] Example 46 This example provides an ultrasonic welding head with a wear-resistant composite coating and its preparation method. The difference from Example 45 is only that: during the preparation of the diamond-like carbon film layer, the target power of the graphite target is adjusted to 50 W, and the remaining steps are the same.

[0140] Comparative Example 3 This comparative example provides an ultrasonic welding head with a coating and its preparation method. The difference from Example 1 is only that: there is no diamond-like carbon film layer, and the remaining steps are the same.

[0141] Test Example 3 The differences between the above Examples 40 - 46, Comparative Example 3 and Example 1 lie in the different parameters during the preparation of the diamond-like carbon film layer, and the remaining step parameters are the same. This test example tested the wear resistance of the ultrasonic welding head coatings of the above different examples. The parameter settings during the preparation of the diamond-like carbon film layer in each example and the corresponding detection results of the coating wear resistance are shown in Table 3.

[0142] Table 3: Influence results of the diamond-like carbon film layer preparation method on the coating wear rate

[0143] The above detection results show that, compared with Comparative Example 3, after adding the diamond-like carbon film layer, the anti-wear performance of the composite coating is significantly improved. The outermost layer of the composite coating of the present invention is a self-lubricating layer composed of a diamond-like carbon film. Its chemical inertness and self-lubricating characteristics can effectively inhibit adhesion, keep the surface of the welding head clean, and thus improve the stability of the solder joint quality.

[0144] Furthermore, the parameters in the preparation process of the diamond-like carbon film layer were adjusted, and it was found that the wear rate decreased with the increase of the argon flow rate, the graphite target power, and the deposition time.

[0145] In summary, the present invention provides an ultrasonic welding head with a wear-resistant composite coating, its preparation method and application. The wear-resistant composite coating of the present invention consists of three parts. The innermost layer is a transition layer composed of co-depositing two metals with relatively large thermal expansion coefficients. By changing the proportion of the metal content, a gradual change in the thermal expansion coefficient between the two can be obtained, significantly reducing the interfacial thermal stress, thereby reducing the risk of coating peeling or cracking. The middle layer is a TiAlN layer with the strengthening phase ZrO2 introduced. The introduced ZrO2 component will undergo a phase transformation from the tetragonal phase t-ZrO2 to the monoclinic phase m-ZrO2 under the induction of external forces such as the stress at the crack tip. On the one hand, the phase transformation causes a 4-7% volume expansion of the t-ZrO2 grains, generating a compressive stress field at the crack tip and effectively reducing the stress value at the crack tip. On the other hand, the phase transformation and volume expansion can absorb or consume the energy for crack tip propagation, preventing the crack from continuing to expand, thereby enhancing the anti-fracture performance of the coating. The outermost layer is a self-lubricating layer composed of a diamond-like carbon film. Its chemical inertness and self-lubricating properties can effectively inhibit adhesion and keep the surface of the welding head clean, thereby improving the stability of the solder joint quality. The design of the three-layer composite structure can effectively improve the mechanical strength of the coating.

[0146] In addition, the thickness of the wear-resistant composite coating prepared by the present invention is about 1-3 mm, the nano-hardness of the coating is 54-89 GPa, H / E (E is the effective Young's modulus) ≥ 0.1, H 3 / E 2 ≥ 0.3, the film-substrate bonding force (Rockwell indentation bonding force ≥ HF 2), the fracture toughness KIC ≥ 6 MPa∙m 1 / 2 , and the friction coefficient ≤ 0.4; this wear-resistant composite coating has the characteristics of high strength and toughness integration, and the prepared coating has high uniformity, and the coating process is flexible and adjustable. The ultrasonic welding coating prepared by this method has the advantages of fast deposition rate, simple operation, low cost, and being suitable for mass production.

[0147] The above has made a detailed description of the embodiments of the present invention. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art, various changes can be made without departing from the purpose of the present invention. In addition, without conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

Claims

1. An ultrasonic welding head with a wear-resistant composite coating, characterized in that: include: A base material, and a Ti / Al transition layer, a ZrO2-doped TiAlN layer and a diamond-like carbon film layer sequentially arranged on the surface of the base material.

2. The ultrasonic horn according to claim 1, characterized in that: The thickness of the Ti / Al transition layer is 0.1-2 mm; And / or, the thickness of the ZrO2-doped TiAlN layer is 0.8-3 mm; And / or, the thickness of the diamond-like carbon film layer is 0.1-2 mm.

3. A method for preparing an ultrasonic horn with a wear-resistant composite coating as claimed in claim 1 or 2, characterized in that: The following steps are involved: S1, performing degreasing and ion etching treatments on the substrate material to obtain a pretreated substrate material; S2. Depositing the Ti / Al transition layer, the ZrO2-doped TiAlN layer and the diamond-like carbon film layer in sequence on the surface of the pretreated substrate material by a physical vapor deposition method.

4. The preparation method according to claim 3, characterized in that: The parameters of the ion etching process are set as: gas pressure 0.5-2 Pa; and / or ion source power 0.5-2 kW.

5. The preparation method according to claim 3, characterized in that: During the deposition of the Ti / Al transition layer, the gas pressure in the chamber is 0.5-2 Pa; and / or the flow rate of the inert gas is 60-150 sccm.

6. The preparation method according to claim 5, characterized in that: During the deposition of the Ti / Al transition layer, the sputtering power of the Al target is 30-100 W; and / or the sputtering power of the Ti target is 40-120 W.

7. The preparation method according to claim 3, characterized in that: During the ZrO2-doped TiAlN layer deposition process, the flow rate of the inert gas is set to 5-500 sccm.

8. The preparation method according to claim 7, characterized in that: During the ZrO2-doped TiAlN layer deposition process, the flow rate of nitrogen is 100-200 sccm; and / or, the Ti target sputtering power is 40-120 W; and / or, the Al target sputtering power is 40-120 W; And / or, the sputtering power of the ZrO2 target is 5~40W.

9. The preparation method according to claim 3, characterized in that: During the deposition of the diamond-like carbon thin film layer, the inert gas flow rate is 60-120 sccm; And / or, the graphite target sputtering power is 30~120W.

10. Use of the ultrasonic horn with a wear-resistant composite coating as claimed in claim 1 or 2 or the method for preparing the ultrasonic horn with a wear-resistant composite coating as claimed in any one of claims 3 to 9 in preparing a welding device.

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