Vertical heat treatment equipment and conveying device thereof

Abstract

The invention provides vertical heat treatment equipment and a conveying device thereof, the conveying device comprises a device main body, a transmission belt mechanism and a stop mechanism, the transmission belt mechanism is used for transmission between a driving part and a driven part of the device main body, and the transmission belt mechanism comprises a transmission belt; the stop mechanism comprises a stop part and a matching assembly, the stop part is fixedly connected with the driven piece, and the stop part is provided with a stop structure; the matching assembly comprises a retainer and enables the retainer to be far away from the retaining structure under the support of the transmission belt, and when the transmission belt is broken, the retainer is matched with the retaining structure to stop rotation of the driven part. In the stopping process of the conveying device, a detection device does not need to detect signals, and stopping can be achieved without signal control, so that the reliability of the stopping process is improved, and the cost of the conveying device is reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a vertical heat treatment apparatus and a transport device thereof. Background Art

[0002] The boat lifting system of a vertical furnace is used to transport a quartz boat carrying silicon wafers into a reaction furnace tube for related processes, and after the process is completed, transport the silicon wafers and the quartz boat out of the reaction furnace tube. The Z-axis drive of the boat lifting system mainly consists of a guide rail, a ball screw, and a motor drive mechanism. The motor drive mechanism and the ball screw are connected by a synchronous belt to transmit torque. When the synchronous belt breaks, the connection between the ball screw and the motor drive mechanism is interrupted. Since the ball screw itself does not have a self-locking function, after being disconnected from the motor drive mechanism, the silicon wafers and the quartz boat transported by the lifting system will fall under the action of gravity, resulting in damage to the silicon wafers and the quartz boat, thus causing serious production accidents.

[0003] Therefore, how to improve the reliability of the stopping process is a technical problem that those skilled in the art urgently need to solve. Summary of the Invention

[0004] The present application aims to at least solve one of the technical problems existing in the prior art, and provides a vertical heat treatment apparatus and a transport device thereof, which stop the rotation of the driven member through a mechanical mechanism when the transmission belt breaks, improve the reliability of the stopping process, and reduce the equipment cost.

[0005] To achieve the purpose of the present application, a transport device of a vertical heat treatment apparatus is provided, including a device main body, a transmission belt mechanism, and a stopping mechanism, wherein,

[0006] The transmission belt mechanism is used for the transmission between the driving member and the driven member of the device main body, and the transmission belt mechanism includes a transmission belt;

[0007] The stopping mechanism includes a stopping part and a matching component. The stopping part is fixedly connected to the driven member, and the stopping part has a stopping structure; the matching component includes a stopping member. Under the support of the transmission belt, the matching component moves the stopping member away from the stopping structure. When the transmission belt breaks, the stopping member cooperates with the stopping structure to stop the rotation of the driven member.

[0008] In some embodiments, the matching component further includes a tensioning component, and the tensioning component is used for tensioning the transmission belt and, under the support of the transmission belt, moving the stopping member away from the stopping structure.

[0009] In some embodiments, the tensioning component includes a mounting shaft, a connecting plate, a tensioning wheel, and an elastic member, wherein,

[0010] The connecting plate is rotatably connected to the device body through a mounting shaft; the tensioning wheel is rotatably connected to the connecting plate;

[0011] The elastic member connects the device body and the connecting plate, and is used to drive the tensioning wheel to tension the transmission belt through the connecting plate, and make the connecting plate block between the stopper and the stopping structure; the elastic member is also used to drive the connecting plate away from between the stopper and the stopping portion when the transmission belt breaks.

[0012] In some embodiments, the mounting shaft is connected to the middle of the connecting plate, the tensioning wheel is located at one end of the connecting plate, and one end of the connecting plate away from the tensioning wheel penetrates between the stopper and the stopping portion.

[0013] In some embodiments, the number of the stopping structures is multiple and evenly distributed along a preset circumference, and the center of the preset circumference is located on the axis of the driven member.

[0014] In some embodiments, the device body is connected with a mounting seat, the stopper is a stop pin, the stopping structure is a stop hole, the mounting seat is used to mount the stop pin, and an elastic support member is arranged in the mounting seat for supporting the stop pin to penetrate into the stop hole.

[0015] In some embodiments, the transmission belt mechanism further includes a driven wheel, and the stopping portion is arranged between the driven wheel and the device body.

[0016] In some embodiments, the device body further includes a lifting portion and a frame, the driven member is a lead screw, the lead screw is arranged in the vertical direction, the lifting portion is in threaded cooperation with the lead screw, the frame is used to limit the rotation of the lifting portion, and the lifting portion is used to support the carrier boat and drive the carrier boat to lift and lower.

[0017] In some embodiments, the mounting seat is provided with a mounting hole, an installation cylinder is arranged in the mounting hole, the stopper partially penetrates into the installation cylinder and has a clearance fit with the installation cylinder, and the elastic support member is located between the bottom of the installation cylinder and the stopper.

[0018] In some embodiments, one end of the stopper away from the installation cylinder has a guiding head, and the diameter of the guiding head gradually decreases along the direction away from the installation cylinder.

[0019] This application also provides a vertical heat treatment device, including a device body and any one of the above-mentioned conveying devices,

[0020] The conveying device includes a follower and a lifting part that cooperates with the follower. The follower is used to drive the lifting part to move up and down, so as to feed the wafer into the equipment body or transport the wafer out of the equipment body. The stopping structure is used to stop the rotation of the follower when the transmission belt breaks, so as to prevent the lifting part from falling.

[0021] The present application has the following beneficial effects:

[0022] The conveying device of the vertical heat treatment equipment provided by the present application includes a device main body, a transmission belt mechanism, and a stopping mechanism. Among them, the transmission belt mechanism is used for the transmission between the driving part and the follower of the device main body. The transmission belt mechanism includes a transmission belt; the stopping mechanism includes a stopping part and a matching component. The stopping part is fixedly connected to the follower, and the stopping part has a stopping structure; the matching component includes a stopper. Under the support of the transmission belt, the stopper is kept away from the stopping structure. When the transmission belt breaks, the stopper cooperates with the stopping structure to stop the rotation of the follower.

[0023] The conveying device supports the matching component through the transmission belt, keeps the stopper away from the stopping structure, and determines whether the belt breaks through the supporting force. After the transmission belt breaks, the supporting force disappears, and the stopper approaches and cooperates with the stopping structure to stop the rotation of the follower. The stopping process of the conveying device does not require a detection device to detect signals, nor does it need to be stopped through signal control, thus improving the reliability of the stopping process and reducing the cost of the conveying device.

[0024] The present application also provides a vertical heat treatment equipment including the above-mentioned conveying device, and has the above-mentioned advantages. Description of the Drawings

[0025] Figure 1 is the conveying device provided by a specific embodiment of the present application;

[0026] Figure 2 is Figure 1 the bottom view of the conveying device when the transmission belt is not broken in

[0027] Figure 3 is Figure 1 the structural schematic diagram of the conveying device when the transmission belt is not broken in

[0028] Figure 4 is Figure 3 the enlarged view of part A in

[0029] Figure 5 is Figure 1 the bottom view of the conveying device when the transmission belt is broken in

[0030] Figure 6 is Figure 1 the structural schematic diagram of the conveying device when the transmission belt is broken in

[0031] Figure 7 is Figure 6 an enlarged view of part B in

[0032] Figure 8 is Figure 2 a schematic structural view of the tensioning assembly in

[0033] Figure 9 a schematic structural view of the stop disk and the driven wheel;

[0034] Figure 10 is a schematic structural view of the vertical heat treatment equipment provided by a specific embodiment.

[0035] Among them, Figures 1 to 10 the reference numerals in

[0036] 100, frame; 101, mounting plate; 200, lead screw; 300, drive motor; 400, belt drive mechanism; 401, belt; 402, driving wheel; 403, driven wheel; 500, stop mechanism; 510, stop disk; 511, stop hole; 520, tensioning assembly; 521, connecting plate; 522, tensioning wheel; 523, mounting shaft; 524, connecting portion; 525, tensioning spring; 530, stop assembly; 531, mounting seat; 532, mounting cylinder; 533, stop pin; 600, lifting portion; 601, support plate; 700, guide rail; 800, carrier boat; 900, vertical reaction furnace. Specific Embodiment

[0037] To enable those skilled in the art to better understand the technical solution of the present application, the vertical heat treatment equipment and its conveying device provided by the present application will be described in detail below with reference to the accompanying drawings.

[0038] In the related art, an optoelectronic switch is used to detect whether the synchronous belt is broken. If the synchronous belt is broken, the brake is controlled to hold the ball screw tightly, thereby preventing the silicon wafer and the quartz boat from falling. However, if the optoelectronic switch malfunctions, it may lead to misjudgment or the failure of the anti-drop function, affecting the reliability of the equipment.

[0039] The conveying device of the vertical heat treatment equipment provided by the present application, as shown in Figure 1As shown in the figure, it includes a device body, a belt drive mechanism 400, and a stopping mechanism 500. Among them, the device body includes a driving member and a driven member. The driving member is drivingly connected to the driven member through the belt drive mechanism 400, thereby driving the driven member to rotate. The belt drive mechanism 400 may include a belt 401, a driving pulley 402, and a driven pulley 403. The driving pulley 402 is connected to the driving member, the driven pulley 403 is connected to the driven member, and the belt 401 surrounds the outer circumferences of the driving pulley 402 and the driven pulley 403, rotates with the driving pulley 402, and drives the driven pulley 403 to rotate, realizing the transmission from the driving member to the driven member. During the transmission process, the belt 401 always remains in a tensioned state and has a certain tension, enabling the belt 401 to support other components. If the belt 401 breaks, the belt 401 loses the ability to support other components. Optionally, the driving member may be a driving motor 300, and the driven member may be a lead screw 200. Of course, the driving member and the driven member may also be other structures, which are not limited herein.

[0040] The stopping mechanism 500 includes a stopping portion and a matching component. Among them, the stopping portion is fixedly connected to the lead screw 200 and rotates with the lead screw 200. The stopping portion has a stopping structure. The matching component includes a stopping member. Under the support of the belt 401, the matching component moves the stopping member away from the stopping structure. If the belt 401 breaks and the supporting force disappears, the stopping member moves towards the stopping structure and finally cooperates with the stopping structure to stop the rotation of the stopping portion, thereby stopping the rotation of the lead screw 200.

[0041] In this embodiment, the conveying device supports the matching component through the belt 401 to move it away from the stopping structure. After the belt 401 breaks, the stopping member moves towards the stopping structure and cooperates with the stopping structure to stop the rotation of the lead screw 200. The stopping of the lead screw 200 is achieved through a mechanical structure, eliminating the need to set up an optoelectronic switch, reducing the equipment cost, and not requiring the control of the stopping process through detection signals, avoiding situations such as misjudgment or stopping failure caused by abnormal signals, and improving the reliability of the conveying device.

[0042] Optionally, the belt 401 may be a synchronous belt. The synchronous belt, the driving pulley 402, and the driven pulley 403 all have transmission teeth, which can improve the transmission efficiency of the synchronous belt mechanism.

[0043] In some embodiments, the matching component further includes a tensioning component 520. The tensioning component 520 is connected to the device body and is used to tension the belt 401. At the same time, the belt 401 acts on the tensioning component 520. Under the support of the belt 401, the tensioning component 520 moves the stopping member away from the stopping structure

[0044] Optionally, the stopper may be a stopper pin 533, and the stopping structure is a stopping hole 511 provided on the stopping portion. The device body further includes a frame 100. The stopper pin 533 is movably connected to the frame 100 and can penetrate into the stopping hole 511 when the transmission belt 401 breaks to stop the rotation of the lead screw 200. The tensioning assembly 520 is used to block the stopper pin 533 from penetrating into the stopping hole 511 when the transmission belt 401 is not broken. Of course, the stopping structure may also adopt other structures, such as stopping teeth. The cooperating assembly can penetrate into the gap between the stopping teeth and abut against the stopping teeth to achieve the stopping of the lead screw 200. The specific structure can refer to a ratchet. The cooperation between the stopper pin 533 and the stopping hole 511 to complete the stopping has higher stopping reliability. The structural strength around the stopping hole 511 is relatively high. As long as the stopper pin 533 penetrates into the stopping hole 511, the stopping can be completed, and there is no risk of tooth breakage or tooth detachment.

[0045] Optionally, the cooperating assembly further includes a stopping assembly 530. The stopping assembly 530 includes an elastic support member and a stopper pin 533. The elastic support member is used to provide an elastic thrust to the stopper pin 533. When the transmission belt 401 breaks, the elastic thrust can push the stopper pin 533 into the stopping hole 511 to stop the rotation of the lead screw 200. The stopping assembly 530 can reduce the risk of the stopper pin 533 getting stuck by pushing the stopper pin 533 through the elastic support member, improve the success rate of the stopper pin 533 penetrating into the stopping hole 511, and thus improve the reliability of the stopping process. If the stopping portion is located below the stopper pin 533, the stopper pin 533 can also penetrate into the stopping hole 511 by the action of gravity. At this time, only the stopper pin 533 needs to be installed in the frame 100.

[0046] As Figures 2 to 4 shown, the tensioning assembly 520 can tension the transmission belt 401. At the same time, the transmission belt 401 provides a supporting force to the tensioning assembly 520, so that part of the tensioning assembly 520 penetrates between the stopper pin 533 and the stopping portion to block the stopper pin 533 from penetrating into the stopping hole 511. As Figures 5 to 7 shown, after the transmission belt 401 breaks, the supporting force disappears, and the position of the tensioning assembly 520 changes and moves away from between the stopper pin 533 and the stopping portion. Therefore, the stopper pin 533 can penetrate into the stopping hole 511 to complete the stopping process.

[0047] Optionally, as Figure 2 and Figure 8As shown, the tensioning assembly 520 includes a mounting shaft 523, a connecting plate 521, a tensioning wheel 522, and an elastic member. Among them, the connecting plate 521 is provided with a connecting portion 524, a connecting hole (not shown in the figure), and a rotating shaft. The mounting shaft 523 is fixedly connected to the frame 100, and the mounting shaft 523 passes through the connecting hole to realize the rotatable connection between the connecting plate 521 and the frame 100. The tensioning wheel 522 is sleeved on the outer periphery of the mounting shaft 523 and is rotatably connected to the connecting plate 521. The frame 100 is provided with a connecting seat. One end of the elastic member is connected to the connecting seat, and the other end is connected to the connecting portion 524, thereby connecting the frame 100 and the connecting plate 521. Figure 2 In the specific embodiment shown, the elastic member is a tension spring 525. Users can also select other structures as the elastic member according to needs, such as rubber belts, etc., which are not limited herein.

[0048] The tension spring 525 undergoes elastic deformation and applies a first torque to the connecting plate 521, causing the connecting plate 521 to rotate around the mounting shaft 523. As a result, the tensioning wheel 522 is in contact with the transmission belt 401 and tensions the transmission belt 401. The transmission belt 401 applies a second torque to the connecting plate 521 through the tensioning wheel 522. The direction of the second torque is opposite to that of the first torque and they are balanced with each other. At this time, a part of the connecting plate 521 is located between the stop pin 533 and the stop portion and can block the stop pin 533. When the transmission belt 401 breaks, the second torque disappears, and the connecting plate 521 moves away from between the stop pin 533 and the stop portion under the drive of the first torque.

[0049] Optionally, the mounting shaft 523 is connected to the middle of the connecting plate 521. The tensioning wheel 522 is located at one end of the connecting plate 521. One end of the connecting plate 521 away from the tensioning wheel 522 penetrates between the stop pin 533 and the stop portion. As Figure 8 shown, the connecting plate 521 is strip-shaped. The tensioning wheel 522 and the part penetrating between the stop pin 533 and the stop portion are respectively located at both ends of the tensioning wheel 522, which can prevent interference between the transmission belt 401 and the stop pin 533 and improve the flexibility of the layout of each component. Moreover, it can reduce the required size of the connecting plate 521 and the space volume occupied by the conveying device. Of course, users can also arrange the positions of the tensioning wheel 522, the stop pin 533, and the mounting shaft 523 in other ways. For example, the mounting shaft 523 can be connected to one end of the connecting plate 521, and the middle of the connecting plate 521 is used to block the stop pin 533, which is not limited herein.

[0050] Optionally, the stop assembly 530 further includes a mounting seat 531. The mounting seat 531 is connected to the frame 100, and the mounting seat 531 is used to mount the stop pin 533 and the elastic support member. As Figure 2 and Figure 3As shown, the mounting seat 531 can be L-shaped. One side of it serves as a connecting arm and is connected to the frame 100, while the other side forms a suspension arm that is suspended on the side of the stopping portion away from the frame 100. The stop pin 533 is connected to the suspension arm and corresponds to the position of the stop hole 511 of the stopping portion. The elastic support member is located on the side of the stop pin 533 away from the stopping portion and provides an elastic thrust to the stop pin 533 to make it penetrate into the stop hole 511. The elastic support member can be a support spring, a rubber block, a silica gel block, etc. The structure of the mounting seat 531 can also be set according to the needs of users and is not limited here. Optionally, the mounting seat 531 is provided with a mounting hole. The mounting hole can be located on the suspension arm of the mounting seat 531, and the position of the mounting hole corresponds to that of the stop hole 511. An installation cylinder 532 is provided in the mounting hole. The stop pin 533 partially penetrates into the installation cylinder 532 and is in clearance fit with the installation cylinder 532. The elastic support member is located between the bottom of the installation cylinder 532 and the stop pin 533. The elastic support member exerts an elastic thrust on the stop pin 533 towards the stopping portion to enable it to penetrate into the stop hole 511. The stopping assembly 530 pushes the stop pin 533 to penetrate into the stop hole 511 through the elastic support member. Compared with gravity, this thrust is greater and is not limited by the relative position of the stop pin 533 and the stopping portion. This not only improves the flexibility of the position setting of the stop pin 533 but also reduces the risk of stopping failure and improves the reliability of the equipment.

[0051] In some embodiments, the number of the stop holes 511 is multiple and they are evenly distributed along a preset circumference. The center of the preset circumference is located on the axis of the lead screw 200. As Figure 5 and Figure 9 shown, when the stop pin 533 penetrates into any one of the stop holes 511, the stopping can be completed. During normal operation, the stop hole 511 rotates around the axis of the lead screw 200, while the position of the stop pin 533 is fixed. During the stopping process, it is necessary to wait for the stop hole 511 to rotate to a position corresponding to the stop pin 533 to complete the stopping operation. The farther the distance between the stop hole 511 and the stop pin 533 is, the longer the lag time of the stopping process is. Increasing the number of the stop holes 511 can effectively shorten the average lag time and improve the stopping efficiency. Of course, the number of the stop holes 511 cannot be increased indefinitely. The user also needs to ensure the structural strength around the stop hole 511 and the structural strength of the stop pin 533 to avoid damage to the stopping portion or the stop pin 533, resulting in stopping failure.

[0052] Optionally, the stop hole 511 can be arranged close to the edge of the stopping portion to increase the distance between the stop hole 511 and the axis of the lead screw 200. After the transmission belt 401 breaks, the lead screw 200 rotates under the action of inertia, and its inertial torque can be approximately regarded as a fixed value. The greater the distance between the stop hole 511 and the axis of the lead screw, the smaller the force required for stopping, thereby reducing the requirements for the structural strength of the stopping portion and the stop pin 533.

[0053] In some embodiments, the stopping portion is disposed between the driven wheel 403 and the frame 100. As Figure 3 and Figure 9 shown, the stopping portion may specifically be a stopping disk 510, which is disk-shaped and coaxially disposed with the driven wheel 403. The diameter of the stopping disk 510 is larger than that of the driven wheel 403, and the stopping holes 511 are distributed at the edge of the stopping disk 510. The stopping disk 510 disposed between the driven wheel 403 and the frame 100 can reduce the extra space it occupies, thereby reducing the volume of the conveying device. Of course, the user can also set the position of the stopping disk 510 as needed, which is not limited herein.

[0054] Optionally, the stopping disk 510 and the driven wheel 403 may be of an integrally formed structure. The integral formation of the two can improve the structural strength, and the two can share a set of connecting parts, while also reducing the installation steps and improving the installation efficiency. Of course, the user can also set the stopping disk 510 and the driven wheel 403 to be of a split structure, which is not limited herein.

[0055] In some embodiments, one end of the stopping pin 533 away from the mounting cylinder 532 has a guiding head, and the diameter of the guiding head gradually decreases along the direction away from the mounting cylinder 532. As Figure 7 shown, the guiding head is hemispherical. The guiding head can reduce the difficulty of the stopping pin 533 penetrating into the stopping hole 511. Even if there is a certain deviation between the position of the stopping hole 511 and the stopping pin 533, the stopping pin 533 can still penetrate into the stopping hole 511, reducing the possibility of stopping failure, enabling the stopping pin 533 to penetrate into the stopping hole 511 faster, and improving the stopping efficiency. In addition, the hemispherical guiding head has a relatively high structural strength, which can reduce the risk of damage to the guiding head during the stopping process. Of course, the user can also adopt guiding heads with other structures as needed, such as conical shapes, etc., which are not limited herein.

[0056] In some embodiments, the conveying device drives the carrier boat 800 to lift, sends the carrier boat 800 into the vertical reaction furnace 900, or transports the carrier boat 800 out of the vertical reaction furnace 900. Therefore, the lead screw 200 is disposed in the vertical direction. The conveying device further includes a lifting portion 600. The lifting portion 600 is in threaded cooperation with the lead screw 200. The frame 100 is used to limit the rotation of the lifting portion 600, and the lifting portion 600 is used to support the carrier boat 800 and drive the carrier boat 800 to lift. As Figure 10As shown, the lifting part 600 has a support plate 601, and the carrier boat 800 can be placed on the support plate 601. The driving member can be a driving motor 300. The driving motor 300 drives the lead screw 200 to rotate through the belt 401 assembly, and then drives the lifting part 600 to lift and lower, completing the transportation of the carrier boat 800. The frame 100 of the transportation device has a guide rail 700 arranged parallel to the lead screw 200. The lifting part 600 is provided with a guide hole, and the guide rail 700 is in clearance fit with the guide rail 700. The guide rail 700 plays a limiting role during the movement of the lifting part 600 to prevent the lifting part 600 from rotating. Of course, the user can also use other methods to limit the rotation of the lifting part 600, which is not limited here.

[0057] Optionally, the lower part of the frame 100 has a mounting plate 101, and the driving member, the belt mechanism 400, and the stopping mechanism 500 are all arranged on the lower surface of the mounting plate 101. As Figure 1 shown, the driving motor 300, the belt mechanism 400, and the stopping mechanism 500 are arranged on the lower surface of the mounting plate 101, reducing the height of each component, facilitating maintenance and use. Moreover, the centralized arrangement of each component can further reduce the difficulty of maintenance and use. Of course, the user can also set the positions of each component according to needs, which is not limited here.

[0058] This application also provides a vertical heat treatment device, including a device body and the transportation device in any one of the above embodiments. The transportation device includes a driven member and a lifting part. The transportation device includes a driven member and a lifting part cooperating with the driven member. The driven member is used to drive the lifting part to lift and lower to send the wafer into the device body or transport the wafer out of the device body. The stopping structure is used to stop the rotation of the driven member when the belt breaks, preventing the lifting part from falling under the action of gravity, and further preventing the wafer from being damaged due to falling, improving the safety and reliability of the vertical heat treatment device.

[0059] Optionally, in Figure 10 the specific embodiment shown, the device body is a vertical reaction furnace 900, and the transportation device is located below the vertical reaction furnace 900, used to send the wafer into the vertical reaction furnace 900 or transport the wafer out of the vertical reaction furnace 900. Of course, the device body is not limited to the vertical reaction furnace 900.

[0060] It can be understood that the above embodiments are merely exemplary embodiments adopted to illustrate the principle of this application. However, this application is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of this application, and these modifications and improvements are also regarded as the protection scope of this application.

Claims

1. A transporting device for a vertical heat treatment equipment, characterized in that, It includes a device main body, a belt drive mechanism and a stop mechanism. Among them, the belt drive mechanism is used for transmission between the driving part and the driven part of the device main body, and the belt drive mechanism includes a transmission belt; the stop mechanism includes a stop part and a matching component. The stop part is fixedly connected to the driven part, and the stop part has a stop structure; the matching component includes a stop piece. Under the support of the transmission belt, the stop piece is separated from the stop structure; when the transmission belt breaks, the stop piece cooperates with the stop structure to stop the rotation of the driven part.

2. The transporting device according to claim 1, characterized in that, The matching component further includes a tensioning component. Among them, the tensioning component is used to tension the transmission belt, and under the support of the transmission belt, the stop piece is separated from the stop structure.

3. The transporting device according to claim 2, characterized in that, The tensioning component includes a mounting shaft, a connecting plate, a tensioning wheel and an elastic member. Among them, the connecting plate is rotatably connected to the device main body through the mounting shaft; the tensioning wheel is rotatably connected to the connecting plate; the elastic member connects the device main body and the connecting plate, and is used to drive the tensioning wheel to tension the transmission belt through the connecting plate, and make the connecting plate block between the stop piece and the stop structure; the elastic member is also used to drive the connecting plate away from between the stop piece and the stop part when the transmission belt breaks.

4. The transporting device according to claim 3, characterized in that, The mounting shaft is connected to the middle of the connecting plate, the tensioning wheel is located at one end of the connecting plate, and the end of the connecting plate away from the tensioning wheel penetrates between the stop piece and the stop part.

5. The transporting device according to claim 2, characterized in that, The number of the stop structures is multiple and evenly distributed along a preset circumference, and the center of the preset circumference is located on the axis of the driven part.

6. The transporting device according to any one of claims 2 to 5, characterized in that, The device main body is connected with a mounting seat. The stop piece is a stop pin, and the stop structure is a stop hole. The mounting seat is used to mount the stop pin, and an elastic support member is arranged in the mounting seat to support the stop pin to penetrate into the stop hole.

7. The transporting device according to any one of claims 1 to 5, characterized in that, The belt drive mechanism further includes a driven wheel, and the stop part is arranged between the driven wheel and the device main body.

8. The transporting device according to any one of claims 1 to 5, characterized in that, The device main body further includes a lifting part and a frame. The driven part is a lead screw, the lead screw is arranged in the vertical direction, the lifting part is in threaded cooperation with the lead screw, the frame is used to limit the rotation of the lifting part, and the lifting part is used to support the carrier and drive the carrier to lift.

9. The transporting device according to claim 6, characterized in that, The mounting seat is provided with a mounting hole, and a mounting cylinder is arranged in the mounting hole. The stop piece partially penetrates into the mounting cylinder and has a clearance fit with the mounting cylinder. The elastic support member is located between the bottom of the mounting cylinder and the stop piece.

10. The transporting device according to claim 9, characterized in that, One end of the stop piece away from the mounting cylinder has a guiding head, and the diameter of the guiding head gradually decreases along the direction away from the mounting cylinder.

11. A vertical heat treatment equipment, characterized in that, It includes an equipment body and the conveying device according to any one of claims 1 to 10. The conveying device includes a follower and a lifting part that cooperates with the follower. The follower is used to drive the lifting part to move up and down, so as to feed the wafer into the device body or transport the wafer out of the device body. The stopping structure is used to stop the rotation of the follower when the transmission belt breaks, so as to prevent the lifting part from falling.

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