Microobjective

Abstract

A diaphragm M, a meniscus negative lens A, a biconvex positive lens B, a meniscus negative lens C, a meniscus negative lens D, a biconvex positive lens E, a plano-convex positive lens F and a plano-convex positive lens G are sequentially arranged from emergent parallel light to an observed object plane, and finally the parallel light is converged to an image plane through a diaphragm H. The laser has the following indexes: the laser focusing wavelength is 355nm; the incident light beam is phi 15mm and 355nm; the focusing spot diameter RMS is less than 0.5 mu m; the imaging wavelength is 370 nm; the entrance pupil diameter is phi 32mm at 369nm; the resolution ratio RMS is less than 0.5 [mu] m; the resolution ratio is 2um at 355 nm, and the resolution ratio is 0.5 um at 369 nm; the field range is greater than or equal to phi 0.8 mm; the system transmittance is gt; 90%; the magnification of the microscope objective lens (250mm tube lens) is 4X-6X; the device has the characteristics of ultraviolet dual wavelength, high resolution, high transmittance, compact structure and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of optical lenses, and particularly to a microscope objective lens. Background Art

[0002] For some materials science research conducted in a vacuum, it is necessary to use a microscope system to monitor the physical and chemical properties of the material surface in real time. For example, using chemical vapor deposition (CVD) to prepare thin film materials or molecular beam epitaxy (MBE) to grow semiconductor materials. Usually, there is an observation window on the vacuum chamber, and the microscope system collects the spectrum of the material through the observation window to monitor the physical and chemical properties of the material. This requires the observed microscope objective lens to have a long working distance and a wide operating wavelength. Currently, there is a lack of a microscope objective lens with a long working distance, a wide operating wavelength, and good observation effects. Summary of the Invention

[0003] The present invention provides a microscope objective lens, which solves the defect that there is a lack of a microscope objective lens with a long working distance, a wide operating wavelength, and good observation effects in the prior art.

[0004] The technical solution of the present invention is realized as follows:

[0005] A microscope objective lens is provided, which successively includes a diaphragm M, a meniscus negative lens A, a biconvex positive lens B, a meniscus negative lens C, a meniscus negative lens D, a biconvex positive lens E, a plano-convex positive lens F, and a plano-convex positive lens G from the outgoing parallel light to the observed object surface, and finally converges to the image plane through a window plate H.

[0006] Preferably, the meniscus negative lens A, the biconvex positive lens B, the meniscus negative lens C, the meniscus negative lens D, the biconvex positive lens E, the plano-convex positive lens F, and the plano-convex positive lens G all adopt i-line glass, such as H-QK30GTi and F4GTi, and the material of the window plate H is F-SILICA.

[0007] Preferably, the focal length f and the total length L of the microscope objective lens satisfy: f / L ≥ 0.3.

[0008] Preferably, the focal length f and the working distance S of the microscope objective lens satisfy: f / S ≤ 1.5.

[0009] Preferably, the focal length f A of the meniscus negative lens A and the focal length f of the microscope objective lens satisfy: 2 ≤ |f A / f| ≤ 3.

[0010] Preferably, the focal length f B of the meniscus negative lens B and the focal length f of the microscope objective lens satisfy: 1 ≤ |f B / f| ≤ 2.

[0011] Preferably, the focal length f of the meniscus negative lens C C and the focal length f of the microscope objective lens satisfy: 2 ≤ |f C / f| ≤ 3.

[0012] Preferably, the focal length f of the meniscus negative lens D D and the focal length f of the microscope objective lens satisfy: 10 ≤ |f D / f| ≤ 15.

[0013] Preferably, the focal length f of the meniscus negative lens E E and the focal length f of the microscope objective lens satisfy: 2 ≤ |f E / f| ≤ 3.

[0014] Preferably, the focal length f of the meniscus negative lens F F and the focal length f of the microscope objective lens satisfy: 2 ≤ |f F / f| ≤ 3.

[0015] Preferably, the focal length f of the meniscus negative lens G G and the focal length f of the microscope objective lens satisfy: 2 ≤ |f G / f| ≤ 3.

[0016] The microscope objective lens of the present invention can achieve the following beneficial effects:

[0017] Laser focusing wavelength: 355 nm;

[0018] Incident light beam: Φ15 mm @ 355 nm;

[0019] Focusing spot diameter: RMS less than 0.5 um;

[0020] Imaging wavelength: 370 nm;

[0021] Entrance pupil diameter: Φ32 mm @ 369 nm;

[0022] Resolution: RMS less than 0.5 um;

[0023] Resolution: 2 um @ 355 nm, 0.5 um @ 369 nm;

[0024] Field of view range: ≥ Φ0.8 mm;

[0025] System transmittance: > 90%;

[0026] Magnification of the microscope objective lens (250 mm tube lens): 4X to 6X;

[0027] The microscopic objective lens of the present invention can simultaneously image ultraviolet light at 355 nm and 370 nm. Compared with the existing technologies, the microscopic objective lens with a large numerical aperture of the present invention has the characteristics of ultraviolet dual wavelengths, high resolution, high transmittance, and compact structure, and can be applied to the research of materials science. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0029] Figure 1 It is a schematic structural diagram of a microscopic objective lens of the present invention;

[0030] Figure 2 It is a diagram showing the change of the RMS of the light spot at 355 nm wavelength with the field of view in Example 1;

[0031] Figure 3 It is a diagram showing the change of the RMS of the light spot at 369 nm wavelength with the field of view in Example 1;

[0032] Figure 4 It is a diagram showing the change of the RMS of the light spot at 355 nm wavelength with the field of view in Example 2;

[0033] Figure 5 It is a diagram showing the change of the RMS of the light spot at 369 nm wavelength with the field of view in Example 2;

[0034] Figure 6 It is a diagram showing the change of the RMS of the light spot at 355 nm wavelength with the field of view in Example 3;

[0035] Figure 7 It is a diagram showing the change of the RMS of the light spot at 369 nm wavelength with the field of view in Example 3.

[0036] In the figure: 1 - meniscus negative lens A, 2 - biconvex positive lens B, 3 - meniscus negative lens C, 4 - meniscus negative lens D, 5 - biconvex positive lens E, 6 - plano-convex positive lens F, 7 - plano-convex positive lens G, 8 - window sheet H, 9 - diaphragm M. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0038] Refer to Figure 1 There is a microscope objective lens, which is successively provided with a diaphragm M9, a meniscus negative lens A1, a biconvex positive lens B2, a meniscus negative lens C3, a meniscus negative lens D4, a biconvex positive lens E5, a plano-convex positive lens F6 and a plano-convex positive lens G7 from the outgoing parallel light to the observed object surface, and finally converges to the image surface through the window plate H8.

[0039] Preferably, all glasses except the window plate H8 are made of i-line glass, such as H-QK30GTi or F4GTi, and the material of the window plate H8 is F-SILICA.

[0040] Preferably, the focal length f and the total length L of the microscope objective lens satisfy: f / L≥0.3.

[0041] Preferably, the focal length f and the working distance S of the microscope objective lens satisfy: f / S≤1.5.

[0042] Preferably, the focal length f A of the meniscus negative lens A1 and the focal length f of the microscope objective lens satisfy: 2≤|f A / f|≤3.

[0043] Preferably, the focal length f B of the meniscus negative lens B2 and the focal length f of the microscope objective lens satisfy: 1≤|f B / f|≤2.

[0044] Preferably, the focal length f C of the meniscus negative lens C3 and the focal length f of the microscope objective lens satisfy: 2≤|f C / f|≤3.

[0045] Preferably, the focal length f D of the meniscus negative lens D4 and the focal length f of the microscope objective lens satisfy: 10≤|f D / f|≤15.

[0046] Preferably, the focal length f E of the meniscus negative lens E5 and the focal length f of the microscope objective lens satisfy: 2≤|f E / f|≤3.

[0047] Preferably, the focal length f F of the meniscus negative lens F6 and the focal length f of the microscope objective lens satisfy: 2≤|f F / f|≤3.

[0048] Preferably, the focal length f G of the meniscus negative lens G7 and the focal length f of the microscope objective lens satisfy: 2≤|f G / f|≤3.

[0049] The microscopic objective lens of the present invention can achieve the following beneficial effects:

[0050] Laser focusing wavelength: 355 nm;

[0051] Incident light beam: Φ15 mm @ 355 nm;

[0052] Focused spot diameter: RMS less than 0.5 μm;

[0053] Imaging wavelength: 370 nm;

[0054] Entrance pupil diameter: Φ32 mm @ 369 nm;

[0055] Resolution: RMS less than 0.5 μm;

[0056] Resolution: 2 μm @ 355 nm, 0.5 μm @ 369 nm;

[0057] Field of view range: ≥ Φ0.8 mm;

[0058] System transmittance: > 90%;

[0059] Magnification of the microscopic objective lens (250 mm tube lens): 4X to 6X;

[0060] The microscopic objective lens of the present invention can image ultraviolet light at 355 nm and 370 nm simultaneously. Compared with the existing technologies, the microscopic objective lens with a large numerical aperture of the present invention has the characteristics of ultraviolet double wavelength, high resolution, high transmittance, and compact structure, and can be applied to the research of materials science.

[0061] Embodiment 1

[0062] A microscopic objective lens is provided with a diaphragm M9, a meniscus negative lens A1, a biconvex positive lens B2, a meniscus negative lens C3, a meniscus negative lens D4, a biconvex positive lens E5, a plano-convex positive lens F6, and a plano-convex positive lens G7 in sequence from the outgoing parallel light to the observed object surface, and finally converges to the image surface through a window plate H8.

[0063] Among them, the meniscus negative lens A1 and the meniscus negative lens C3 are made of F4GTi glass, the biconvex positive lens B2, the meniscus negative lens D4, the biconvex positive lens E5, the plano-convex positive lens F6, and the plano-convex positive lens G7 are made of H-QK30GTi glass; the material of the window plate H8 is F-SILICA.

[0064] Among them, the focal length f and the total length L of the microscopic objective lens satisfy: f / L = 0.35.

[0065] Among them, the focal length f and the working distance S of the microscopic objective lens satisfy: f / S = 1.07.

[0066] Among them, the focal length f of the meniscus negative lens A1 A and the focal length f of the microscopic objective lens satisfy: |f A / f| = 2.53.

[0067] Among them, the focal length f of the meniscus negative lens B2 B and the focal length f of the microscopic objective lens satisfy: |f B / f| = 1.86.

[0068] Among them, the focal length f of the meniscus negative lens C3 C and the focal length f of the microscopic objective lens satisfy: |f C / f| = 2.53.

[0069] Among them, the focal length f of the meniscus negative lens D4 D and the focal length f of the microscopic objective lens satisfy: |f D / f| = 12.20.

[0070] Among them, the focal length f of the meniscus negative lens E5 E and the focal length f of the microscopic objective lens satisfy: |f E / f| = 2.87.

[0071] Among them, the focal length F of the meniscus negative lens F6 F and the focal length F of the microscopic objective lens satisfy: |F F / F| = 2.57.

[0072] Among them, the focal length F of the meniscus negative lens G7 G and the focal length F of the microscopic objective lens satisfy: |FG / F| = 2.56.

[0073] The distribution and detailed parameters of the lenses in this embodiment are shown in Table 1 below:

[0074] Table 1

[0075] Surface Serial Number Radius / mm Thickness / mm Material Component Number 1 Infinity 10.00 2 -34.01 4.50 F4GTI Meniscus Negative Lens A 3 -72.58 1.00 4 72.17 11.00 H-QK30GTI Double-Convex Positive Lens B 5 -72.17 1.00 6 72.58 4.50 F4GTI Meniscus Negative Lens C 7 34.01 6.15 8 Infinity 5.99 9 -36.77 4.50 H-QK30GTI Meniscus Negative Lens D 10 -45.09 1.00 11 113.32 6.42 H-QK30GTI Double-Convex Positive Lens E 12 -113.32 1.00 13 51.25 7.00 H-QK30GTI Plano-Convex Positive Lens F 14 Infinity 1.00 15 50.90 9.14 H-QK30GTI Plano-Convex Positive Lens G 16 Infinity 7.30 17 Infinity 3.50 F_SILICA Window Plate H 18 Infinity 28.20

[0076] The microscopic objective lens of this embodiment can achieve the following technical indicators:

[0077] Laser focusing wavelength: 355 nm;

[0078] Focusing spot diameter: RMS ≤ 0.5 um, as Figure 2 shown, the black straight line in the figure represents the diffraction limit, and it can be seen that the resolution meets the diffraction limit;

[0079] Imaging wavelength: 370 nm;

[0080] Resolution: RMS ≤ 0.5 um, as Figure 3As shown, the black straight line in the figure represents the diffraction limit, and it can be seen that the resolution meets the diffraction limit;

[0081] Field of view: Φ0.9mm;

[0082] System transmittance: greater than or equal to 90%;

[0083] Magnification of the microscope objective lens: 4.65X.

[0084] Embodiment 2

[0085] A microscope objective lens is provided with a diaphragm M9, a meniscus negative lens A1, a biconvex positive lens B2, a meniscus negative lens C3, a meniscus negative lens D4, a biconvex positive lens E5, a plano-convex positive lens F6, and a plano-convex positive lens G7 in sequence from the outgoing parallel light to the observed object surface, and finally converges to the image surface through the window plate H8.

[0086] In this embodiment, the meniscus negative lens A1 and the meniscus negative lens C3 are made of F4GTi glass, the biconvex positive lens B2, the meniscus negative lens D4, the biconvex positive lens E5, the plano-convex positive lens F6, and the plano-convex positive lens G7 are made of H-QK30GTi glass; the material of the window plate H8 is F-SILICA.

[0087] Among them, the focal length f and the total length L of the microscope objective lens satisfy: f / L = 0.35.

[0088] Among them, the focal length f and the working distance S of the microscope objective lens satisfy: f / S = 1.05.

[0089] Among them, the focal length f of the meniscus negative lens A1 A and the focal length f of the microscope objective lens satisfy: |f A / f| = 2.43.

[0090] Among them, the focal length f of the meniscus negative lens B2 B and the focal length f of the microscope objective lens satisfy: |f B / f| = 1.84.

[0091] Among them, the focal length f of the meniscus negative lens C3 C and the focal length f of the microscope objective lens satisfy: |f C / f| = 2.67.

[0092] Among them, the focal length f of the meniscus negative lens D4 D and the focal length f of the microscope objective lens satisfy: |f D / f| = 12.97.

[0093] Among them, the focal length f of the meniscus negative lens E5 E and the focal length f of the microscope objective lens satisfy: |f E|f| = 2.89.

[0094] Among them, the focal length f of the meniscus negative lens F6 F and the focal length f of the microscopic objective lens satisfy: |f F / f| = 2.58.

[0095] Among them, the focal length f of the meniscus negative lens G7 G and the focal length f of the microscopic objective lens satisfy: |f G / f| = 2.68.

[0096] The distribution and detailed parameters of the lenses in this embodiment are shown in Table 2 below:

[0097] Table 2

[0098] Surface Serial Number Radius / mm Thickness / mm Material Component Number 1 Infinity 10.00 2 -32.50 4.50 F4GTI Meniscus Negative Lens A 3 -69.11 1.00 4 75.92 11.00 H-QK30GTI Double-Convex Positive Lens B 5 -67.11 1.00 6 71.56 4.50 F4GTI Meniscus Negative Lens C 7 34.63 6.15 8 Infinity 5.99 9 -36.77 4.50 H-QK30GTI Meniscus Negative Lens D 10 -44.64 1.00 11 122.22 6.42 H-QK30GTI Double-Convex Positive Lens E 12 -105.92 1.00 13 51.25 7.00 H-QK30GTI Plano-Convex Positive Lens F 14 Infinity 1.00 15 53.15 9.14 H-QK30GTI Plano-Convex Positive Lens G 16 Infinity 7.30 17 Infinity 3.50 F_SILICA Window Plate H 18 Infinity 28.20

[0099] The microscopic objective lens of this embodiment can achieve the following technical indicators:

[0100] Laser focusing wavelength: 355 mm;

[0101] Focusing spot diameter: RMS ≤ 0.5 μm, as Figure 4 shown, the black straight line in the figure represents the diffraction limit, and it can be seen that the resolution meets the diffraction limit;

[0102] Imaging wavelength: 370 nm;

[0103] Resolution: RMS ≤ 0.5 μm, as Figure 5 shown, the black straight line in the figure represents the diffraction limit, and it can be seen that the resolution meets the diffraction limit;

[0104] Field of view: Φ0.9 mm;

[0105] System transmittance: greater than or equal to 90%;

[0106] Magnification of the microscopic objective lens: 4.82X.

[0107] Embodiment 3

[0108] A microscopic objective lens is provided with a diaphragm M9, a meniscus negative lens A1, a biconvex positive lens B2, a meniscus negative lens C3, a meniscus negative lens D4, a biconvex positive lens E5, a plano-convex positive lens F6, and a plano-convex positive lens G7 in sequence from the outgoing parallel light to the observed object surface, and finally converges to the image surface through the window piece H8.

[0109] In this embodiment, the meniscus negative lens A1 and the meniscus negative lens C3 are made of F4GTi glass, the biconvex positive lens B2, the meniscus negative lens D4, the biconvex positive lens E5, the plano-convex positive lens F6, and the plano-convex positive lens G7 are made of H-QK30GTi glass; the window piece H8 is made of F-SILICA.

[0110] Among them, the focal length f and the total length L of the microscope objective satisfy: f / L = 0.35.

[0111] Among them, the focal length f and the working distance S of the microscope objective satisfy: f / S = 1.05.

[0112] Among them, the focal length f of the meniscus negative lens A1 A and the focal length f of the microscope objective satisfy: |f A / f| = 2.44.

[0113] Among them, the focal length f of the meniscus negative lens B2 B and the focal length f of the microscope objective satisfy: |f B / f| = 1.85.

[0114] Among them, the focal length f of the meniscus negative lens C3 C and the focal length f of the microscope objective satisfy: |f C / f| = 2.67.

[0115] Among them, the focal length f of the meniscus negative lens D4 D and the focal length f of the microscope objective satisfy: |f D / f| = 12.97.

[0116] Among them, the focal length f of the meniscus negative lens E5 E and the focal length f of the microscope objective satisfy: |f E / f| = 2.88.

[0117] Among them, the focal length f of the meniscus negative lens F6 F and the focal length f of the microscope objective satisfy: |f F / f| = 2.57.

[0118] Among them, the focal length f of the meniscus negative lens G7 G and the focal length f of the microscope objective satisfy: |f G / f| = 2.67.

[0119] The distribution and detailed parameters of each lens in this embodiment are shown in Table 3 below:

[0120] Table 3

[0121] Surface Serial Number Radius / mm Thickness / mm Material Component Number 1 Infinity 10.00 2 -32.46 4.50 F4GTI Meniscus Negative Lens A 3 -68.96 1.00 4 76.29 10.94 H-QK30GTI Double-Convex Positive Lens B 5 -66.83 1.00 6 71.77 4.50 F4GTI Meniscus Negative Lens C 7 34.67 6.14 8 Infinity 6.01 9 -36.69 4.50 H-QK30GTI Meniscus Negative Lens D 10 -44.55 1.00 11 123.41 6.42 H-QK30GTI Double-Convex Positive Lens E 12 -104.96 1.00 13 51.11 7.01 H-QK30GTI Plano-Convex Positive Lens F 14 Infinity 1.00 15 53.37 9.14 H-QK30GTI Plano-Convex Positive Lens G 16 Infinity 7.30 17 Infinity 3.53 F_SILICA Window Plate H 18 Infinity 28.20

[0122] The microscopic objective lens of this embodiment can achieve the following technical specifications:

[0123] Laser focusing wavelength: 355 nm;

[0124] Focus spot diameter: RMS ≤ 0.5 μm, as Figure 6 shown. The black straight line in the figure represents the diffraction limit, and it can be seen that the resolution meets the diffraction limit;

[0125] Imaging wavelength: 370 nm;

[0126] Resolution: RMS ≤ 0.5 μm, as Figure 7 shown. The black straight line in the figure represents the diffraction limit, and it can be seen that the resolution meets the diffraction limit;

[0127] Field of view: Φ0.9 mm;

[0128] System transmittance: greater than or equal to 90%;

[0129] Magnification of the microscopic objective lens: 4.83X.

[0130] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A microscope objective lens, characterized in that: From the outgoing parallel light to the observed object surface, there are aperture M, meniscus negative lens A, biconvex positive lens B, meniscus negative lens C, meniscus negative lens D, biconvex positive lens E, plano-convex positive lens F and plano-convex positive lens G in sequence, and finally converge to the image surface through the window piece H.

2. A microscope objective lens as claimed in claim 1, characterized in that: The focal length f and the total length L of the microscope objective lens satisfy: f / L≥0.

3.

3. A microscope objective lens as claimed in claim 1, characterized in that: The focal length f and working distance S of the microscope objective lens satisfy: f / S≤1.

5.

4. A microscope objective lens as claimed in claim 1, characterized in that: The focal length f of the meniscus negative lens A is A and the focal length f of the microscope objective lens satisfies: 2≤|f A / f|≤3.

5. A microscope objective lens as claimed in claim 1, characterized in that: The focal length f of the meniscus negative lens B is B and the focal length f of the microscope objective lens satisfies: 1≤|f B / f|≤2.

6. A microscope objective lens as claimed in claim 1, characterized in that: The focal length f of the meniscus negative lens C is C and the focal length f of the microscope objective lens satisfies: 2≤|f C / f|≤3.

7. A microscope objective lens as claimed in claim 1, characterized in that: The focal length f of the meniscus negative lens D is D and the focal length f of the microscope objective lens satisfies: 10≤|f D / f|≤15.

8. A microscope objective lens as claimed in claim 1, characterized in that: The focal length f of the meniscus negative lens E is E and the focal length f of the microscope objective lens satisfies: 2≤|f E / f|≤3.

9. A microscope objective lens as claimed in claim 1, characterized in that: The focal length f of the meniscus negative lens F is F and the focal length f of the microscope objective lens satisfies: 2≤|f F / f|≤3.

10. A microscope objective lens as claimed in claim 1, characterized in that: The focal length f of the meniscus negative lens G is G and the focal length f of the microscope objective lens satisfies: 2≤|f G / f|≤3.

Images