Temperature control method of a carrier device and semiconductor process apparatus

Abstract

The application provides a temperature control method of a carrier device and a semiconductor process equipment; wherein the method comprises: for multiple temperature zones of the carrier device, calculating temperature difference between any two adjacent temperature zones to obtain multiple temperature differences, determining a temperature difference which is not more than a first threshold value and not less than a second threshold value as a target temperature difference; for any target temperature difference, controlling temperature of a high temperature zone corresponding to the target temperature difference from rising any more, and controlling a low temperature zone corresponding to the target temperature difference to continue heating according to a corresponding initial target temperature, so as to reduce the target temperature difference to not more than a third threshold value. In the above control mode, by controlling the high temperature zone temperature of the target temperature difference from rising any more and the low temperature zone to continue heating, the target temperature difference is reduced, the temperature difference between the two adjacent temperature zones is avoided to be large, the problem that the heating rates of the multiple temperature zones are inconsistent is alleviated, and then the problem that the carrier device is damaged due to the large temperature difference between the multiple temperature zones is avoided, and the service life of the carrier device is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, and particularly relates to a temperature control method of a bearing device and a semiconductor process equipment. BACKGROUND

[0002] In an etching machine, electro-static-chuck (ESC) heating is widely used. The ESC is generally divided into a core Center area, a center Middle area, an edge Edge area and an extreme edge VeryEdge area, and a focus ring (FR) is arranged outside the ESC. In the heating control, the position of the FR is prone to high temperature, which causes the radial temperature of the FR and the ESC to be uneven, thereby resulting in poor etching effect of the process edge. Therefore, it is necessary to introduce an FR heater for temperature control.

[0003] In the prior art, one temperature controller is used for FR heating and one temperature controller is used for ESC heating. The four areas of the ESC are respectively connected to four channels of the temperature controller, and temperature control is independently performed between the four areas and the five areas of the FR. Because the areas of each temperature zone are different, the power of the internal heater, i.e., the heating wire, is different, and the set PID (Proportional Integral Derivative) parameters are also different, which causes the heating rate of each temperature zone to be different. When the heating rate of one temperature zone is faster than the heating rate of other temperature zones, the temperature difference between different temperature zones is prone to be too large. Because the ESC and the FR are both ceramic parts, when the temperature difference is too large (e.g., greater than 10℃), the ESC ceramic part will be damaged due to cracking. Therefore, how to solve the problem that the heating rates of different temperature zones are inconsistent, which causes the temperature difference between temperature zones to be too large and thus damages the ceramic ESC, is an urgent problem to be solved. SUMMARY

[0004] In view of this, the present application aims to provide a temperature control method of a bearing device and a semiconductor process equipment, so as to solve the technical problem that the heating rates of different temperature zones of the bearing device are inconsistent, which causes the temperature difference between temperature zones to be too large and thus damages the bearing device.

[0005] In a first aspect, an embodiment of the present application provides a temperature control method of a bearing device, the bearing device being provided with a plurality of temperature zones, each temperature zone being provided with a corresponding initial target temperature; the method comprising: obtaining current temperatures of the temperature zones, and calculating temperature differences between any two adjacent temperature zones to obtain a plurality of temperature differences; for any temperature difference, if the temperature difference is not greater than a first threshold value and is not less than a second threshold value, the temperature difference is determined as a target temperature difference; for any target temperature difference, the temperature of a high temperature zone corresponding to the target temperature difference is controlled not to increase any more, and the low temperature zone corresponding to the target temperature difference is controlled to continue heating according to the corresponding initial target temperature, so as to reduce the target temperature difference to be not greater than a third threshold value; wherein the high temperature zone is a temperature zone with higher temperature in the two adjacent temperature zones corresponding to the target temperature difference, the low temperature zone is a temperature zone with lower temperature in the two adjacent temperature zones corresponding to the target temperature difference, and the third threshold value is less than the second threshold value.

[0006] Preferably, the step of controlling the temperature of the high temperature zone corresponding to the target temperature difference not to increase any more comprises: controlling the high temperature zone corresponding to the target temperature difference to stop heating.

[0007] Preferably, the step of controlling the temperature of the high temperature zone corresponding to the target temperature difference not to increase any more comprises: controlling the target temperature of the high temperature zone corresponding to the target temperature difference to be adjusted from the initial target temperature to the corresponding current temperature.

[0008] Preferably, the method further comprises: when the target temperature difference is reduced to be not greater than the third threshold value, controlling the target temperature of the high temperature zone to be restored from the corresponding current temperature to the corresponding initial target temperature, and controlling the high temperature zone and the low temperature zone to continue heating according to the corresponding initial target temperature respectively.

[0009] Preferably, before the step of reducing the target temperature difference to be not greater than the third threshold value, the method further comprises: in the process of reducing the target temperature difference, judging whether the target temperature difference is reduced to be not greater than the third threshold value within a preset time length; if not, controlling the plurality of temperature zones to stop heating.

[0010] Preferably, each temperature zone is further configured with a control parameter; wherein the control parameter comprises a proportional parameter P; the method further comprises: in the process of heating the plurality of temperature zones, obtaining the number of times that each temperature zone is used as a high temperature zone; if the number of times that any temperature zone is used as a high temperature zone reaches a first preset number of times, the proportional parameter P of the temperature zone is increased.

[0011] Preferably, the method further comprises: in the process of heating the plurality of temperature zones, obtaining the number of times that each temperature zone is used as a low temperature zone; if the number of times that any temperature zone is used as a low temperature zone reaches a second preset number of times, the proportional parameter P of the temperature zone is reduced.

[0012] Preferably, the target temperature difference includes a first target temperature difference and a second target temperature difference; wherein the two temperature zones corresponding to the first target temperature difference are the first temperature zone and the second temperature zone respectively, and the two temperature zones corresponding to the second target temperature difference are the second temperature zone and the third temperature zone respectively; the method further includes: if the second temperature zone is a low temperature zone corresponding to the first target temperature difference, and at the same time, the second temperature zone is a high temperature zone corresponding to the second target temperature difference, then the temperature of the second temperature zone is controlled to stop rising.

[0013] Preferably, the step of controlling the temperature of the second temperature zone to stop rising includes: controlling the target temperature of the second temperature zone to be adjusted from the initial target temperature to the corresponding current temperature until the second target temperature difference is not greater than the third threshold value, and then controlling the target temperature of the second temperature zone to return to the corresponding initial target temperature; or, controlling the second temperature zone to stop heating until the second target temperature difference is not greater than the third threshold value.

[0014] Preferably, after the step of obtaining a plurality of temperature differences, the method further includes: if at least one temperature difference is greater than the first threshold value, controlling the plurality of temperature zones to stop heating.

[0015] In a second aspect, the embodiments of the present application further provide a semiconductor process equipment, including: a carrying device and a controller, the controller including at least one processor and at least one memory, the memory storing a computer program, and the computer program being executed by the processor to implement the temperature control method of the carrying device of the first aspect.

[0016] In a third aspect, the embodiments of the present application further provide a computer readable storage medium, the computer readable storage medium storing a computer program, and the computer program being executed by a processor to execute the temperature control method of the carrying device of the first aspect.

[0017] The embodiments of the present application have the following beneficial effects:

[0018] The embodiments of the present application provide a temperature control method of a carrying device and a semiconductor process equipment. For a plurality of temperature zones of the carrying device, the current temperature of each temperature zone is obtained, and the temperature difference between any two adjacent temperature zones is calculated to obtain a plurality of temperature differences. The temperature difference that is not less than a first threshold value and not greater than a second threshold value is determined as a target temperature difference. For any target temperature difference, the temperature of the high temperature zone corresponding to the target temperature difference is controlled to stop rising, and the low temperature zone corresponding to the target temperature difference is controlled to continue heating according to the corresponding initial target temperature, so as to reduce the target temperature difference to be not greater than a third threshold value. In the above control mode, by controlling the temperature of the high temperature zone of the target temperature difference to stop rising and the low temperature zone to continue heating, the target temperature difference is reduced, thereby avoiding that the temperature difference between the two adjacent temperature zones is large, alleviating the problem that the heating rates of the plurality of temperature zones are inconsistent, and further avoiding that the large temperature difference between the plurality of temperature zones damages the carrying device, and ensuring the service life of the carrying device.

[0019] Other features and advantages of the present application will be set forth in the descriptions that follow, and in part will be apparent from the description or can be learned by practice of the application. The purposes and other advantages of the application will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.

[0020] In order to make the above objectives, features and advantages of the present application more apparent, the following will specifically describe a preferred embodiment, and combine with the accompanying drawings, to make a detailed description as follows. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or the prior art description. Obviously, the drawings described below are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0022] Figure 1 A heating side view of a bearing device provided for an embodiment of the present application;

[0023] Figure 2 A heating plan view of a bearing device provided for an embodiment of the present application;

[0024] Figure 3 A flow chart of a temperature control method of a bearing device provided for an embodiment of the present application;

[0025] Figure 4 A temperature control system diagram of a bearing device provided for an embodiment of the present application;

[0026] Figure 5 A flow chart of another temperature control method of a bearing device provided for an embodiment of the present application;

[0027] Figure 6 A schematic diagram of a temperature control device of a bearing device provided for an embodiment of the present application. DETAILED DESCRIPTION

[0028] In order to make the objectives, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the present application will be described clearly and completely below in combination with the drawings. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0029] For the bearing device, such as Figure 1As shown, it comprises a base 11, an ESC 12 and an FR heater 16 made of ceramic material arranged on the base 11; wherein the inside of the base 11 is provided with a cooling channel 14, and the base 11 and the ESC 12 and the FR heater 16 are provided with silica gel 15, in addition, the FR 13 is fixedly arranged on the FR heater 16, in actual application, the FR 13 needs to be replaced, and the FR heater 16 is not a consumable part, so the FR heater 16 can heat the FR 13 through the built-in heating wire; at the same time, it is also convenient to replace the FR in actual application.

[0030] In addition, the ESC 12 is also provided with an ESC heater 17, which is preferably an ESC heating wire, and the ESC heating wire is arranged inside the ESC 12, so as to heat the ESC 12 through the ESC heating wire. It should be noted that since the ESC includes Center area, Middle area, Edge area and VeryEdge area, the corresponding heating wires of each area may be the same or different, which can be set according to actual conditions.

[0031] In addition, in actual application, the above-mentioned FR heater 16 can be made in a split type or an integrated type; wherein for the split type, the FR heater 16 is annular, since the annular heater is easy to be damaged due to expansion deformation, and there will be a gap between the FR 13 and the ESC 12, which will cause deposition (DEPO) in the process, there is a risk of arcing, and the gas released by the deposition (DEPO) will also affect the process, and particles (Particle) may also be produced, therefore, in actual application, the split type is generally not recommended.

[0032] For the integrated type, the FR heater 16 and the ECS 12 are made in an integrated form, which is simple in structure and easy to process, and has better strength than the annular FR heater; however, since the FR 13 is next to the VeryEdge area of the ESC 12, the coupling effect of the temperature of the FR heater 16 and the ESC is large, and the high and low temperature of the FR heater 16 affects the temperature control ability of the VeryEdge area. In addition, when the ESC 12 and the FR 13 are heated in the bearing device, Figure 2 As shown, the Center area, Middle area, Edge area, VeryEdge area and FR area of the ESC 12 are arranged from inside to outside, and the five areas are independently temperature-controlled, since the area of each temperature zone is different, the power of the internal heating wire is different, and the set PID parameters are different, resulting in different heating rates of each temperature zone. When the heating rate of one of the temperature zones is faster and the heating rates of the other temperature zones are slower, it is easy to cause a large temperature difference between different temperature zones, since the ESC and the FR are both ceramic parts, when the temperature difference is too large (such as more than 10℃), the ESC ceramic part will be damaged.

[0033] Based on this, the embodiment of the present application provides a temperature control method of a bearing device and a semiconductor process equipment. For any target temperature difference, the temperature of the high-temperature zone of the target temperature difference is no longer increased, and the low-temperature zone continues to be heated to reduce the target temperature difference, thereby avoiding that the temperature difference between two adjacent temperature zones is large, alleviating the problem that the heating rates of multiple temperature zones are inconsistent, and further avoiding that the large temperature difference between multiple temperature zones causes damage to the bearing device, and ensuring the service life of the bearing device.

[0034] In order to facilitate the understanding of the present embodiment, the present embodiment will be described in detail below.

[0035] Embodiment one:

[0036] The embodiment of the present application provides a temperature control method of a bearing device. The method is applied to a semiconductor process equipment. The semiconductor process equipment comprises a controller and a bearing device. The bearing device is provided with multiple temperature zones (for example, as shown in the figure, Center zone, Middle zone, Edge zone, VeryEdge zone and FR zone are arranged from inside to outside), and the multiple temperature zones are independently controlled in temperature. Each temperature zone is provided with a corresponding initial target temperature. Here, the initial target temperature corresponding to each temperature zone can be pre-stored in the controller and can be adaptively adjusted according to actual conditions. Figure 2

[0037] The semiconductor process equipment can be an inductively coupled plasma (ICP) etching equipment or a capacitively coupled plasma (CCP) etching equipment. The type of the semiconductor process equipment is not limited in the embodiment of the present application.

[0038] For example, the controller can be an upper computer or a lower computer. In actual application, the controller comprises at least one processor and at least one memory. The memory stores a computer program. When the computer program is executed by the processor, the temperature control method of the bearing device is realized to avoid that the temperature difference between two adjacent temperature zones is large, thereby alleviating the problem that the heating rates of multiple temperature zones are inconsistent, and further avoiding that the large temperature difference between multiple temperature zones causes damage to the bearing device, and ensuring the service life of the bearing device.

[0039] Based on the semiconductor process equipment, as shown in the figure, the temperature control method of the bearing device provided by the embodiment of the present application comprises the following steps: Figure 3

[0040] In step S302, the current temperature of each temperature zone is obtained, and the temperature difference between any two adjacent temperature zones is calculated to obtain multiple temperature differences.​​

[0041] Specifically, when the carrier of the semiconductor process equipment is heated, each temperature zone is controlled to heat according to the corresponding initial target temperature. Due to the difference in area and control parameters such as PID parameters of each temperature zone, the temperature rising rate of each temperature zone is not the same. Therefore, in order to keep the temperatures of the temperature zones consistent or close, the controller obtains the current temperatures of the temperature zones in real time during the heating of the carrier, and calculates the temperature difference between any two adjacent temperature zones to obtain a plurality of temperature differences, so as to control the temperatures of the plurality of temperature zones according to the plurality of temperature differences. It should be noted that close here means that the difference between the temperatures of any two temperature zones is less than a preset difference threshold, and the specific value of the preset difference threshold can be set according to actual conditions.

[0042] In step S304, for any temperature difference, if the temperature difference is not greater than the first threshold and is not less than the second threshold, the temperature difference is determined as a target temperature difference.

[0043] After the plurality of temperature differences are calculated, for any temperature difference, it is judged whether the temperature difference is not greater than the first threshold and is not less than the second threshold. If yes, the temperature difference is determined as a target temperature difference. The first threshold can also be referred to as an alarm temperature threshold ΔT alarm , which is preferably 10℃. When the temperature difference exceeds this value, the carrier such as a ceramic ESC will have a risk of damage; the second threshold can also be referred to as a warning temperature ΔT warning , which is preferably 6℃. The values of the first threshold and the second threshold can be adaptively adjusted according to actual conditions.

[0044] In step S306, for any target temperature difference, the temperature of the high-temperature zone corresponding to the target temperature difference is no longer increased, and the low-temperature zone corresponding to the target temperature difference continues to heat according to the corresponding initial target temperature, so as to reduce the target temperature difference to be not greater than a third threshold.

[0045] The target temperature difference determined above can be one or multiple. For the convenience of description, any one target temperature difference is taken as an example for illustration. Specifically, for the target temperature difference, the high-temperature zone and the low-temperature zone can be determined according to the current temperatures of the two adjacent temperature zones corresponding to the target temperature difference. The high-temperature zone is the temperature zone with higher temperature in the two adjacent temperature zones corresponding to the target temperature difference, and the low-temperature zone is the temperature zone with lower temperature in the two adjacent temperature zones corresponding to the target temperature difference.

[0046] For the target temperature difference, since the temperature rising rate of the high-temperature zone is higher than that of the low-temperature zone, in order to reduce the target temperature difference, the temperature of the high-temperature zone corresponding to the target temperature difference is controlled to stop rising, and the low-temperature zone corresponding to the target temperature difference continues to heat according to the initial target temperature corresponding to the low-temperature zone. At this time, since the temperature of the high-temperature zone stops rising, the temperature of the low-temperature zone continues to rise, that is, by adjusting the temperature rising rates of the high-temperature zone and the low-temperature zone, the target temperature difference is reduced until the target temperature difference is not greater than the third threshold.

[0047] The third threshold is less than the second threshold, and the third threshold can also be referred to as a normal temperature threshold ΔT normal , and preferably 4℃. When the target temperature difference is not greater than 4℃, it indicates that the temperatures of the high-temperature zone and the low-temperature zone corresponding to the target temperature difference are close, that is, the temperature rising rates are consistent or close. At this time, the bearing device does not have a risk of damage, and heating can continue. It should be noted that the value of the third threshold can be adaptively adjusted according to actual conditions.

[0048] The temperature control method of the bearing device provided in the embodiment of the present application can obtain the current temperature of each temperature zone of the bearing device, calculate the temperature difference between any two adjacent temperature zones, obtain a plurality of temperature differences, determine the target temperature difference of the temperature difference that is not greater than the first threshold and not less than the second threshold, control the temperature of the high-temperature zone corresponding to the target temperature difference to stop rising, and control the low-temperature zone to continue heating, so as to reduce the target temperature difference. Thus, the problem that the temperature difference between the two adjacent temperature zones is large is avoided, the problem that the temperature rising rates of the plurality of temperature zones are inconsistent is alleviated, and the damage of the bearing device caused by the large temperature difference between the plurality of temperature zones is avoided, thereby ensuring the service life of the bearing device.

[0049] In an embodiment, the step of controlling the temperature of the high-temperature zone corresponding to the target temperature difference to stop rising includes: controlling the high-temperature zone corresponding to the target temperature difference to stop heating.

[0050] Specifically, for the high-temperature zone corresponding to the target temperature difference, the high-temperature zone can be controlled to stop heating by controlling the corresponding heater or heating wire to be powered off. At this time, since the high-temperature zone stops heating, the temperature of the high-temperature zone will decrease, and the low-temperature zone corresponding to the target temperature difference continues to heat according to the initial target temperature corresponding to the low-temperature zone, that is, the temperature of the low-temperature zone will continue to rise, and at the same time, the temperature of the high-temperature zone decreases, thereby increasing the reduction rate of the target temperature difference and shortening the reduction time of the target temperature difference to be not greater than the third threshold, that is, the adjustment efficiency of the target temperature difference is improved, and the temperature rising rate of the bearing device is further improved. In addition, since the initial target temperature of the high-temperature zone does not need to be adjusted, the situation that the target temperature of the high-temperature zone is wrong due to the adjustment of the target temperature is avoided, thereby improving the temperature control accuracy of the high-temperature zone.

[0051] In an embodiment, the step of stopping the temperature of the high-temperature zone corresponding to the target temperature difference from increasing includes: adjusting the target temperature of the high-temperature zone corresponding to the target temperature difference from an initial target temperature to a corresponding current temperature.

[0052] Specifically, for the high-temperature zone corresponding to the target temperature difference, the temperature can be stopped from increasing by changing the target temperature thereof, that is, the controller adjusts the target temperature of the high-temperature zone from an initial target temperature to a corresponding current temperature, at this time, since the current temperature of the high-temperature zone reaches the adjusted target temperature, the high-temperature zone will maintain the current temperature and remain unchanged, and the low-temperature zone continues to heat according to the corresponding initial target temperature, therefore, at this time, the temperature increasing rate of the high-temperature zone is 0, and the temperature increasing rate of the low-temperature zone does not change, thereby quickly shortening the temperature difference between the high-temperature zone and the low-temperature zone, and improving the decreasing rate of the target temperature difference to be not greater than the third threshold value; in addition, this mode also avoids the energy waste caused by the subsequent re-heating of the high-temperature zone to the current temperature due to the temperature drop of the high-temperature zone.

[0053] In an embodiment, the method further includes: when the target temperature difference is reduced to be not greater than the third threshold value, adjusting the target temperature of the high-temperature zone from the corresponding current temperature to the corresponding initial target temperature, and controlling the high-temperature zone and the low-temperature zone to continue to heat according to the corresponding initial target temperature respectively.

[0054] Specifically, when the target temperature difference is reduced to be not greater than the third threshold value, it indicates that the temperature difference between the high-temperature zone and the low-temperature zone is within the normal temperature difference range at this time, at this time, if the target temperature of the high-temperature zone has changed, such as being adjusted from the initial target temperature to the corresponding current temperature, the controller also needs to control the target temperature of the high-temperature zone to recover from the corresponding current temperature to the corresponding initial target temperature, so that the high-temperature zone and the low-temperature zone continue to heat according to the corresponding initial target temperature respectively.

[0055] In addition, if the target temperature of the high-temperature zone has not changed, such as the high-temperature zone stopping heating, when the target temperature difference is reduced to be not greater than the third threshold value, at this time, the controller directly controls the high-temperature zone and the low-temperature zone to continue to heat according to the corresponding initial target temperature respectively until the high-temperature zone and the low-temperature zone reach the corresponding initial target temperature respectively.

[0056] In addition, in the subsequent heating process, if the target temperature difference again appears to be not greater than the first threshold value and not less than the second threshold value, the high-temperature zone and the low-temperature zone corresponding to the target temperature difference need to be controlled again, such as controlling the temperature of the high-temperature zone to stop increasing and the low-temperature zone to continue to heat according to the corresponding initial target temperature until the high-temperature zone and the low-temperature zone reach the corresponding initial target temperature respectively. It should be noted that the high-temperature zone and the low-temperature zone are not fixed, and the subsequent high-temperature zone and the low-temperature zone also need to be determined according to the temperature at that time, which is not limited by the embodiments of the present application.

[0057] In an embodiment, before the step of reducing the target temperature difference to be not greater than the third threshold, the method further comprises: determining whether the target temperature difference is reduced to be not greater than the third threshold within a preset time length during the target temperature difference is reduced; if not, controlling the plurality of temperature zones to stop heating.

[0058] Specifically, for the target temperature difference, when the temperature of the high-temperature zone is no longer increased and the low-temperature zone continues to heat according to the corresponding initial target temperature, at this time, the target temperature difference starts to decrease and is timed from the start of the decrease; and it is determined whether the target temperature difference is reduced to be not greater than the third threshold within a preset time length, if yes, it indicates that the low-temperature zone heats normally, and the high-temperature zone and the low-temperature zone continue to heat according to the corresponding initial target temperature; wherein the preset time length is preferably 30s, and can be adaptively adjusted according to actual conditions.

[0059] In addition, if the target temperature difference has not been reduced to be not greater than the third threshold within the preset time length, at this time, it indicates that the heating of the low-temperature zone has failed, and the controller controls the plurality of temperature zones to stop heating, such as controlling the heaters or heating wires of each temperature zone to be powered off to stop working, so that the temperature of each temperature zone decreases, thereby facilitating fault checking of the low-temperature zone with heating failure, and avoiding the process quality of the semiconductor process equipment from being reduced due to the heating failure of the low-temperature zone, thereby ensuring the process quality of the semiconductor process equipment.

[0060] In an embodiment, each temperature zone is further configured with a control parameter; wherein the control parameter comprises a proportional parameter P; the method further comprises: acquiring the number of times that each temperature zone is used as a high-temperature zone during the heating of the plurality of temperature zones; and if the number of times that any temperature zone is used as a high-temperature zone reaches a first preset number of times, increasing the proportional parameter P of the temperature zone.

[0061] Specifically, during the heating of the bearing device, if it is found that the temperature of a certain temperature zone is always too high, such as after multiple adjustments, it is found that a certain temperature zone always needs to maintain the temperature not to be increased during the temperature increasing process, such as adjusting the target temperature or stopping heating, which indicates that the temperature increasing speed of the temperature zone is too fast; at this time, the controller further acquires the number of times that each temperature zone is used as a high-temperature zone, and for the temperature zone whose number of times as a high-temperature zone reaches a first preset number of times, the controller needs to adjust the control parameter, i.e. the PID parameter, of the temperature zone, and here the proportional parameter P of the temperature zone is increased to reduce the temperature increasing speed of the temperature zone, thereby reducing the temperature difference between the temperature zone and other temperature zones during the heating of the temperature zone, so that the temperature increasing speed of the temperature zone is consistent with that of other temperature zones.

[0062] In an embodiment, the method further comprises: acquiring the number of times that each temperature zone is used as a low-temperature zone during the heating of the plurality of temperature zones; and if the number of times that any temperature zone is used as a low-temperature zone reaches a second preset number of times, reducing the proportional parameter P of the temperature zone.

[0063] Similarly, during the heating process of the bearing device, if it is found that the temperature of a certain temperature zone is always too low after multiple adjustments, for example, the temperature of a certain temperature zone is always lower than that of its adjacent temperature zone when calculating the temperature difference, it indicates that the heating speed of the temperature zone is too slow. At this time, the controller also obtains the number of times that each temperature zone is a low temperature zone. For the temperature zone whose number of times as a low temperature zone reaches a second preset number of times, the controller needs to adjust the control parameters, i.e., the PID parameters, of the temperature zone, such as reducing the proportional parameter P of the temperature zone, to improve the heating rate of the temperature zone, so as to reduce the temperature difference between the temperature zone and other temperature zones during the heating process of the temperature zone, so that the heating rate of the temperature zone is consistent with that of other temperature zones, thereby improving the heating efficiency of the bearing device.

[0064] In an embodiment, the target temperature difference includes a first target temperature difference and a second target temperature difference; wherein the two temperature zones corresponding to the first target temperature difference are a first temperature zone and a second temperature zone respectively, and the two temperature zones corresponding to the second target temperature difference are the second temperature zone and a third temperature zone respectively; the method further includes: if the second temperature zone is a low temperature zone corresponding to the first target temperature difference, and at the same time, the second temperature zone is a high temperature zone corresponding to the second target temperature difference, then the temperature of the second temperature zone is no longer increased.

[0065] Specifically, for the second temperature zone, it is a low temperature zone in the first target temperature difference and needs to continue heating according to the corresponding initial target temperature; however, the second temperature zone is a high temperature zone in the second target temperature difference at the same time and needs to keep the temperature no longer increasing; at this time, for the first temperature zone, the second temperature zone and the third temperature zone, the temperature is sorted from high to low as follows: the first temperature zone > the second temperature zone > the third temperature zone, at this time, the controller preferentially controls the temperature zone with the lowest temperature to heat, that is, at this time, the first temperature zone and the second temperature zone are both kept at a temperature no longer increasing, and the third temperature zone continues to heat according to the corresponding initial target temperature; until the second target temperature difference is not greater than a third threshold value; then, the first temperature zone is kept at a temperature no longer increasing, and the second temperature zone and the third temperature zone are controlled to heat according to the corresponding initial target temperature respectively, until the first target temperature difference is not greater than the third threshold value; finally, the first temperature zone, the second temperature zone and the third temperature zone are controlled to heat according to the corresponding initial target temperature respectively.

[0066] When the temperature of the second temperature zone is no longer increased; one control method is to adjust the target temperature of the second temperature zone from the initial target temperature to the corresponding current temperature until the second target temperature difference is not greater than the third threshold value, and then the target temperature of the second temperature zone returns to the corresponding initial target temperature; another control method is to control the second temperature zone to stop heating until the second target temperature difference is not greater than the third threshold value.

[0067] Therefore, for the second temperature zone, the temperature can no longer increase by controlling it to stop heating or adjusting its target temperature, and when the second target temperature difference is not greater than the third threshold value, if the target temperature of the second temperature zone is adjusted, it is restored to the corresponding initial target temperature, so as to control the second temperature zone and the third temperature zone to heat according to the corresponding initial target temperature respectively. For the three adjacent temperature zones, the temperature of the lowest temperature zone is preferentially controlled to heat, and the temperatures of the remaining two temperature zones are controlled to no longer increase, thereby avoiding that the temperature difference between multiple temperature zones is too large, alleviating the problem that the heating rates of multiple temperature zones are inconsistent, and further avoiding that the large temperature difference between multiple temperature zones causes damage to the bearing device, thereby ensuring the service life of the bearing device.

[0068] In an embodiment, after the step of obtaining multiple temperature differences, the method further comprises: if at least one temperature difference is greater than the first threshold value, controlling the multiple temperature zones to stop heating.

[0069] Specifically, for multiple temperature differences between multiple temperature zones, firstly, it is judged whether all temperature differences are not greater than the first threshold value, if yes, a target temperature difference in the multiple temperature differences is determined according to the first threshold value and the second threshold value, so as to control the target temperature to be reduced; if at least one temperature difference is greater than the first threshold value, it indicates that the bearing device (such as a ceramic ESC) is in danger of damage at this time, at this time, the controller controls each temperature zone to stop heating, here the stop heating is preferably that the heaters or heating wires of each temperature zone are powered off to stop working, so that the temperature of each temperature zone as a whole decreases, thereby avoiding damage to the bearing device, and thus ensuring the service life of the semiconductor process equipment.

[0070] In summary, for multiple temperature zones of the bearing device, the temperature control process is as follows:

[0071] (1) When starting heating, each temperature zone heats according to the corresponding initial target temperature, at this time, each temperature difference is in an increasing process;

[0072] When 0≤temperature difference≤4℃ (i.e. the third threshold value), each temperature zone heats according to the corresponding initial target temperature;

[0073] When 4℃<temperature difference<6℃ (i.e. the second threshold value), each temperature zone still heats according to the corresponding initial target temperature;

[0074] When 6℃≤temperature difference≤10℃ (i.e. the first threshold value), at this time, the temperature difference is determined as a target temperature difference, and the temperature of the high temperature zone corresponding to the target temperature difference is controlled to no longer increase (such as stopping heating or adjusting the target temperature from the initial target temperature to the current temperature), and the low temperature zone continues to heat according to the corresponding initial target temperature, and enters a temperature difference decreasing process;

[0075] (2) During the process of decreasing the temperature difference, when the target temperature difference drops to 4℃ < target temperature difference < 6℃, the high temperature zone will still maintain the temperature and will not rise (e.g., stop heating or keep the target temperature at the current temperature); continue to decrease the target temperature difference, and when the target temperature difference drops to 0 ≤ target temperature difference ≤ 4℃, at this time, control the high temperature zone to start heating or the target temperature to be restored from the current temperature to the corresponding initial target temperature, and control the high temperature zone and the low temperature zone to be heated according to the corresponding initial target temperature respectively.

[0076] Therefore, in the above control method, by controlling the temperature of the high-temperature zone of the target temperature difference to no longer rise, and the low-temperature zone to continue heating, the target temperature difference is reduced, thus avoiding a large temperature difference between two adjacent temperature zones. This alleviates the problem of inconsistent heating rates among multiple temperature zones, thereby preventing damage to the bearing device caused by large temperature differences among multiple temperature zones and ensuring the service life of the bearing device.

[0077] Example 2:

[0078] For ease of understanding, this explanation uses semiconductor process equipment as an example of an etching machine. The carrier devices include ESC and FR, such as... Figure 4 As shown, the controller of the aforementioned semiconductor process equipment is a host computer (PC), which controls the temperature of multiple temperature zones of the supporting device; among which, such as Figure 2 As shown, there are multiple temperature zones, including five zones: Center, Middle, Edge, VeryEdge, and FR. Each temperature zone is also equipped with an independent heater (i.e., heating wire) and temperature feedback. The temperature feedback is achieved through fiber optic temperature measurement, such as converting the temperature into a 0-10VDC voltage signal via a fiber optic transmitter and transmitting the voltage signal to the corresponding temperature controller.

[0079] In practical applications, since thermostats typically have only four channels, and the number of temperature zones mentioned above is 5, two thermostats are required. The four temperature zones—Center, Middle, Edge, and VeryEdge—share one thermostat, namely thermostat #1. Furthermore, the Center, Middle, Edge, and VeryEdge zones are each connected to one of the four channels of thermostat #1, allowing for independent temperature control among the four zones. The FR zone is connected to another four-channel thermostat, namely thermostat #2.

[0080] In addition, the temperature controller #1 and the temperature controller #2 are connected to the host PC; during the heating control process, the temperature controller #1 and the temperature controller #2 communicate with the host PC in a bidirectional manner. Specifically, the host PC sends the temperature controller #1 and the temperature controller #2 a temperature control start / stop instruction and sets a target temperature value (i.e., an initial target temperature) of each temperature zone, the temperature controller #1 and the temperature controller #2 execute the command sent by the host PC, and feed back, to the host PC in real time, a current temperature of the corresponding temperature zone and a state (such as running, stopping, fault information, etc.) of the temperature controller. In addition, the host PC also receives a feedback signal about the temperature sent by the optical fiber transmitter, and since the feedback signal is a voltage value, the host PC needs to convert the received voltage value into a corresponding temperature value in order to control the heating according to the temperature value.

[0081] For the above multiple temperature zones, the prior art controls the temperature of each temperature zone independently. In this scheme, during the early stage of debugging, the power supply of the heater needs to be cut off first, and then the temperature control start commands of each temperature zone are given, and after confirming that each temperature zone has heating power, the power supply of the heater is turned on to ensure that the heating of all temperature zones rises uniformly. During the entire debugging process, the operator also needs to monitor the temperature feedback signals of each temperature zone and stay near the power supply of the heater so as to manually disconnect the power supply of the heater of each temperature zone to stop heating when a large temperature difference (such as greater than 10℃) is found. This method is extremely inconvenient to operate and cannot be implemented when the device is running. When the temperature of a certain temperature zone does not rise, the temperature difference between different temperature zones will become large, which will easily damage the ESC ceramic device.

[0082] Based on this, the embodiment of the present application provides another temperature control method of a bearing device, which mainly describes the temperature control process of five temperature zones in an etching machine. Compared with the prior art, the embodiment of the present application automatically controls the state of the heater of each temperature zone by using the above-mentioned host PC, and introduces a temperature control coupling algorithm between each temperature zone, that is, the temperature of each temperature zone is collected in real time and two adjacent temperature zones are subtracted, so as to adjust the temperature of each temperature zone according to the temperature difference between the two adjacent temperature zones, thereby avoiding the situation that multiple temperature zones are damaged due to a large temperature difference caused by inconsistent heating rates, and ensuring the service life of the ESC.

[0083] In the heating control process, the host PC can acquire the temperature values of each temperature zone sent by the temperature controller #1 and the temperature controller #2 in real time, and can also acquire the voltage values of each temperature zone sent by the optical fiber transmitter, and determine the temperature values of each temperature zone according to the voltage values. In order to facilitate the description, the heating control process is described by taking the optical fiber transmitter as an example.

[0084] Specifically, as shown in Figure 5 the temperature control method of the bearing device comprises the following steps:

[0085] Step S502, start the temperature control of the five temperature zones and set the initial target temperature of the five temperature zones;

[0086] Specifically, when the bearing device starts heating, the temperature control of the five temperature zones of the Center zone, the Middle zone, the Edge zone, the VeryEdge zone and the FR zone is started, at this time, the host PC sets the initial target temperature of the Center zone, the Middle zone, the Edge zone, the VeryEdge zone and the FR zone, respectively, and the initial target temperature of each temperature zone can be the same or different, which can be set according to the actual situation.

[0087] Step S504, acquire the temperature of the five temperature zones and calculate the temperature difference ΔT between adjacent two temperature zones current ;

[0088] Specifically, the host PC determines the temperature value corresponding to each temperature zone according to the voltage value of each temperature zone fed back by the optical fiber transmitter in real time; wherein the real-time acquisition is generally calculated at 100ms, and the execution of the control process is the loop time of the program, and considering the receiving and sending time of the signal, it is calculated at 200ms here.

[0089] For convenience of description, an arbitrary one of the temperature differences ΔT current is taken as an example for description, and the first threshold value, i.e., the alarm temperature threshold value ΔT alarm =10℃, the second threshold value, i.e., the warning temperature ΔT warning =6℃, and the third threshold value, i.e., the normal temperature threshold value ΔT normal =4℃; the values of the first threshold value, the second threshold value and the third threshold value can be adaptively adjusted according to the actual situation.

[0090] Step S506, judge whether ΔT current > ΔT warning ; that is, whether the temperature difference ΔT current is greater than the second threshold value, if yes, execute step S508, if no, execute step S526;

[0091] Step S508, judge whether ΔT current > ΔT alarm ; if yes, execute step S510; if no, execute steps S514-S524;

[0092] Step S510, send a stop command to the five temperature zones to control the five temperature zones to stop heating; that is, when ΔT current > ΔT alarm , at this time, the ESC ceramic piece has a risk of damage, and the host PC controls each temperature zone to stop heating;

[0093] Step S512, generate an alarm information of excessive temperature difference; that is, the host PC generates an alarm information of excessive temperature difference to prompt the user that the ESC ceramic piece is at risk of damage;

[0094] Step S514, determine whether the target temperature of a certain temperature zone has changed; that is, determine whether the target temperature of a certain temperature zone in the corresponding two temperature zones has changed, if not, execute steps S516-S524 to control the change of the ΔT current Step S514, determine whether the target temperature of a certain temperature zone has changed; that is, determine whether the target temperature of a certain temperature zone in the corresponding two temperature zones has changed, if not, execute steps S516-S524 to control the change of the ΔT current Step S514, determine whether the target temperature of a certain temperature zone has changed; that is, determine whether the target temperature of a certain temperature zone in the corresponding two temperature zones has changed, if not, execute steps S516-S524 to control the change of the ΔT

[0095] Step S516, if the temperature of the Center zone is high, set the current temperature of the Center zone as its target temperature;

[0096] Specifically, when the ΔT warning <ΔT current ≤△T alarm , the temperature difference ΔT current is the target temperature difference, and the ΔT current corresponds to the two temperature zones, the high-temperature zone is the Center zone, then the target temperature of the Center zone is adjusted from the corresponding initial temperature to the current temperature, and returns to step S504 to re-detect the change of the ΔT current ;

[0097] Step S518, if the temperature of the Middle zone is high, set the current temperature of the Middle zone as its target temperature; that is, when the ΔT warning <ΔT current ≤△T alarm , the temperature difference ΔT current is the target temperature difference, and the ΔT current corresponds to the two temperature zones, the high-temperature zone is the Middle zone, then the target temperature of the Middle zone is adjusted from the corresponding initial temperature to the current temperature, and returns to step S504 to re-detect the change of the ΔT current ;

[0098] Step S520, if the temperature of the Edge zone is high, set the current temperature of the Edge zone as its target temperature; that is, when the ΔT warning <ΔT current ≤△T alarm , the temperature difference ΔT current is the target temperature difference, and the ΔT current corresponds to the two temperature zones, the high-temperature zone is the Edge zone, then the target temperature of the Edge zone is adjusted from the corresponding initial temperature to the current temperature, and returns to step S504 to re-detect the change of the ΔT current ;

[0099] Step S522: If the VeryEdge region has a high temperature, set the current temperature of the VeryEdge region as its target temperature; that is, when ΔT warning <ΔT current ≤△T alarm At this time, the temperature difference ΔT current Let ΔT be the target temperature difference, and let ΔT be the temperature difference. current In the two corresponding temperature zones, the high-temperature zone is the VeryEdge zone. Therefore, the target temperature of the VeryEdge zone is adjusted from the corresponding initial temperature to the current temperature, and the process returns to step S504 to re-detect ΔT. current The changes;

[0100] Step S524: If the temperature of the FR region is high, set the current temperature of the FR region as its target temperature; that is, when ΔT warning <ΔT current ≤△T alarm At this time, the temperature difference ΔT current Let ΔT be the target temperature difference, and let ΔT be the temperature difference. current If the high-temperature zone is the FR zone, then the target temperature of the FR zone is adjusted from the corresponding initial temperature to the current temperature, and the process returns to step S504 to re-detect ΔT. current The changes;

[0101] Step S526: Determine whether the target temperature of a certain temperature zone has changed; that is, when ΔT current ≤△T warning When, determine the value of ΔT current If the target temperature of one of the two corresponding temperature zones has changed, return to step S504 to continue obtaining the temperatures of the five temperature zones and recalculate the temperature difference between two adjacent temperature zones; if yes, proceed to step S528.

[0102] Step S528, determine whether ΔT is satisfied. current >△T normal If yes, proceed to step S530; if no, proceed to step S532.

[0103] Step S530: Determine if the duration Twaiting satisfies: Twaiting > 30s. If so, proceed to step S510, i.e., when ΔT current When the target temperature of a certain temperature zone changes, obtain ΔT. current >△T normal The duration of ΔTwaiting is greater than 30 seconds (the preset duration). This indicates that within 30 seconds, ΔT... current It has not yet decreased to no more than △T normal ΔT currentIf the heating of the corresponding low-temperature zone fails, the controller controls multiple temperature zones to stop heating, such as controlling the heater or heating wire of each temperature zone to be powered off and stop working; if not, return to step S504;

[0104] In step S532, the target temperature of the temperature zone is restored to the initial target temperature. That is, when ΔT current ≤△T normal , at this time, ΔT current The target temperature of the corresponding high-temperature zone is restored to the corresponding initial target temperature, and returns to step S504 to re-detect the temperature of the temperature zone.

[0105] In addition, if ΔT current =T C -T M , where T C represents the temperature of the Center zone, T M represents the temperature of the Middle zone, when ΔT warning <ΔT current <△T alarm , the current T C is set as the target temperature of the Center zone, if T M >T E , and the difference is greater than ΔT warning , T E represents the temperature of the Edge zone, then the current T M is set as the target temperature of the Middle zone, at this time, the Center zone and the Middle zone maintain the corresponding current temperature, and wait for the Edge zone to heat, thereby avoiding the damage of the ESC caused by the excessive temperature difference between the three temperature zones. It should be noted that the initial target temperatures of the Center zone and the Middle zone are preferably the same, and may be different under some processes, but the temperature difference is generally 1-3°C, which can be set according to the actual situation.

[0106] In summary, the temperature control method of the bearing device provided by the embodiment of the application avoids the problem of inconsistent temperature rising rates of different temperature zones by calculating the temperature difference between any two adjacent temperature zones in multiple temperature zones and controlling the temperature rising rate during the heating process of the two temperature zones according to the temperature difference, thereby avoiding the damage of the ceramic ESC caused by the excessive temperature difference between multiple temperature zones, and further ensuring the service life of the bearing device.

[0107] Embodiment three:

[0108] Corresponding to the above method embodiment, the embodiment of the application also provides a temperature control device of a bearing device, the bearing device is provided with multiple temperature zones, and each temperature zone is provided with a corresponding initial target temperature.

[0109] AsFigure 6 As shown in the figure, the device comprises an acquisition module 61, a determination module 62 and a control module 63; wherein the functions of each module are as follows:

[0110] The acquisition module 61 is configured to acquire the current temperature of each temperature zone and calculate the temperature difference between any two adjacent temperature zones to obtain a plurality of temperature differences.

[0111] The determination module 62 is configured to, for any temperature difference, if the temperature difference is not greater than a first threshold value and not less than a second threshold value, determine the temperature difference as a target temperature difference.

[0112] The control module 63 is configured to, for any target temperature difference, control the temperature of the high-temperature zone corresponding to the target temperature difference to no longer increase, and control the low-temperature zone corresponding to the target temperature difference to continue heating according to the corresponding initial target temperature, so as to reduce the target temperature difference to be not greater than a third threshold value; wherein the high-temperature zone is the temperature zone with higher temperature in the two adjacent temperature zones corresponding to the target temperature difference, the low-temperature zone is the temperature zone with lower temperature in the two adjacent temperature zones corresponding to the target temperature difference, and the third threshold value is less than the second threshold value.

[0113] The temperature control device of the bearing device provided by the embodiment of the present application acquires the current temperature of each temperature zone of the bearing device and calculates the temperature difference between any two adjacent temperature zones to obtain a plurality of temperature differences, determines the temperature difference that is not greater than a first threshold value and not less than a second threshold value as a target temperature difference, and controls the temperature of the high-temperature zone corresponding to the target temperature difference to no longer increase and controls the low-temperature zone corresponding to the target temperature difference to continue heating, so as to reduce the target temperature difference, thereby avoiding that the temperature difference between the two adjacent temperature zones is too large, alleviating the problem that the temperature increase rates of the plurality of temperature zones are inconsistent, and further avoiding that the large temperature difference between the plurality of temperature zones damages the bearing device, and ensuring the service life of the bearing device.

[0114] Preferably, the control of the temperature of the high-temperature zone corresponding to the target temperature difference to no longer increase comprises stopping heating of the high-temperature zone.

[0115] Preferably, the control of the temperature of the high-temperature zone corresponding to the target temperature difference to no longer increase comprises adjusting the target temperature of the high-temperature zone from the initial target temperature to the corresponding current temperature.

[0116] Preferably, the device further comprises: when the target temperature difference is reduced to be not greater than the third threshold value, controlling the target temperature of the high-temperature zone to recover from the corresponding current temperature to the corresponding initial target temperature, and controlling the high-temperature zone and the low-temperature zone to continue heating according to the corresponding initial target temperature, respectively.

[0117] Preferably, before the target temperature difference is reduced to be not greater than the third threshold value, the device further comprises: during the target temperature difference is reduced, judging whether the target temperature difference is reduced to be not greater than the third threshold value within a preset time length; if not, controlling the multiple temperature zones to stop heating.

[0118] Preferably, each temperature zone is further configured with a control parameter; wherein the control parameter comprises a proportional parameter P; the device further comprises: during the heating of the multiple temperature zones, obtaining the number of times that each temperature zone is as a high temperature zone; if the number of times that any temperature zone is as a high temperature zone reaches a first preset number of times, increasing the proportional parameter P of the temperature zone.

[0119] Preferably, the device further comprises: during the heating of the multiple temperature zones, obtaining the number of times that each temperature zone is as a low temperature zone; if the number of times that any temperature zone is as a low temperature zone reaches a second preset number of times, reducing the proportional parameter P of the temperature zone.

[0120] Preferably, the target temperature difference comprises a first target temperature difference and a second target temperature difference; wherein the two temperature zones corresponding to the first target temperature difference are a first temperature zone and a second temperature zone respectively, and the two temperature zones corresponding to the second target temperature difference are a second temperature zone and a third temperature zone respectively; the device further comprises: if the second temperature zone is a low temperature zone corresponding to the first target temperature difference, and at the same time, the second temperature zone is a high temperature zone corresponding to the second target temperature difference, controlling the temperature of the second temperature zone to no longer increase.

[0121] Preferably, controlling the temperature of the second temperature zone to no longer increase comprises: controlling the target temperature of the second temperature zone to be adjusted from an initial target temperature to a corresponding current temperature until the second target temperature difference is not greater than the third threshold value, and controlling the target temperature of the second temperature zone to return to the corresponding initial target temperature; or, controlling the second temperature zone to stop heating until the second target temperature difference is not greater than the third threshold value.

[0122] Preferably, after the multiple temperature differences are obtained, the device further comprises: if at least one temperature difference is greater than the first threshold value, controlling the multiple temperature zones to stop heating.

[0123] The temperature control device of the bearing device provided by the embodiment of the application has the same technical features as the temperature control method of the bearing device provided by the above-mentioned embodiment, and can solve the same technical problems and achieve the same technical effects.

[0124] The embodiment further provides a machine readable storage medium, which stores machine executable instructions; when the machine executable instructions are called and executed by a processor, the machine executable instructions cause the processor to implement the temperature control method of the bearing device.

[0125] The computer program product of the semiconductor process equipment and the temperature control method of the bearing device provided by the embodiment of the application include a computer readable storage medium storing program codes, the program codes include instructions for executing the method described in the foregoing method embodiments, and specific implementation can be referred to the method embodiments, which will not be described here.

[0126] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the system and device described above can refer to the corresponding process in the foregoing method embodiments, which will not be described here.

[0127] In addition, in the description of the embodiment of the application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting" should be understood in a broad sense, for example, can be fixed connection, can also be detachable connection, or integrally connected; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0128] If the functions are realized in the form of software function units and sold or used as independent products, they can be stored in a nonvolatile computer readable storage medium executable by a processor. Based on such understanding, the technical solutions of the application or the part of the prior art essentially or the part of the technical solutions can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a plurality of instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the method described in the embodiments of the application. The foregoing storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disk or optical disk and various program code storage media.

[0129] In the description of the application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the application. In addition, the terms "first", "second", "third" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance.

[0130] Finally, it should be noted that the above-described embodiments are merely specific embodiments of the present application, which are used to illustrate the technical solutions of the present application, but not to limit the same. The protection scope of the present application is not limited thereto. Although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that any person skilled in the art can still modify or easily think of changes to the technical solutions recorded in the foregoing embodiments, or make equivalent replacements to some of the technical features, within the technical scope disclosed by the present application. The modifications, changes or replacements do not cause the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A temperature control method for a load device, the load device being provided with a plurality of temperature zones, each of the temperature zones being provided with a corresponding initial target temperature; characterized in that, The method comprises: obtaining the current temperature of each of the temperature zones and calculating the temperature difference between any two adjacent temperature zones to obtain a plurality of temperature differences; for any temperature difference, if the temperature difference is not greater than a first threshold value and not less than a second threshold value, the temperature difference is determined as a target temperature difference; for any target temperature difference, the temperature of the high-temperature zone corresponding to the target temperature difference is controlled not to increase any more, and the low-temperature zone corresponding to the target temperature difference is controlled to continue heating according to the initial target temperature corresponding to the low-temperature zone to reduce the target temperature difference to be not greater than a third threshold value; wherein the high-temperature zone is the temperature zone with higher temperature among the two adjacent temperature zones corresponding to the target temperature difference, the low-temperature zone is the temperature zone with lower temperature among the two adjacent temperature zones corresponding to the target temperature difference, and the third threshold value is less than the second threshold value; each of the temperature zones is also provided with a control parameter; wherein the control parameter comprises a proportional parameter P; during the heating of the plurality of temperature zones, the number of times that each of the temperature zones is used as the high-temperature zone is obtained; if the number of times that any temperature zone is used as the high-temperature zone reaches a first preset number of times, the proportional parameter P of the temperature zone is increased.

2. The method of claim 1, wherein, The step of controlling the temperature of the high-temperature zone corresponding to the target temperature difference not to increase any more comprises: controlling the high-temperature zone corresponding to the target temperature difference to stop heating.

3. The method of claim 1, wherein, The step of controlling the temperature of the high-temperature zone corresponding to the target temperature difference not to increase any more comprises: controlling the target temperature of the high-temperature zone corresponding to the target temperature difference to be adjusted from the initial target temperature to the current temperature corresponding to the high-temperature zone.

4. The method of claim 3, wherein, The method further comprises: when the target temperature difference is reduced to be not greater than the third threshold value, the target temperature of the high-temperature zone is controlled to be restored from the current temperature corresponding to the high-temperature zone to the initial target temperature corresponding to the high-temperature zone, and the high-temperature zone and the low-temperature zone are controlled to continue heating according to the initial target temperature corresponding to the high-temperature zone and the low-temperature zone respectively.

5. The method of claim 1, wherein, Before the step of reducing the target temperature difference to be not greater than the third threshold value, the method further comprises: during the reduction of the target temperature difference, it is judged whether the target temperature difference is reduced to be not greater than the third threshold value within a preset time length; if not, the plurality of temperature zones are controlled to stop heating.

6. The method of claim 1, wherein, The method further comprises: during the heating of the plurality of temperature zones, the number of times that each of the temperature zones is used as the low-temperature zone is obtained; if the number of times that any temperature zone is used as the low-temperature zone reaches a second preset number of times, the proportional parameter P of the temperature zone is reduced.

7. The method of claim 1, wherein, The target temperature difference comprises a first target temperature difference and a second target temperature difference; wherein the two temperature zones corresponding to the first target temperature difference are a first temperature zone and a second temperature zone respectively, and the two temperature zones corresponding to the second target temperature difference are the second temperature zone and a third temperature zone respectively; the method further comprises: if the second temperature zone is the low-temperature zone corresponding to the first target temperature difference and the second temperature zone is the high-temperature zone corresponding to the second target temperature difference, the temperature of the second temperature zone is controlled not to increase any more.

8. The method of claim 7, wherein, The step of controlling the temperature of the second temperature zone not to increase any more comprises: the target temperature of the second temperature zone is adjusted from the initial target temperature to the corresponding current temperature until the second target temperature difference is not greater than the third threshold value, and the target temperature of the second temperature zone returns to the corresponding initial target temperature; or the heating of the second temperature zone is stopped until the second target temperature difference is not greater than the third threshold value.

9. The method of claim 1, wherein, After the step of obtaining the plurality of temperature differences, the method further comprises: if at least one of the temperature differences is greater than the first threshold value, the plurality of temperature zones are controlled to stop heating.

10. A semiconductor process apparatus comprising: A bearing device and a controller, characterized in that the controller comprises at least one processor and at least one memory, the memory stores a computer program, and the computer program is executed by the processor to implement the temperature control method of the bearing device according to any one of claims 1-9.

11. A computer readable storage medium characterized by, The computer readable storage medium stores a computer program, and the computer program is executed by the processor to execute the temperature control method of the bearing device according to any one of claims 1-9.

Images