Piezoelectric vibrator adopting multiple layers of metal substrates as electrodes and supports

Abstract

The invention relates to a piezoelectric vibrator adopting multiple layers of metal substrates as electrodes and supports, in particular to an improved design of a piezoelectric vibrator for driving fluid, and the improved design that multiple metal substrates are utilized to realize multiple supports and replace the electrodes and feed leads at the same time.

Description

Technical Field

[0001] An improved design of a piezoelectric oscillator for driving a fluid, which uses a piezoelectric or other electroactive material to reciprocate to drive the oscillator of the fluid, and an improved design of the electrodes and feed leads. Background Art

[0002] The traditional design of a piezoelectric oscillator is to use only one metal substrate as the support suspension of the oscillator and at the same time as one of the two electrodes and leads of the piezoelectric ceramic sheet, as Figure 3 shown. The other electrode lead is a strip line 3 welded to the surface of the electroplated layer of the piezoelectric ceramic sheet. For thin design, the height of the solder joint 4 and / or the height h1 of the strip line brought by processes such as welding are unacceptable. Moreover, the two electrodes adopt different processes: the metal substrate is combined with the piezoelectric ceramic by a sintering process, while the strip line electrode is prepared by electroplating a conductive electrode on the surface of the piezoelectric ceramic and then welding the strip line. Two processes need to be processed separately, with complex processes and many procedures.

[0003] Especially when two piezoelectric ceramic sheets are used as Figure 4 shown, not only a feed lead 3 and an electrode solder joint 4 are needed, but also a shorting wire 5 for shorting the upper and lower piezoelectric ceramics and two solder joints are needed. The height of the oscillator increases a lot, and the suspended shorting wire 5 also increases the defective rate and the randomness of operation. Although there are various technologies such as side electroplated electrodes and central perforation shorting to solve this problem, either the height increase is difficult to solve, or the process is complex, with many procedures, high cost, and high defective rate. Summary of the Invention

[0004] Therefore, a piezoelectric oscillator as Figure 1 shown is designed. It is equivalent to setting a metal substrate on each of the upper and lower sides of Figure 3 . The thickness of the two metal substrates is half of the thickness of the original single metal substrate, that is, the combined thickness of the two metal substrates is equivalent to the thickness of the original single metal substrate. The two metal substrates sandwich the piezoelectric ceramic and are sintered into shape at one time. The two metal substrates form a double support suspension, and the upper and lower hollow elastic sheets are rotated 45 degrees in space, making the support suspension more uniform and having better compliance. Moreover, the upper and lower metal substrates simultaneously serve as the electrodes and leads of the piezoelectric ceramic, and the oscillator is made of two metal substrates and one piezoelectric ceramic through one-time sintering, which is significantly simpler than the original three processes of one-time sintering, one-time electroplating, and one-time welding. And the height of the original oscillator is, in addition to the height h of the metal substrate plus the piezoelectric ceramic, the height of the solder joint or the height h1 of the lead-out strip line. Now it is only the thickness h of the metal substrate plus the piezoelectric ceramic, reducing the height of the solder joint or the height h1 of the lead-out strip line, which is beneficial to the thin design of piezoelectric devices. Description of the Drawings

[0005] Figure 1 It is a schematic diagram of a two-layer metal substrate sandwiching a piezoelectric ceramic in the present application.

[0006] Figure 2 It is a schematic diagram of a three-layer metal substrate sandwiching two piezoelectric ceramics in the present application.

[0007] Figure 3 It is a schematic diagram of a piezoelectric vibrator in the prior art.

[0008] Figure 4 It is a schematic diagram of a piezoelectric vibrator with one metal substrate and two piezoelectric ceramics in the prior art.

[0009] In the figure, 1 is the piezoelectric ceramic, 2 is the metal substrate, 3 is the other electrode and lead wire of the piezoelectric ceramic, 4 is the solder joint of the electrode, and 5 is the short connection wire of the two piezoelectric ceramics. Specific Embodiments

[0010] Combined with the attached Figure 1 and 2 , specific embodiments of the present application are given to further elaborate the design concept of the present application. According to the mechanism proposed in the present application, it can be applied to various electro-driven fluid pumps without creative labor.

[0011] Example 1

[0012] As Figure 1 , on the upper and lower sides of the piezoelectric ceramic sheet 1, two metal substrates 2 are combined through a sintering process. Four zigzag strips are provided with hollowed-out outer peripheral edges of the metal substrates to provide the amplitude and compliance of the up and down deformation of the substrates. For uniformity, the strips of the upper and lower metal substrates are arranged staggeredly at 45 degrees. And the upper and lower metal substrates are also provided with electrodes for feeding, so that the driving signal can be applied to the upper and lower surfaces of the piezoelectric ceramic through the two metal substrates. Since in this design, the thicknesses of the two metal substrates are both half of the thickness of the single metal substrate in the prior art, the total thickness of the vibrator in this design is only that of the single metal substrate plus the piezoelectric ceramic in the prior art Figure 3 with a thickness of h, and the thickness is reduced by the thickness of the original electrode solder joint and / or the height h1 of the lead-out wire. And the process of welding the second electrode is omitted, and the defective rate of the lead-out wire suspended setting is also reduced. And since the original four hollowed-out strips become eight hollowed-out strips on the upper and lower sides and are arranged rotated by 45 degrees, the uniformity of the suspension support is better, and the consistency of the compliance is also improved due to the averaging of the compliance of the two metal substrates.

[0013] Example 2

[0014] As Figure 2As shown, three metal substrates are staggeredly arranged between two layers of piezoelectric ceramics. In order to obtain the same compliance, the thickness of the three metal substrates is 1 / 3 of the thickness of the original single metal substrate. The metal substrates simultaneously serve the functions of suspension support and lead-out electrode leads. The middle metal substrate serves as one electrode, and the upper and lower metal substrates serve as the other electrode. In comparison Figure 4 , an electrode strip line 3 and a solder joint 4 are omitted, as well as a short connection wire 5 and two solder joints 4 on the upper and lower surfaces. In terms of thickness, two h1s are reduced, as well as the thickness of the two solder joints and / or the bending height of the two electrode strip lines. In this example, the height of the oscillator is significantly reduced, the support effect is better, the compliance is more linear, and at the same time, the defect rate of the lead-out strip lines and short connection wires is reduced.

[0015] This application is mainly used for circular oscillators with edge suspension, and can also be used in the oscillator design of various electro-actuators, such as single-arm cantilever beams or double-arm cantilever beams, circular oscillators or other special-shaped oscillators, etc. The thickness is reduced, the process is simple, the number of processes is reduced, the defect rate is reduced, and the technical effect is remarkable.

Claims

1. A piezoelectric vibrator, comprising a piezoelectric ceramic sheet and a metal substrate. The number of layers of the metal substrate is one more than that of the piezoelectric ceramic sheet. The metal substrate and the piezoelectric ceramic sheet are alternately laminated and integrated together after sintering or bonding with a conductive adhesive. The multiple metal substrates simultaneously perform multiple functions of supporting and suspending and / or multiple functions of feeding electrode leads.

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