Waste gas treatment mechanism for photoresist production

Abstract

The invention discloses a waste gas treatment mechanism for photoresist production, and relates to the technical field of waste gas treatment. According to the waste gas treatment mechanism for photoresist production, through cooperation of a gas supply frame and a filtering module, when gas enters the gas supply frame through a gas inlet pipe, waste gas can be stirred and conveyed through a plurality of arc-shaped gas supply pieces through operation of the gas supply frame, so that the waste gas can be exhausted through an exhaust notch after being heated by a heating ring frame; and through cooperation of a plurality of arc-shaped shifting pieces, uniform upward conveying can be achieved, the subsequent contact effect between the waste gas and the spraying liquid and between the waste gas and the filtering module is guaranteed, and the waste gas treatment effect is further improved.

Description

Technical Field

[0001] The invention relates to the technical field of waste gas treatment, in particular to a waste gas treatment mechanism for photoresist production. Background Art

[0002] The technology of photoresist is complex and there are many varieties. Most photoresists are mainly composed of photosensitive resin, sensitizer and solvent. Referring to the Chinese patent, the announcement number is "CN211159172U" "A waste gas exhaust emission device for photoresist production", the patent points out that the harm of photoresist is mainly solvent, and the solvent of negative photoresist is xylene, which is highly toxic and accompanied by alkaline solution. Therefore, in the production process of photoresist, some toxic gases and particulate impurities that are difficult to dissolve in water will be discharged. If the waste gas is not treated, it will cause harm to the environment and human health; but the equipment still has the problem of poor waste gas treatment effect. In this regard, we propose a waste gas treatment mechanism for photoresist production to solve the above problem. Summary of the invention

[0003] In view of the deficiencies in the prior art, the present invention provides a waste gas treatment mechanism for photoresist production, which solves the problems raised in the above-mentioned background technology.

[0004] To achieve the above objectives, the present invention is implemented through the following technical solutions: A waste gas treatment mechanism for photoresist production, comprising a body, the outer side of the body is connected to an air intake pipe for conveying the waste gas to be treated to the inside of the body;

[0005] A spray rack is fixed inside the machine body, and a plurality of spray nozzles are fixedly installed at the bottom of the spray rack, which are used to spray the solution to the transported waste gas through the plurality of spray nozzles for primary filtration. A filter module is provided above the spray rack for secondary filtration of the waste gas after spraying. An upper cover is fixed on the top of the machine body, and a discharge pipe is fixedly connected to the outer side of the upper cover for discharging the gas after the secondary filtration.

[0006] An air supply rack is rotatably connected inside the body, and a driving assembly is provided at the bottom of the air supply rack for driving the air supply rack to rotate inside the body to transport the delivered gas upward; a heating ring rack is rotatably connected inside the air supply rack, and the heating ring rack is used to heat the gas; right-angle positioning racks are provided on both sides of the bottom of the heating ring rack, and the right-angle positioning racks are fixedly connected to the inner wall of the body; a plurality of arc-shaped air supply plates are fixedly installed at the bottom of the air supply rack, a plurality of arc-shaped paddles are fixedly installed at the inner top of the air supply rack, a plurality of exhaust slots are opened inside the air supply rack, and a tapered end is fixed at the inner center position of the air supply rack.

[0007] Preferably, the driving assembly includes a driving shaft rod. A bottom sealing plate is fixedly installed at the bottom of the machine body. The driving shaft rod penetrates through the bottom sealing plate and is rotatably connected thereto. One end of the driving shaft rod located inside the machine body is fixedly connected to a conical end. A servo motor is fixedly installed at the bottom of the bottom sealing plate. Transmission gears are fixedly sleeved on the output end of the servo motor and the outer side of the driving shaft rod respectively, and the two transmission gears mesh with each other.

[0008] Preferably, a plurality of cleaning blades are fixedly installed on the outer side of the air supply frame. The cleaning blades are all attached to the inner wall of the machine body and are used for cleaning impurities adhering to the inner wall of the machine body.

[0009] Preferably, a negative pressure device is fixedly installed on the outer side of the machine body. The negative pressure device is communicated with the spraying frame to transport the spraying liquid into the spraying frame.

[0010] Preferably, a cooling frame is fixedly installed inside the machine body. The installation position of the cooling frame is above the spraying frame, and a plurality of cooling coils are fixedly installed inside the cooling frame.

[0011] Preferably, a conical exhaust frame is fixedly installed above the cooling frame.

[0012] Preferably, a drain pipe is fixedly installed below the inner side of the machine body. The drain pipe is used for automatically discharging the used spraying liquid and impurities.

[0013] Preferably, a plugging piece is slidably installed at the end of the drain pipe, and a buoyancy piece is fixedly installed at the top of the plugging piece.

[0014] Preferably, an assembly frame is slidably installed at the inner top of the machine body. The assembly frame is used for assembling the filtering module. An annular positioning frame is fixedly installed at the top of the assembly frame. A plurality of support springs are fixedly installed between the annular positioning frame and the assembly frame, and a plurality of pressure sensors are fixedly installed at the bottom of the annular positioning frame.

[0015] Preferably, a sealing frame is rotatably connected to the outer side of the machine body. The installation position of the sealing frame is outside the assembly frame.

[0016] The present invention provides an exhaust gas treatment mechanism for photoresist production. Compared with the prior art, the following beneficial effects are achieved:

[0017] (1) The waste gas treatment mechanism for photoresist production, through the cooperation of the air supply frame and the filtration module, when the gas enters the inside of the air supply frame through the air inlet pipe, it can, through the operation of the air supply frame, use multiple arc-shaped air supply vanes to send the waste gas, so that the waste gas can be heated by the heating ring frame and discharged through the exhaust slot, and through the cooperation of multiple arc-shaped paddles, it can be evenly transported upward to ensure the contact effect between the waste gas and the spray liquid and the filtration module later, further improving the treatment effect of the waste gas.

[0018] (2) The waste gas treatment mechanism for photoresist production, through the cooperation of components such as the assembly frame and the annular positioning frame, can drive the assembly frame to move upward when the filtration module is blocked during the filtration process, squeeze the support spring, and replace the filtration module until the pressure sensor exceeds the preset value. On the one hand, it can timely remind to replace the filtration module to ensure the convenience of equipment maintenance, and at the same time can further improve the filtration effect of the waste gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 is a schematic diagram of the sectional structure of the body of the present invention;

[0021] Figure 3 is of the present invention Figure 2 front view structure schematic diagram;

[0022] Figure 4 is of the present invention Figure 3 magnified structure schematic diagram at A in;

[0023] Figure 5 is a schematic diagram of the structure of the air supply frame and the heating ring frame of the present invention;

[0024] Figure 6 is a schematic diagram of the air supply frame structure of the present invention;

[0025] Figure 7 is a schematic diagram of the sectional structure of the spray frame of the present invention;

[0026] Figure 8 is of the present invention Figure 7 magnified structure schematic diagram at B in.

[0027] In the figure: 1. Body; 101. Sealing frame; 2. Intake pipe; 3. Upper cover; 301. Discharge pipe; 4. Spraying frame; 401. Spraying nozzle; 402. Cooling frame; 4021. Cooling coil; 403. Conical exhaust frame; 5. Negative pressure device; 6. Drain pipe; 601. Plugging piece; 602. Buoyancy piece; 7. Bottom sealing plate; 701. Driving shaft rod; 702. Servo motor; 703. Transmission gear; 8. Air supply frame; 801. Cleaning scraper; 802. Arc-shaped air supply piece; 803. Arc-shaped deflector; 804. Exhaust slot; 805. Conical end; 9. Heating ring frame; 901. Right-angle positioning frame; 10. Filter module; 11. Assembly frame; 12. Ring-shaped positioning frame; 1201. Support spring; 13. Pressure sensor. Detailed implementation mode

[0028] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] Please refer to Figures 1-8 , the present invention provides two technical solutions, specifically including the following embodiments:

[0030] Embodiment 1:

[0031] In the embodiment of the present invention, an exhaust gas treatment mechanism for photoresist production includes a body 1, and an intake pipe 2 is connected to the outside of the body 1 for conveying the exhaust gas to be treated into the body 1;

[0032] A spraying frame 4 is fixed inside the body 1, and a plurality of spraying nozzles 401 are fixedly installed at the bottom of the spraying frame 4 for spraying the solution through the plurality of spraying nozzles 401 onto the conveyed exhaust gas for primary filtration. A filter module 10 is provided above the spraying frame 4 for secondary filtration of the sprayed exhaust gas. An upper cover 3 is fixed to the top of the body 1, and a discharge pipe 301 is fixedly connected to the outside of the upper cover 3 for discharging the gas after secondary filtration;

[0033] When treating the exhaust gas, first, the exhaust gas can be introduced into the body 1 through the intake pipe 2, and then, through the cooperation of the spraying frame 4 and the spraying nozzles 401, the spraying liquid is sprayed onto the exhaust gas, so that the toxic gas in the upwardly conveyed exhaust gas can be dissolved by contacting the spraying liquid to complete the first filtration. As the gas continues to rise, it can pass through the filter module 10 to complete the secondary filtration, filtering out the impurities that are difficult to dissolve in the gas. The filtered gas can be discharged through the discharge pipe 301;

[0034] Compared with the traditional processing method, it can improve the filtering effect of waste gas and at the same time enhance the maintenance convenience of the equipment;

[0035] The filtering module 10 is made of existing activated carbon material and is fixedly installed inside the machine body 1 for secondary filtering treatment of waste gas, which will not be elaborated here;

[0036] A gas delivery frame 8 is rotatably connected inside the machine body 1. A driving component is arranged at the bottom of the gas delivery frame 8 for driving the gas delivery frame 8 to rotate inside the machine body 1 to convey the transported gas upward. A heating ring frame 9 is rotatably connected inside the gas delivery frame 8. The heating ring frame 9 is used for heating the gas. Right-angle positioning frames 901 are arranged on both sides of the bottom of the heating ring frame 9, and the right-angle positioning frames 901 are fixedly connected to the inner wall of the machine body 1. A plurality of arc-shaped air delivery vanes 802 are fixedly installed at the bottom of the gas delivery frame 8, a plurality of arc-shaped deflecting vanes 803 are fixedly installed at the top inside the gas delivery frame 8, a plurality of exhaust slots 804 are formed inside the gas delivery frame 8, and a conical end 805 is fixed at the central position inside the gas delivery frame 8;

[0037] The heating ring frame 9 is an existing device for heating the waste gas to realize the treatment operation of toxic gases in the waste gas;

[0038] Specifically, when the gas enters the inside of the gas delivery frame 8 through the air inlet pipe 2, through the operation of the gas delivery frame 8, the waste gas can be deflected by a plurality of arc-shaped air delivery vanes 802, so that the waste gas can be discharged through the exhaust slots 804 after being heated by the heating ring frame 9, and through the cooperation of a plurality of arc-shaped deflecting vanes 803, it can be evenly conveyed upward to ensure the contact effect with the spray liquid and the filtering module 10 subsequently, and further ensure the filtering effect of the waste gas;

[0039] The driving component includes a driving shaft rod 701. A bottom sealing plate 7 is fixedly installed at the bottom of the machine body 1. The driving shaft rod 701 penetrates through the bottom sealing plate 7 and is rotatably connected thereto. One end of the driving shaft rod 701 located inside the machine body 1 is fixedly connected to the conical end 805. A servo motor 702 is fixedly installed at the bottom of the bottom sealing plate 7. Transmission gears 703 are fixedly sleeved on the output end of the servo motor 702 and the outer side of the driving shaft rod 701, and the two transmission gears 703 are meshed with each other;

[0040] By running the servo motor 702, through the cooperation of the transmission gears 703, the driving shaft rod 701 can be driven to rotate, so that the gas delivery frame 8 can rotate inside the machine body 1 with the cooperation of the conical end 805 along with the driving shaft rod 701 to realize the deflection operation of the waste gas;

[0041] A plurality of cleaning blades 801 are fixedly installed on the outer side of the gas delivery frame 8. The cleaning blades 801 are all attached to the inner wall of the machine body 1 for cleaning the impurities adhered to the inner wall of the machine body 1;

[0042] The plurality of cleaning scrapers 801 can scrape off the impurities adhering to the inner wall of the machine body 1 by running along with the air supply rack 8, so that the scraped impurities can be automatically discharged with the spray water after use, further improving the maintenance convenience of the equipment.

[0043] A negative pressure device 5 is fixedly installed on the outside of the machine body 1, and the negative pressure device 5 is connected to the spray rack 4 to transport the spray liquid to the inside of the spray rack 4;

[0044] The negative pressure device 5 is an existing device, which is used to transport the spray water to the inside of the machine body 1 through the spray rack 4, so as to complete the spray treatment of the exhaust gas and facilitate the cleaning of the inside of the machine body 1;

[0045] A cooling rack 402 is fixedly installed inside the machine body 1. The installation position of the cooling rack 402 is located above the spray rack 4. A plurality of cooling coils 4021 are fixedly installed inside the cooling rack 402.

[0046] The heated waste gas is transported upward and contacts the cooling rack 402 after contacting the spray liquid, so that the high-temperature gas in the waste gas can be liquefied and flow downward along the cooling rack 402;

[0047] Specifically, a conical exhaust rack 403 is fixedly installed above the cooling rack 402, and the gas is discharged upward along the conical exhaust rack 403, so that the gas can be evenly contacted with the filter module 10, thereby ensuring the filtering effect;

[0048] A drain pipe 6 is fixedly installed at the lower inner side of the machine body 1, and the drain pipe 6 is used to automatically discharge the used spray liquid and impurities;

[0049] A blocking piece 601 is slidably mounted on the end of the liquid discharge pipe 6, and a buoyancy piece 602 is fixedly mounted on the top of the blocking piece 601;

[0050] When the used spray liquid reaches the bottom of the body 1, as the liquid level rises, the sealing piece 601 can move upward with the cooperation of the buoyancy piece 602, so that the liquid can be automatically discharged through the drain pipe 6. At the same time, it can prevent the exhaust gas from leaking through the drain pipe 6 during the transportation process, thereby improving the operating convenience of the equipment.

[0051] Embodiment 2: Based on embodiment 1, a waste gas treatment mechanism for photoresist production includes a body 1, an air inlet pipe 2 is connected to the outside of the body 1, and is used to transport the waste gas to be treated into the inside of the body 1;

[0052] Inside the machine body 1, a spray rack 4 is fixedly installed. At the bottom of the spray rack 4, a plurality of spray nozzles 401 are fixedly installed, which are used to spray the solution through the plurality of spray nozzles 401 onto the conveyed waste gas for primary filtration. Above the spray rack 4, a filtration module 10 is provided, which is used to perform secondary filtration on the waste gas after spraying. At the top of the machine body 1, an upper cover 3 is fixedly installed. On the outer side of the upper cover 3, an exhaust pipe 301 is fixedly connected, which is used to discharge the gas after secondary filtration;

[0053] When treating the waste gas, first, the waste gas can be introduced into the inside of the machine body 1 through the intake pipe 2. Then, through the cooperation of the spray rack 4 and the spray nozzles 401, the spray liquid is sprayed onto the waste gas, so that the toxic gas in the upwardly conveyed waste gas can be dissolved by contacting the spray liquid to complete the first filtration. As the gas continues to rise, it can pass through the filtration module 10 to complete the secondary filtration, filtering out the impurities that are difficult to dissolve in the gas. The filtered gas can be discharged through the exhaust pipe 301;

[0054] Compared with the traditional treatment method, it can improve the filtration effect of the waste gas and at the same time improve the maintenance convenience of the equipment;

[0055] The filtration module 10 is made of the existing activated carbon material and will not be elaborated here;

[0056] Inside the machine body 1, an air supply rack 8 is rotatably connected. At the bottom of the air supply rack 8, a driving component is provided, which is used to drive the air supply rack 8 to rotate inside the machine body 1 to convey the conveyed gas upward. Inside the air supply rack 8, a heating ring rack 9 is rotatably connected, and the heating ring rack 9 is used to heat the gas. On both sides of the bottom of the heating ring rack 9, right-angle positioning brackets 901 are provided, and the right-angle positioning brackets 901 are fixedly connected to the inner wall of the machine body 1. At the bottom of the air supply rack 8, a plurality of arc-shaped air supply vanes 802 are fixedly installed. At the top inside the air supply rack 8, a plurality of arc-shaped deflectors 803 are fixedly installed. Inside the air supply rack 8, a plurality of exhaust slots 804 are opened. At the central position inside the air supply rack 8, a conical end 805 is fixed;

[0057] The heating ring rack 9 is an existing device, which is used to heat-treat the waste gas to realize the treatment operation of the toxic gas in the waste gas;

[0058] Specifically, when the gas enters the inside of the air supply rack 8 through the intake pipe 2, through the operation of the air supply rack 8, the waste gas can be deflected by the plurality of arc-shaped air supply vanes 802, so that the waste gas can be heated by the heating ring rack 9 and then discharged through the exhaust slots 804. Through the cooperation of the plurality of arc-shaped deflectors 803, it can be evenly conveyed upward to ensure the contact effect with the spray liquid and the filtration module 10 later, and further ensure the filtration effect of the waste gas;

[0059] The driving assembly includes a driving shaft 701. A bottom sealing plate 7 is fixedly installed at the bottom of the machine body 1. The driving shaft 701 penetrates the bottom sealing plate 7 and is rotatably connected thereto. One end of the driving shaft 701 located inside the machine body 1 is fixedly connected to a conical end 805. A servo motor 702 is fixedly installed at the bottom of the bottom sealing plate 7. A transmission gear 703 is fixedly sleeved on the output end of the servo motor 702 and the outer side of the driving shaft 701. The two transmission gears 703 are meshed with each other.

[0060] The servo motor 702 is operated to drive the driving shaft 701 to rotate through the cooperation of the transmission gear 703, so that the air delivery frame 8 can cooperate with the tapered end 805 and realize the exhaust gas delivery operation as the driving shaft 701 rotates inside the body 1;

[0061] A plurality of cleaning scrapers 801 are fixedly mounted on the outer side of the air delivery frame 8. The cleaning scrapers 801 are all in contact with the inner wall of the body 1 and are used to clean the impurities attached to the inner wall of the body 1.

[0062] The plurality of cleaning scrapers 801 can scrape off the impurities adhering to the inner wall of the machine body 1 by running along with the air supply rack 8, so that the scraped impurities can be automatically discharged with the spray water after use, further improving the maintenance convenience of the equipment.

[0063] A negative pressure device 5 is fixedly installed on the outside of the machine body 1, and the negative pressure device 5 is connected to the spray rack 4 to transport the spray liquid to the inside of the spray rack 4;

[0064] The negative pressure device 5 is an existing device, which is used to transport the spray water to the inside of the machine body 1 through the spray rack 4, so as to complete the spray treatment of the exhaust gas and facilitate the cleaning of the inside of the machine body 1;

[0065] A cooling rack 402 is fixedly installed inside the machine body 1. The installation position of the cooling rack 402 is located above the spray rack 4. A plurality of cooling coils 4021 are fixedly installed inside the cooling rack 402.

[0066] The heated waste gas is transported upward and contacts the cooling rack 402 after contacting the spray liquid, so that the high-temperature gas in the waste gas can be liquefied and flow downward along the cooling rack 402;

[0067] Specifically, a conical exhaust rack 403 is fixedly installed above the cooling rack 402, and the gas is discharged upward along the conical exhaust rack 403, so that the gas can be evenly contacted with the filter module 10, thereby ensuring the filtering effect;

[0068] A drain pipe 6 is fixedly installed at the lower inner side of the machine body 1, and the drain pipe 6 is used to automatically discharge the used spray liquid and impurities;

[0069] A sealing piece 601 is slidably installed at the end of the drain pipe 6, and a buoyancy piece 602 is fixedly installed at the top of the sealing piece 601;

[0070] When the used spray liquid reaches the bottom of the machine body 1, as the liquid level rises, the sealing piece 601 can move upward through the cooperation of the buoyancy piece 602, enabling the liquid to be automatically discharged through the drain pipe 6. At the same time, it can prevent waste gas from leaking through the drain pipe 6 during transportation, improving the operation convenience of the equipment;

[0071] An assembly frame 11 is slidably installed at the inner top of the machine body 1. The assembly frame 11 is used to assemble the filtration module 10. A ring-shaped positioning frame 12 is fixedly installed at the top of the assembly frame 11. A plurality of support springs 1201 are fixedly installed between the ring-shaped positioning frame 12 and the assembly frame 11. A plurality of pressure sensors 13 are fixedly installed at the bottom of the ring-shaped positioning frame 12;

[0072] A sealing frame 101 is rotatably connected to the outside of the machine body 1, and the installation position of the sealing frame 101 is located outside the assembly frame 11

[0073] Specifically, the filtration module 10 is inserted into the inside of the assembly frame 11. During use, as impurities accumulate inside the filtration module 10, the assembly frame 11 can be forced to slide upward, squeezing the support springs 1201 until the pressure sensors 13 exceed the preset value and then replacing the filtration module 10;

[0074] When replacing, open the sealing frame 101 and then replace the filtration module 10;

[0075] Specifically, the pressure sensor 13 is an existing device and will not be elaborated here.

[0076] At the same time, the content not described in detail in this specification belongs to the prior art well-known to those skilled in the art.

[0077] The above has described an embodiment of the present invention in detail, but the described content is only a preferred embodiment of the present invention and cannot be considered as limiting the scope of implementation of the present invention. Any equivalent changes and improvements made according to the scope of the present invention application should still fall within the scope covered by the present invention.

Claims

1. A waste gas treatment mechanism for photoresist production, comprising a body (1), characterized in that: An air intake pipe (2) is connected to the outside of the machine body (1) and is used to transport the waste gas to be treated into the inside of the machine body (1); A spray rack (4) is fixed inside the machine body (1), and a plurality of spray nozzles (401) are fixedly installed at the bottom of the spray rack (4) for spraying a solution through the plurality of spray nozzles (401) toward the transported waste gas for primary filtration. A filter module (10) is provided above the spray rack (4) for secondary filtration of the waste gas after spraying. An upper cover (3) is fixed on the top of the machine body (1), and a discharge pipe (301) is fixedly connected to the outer side of the upper cover (3) for discharging the gas after the secondary filtration. The body (1) is rotatably connected to an air supply frame (8), the bottom of the air supply frame (8) is provided with a driving assembly for driving the air supply frame (8) to rotate inside the body (1) to transport the transported gas upwards, the inner side of the air supply frame (8) is rotatably connected to a heating ring frame (9), the heating ring frame (9) is used to heat the gas, both sides of the bottom of the heating ring frame (9) are provided with right-angle positioning frames (901), the right-angle positioning frames (901) are fixedly connected to the inner wall of the body (1), a plurality of arc-shaped air supply plates (802) are fixedly installed at the bottom of the air supply frame (8), a plurality of arc-shaped paddles (803) are fixedly installed at the top of the inner side of the air supply frame (8), a plurality of exhaust slots (804) are opened inside the air supply frame (8), and a conical end (805) is fixed at the inner center position of the air supply frame (8).

2. The waste gas treatment mechanism for photoresist production according to claim 1, characterized in that: The driving assembly comprises a driving shaft (701), a bottom sealing plate (7) is fixedly mounted on the bottom of the machine body (1), the driving shaft (701) passes through the bottom sealing plate (7) and is rotatably connected thereto, one end of the driving shaft (701) located inside the machine body (1) is fixedly connected to a conical end (805), a servo motor (702) is fixedly mounted on the bottom of the bottom sealing plate (7), and a transmission gear (703) is fixedly sleeved on the output end of the servo motor (702) and the outer side of the driving shaft (701), and the two transmission gears (703) are meshed with each other.

3. The waste gas treatment mechanism for photoresist production according to claim 1, characterized in that: A plurality of cleaning scrapers (801) are fixedly mounted on the outer side of the air supply frame (8), and the cleaning scrapers (801) are all in contact with the inner wall of the machine body (1) and are used to clean impurities attached to the inner wall of the machine body (1).

4. The waste gas treatment mechanism for photoresist production according to claim 1, characterized in that: A negative pressure device (5) is fixedly mounted on the outside of the machine body (1); the negative pressure device (5) and the spray rack (4) are in communication with each other and are used to transport spray liquid to the inside of the spray rack (4).

5. The waste gas treatment mechanism for photoresist production according to claim 1, characterized in that: A cooling rack (402) is fixedly installed inside the machine body (1), the installation position of the cooling rack (402) is located above the spray rack (4), and a plurality of cooling coils (4021) are fixedly installed inside the cooling rack (402).

6. The waste gas treatment mechanism for photoresist production according to claim 5, characterized in that: A conical exhaust rack (403) is fixedly installed above the cooling rack (402).

7. The waste gas treatment mechanism for photoresist production according to claim 1, characterized in that: A liquid discharge pipe (6) is fixedly installed at the lower inner side of the machine body (1), and the liquid discharge pipe (6) is used to automatically discharge the used spray liquid and impurities.

8. The waste gas treatment mechanism for photoresist production according to claim 7, characterized in that: A blocking piece (601) is slidably mounted on the end of the liquid discharge pipe (6), and a buoyancy piece (602) is fixedly mounted on the top of the blocking piece (601).

9. The waste gas treatment mechanism for photoresist production according to claim 1, characterized in that: An assembly frame (11) is slidably mounted on the inner top of the machine body (1), the assembly frame (11) being used to assemble the filter module (10), an annular positioning frame (12) being fixedly mounted on the top of the assembly frame (11), a plurality of supporting springs (1201) being fixedly mounted between the annular positioning frame (12) and the assembly frame (11), and a plurality of pressure sensors (13) being fixedly mounted on the bottom of the annular positioning frame (12).

10. The waste gas treatment mechanism for photoresist production according to claim 9, characterized in that: The outer side of the machine body (1) is rotatably connected to a sealing frame (101), and the installation position of the sealing frame (101) is located on the outer side of the assembly frame (11).

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