A waste gas treatment mechanism for photoresist production

Abstract

The application discloses a waste gas treatment mechanism for photoresist production and relates to the technical field of waste gas treatment. The waste gas treatment mechanism for photoresist production can, through cooperation of a gas feeding frame and a filtering module, when gas enters the gas feeding frame through the gas inlet pipe, make the waste gas be sent by the multiple arc-shaped gas feeding pieces through the operation of the gas feeding frame, make the waste gas be heated by the heating ring frame and then be discharged through the exhaust slot, and make the waste gas be uniformly sent upward through cooperation of the multiple arc-shaped pieces, thereby guaranteeing the contact effect between the waste gas and the spraying liquid and the filtering module in the future and further improving the treatment effect on the waste gas.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of waste gas treatment, in particular to a waste gas treatment mechanism for photoresist production. BACKGROUND

[0002] Photoresist is complex in technology and various in types, and most photoresists are mainly composed of photosensitive resin, sensitizer and solvent; according to a photoresist production waste gas tail gas emission device (CN211159172U) disclosed in a Chinese patent, the harm of photoresist is mainly caused by solvent, and the solvent of negative photoresist is dimethylbenzene which is highly toxic and is accompanied by alkaline solution, so that some toxic gases and water-insoluble particle impurities are discharged in the photoresist production process, and if the waste gas is not treated, the environment and personal health are harmed; however, the device still has the problem of poor waste gas treatment effect, and the photoresist production waste gas treatment mechanism is proposed to solve the above problems. SUMMARY

[0003] In view of the defects of the prior art, the photoresist production waste gas treatment mechanism is provided to solve the problems in the background art.

[0004] To achieve the above purpose, the following technical scheme is adopted: a waste gas treatment mechanism for photoresist production, comprising a machine body, an air inlet pipe connected to the outer side of the machine body and used for conveying waste gas to be treated into the machine body;

[0005] A spraying frame is fixedly arranged in the machine body, a plurality of spraying nozzles are fixedly arranged at the bottom of the spraying frame and used for spraying the solution to the conveyed waste gas through the plurality of spraying nozzles for primary filtration, a filter module is arranged above the spraying frame and used for secondary filtration of the sprayed waste gas, an upper cover is fixedly arranged at the top of the machine body, and a discharge pipe is fixedly connected to the outer side of the upper cover and used for discharging the secondary-filtered gas.

[0006] A gas conveying frame is rotatably connected to the inside of the machine body, a driving assembly is arranged at the bottom of the gas conveying frame and used for driving the gas conveying frame to rotate in the machine body and conveying the conveyed gas upward, a heating ring frame is rotatably connected to the inner side of the gas conveying frame and used for heating the gas, right-angle positioning frames are arranged at the bottom of the heating ring frame on both sides and fixedly connected to the inner wall of the machine body, a plurality of arc-shaped gas conveying pieces are fixedly arranged at the bottom of the gas conveying frame, a plurality of arc-shaped pushing pieces are fixedly arranged at the top of the inner side of the gas conveying frame, a plurality of gas discharge grooves are arranged in the gas conveying frame, and a conical end is fixedly arranged at the central position in the gas conveying frame.

[0007] Preferably, the driving assembly comprises a driving shaft, the bottom of the machine body is fixedly provided with a bottom sealing plate, the driving shaft penetrates through the bottom sealing plate and is rotationally connected with the bottom sealing plate, one end of the driving shaft located in the machine body is fixedly connected to a conical end, the bottom of the bottom sealing plate is fixedly provided with a servo motor, the output end of the servo motor and the outer side of the driving shaft are fixedly sleeved with transmission gears, and the two transmission gears are in meshing connection.

[0008] Preferably, the outer side of the air feeding frame is fixedly provided with a plurality of cleaning blades, the cleaning blades are in abutment with the inner wall of the machine body, and the cleaning blades are used for cleaning impurities adhered to the inner wall of the machine body.

[0009] Preferably, the outer side of the machine body is fixedly provided with a negative pressure device, the negative pressure device and the spraying frame are in communication, and the negative pressure device is used for conveying spraying liquid to the inside of the spraying frame.

[0010] Preferably, the machine body is fixedly provided with a cooling frame in the inside, the installation position of the cooling frame is located above the spraying frame, and a plurality of cooling coils are fixedly arranged in the inside of the cooling frame.

[0011] Preferably, a conical exhaust frame is fixedly arranged above the cooling frame.

[0012] Preferably, a liquid discharge pipe is fixedly arranged below the inner side of the machine body, and the liquid discharge pipe is used for automatically discharging used spraying liquid and impurities.

[0013] Preferably, a blocking piece is slidingly arranged at the end of the liquid discharge pipe, and a buoyancy piece is fixedly arranged at the top of the blocking piece.

[0014] Preferably, an assembly frame is slidingly arranged at the top of the inner side of the machine body, the assembly frame is used for assembling the filter module, an annular positioning frame is fixedly arranged at the top of the assembly frame, a plurality of supporting springs are fixedly arranged between the annular positioning frame and the assembly frame, and a plurality of pressure sensors are fixedly arranged at the bottom of the annular positioning frame.

[0015] Preferably, a sealing frame is rotationally connected to the outer side of the machine body, and the installation position of the sealing frame is located at the outer side of the assembly frame.

[0016] The application provides a waste gas treatment mechanism for photoresist production.

[0017] (1) The waste gas treatment mechanism for photoresist production, through the cooperation of the air supply frame and the filtering module, when the gas enters the air supply frame through the air inlet pipe, the waste gas can be sent by the multiple arc-shaped air supply pieces through the operation of the air supply frame, so that the waste gas can be heated by the heating ring frame and then discharged through the exhaust slot, and through the cooperation of the multiple arc-shaped pieces, it can be uniformly upward, ensuring the contact effect between the waste gas and the spray liquid and the filtering module, and further improving the treatment effect of the waste gas.

[0018] (2) The waste gas treatment mechanism for photoresist production, through the cooperation of the assembly frame and the ring-shaped positioning frame and other components, when the filtering module is blocked during the filtering process, the assembly frame is driven to move upwards, the supporting spring is squeezed, and the filtering module is replaced when the pressure sensor exceeds the preset value, which can timely remind the replacement of the filtering module, ensure the maintenance convenience of the equipment, and further improve the filtering effect of the waste gas. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the application;

[0020] Figure 2 It is a schematic diagram of the body cross-section structure of the application;

[0021] Figure 3 It is a schematic diagram of the application Figure 2 front view structure;

[0022] Figure 4 It is a schematic diagram of the application Figure 3 enlarged structure at A;

[0023] Figure 5 It is a schematic diagram of the air supply frame and the heating ring frame structure of the application;

[0024] Figure 6 It is a schematic diagram of the air supply frame structure of the application;

[0025] Figure 7 It is a schematic diagram of the spray frame cross-section structure of the application;

[0026] Figure 8 It is a schematic diagram of the application Figure 7 enlarged structure at B.

[0027] In the figure: 1, body; 101, sealing frame; 2, air inlet pipe; 3, upper cover; 301, discharge pipe; 4, spray frame; 401, spray nozzle; 402, cooling frame; 4021, cooling coil; 403, conical exhaust frame; 5, negative pressure device; 6, liquid discharge pipe; 601, blocking piece; 602, buoyancy piece; 7, bottom sealing plate; 701, drive shaft; 702, servo motor; 703, transmission gear; 8, air supply frame; 801, cleaning blade; 802, arc-shaped air supply piece; 803, arc-shaped stirring piece; 804, exhaust notch; 805, conical end; 9, heating ring frame; 901, right-angle positioning frame; 10, filter module; 11, assembly frame; 12, ring positioning frame; 1201, supporting spring; 13, pressure sensor. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0029] Please refer to Figures 1-8 The present application provides two technical solutions, specifically including the following embodiments:

[0030] Embodiment one:

[0031] In the embodiments of the present application, a waste gas treatment mechanism for photoresist production includes a body 1, an air inlet pipe 2 connected to the outside of the body 1 for conveying waste gas to be treated into the body 1;

[0032] A spray frame 4 is fixed inside the body 1, and a plurality of spray nozzles 401 are fixedly installed at the bottom of the spray frame 4 for spraying the solution to the conveyed waste gas through the plurality of spray nozzles 401 for primary filtration. A filter module 10 is arranged above the spray frame 4 for secondary filtration of the sprayed waste gas. An upper cover 3 is fixed at the top of the body 1, and a discharge pipe 301 is fixedly connected to the outside of the upper cover 3 for discharging the secondary filtered gas.

[0033] When treating the waste gas, the waste gas is first introduced into the body 1 through the air inlet pipe 2, and then the spray liquid is sprayed to the waste gas through the cooperation of the spray frame 4 and the spray nozzles 401, so that the toxic gas in the upwardly conveyed waste gas can be dissolved by contacting with the spray liquid to complete the first filtration. As the gas continues to rise, it can pass through the filter module 10 to complete the secondary filtration, filter out the impurities that are difficult to dissolve, and the filtered gas can be discharged through the discharge pipe 301;

[0034] Compared with the traditional processing mode, the filtering effect of the exhaust gas can be improved, and the maintenance convenience of the equipment is improved.

[0035] The filter module 10 is made of existing activated carbon material, fixedly installed in the body 1, used for secondary filtering treatment of the exhaust gas, which will not be repeated here.

[0036] The inside of the body 1 is rotatably connected with the gas supply frame 8, the bottom of the gas supply frame 8 is provided with a driving assembly for driving the gas supply frame 8 to rotate in the body 1, the gas supply frame 8 is rotatably connected with the heating ring frame 9, the heating ring frame 9 is used for heating the gas, the bottom of the heating ring frame 9 is provided with a right angle type positioning frame 901, the right angle type positioning frame 901 is fixedly connected to the inner wall of the body 1, the bottom of the gas supply frame 8 is fixedly installed with a plurality of arc-shaped gas supply pieces 802, the inside top of the gas supply frame 8 is fixedly installed with a plurality of arc-shaped pushing pieces 803, a plurality of exhaust slots 804 are formed in the inside of the gas supply frame 8, and a conical end 805 is fixedly arranged at the inside center position of the gas supply frame 8.

[0037] The heating ring frame 9 is an existing device for heating treatment of the exhaust gas, realizing the treatment of toxic gas in the exhaust gas.

[0038] Specifically, when the gas enters the inside of the gas supply frame 8 through the gas inlet pipe 2, the gas can be pushed by the plurality of arc-shaped gas supply pieces 802 through the operation of the gas supply frame 8, so that the exhaust gas can be heated by the heating ring frame 9 and then discharged through the exhaust slots 804, and the exhaust gas can be uniformly upwardly conveyed through the cooperation of the plurality of arc-shaped pushing pieces 803, so as to ensure the contact effect with the spraying liquid and the filter module 10, and further ensure the filtering effect of the exhaust gas.

[0039] The driving assembly comprises a driving shaft 701, the bottom of the body 1 is fixedly installed with a bottom sealing plate 7, the driving shaft 701 penetrates through the bottom sealing plate 7 and is rotatably connected with the bottom sealing plate 7, one end of the driving shaft 701 located in the inside of the body 1 is fixedly connected to the conical end 805, the bottom of the bottom sealing plate 7 is fixedly installed with a servo motor 702, the output end of the servo motor 702 and the outside of the driving shaft 701 are fixedly sleeved with a transmission gear 703, and the two transmission gears 703 are meshed with each other.

[0040] Through the operation of the servo motor 702, the driving shaft 701 can be driven to rotate through the cooperation of the transmission gears 703, so that the gas supply frame 8 can be driven to rotate in the body 1 through the cooperation of the conical end 805, and the pushing operation of the exhaust gas can be realized.

[0041] The outside of the gas supply frame 8 is fixedly installed with a plurality of cleaning blades 801, the cleaning blades 801 are in close contact with the inner wall of the body 1, and are used for cleaning the impurities adhered to the inner wall of the body 1.

[0042] By the operation of the plurality of cleaning blades 801 with the air supply frame 8, the impurities adhered to the inner wall of the body 1 can be scraped off, so that the scraped impurities can be automatically discharged with the used spray water, further improving the maintenance convenience of the equipment

[0043] The outer side of the body 1 is fixedly provided with a negative pressure device 5, which is in communication with the spray frame 4, for conveying the spray liquid to the inside of the spray frame 4.

[0044] The negative pressure device 5 is an existing device for conveying the spray water to the inside of the body 1 through the spray frame 4, which can complete the spray treatment of the exhaust gas and facilitate the cleaning of the inside of the body 1.

[0045] The inside of the body 1 is fixedly provided with a cooling frame 402, and the installation position of the cooling frame 402 is above the spray frame 4. A plurality of cooling coils 4021 are fixedly installed in the inside of the cooling frame 402.

[0046] After the heated exhaust gas contacts the spray liquid, it is conveyed to contact the cooling frame 402, so that the high-temperature gas in the exhaust gas can be liquefied and flow downward along the cooling frame 402.

[0047] Specifically, a conical exhaust frame 403 is fixedly installed above the cooling frame 402. By discharging the gas upward along the conical exhaust frame 403, the gas can be uniformly contacted with the filter module 10 to ensure the filtering effect.

[0048] A liquid discharge pipe 6 is fixedly installed below the inside of the body 1, and the liquid discharge pipe 6 is used to automatically discharge the used spray liquid and impurities.

[0049] A blocking piece 601 is slidingly installed at the end of the liquid discharge pipe 6, and a buoyancy piece 602 is fixedly installed at the top of the blocking piece 601.

[0050] When the used spray liquid reaches the bottom of the body 1, the blocking piece 601 can be moved upward by the cooperation of the buoyancy piece 602 as the liquid level rises, so that the liquid can be automatically discharged through the liquid discharge pipe 6, and at the same time, the exhaust gas can be prevented from leaking through the liquid discharge pipe 6 during conveying, improving the operation convenience of the equipment.

[0051] Embodiment two: based on embodiment one, a waste gas treatment mechanism for photoresist production, comprising a body 1, the outer side of the body 1 is connected with an air inlet pipe 2, which is used to convey the waste gas to be treated to the inside of the body 1.

[0052] The inside of the body 1 is fixed with a spray frame 4, the bottom of the spray frame 4 is fixedly installed with a plurality of spray nozzles 401, which are used to spray the solution to the conveyed waste gas through the plurality of spray nozzles 401 to perform primary filtration, the upper side of the spray frame 4 is provided with a filter module 10 for secondary filtration of the sprayed waste gas, and the top of the body 1 is fixed with an upper cover 3, and the outer side of the upper cover 3 is fixedly connected with a discharge pipe 301 for discharging the secondary filtered gas;

[0053] When the waste gas is treated, the waste gas can be first introduced into the body 1 through the air inlet pipe 2, and then the spray liquid can be sprayed to the waste gas through the cooperation of the spray frame 4 and the spray nozzles 401, so that the toxic gas in the upwardly conveyed waste gas can be dissolved by contacting with the spray liquid to complete the first filtration, and as the gas continues to rise, the gas can pass through the filter module 10 to complete the secondary filtration to filter out the impurities difficult to dissolve, and the filtered gas can be discharged through the discharge pipe 301;

[0054] Compared with the traditional treatment method, the filtration effect of the waste gas can be improved, and the maintenance convenience of the equipment can be improved;

[0055] The filter module 10 is made of existing activated carbon material, which will not be described here;

[0056] The inside of the body 1 is rotatably connected with a gas conveying frame 8, the bottom of the gas conveying frame 8 is provided with a driving assembly for driving the gas conveying frame 8 to rotate in the body 1 to convey the conveyed gas upward, the inner side of the gas conveying frame 8 is rotatably connected with a heating ring frame 9, the heating ring frame 9 is used for heating the gas, the bottom of the heating ring frame 9 is provided with a right-angle positioning frame 901 on both sides, the right-angle positioning frame 901 is fixedly connected to the inner wall of the body 1, the bottom of the gas conveying frame 8 is fixedly installed with a plurality of arc-shaped gas conveying pieces 802, the inner top of the gas conveying frame 8 is fixedly installed with a plurality of arc-shaped pushing pieces 803, a plurality of gas discharge slots 804 are formed in the gas conveying frame 8, and a conical end 805 is fixedly arranged at the center of the inside of the gas conveying frame 8;

[0057] The heating ring frame 9 is an existing device for heating treatment of the waste gas to realize the treatment of the toxic gas in the waste gas;

[0058] Specifically, when the gas enters the inside of the gas conveying frame 8 through the air inlet pipe 2, the gas can be pushed by the plurality of arc-shaped gas conveying pieces 802 through the operation of the gas conveying frame 8, so that the gas can be heated by the heating ring frame 9 and then discharged through the gas discharge slots 804, and the gas can be uniformly conveyed upward through the cooperation of the plurality of arc-shaped pushing pieces 803 to ensure the contact effect with the spray liquid and the filter module 10, and further ensure the filtration effect of the waste gas;

[0059] The driving assembly comprises a driving shaft 701, the bottom of the machine body 1 is fixedly provided with a bottom sealing plate 7, the driving shaft 701 penetrates through the bottom sealing plate 7 and is rotationally connected with the bottom sealing plate 7, one end of the driving shaft 701 located inside the machine body 1 is fixedly connected to a conical end head 805, the bottom of the bottom sealing plate 7 is fixedly provided with a servo motor 702, the output end of the servo motor 702 and the outer side of the driving shaft 701 are fixedly sleeved with transmission gears 703, and the two transmission gears 703 are in meshing connection with each other;

[0060] Through the operation of the servo motor 702, the driving shaft 701 can be driven to rotate through the cooperation of the transmission gears 703, so that the gas feeding frame 8 can be driven to rotate with the driving shaft 701 inside the machine body 1 through the cooperation of the conical end head 805, thereby realizing the pushing and feeding operation of the exhaust gas;

[0061] A plurality of cleaning blades 801 are fixedly installed on the outer side of the gas feeding frame 8, and the cleaning blades 801 are in abutment with the inner wall of the machine body 1 and are used for cleaning the impurities adhered to the inner wall of the machine body 1;

[0062] Through the operation of the plurality of cleaning blades 801 along with the gas feeding frame 8, the impurities adhered to the inner wall of the machine body 1 can be scraped off, so that the scraped impurities can be automatically discharged along with the used spraying water, thereby further improving the maintenance convenience of the equipment

[0063] A negative pressure device 5 is fixedly installed on the outer side of the machine body 1 and is in communication with the spraying frame 4, and is used for conveying the spraying liquid into the spraying frame 4;

[0064] The negative pressure device 5 is an existing device, which is used for conveying the spraying water into the machine body 1 through the spraying frame 4, thereby completing the spraying treatment of the exhaust gas and facilitating the cleaning of the inside of the machine body 1;

[0065] A cooling frame 402 is fixedly installed inside the machine body 1, and the installation position of the cooling frame 402 is located above the spraying frame 4, and a plurality of cooling coils 4021 are fixedly installed inside the cooling frame 402;

[0066] After the heated exhaust gas contacts the spraying liquid, the exhaust gas is conveyed to contact the cooling frame 402, so that the high-temperature gas in the exhaust gas can be liquefied and flow downward along the cooling frame 402;

[0067] Specifically, a conical exhaust frame 403 is fixedly installed above the cooling frame 402, and the gas is discharged upward along the conical exhaust frame 403, so that the gas can uniformly contact the filter module 10, thereby ensuring the filtering effect;

[0068] A liquid discharge pipe 6 is fixedly installed at the lower inner side of the machine body 1, and is used for automatically discharging the used spraying liquid and impurities;

[0069] The end of the liquid discharge pipe 6 is slidingly installed with a blocking sheet 601, and the top of the blocking sheet 601 is fixedly installed with a buoyancy sheet 602;

[0070] When the spraying liquid after use reaches the bottom of the machine body 1, the blocking sheet 601 can be moved upward by the cooperation of the buoyancy sheet 602 as the liquid level rises, so that the liquid can be automatically discharged through the liquid discharge pipe 6, and at the same time, the exhaust gas can be prevented from leaking through the liquid discharge pipe 6 during transportation, thereby improving the operation convenience of the equipment;

[0071] The inner top of the machine body 1 is slidingly installed with an assembly frame 11, and the assembly frame 11 is used for assembling the filter module 10. The top of the assembly frame 11 is fixedly installed with an annular positioning frame 12, and a plurality of supporting springs 1201 are fixedly installed between the annular positioning frame 12 and the assembly frame 11. The bottom of the annular positioning frame 12 is fixedly installed with a plurality of pressure sensors 13.

[0072] The outer side of the machine body 1 is rotationally connected with a sealing frame 101, and the installation position of the sealing frame 101 is located outside the assembly frame 11

[0073] Specifically, the filter module 10 is inserted into the inside of the assembly frame 11. When in use, as impurities are deposited in the filter module 10, the assembly frame 11 can be forced to slide upward, so as to press the supporting springs 1201, until the pressure sensor 13 exceeds the preset value, and then the filter module 10 is replaced.

[0074] When replacing, the sealing frame 101 is opened, and then the filter module 10 is replaced.

[0075] Specifically, the pressure sensor 13 is an existing device, and details are not described here.

[0076] Meanwhile, the contents not described in detail in the specification all belong to the prior art known to those skilled in the art.

[0077] The above has described one embodiment of the present application in detail, but the content described is only the preferred embodiment of the present application, and cannot be considered as limiting the scope of the implementation of the present application. Any equivalent changes and improvements made according to the scope of the present application should still belong to the scope of the present application.

Claims

1. A waste gas treatment mechanism for photoresist production, comprising a body (1), characterized in that: The outer side of the body (1) is connected with an air inlet pipe (2) for conveying the exhaust gas to be treated into the body (1); The inside of the body (1) is fixedly provided with a spraying frame (4), the bottom of the spraying frame (4) is fixedly provided with a plurality of spraying nozzles (401), which are used for spraying the solution to the conveyed exhaust gas through the plurality of spraying nozzles (401) to perform primary filtration, the upper side of the spraying frame (4) is provided with a filter module (10) for performing secondary filtration on the sprayed exhaust gas, and the top of the body (1) is fixedly provided with an upper cover (3), the outer side of the upper cover (3) is fixedly connected with a discharge pipe (301) for discharging the secondary filtered gas. The inside of the body (1) is rotatably connected with a gas conveying frame (8), the bottom of the gas conveying frame (8) is provided with a driving assembly for driving the gas conveying frame (8) to rotate in the body (1) to convey the conveyed gas upward, the inner side of the gas conveying frame (8) is rotatably connected with a heating ring frame (9) for heating the gas, the bottom of the heating ring frame (9) is provided with a right-angle positioning frame (901) on both sides, the right-angle positioning frame (901) is fixedly connected to the inner wall of the body (1), the bottom of the gas conveying frame (8) is fixedly provided with a plurality of arc-shaped gas conveying pieces (802), the inner top of the gas conveying frame (8) is fixedly provided with a plurality of arc-shaped pushing pieces (803), and a plurality of gas discharge slots (804) are formed in the gas conveying frame (8), and a conical end (805) is fixedly arranged at the central position in the gas conveying frame (8). The driving assembly comprises a driving shaft (701), the bottom of the body (1) is fixedly provided with a bottom sealing plate (7), the driving shaft (701) penetrates through the bottom sealing plate (7) and is rotatably connected therewith, one end of the driving shaft (701) located in the body (1) is fixedly connected to the conical end (805), the bottom of the bottom sealing plate (7) is fixedly provided with a servo motor (702), the output end of the servo motor (702) and the outer side of the driving shaft (701) are fixedly sleeved with a transmission gear (703), the two transmission gears (703) are meshed with each other, the outer side of the gas conveying frame (8) is fixedly provided with a plurality of cleaning blades (801), the cleaning blades (801) are in close contact with the inner wall of the body (1) for cleaning the impurities adhered to the inner wall of the body (1), the inner top of the body (1) is slidably provided with an assembly frame (11) for assembling the filter module (10), the top of the assembly frame (11) is fixedly provided with an annular positioning frame (12), a plurality of supporting springs (1201) are fixedly arranged between the annular positioning frame (12) and the assembly frame (11), and the bottom of the annular positioning frame (12) is fixedly provided with a plurality of pressure sensors (13).

2. The waste gas treatment mechanism for photoresist production according to claim 1, characterized in that: The outer side of the body (1) is fixedly provided with a negative pressure device (5), the negative pressure device (5) and the spraying frame (4) are in communication with each other for conveying the spraying liquid into the spraying frame (4).

3. The waste gas treatment mechanism for photoresist production according to claim 1, characterized in that: The body (1) is internally fixedly installed with a cooling frame (402), the installation position of the cooling frame (402) is above the spraying frame (4), and the inside of the cooling frame (402) is fixedly installed with a plurality of cooling coils (4021).

4. The waste gas treatment mechanism for photoresist production according to claim 3, characterized in that: A conical exhaust frame (403) is fixedly installed above the cooling frame (402).

5. The waste gas treatment mechanism for photoresist production according to claim 1, characterized in that: A liquid discharge pipe (6) is fixedly installed below the inner side of the body (1), and is used for automatically discharging the spraying liquid after use and impurities.

6. The waste gas treatment mechanism for photoresist production according to claim 5, characterized in that: A blocking sheet (601) is slidingly installed at the end of the liquid discharge pipe (6), and a buoyancy sheet (602) is fixedly installed at the top of the blocking sheet (601). 7.The waste gas treatment mechanism for photoresist production of claim 1, characterized in that: A sealing frame (101) is rotationally connected to the outer side of the body (1), and the installation position of the sealing frame (101) is on the outer side of the assembling frame (11).

Images