Slide clamping mechanism and detection equipment

Abstract

The invention provides a slide clamping mechanism, and relates to the technical field of semiconductors. The slide clamping mechanism base is provided with a mounting area for placing a slide, and the two groups of clamping assemblies are respectively positioned on two sides of the mounting area; each clamping assembly comprises at least one clamping device, the clamping device comprises a clamping piece, a driving piece, a mechanical sensor, a position sensor and a control system, the control system is electrically connected with the driving piece so that the control system can control the driving piece, the driving piece is connected with the clamping piece, and the driving piece drives the clamping piece to be close to or away from the side edge of the slide; the mechanical sensor is installed on the clamping piece and used for detecting the clamping force of the clamping piece, and the mechanical sensor is electrically connected with the driving piece so as to feed back the clamping force to the control system; the position sensor is installed on the moving path of the clamping piece to detect the position information of the clamping piece, the position sensor is electrically connected with the control system to feed back the position information to the control system, and therefore the efficiency and accuracy of slide detection are improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and particularly to a glass slide clamping mechanism and a detection device. Background Art

[0002] In the semiconductor field, when detecting a glass slide, in order to maintain the stability of the glass slide, the glass slide is usually fixed at the detection position by a glass slide clamping mechanism.

[0003] The glass slide can usually be fixed by a pressing-type glass slide clamping mechanism. The pressing-type glass slide clamping mechanism presses on the top of the glass slide, and the glass slide is fixed by the frictional force between the pressing-type glass slide clamping mechanism and the top of the glass slide, so as to keep the position of the glass slide stable.

[0004] However, the pressing-type glass slide clamping mechanism will result in low efficiency and accuracy of glass slide detection. Summary of the Invention

[0005] This application provides a glass slide clamping mechanism and a detection device for improving the efficiency and accuracy of glass slide detection.

[0006] On the one hand, this application provides a glass slide clamping mechanism, including a base and two groups of clamping components:

[0007] The base has an installation area for placing the glass slide, and the two groups of clamping components are respectively located on opposite sides of the installation area;

[0008] The two groups of clamping components respectively include at least one clamping device. The clamping device includes a clamping member, a driving member, a mechanical sensor, a position sensor, and a control system. The control system is electrically connected to the driving member to enable the control system to control the driving member. The driving member is connected to the clamping member to enable the driving member to drive the clamping member to approach or move away from the glass slide;

[0009] The mechanical sensor is installed on the clamping member to detect the clamping force of the clamping member. The mechanical sensor is electrically connected to the driving member to feedback the clamping force to the control system;

[0010] The position sensor is installed on the moving path of the clamping member to detect the position information of the clamping member. The position sensor is electrically connected to the control system to feedback the position information to the control system.

[0011] In a possible implementation manner, the driving member includes an inertia motor and an adapter block. The two ends of the adapter block are respectively connected to the inertia motor and the clamping member, so that the inertia motor drives the clamping member to move through the adapter block. The inertia motor has high precision and fast startup. Therefore, using the inertia motor as the driving member can further improve the positioning accuracy of the clamping member.

[0012] In a possible implementation, the inertial motor is a piezoelectric ceramic motor.

[0013] In a possible implementation, each set of the clamping assemblies includes two of the clamping devices, and the two clamping devices are spaced apart. When the number of the clamping devices in each set of clamping assemblies is two, the two pairs of clamping devices clamp the glass slide simultaneously to improve the stability of the glass slide clamping.

[0014] In a possible implementation, the position sensor includes a grating scale and a reading head, the reading head is electrically connected to the control system, and the reading head is configured to detect the position information of the clamping member and feed it back to the control system.

[0015] In a possible implementation, two sets of the clamping assemblies respectively include at least one protective cover plate, and the protective cover plates respectively cover the corresponding clamping devices. This avoids the clamping assemblies being exposed to the external environment, prevents particulate matter that may be generated during the movement of the clamping assemblies from contaminating the glass slide, improves the cleanliness of the glass slide detection, and further improves the accuracy of the glass slide detection.

[0016] In a possible implementation, a clamping chamber is formed between the protective cover plate and the clamping device, and an exhaust pipeline is provided in the base, and the exhaust pipeline communicates with the clamping chamber. The clamping chamber can be evacuated through the exhaust pipeline to timely clean the particulate matter that may be generated during the movement of the clamping assemblies, prevent the particulate matter from contaminating the glass slide, and further improve the accuracy of the glass slide detection.

[0017] In a possible implementation, the protective cover plate is a silicon-made protective cover plate. This is to prevent the particulate matter of the protective cover plate itself from contaminating the glass slide.

[0018] In a possible implementation, an optoelectronic switch is further included, the optoelectronic switch is installed on the base, and the optoelectronic switch is configured to detect whether the glass slide is located in the installation area.

[0019] In a possible implementation, a reflector is further included, the reflector is located at the bottom surface of the installation area, and the reflector is configured to reflect the stray light in the external environment, so that the stray light in the surrounding environment can be reflected out at a preset angle to prevent the stray light from affecting the optical detection and further improve the accuracy of the glass slide detection.

[0020] On the other hand, the present application provides a detection device, including a base, a floating platform, and the glass slide clamping mechanism in any one of the above;

[0021] The floating platform is slidably installed on the base, and the clamping mechanism is installed on the floating platform;

[0022] The glass slide is a photomask, and the photomask is installed in the installation area.

[0023] The glass slide clamping mechanism and the detection device provided by this application have the following beneficial effects:

[0024] The glass slide clamping mechanism provided by this application includes a base and two sets of clamping components arranged oppositely along the first direction. Since there is an installation area for placing the glass slide on the base, and the two sets of clamping components are respectively located on opposite sides of the installation area, the two sets of clamping components can clamp the glass slide. Each of the two clamping components includes at least one clamping device, and the clamping device includes a clamping member, a driving member, a mechanical sensor, a position sensor, and a control system. The driving member is connected to the clamping member, and the control system is electrically connected to the driving member, so that the driving member can drive the clamping member to approach or move away from the glass slide under the action of the control system, so that the clamping member clamps or releases the glass slide, thereby improving the clamping stability and disassembly and assembly portability of the glass slide clamping mechanism, and thus improving the detection efficiency. Compared with the downward pressing type clamping mechanism, it does not touch the top of the glass slide, thus avoiding damage to the glass slide, and further improving the accuracy of glass slide detection.

[0025] The mechanical sensor is installed on the clamping member and electrically connected to the control system, so as to detect the clamping force of the clamping member. The driving member adjusts the movement of the clamping member through the clamping force detected by the mechanical sensor, realizes the closed-loop control of the clamping force, so that the clamping force is maintained within a safe range, avoids damage to the side of the glass slide, and further improves the accuracy of glass slide detection.

[0026] The position sensor is used to detect the position information of the clamping member and is electrically connected to the control system, so as to feedback the position information of the clamping member to the control system to realize precise control of the position of the clamping member, thereby improving the clamping stability, improving the clamping stability and avoiding damage to the glass slide by the clamping member, and further improving the accuracy of glass slide detection. Description of the Drawings

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0028] Figure 1 It is a three-dimensional structure schematic diagram of a glass slide clamping mechanism provided by an embodiment of this application from a first perspective;

[0029] Figure 2 It is a partial structure schematic diagram of a glass slide clamping mechanism provided by an embodiment of this application with the protective cover plate omitted;

[0030] Figure 3 Schematic three - dimensional structure diagram of a glass slide clamping mechanism provided by an embodiment of the present application from a second perspective.

[0031] Explanation of reference numerals:

[0032] X - First direction; Y - Second direction;

[0033] 10 - Base;

[0034] 11 - Installation area; 12 - Exhaust pipe;

[0035] 20 - Clamping assembly;

[0036] 21 - Clamping device; 211 - Clamping piece; 212 - Driving piece;

[0037] 212a - Inertia motor; 212b - Adapter block; 213 - Mechanical sensor;

[0038] 214 - Position sensor; 214a - Grating scale; 214b - Reading head; 22 - Protective cover plate;

[0039] 30 - Photoelectric switch. Detailed implementation manners

[0040] In the related art, the glass slide clamping mechanism may lead to low efficiency and accuracy in glass slide detection. The reason for this problem is that the pressing - type glass slide clamping mechanism needs to contact the top surface of the glass slide, which may damage the glass slide and cause detection errors, reducing the accuracy of glass slide detection. The pressing - type glass slide clamping mechanism cannot simultaneously meet the requirements of high - precision positioning for clamping and portability for disassembly and assembly, thus reducing the detection efficiency.

[0041] In view of the above - mentioned technical problems, the embodiments of the present application provide a glass slide clamping mechanism and a detection device. By driving the clamping pieces on both sides of the glass slide to approach or move away from the side surface of the glass slide to clamp or release the glass slide, without contacting the top of the glass slide, the accuracy of glass slide detection is improved. By using a mechanical sensor and a position sensor to detect the clamping force and the position of the clamping piece respectively and feedback them to the control system, closed - loop control of the clamping force and precise control of the position of the clamping piece are realized, thereby improving the clamping stability and avoiding damage to the glass slide, and further improving the accuracy of glass slide detection.

[0042] Next, the technical solutions in the embodiments of the present application will be described with reference to the accompanying drawings in the embodiments of the present application.

[0043] As Figure 1 and Figure 2As shown in the figure, the present application provides a glass slide clamping mechanism, which includes a base 10 and two sets of clamping components 20 arranged oppositely. The two sets of clamping components 20 can be arranged oppositely along the first direction X. The first direction X can be the length direction of the base 10. The base 10 is the base of the glass slide clamping mechanism, and the base 10 is used to carry the glass slide and install the two sets of clamping components 20. The base 10 has an installation area 11 for placing the glass slide. The installation area 11 can be a groove, a platform or a protrusion. The glass slide 11 can be placed on the bottom of the groove, the surface of the platform or the top surface of the protrusion. The present application does not limit this. For example, referring to Figure 1 , the installation area 11 is a groove, and the glass slide is placed on the bottom of the groove.

[0044] Referring to Figure 1 , the two sets of clamping components 20 are respectively located on opposite sides of the installation area 11, so as to facilitate clamping or loosening of the glass slide. For the convenience of description, the two sets of clamping components 20 are respectively called the first clamping component and the second clamping component. The first clamping component and the second clamping component can be respectively located on the left and right sides or the front and back sides of the installation area 11.

[0045] Referring to Figure 1 and Figure 2 , each set of clamping components 20 includes at least one clamping device 21. The number of clamping devices 21 in the first clamping component and the second clamping component can be one, two, three or more. Exemplarily, the number of clamping devices 21 in each set of clamping components 20 is the same. One clamping device 21 in the first clamping component cooperates with a corresponding clamping device 21 in the second clamping component to clamp or loosen the glass slide. When the number of clamping devices 21 in each set of clamping components 20 is greater than one, each clamping device 21 clamps the glass slide simultaneously to improve the stability of glass slide clamping.

[0046] Referring to Figure 2 , each clamping device 21 includes a clamping member 211, a driving member 212, a mechanical sensor 213, a position sensor 214 and a control system. The control system can be a programmable logic controller. A programmable logic controller is a digital computer used for an automated control system, which is used to monitor input signals (such as sensor signals and switch signals) and control output signals (such as signals for controlling actuators and motors) according to a pre-written program.

[0047] The clamping member 211 is the actuating structure of the clamping device 21. The clamping member 211 can be a chuck or a jaw in the shape of a cylinder, a strip, etc. The two relatively arranged clamping members 211 in the two groups of clamping assemblies 20 can clamp the glass slide after moving towards the glass slide, so as to stabilize the position of the glass slide and facilitate detection. The two relatively arranged clamping members 211 in the two groups of clamping assemblies 20 can loosen the glass slide after moving away from the glass slide, thereby facilitating the installation and disassembly of the glass slide and the glass slide clamping mechanism, and improving the convenience of disassembly and assembly during the glass slide clamping process.

[0048] Reference Figure 2 , the driving member 212 is the power mechanism of the clamping device 21. For example, the driving member 212 can be a motor or a pump. The control system is electrically connected to the driving member 212, and the driving member 212 is connected to the clamping member 211, so that the control system can control the driving member 212 to drive the clamping member 211 to approach or move away from the side of the glass slide, thereby clamping or loosening the glass slide. Compared with the downward pressing type clamping mechanism, the glass slide clamping mechanism provided in this application does not contact the top of the glass slide, thereby avoiding damage to the glass slide and further improving the accuracy of glass slide detection.

[0049] Reference Figure 2 , the mechanical sensor 213 is installed on the clamping member 211 to detect the clamping force of the clamping member 211 and convert the clamping force into a corresponding electrical signal. The mechanical sensor 213 is electrically connected to the control system, so that the mechanical sensor 213 can feedback the electrical signal to the control system. The control system can determine the current clamping force of the clamping member 211 according to the electrical signal, thereby adjusting the clamping force size, realizing the closed-loop control of the clamping force, keeping the clamping force within a safe range, avoiding damage to the side of the glass slide, and improving the accuracy of glass slide detection.

[0050] Reference Figure 2 , the position sensor 214 can be installed on the base or other mechanisms on the base (such as the adapter block in the following text). The position sensor 214 is used to detect the position information of the clamping member 211. The position sensor 214 is electrically connected to the control system, so that the position information can be feedback to the control system to realize precise control of the position of the clamping member 211, thereby improving the clamping stability, avoiding damage to the glass slide by the clamping member, and further improving the accuracy of glass slide detection.

[0051] The slide clamping mechanism provided by this application drives the clamping members 211 on both sides of the slide to approach or move away from the side of the slide to clamp or release the slide, without contacting the top of the slide, thereby improving the accuracy of slide detection. By using the mechanical sensor 213 and the position sensor 214 to detect the clamping force and the position information of the clamping member 211 respectively and feedback them to the control system, the closed-loop control of the clamping force and the precise control of the position of the clamping member 211 are realized, thereby improving the clamping stability and avoiding damage to the slide, and further improving the accuracy of slide detection.

[0052] In some embodiments, referring to Figure 2 , the driving member 212 includes an inertia motor 212a and an adapter block 212b. The inertia motor 212a has high precision and fast startup. Therefore, using the inertia motor 212a as the driving member 212 can further improve the positioning accuracy of the clamping member 211. The two ends of the adapter block 212b are respectively connected to the inertia motor 212a and the clamping member 211. The adapter block 212b can facilitate the connection between the inertia motor 212a and the clamping member 211, and can also adjust the output force or output torque of the inertia motor 212a to facilitate the movement of the clamping member 211. The inertia motor 212a drives the clamping member 211 to move towards or away from the slide through the adapter block 212b.

[0053] In an example, the inertia motor 212a is a piezoelectric ceramic motor, and the piezoelectric ceramic motor drives the clamping member to move through piezoelectric ceramic technology. Specifically, the piezoelectric ceramic motor includes a stator, a rotor, and a piezoelectric ceramic driver. The stator is fixed, and the rotor is driven to rotate by the piezoelectric ceramic driver. When a voltage is applied to the piezoelectric ceramic driver, due to the inverse piezoelectric effect, the piezoelectric ceramic driver will generate a small deformation. This small deformation can push the rotor to rotate, and since this deformation can be precisely controlled, the rotation speed and position of the rotor can be precisely controlled, enabling the piezoelectric ceramic motor to drive the precise movement of the clamping member 211, improving the position accuracy of the clamping member 211, and further improving the accuracy of slide detection.

[0054] Referring to Figure 2, in some embodiments, the position sensor 214 includes a grating scale 214a and a reading head 214b, and one of the grating scale 214a and the reading head 214b moves with the clamping member 211. The grating scale 214a can be mounted on the adapter block 212b. The grating scale 214a operates based on the optical principle of Moiré fringes. When the grating scale 214a or the reading head 214b moves with the clamping member 211 and a small angle is formed between the grating of the grating scale 214a and the indicating grating in the reading head 214b, Moiré fringes with light and dark interference are generated. The reading head 214b can convert the Moiré fringes into electrical signals, and is electrically connected to the control system through the reading head 214b to transmit the electrical signals to the control system, thereby feeding back the position information to the control system, and further achieving precise measurement of the displacement of the clamping member 211 through the control system.

[0055] Reference Figure 1 , in some embodiments, both sets of clamping assemblies 20 include two clamping devices 21. The first clamping assembly and the second clamping assembly both include two clamping devices 21. The two clamping devices 21 are arranged at intervals along the second direction Y, and the second direction Y can be the width direction of the base 10. It should be noted that the second direction Y and the first direction X are different directions, and the present application does not limit the positional relationship between the first direction and the second direction. For example, the included angle between the two can be a right angle, an acute angle, or an obtuse angle. Each set of clamping assemblies 20 includes two clamping devices 21, which can further improve the clamping stability of the clamping device 21 for the glass slide.

[0056] Reference Figure 1 , in some embodiments, the glass slide clamping mechanism further includes two sets of protective covers 22. Each set of protective covers 22 covers each set of clamping assemblies 20 respectively, preventing the clamping assemblies 20 from being exposed to the external environment, preventing particulate matter that may be generated during the movement of the clamping assemblies 20 from contaminating the glass slide, improving the cleanliness of the glass slide detection, and further improving the accuracy of the glass slide detection.

[0057] It should be noted that the protective cover 22 is made of a clean material. For example, the protective cover 22 is a silicon-based protective cover to prevent particulate matter from the protective cover 22 itself from contaminating the glass slide.

[0058] Reference Figure 1 and Figure 3 , in some embodiments, a clamping chamber is formed between the protective cover 22 and the clamping assembly 20. The base 10 is provided with an exhaust pipe 12, and the exhaust pipe 12 communicates with the clamping chamber. The clamping chamber can be evacuated through the exhaust pipe 12 to timely clean the particulate matter that may be generated during the movement of the clamping assembly 20, prevent the particulate matter from contaminating the glass slide, and further improve the accuracy of the glass slide detection.

[0059] Reference Figure 1, in some embodiments, the glass slide clamping mechanism further includes a photoelectric switch 30. The photoelectric switch 30 is installed on the base 10, for example, on the side of the base 10. The installation area 11 for placing the glass slide is within the detection range of the photoelectric switch 30. Whether the glass slide is located within the installation area 11 can be detected through the photoelectric switch 30. The photoelectric switch 30 can be electrically connected to the control system. When the photoelectric switch 30 detects that the glass slide is in the installation area 11, the photoelectric switch 30 transmits a corresponding electrical signal to the control system to enable the control system to control each driving member 212 to drive the corresponding clamping member 211 to approach the glass slide, and then clamp the glass slide.

[0060] In some embodiments, the glass slide clamping mechanism further includes a reflector. The reflector can be located at the bottom of the installation area 11. The reflector is clamped between the glass slide and the bottom of the installation area 11 to reflect the stray light in the surrounding environment at a preset angle, so as to prevent the stray light from affecting the optical detection and further improve the accuracy of glass slide detection.

[0061] The embodiment of the present application also provides a detection device, which can be used to detect a photomask. Exemplarily, the photomask is a glass slide to be clamped. The detection device includes a base, a floating table, and the glass slide clamping mechanism shown in any of the above Figures 1 - 3 embodiments. The floating table is slidably installed on the base, and the glass slide clamping mechanism is installed on the floating table.

[0062] During the detection process, it can be judged whether the photomask has been placed through the photoelectric switch 30. After detecting the existence of the photomask, the driving member 212 will drive the clamping member 211 to clamp the photomask. The clamping force and the position of the clamping member are accurately monitored by the mechanical sensor 213 and the position sensor 214 respectively. The incident light of the detection light source enters the photomask, refracts through the photomask to the reflector, is eliminated of stray light by the reflector and then refracts out through the photomask, and finally is received by the detector. The floating table moves ultra-precisely along the base, driving the glass slide clamping mechanism and the photomask to have a relative movement with the detection light source. Through this relative movement, different areas of the photomask are irradiated and detected by the detection light source, so as to realize photomask detection.

[0063] In this specification, the various embodiments or embodiments are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same and similar parts among the various embodiments can be referred to each other.

[0064] It should be noted that the embodiments referred to in the specification, such as "in specific implementation", "in some embodiments", "in this embodiment", "exemplarily", etc., may include specific features, structures or characteristics, but not every embodiment necessarily includes such specific features, structures or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. Moreover, when combining a specific feature, structure or characteristic with an embodiment, it is within the knowledge scope of those skilled in the art to implement such a feature, structure or characteristic in combination with other embodiments, whether explicitly or implicitly described.

[0065] Generally speaking, terms should be understood at least in part by their use in context. For example, at least in part depending on the context, the term "one or more" used in the text can be used to describe any feature, structure or characteristic in the sense of a singular number, or can be used to describe a combination of features, structures or characteristics in the sense of a plural number.

[0066] It should be easily understood that the terms "on", "above" and "over" in this disclosure should be interpreted in the broadest manner, so that "on" not only means "directly on something", but also includes the meaning of "on something" with intermediate features or layers therebetween, and "above" or "over" not only includes the meaning of "above" or "over something", but may also include the meaning of "above" or "over something" without intermediate features or layers therebetween (i.e., directly on something).

[0067] In addition, in order to facilitate the description, spatial relative terms such as "below", "beneath", "under", "above", "over" and the like may be used in the text to describe the relationship of one element or feature relative to other elements or features as shown in the figures. Spatial relative terms are intended to include different orientations of the device in use or operation other than the orientation shown in the drawings. The device may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive words used in the text can be interpreted accordingly.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

[0069] In the above preferred embodiments, the object, technical solution and advantages of the present invention have been further described in detail. It should be understood that the above description is only the preferred embodiments of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A slide clamping mechanism, characterized in that: Includes a base and two sets of clamping components: The base is provided with a mounting area for placing a glass slide, and the two groups of clamping components are respectively located on two opposite sides of the mounting area; The two groups of clamping assemblies each include at least one clamping device, and the clamping device includes a clamping member, a driving member, a mechanical sensor, a position sensor, and a control system. The control system is electrically connected to the driving member so that the control system controls the driving member, and the driving member is connected to the clamping member so that the driving member drives the clamping member to approach or move away from the glass slide. The mechanical sensor is mounted on the clamping member to detect the clamping force of the clamping member, and the mechanical sensor is electrically connected to the control system to feed back the clamping force to the control system; The position sensor is used to detect the position information of the clamping member, and the position sensor is electrically connected to the control system to feed back the position information to the control system.

2. The slide clamping mechanism according to claim 1, characterized in that: The driving member includes an inertial motor and an adapter block, and two ends of the adapter block are respectively connected to the inertial motor and the clamping member, so that the inertial motor drives the clamping member to move through the adapter block.

3. The slide clamping mechanism according to claim 2, characterized in that: The inertial motor is a piezoelectric ceramic motor.

4. The slide clamping mechanism according to claim 1, characterized in that: The position sensor includes a grating ruler and a reader, the reader is electrically connected to the control system, and the reader is used to detect the position information of the clamping member and feed it back to the control system.

5. The slide clamping mechanism according to any one of claims 1 to 4, characterized in that: Each group of the clamping assemblies includes two clamping devices, and the two clamping devices are arranged at an interval.

6. The slide clamping mechanism according to any one of claims 1 to 4, characterized in that: The two groups of clamping assemblies respectively include at least one protective cover plate, and the protective cover plate is arranged on the corresponding clamping device.

7. The slide clamping mechanism according to claim 6, characterized in that: A clamping chamber is formed between the protective cover plate and the clamping device. A pumping and exhausting pipe is provided in the base, and the pumping and exhausting pipe is connected to the clamping cavity.

8. The slide clamping mechanism according to claim 6, characterized in that: The protective cover plate is a silicon protective cover plate.

9. The slide clamping mechanism according to any one of claims 1 to 4, characterized in that: It also includes a photoelectric switch, which is installed on the base and is used to detect whether the glass slide is located in the installation area.

10. The slide clamping mechanism according to any one of claims 1 to 4, characterized in that: It also includes a reflective plate, which is located at the bottom of the installation area and is used to reflect stray light in the external environment.

11. A detection device, characterized in that: It comprises a base, a floating platform and a glass slide clamping mechanism as described in any one of claims 1 to 10; The floating platform is slidably mounted on the base, and the glass slide clamping mechanism is mounted on the floating platform; The glass slide is a light mask, and the light mask is installed in the installation area of ​​the glass slide clamping mechanism.

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