Vertical nitrogen circulation transverse magnetic annealing furnace

By designing a vertical nitrogen circulation transverse magnetic annealing furnace, using technical means such as heating pipe fittings and transverse magnetic coils, the problems of uneven temperature and poor temperature control effects in the vacuum furnace are solved, and the uniformity of temperature in the furnace and the high accuracy of temperature control are achieved, and the efficiency and consistency of heat treatment are improved.

CN120174183AInactive Publication Date: 2025-06-20HUNAN XIANGYI AMORPHOUS ELECTRONICS CO LTD
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Patent Information

Application Number
CN202510474605.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-16
Publication Date
2025-06-20
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

During the heat treatment process, existing vacuum furnaces have problems such as uneven temperature, poor temperature control effect, and non-flow of air flow in the furnace, resulting in uneven heating of the product and large performance differences.

Method used

A vertical nitrogen circulating transverse magnetic annealing furnace is designed, including a base mechanism, furnace cover, heating pipe fittings and hydraulic lifting mechanism. By evenly distributing multiple heating pipe fittings on the outer wall of the furnace cover, and using a transverse magnetic coil and a hydraulic lifting mechanism, the gas flow and heating in the airflow chamber are realized to ensure uniform temperature in the furnace.

Benefits of technology

The uniformity of the furnace temperature and high temperature control accuracy are achieved, ensuring uniform heating of the product during the heat treatment process, reducing the heat loss of the furnace wall, and improving the efficiency and consistency of the heat treatment.

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Abstract

The invention discloses a vertical nitrogen circulation transverse magnetic annealing furnace which comprises a base mechanism, a furnace cover body, a heating pipe fitting and a hydraulic lifting mechanism, the base mechanism comprises a base, a furnace bottom plate, a placing table and an expansion sealing ring; a plurality of heating pipe fittings are evenly arranged on the outer wall of the furnace cover body, a downward flow guide pipe is arranged in the center of the partition plate, a motor is arranged outside the top of the furnace cover body, and fan blades are arranged at the end of a rotating shaft of the motor in the flow guide pipe. The hydraulic lifting mechanism comprises two synchronous hydraulic cylinders, a top plate and four limiting sliding rods. The inner diameter of the furnace cover body is 1-2 mm larger than the outer diameter of the expansion sealing ring, and the thermal expansion coefficient of the expansion sealing ring is larger than that of the furnace cover body. Heated inert gas flows into the airflow cavity and is blown into the furnace cover body, the furnace body cannot be heated, hot airflow can ensure that all products in the furnace body are uniformly heated, temperature control is also facilitated under reaction condition errors, rapid temperature adjustment can be completed only by changing the heating degree of the heating pipe fitting during temperature adjustment, and the temperature adjustment speed and precision are high.
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Description

Technical Field

[0001] The present invention relates to the technical field of nitrogen circulation horizontal magnetic annealing furnaces, and particularly to a vertical nitrogen circulation horizontal magnetic annealing furnace. Background Art

[0002] The existing heat treatment methods commonly used in vacuum furnaces include vacuum heat treatment, atmosphere circulation heat treatment, and atmosphere circulation magnetic field heat treatment. However, during the heat treatment process, there is a large heat loss, the heating effect is not good, the temperature control is not easy, the products stacked in the furnace are heated unevenly, resulting in different reaction conditions for the products, and there will be differences in product performance. Most importantly, the gas flow in the furnace is not flowing, resulting in heating of the furnace wall, higher heating of the products near the furnace wall position, lower heating at the center position of the furnace, and higher temperature at the bottom position of the furnace bottom heating and other phenomena. Summary of the Invention

[0003] The present invention aims to at least solve one of the technical problems in the related art to some extent. For this purpose, an object of the present invention is to provide a vertical nitrogen circulation horizontal magnetic annealing furnace, which solves the problems of uneven temperature in the furnace and poor temperature control effect.

[0004] A vertical nitrogen circulation horizontal magnetic annealing furnace according to the present invention includes a base mechanism, a furnace cover body, heating pipe fittings, and a hydraulic lifting mechanism;

[0005] The base mechanism includes a base, a furnace bottom plate, a placement table, and an expansion seal ring. The furnace bottom plate is fixed at the center position of the upper surface of the base. The placement table is fixed at the center position of the upper surface of the furnace bottom plate. The expansion seal ring is sleeved around the placement table. A longitudinal magnetic core is provided at the center position of the placement table;

[0006] A plurality of heating pipe fittings are evenly arranged on the outer wall of the furnace cover body. The bottom air inlet and the top air outlet of the heating pipe fittings respectively penetrate the side wall near the bottom and the side wall near the top of the furnace cover body and are both communicated with the inside. An installation ring is sleeved on the outer wall of the furnace cover body at the bottom and the top respectively. A transverse magnetic coil is wound around the outer wall of the furnace cover body. The top of the furnace cover body is sealed and the bottom is open. A partition plate is provided below the top air outlet of the heating pipe fittings in the furnace cover body. An air flow chamber is formed between the partition plate and the top wall of the furnace cover body. A downwardly directed guide pipe is provided at the center position of the partition plate. A motor is provided outside the top of the furnace cover body. The motor shaft penetrates the center position of the top wall of the furnace cover body and extends the shaft into the guide pipe. A fan blade is provided at the end of the motor shaft in the guide pipe;

[0007] The hydraulic lifting mechanism includes two synchronous hydraulic cylinders, a top plate, and four limit sliding rods. Four limit sliding rods are evenly and fixedly arranged near the edge of the lower surface of the top plate. The bottom ends of the four limit sliding rods are fixed on the base. The four limit sliding rods movably penetrate through two mounting rings. The two synchronous hydraulic cylinders symmetrically penetrate through both sides of the top plate and are fixed. The telescopic shafts of the two synchronous hydraulic cylinders penetrate downward through the two mounting rings and are fixed.

[0008] The inner diameter of the furnace hood is 1-2 mm larger than the outer diameter of the expansion sealing ring. The thermal expansion coefficient of the expansion sealing ring is greater than that of the furnace hood.

[0009] In some embodiments of the present invention, the heating pipe fitting includes a high-temperature resistant metal pipe, a heating coil, and a heat-insulating ceramic outer sleeve. The high-temperature resistant metal pipe is a U-shaped pipe. The two ends of the high-temperature resistant metal pipe are respectively inserted into the interior of the furnace hood near the bottom and near the top. The heating coil is wound around the vertical pipe of the high-temperature resistant metal pipe. The heat-insulating ceramic outer sleeve is sleeved outside the furnace hood on the part of the high-temperature resistant metal pipe.

[0010] In some other embodiments of the present invention, the high-temperature resistant metal pipe is a stainless steel metal pipe, and the heat-insulating ceramic outer sleeve is a foamed ceramic heat-insulating board.

[0011] In some other embodiments of the present invention, two vertical rods are fixedly arranged near the edge of the upper surface of the placing table. A plurality of annular ceramic rings are sleeved on the two vertical rods. The annular ceramic rings are evenly provided with air flow holes. The outer diameter of the annular ceramic rings is not larger than the outer diameter of the placing table.

[0012] In some other embodiments of the present invention, a circle of embedded metal sealing gaskets is arranged on the upper surface of the furnace bottom plate close to the position of the expansion sealing ring 71.

[0013] In some other embodiments of the present invention, a thermocouple thermometer is fixedly arranged below the fan blade at the bottom end of the guide pipe.

[0014] In some other embodiments of the present invention, a mechanical seal is sleeved on the position of the motor rotating shaft at the inner top of the furnace hood. An air inlet pipe and an air outlet pipe are respectively arranged on the top wall and the side wall near the bottom of the furnace hood. Solenoid valves are arranged in both the air inlet pipe and the air outlet pipe.

[0015] In some other embodiments of the present invention, a foamed ceramic heat-insulating layer is sleeved on the outer wall of the furnace hood.

[0016] In some other embodiments of the present invention, the number of the heating pipe fittings arranged on the outer wall of the furnace hood is not less than four.

[0017] In the present invention, an inert gas is heated by a heating pipe fitting, and the heated inert gas flows into an air flow cavity and is blown into a furnace hood body, unable to heat the furnace body. The hot air flow can ensure that all products in the furnace body are evenly heated, and it is also convenient to control the temperature under the condition of reaction condition error. When adjusting the temperature, only by changing the heating degree of the heating pipe fitting can rapid temperature adjustment be completed, with a fast temperature adjustment speed and high precision. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings are used to provide a further understanding of the present invention, and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the present invention, and do not constitute a limitation to the present invention. In the drawings:

[0019] Figure 1 is a schematic structural diagram of a vertical nitrogen circulation horizontal magnetic annealing furnace proposed by the present invention.

[0020] Figure 2 is a schematic structural diagram of a vertical nitrogen circulation horizontal magnetic annealing furnace proposed by the present invention (after stacking annular ceramic rings).

[0021] Figure 3 is a schematic sectional structural diagram of a vertical nitrogen circulation horizontal magnetic annealing furnace during reaction proposed by the present invention.

[0022] In the figure: 1, furnace hood body; 11, mounting ring; 12, intake pipe; 2, heating pipe fitting; 21, heat-insulating ceramic outer sleeve; 22, high-temperature resistant metal pipe; 23, heating coil; 3, motor; 4, top plate; 41, synchronous hydraulic cylinder; 5, limit slide bar; 6, base; 7, furnace bottom plate; 71, expansion seal ring; 72, placement table; 8, longitudinal magnetic core; 9, annular ceramic ring; 10, vertical rod. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments.

[0024] As Figures 1-3 shown, a vertical nitrogen circulation horizontal magnetic annealing furnace proposed by the present invention includes a base mechanism, a furnace hood body 1, a heating pipe fitting 2, and a hydraulic lifting mechanism;

[0025] The base mechanism includes a base 6, a furnace bottom plate 7, a placement table 72, and an expansion seal ring 71. A furnace bottom plate 7 is fixedly arranged at the center position of the upper surface of the base 6, a placement table 72 is fixedly arranged at the center position of the upper surface of the furnace bottom plate 7, an expansion seal ring 71 is sleeved around the placement table 72, and a longitudinal magnetic core 8 is arranged at the center position of the placement table 72;

[0026] During the downward movement of the furnace hood body 1, it will be buckled on the expansion sealing ring 71. The top of the expansion sealing ring 71 is conical. Coupled with the fact that the furnace hood body 1 is limited in its downward movement, it will be accurately sleeved outside the expansion sealing ring 71.

[0027] A plurality of heating pipe fittings 2 are evenly arranged on the outer wall of the furnace hood body 1. The bottom air inlet and the top air outlet of the heating pipe fitting 2 respectively penetrate the side wall near the bottom and the side wall near the top of the furnace hood body 1 and are both communicated with the inside. An installation ring 11 is sleeved on the outer wall of the furnace hood body 1 at the bottom and the top respectively. A transverse magnetic coil is wound on the outer wall of the furnace hood body 1. The top of the furnace hood body 1 is sealed and the bottom is open. A partition plate is arranged below the top air outlet of the heating pipe fitting 2 inside the furnace hood body 1. An air flow cavity is formed between the partition plate and the top wall of the furnace hood body 1. A downward guide pipe 9 is arranged at the center position of the partition plate. A motor 3 is arranged outside the top of the furnace hood body 1. The rotating shaft of the motor 3 penetrates the center position of the top wall of the furnace hood body 1 and extends the rotating shaft into the guide pipe 9. A fan blade is arranged at the end of the rotating shaft of the motor 3 inside the guide pipe 9;

[0028] The heating pipe fitting 2 heats the inert gas. Since the rotating fan blade forms a negative pressure in the air flow cavity, the inert gas in the heating pipe fitting 2 is sucked into the air flow cavity and then discharged downward below the guide pipe 9. The gas is flowing, and it is easier to evenly provide heat, so that each product can be evenly heated, and it can also reduce the loss of more heat due to heating the furnace wall. Moreover, it is easier to control the temperature.

[0029] The hydraulic lifting mechanism includes two synchronous hydraulic cylinders 41, a top plate 4 and four limit slide rods 5. Four limit slide rods 5 are evenly fixed at the edge position of the lower surface of the top plate 4. The bottom ends of the four limit slide rods 5 are fixed on the base 6. The four limit slide rods 5 movably penetrate the two installation rings 11. The two synchronous hydraulic cylinders 41 symmetrically penetrate and are fixed at both sides of the top plate 4. The telescopic shafts of the two synchronous hydraulic cylinders 41 penetrate downward through the two installation rings 11 and are fixed;

[0030] The four limit slide rods 5 can be limited in their downward movement, will not deviate, can be accurately sleeved outside the expansion sealing ring and abut against the furnace bottom plate 7. When abutting against the furnace bottom plate 7, primary sealing is achieved, and the leakage is small or there is no leakage. During the heating process of the heating pipe, the temperature will rise and the air pressure will increase. Since the inner diameter of the furnace hood body 1 is 1-2 mm larger than the outer diameter of the expansion sealing ring 71, the thermal expansion coefficient of the expansion sealing ring 71 is greater than the thermal expansion coefficient of the furnace hood body 1. At this time, the expansion sealing ring 71 begins to expand and squeeze against the inner wall of the furnace hood body 1, and further sealing is achieved, realizing secondary sealing.

[0031] The heating pipe fitting 2 includes a high-temperature resistant metal pipe 22, a heating coil 23, and a heat-insulating ceramic outer sleeve 21. The high-temperature resistant metal pipe 22 is a U-shaped pipe. Two ends of the high-temperature resistant metal pipe 22 are respectively inserted into the interior of the furnace hood body 1 near the bottom and near the top. The heating coil 23 is wound around the vertical pipe of the high-temperature resistant metal pipe 22. The high-temperature resistant metal pipe 22 is partially sleeved with the heat-insulating ceramic outer sleeve 21 outside the furnace hood body 1.

[0032] The heating coil 23 conducts coil heating on the heat-resistant high-temperature metal pipe 22, and the gas inside the pipe will quickly heat up. Since the high-temperature resistant metal pipe 22 is wrapped and its outer diameter is much smaller than the outer diameter of the furnace, the heat loss is small during the heating process, and the heated gas flows into the furnace body.

[0033] The high-temperature resistant metal pipe 22 is a stainless steel metal pipe, and the heat-insulating ceramic outer sleeve 21 is a foamed ceramic heat-insulating board. The foamed ceramic heat-insulating board can withstand 1200 °C and has very good heat-insulating performance. The temperature required for the furnace body is generally below 700 °C.

[0034] Two vertical rods 10 are fixed at positions near the edge of the upper surface of the placing table 72. A plurality of annular ceramic rings 9 are sleeved on the two vertical rods 10. The annular ceramic rings 9 are evenly provided with air flow holes, and the outer diameter of the annular ceramic rings 9 is not larger than the outer diameter of the placing table 72. An air flow chamber is formed by stacking a plurality of annular ceramic rings 9, and the product is wrapped therein. The air flow will evenly disperse the hot air to each product, so that each product is evenly heated, the temperature difference change is small, and the defective rate of the product becomes low.

[0035] A circle of embedded metal gaskets 73 is provided on the upper surface of the furnace bottom plate 7 at a position close to the expansion sealing ring 71. Pressing the metal gasket 73 has deformation to fit on the bottom end of the furnace hood body, and the sealing performance will be increased.

[0036] A thermocouple thermometer is fixedly provided below the fan blades at the bottom end of the flow guide pipe 9. It is heat-resistant and can adjust the temperature by monitoring the air flow temperature.

[0037] A mechanical seal is sleeved on the position of the rotating shaft of the motor 3 at the inner top of the furnace hood body 1. The furnace hood body 1 is respectively provided with an air inlet pipe 12 and an air outlet pipe on the top wall and the side wall near the bottom. Solenoid valves are provided in both the air inlet pipe 12 and the air outlet pipe. When performing air exchange, first introduce inert gas from the air inlet pipe 12 and discharge the miscellaneous gas from the air outlet pipe until the air exchange is completed. During the air exchange process, the fan blades are started to rotate to realize air flow, and the air exchange speed is faster.

[0038] A foamed ceramic heat-insulating layer is sleeved on the outer wall of the furnace hood body 1. Under the hot air flow, the furnace hood body 1 will still have a high temperature. With heat insulation, the temperature will be higher after the gas circulates into the heating pipe fitting, and the heating will be easier.

[0039] The number of the heating pipe fittings 2 arranged on the outer wall of the furnace hood body 1 is not less than four. A larger number will make it easier to control the gas flow and the heating control speed. If the heating temperature is not high, 1-2 heating pipe fittings can be used for heating. When high temperature is required, more heating pipe fittings 2 are started for heating, and the heating degree can also be adjusted by the power of the heating coil.

[0040] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A vertical nitrogen circulation transverse magnetic annealing furnace, characterized in that: It comprises a base mechanism, a furnace cover (1), a heating pipe (2) and a hydraulic lifting mechanism; The base structure comprises a base (6), a furnace bottom plate (7), a placement platform (72) and an expansion sealing ring (71); the furnace bottom plate (7) is fixed at the center position of the upper surface of the base (6); the placement platform (72) is fixed at the center position of the upper surface of the furnace bottom plate (7); the placement platform (72) is sleeved with an expansion sealing ring (71) around it; and a longitudinal magnetic core (8) is provided at the center position of the placement platform (72); The outer wall of the furnace cover (1) is evenly provided with a plurality of heating pipes (2); the bottom air inlet and the top air outlet of the heating pipes (2) respectively penetrate the side wall near the bottom and the side wall near the top of the furnace cover (1) and are both communicated with the interior; the furnace cover (1) is respectively sleeved with a mounting ring (11) on the outer wall at the bottom and the top; a transverse magnetic coil is wound on the outer wall of the furnace cover (1); the top of the furnace cover (1) is sealed and the bottom is open; a partition plate is provided inside the furnace cover (1) below the top air outlet of the heating pipe (2); an air flow cavity is formed between the partition plate and the top wall of the furnace cover (1); a downward guide tube (9) is provided at the center of the partition plate; a motor (3) is provided outside the top of the furnace cover (1); a rotating shaft of the motor (3) penetrates the center of the top wall of the furnace cover (1) and extends the rotating shaft into the guide tube (9); a fan blade is provided at the end of the rotating shaft of the motor (3) in the guide tube (9); The hydraulic lifting mechanism comprises two synchronous hydraulic cylinders (41), a top plate (4) and four limit slide bars (5). Four limit slide bars (5) are evenly fixed on the lower surface of the top plate (4) near the edge. The bottom ends of the four limit slide bars (5) are fixed to the base (6). The four limit slide bars (5) movably penetrate two mounting rings (11). The two synchronous hydraulic cylinders (41) symmetrically penetrate the two sides of the top plate (4) and are fixed. The telescopic axes of the two synchronous hydraulic cylinders (41) penetrate the two mounting rings (11) downward and are fixed. The inner diameter of the furnace cover (1) is 1-2 mm larger than the outer diameter of the expansion sealing ring (71), and the thermal expansion coefficient of the expansion sealing ring (71) is larger than the thermal expansion coefficient of the furnace cover (1).

2. A vertical nitrogen circulation transverse magnetic annealing furnace according to claim 1, characterized in that: The heating pipe fitting (2) comprises a high-temperature resistant metal pipe (22), a heating coil (23) and a heat-insulating ceramic jacket (21); the high-temperature resistant metal pipe (22) is a U-shaped pipe; the two ends of the high-temperature resistant metal pipe (22) are respectively inserted into the interior of the furnace cover (1) near the bottom and near the top; the vertical pipe of the high-temperature resistant metal pipe (22) is wound with a heating coil (23); and the high-temperature resistant metal pipe (22) is sheathed with a heat-insulating ceramic jacket (21) outside the furnace cover (1).

3. A vertical nitrogen circulation transverse magnetic annealing furnace according to claim 2, characterized in that: The high temperature resistant metal tube (22) is a stainless steel metal tube, and the heat insulating ceramic jacket (21) is a foamed ceramic heat insulating board.

4. A vertical nitrogen circulation transverse magnetic annealing furnace according to claim 1, characterized in that: Two vertical rods (10) are fixed near the edge of the upper surface of the placement platform (72), and a plurality of annular ceramic rings (9) are sleeved on the two vertical rods (10). Air flow holes are evenly arranged on the annular ceramic rings (9), and the outer diameter of the annular ceramic rings (9) is not greater than the outer diameter of the placement platform (72).

5. The vertical nitrogen circulation transverse magnetic annealing furnace according to claim 1, characterized in that: The upper surface of the furnace bottom plate (7) is provided with a circle of embedded metal sealing gasket (73) at a position close to the expansion sealing ring (71).

6. The vertical nitrogen circulation transverse magnetic annealing furnace according to claim 1, characterized in that: A thermocouple thermometer is fixedly provided on the bottom end of the flow guide tube (9) below the fan blades.

7. The vertical nitrogen circulation transverse magnetic annealing furnace according to claim 1, characterized in that: A mechanical seal is sleeved on the top of the furnace cover (1) at the position of the motor (3) rotating shaft. The furnace cover (1) is provided with an air inlet pipe (12) and an air outlet pipe on the top wall and the side wall close to the bottom, respectively. Solenoid valves are provided in the air inlet pipe (12) and the air outlet pipe.

8. The vertical nitrogen circulation transverse magnetic annealing furnace according to claim 1, characterized in that: The outer wall of the furnace cover (1) is covered with a foamed ceramic insulation layer.

9. The vertical nitrogen circulation transverse magnetic annealing furnace according to claim 1, characterized in that: The number of the heating pipes (2) provided on the outer wall of the furnace cover (1) is no less than four.