Workbench posture adjusting device and vibration isolation table

Abstract

The invention provides a workbench posture adjusting device and a vibration isolation table, and relates to the technical field of micro-vibration suppression. The workbench posture adjusting device comprises a first vibration absorber and a plurality of second vibration absorbers, wherein one ends of the first vibration absorber and the second vibration absorbers are connected with the back surface of a workbench and provide flexible support for the workbench; the sensor is connected with the second vibration absorber, and the sensor is configured to detect the posture of the workbench; according to the second vibration absorber, the controller generates a control strategy according to feedback data of the sensor, and the driving unit applies acting force to the workbench according to the control strategy. According to the device, the negative stiffness characteristic is achieved through the method that positive position feedback is achieved through the second vibration absorber, and the quasi-zero stiffness characteristic is achieved through parallel connection of the first vibration absorber and the positive stiffness spring. Meanwhile, the size of the vibration isolation table is reduced, and the structure is more compact. The vibration isolator has good low-frequency vibration isolation performance, can adapt to different load masses and adjust external excitation frequency through online real-time adjustment of negative stiffness characteristics, and has excellent leveling performance.

Description

Technical Field

[0001] The present disclosure relates to the technical field of micro-vibration suppression, and more particularly, to a workbench attitude adjustment device and a vibration isolation table. Background Art

[0002] In the field of ultra-precision manufacturing, it is necessary to ensure nanoscale relative position stability and alignment accuracy, and it is necessary to reduce the influence of environmental vibration disturbances. Especially, the low-frequency performance deteriorates severely, and it is necessary to develop high-performance vibration isolation tables to ensure the relative stability of the inertial spaces of two subsystems in precision equipment. Vibration isolation tables are divided into passive, semi-active and active vibration isolation tables.

[0003] Due to the high-precision requirements related to precision manufacturing and measurement and the need to reduce environmental noise, traditional passive quasi-zero stiffness and semi-active quasi-zero stiffness vibration isolation tables are difficult to meet the increasingly strict vibration control requirements. Passive quasi-zero stiffness vibration isolation tables represented by inclined springs and Euler bending beams have good low-frequency vibration isolation performance. Once the structural dimensions are fixed, the structural parameters cannot be adjusted, that is, the system stiffness cannot be changed in real time and cannot adapt to environmental vibrations with variable frequencies. The semi-active quasi-zero stiffness vibration isolation table mainly based on electromagnetic springs can adjust the system stiffness in real time by adjusting the current of the coil winding and can adapt to environmental vibrations with variable frequencies, but still cannot adapt to changes in load mass. Summary of the Invention

[0004] The purpose of the present disclosure is to provide a workbench attitude adjustment device and a vibration isolation table, which can solve at least one of the above-mentioned technical problems. The specific solutions are as follows: According to a specific embodiment of the present disclosure, on the one hand, the present disclosure provides a workbench attitude adjustment device, which includes: a first absorber, one end of the first absorber is configured to be connected to the back of the workbench and provide flexible support for the workbench; a second absorber, one end of the second absorber is configured to be connected to the back of the workbench; a sensor, the sensor is connected to the second absorber, and the sensor is configured to detect the attitude of the workbench; wherein, there are multiple second absorbers, and the number of sensors corresponds one-to-one to the number of second absorbers; the second absorber includes: a controller and a driving unit, the controller generates a control strategy according to the feedback data of the sensor, and the driving unit applies a force to the workbench according to the control strategy.

[0005] In an optional embodiment, the first absorber includes: a plate spring piece, one end of the plate spring piece is configured to be connected to the back of the workbench; a flexible hinge, one end of the flexible hinge is connected to the other end of the plate spring piece.

[0006] In an alternative embodiment, the drive unit includes: a magnet, one end of the magnet is configured to be connected to the back surface of the workbench; a coil winding, one end of the coil winding is connected to the other end of the magnet.

[0007] In an alternative embodiment, the sensor includes: a speed sensor, the speed sensor is configured to measure the relative speed of the workbench, and the controller is based on the measurement of the speed sensor.

[0008] In an alternative embodiment, the magnet is a permanent magnet or a rubidium magnet.

[0009] In an alternative embodiment, the first vibration absorber is configured to be disposed at the center of the back surface of the workbench.

[0010] In an alternative embodiment, a plurality of the second vibration absorbers are uniformly arranged on the back surface of the workbench.

[0011] In an alternative embodiment, the distances between the second vibration absorbers are the same, and the distance from each second vibration absorber to the first vibration absorber is also the same.

[0012] In an alternative embodiment, there are at least three second vibration absorbers, and the second vibration absorbers are uniformly arranged around the first vibration absorber.

[0013] According to the specific embodiments of the present disclosure, on the other hand, the present disclosure provides a vibration isolation table, including: a workbench attitude adjustment device according to any one of the above technical solutions.

[0014] The above solutions of the embodiments of the present disclosure compared with the prior art have at least the following beneficial effects: The workbench attitude adjustment device provided by the present disclosure realizes the negative stiffness characteristic by the method of positive position feedback through the second vibration absorber, and realizes the quasi-zero stiffness characteristic by the parallel connection of the first vibration absorber and the positive stiffness spring. The workbench attitude adjustment device provided by the present disclosure reduces the size of the vibration isolation table and has a more compact structure. The present disclosure has good low-frequency vibration isolation performance, and can adapt to different load masses and adjust the external excitation frequency by online real-time adjustment of the negative stiffness characteristic, and has excellent leveling performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 Shows a schematic structural diagram of a workbench attitude adjustment device according to an embodiment of the present disclosure.

[0016] Figure 2 Shows a Bode diagram of the operation of a workbench attitude adjustment device according to an embodiment of the present disclosure.

[0017] Reference Signs: 100: First shock absorber; 110: Plate spring; 120: Flexible hinge; 200: Second shock absorber; 210: Magnet; 220: Coil winding; 300: Sensor; 900: Workbench. Detailed implementation manners

[0018] In order to make the objectives, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below with reference to the accompanying drawings. Apparently, the described embodiments are only a part rather than all of the embodiments of the present disclosure. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present disclosure.

[0019] The terms used in the embodiments of the present disclosure are only for the purpose of describing specific embodiments, and are not intended to limit the present disclosure. The singular forms "a", "the" and "said" used in the embodiments of the present disclosure and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. "Plural" generally includes at least two.

[0020] It should be understood that the term "and / or" used herein is only a kind of association relationship describing associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " herein generally represents an "or" relationship between the associated objects before and after.

[0021] It should be understood that although the terms first, second, third, etc. may be used to describe structures in the embodiments of the present disclosure, these structures should not be limited to these terms. These terms are only used to distinguish different structures. For example, without departing from the scope of the embodiments of the present disclosure, the first component may also be referred to as the second component, and similarly, the second component may also be referred to as the first component.

[0022] Depending on the context, the words "if", "when" as used herein can be interpreted as "when...", "when...", "in response to determining" or "in response to detecting". Similarly, depending on the context, the phrase "if determined" or "if detected (stated condition or event)" can be interpreted as "when determined", "in response to determining", "when detected (stated condition or event)", or "in response to detecting (stated condition or event)".

[0023] It should also be noted that the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a commodity or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such commodity or device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the presence of additional identical elements in the commodity or device comprising said element.

[0024] In the related art, a passive vibration isolation table is composed of mass, spring and damping, without the need for external energy input. However, since the parameters are fixed, it can only have vibration isolation performance at the operating frequency (greater than the square root of two times the natural frequency) and cannot cope with low-frequency vibration and environmental vibration with variable frequencies. A semi-active vibration isolation table is also composed of mass, spring and damping, but it can adjust its own stiffness or damping to adapt to changes in external working conditions, that is, it can adapt to vibrations with variable frequencies in the external environment. However, due to the lack of sensors, it cannot self-adjust the parameters of the vibration isolation table according to changes in external working conditions, that is, it cannot adapt to changes in load mass. An active vibration isolation table adds sensors and actuators on the basis of passive vibration isolation, and adjusts the parameters of the vibration isolation table itself (stiffness and damping) in real time by monitoring changes in external working conditions, and outputs active control force in real time to offset external environmental vibration. Through continuous external energy input, it has a good inhibitory effect on low-frequency environmental vibration, can greatly make up for the defects of passive control, and significantly increase the vibration isolation bandwidth of the system. Traditional linear passive vibration isolation tables usually require a relatively low natural frequency to achieve low-frequency vibration isolation. However, in actual engineering, the support stiffness of the load must be relatively high to avoid static deflection and ensure the stability of the system. At this time, a negative stiffness spring is introduced, that is, the load increment is opposite to the displacement increment, which will cause the vibration isolation table to become unstable and deviate from the equilibrium position under the action of environmental vibration. Connecting it in parallel with a linear passive vibration isolation table can offset the positive stiffness at the equilibrium position without affecting static deflection, thereby realizing a vibration isolation table with quasi-zero stiffness characteristics. It can effectively reduce the natural frequency of the system and also provide a relatively high static stiffness. After suppressing the influence of environmental vibration, pointing and leveling errors also affect the machining and measurement accuracy of precision equipment. Perform high-precision pose compensation on workpieces, lenses, etc., eliminate pointing or leveling errors, and ensure machining and detection effects. In order to meet the leveling function of precision equipment, an additional leveling mechanism is mostly selected, but the series connection of the two systems will make the entire system structure complex, and since the two systems are independent of each other, it will significantly affect the vibration isolation and leveling effects.

[0025] To solve at least one of the above-mentioned technical problems, the present disclosure provides a posture adjustment device for a workbench 900 and a vibration isolation table. The posture adjustment device for the workbench 900 includes: a first shock absorber 100, one end of the first shock absorber 100 is configured to be connected to the back surface of the workbench 900 and provide flexible support for the workbench 900; a second shock absorber 200, one end of the second shock absorber 200 is configured to be connected to the back surface of the workbench 900; a sensor 300, the sensor 300 is connected to the second shock absorber 200, and the sensor 300 is configured to detect the posture of the workbench 900; wherein, there are multiple second shock absorbers 200, and the number of the sensors 300 corresponds one-to-one to the number of the second shock absorbers 200; the second shock absorber 200 includes: a controller and a driving unit, the controller generates a control strategy according to the feedback data of the sensor 300, and the driving unit applies a force to the workbench 900 according to the control strategy. The problem to be solved by the present disclosure is that precision manufacturing equipment is limited in equipment installation, adjustment, testing and manufacturing accuracy due to environmental low-frequency vibration interference and leveling error. Furthermore, an active quasi-zero (second shock absorber 200) stiffness vibration isolation (first shock absorber 100) and posture adjustment integrated platform is proposed, which can suppress the influence of environmental low-frequency vibration on precision manufacturing equipment and reduce the leveling error under different load masses and external excitation frequency conditions. By using the idea of positive position feedback control, the electromagnetic actuator has an adjustable negative stiffness characteristic, and is connected in parallel with a positive stiffness spring to form an adjustable stiffness quasi-zero stiffness characteristic to adapt to the change of the external environmental excitation frequency. Through the active damping control scheme, the low-frequency vibration isolation ability of the system is improved and the resonance peak of the system is reduced, and it can adapt to the change of the load mass. While isolating environmental low-frequency vibration, the flatness of the load is ensured.

[0026] The optional embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

[0027] Figure 1 The structural schematic diagram of the posture adjustment device for the workbench 900 according to an embodiment of the present disclosure is shown. As Figure 1As shown, according to a specific embodiment of the present disclosure, on the one hand, a posture adjustment device for a workbench 900 is provided. The posture adjustment device for the workbench 900 includes: a first shock absorber 100, one end of the first shock absorber 100 is configured to be connected to the back surface of the workbench 900 and provide flexible support for the workbench 900; a second shock absorber 200, one end of the second shock absorber 200 is configured to be connected to the back surface of the workbench 900; a sensor 300, the sensor 300 is connected to the second shock absorber 200, and the sensor 300 is configured to detect the posture of the workbench 900; wherein, there are multiple second shock absorbers 200, and the number of sensors 300 corresponds one-to-one to the number of second shock absorbers 200; the second shock absorber 200 includes: a controller and a driving unit, the controller generates a control strategy according to the feedback data of the sensor 300, and the driving unit applies a force to the workbench 900 according to the control strategy. The posture adjustment device for the workbench 900 provided by the present disclosure realizes the negative stiffness characteristic through the method of positive position feedback by the second shock absorber 200, and realizes the quasi-zero stiffness characteristic by connecting the first shock absorber 100 in parallel with a positive stiffness spring. At the same time, due to the non-contact characteristic of the electromagnetic force, the size of the vibration isolation table is reduced and the structure is more compact. The present disclosure has good low-frequency vibration isolation performance, and can adapt to different load masses and adjust the external excitation frequency by online real-time adjustment of the negative stiffness characteristic, and has excellent leveling performance.

[0028] The present disclosure combines the leveling function and the vibration isolation function. And the driving unit is used both as a negative stiffness spring in the quasi-zero stiffness characteristic and as an active actuator in the active damping control, serving two purposes with one body, greatly reducing the size of the vibration isolation and posture adjustment integrated platform, and the structure is simple and compact.

[0029] In some embodiments, the sensor 300 includes: a velocity sensor 300, the velocity sensor 300 is configured to measure the relative velocity of the workbench 900, and the controller is based on the measurement of the velocity sensor 300. The present disclosure monitors the absolute velocity feedback controller of the load through the velocity sensor 300 arranged on the load, and adopts an active damping control scheme to apply a control current electromagnetic driving force to the driving unit to generate a control force to counteract the external environmental vibration, improve the low-frequency vibration isolation ability of the system and reduce the resonance peak of the system. When the load mass changes, there is no need to manually adjust the parameters of the vibration isolation table.

[0030] In an alternative embodiment, the sensor 300 includes: a displacement sensor 300 configured to measure displacement data of the magnet 210. During actual use, when the attitude adjustment device of the workbench 900 operates, the displacement sensor 300 disposed at the magnet 210 measures the displacement of the magnet 210 and inputs it to the controller. The controller sends a control signal, which, after passing through a power amplifier, outputs a drive current to the drive unit to online control the output force to endow the drive unit with a negative stiffness characteristic and reduce the system fundamental frequency. Due to the addition of the displacement sensor 300, positive position feedback is adopted to achieve an online real-time controllable quasi-zero stiffness characteristic. The speed sensor 300 disposed on the workbench 900 and the three displacement sensors 300 respectively measure the speed of the workbench 900 and the angular displacements at three positions, and feed them back to the controller. The controller sends the control strategy, which, after passing through a power amplifier, controls the drive unit to suppress ambient low-frequency vibrations and level the workbench. The active quasi-zero stiffness vibration isolation and attitude adjustment integrated platform can adapt to changing load masses and external environmental excitation frequencies online and has excellent leveling performance. In view of the problem that the negative stiffness characteristic in the existing electromagnetic quasi-zero stiffness vibration isolation table cannot be adjusted independently, the present disclosure proposes a negative stiffness spring with an adjustable negative stiffness characteristic based on positive position feedback. Through the control idea of servo feedback, the displacement of the magnet 210 is monitored to control the current in the coil winding 220, and the excitation magnetic flux is accurately adjusted in real time, thereby changing the bias magnetic field around the permanent magnet 210 to achieve the self-adjustability of the negative stiffness characteristic and expand the application prospects of the electromagnetic quasi-zero stiffness vibration isolation table.

[0031] In some embodiments, the first vibration absorber 100 includes: a plate spring piece 110, one end of the plate spring piece 110 being configured to be connected to the back surface of the workbench 900; and a flexible hinge 120, one end of the flexible hinge 120 being connected to the other end of the plate spring piece 110. In some embodiments, the drive unit includes: a magnet 210, one end of the magnet 210 being configured to be connected to the back surface of the workbench 900; and a coil winding 220, one end of the coil winding 220 being connected to the other end of the magnet 210. In some embodiments, the magnet 210 is a permanent magnet 210 or a rubidium magnet. In terms of the leveling function, three displacement sensors 300 are arranged at positions corresponding to three single-degree-of-freedom vibration isolators on the load to measure the angular displacement of the load, which is fed back to the controller and leveled by an electromagnetic actuator. It should be noted that the flexible hinge 120 provides axial rotation for the workbench 900, which can be understood as the workbench 900 can rotate up or down in the X and Y directions.

[0032] Specifically, the magnet 210 and the coil winding 220 form an electromagnetic actuator. The electromagnetic actuator not only acts as a negative stiffness spring in parallel with the positive stiffness spring plate to endow the vibration isolation table with quasi-zero stiffness characteristics, but also participates in active damping control as an active actuator to achieve suppression of environmental vibration. In an alternative embodiment, the magnet 210 and the coil winding 220 are connected in a non-contact manner. It can be understood that one end of the magnet 210 is connected to the back surface of the workbench 900, and a part of the magnet 210 is disposed inside the coil winding 220 without contacting the coil winding 220; the supporting force of the workbench 900 is completely provided by the first shock absorber 100. In terms of vibration isolation function, the second shock absorber 200 adopts an active vibration control scheme, uses the electromagnetic actuator as an active vibration isolation element, and uses the plate spring 110 as a passive vibration isolation element. At the same time, in order to reduce the natural frequency of the system, a displacement sensor 300 is arranged at the permanent magnet 210 in the electromagnetic actuator, and a positive position feedback control scheme is adopted to make the electromagnetic force between the coil winding 220 and the permanent magnet 210 in the electromagnetic actuator have negative stiffness characteristics, and is connected in parallel with the leaf spring as a positive stiffness spring to form quasi-zero stiffness characteristics. Due to the addition of the displacement sensor 300, the controller can apply an externally adjustable current to the coil winding 220 in real time, and the electromagnetic force generated by the magnet 210 can be self-adjusted to achieve an online adjustable negative stiffness value to adapt to the change of the environmental vibration excitation frequency. On this basis, using the sensor 300 arranged on the load, a speed feedback control scheme is adopted to improve the low-frequency vibration isolation performance of the system and can adapt to the change of the load mass. In an alternative embodiment, the plate spring 110 is made of 65 manganese steel, which has certain flexibility and plasticity after heat treatment; the material of the adapter block and the support rod is aluminum alloy or titanium alloy that is non-magnetic or weakly magnetic.

[0033] In some embodiments, the first shock absorber 100 is configured to be disposed at the center of the back surface of the workbench 900. In some embodiments, a plurality of the second shock absorbers 200 are uniformly arranged on the back surface of the workbench 900. In some embodiments, the distances between the second shock absorbers 200 are the same, and the distance from each second shock absorber 200 to the first shock absorber 100 is also the same. In some embodiments, there are at least three second shock absorbers 200, and the second shock absorbers 200 are uniformly arranged around the first shock absorber 100. Specifically, three single-degree-of-freedom vibration isolators (the second shock absorbers 200) are used to support the load in an equilateral triangle installation manner, and a two-degree-of-freedom flexible hinge 120 (the first shock absorber 100) with central support is arranged at the center of the triangle to limit the degrees of freedom of the platform.

[0034] Figure 2 A Bode plot showing the operation of the workbench attitude adjustment device according to an embodiment of the present disclosure is shown. As Figure 2As shown, where the abscissa, i.e., the X-axis, is the vibration frequency, and the ordinate, i.e., the Y-axis, is the amplitude value. The long-dashed line with short dashes is passive vibration isolation, i.e., the vibration isolation curve of the system without applying active control. The system amplitude will be significantly amplified at the resonance peak. The short-dashed line with shorter dashes is the vibration isolation curve of the system after achieving quasi-zero stiffness based on positive position feedback through an electromagnetic actuator. It can be seen that the resonance peak of the system shifts to the left, i.e., the system stiffness decreases. The solid line is adding active damping control on the basis of quasi-zero stiffness based on positive position feedback, which reduces the amplitude of the system resonance peak and improves the vibration isolation performance of the system. Thus, it can be known that the attitude adjustment device of the workbench 900 according to the present disclosure has good low-frequency vibration isolation performance, and at the same time can adapt to different load masses and adjust the external excitation frequency by online real-time adjustment of the negative stiffness characteristics, and has excellent leveling performance. According to a specific embodiment of the present disclosure, on the other hand, a vibration isolation table is provided, and the vibration isolation table includes: the attitude adjustment device of the workbench 900 as described in any one of the above embodiments.

[0035] In some embodiments, the vibration isolation table further includes: a workbench 900 and a base. The attitude adjustment device of the workbench 900 is provided on the back surface of the workbench 900, and the base is provided at one end of the attitude adjustment device of the workbench 900 away from the workbench 900.

[0036] The present disclosure aims to protect a posture adjustment device for a workbench 900 and a vibration isolation table. The posture adjustment device for the workbench 900 includes: a first shock absorber 100, one end of the first shock absorber 100 is configured to be connected to the back surface of the workbench 900 and provide flexible support for the workbench 900; a second shock absorber 200, one end of the second shock absorber 200 is configured to be connected to the back surface of the workbench 900; a sensor 300, the sensor 300 is connected to the second shock absorber 200, and the sensor 300 is configured to detect the posture of the workbench 900; wherein, there are multiple second shock absorbers 200, and the number of the sensors 300 corresponds one-to-one to the number of the second shock absorbers 200; the second shock absorber 200 includes: a controller and a driving unit, the controller generates a control strategy according to the feedback data of the sensor 300, and the driving unit applies a force to the workbench 900 according to the control strategy. The problem to be solved by the present disclosure is that the precision manufacturing equipment is limited by the environmental low-frequency vibration interference and leveling error during equipment installation, adjustment, testing and manufacturing. Furthermore, an active quasi-zero (second shock absorber 200) stiffness vibration isolation (first shock absorber 100) and posture adjustment integrated platform is proposed, which can suppress the influence of environmental low-frequency vibration on the precision manufacturing equipment and reduce the leveling error under different load masses and external excitation frequency conditions. The posture adjustment device for the workbench 900 provided by the present disclosure realizes the negative stiffness characteristic through the method of positive position feedback of the second shock absorber 200, and realizes the quasi-zero stiffness characteristic by connecting the first shock absorber 100 in parallel with a positive stiffness spring. At the same time, due to the non-contact characteristic of the electromagnetic force, the size of the vibration isolation table is reduced and the structure is more compact. The present disclosure has good low-frequency vibration isolation performance, and can adapt to different load masses and adjust the external excitation frequency by online real-time adjustment of the negative stiffness characteristic, and has excellent leveling performance.

[0037] Finally, it should be noted that the embodiments in this specification are described in a progressive manner, and the key points of each embodiment are the differences from other embodiments. The same or similar parts among the embodiments can be referred to each other. For the system or device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the description of the method part.

[0038] The above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them; although the present disclosure has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present disclosure.

Claims

1. A workbench attitude adjustment device, characterized in that, Comprising: A first shock absorber, one end of the first shock absorber is configured to be connected to the back surface of the workbench and provide flexible support for the workbench; A second shock absorber, one end of the second shock absorber is configured to be connected to the back surface of the workbench; A sensor, the sensor is connected to the second shock absorber, and the sensor is configured to detect the attitude of the workbench; Wherein, there are multiple second shock absorbers, and the number of sensors corresponds one-to-one to the number of second shock absorbers; the second shock absorber includes: a controller and a driving unit, the controller generates a control strategy according to the feedback data of the sensor, and the driving unit applies a force to the workbench according to the control strategy.

2. The workbench attitude adjustment device according to claim 1, characterized in that, The first shock absorber includes: A plate spring, one end of the plate spring is configured to be connected to the back surface of the workbench; A flexible hinge, one end of the flexible hinge is connected to the other end of the plate spring.

3. The workbench attitude adjustment device according to claim 1, characterized in that, The driving unit includes: A magnet, one end of the magnet is configured to be connected to the back surface of the workbench; A coil winding, one end of the coil winding is connected to the other end of the magnet.

4. The workbench attitude adjustment device according to claim 1, characterized in that, The sensor includes: A speed sensor, the speed sensor is configured to measure the relative speed of the workbench, and the controller is based on the measurement of the speed sensor.

5. The workbench attitude adjustment device according to claim 3, characterized in that, The magnet is a permanent magnet or a rubidium magnet.

6. The workbench attitude adjustment device according to claim 1, characterized in that, The first shock absorber is configured to be disposed at the center of the back surface of the workbench.

7. The workbench attitude adjustment device according to claim 6, characterized in that, Multiple second shock absorbers are uniformly arranged on the back surface of the workbench.

8. The workbench attitude adjustment device according to claim 6, characterized in that, The distances between the second shock absorbers are the same, and the distance from each second shock absorber to the first shock absorber is also the same.

9. The workbench attitude adjustment device according to claim 8, characterized in that, There are at least three second shock absorbers, and the second shock absorbers are uniformly arranged around the first shock absorber.

10. An antivibration table, characterized in that, Comprising: The workbench attitude adjustment device according to any one of claims 1-9.

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