Optical path modulation spectral imaging system based on dynamic FP cavity

By using a combination of dynamic FP cavity and nanodrive mechanism in the spectral imaging system, the cavity length is adjusted to achieve spectral dynamic scanning and gaze spectral imaging, the problem of large space and heavy weight in the existing system is solved, and the system is lightweight and miniaturized and high-sensitivity observation is achieved.

CN120176845APending Publication Date: 2025-06-20SHANGHAI INSTITUTE OF TECHNICAL PHYSICS CHINESE ACADEMY OF SCIENCES

Patent Information

Application Number
CN202510374147.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-27
Publication Date
2025-06-20

AI Technical Summary

Technical Problem

In the existing spectral imaging system, spectroscopic components occupy a large space and are heavy in weight, and cannot achieve gaze spectral imaging, which limits the reduction of the system's volume, weight and cost.

Method used

The optical path modulation technology based on dynamic FP cavity is adopted, and the cavity length of the dynamic FP cavity is adjusted through a nano-drive mechanism to realize spectral dynamic scanning and gaze spectral imaging.

Benefits of technology

It realizes the lightweight and low-cost spectral imaging system, and can perform hyperspectral or hyperspectral observations, improving the gaze observation time and detection sensitivity.

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Abstract

The invention provides an optical path modulation spectral imaging system based on a dynamic FP cavity, and the system comprises a window which is used for carrying out the broadband filtering of incident light of a target scene; the telescope is connected with the window and used for converting incident light passing through the window into nearly parallel light; the dynamic FP cavity light splitting assembly is connected with the telescope and comprises a dynamic FP cavity and a nanometer driving mechanism, and the nanometer driving mechanism adjusts the cavity length of the dynamic FP cavity so as to realize staring type light splitting on the nearly parallel light, so that narrow-band spectrums with different central wavelengths can be obtained by different cavity lengths; the rear optical lens group is connected with the dynamic FP cavity light splitting assembly and is used for carrying out light path focusing and chromatic aberration correction on the light splitting signal output by the dynamic FP cavity light splitting assembly; and the detector is connected with the rear optical lens group and is used for receiving the imaging signal. The optical path modulation spectral imaging system based on the dynamic FP cavity can realize spectral dynamic scanning and staring spectral imaging by adjusting the cavity length of the dynamic FP cavity.
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Description

Technical Field

[0001] The present invention relates to the technical field of spectral imaging, and particularly to an optical path modulation spectral imaging system based on a dynamic FP cavity. Background Art

[0002] Spectral imaging technology can simultaneously obtain the geometric, radiation, and spectral information of a target. While acquiring the geometric image of the target in space-to-ground observation, hundreds of continuous and fine ground object spectral data can be obtained to achieve the purpose of directly identifying surface substances. Spectral imaging technology has great advantages in applications such as precise classification of ground objects, target recognition, and extraction of ground object characteristic information, and has become a major hot spot and main technical means in the field of remote sensing.

[0003] A staring imaging system uses a focal plane array detector, and the detector pixels correspond one-to-one with the spatial positions of the target scene. During operation, the detector remains stationary, directly receives the optical signals of the entire field of view, and realizes image generation through electronic readout. Different from traditional scanning imaging, scanning imaging needs to obtain images row by row / point by point through mechanical movement, while staring imaging omits the scanning mechanism, achieving lightweight, real-time, and reliable performance.

[0004] The beam splitting component is the core of the spectral imaging system. Currently, gratings or prisms are generally used for beam splitting, and the beam splitting component occupies a large space, resulting in a large system volume and heavy weight. Secondly, grating or prism beam splitting relies on a push-broom scanning device or satellite push-broom to obtain spectral images and cannot achieve staring spectral imaging. Summary of the Invention

[0005] In view of the above problems, the purpose of the present invention is to provide an optical path modulation spectral imaging system based on a dynamic FP cavity, which can realize spectral dynamic scanning and staring spectral imaging by adjusting the cavity length of the dynamic FP cavity.

[0006] The present invention provides an optical path modulation spectral imaging system based on a dynamic FP cavity. The system includes: a window for performing broadband filtering on the incident light of the target scene; a telescope connected to the window for converting the incident light passing through the window into near-parallel light; a dynamic FP cavity beam splitting component connected to the telescope, including a nano-driving mechanism and a dynamic FP cavity, where the nano-driving mechanism adjusts the cavity length of the dynamic FP cavity to achieve staring beam splitting of the near-parallel light, so that narrowband spectra with different central wavelengths are obtained at different cavity lengths; a rear optical lens group connected to the dynamic FP cavity beam splitting component for performing optical path focusing and chromatic aberration correction on the beam splitting signal output by the dynamic FP cavity beam splitting component; and a detector connected to the rear optical lens group for receiving the imaging signal output by the rear optical lens group.

[0007] In an embodiment of the present invention, the dynamic FP cavity includes a static FP cavity wafer and a movable FP cavity wafer arranged longitudinally in parallel; the nano-driving mechanism includes a supporting component and a nano-driving component. The supporting component is used to fix the static FP cavity wafer, and the nano-driving component is used to drive the movable FP cavity wafer to adjust the cavity length between the static FP cavity wafer and the movable FP cavity wafer.

[0008] In an embodiment of the present invention, the nano-driving component includes a nano-driver, a capacitance sensor, and a controller; the nano-driver is used to drive the movable FP cavity wafer, the capacitance sensor is used to measure the cavity length; the controller is used to achieve cavity length control according to the cavity length output by the nano-driver and the cavity length measured by the capacitance sensor.

[0009] In an embodiment of the present invention, it is characterized in that the nano-driver adopts a piezoelectric ceramic driver.

[0010] In an embodiment of the present invention, the static FP cavity wafer and the movable FP cavity wafer adopt a dielectric thin film with alternating high refractive index materials and low refractive index materials as the mirror structure.

[0011] In an embodiment of the present invention, the low refractive index material adopts SiO2, and the high refractive index material adopts one of Si, GaAs, AlAs, Ge, InP, GaP, and TiO2.

[0012] In an embodiment of the present invention, the spectral segment of the dynamic FP cavity beam splitting component is the short-wave infrared spectral segment, the mid-wave infrared spectral segment, or the long-wave infrared spectral segment, and the corresponding detectors respectively adopt short-wave infrared detectors, mid-wave infrared detectors, or long-wave infrared detectors.

[0013] In an embodiment of the present invention, the system further includes a system base plate, a temperature control component, and a vibration isolation component; the system base plate is used to support the window, the telescope, the dynamic FP cavity beam splitting component, the rear optical lens group, and the detector; the vibration isolation component is connected to the detector and is used to achieve vibration isolation of the detector; the temperature control component is used to achieve temperature control of the dynamic FP cavity beam splitting component.

[0014] In an embodiment of the present invention, the telescope adopts a coaxial two-mirror telescope.

[0015] In an embodiment of the present invention, the rear optical lens group includes 5 pieces of optical glass.

[0016] As described above, the optical path modulation spectral imaging system based on the dynamic FP cavity of the present invention has the following beneficial effects:

[0017] (1) A dynamic FP cavity spectroscopic component is formed by combining a dynamic FP cavity and a nano-driving mechanism, which greatly simplifies the spectroscopic system of the spectral imaging system, thus significantly reducing the volume, weight and cost of the spectral imaging system.

[0018] (2) Through the design of parameters such as the number of dielectric reflection films of the dynamic FP cavity, hyperspectral or ultraspectral observation can be achieved; at the same time, due to the staring spectral imaging function of the system, the staring observation time can be increased to ensure high detection sensitivity under the condition of narrow spectral bandwidth observation, so that hyperspectral or ultraspectral high-sensitivity observation can be achieved simultaneously, and high-quality hyperspectral or ultraspectral images can be obtained.

[0019] (3) The dynamic FP cavity can be applied to the short-wave infrared, mid-wave infrared and long-wave infrared spectral bands respectively, and combined with the nano-driving mechanism to form a short-wave infrared dynamic FP cavity spectroscopic component, a mid-wave infrared dynamic FP cavity spectroscopic component or a long-wave infrared dynamic FP cavity spectroscopic component, which are respectively matched with short-wave infrared, mid-wave infrared and long-wave infrared detectors to form short-wave / mid-wave / long-wave infrared hyperspectral or ultraspectral imaging systems, and have broad application prospects in the fields of resource exploration, surface environment monitoring, atmospheric environment monitoring, agriculture and forestry monitoring, water conservancy monitoring, military reconnaissance, etc. Description of the Drawings

[0020] Figure 1 Shown is a schematic structural diagram of the optical path modulation spectral imaging system based on the dynamic FP cavity of the present invention in an embodiment.

[0021] Figure 2 Shown is an optical path diagram of the optical path modulation spectral imaging system based on the dynamic FP cavity of the present invention in an embodiment.

[0022] Figure 3(a) shows a schematic diagram of the center wavelength of the transmission peak corresponding to different cavity lengths in the present invention in an embodiment.

[0023] Figure 3(b) shows a schematic diagram of the spectral transmittance curve corresponding to different cavity lengths in the present invention in an embodiment.

[0024] Figure 4 Shown is a flowchart of the optical path modulation spectral imaging method based on the dynamic FP cavity of the present invention in an embodiment. Detailed Embodiments

[0025] The following specific examples illustrate the embodiments of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0026] It should be noted that the diagrams provided in the following embodiments only illustrate the basic concept of the present invention in a schematic manner. Therefore, only the components related to the present invention are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components in actual implementation. The types, quantities, and proportions of the components in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0027] The Fabry - Pérot cavity (FP cavity) is an optical device based on multi - beam interference. The optical path modulation spectral imaging system based on a dynamic FP cavity of the present invention uses a nano - driving mechanism to adjust the cavity length of the dynamic FP cavity for spectral dynamic scanning to achieve staring hyperspectral or ultraspectral imaging, thereby constructing a lightweight, miniaturized, and low - cost spectral imaging system.

[0028] Next, the technical solutions in the embodiments of the present invention will be described in detail with reference to the accompanying drawings in the embodiments of the present invention.

[0029] As Figure 1 and Figure 2 shown, in one embodiment, the optical path modulation spectral imaging system based on a dynamic FP cavity of the present invention includes a window 1, a telescope 2, a dynamic FP cavity beam - splitting component 3, a rear optical lens group 4, and a detector 5.

[0030] The window 1 is used for broadband filtering of the incident light of the target scene.

[0031] The telescope 2 is connected to the window 1 and is used to convert the incident light passing through the window into near - parallel light.

[0032] The dynamic FP cavity beam - splitting component 3 is connected to the telescope 2 and includes a nano - driving mechanism and a dynamic FP cavity. The nano - driving mechanism adjusts the cavity length of the dynamic FP cavity to achieve staring beam splitting of the near - parallel light, so that narrow - band spectra with different central wavelengths are obtained at different cavity lengths.

[0033] As Figure 2 shown, in one embodiment, the dynamic FP cavity includes an FP cavity stationary plate 31 and an FP cavity movable plate 32 arranged longitudinally in parallel. The nano - driving mechanism includes a support component 33 and a nano - driving component 34. The support component 33 is used to fix the FP cavity stationary plate 31, and the nano - driving component 34 is used to drive the FP cavity movable plate 32 to adjust the cavity length between the FP cavity stationary plate 31 and the FP cavity movable plate 32, so that the peak wavelength of the dynamic FP cavity changes continuously, thereby achieving staring hyperspectral or ultraspectral imaging.

[0034] Preferably, the nano-driving component includes a nano-driver 341, a capacitance sensor 342, and a controller (not shown in the figure). The nano-driver 341 is used to drive the moving piece of the FP cavity. The capacitance sensor 342 is used to measure the cavity length. The controller is used to compare the cavity length output by the nano-driver with the cavity length measured by the capacitance sensor 342, and use the obtained error as a correction amount to achieve higher-precision cavity length control of the dynamic FP cavity 32. Among them, the nano-driver 341 adopts a piezoelectric ceramic driver, which uses the deformation generated by the piezoelectric material under the action of an electric field to achieve the control of minute displacement. The piezoelectric material will generate deformation under the action of an electric field, and this deformation is proportional to the applied voltage. By adjusting the amplitude and polarity of the driving voltage, the deformation amount of the piezoelectric ceramic can be precisely controlled, thereby realizing the nano-level adjustment of the cavity length. Therefore, the closed-loop feedback control strategy using the piezoelectric ceramic driver and the capacitance sensor makes the cavity length adjustment accuracy of the present invention better than 3 nm.

[0035] In one embodiment, the spectral band of the dynamic FP cavity spectroscopic component can be the short-wave infrared spectral band, the mid-wave infrared spectral band, or the long-wave infrared spectral band, and the corresponding detectors respectively adopt short-wave infrared detectors, mid-wave infrared detectors, or long-wave infrared detectors, so as to meet the hyperspectral or ultraspectral imaging requirements of different application scenarios.

[0036] The rear optical lens group 4 is connected to the dynamic FP cavity spectroscopic component 3, and is used for optical path focusing and chromatic aberration correction of the spectroscopic signal output by the dynamic FP cavity spectroscopic component 3.

[0037] The detector 5 is connected to the rear optical lens group 4 and is used to receive the imaging signal output by the rear optical lens group 4.

[0038] The following takes the optical path modulation spectroscopic imaging system based on the dynamic FP cavity with a spectral wavelength of 1.0 μm - 1.6 μm as an example for further illustration.

[0039] The aperture of the window is 64 mm, the material is sapphire, and an antireflection film with a wavelength range of 1.0 μm - 1.6 μm is coated to improve the optical efficiency, and a front cut-off film with a wavelength of 0.985 μm and a rear cut-off film with a wavelength range of 1.7 μm - 2.5 μm are coated to avoid multi-order spectral interference.

[0040] The telescope adopts a front-mounted coaxial two-mirror telescope, including a primary mirror with an aperture of 64 mm and a secondary mirror with an aperture of 22 mm. The material is microcrystalline and has a good thermal expansion coefficient. According to the simulation analysis of the efficiency of the dynamic FP cavity film system, the divergence angle of the incident light of the dynamic FP cavity needs to be as small as possible. Therefore, the front-mounted coaxial two-mirror telescope emits parallel light, which is incident into the dynamic FP cavity, and the light with an angle of ≤1.7° is incident into the rear optical lens group 4 after the spectral tuning of the dynamic FP cavity.

[0041] The dynamic FP cavity uses a dielectric thin film with alternating high-refractive-index materials and low-refractive-index materials as the mirror structure. The low-refractive-index material is SiO2, and the high-refractive-index material is one of Si, GaAs, AlAs, Ge, InP, GaP, and TiO2. Reasonable material selection can make the transmittance of the dynamic FP cavity above 0.80, with a small peak half-width and a large adjustment range.

[0042] For the thin film design of the dynamic FP cavity, when the thickness of the Si layer is 0.084 μm and the thickness of the SiO2 layer is 0.234 μm, the change range of the cavity length is 0.42 μm - 0.90 μm, and the corresponding central wavelength position is 1.0 μm - 1.6 μm. The transmittance is greater than 0.80 within this range. There is a single transmission peak in the spectral range of 1.0 μm - 1.6 μm, and no secondary transmission peak. The central wavelength of the transmission peak corresponding to different cavity lengths of the dynamic FP cavity and the spectral transmittance curve are shown in FIGS. 3(a) and 3(b).

[0043] Analyze the control requirements of the nano-driving mechanism corresponding to the dynamic FP cavity. To achieve spectral filtering in the spectral range of 1.0 μm - 1.6 μm for the dynamic FP cavity, the cavity length needs to be precisely controlled between 420 nm and 900 nm. The initial cavity length of the dynamic FP cavity is 420 nm, and the maximum cavity length is 900 nm. The required single translation distance is 13 nm, and the absolute positioning error is less than 3 nm.

[0044] The rear optical lens group consists of 5 pieces of optical glass, ensuring the focusing accuracy of the optical path. Specifically, the rear optical lens group is composed of five pieces of optical glass, namely H-ZF71, H-ZPK7, K4A, H-LAF2, and H-LAK11. Through the synergistic combination and complementary advantages of high-refractive-index materials (H-ZF71 / H-ZPK7), low-dispersion crown glass (K4A), and special dispersion materials (H-LAF2 / H-LAK11), excellent chromatic aberration correction and system miniaturization design are achieved.

[0045] The detector selected is an InGaAs detector, with a detector scale of 640 × 512 and a pixel size of 15 μm × 15 μm.

[0046] As Figure 1 shown, in an embodiment, the optical path modulation spectral imaging system based on a dynamic FP cavity of the present invention further includes a system base plate 6, a temperature control component (not shown in the figure), and a vibration isolation component 7.

[0047] The system base plate 6 is used to support the window 1, the telescope 2, the dynamic FP cavity beam splitting component 3, the rear optical lens group 4, and the detector 5. The vibration isolation component 7 is connected to the detector 5 to achieve vibration isolation of the detector 5. The temperature control component is used to control the temperature of the dynamic FP cavity beam splitting component. Among them, to ensure the temperature stability of the dynamic FP cavity beam splitting component, temperature control patches and temperature sensors are designed on the skin of the optical path modulation spectral imaging system based on the dynamic FP cavity of the present invention, and at the same time, heat dissipation is carried out on the heat source of the detector, so as to achieve high-precision temperature control of the new dynamic FP cavity beam splitting component to ensure the position stability of the dynamic FP cavity beam splitting component.

[0048] As Figure 4 shown, in one embodiment, the optical path modulation spectral imaging system based on the dynamic FP cavity of the present invention completes spectral imaging by the following steps:

[0049] S1. Selection of dynamic FP cavity band

[0050] Design the number of film layers of the dynamic FP cavity according to the system spectral resolution requirements, design the film layer thickness and band division of the FP cavity according to the system band requirements, and analyze and select the number of FP cavities according to the total system band range.

[0051] The dynamic FP cavity uses a multi-layer dielectric reflection film for spectral filtering, and high spectral or hyperspectral resolution is achieved by adjusting the number of film layer periods. It is necessary to ensure that within the wavelength range of λ min ≤λ≤λ max , each cavity length of the dynamic FP cavity corresponds to only a single transmission peak. If the spectral coverage band of the specific application of hyperspectral remote sensing does not meet the requirement of having only a single transmission peak, then the wavelength region between [λ min , λ max needs to be divided again so that within each sub-region, each cavity length of the dynamic FP cavity corresponds to only a single transmission peak.

[0052] S2. Spectral design of dynamic FP cavity

[0053] Perform spectral design of the dynamic FP cavity according to the system spectral channel number requirements, clarify the upper and lower cavity spacing of the FP for each spectral channel, and calculate the spectral resolution and transmittance of the FP cavity for each spectral channel.

[0054] S3. Optical adaptability analysis of dynamic FP cavity

[0055] Analyze the influence of the incident light angle of the pre-optical path on the spectral characteristics and transmittance of the dynamic FP cavity. When the cavity length of the FP remains unchanged, the peak wavelength of the FP cavity will change with the incident angle, resulting in differences in the spectral characteristics of the area array.

[0056] Analyze the parallelism tolerance of the upper and lower cavities of the FP. A poor parallelism will lead to a decrease in spectral transmittance and changes in spectral characteristics.

[0057] S4. Optical system design analysis and nano-drive mechanism design analysis

[0058] Based on the analysis results of the incident light angle in the front optical path, conduct the optical system design. Based on the design results of the dynamic FP cavity spectrum and the analysis results of the parallelism tolerance, conduct the nano-drive mechanism design analysis.

[0059] Design the optical system, which includes three parts: a front coaxial two-mirror telescope, a dynamic FP cavity, and a rear optical lens group. The front telescope uses a coaxial two-mirror telescope, consisting of a primary mirror and a secondary mirror. According to the simulation analysis, the divergence angle of the incident light in the dynamic FP cavity needs to be as small as possible. Therefore, the front telescope emits nearly parallel light, which is incident into the dynamic FP cavity. After the dynamic FP cavity tunes the spectrum of the incident light, a planar array single-spectrum image is formed and incident into the rear optical lens group. After the spectral information is converged, it is sensed by the detector. After completing the optical system design, conduct system tolerance, temperature adaptability, and stray light analysis.

[0060] The driver of the nano-drive mechanism uses a piezoelectric ceramic. The cavity length value of the dynamic FP cavity is monitored in real time through a high-precision capacitance sensor, and the movement is corrected, compensated, and controlled according to the preset parameters to achieve high-precision positioning.

[0061] S5. Structural system design analysis

[0062] Complete the structural system design analysis. The structure uses low-expansion materials to ensure the stability of the dynamic FP cavity in a complex environment. Vibration isolation design is carried out for the refrigerator used by the detector to ensure that the vibration of the refrigerator does not affect the position and angle stability of the dynamic FP cavity.

[0063] S6. Thermal control system design analysis

[0064] Conduct temperature adaptability analysis on the system, and conduct thermal control design analysis based on the temperature adaptability analysis results.

[0065] S7. Spectral imaging system construction

[0066] Construct an optical path modulated dynamic FP cavity spectral imaging system.

[0067] S8. Spectral imaging system testing

[0068] Test the optical path modulated dynamic FP cavity spectral imaging system.

[0069] It should be noted that in several embodiments provided by the present invention, it should be understood that the disclosed systems, devices or methods can be implemented in other ways. For example, the device embodiments described above are only illustrative. For example, the division of modules / units is only a logical function division. In actual implementation, there can be other division methods. For example, multiple modules or units can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed couplings or direct couplings or communication connections between each other can be through some interfaces, and the indirect couplings or communication connections of devices or modules or units can be in electrical, mechanical or other forms.

[0070] The modules / units described as separate components may or may not be physically separated, and the components displayed as modules / units may or may not be physical modules, that is, they can be located in one place, or can be distributed to multiple network units. Some or all of the modules / units can be selected according to actual needs to achieve the objectives of the embodiments of the present invention. For example, in each embodiment of the present invention, the functional modules / units can be integrated in a processing module, or each module / unit can exist physically alone, or two or more modules / units can be integrated in one module / unit.

[0071] Those of ordinary skill in the art should also further realize that the units and algorithm steps of each example described in combination with the embodiments disclosed in this article can be implemented by electronic hardware, computer software, or a combination of the two. To clearly illustrate the interchangeability of hardware and software, the composition and steps of each example have been generally described according to functions in the above description. Whether these functions are executed in a hardware or software manner depends on the specific application and design constraints of the technical solution. Professional technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of the present invention.

[0072] The above embodiments only exemplarily illustrate the principles and effects of the present invention, rather than being used to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. An optical path modulation spectral imaging system based on a dynamic FP cavity, characterized in that: The system comprises: A window for broadband filtering of incident light from a target scene; A telescope connected to the window, used to convert incident light passing through the window into nearly parallel light; A dynamic FP cavity spectroscopic component is connected to the telescope and includes a nano-drive mechanism and a dynamic FP cavity. The nano-drive mechanism adjusts the cavity length of the dynamic FP cavity to achieve staring-type spectroscopic analysis of the near-parallel light, so that different cavity lengths can obtain narrow-band spectra with different central wavelengths. A rear optical lens group, connected to the dynamic FP cavity light splitting component, for performing optical path focusing and chromatic aberration correction on the light splitting signal output by the dynamic FP cavity light splitting component; A detector is connected to the rear optical lens group and is used to receive the imaging signal output by the rear optical lens group.

2. The optical path modulation spectral imaging system based on dynamic FP cavity according to claim 1 is characterized in that: The dynamic FP cavity includes a FP cavity static plate and a FP cavity dynamic plate arranged in parallel longitudinally; the nano-driving mechanism includes a supporting component and a nano-driving component, the supporting component is used to fix the FP cavity static plate, and the nano-driving component is used to drive the FP cavity dynamic plate to adjust the cavity length between the FP cavity static plate and the FP cavity dynamic plate to realize staring-type spectrometry.

3. The optical path modulation spectral imaging system based on dynamic FP cavity according to claim 2 is characterized in that: The nano-drive component includes a nano-drive, a capacitive sensor and a controller; the nano-drive is used to drive the FP cavity rotor, and the capacitive sensor is used to measure the cavity length; the controller is used to control the cavity length according to the cavity length output by the nano-drive and the cavity length measured by the capacitive sensor.

4. The optical path modulation spectral imaging system based on the dynamic FP cavity according to claim 3 is characterized in that: The nano-actuator adopts a piezoelectric ceramic actuator.

5. The optical path modulation spectral imaging system based on dynamic FP cavity according to claim 2, characterized in that: The FP cavity static plate and the FP cavity dynamic plate use dielectric films made of alternating high refractive index materials and low refractive index materials as reflector structures.

6. The optical path modulation spectral imaging system based on dynamic FP cavity according to claim 4, characterized in that: The low refractive index material is SiO2, and the high refractive index material is one of Si, GaAs, AlAs, Ge, InP, GaP and TiO2.

7. The optical path modulation spectral imaging system based on dynamic FP cavity according to claim 1, characterized in that: The spectrum segment of the dynamic FP cavity spectroscopic component is a short-wave infrared spectrum segment, a medium-wave infrared spectrum segment or a long-wave infrared spectrum segment, and the corresponding detectors are short-wave infrared detectors, medium-wave infrared detectors or long-wave infrared detectors.

8. The optical path modulation spectral imaging system based on dynamic FP cavity according to claim 1, characterized in that: The system also includes a system base plate, a temperature control component and a vibration isolation component; the system base plate is used to support the window, the telescope, the dynamic FP cavity spectroscopic component, the rear optical lens group and the detector; the vibration isolation component is connected to the detector to achieve vibration isolation of the detector; the temperature control component is used to achieve temperature control of the dynamic FP cavity spectroscopic component.

9. The optical path modulation spectral imaging system based on dynamic FP cavity according to claim 1, characterized in that: The telescope adopts a coaxial two-reflection telescope.

10. The optical path modulation spectral imaging system based on dynamic FP cavity according to claim 1, characterized in that: The rear optical lens group includes 5 pieces of optical glass.

Citation Information

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