Testing system and testing method for pressure reducing device

Abstract

The invention provides a pressure reducing device testing system and method, and the system comprises an air inlet pipe, the air outlet end of which is at least communicated with an air distribution pipe; the plurality of test pipes are communicated with the gas distribution pipe, and a first normally closed diaphragm valve, a pressure sensor, a pressure reducing device and a second normally closed diaphragm valve are sequentially arranged on each test pipe; the pressure sensor is electrically connected with the control system, and the control system is in control connection with the first normally closed diaphragm valve and the second normally closed diaphragm valve. The pressure reducing devices with different interfaces and sizes can be accommodated and tested at the same time, independent control can be realized, a test platform does not need to be repeatedly built, and by arranging the pressure sensor, when the pressure reducing device fails, the pressure sensor cannot transmit a signal to a control system, so that the test failure is automatically detected, and the accurate test data is accurately recorded.

Description

Technical Field

[0001] The present invention relates to the technical field of decompression device testing, and particularly relates to a decompression device testing system and a testing method. Background Art

[0002] With the rapid development of semiconductor equipment and industry, the requirements for equipment automation and precision are getting higher and higher. Especially for the precise regulation of process gases in the semiconductor process, a high-precision decompression device is particularly important.

[0003] The decompression device needs to be subjected to reliability testing. At present, the reliability test period of the decompression device is long, which seriously affects the R & D progress and the product factory inspection progress. At the same time, some unreliable reliability tests will lead to inaccurate service life data of the decompression device and also affect the yield rate of the decompression device in production. Summary of the Invention

[0004] In view of this, the present invention provides a decompression device testing system and a testing method, which can simultaneously accommodate decompression devices with different interfaces and sizes for testing, and can be controlled individually, without the need to repeatedly build a testing platform. By setting a pressure sensor, when the decompression device fails, the pressure sensor cannot send a signal to the control system, and the test failure can be automatically detected, so as to accurately record accurate test data.

[0005] The present invention provides the following technical solutions: A decompression device testing system includes:

[0006] An intake pipe, and at least one branch pipe is connected to the outlet end of the intake pipe;

[0007] A plurality of test pipes, all of the plurality of test pipes are connected to the branch pipe, and a first normally closed diaphragm valve, a pressure sensor, a decompression device and a second normally closed diaphragm valve are sequentially arranged on each of the plurality of test pipes;

[0008] A control system, the pressure sensor is electrically connected to the control system, and the control system is control-connected to the first normally closed diaphragm valve and the second normally closed diaphragm valve.

[0009] Preferably, the control system includes a PLC control unit, and the PLC control unit is used for receiving the signal of the pressure sensor and controlling the first normally closed diaphragm valve and the second normally closed diaphragm valve.

[0010] Preferably, the PLC control unit controls the opening time and / or the closing time of the first normally closed diaphragm valve and the second normally closed diaphragm valve.

[0011] Preferably, the first normally closed diaphragm valve is a pneumatic normally closed diaphragm valve;

[0012] And / or, the second normally-closed diaphragm valve is a pneumatic normally-closed diaphragm valve.

[0013] Preferably, several of the pressure reducing devices include manual pressure reducing valves of the same type or different types. The inlet end of the manual pressure reducing valve is connected to the pressure sensor, and the outlet end of the manual pressure reducing valve is connected to the second normally-closed diaphragm valve.

[0014] Preferably, the control system controls the opening time and / or closing time of the first normally-closed diaphragm valve according to the type of the manual pressure reducing valve;

[0015] And / or, the control system controls the opening time and / or closing time of the second normally-closed diaphragm valve according to the type of the manual pressure reducing valve.

[0016] Preferably, there are two gas distribution pipes, and several test pipes are connected to each of the two gas distribution pipes.

[0017] Preferably, an air inlet end is provided on the air inlet pipe, and the air inlet end is connected to an external gas source.

[0018] A test method, which is applied to the pressure reducing device test system as described in any one of the above, and the test method includes:

[0019] S100, fully open the pressure reducing device to be tested, set the value of the pressure sensor according to the model of the pressure reducing device, and set the opening and closing times of the first normally-closed diaphragm valve and the second normally-closed diaphragm valve through the control system;

[0020] S300, connect the air inlet pipe to an external gas source, supply gas to the air inlet pipe, and adjust the gas source pressure according to the maximum value set by the pressure sensor. The gas in the air inlet pipe flows into the test pipes through the gas distribution pipes;

[0021] S500, the control system controls the first normally-closed diaphragm valve to open, and the second normally-closed diaphragm valve remains closed. The gas in the test pipes flows to the pressure sensor after passing through the first normally-closed diaphragm valve. When the gas pressure reaches the value set by the pressure sensor and stabilizes, the pressure sensor sends a signal to the control system. The control system controls the first normally-closed diaphragm valve to close, and then controls the second normally-closed diaphragm valve to open. The gas in the test pipes is discharged through the second normally-closed diaphragm valve, realizing a test of one intake and exhaust;

[0022] S700, repeat the above S500 step. When a certain pressure reducing device fails, the gas pressure cannot reach the value set by the pressure sensor, and the pressure sensor cannot send a signal to the control system. The control system automatically records the number of cycles.

[0023] Preferably, the value set by the pressure sensor is not less than 80% of the inlet pressure of the corresponding pressure reducing device.

[0024] Compared with the prior art, the beneficial effects that can be achieved by at least one of the above technical solutions adopted by the present invention at least include:

[0025] It can accommodate decompression devices with different interfaces and sizes for testing simultaneously, and can be controlled individually. There is no need to repeatedly build a test platform. By setting a pressure sensor, when the decompression device fails, the pressure sensor cannot send a signal to the control system, and it can automatically detect the test failure, thereby accurately recording accurate test data. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0027] Figure 1 is a schematic diagram of a decompression device test system provided by the present invention;

[0028] Figure 2 is a top view of a decompression device test system provided by the present invention.

[0029] In the figure, 1, intake pipe; 2, branch pipe; 3, test pipe; 4, first normally closed diaphragm valve; 5, pressure sensor; 6, decompression device; 7, second normally closed diaphragm valve; 8, control system. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] The embodiments of the present application will be described in detail below with reference to the drawings.

[0031] The following specific examples illustrate the implementation manners of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The present application can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts belong to the scope of protection of the present application.

[0032] It should be noted that the following description relates to various aspects of embodiments within the scope of the appended claims. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is for illustrative purposes only. Based on this application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement an apparatus and / or practice a method. Additionally, this apparatus can be implemented and this method can be practiced using other structures and / or functionality in addition to one or more of the aspects set forth herein.

[0033] It should also be noted that the diagrams provided in the following embodiments only illustrate the basic concept of this application schematically. Only the components related to this application are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0034] In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the aspects described can be practiced without these specific details.

[0035] In the precise regulation of process gases during semiconductor manufacturing processes, a high-precision pressure reduction device is particularly important. The pressure reduction device needs to undergo reliability testing. Currently, the reliability test cycle of the pressure reduction device is long, seriously affecting the R & D progress and the product factory inspection progress. At the same time, some unreliable reliability tests can lead to inaccurate service life data of the pressure reduction device and also affect the yield rate of the pressure reduction device in production.

[0036] The inventor has conducted extensive and in-depth experiments and designed a pressure reduction device testing system and testing method. It can simultaneously accommodate pressure reduction devices with different interfaces and sizes for testing, and can be individually controlled, eliminating the need to repeatedly set up a testing platform. At the same time, it can automatically detect test failures, thereby accurately recording accurate test data.

[0037] The following, in conjunction with the accompanying drawings, describes the technical solutions provided by the embodiments of this application.

[0038] As Figure 1 - Figure 2 shown, a pressure reduction device testing system includes:

[0039] An intake pipe 1, and at least one branch pipe 2 is connected to the outlet end of the intake pipe 1;

[0040] A number of test tubes 3, and a number of said test tubes 3 are all connected to the sub-air pipe 2. A first normally closed diaphragm valve 4, a pressure sensor 5, a pressure reducing device 6 and a second normally closed diaphragm valve 7 are sequentially arranged on each of the number of test tubes 3.

[0041] A control system 8, the pressure sensor 5 is electrically connected to the control system 8, and the control system 8 is controllably connected to the first normally closed diaphragm valve 4 and the second normally closed diaphragm valve 7.

[0042] By connecting at least one sub-air pipe 2 to the air outlet end of the air inlet pipe 1, and connecting a number of test tubes 3 to the sub-air pipe 2, each test tube 3 can correspond to a pressure reducing device 6 for testing, and different interfaces and sizes of pressure reducing devices 6 can be accommodated for testing simultaneously. By setting the pressure sensor 5, when the pressure reducing device 6 fails, the pressure sensor 5 cannot send a signal to the control system 8, realizing automatic detection of test failure. The control system 8 automatically records the cycle times of the corresponding pressure reducing device 6, so as to accurately record accurate test data.

[0043] As Figure 1 - Figure 2 shown, in some embodiments, the control system 8 includes a PLC control unit. The PLC control unit is used to receive the signal of the pressure sensor 5. The PLC control unit controls the first normally closed diaphragm valve 4 and the second normally closed diaphragm valve 7. By setting the PLC control unit, during testing, the PLC control unit controls the first normally closed diaphragm valve 4 to open. When the gas pressure received by the pressure sensor 5 reaches the set value, the pressure sensor 5 sends a signal to the PLC control unit. The PLC control unit controls the first normally closed diaphragm valve 4 to close, and at the same time controls the second normally closed diaphragm valve 7 to open, so that the gas flows through the pressure reducing device 6 and then flows out through the second normally closed diaphragm valve 7.

[0044] As Figure 1 - Figure 2 shown, in some embodiments, the PLC control unit controls the opening time and / or closing time of the first normally closed diaphragm valve 4 and the second normally closed diaphragm valve 7. By the PLC control unit controlling the opening time and / or closing time of the first normally closed diaphragm valve 4, and by the PLC control unit controlling the opening time and / or closing time of the second normally closed diaphragm valve 7, the PLC control unit can control the intake and exhaust time, and completing one intake and exhaust process is a reliability test cycle.

[0045] As Figure 1 - Figure 2As shown, in some embodiments, the first normally-closed diaphragm valve 4 is a pneumatic normally-closed diaphragm valve; the second normally-closed diaphragm valve 7 is a pneumatic normally-closed diaphragm valve. Both the first normally-closed diaphragm valve 4 and the second normally-closed diaphragm valve 7 are pneumatic normally-closed diaphragm valves, which have the advantages of compact structure, excellent sealing performance, simple operation, safety and reliability, corrosion resistance, wide applicability, and flexible flow regulation, and can meet the reliability test process of the pressure reducing device 6.

[0046] As Figure 1 - Figure 2 shown, in some embodiments, several of the pressure reducing devices 6 include manual pressure reducing valves of the same type or different types. The inlet end of the manual pressure reducing valve is connected to the pressure sensor 5, and the outlet end of the manual pressure reducing valve is connected to the second normally-closed diaphragm valve 7. According to the test requirements, manual pressure reducing valves of the same type or different types can be installed on the test pipe 3, and manual pressure reducing valves with different interfaces and sizes can be accommodated for testing simultaneously. According to the specifications of the manual pressure reducing valves, the values of the corresponding pressure sensors 5 are set.

[0047] As Figure 1 - Figure 2 shown, in some embodiments, the control system 8 controls the opening time and / or closing time of the first normally-closed diaphragm valve 4 according to the type of the manual pressure reducing valve; the control system 8 controls the opening time and / or closing time of the second normally-closed diaphragm valve 7 according to the type of the manual pressure reducing valve. According to the intake and exhaust time required for different types of manual pressure reducing valves, the control system 8 controls the opening time and / or closing time of the first normally-closed diaphragm valve 4 and the second normally-closed diaphragm valve 7 to achieve the control of the process time for one intake and exhaust process of different types of manual pressure reducing valves.

[0048] As Figure 1 - Figure 2 shown, in some embodiments, there are two gas distribution pipes 2, and several test pipes 3 are connected to each of the two gas distribution pipes 2. By providing two symmetrically arranged gas distribution pipes 2, and multiple test pipes 3 are connected to each of the two gas distribution pipes 2, each test pipe 3 can correspond to the test operation of a manual pressure reducing valve, and the tests of multiple manual pressure reducing valves can be realized simultaneously.

[0049] It should be noted that in other embodiments, the number of the gas distribution pipes 2 can also be one, three, four, etc. Other numbers, and multiple test pipes 3 can be connected to each gas distribution pipe 2, and it can be set according to the actual situation.

[0050] In some embodiments, an intake end is provided on the intake pipe 1, and the intake end is connected to an external gas source. By connecting the intake end of the intake pipe 1 to the external gas source and supplying gas through the external gas source, the reliability test of the pressure reducing device 6 is realized.

[0051] Please refer to Figure 1 - Figure 2, based on the same inventive concept, the present invention provides a test method, which is applied to the decompression device test system as described in any one of the above, and the test method includes:

[0052] S100, fully open the decompression device 6 to be tested, set the value of the pressure sensor 5 according to the model of the decompression device 6, and set the opening and closing times of the first normally closed diaphragm valve 4 and the second normally closed diaphragm valve 7 through the control system 8 according to the model of the decompression device 6;

[0053] S300, connect the intake pipe 1 to an external gas source, open the external gas source, supply gas to the intake pipe 1, and adjust the gas source pressure according to the maximum value set by the pressure sensor 5, adjust the pressure of the gas source to the value set by the pressure sensor 5, and the gas in the intake pipe 1 flows into the test pipe 3 through the branch pipe 2, and the test system starts to operate;

[0054] S500, the control system 8 controls the first normally closed diaphragm valve 4 to open, and the second normally closed diaphragm valve 7 remains closed. The gas in the test pipe 3 flows to the pressure sensor 5 after passing through the first normally closed diaphragm valve 4. When the gas pressure reaches the value set by the pressure sensor 5 and maintains for a period of time, generally 2 seconds, the pressure sensor 5 sends a signal to the control system 8. The control system 8 controls the first normally closed diaphragm valve 4 to close, and then controls the second normally closed diaphragm valve 7 to open. The gas in the test pipe is discharged through the second normally closed diaphragm valve 7, realizing a test of one intake and exhaust. The test of one intake and exhaust is a reliability test cycle for the decompression device 6;

[0055] S700, repeat the above S500 step. When a certain decompression device 6 fails, the gas pressure at the pressure sensor 5 will be lower, and the gas pressure cannot reach the value set by the pressure sensor 5. Therefore, the pressure sensor 5 cannot send a signal to the control system 8, so that the control system 8 will not control the first normally closed diaphragm valve 4 to close. Therefore, the operation of the decompression device 6 will stop, and the control system 8 will automatically record the number of cycles.

[0056] In implementation, the value set by the pressure sensor 5 is not less than 80% of the inlet pressure of the corresponding decompression device 6.

[0057] For the same and similar parts among the various embodiments in this specification, reference can be made to each other. Each embodiment focuses on the differences from other embodiments. In particular, for the method embodiments described later, since they correspond to the system, the description is relatively simple, and for the relevant parts, reference can be made to the partial description of the system embodiments.

[0058] As described above, it is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in the present application should be covered within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A pressure relief device testing system, characterized in that: include: An air inlet pipe, wherein the air outlet end of the air inlet pipe is connected to at least one air distribution pipe; A plurality of test tubes, each of which is connected to the gas distribution tube, and each of which is provided with a first normally closed diaphragm valve, a pressure sensor, a pressure reducing device, and a second normally closed diaphragm valve in sequence; A control system, wherein the pressure sensor is electrically connected to the control system, and the control system controls the connection between the first normally closed diaphragm valve and the second normally closed diaphragm valve.

2. The pressure relief device testing system according to claim 1, characterized in that: The control system includes a PLC control unit, and the PLC control unit is used to receive a signal from the pressure sensor, and the PLC control unit controls the first normally closed diaphragm valve and the second normally closed diaphragm valve.

3. The pressure relief device testing system according to claim 2, characterized in that: The PLC control unit controls the opening time and / or closing time of the first normally closed diaphragm valve and the second normally closed diaphragm valve.

4. The pressure relief device testing system according to claim 3, characterized in that: The first normally closed diaphragm valve is a pneumatic normally closed diaphragm valve; And / or, the second normally closed diaphragm valve is a pneumatic normally closed diaphragm valve.

5. The pressure relief device testing system according to claim 4, characterized in that: Several of the pressure reducing devices include manual pressure reducing valves of the same type or different types, the inlet end of the manual pressure reducing valve is connected to the pressure sensor, and the outlet end of the manual pressure reducing valve is connected to the second normally closed diaphragm valve.

6. The pressure relief device testing system according to claim 1, characterized in that: The control system controls the opening time and / or closing time of the first normally closed diaphragm valve to be set according to the type of the manual pressure reducing valve; And / or, the control system controls the opening time and / or closing time of the second normally closed diaphragm valve to be set according to the type of the manual pressure reducing valve.

7. The pressure relief device testing system according to claim 1, characterized in that: Two gas distribution pipes are provided, and a plurality of test tubes are connected to the two gas distribution pipes.

8. The pressure relief device testing system according to claim 1, characterized in that: The air inlet pipe is provided with an air inlet end, and the air inlet end is connected to an external air source.

9. A testing method, characterized in that: The testing method is applied to the pressure reducing device testing system according to any one of claims 1 to 8, and the testing method comprises: S100, fully open the pressure reducing device to be tested, set the value of the pressure sensor according to the model of the pressure reducing device, and set the opening and closing time of the first normally closed diaphragm valve and the second normally closed diaphragm valve through the control system; S300, connecting the air intake pipe to an external air source, supplying air to the air intake pipe, and adjusting the air source pressure according to the maximum value of the set pressure sensor, so that the gas in the air intake pipe flows into the test tube through the air distribution pipe; S500, the control system controls the first normally closed diaphragm valve to open, and the second normally closed diaphragm valve remains closed, and the gas in the test tube flows to the pressure sensor after passing through the first normally closed diaphragm valve. When the gas pressure reaches the value set by the pressure sensor and stabilizes, the pressure sensor sends a signal to the control system, and the control system controls the first normally closed diaphragm valve to close, and then controls the second normally closed diaphragm valve to open, and the gas in the test tube is discharged through the second normally closed diaphragm valve, thereby realizing a single intake and exhaust test; S700, repeat the above step S500. When a certain pressure reducing device fails, the gas pressure cannot reach the value set by the pressure sensor, the pressure sensor cannot send a signal to the control system, and the control system automatically records the number of cycles.

10. The testing method according to claim 9, characterized in that: The value set by the pressure sensor is not less than 80% of the corresponding inlet pressure of the pressure reducing device.

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