Control system for detection equipment, detection method and storage medium

Abstract

A control system for a detection device, a detection method and a storage medium, the control system comprising: a main function module comprising a main application program, the main function module being used for implementing a basic detection function of the detection device when executing the main application program; the at least one auxiliary function module comprises an auxiliary application program, and the auxiliary function module is used for realizing an auxiliary detection function of the detection equipment when the auxiliary application program is executed; and the main function module and the at least one auxiliary function module are used for detecting the detection object by the detection equipment. The detection function of the detection equipment is divided into the basic detection function and the auxiliary detection function, so that the functions are clear in the operation process of the control system. And meanwhile, a distributed architecture is adopted between the auxiliary function module and the main function module, so that the control system has better expansibility and compatibility.

Description

Technical Field

[0001] This application relates to the technical field of detection systems, and particularly relates to a control system, a detection method and a storage medium for a detection device. Background Art

[0002] At present, the functions of detection devices are becoming more and more complex, and their corresponding software systems are also becoming more and more complex. In the current technical solutions, the software system of a detection device is usually obtained by updating the original software system. For example, when a new function is added to the detection device, the original software system is optimized to add the corresponding new function.

[0003] However, when the functions of the detection device are complex to a certain extent, it is easy to cause function intersections in the software system, and the processing logic is not smooth enough, resulting in various errors in the software system, affecting the operation efficiency of the system, and also affecting the further addition of new functions to the system, thus limiting the scalability of the system. In this regard, new technical solutions are still needed. Summary of the Invention

[0004] The main technical problem to be solved by this application is the poor scalability of the system.

[0005] According to a first aspect, in one embodiment, a control system for a detection device is provided, including:

[0006] A main function module, including a main application program, the main function module is used to implement the basic detection function of the detection device when executing the main application program; at least one auxiliary function module, the auxiliary function module includes an auxiliary application program, and the auxiliary function module is used to implement the auxiliary detection function of the detection device when executing the auxiliary application program;

[0007] The main function module and the at least one auxiliary function module are used for the detection device to detect a detection object.

[0008] According to a second aspect, in one embodiment, a detection method is provided, which is applied to a detection device. The detection method includes a main application program and at least one auxiliary application program, and the detection method further includes:

[0009] Implementing the basic detection function of the detection device by executing the main application program;

[0010] Implementing the auxiliary detection function of the detection device by executing the auxiliary application program;

[0011] The basic detection function and the auxiliary detection function are used for the detection device to detect a detection object.

[0012] According to a third aspect, in one embodiment, a computer-readable storage medium is provided, on which a program is stored, and the program can be executed by a processor to implement the method described in the second aspect.

[0013] For the control system of the detection device according to the above embodiment, since the detection function of the detection device is divided into a basic detection function and an auxiliary detection function, the functions of each function are clear during the operation of the control system. At the same time, a distributed architecture is adopted between the auxiliary function module and the main function module, making it easier for the control system to have better scalability and compatibility, thus facilitating the addition of new functions. And the auxiliary detection function of the detection device can be realized by multiple auxiliary function modules together to achieve flexible configuration of the control system and improve the running fluency of the control system. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 Schematic diagram of a control system for a detection device according to an embodiment;

[0015] Figure 2 Schematic diagram of a main function module according to an embodiment;

[0016] Figure 3 Schematic diagram of a main function module according to another embodiment;

[0017] Figure 4 Schematic diagram of an auxiliary function module according to an embodiment;

[0018] Figure 5 Schematic diagram of a control system for a detection device according to another embodiment;

[0019] Figure 6 Schematic diagram of a management center module according to an embodiment;

[0020] Figure 7 Schematic diagram of a software architecture according to an embodiment;

[0021] Figure 8 Schematic diagram of the flow of a detection method according to an embodiment. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The present application will be further described in detail below in conjunction with the specific embodiments and the accompanying drawings. Similar elements in different embodiments are labeled with related similar element numbers. In the following embodiments, many detailed descriptions are provided to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification, which is to avoid the core part of the present application being overwhelmed by excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0023] In addition, the features, operations, or characteristics described in the specification can be combined in any appropriate manner to form various embodiments. At the same time, the steps or actions in the method description can also be reordered or adjusted in a manner obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for clearly describing a certain embodiment and do not mean that they are the necessary sequences, unless it is stated that a certain sequence must be followed.

[0024] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meaning. The "connection" and "coupling" mentioned in the present application, unless otherwise specified, both include direct and indirect connection (coupling).

[0025] In the current solution, since the original software system mainly meets the detection functions of the original detection equipment, and each time a new function is added, it is obtained by updating based on the original software system. As the number of newly added functions increases, the original software system is sometimes not very suitable for adding new functions, resulting in functional intersections among the new functions in the original software system, and there is also a problem that the processing logic is not smooth enough when implementing new functions based on the original software system. This affects the operating efficiency of the system, also affects the further addition of new functions to the system, and limits the scalability of the system.

[0026] In some embodiments of the present application, the control system includes a main function module and at least one auxiliary function module. The basic detection function of the detection device is implemented based on the main function module, and the auxiliary detection function of the detection device is implemented based on the auxiliary function module. Since the detection function of the detection device is divided into a basic detection function and an auxiliary detection function, the functions of each function are clear during the operation of the control system. At the same time, a distributed architecture is adopted between the auxiliary function module and the main function module, making it easier for the control system to have better scalability and compatibility, thus facilitating the addition of new functions. Moreover, the auxiliary detection function of the detection device can be jointly implemented by multiple auxiliary function modules to achieve flexible configuration of the control system and improve the operation fluency of the control system.

[0027] In some embodiments, a control system for a detection device is provided, which is used for the detection device to detect a detection object. For example, it is used for a semiconductor detection device to detect a wafer, or it can also be used for a detection device to detect a chip, a mask plate, a glass screen, etc. Please refer to Figure 1 , the control system for the detection device includes a main function module 10 and an auxiliary function module 20, and the following is a specific description of each of them.

[0028] The main function module 10 includes a main application program. When the main function module 10 is used to execute the main application program, the basic detection function of the detection device is realized. In some embodiments, the basic detection function is used to realize some necessary functions in the detection process of the detection device. For example, it realizes some necessary functions for a semiconductor detection device to detect a wafer. Among them, the basic detection function can be the detection process of the detection device or some functions required during the detection process.

[0029] Please refer to Figure 2 , in some embodiments, the basic detection function includes at least one of the following: a parameter management unit 11, a process scheduling unit 12, a detection management unit 13, an interaction unit 14, an alarm unit 15, an EAP (Equipment Automation Program) equipment automation unit 161, and an EAP remote interaction unit 162. In some embodiments, the basic detection function further includes a log component.

[0030] Among them, the parameter management unit 11 is used to configure the detection parameters of the detection device. When configuring the detection parameters, the parameter management unit 11 performs at least one of creating, editing, saving, deleting, and modifying the detection parameters. For example, it realizes functions such as creating, editing, saving, deleting, and batch modifying the Recipe parameters for the semiconductor detection device to detect wafers. The parameter management unit 11 can also provide corresponding function interfaces to the external EAP system and interface, realize the unified centralized management of Recipe files, support multi-terminal remote access, and ensure the data consistency of Recipe files.

[0031] The process scheduling unit 12 is used to configure the detection process of the detection device. When configuring the detection process, the process scheduling unit 12 performs task scheduling and distribution according to the obtained process tasks to control the detection device or subsystem to perform relevant actions and realize the detection process. For example, when configuring the detection process for the semiconductor detection device to detect wafers, the process scheduling unit 12 obtains the process tasks set by the user or the process tasks issued by the EAP system, and performs task scheduling and distribution according to the logic of managing the device hardware resources, so that the corresponding hardware performs corresponding actions to realize the detection processes of various requirements, such as realizing the dark field detection process, the Review process, the calibration process, etc.

[0032] The detection management unit 13 is used to manage the detection results of the detection device. When managing the detection results, the detection management unit 13 manages various result data and process data generated during the detection process, and associates various result data and process data with other detection data. For example, when managing the detection results of the semiconductor detection device to detect wafers, since a large amount of data information will be generated during the wafer detection process, including result files, Recipe files, intermediate parameter files, original acquisition data files, operation process information, etc., the detection management unit 13 needs to manage and associate these data to realize the systematization of the data during the detection process.

[0033] The interaction unit 14 is used to realize the interaction operation with the detection device. When realizing the interaction operation, the interaction unit 14 performs operations based on at least one of interaction controls, interaction interfaces, and external interfaces. For example, when realizing the interaction operation with the semiconductor detection device, the interaction unit 14 calls the external interface provided by the core operation engine through various extensible interaction controls and interaction pages to realize the UI interaction operation, such as obtaining the detection process and detection parameters set by the user based on the interaction, and feeding back the detection results to the user.

[0034] The alarm unit 15 is used to perform alarm processing of the detection equipment. When implementing alarm processing, the alarm unit 15 triggers the alarm based on at least one of the alarm type and the alarm level. For example, when implementing the alarm processing of semiconductor detection equipment, the alarm unit 15 implements alarm monitoring of the overall operation of the detection equipment. When an alarm occurs, different processing logic is required according to the type and level of the alarm. For example, for important types and high-level alarms, alarms can be issued from multiple angles such as sound and light, so as to distinguish them from other alarms. And when a dangerous alarm or fault occurs, the external system can be notified in time to stop the detection process to prevent the expansion of fault losses.

[0035] The EAP equipment automation unit 161 is used to achieve the connection between the testing equipment and the EAP. For example, when the semiconductor testing equipment is connected to the EAP system, real-time monitoring and automatic control of the semiconductor testing equipment can be achieved.

[0036] The EAP remote interaction unit 162 is used to realize the communication interaction between the detection equipment and the EAP system. For example, the EAP remote interaction unit 162 realizes the communication interaction between the semiconductor detection equipment and the EAP system. The interaction process can be further divided into multiple levels. Secondly, the basic layer is a modeling abstraction of the machine equipment and communication services. The equipment module (Equipment Module) is an abstraction of all key information and functional data in the machine. Among them, the data in the machine is divided into data variables, state variables and equipment constants. The behavior of reporting data on the machine is abstracted as an event reporting method. Multiple report (Report) sets are bound in the collection event (CollectionEvent), and each report can be bound to multiple variables (Variable) to realize batch-related data reporting. It also supports alarm (Alarm) and clear alarm event reporting methods. The control instruction is abstracted as a remote command (Remote Command) interaction method. The remote communication service mainly supports two communication protocols, one is the HSMS protocol for network communication, and the other is the SECSI protocol for serial communication. The middle GEM layer is divided into general basic functions (GEMBase), management functions (GEM Manager) and series machine implementation functions (Sycamore GEM). General basic functions mainly implement the basic general functions of the SEMI E30 GEM standard, without special functions and data of special types of machines, so as to facilitate the common functions of various types of equipment. Series machine implementation functions are based on general basic functions and expand the functions and data unique to other series machines. Management functions can generate and manage GEM functions of various devices according to configuration files, so as to achieve high scalability and high flexibility of equipment.

[0037] The above are some descriptions of the implementation of the basic detection function by the main function module 10. As can be seen from the above, based on the main function module 10, functions such as parameter management, process scheduling, detection management, interaction, and alarm that are necessary for the detection device to perform detection can be implemented, as well as docking with the EAP system to achieve real-time monitoring and automatic control of the detection device.

[0038] Please refer to Figure 3 , in some embodiments, the basic detection function further includes an extended function to implement hardware expansion of the detection device. The extended function includes at least one of the following: a hardware management unit 17, a configuration management unit 18, and a status monitoring unit 19.

[0039] Among them, the hardware management unit 17 is used to uniformly control the hardware of the detection device. When the hardware management unit 17 uniformly controls the hardware of the detection device, it performs at least one of centrally generating a software model of the hardware, centrally generating a control driver for the hardware, initializing the hardware, and providing a hardware interface. For example, the hardware management unit 17 can implement centralized control of all the hardware in a semiconductor detection device. It can generate a software model and a control driver for all the hardware through the configuration file of the hardware to achieve hardware control. At the same time, it can initialize all the hardware and provide interfaces for various hardware, so as to achieve unified management of each hardware.

[0040] The configuration management unit 18 is used to uniformly manage the hardware data, and / or hardware configuration, and / or configuration subsystem of the detection device. When the configuration management unit 18 uniformly manages the hardware data of the detection device, it performs centralized management of configuration data and management of configuration files, so that each data has uniqueness and consistency in the control system. When the configuration management unit 18 uniformly manages the hardware configuration, it performs addition, deletion, or modification of the hardware. When the configuration management unit 18 uniformly manages the configuration subsystem, it performs the required subsystems and parameters of the configuration. For example, when configuring a semiconductor detection device, the configuration management unit 18 can provide an interface method for an external interface to modify the configuration, so as to centrally manage all configuration files and configuration data, including the configuration of all hardware, the configuration of subsystems, etc., to ensure the global uniqueness and data consistency of the configuration data in the semiconductor detection device.

[0041] The status monitoring unit 19 is used to uniformly monitor the parameters of the detection device. When uniformly monitoring the parameters of the detection device, the status monitoring unit 19 executes at least one of uniformly monitoring the operating parameters of the detection device in a preset manner, setting a unified data format for the operating parameters, and saving, querying, visualizing, and alarming the operating parameters. For example, when monitoring each hardware in a semiconductor detection device, the status monitoring unit 19 can adopt a standardized monitoring method, so that the collected hardware data has a unified data format or data type, and the data is recorded through a unified database or file, so that the obtained data can be universal.

[0042] The above are some descriptions of the extended functions in the basic detection function. As can be seen from the above embodiments, based on the hardware management unit 17, the hardware of the detection device can be uniformly controlled, so that the hardware can be efficiently added or deleted. Based on the configuration management unit 18, the hardware data, hardware configuration, and configuration subsystem of the detection device can be uniformly managed. Thus, when adding hardware, the data of the hardware has uniqueness and consistency, and a corresponding subsystem is configured for the hardware, effectively improving the expandability of the hardware. The status monitoring unit 19 is used to uniformly monitor the hardware parameters of the detection device. Thus, when adding hardware, the parameters between each hardware can be universal, effectively improving the compatibility of the hardware. Therefore, based on the extended functions in the basic detection function, the detection device can continuously expand the hardware, as well as the corresponding hardware control module, subsystem module, and device module, to be compatible with different devices and hardware, with higher development efficiency and lower later maintenance cost.

[0043] The auxiliary function module 20 includes an auxiliary application program. The auxiliary function module 20 is used to implement the auxiliary detection function of the detection device when executing the auxiliary application program. In some embodiments, the auxiliary detection function is used to assist the detection device in implementing the detection process, such as assisting a semiconductor detection device in implementing wafer detection. The auxiliary function module 20 and the main function module 10 can be docked through a message component. The message component is used to provide a standardized communication interface for the docking between application programs.

[0044] Please refer to Figure 4 , in some embodiments, the auxiliary detection function includes at least one of the following: the sentinel service unit 21, at least one algorithm data processing unit 22, and the timing task unit 23.

[0045] Among them, the sentinel service unit 21 is used to detect the operating status of the detection device and / or the control system. When detecting the operating status of the detection device and / or the control system, the sentinel service unit 21 executes the detection of the operating status of the hardware of the detection device and / or the program operating status of the control system, and performs corresponding fault handling when the detection device and / or the control system fails. For example, in a semiconductor detection device, the content detected by the sentinel service unit 21 includes software control (start / stop), software / hardware status monitoring, service / Slave abnormal self-start, status data persistence, etc. The sentinel service unit 21 is used to monitor the operation of the hardware and software of each component in the system of the detection device. When a hardware module or software system fails or stops running, the sentinel service unit 21 will immediately detect it and perform corresponding processing, such as automatically restoring the overall hardware module or software system of the detection device, thereby improving the long-term operation stability of the overall detection device.

[0046] The algorithm data processing unit 22 is used to provide algorithm services and / or data processing services to the detection device, at least for processing the detection results of the detection device. When providing algorithm services, the algorithm data processing unit 22 executes the provision of algorithm logic and / or the invocation of algorithm programs. When providing data processing services, the algorithm data processing unit 22 executes data processing on the relevant data of the detection device. For example, in a semiconductor detection device, the algorithm data processing unit 22 can provide the algorithm logic of the main algorithm process, as well as other algorithm invocation requirements that need to be general and extensible, so that various application programs and modules of the semiconductor detection device can call high-performance algorithm programs to achieve complex data processing functions, while isolating the underlying technical implementation of the algorithm, facilitating the replacement of the algorithm module and technical upgrade. The algorithm data processing unit 22 can also provide data processing services for the relevant data of the semiconductor detection device, so that these data can be processed by a high-performance processor to improve the data processing efficiency.

[0047] The timing task unit 23 is used to implement the timing tasks of the detection device. When implementing the timing tasks, the timing task unit 23 executes at least one of the timed backup deletion of the data of the detection device, the timed invocation of the automatic calibration function, and the tasks with custom time. For example, in a semiconductor detection device, the timing task unit 23 can perform timed processing on the tasks that need to be executed, such as providing timed backup deletion of various data files of the software system. For example, when each hardware module runs for a certain period of time, the automatic calibration function of each hardware module can be automatically invoked regularly. At the same time, the timing task unit 23 can also support the extension and custom setting of more timing tasks.

[0048] The above are some descriptions of the auxiliary function module 20. As can be seen from the above embodiments, the auxiliary function module 20 can assist the main function module 10 to efficiently implement the detection function of the detection device, and at the same time can assist the detection device to operate stably. Moreover, the auxiliary function module 20 can operate independently of the main function module 10, and multiple auxiliary function modules 20 can be set, so that the semiconductor detection device can configure different numbers of auxiliary function modules 20 according to actual business requirements and cost budgets, thereby realizing flexible configuration of computing performance.

[0049] As can be seen from the above embodiments, the control system for the detection device is divided into a main function module 10 and an auxiliary function module 20, and there are many common functional units in the main function module 10 and the auxiliary function module 20, such as a parameter management unit 11, a process scheduling unit 12, and a detection management unit 13, etc., so that the control system for the detection device straightens out the information processing logic between application programs and between various functional units, enabling it to be applied to various semiconductor detection devices and process equipment. Thus, based on each application program and each functional unit, it is convenient to add new functions, and the processing logic is smooth, so as to accelerate the development efficiency of the semiconductor detection device software.

[0050] Please refer to Figure 5 , in some embodiments, the control system for the detection device further includes a management center module 30. The management center module 30 includes a management center program, and when the management center module 30 executes the management center program, it realizes the centralized management function of each detection device.

[0051] Please refer to Figure 6, in some embodiments, the centralized management function includes at least one of the device cluster management unit 31, device configuration management unit 32, detection parameter management unit 33, scheduled task management unit 34, device monitoring management unit 35, detection result management unit 36, data backup / migration management unit 37, and system log management unit 38 for each detection device. For example, in semiconductor detection equipment, the management center module 30 can centrally manage the systems of a semiconductor detection device, or manage and coordinate multiple semiconductor detection devices in a factory. The device cluster management unit is used to implement the cluster management of multiple semiconductor detection devices, the device configuration management unit is used to implement the unified configuration management of multiple semiconductor detection devices, and the detection parameter management unit, scheduled task management unit, device monitoring management unit, detection result management unit, data backup / migration management unit, and system log management unit respectively centrally manage the detection parameters, scheduled tasks, device monitoring, detection results, data backup / migration, and system logs of one or more semiconductor detection devices, thereby improving the efficiency of using semiconductor detection equipment and facilitating the realization of functions such as data sharing and data linkage between multiple semiconductor detection devices, thereby improving the performance consistency between multiple semiconductor detection devices. The management center module 30 can also be accessed through the API interface provided externally, so that the management center module 30 can be accessed in the browser on any terminal to meet the requirements of distributed remote multi-terminal management.

[0052] In some embodiments, the management center module 30 communicates with the main function module 10 and the auxiliary function module 20 respectively through the message component. In some embodiments, the centralized management function further includes a log component.

[0053] The above is some description of the management center module 30. As can be seen from the above embodiments, based on the management center module 30, the systems of the detection devices can be centrally managed, or multiple detection devices can be centrally managed to achieve data sharing and data linkage between multiple detection devices, thereby expanding the number of detection devices in use.

[0054] Please refer to Figure 7 , in some embodiments, the main application program and the auxiliary application program are loaded into a preset software architecture. For example, in semiconductor detection equipment, according to the actual hardware composition and process production requirements of the detection equipment, as well as the requirements of the SEMI standard, the system of the entire detection equipment is designed in layers, where the software architecture includes: process layer, interaction layer, system layer, subsystem layer, hardware layer, and basic component layer.

[0055] Among them, the process layer is used to support the operation of application programs, which may include various forms of program processes App. The interaction layer is used to support interaction operations, such as for building the interaction unit 14 to achieve human-computer interaction. The system layer is used to support interaction with external systems, such as for building the EAP device automation unit 161 to achieve interaction with the EAP system. The subsystem layer is used to support the control subsystem. The hardware layer is used to support the control and / or configuration of hardware. The basic component layer is used to support the operation of the basic components of the system, such as for building a message component to achieve communication between various application programs. The entire software supports multi-App access to cooperate in controlling the device, supports a distributed scalable architecture, and different application programs on different end nodes in the distribution achieve different functions, control different hardware components or subsystems, or simultaneously access the data on the machine table.

[0056] In some embodiments, the main application program is driven based on a core operating engine.

[0057] The above is some description of the control system for the detection device. As can be seen from the above embodiments, when applied to semiconductor detection devices, the software architecture and distributed processing technology designed for the hardware and business requirements of semiconductor detection devices provide higher software scalability and compatibility, as well as scalability of the software and hardware of the device computing performance compared to ordinary software architectures. And it enables a set of software to support continuous expansion of hardware control functions, subsystem functions, and device functions to be compatible with different devices and hardware, with higher development efficiency and lower later maintenance costs. Many general functions implemented by the present invention for the business of semiconductor detection devices can be applied to various semiconductor detection devices and process equipment, and at the same time support the SEMI standard and HSMS communication protocol, accelerating the development efficiency of semiconductor detection device software. A variety of maintenance services in the software can improve the overall operation stability of the software system and the device, and can achieve automatic recovery in the event of ordinary abnormalities, reducing the problem occurrence probability of semiconductor detection devices.

[0058] Some embodiments provide a detection method, which can be based on the above control system and applied to a detection device, such as a semiconductor detection device. The detection method includes a main application program and at least one auxiliary application program. Please refer to Figure 8 and the detection method further includes the following steps:

[0059] Step 100: Implement the basic detection function of the detection device by executing the main application program.

[0060] Step 200: Implement the auxiliary detection function of the detection device by executing the auxiliary application program.

[0061] Step 300: The basic detection function and the auxiliary detection function are used for the detection device to detect the detection object.

[0062] In some embodiments, the basic detection function includes at least one of the following: configuring the detection parameters of the detection device through the parameter management unit; configuring the detection process of the detection device through the process scheduling unit; managing the detection results of the detection device through the detection management unit; implementing interactive operations with the detection device through the interaction unit; performing alarm processing on the detection device through the alarm unit; using the EAP device automation unit to implement the docking of the detection device with the EAP system; implementing communication interaction between the detection device and the EAP system through the EAP remote interaction unit; uniformly controlling the hardware of the detection device through the hardware management unit; uniformly managing the hardware data, and / or hardware configuration, and / or configuration subsystem of the detection device through the configuration management unit; uniformly monitoring the parameters of the detection device through the status monitoring unit.

[0063] In some embodiments, the detection method further includes: when the parameter management unit configures the detection parameters, performing at least one of creating, editing, saving, deleting, and modifying the detection parameters; when the process scheduling unit configures the detection process, performing task scheduling and distribution according to the obtained process tasks to control the detection device or subsystem to perform relevant actions and implement the detection process; when the detection management unit manages the detection results, managing various result data and process data generated during the detection process, and associating various result data and process data with other detection data; when the interaction unit implements interactive operations, performing operations based on at least one of interactive controls, interactive interfaces, and external interfaces; when the alarm unit implements alarm processing, triggering an alarm based on at least one of alarm types and alarm levels; when the hardware management unit uniformly controls the hardware of the detection device, performing at least one of centrally generating a software model of the hardware, centrally generating a control driver for the hardware, initializing the hardware, and providing a hardware interface; when the configuration management unit uniformly manages the hardware data of the detection device, performing centralized management of configuration data and management of configuration files to ensure the uniqueness and consistency of each data in the control system; when the configuration management unit uniformly manages the hardware configuration, performing addition, deletion, or modification of the hardware; when the configuration management unit uniformly manages the configuration subsystem, configuring the required subsystem and the parameters of the subsystem; when the status monitoring unit uniformly monitors the parameters of the detection device, performing uniform monitoring of the operating parameters of the detection device in a preset manner, setting a unified data format for the operating parameters, and performing at least one of saving, querying, visualizing, and alarming the operating parameters. Among them, the specific implementation manners of the parameter management unit, process scheduling unit, detection management unit, interaction unit, alarm unit, EAP device automation unit, EAP remote interaction unit, hardware management unit, configuration management unit, and status monitoring unit can refer to the detection device in the above embodiments and will not be elaborated here.

[0064] In some embodiments, the auxiliary detection function includes at least one of the following: detecting the operating state of the detection device and / or the control system of the detection device through the sentinel service unit; providing algorithm services and / or data processing services to the detection device through at least one algorithm data processing unit for at least processing the detection results of the detection device; implementing the scheduled tasks of the detection device through the scheduled task unit.

[0065] In some embodiments, the detection method further includes: when the sentinel service unit detects the operating state of the detection device and / or the control system, it executes detecting the operating state of the hardware of the detection device and / or the program operating state of the control system, and performs corresponding fault handling when the detection device and / or the control system fails; when the algorithm data processing unit provides algorithm services, it executes providing algorithm logic and / or calling algorithm programs, and when the algorithm data processing unit provides data processing services, it executes data processing on the relevant data of the detection device; when the scheduled task unit implements the scheduled task, it executes at least one of scheduled backup deletion of the data of the detection device, scheduled invocation of the automatic calibration function, and tasks with custom time. Among them, the specific implementation manners of the sentinel service unit, the algorithm data processing unit, and the scheduled task unit may refer to the detection device in the above embodiments and will not be elaborated here.

[0066] In some embodiments, the detection method further includes: implementing the centralized management function for each detection device by executing the management center program; the centralized management function includes at least one of the device cluster management unit, device configuration management unit, detection parameter management unit, planned task management unit, device monitoring management unit, detection result management unit, data backup / migration management unit, and system log management unit for each detection device. Among them, the specific implementation manner of the centralized management function may refer to the detection device in the above embodiments and will not be elaborated here.

[0067] In some embodiments, a computer-readable storage medium is provided, and a program is stored on the medium, and the program can be executed by a processor to implement the above detection method.

[0068] Those skilled in the art can understand that all or part of the functions of the various methods in the above embodiments can be implemented in a hardware manner or in a computer program manner. When all or part of the functions in the above embodiments are implemented in a computer program manner, the program can be stored in a computer-readable storage medium, and the storage medium can include: read-only memory, random access memory, magnetic disk, optical disk, hard disk, etc. The above functions can be realized by a computer executing the program. For example, the program is stored in the memory of the device, and when the processor executes the program in the memory, the above all or part of the functions can be realized. In addition, when all or part of the functions in the above embodiments are implemented in a computer program manner, the program can also be stored in a storage medium such as a server, another computer, magnetic disk, optical disk, flash drive or mobile hard disk, and saved to the memory of the local device by downloading or copying, or the system of the local device is updated in version. When the processor executes the program in the memory, all or part of the functions in the above embodiments can be realized.

[0069] The above uses specific examples to elaborate on the present application, which is only used to help understand the present application and is not intended to limit the present application. For those skilled in the art of the present application, according to the idea of the present application, several simple deductions, deformations or substitutions can also be made.

Claims

1. A control system for a detection device, characterized in that, Including: The main function module, including the main application program, which is used to implement the basic detection function of the detection device when executing the main application program; At least one auxiliary function module, where the auxiliary function module includes an auxiliary application program, and the auxiliary function module is used to implement the auxiliary detection function of the detection device when executing the auxiliary application program; The main function module and the at least one auxiliary function module are used for the detection device to detect the detection object.

2. The control system according to claim 1, characterized in that, The basic detection function includes at least one of the following: The parameter management unit, which is used to configure the detection parameters of the detection device; The process scheduling unit, which is used to configure the detection process of the detection device; The detection management unit, which is used to manage the detection results of the detection device; The interaction unit, which is used to implement the interaction operation with the detection device; The alarm unit, which is used to perform the alarm processing of the detection device; The EAP device automation unit, which is used to realize the docking of the detection device with the EAP system; The EAP remote interaction unit, which is used to realize the communication interaction between the detection device and the EAP system.

3. The control system according to claim 2, characterized in that, It also includes: When configuring the detection parameters, the parameter management unit performs at least one of creating, editing, saving, deleting, and modifying the detection parameters; When configuring the detection process, the process scheduling unit performs task scheduling and distribution according to the obtained process tasks to control the detection device or subsystem to perform relevant actions and realize the detection process; When managing the detection results, the detection management unit performs the management of various result data and process data generated during the detection process, and associates various result data and process data with other detection data; When implementing the interaction operation, the interaction unit performs operations based on at least one of interaction controls, interaction interfaces, and external interfaces; When implementing the alarm processing, the alarm unit triggers an alarm based on at least one of the alarm type and alarm level.

4. The control system according to claim 2, characterized in that, The basic detection function also includes extended functions, and the extended functions include at least one of the following: The hardware management unit, which is used to uniformly control the hardware of the detection device; The configuration management unit, which is used to uniformly manage the hardware data, and / or hardware configuration, and / or configuration subsystem of the detection device; The status monitoring unit, which is used to uniformly monitor the parameters of the detection device.

5. The control system according to claim 4, characterized in that, It also includes: When uniformly controlling the hardware of the detection device, the hardware management unit performs at least one of centrally generating the software model of the hardware, centrally generating the control driver program of the hardware, initializing the hardware, and providing hardware interfaces; When uniformly managing the hardware data of the detection device, the configuration management unit performs centralized management of configuration data and management of configuration files, making each data unique and consistent in the control system; when uniformly managing the hardware configuration, the configuration management unit performs addition, deletion, or modification of the hardware; when uniformly managing the configuration subsystem, the configuration management unit performs the required subsystems and subsystem parameters for configuration; When the state monitoring unit uniformly monitors the parameters of the detection device, it executes unified monitoring of the operating parameters of the detection device in a preset manner, sets a unified data format for the operating parameters, and saves, queries, visualizes, or alarms the operating parameters, or performs at least one of these operations.

6. The control system according to claim 1, characterized in that, The auxiliary detection functions include at least one of the following: A sentinel service unit for detecting the operating states of the detection device and / or the control system; At least one algorithm data processing unit that provides algorithm services and / or data processing services to the detection device for at least processing the detection results of the detection device; A timed task unit for implementing the timed tasks of the detection device.

7. The control system according to claim 6, characterized in that, It further includes: When the sentinel service unit detects the operating states of the detection device and / or the control system, it detects the operating state of the hardware of the detection device and / or the program operating state of the control system, and performs corresponding fault handling when the detection device and / or the control system fails; When the algorithm data processing unit provides the algorithm service, it provides algorithm logic and / or calls an algorithm program. When the algorithm data processing unit provides the data processing service, it processes the relevant data of the detection device; When the timed task unit implements the timed task, it performs at least one of the following: timed backup and deletion of the data of the detection device, timed invocation of the automatic calibration function, and tasks with custom time.

8. The control system according to any one of claims 1-7, characterized in that, It further includes: A management center module including a management center program, and when the management center module executes the management center program, it realizes the centralized management function of each detection device.

9. The control system according to claim 8, characterized in that, The centralized management function includes at least one of the device cluster management unit, device configuration management unit, detection parameter management unit, planned task management unit, device monitoring management unit, detection result management unit, data backup / migration management unit, and system log management unit for each detection device.

10. The control system according to any one of claims 1-7, characterized in that, The main application program and the auxiliary application program are loaded into a preset software architecture, and the software architecture includes: A process layer for supporting the operation of the application program; An interaction layer for supporting interaction operations; A system layer for supporting interaction with external systems; A subsystem layer for supporting control subsystems; A hardware layer for supporting the control and / or configuration of hardware; A basic component layer for supporting the operation of the basic components of the control system; And / or The main application program is driven based on a core operation engine.

11. A detection method, characterized in that, Applied to a detection device, the detection method includes a main application program and at least one auxiliary application program, and the detection method further includes: Implementing the basic detection function of the detection device by executing the main application program; Implementing the auxiliary detection function of the detection device by executing the auxiliary application program; The basic detection function and the auxiliary detection function are used for the detection device to detect a detection object.

12. The detection method according to claim 11, characterized in that, The basic detection function includes at least one of the following: Configuring the detection parameters of the detection device through a parameter management unit; Configure the detection process of the detection device through the process scheduling unit; Manage the detection results of the detection device through the detection management unit; Implement interaction operations with the detection device through the interaction unit; Perform alarm processing on the detection device through the alarm unit; The EAP device automation unit is used to realize the docking of the detection device with the EAP system; Realize the communication interaction between the detection device and the EAP system through the EAP remote interaction unit; Unify the control of the hardware of the detection device through the hardware management unit; Unify the management of the hardware data, and / or hardware configuration, and / or configuration subsystem of the detection device through the configuration management unit; Unify the monitoring of the parameters of the detection device through the status monitoring unit.

13. The detection method according to claim 12, characterized in that, It further includes: When configuring the detection parameters, the parameter management unit performs at least one of creating, editing, saving, deleting, and modifying the detection parameters; When configuring the detection process, the process scheduling unit performs task scheduling and distribution according to the obtained process tasks to control the detection device or subsystem to perform relevant actions and implement the detection process; When managing the detection results, the detection management unit manages various result data and process data generated during the detection process and associates various result data and process data with other detection data; When implementing the interaction operation, the interaction unit performs the operation based on at least one of the interaction control, interaction interface, and external interface; When implementing the alarm processing, the alarm unit triggers an alarm based on at least one of the alarm type and alarm level; When unifying the control of the hardware of the detection device, the hardware management unit performs at least one of centrally generating the software model of the hardware, centrally generating the control driver of the hardware, initializing the hardware, and providing the hardware interface; When unifying the management of the hardware data of the detection device, the configuration management unit centrally manages the configuration data and management configuration files to make each data unique and consistent in the control system; when unifying the management of the hardware configuration, the configuration management unit performs addition, deletion, or modification of the hardware; when unifying the management of the configuration subsystem, the configuration management unit configures the required subsystem and the parameters of the subsystem; When unifying the monitoring of the parameters of the detection device, the status monitoring unit performs unified monitoring of the operating parameters of the detection device in a preset manner, sets the unified data format of the operating parameters, and performs at least one of saving the operating parameters, querying the operating parameters, visualizing the operating parameters, and alarming for the operating parameters.

14. The detection method according to claim 11, wherein, The auxiliary detection function includes at least one of the following: Detect the operating status of the detection device and / or the control system of the detection device through the sentinel service unit; Provide algorithm services and / or data processing services to the detection device through at least one algorithm data processing unit for at least processing the detection results of the detection device; Realize the timing task of the detection device through the timing task unit.

15. The detection method according to claim 14, wherein, It further includes: When detecting the operating status of the detection device and / or the control system, the sentinel service unit performs detecting the operating status of the hardware of the detection device and / or the program operating status of the control system, and performing corresponding fault handling when the detection device and / or the control system fails; When providing the algorithm service, the algorithm data processing unit performs providing algorithm logic and / or calling an algorithm program. When providing the data processing service, the algorithm data processing unit performs data processing on the relevant data of the detection device; When implementing the timing task, the timing task unit performs at least one of the timing backup deletion of the data of the detection device, the timing call of the automatic calibration function, and the task of custom time.

16. The detection method according to claim 11, wherein, The detection method further includes: Implementing the centralized management function for each of the detection devices by executing the management center program; The centralized management function includes at least one of a device cluster management unit, a device configuration management unit, a detection parameter management unit, a scheduled task management unit, a device monitoring management unit, a detection result management unit, a data backup / migration management unit, and a system log management unit for each of the detection devices.

17. A computer-readable storage medium, wherein, A program is stored on the medium, and the program can be executed by a processor to implement the method according to any one of claims 11-16.

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