Pressure regulation device and method of use thereof
By designing a pressure adjustment device including a plurality of coaxially spaced elastic members, the problem of difficulty in taking into account the small pressure during initial contact and the large pressure in the final state in the prior art is solved, and high precision and flexible pressure adjustment is achieved.
Patent Information
- Application Number
- CN202510324402.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-19
- Publication Date
- 2025-06-20
AI Technical Summary
In the existing chip packaging technology, it is difficult for precision packaging equipment to take into account the small pressure during initial contact and the ability to output a large pressure in the final state.
A pressure adjustment device is designed, including a housing, a plurality of coaxially spaced elastic members and a connecting shaft. Through the connecting shaft, the elastic assembly is driven to undergo elastic deformation. At the beginning, only one elastic member outputs elastic force. As the degree of deformation increases, the number of elastic members outputting elastic force increases.
It realizes that the pressure is small during initial contact and can output a large pressure in the final state, which improves the accuracy and flexibility of pressure regulation.
Smart Images
Figure CN120184052A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of chip packaging, and particularly to a pressure regulating device and a using method thereof. Background Art
[0002] In the technical field of chip packaging, a precise packaging device is used to apply a certain pressure to a chip for packaging. When the precise packaging device packages workpieces of different specifications and models, the required packaging pressures are different. The method of only performing negative feedback regulation through a sensor has extremely high requirements for control accuracy and is difficult to achieve in the actual production process. Therefore, a pressure regulating device with relatively high control accuracy is needed to regulate the output pressure. The existing solution is to set a spring, and the output pressure is changed by changing the stroke of the spring. However, since only one spring is set in the device, it is impossible to simultaneously take into account that the pressure at the initial contact is relatively small and a relatively large pressure can be output in the final state. Summary of the Invention
[0003] The purpose of the present invention is to provide a pressure regulating device and a using method thereof, so as to take into account that the pressure at the initial contact is relatively small and a relatively large pressure can be output in the final state.
[0004] The present invention provides a pressure regulating device, including a housing, an elastic component, and a connecting shaft. The elastic component includes a plurality of elastic members, and the plurality of elastic members are installed at intervals inside the housing. The elastic members are coaxially arranged with the housing and can elastically deform along the axial direction of the housing. One end of the connecting shaft is fixedly connected to the elastic component, and the other end is threadedly connected to a working part. The working part can drive the connecting shaft to move along the axial direction of the housing and cause the elastic component to elastically deform.
[0005] As a preferred technical solution of the pressure regulating device, the elastic component includes a first elastic member, a second elastic member, and a third elastic member. The first elastic member, the second elastic member, and the third elastic member are arranged in parallel inside the housing, and the connecting shaft is fixedly connected to one of the first elastic member, the second elastic member, and the third elastic member.
[0006] As a preferred technical solution of the pressure regulating device, the elastic component further includes a first pressing ring, a second pressing ring, and a third pressing ring. The first pressing ring, the second pressing ring, and the third pressing ring are respectively used to press the first elastic member, the second elastic member, and the third elastic member tightly inside the housing.
[0007] As a preferred technical solution of the pressure regulating device, it further includes an adjusting member. The adjusting member is installed on one of the plurality of elastic members and is used to change the distance between this elastic member and the two adjacent elastic members.
[0008] As a preferred technical solution of the pressure regulating device, along the direction away from the connecting shaft, the elastic coefficient of the elastic member increases.
[0009] As a preferred technical solution of the pressure regulating device, the elastic member is a leaf spring.
[0010] The present invention provides a method for using a pressure regulating device, which is applied to the pressure regulating device of any of the above solutions. The method for using the pressure regulating device includes:
[0011] S1. Calibrate the pressure regulating device to obtain the elastic force of the elastic component corresponding to the connecting shaft at different moving distances;
[0012] S2. Calculate the required moving distance of the connecting shaft according to the calibration result and the pressure required for the workpiece to be processed;
[0013] S3. The working part drives the connecting shaft to move.
[0014] As a preferred technical solution of the method for using the pressure regulating device, the method for calibrating the pressure regulating device includes:
[0015] S11. Adjust the position of the connecting shaft to cause elastic deformation of the elastic component;
[0016] S12. Obtain the elastic acting force of the elastic component received by the connecting shaft at different moving distances.
[0017] As a preferred technical solution of the method for using the pressure regulating device, after step S2, it further includes:
[0018] S21. Change the depth of the threaded connection between the connecting shaft and the working part according to the self-weight of the working part to cause elastic deformation of the elastic component, and its elastic force is equal to the self-weight of the working part.
[0019] As a preferred technical solution of the method for using the pressure regulating device, after step S21, it further includes:
[0020] S22. Calculate the required moving distance of the connecting shaft according to the calibration result, the self-weight of the working part, and the pressure required for the workpiece to be processed.
[0021] The beneficial effects of the present invention are:
[0022] The present invention provides a pressure regulating device, which coaxially and spacedly installs a plurality of elastic members inside the housing, and the connecting shaft is used to push the elastic component to generate elastic deformation. When the elastic component starts to generate elastic deformation, only one elastic member outputs elastic force outward. As the deformation degree of the elastic component increases, the number of elastic members outputting elastic force outward increases, so that the pressure at the initial contact is small and a large pressure can be output in the final state.
[0023] The present invention provides a method for using a pressure regulating device. By setting up the pressure regulating device of the present invention and calibrating it, the required moving distance of the connecting shaft is calculated according to the calibration result, reducing the control difficulty and improving the accuracy of the pressure output by the pressure regulating device to the outside. Description of the Drawings
[0024] Figure 1 is a schematic structural diagram of the pressure regulating device in an embodiment of the present invention;
[0025] Figure 2 is a cross-sectional view of the pressure regulating device in an embodiment of the present invention;
[0026] Figure 3 is a cross-sectional view of the pressure regulating device and the working part at the initial connection position in an embodiment of the present invention;
[0027] Figure 4 is a cross-sectional view of the pressure regulating device and the working part during the adjustment process in an embodiment of the present invention;
[0028] Figure 5 is a cross-sectional view of the pressure regulating device and the working part after the adjustment is completed in an embodiment of the present invention;
[0029] Figure 6 is an exploded schematic diagram of the pressure regulating device in an embodiment of the present invention;
[0030] Figure 7 is a schematic structural diagram of the elastic member in an embodiment of the present invention.
[0031] In the figure:
[0032] 100, upper bracket; 200, lower bracket; 300, working part; 310, stepped hole; 320, locking hole;
[0033] 1, housing; 21, first elastic member; 22, second elastic member; 23, third elastic member; 201, mounting hole; 202, deformation ring; 203, mounting ring; 31, first pressure ring; 32, second pressure ring; 33, third pressure ring; 4, connecting shaft; 41, threaded section; 5, locking nut; 61, first adjusting member; 62, second adjusting member. Detailed Embodiments
[0034] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.
[0035] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. These are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or simply indicating that the first feature has a lower horizontal height than the second feature.
[0036] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "mounted", "connected" and "coupled" shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0037] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation on the present invention.
[0038] As Figures 1-7As shown in the figure, the present invention provides a pressure regulating device for applying pressure to a chip during the chip packaging process. The pressure regulating device includes a housing 1, an elastic component, and a connecting shaft 4. The elastic component includes a plurality of elastic members, which are installed at intervals inside the housing 1. The elastic members are coaxially arranged with the housing 1 and can elastically deform along the axis direction of the housing 1. One end of the connecting shaft 4 is fixedly connected to the elastic component, and the other end is threadedly connected to the working part. The working part can drive the connecting shaft 4 to move along the axis direction of the housing 1 and cause the elastic component to elastically deform. One end of the housing 1 is provided with an opening, and one end of the connecting shaft 4 is fixedly connected to the elastic member located at the opening. When the connecting shaft 4 moves along its axial direction, it drives the elastic member fixedly connected to it to elastically deform. Taking the connecting shaft 4 gradually approaching the housing 1 as an example, the elastic deformation amount of the elastic member gradually increases, and the elastic force output by it also gradually increases. When the elastic deformation amount of the elastic member fixedly connected to the connecting shaft 4 increases to a certain specific value, this elastic member contacts the adjacent elastic member. At this time, when the connecting shaft 4 continues to move, two corresponding elastic members that elastically deform occur, and the elastic coefficient of the pressure regulating device increases, so that a larger elastic force can be output outward, that is, the pressure output outward. In the pressure regulating device of this embodiment, a plurality of elastic members are coaxially installed at intervals inside the housing 1, and the elastic component is pushed by the connecting shaft 4 to elastically deform. When the elastic component starts to elastically deform, only one elastic member outputs elastic force outward. As the deformation degree of the elastic component increases, the number of elastic members that output elastic force outward increases. Therefore, the pressure of the pressure regulating device at the initial contact is small and a larger pressure can be output in the final state.
[0039] Specifically, please refer to Figures 2-7 As shown in the figure, the elastic component includes a first elastic member 21, a second elastic member 22, and a third elastic member 23. The first elastic member 21, the second elastic member 22, and the third elastic member 23 are arranged in parallel inside the housing 1. The connecting shaft 4 is fixedly connected to one of the first elastic member 21, the second elastic member 22, and the third elastic member 23. Further, the connecting shaft 4 is fixedly connected to the one of the first elastic member 21, the second elastic member 22, and the third elastic member 23 that is close to the opening of the housing 1. The first elastic member 21, the second elastic member 22, and the third elastic member 23 are all provided as leaf springs. The structures of the first elastic member 21, the second elastic member 22, and the third elastic member 23 are similar, and the only difference lies in the size and thickness. Please refer to Figure 7 As shown in the figure, and in combination with Figures 2-6 , Figure 7The schematic diagram of the structure of the elastic member in this embodiment shows that the elastic member is a planar plate-like structure in a free state, including a plurality of coaxial deformation rings 202, which are integrally arranged, and a mounting ring 203 is arranged at the edge for bonding or threading at the installation position, and a mounting hole 201 can be arranged at the center position as required for other functional components to pass through. When elastic deformation occurs, the deformation ring 202 located in the innermost circle first moves along the axial direction of the elastic member, undergoes elastic deformation, and gradually drives the subsequent deformation rings 202 to move and undergo elastic deformation. By setting the first elastic member 21, the second elastic member 22 and the third elastic member 23 as plate springs, the occupation of the axial space of the pressure regulating device is reduced, and a larger elastic output range can be obtained.
[0040] It can be understood that the elastic coefficients of the first elastic member 21, the second elastic member 22 and the third elastic member 23 are related to their thicknesses, so their elastic coefficients can be changed simply by increasing or decreasing their thicknesses. Compared with coil springs, their arrangement dimensions are more flexible.
[0041] In this embodiment, the first elastic member 21, the second elastic member 22 and the third elastic member 23 are connected to the housing 1 by bonding. Figure 2 As shown. Steps corresponding to the first elastic member 21, the second elastic member 22 and the third elastic member 23 are provided inside the shell 1. The first elastic member 21, the second elastic member 22 and the third elastic member 23 are respectively bonded to the plane of the steps to achieve fixed connection. Since the first elastic member 21, the second elastic member 22 and the third elastic member 23 may be deformed and warped during the curing process after bonding, the pressure regulating device also includes a first pressing ring 31, a second pressing ring 32 and a third pressing ring 33. The first pressing ring 31, the second pressing ring 32 and the third pressing ring 33 are respectively used to press the first elastic member 21, the second elastic member 22 and the third elastic member 23 tightly in the shell 1. The outer peripheral surfaces of the first pressing ring 31, the second pressing ring 32 and the third pressing ring 33 are respectively bonded to the side surfaces of the corresponding steps, so as to prevent the first elastic member 21, the second elastic member 22 and the third elastic member 23 from deforming and warping during the curing process.
[0042] Furthermore, if Figure 2As shown, the first elastic member 21 is located at the opening of the housing 1. Therefore, the upper end of the connecting shaft 4 in this embodiment is fixedly connected to the first elastic member 21. The upper end of the connecting shaft 4 is provided with a thread and passes through the mounting hole 201 of the first elastic member 21 and is fixedly connected to the first elastic member 21 through a locking nut 5. At this time, the first elastic member 21 can elastically deform upward or downward along with the connecting shaft 4. After the upward elastic deformation amount of the first elastic member 21 reaches a certain degree, it can contact the second elastic member 22, and drive the second elastic member 22 to elastically deform as the connecting shaft 4 continues to move upward, so that the elastic coefficient of the pressure regulating device increases. Similarly, after the connecting shaft 4 continues to move upward to a certain position, the third elastic member 23 also elastically deforms, and the elastic coefficient of the pressure regulating device increases again. This embodiment further includes an adjusting member, which is installed on one of the plurality of elastic members and is used to change the distance between this elastic member and the two adjacent elastic members. In this embodiment, the adjusting member is installed on the second elastic member 22. The adjusting member can be divided into a first adjusting member 61 and a second adjusting member 62. The first adjusting member 61 and the second adjusting member 62 are respectively located on both sides of the second elastic member 22, and the first adjusting member 61 and the second adjusting member 62 are fixedly connected to the second elastic member 22 by screws. By changing the thicknesses of the first adjusting member 61 and the second adjusting member 62, the distance between the first elastic member 21 and the second elastic member 22, and the distance between the second elastic member 22 and the third elastic member 23 are changed, and finally the elastic coefficient of the entire pressure regulating device is changed, so that it is applicable to more application scenarios.
[0043] Optionally, in order to further reduce the pressure at the initial contact, the plurality of elastic members in this embodiment are arranged such that: along the direction away from the connecting shaft 4, the elastic coefficient of the elastic member increases. That is, the elastic coefficient of the elastic member fixedly connected to the connecting shaft 4 is smaller, so that the pressure at the initial contact is smaller.
[0044] Next, the installation method and movement mechanism of the pressure regulating device will be described. The pressure regulating device is installed on a pressure packaging device. The pressure packaging device includes an upper bracket 100 and a lower bracket 200 that are fixedly connected. The upper bracket is internally provided with a receiving space for receiving the pressure regulating device. The housing 1 is installed on the upper bracket 100. Please refer to Figure 3As shown. During the process of pressing the workpiece to be processed, the position of the housing 1 remains stationary throughout. The working part includes an adjusting shaft 300 and a suction nozzle (not shown in the figure) connected below the adjusting shaft 300. The suction nozzle is used to contact the workpiece to be processed. The lower bracket 200 is provided with a through hole. The adjusting shaft 300 passes through the through hole and can rotate around the axis of the through hole and slide along the axis of the through hole. A combined bearing or air bearing in the prior art can be provided between the adjusting shaft 300 and the through hole to achieve sliding and rotation between the two. The adjusting shaft 300 is axially provided with a stepped hole 310. The large end of the stepped hole 310 is a smooth hole, and the small end is a threaded hole. The connecting shaft 4 is correspondingly provided with a stepped structure. Its large end is matched with the large end of the stepped hole 310, and the small end is a threaded section 41. The threaded section 41 is threadedly connected to the threaded hole of the stepped hole 310. A limiting boss is provided at the upper end of the adjusting shaft. The limiting boss fits on the upper end surface of the second bracket 200. A locking hole 320 is provided in the limiting boss, and a locking screw (not shown in the figure) is provided in the locking hole to lock the adjusting shaft 300 and the connecting shaft 4. When pressing the workpiece to be processed, the workpiece to be processed moves upward, and the adjusting shaft 300 is pushed upward relative to the lower bracket 200 through the suction nozzle, driving the connecting shaft 4 to move upward, causing the elastic component to undergo elastic deformation. The elastic component outputs a downward elastic force, thereby realizing the pressing of the workpiece to be processed. In addition, in the initial state, loosen the locking screw, rotate the adjusting shaft 300 so that it moves upward relative to the connecting shaft 4, and then tighten the locking screw to lock the adjusting shaft 300 and the connecting shaft 4. At this time, there is a gap between the limiting boss of the adjusting shaft 300 and the upper end surface of the lower bracket 200. Specifically, refer to Figure 4 As shown. Driven by the self-weight of the working part, the connecting shaft 4 moves downward together until the limiting boss fits on the upper end surface of the lower bracket 200. During this process, the adjusting shaft 4 drives the first elastic member 21 to undergo downward elastic deformation. Specifically, refer to Figure 5 As shown. The first elastic member 21 provides an upward elastic force to the connecting shaft 4 and the working part. In this way, the self-weight of the working part can be offset by the elastic force of the first elastic member 21, so as to ensure that the pressure on the workpiece to be processed at the moment of initial contact approaches 0.
[0045] The present invention provides a method for using a pressure regulating device, which is applied to the pressure regulating device in this embodiment. The method for using the pressure regulating device includes the following steps:
[0046] S1. Calibrate the pressure regulating device to obtain the elastic force of the elastic component corresponding to the connecting shaft 4 at different moving distances;
[0047] S2. Calculate the required moving distance of the connecting shaft 4 according to the calibration result and the pressure required by the workpiece to be processed;
[0048] S3. The working part drives the connecting shaft 4 to move.
[0049] Specifically, by moving the connecting shaft 4 and measuring the elastic force of the corresponding elastic component, the elastic force of the elastic component corresponding to the connecting shaft 4 at different moving distances is obtained. According to the calibration result and the pressure required for the workpiece to be processed, the moving distance required for the connecting shaft 4 is calculated, and the working part is operated to drive the connecting shaft 4 to move according to the calculated moving distance.
[0050] Further, the calibration method of the pressure regulating device includes the following steps:
[0051] S11. Adjust the position of the connecting shaft 4 to cause elastic deformation of the elastic component;
[0052] S12. Obtain the elastic acting force of the elastic component on the connecting shaft 4 at different moving distances.
[0053] Specifically, when calibrating the pressure regulating device, first disconnect the connecting shaft 4 from the working part to make the elastic component in a free state, that is, a state where it does not need to bear the gravity of the working part. Push the connecting shaft 4 upward, and use measuring elements such as pressure sensors to measure the change in the elastic acting force exerted by the elastic component on the connecting shaft 4 during the process. It should be noted that during this process, continuous recording is performed to obtain the relationship between the moving distance of the connecting shaft 4 and the elastic force of the elastic component. Thus, when performing pressure control during the actual production process, any required pressure value can correspond to an accurate moving distance of the connecting shaft 4, ensuring the control accuracy.
[0054] Furthermore, considering the self-weight of the working part, after step S2, it further includes:
[0055] S21. Change the depth of the threaded connection between the connecting shaft 4 and the working part according to the self-weight of the working part to cause elastic deformation of the elastic component, and its elastic force is equal to the self-weight of the working part.
[0056] In the initial state, the elastic component undergoes elastic deformation, and its elastic force is equal to the self-weight of the working part, so that the pressure on the workpiece to be processed approaches 0 at the moment of initial contact.
[0057] Specifically, since the elastic component undergoes elastic deformation in the initial state, after step S21, it further includes:
[0058] S22. Calculate the moving distance required for the connecting shaft 4 according to the calibration result, the self-weight of the working part, and the pressure required for the workpiece to be processed.
[0059] By substituting the self-weight of the working part into the calibration result for calculation, the accuracy of the calculated moving distance required for the connecting shaft 4 is further ensured.
[0060] For ease of understanding, this embodiment will be illustrated by examples, and it is assumed that the self-weight of the working part is G and the pressure required for the workpiece to be processed is F. Assume that the elastic coefficient of the elastic component is K. Further, the elastic coefficient of the first elastic member 21 is K1; the elastic coefficient of the second elastic member 22 is K2; the elastic coefficient of the third elastic member 23 is K3. Thus, when only the first elastic member 21 undergoes elastic deformation, the elastic coefficient K of the elastic component in this section is K = K1; when only the first elastic member 21 and the second elastic member 22 undergo elastic deformation, the elastic coefficient K of the elastic component in this section is K = K1 + K2; when the first elastic member 21, the second elastic member 22, and the third elastic member 23 all undergo elastic deformation, the elastic coefficient K of the elastic component in this section is K = K1 + K2 + K3. In the initial state, to overcome the self-weight of the working part, the elastic component undergoes downward elastic deformation. In this process, only the first elastic member 21 undergoes elastic deformation, and the distance that the connecting shaft 4 moves downward is G / K1. When pressure is applied to the workpiece to be processed, the connecting shaft 4 moves upward until the distance that the connecting shaft 4 moves upward is G / K1. At this time, the elastic component is not affected by external forces. At this time, the pressure received by the workpiece is the self-weight G of the working part. Subsequently, the elastic force that the elastic component needs to provide is F - G, and the corresponding distance that the connecting shaft 4 continues to move upward is (F - G) / K. Therefore, the total distance that the connecting shaft 4 needs to move upward is G / K1 + (F - G) / K. Where K is determined according to the actual deformation of the elastic component, and no specific examples are given here.
[0061] Through the usage method of the pressure regulating device in this embodiment, the moving distance required for the connecting shaft 4 is calculated according to the calibration result, reducing the control difficulty and improving the accuracy of the pressure output by the pressure regulating device.
[0062] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.
Claims
1. A pressure regulating device, characterized in that: include: Housing (1); An elastic component, the elastic component comprising a plurality of elastic members, the plurality of elastic members being installed at intervals inside the housing (1), the elastic members being coaxially arranged with the housing (1) and being capable of elastic deformation along the axial direction of the housing (1); A connecting shaft (4), one end of which is fixedly connected to the elastic component, and the other end of which is threadedly connected to a working part, wherein the working part can drive the connecting shaft (4) to move along the axial direction of the shell (1) and cause the elastic component to undergo elastic deformation.
2. The pressure regulating device according to claim 1, characterized in that: The elastic component comprises a first elastic member (21), a second elastic member (22) and a third elastic member (23); the first elastic member (21), the second elastic member (22) and the third elastic member (23) are arranged in parallel in the housing (1); and the connecting shaft (4) is fixedly connected to one of the first elastic member (21), the second elastic member (22) and the third elastic member (23).
3. The pressure regulating device according to claim 2, characterized in that: The elastic component further comprises a first pressing ring (31), a second pressing ring (32) and a third pressing ring (33); the first pressing ring (31), the second pressing ring (32) and the third pressing ring (33) are respectively used to press the first elastic member (21), the second elastic member (22) and the third elastic member (23) into the housing (1).
4. The pressure regulating device according to claim 1, characterized in that: It also includes an adjusting member, which is installed on one of the multiple elastic members and is used to change the distance between the elastic member and two adjacent elastic members.
5. The pressure regulating device according to claim 1, characterized in that: In a direction away from the connecting axis (4), the elastic coefficient of the elastic member increases.
6. The pressure regulating device according to any one of claims 1 to 5, characterized in that: The elastic member is a plate spring.
7. A method for using a pressure regulating device, characterized in that: The pressure regulating device according to any one of claims 1 to 6, wherein the method for using the pressure regulating device comprises: S1, calibrating the pressure regulating device to obtain the elastic force of the elastic component corresponding to different moving distances of the connecting shaft (4); S2, calculating the required moving distance of the connecting shaft (4) according to the calibration result and the pressure required for the workpiece to be processed; S3, the working part drives the connecting shaft (4) to move.
8. The method for using the pressure regulating device according to claim 7, characterized in that: The method for calibrating the pressure regulating device comprises: S11, adjusting the position of the connecting shaft (4) so that the elastic component undergoes elastic deformation; S12, obtaining the elastic force of the elastic component applied to the connecting shaft (4) at different moving distances.
9. The method for using the pressure regulating device according to claim 7, characterized in that , after step S2, further comprising: S21. Changing the depth of the threaded connection between the connecting shaft (4) and the working part according to the deadweight of the working part, so that the elastic component undergoes elastic deformation, and its elastic force is equal to the deadweight of the working part.
10. The method for using the pressure regulating device according to claim 9, characterized in that , after step S21, it also includes: S22, calculating the required moving distance of the connecting shaft (4) according to the calibration result, the deadweight of the working part and the pressure required for the workpiece to be processed.