Material box of semiconductor structure

Abstract

The invention provides a material box of a semiconductor structure. The material box of the semiconductor structure comprises a material box body and a first limiting device. The material box body is provided with a containing cavity used for containing a semiconductor structure, and one side of the material box body is provided with a first opening communicated with the containing cavity. The first limiting device comprises a first limiting rod, a first driving piece in driving connection with the first limiting rod and a first limiting part used for limiting the first driving piece. The first limiting part has a first state and a second state; in the first state, the first driving piece drives the first limiting rod to move away from the first opening, and the semiconductor structure can enter the containing cavity from the first opening or move out of the containing cavity through the first opening. And after the first driving piece drives the first limiting rod to move to the first opening, the first limiting part is switched from the first state to the second state, so that the first driving piece is fixed, the first limiting rod is fixed at the first opening, and the semiconductor structure placed in the accommodating cavity is limited in the accommodating cavity.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and particularly to a cassette for semiconductor structures. Background Art

[0002] In the semiconductor industry, it is common to use cassettes to carry semiconductor structures to prevent damage to the semiconductor structures (such as die structures soldered on lead frames). After the semiconductor structures are placed in the cassette, a cassette cover needs to be set at the opening of the cassette to prevent the lead frame from falling out of the cassette. When cleaning the semiconductor structures in the cassette, the cassette carrying the semiconductor structures is placed in a cleaning liquid. After cleaning the semiconductor structures, the cassette cover will prevent the cleaning liquid from being discharged from the cassette in time. If the cleaning liquid contacts the semiconductor structures for a long time, it will affect the quality of semiconductor products prepared based on the semiconductor structures. Summary of the Invention

[0003] An embodiment of this application provides a cassette for semiconductor structures. The cassette for semiconductor structures includes:

[0004] A cassette body having a receiving cavity for placing semiconductor structures, and a first opening communicating with the receiving cavity is provided on one side of the cassette body;

[0005] A first limiting device including a first limiting rod, a first driving member drivingly connected to the first limiting rod, and a first limiting portion for limiting the first driving member; the first limiting portion has a first state and a second state; when the first limiting portion is in the first state, the first driving member drives the first limiting rod to move away from the first opening, and the semiconductor structure can enter the receiving cavity from the first opening or move out of the receiving cavity through the first opening; after the first driving member drives the first limiting rod to move to the first opening, the first limiting portion switches from the first state to the second state to fix the first driving member, so that the first limiting rod is fixed at the first opening to limit the semiconductor structure placed in the receiving cavity within the receiving cavity.

[0006] In one embodiment, the first driving member includes a driving member and a driven member, the driving member and the driven member are respectively rotatably connected to the cassette body; the driven member is fixedly connected to the first limiting rod; the driving member is provided with a plurality of first engaging teeth, the driven member is provided with a plurality of second engaging teeth, and the first engaging teeth are engaged with the second engaging teeth; when the first limiting portion is in the first state, the driving member can rotate in a predetermined direction to drive the driven member to rotate, so that the first limiting rod moves away from the first opening; when the first limiting portion is in the second state, the first limiting portion restricts the rotation of the driving member in the predetermined direction.

[0007] In one embodiment, the first limiting portion includes a first magnetic member and a second magnetic member. The first magnetic member is a magnetic member capable of generating a magnetic field, and the second magnetic member is a magnetic member capable of generating a magnetic field or a magnetizable magnetic member. When the first magnetic member and the second magnetic member face each other, the second magnetic member is subjected to an attractive force. One of the first magnetic member and the second magnetic member is disposed on the surface of the cartridge body, and the other is disposed on the side of the first driving member facing the cartridge body. When the first limiting portion is in the first state, the first magnetic member and the second magnetic member are misaligned. When the first limiting portion is in the second state, the first magnetic member and the second magnetic member face each other.

[0008] In one embodiment, a groove is provided on the surface of the cartridge body, and the first limiting portion is disposed in the groove. In the first state, the first limiting portion entirely enters the groove. In the second state, at least a part of the first limiting portion exposes from the groove and abuts against the first driving member.

[0009] In one embodiment, the first limiting portion is a bounce button.

[0010] In one embodiment, the cartridge body includes opposite first side walls and second side walls. At least one of the first side walls and the second side walls is provided with a plurality of through grooves.

[0011] In one embodiment, a plurality of first limiting grooves arranged at intervals are provided on the inner surface of the first side wall, and a plurality of second limiting grooves arranged at intervals are provided on the inner surface of the second side wall. The first limiting grooves and the second limiting grooves are used to limit opposite ends of the semiconductor structure. When the first side wall is provided with the through groove, the extending direction of the through groove located on the first side wall is the same as the extending direction of the first limiting groove, and the through groove and the first limiting groove are arranged at intervals. When the second side wall is provided with the through groove, the extending direction of the through groove located on the second side wall is the same as the extending direction of the second limiting groove, and the through groove and the second limiting groove are arranged at intervals.

[0012] In one embodiment, when the first side wall is provided with the through groove, at least two through grooves are provided between adjacent two first limiting grooves, and the through grooves located between adjacent two first limiting grooves are arranged at intervals in the extending direction of the first limiting groove. When the second side wall is provided with the through groove, at least two through grooves are provided between adjacent two second limiting grooves, and the through grooves located between adjacent two second limiting grooves are arranged at intervals in the extending direction of the second limiting groove.

[0013] In one embodiment, the cartridge body is further provided with a second opening that communicates with the accommodating cavity and is opposite to the first opening; the cartridge body further includes a second limiting device, the second limiting device includes a second limiting rod, a second driving member drivingly connected to the second limiting rod, and a second limiting portion for limiting the second driving member; the second limiting portion has a first state and a second state; when the second limiting portion is in the first state, the second driving member can drive the second limiting rod to move away from the first opening, and the semiconductor structure can enter the accommodating cavity from the second opening or move out of the accommodating cavity through the second opening; after the second driving member drives the second limiting rod to move to the second opening, the second limiting portion switches from the first state to the second state, so that the second driving member is fixed, so that the second limiting rod is fixed at the second opening, and the semiconductor structure placed in the accommodating cavity is limited in the accommodating cavity;

[0014] The structure of the second driving member is the same as that of the first driving member, and the structure of the second limiting portion is the same as that of the first limiting portion.

[0015] In one embodiment, the cartridge body includes an opposite top wall and bottom wall, the first limiting portion and the first driving member are disposed on the top wall; a limiting notch is provided on a side of the top wall facing the first opening; when the first limiting portion is in the second state, the first limiting rod is clamped in the limiting notch.

[0016] The main technical effects achieved by the embodiments of the present application are as follows:

[0017] For the cartridge of the semiconductor structure provided by the embodiments of the present application, after the first limiting rod moves to the first opening of the cartridge body, the first limiting portion can fix the first driving member, so that the first limiting rod is fixed at the first opening, and the semiconductor structure placed in the accommodating cavity is limited in the accommodating cavity, avoiding the semiconductor structure falling out of the accommodating cavity during the process of cleaning the semiconductor structure and transporting the semiconductor structure; when the first limiting portion switches to the second state, the driving member can drive the first limiting rod to move away from the first opening, so that the semiconductor structure in the accommodating cavity can be taken out or the semiconductor structure can be put into the accommodating cavity; by switching the different states of the first limiting portion, the switching of the different positions of the first limiting rod can be realized, which is convenient for the operator to operate; when cleaning the semiconductor structure in the accommodating cavity of the cartridge, the cleaning liquid can flow out through the area of the first opening not blocked by the first limiting rod, which can make the cleaning liquid completely discharged from the accommodating cavity, prevent the cleaning liquid from not being completely discharged from the accommodating cavity, and the cleaning liquid stays in the accommodating cavity in contact with the semiconductor structure for a long time, which affects the quality of the semiconductor product prepared based on the semiconductor structure. Description of the Drawings

[0018] Figure 1 is a schematic perspective view of a cassette of a semiconductor structure provided by an exemplary embodiment of the present application in a state;

[0019] Figure 2 is a schematic perspective view of a cassette of a semiconductor structure provided by another exemplary embodiment of the present application in a state;

[0020] Figure 3 is a side view of a cassette body in a cassette of a semiconductor structure provided by an exemplary embodiment of the present application;

[0021] Figure 4 is a top view of a first driving member and a first limiting portion in a cassette of a semiconductor structure provided by an exemplary embodiment of the present application in a second state;

[0022] Figure 5 is a top view of a first driving member and a first limiting portion in a cassette of a semiconductor structure provided by an exemplary embodiment of the present application in a first state;

[0023] Figure 6 is Figure 1 a partial enlarged view of the cassette of the semiconductor structure shown;

[0024] Figure 7 is a side view of the cassette body in a cassette of a semiconductor structure provided by an exemplary embodiment of the present application from another perspective;

[0025] Figure 8 is a schematic perspective view of a cassette body in a cassette of a semiconductor structure provided by an exemplary embodiment of the present application. Specific Embodiment

[0026] Here, the exemplary embodiments will be described in detail, and the examples are shown in the drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present application as detailed in the appended claims.

[0027] The terms used in the present application are for the purpose of describing specific embodiments only and are not intended to limit the present application. The singular forms "a", "the", and "said" used in the present application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any and all possible combinations of one or more of the associated listed items.

[0028] It should be understood that although the terms first, second, third, etc. may be used in this application to describe various information, such information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this application, the first information may also be referred to as the second information, and similarly, the second information may also be referred to as the first information. Depending on the context, the word "if" as used herein may be interpreted as "when" or "while" or "in response to a determination".

[0029] The following will, with reference to the accompanying drawings, elaborate on some embodiments of this application. Without conflict, the following embodiments and the features in the embodiments may be combined with each other.

[0030] An embodiment of this application provides a cassette for a semiconductor structure. As Figure 1 and Figure 2 shown, the cassette for the semiconductor structure includes a cassette body 10 and a first limiting device 20.

[0031] The cassette body 10 has a receiving cavity 101 for placing the semiconductor structure, and a first opening 102 communicating with the receiving cavity 101 is provided on one side of the cassette body 10. The first limiting device 20 includes a first limiting rod 21, a first driving member 22 drivingly connected to the first limiting rod 21, and a first limiting portion 23 for limiting the first driving member 22. The first limiting portion 23 has a first state and a second state. In the first state of the first limiting portion 23, the first driving member 22 drives the first limiting rod 21 to move away from the first opening 102, and the semiconductor structure can enter or exit the receiving cavity 101 through the first opening 102, as Figure 2 shown. After the first driving member 22 drives the first limiting rod 21 to move to the first opening 102, the first limiting portion 23 switches from the first state to the second state to fix the first driving member 22, so that the first limiting rod 21 is fixed at the first opening, and the semiconductor structure placed in the receiving cavity 101 is limited in the receiving cavity 101, as Figure 1 shown.

[0032] The cassette of the semiconductor structure provided by the embodiment of the present application. After the first limiting rod moves to the first opening of the cassette body, the first limiting portion can fix the first driving member, so that the first limiting rod is fixed at the first opening, and the semiconductor structure placed in the accommodating cavity is limited in the accommodating cavity, avoiding the semiconductor structure falling out of the accommodating cavity during the cleaning process of the semiconductor structure and during the transportation of the semiconductor structure; when the first limiting portion is switched to the second state, the driving member can drive the first limiting rod to move away from the first opening, so that the semiconductor structure in the accommodating cavity can be taken out or the semiconductor structure can be put into the accommodating cavity; by switching the different states of the first limiting portion, the switching of different positions of the first limiting rod can be realized, which is convenient for the operator to operate; when cleaning the semiconductor structure in the accommodating cavity of the cassette, the cleaning liquid can flow out through the area of the first opening not blocked by the first limiting rod, which can make the cleaning liquid completely discharged from the accommodating cavity, prevent the cleaning liquid from not being completely discharged from the accommodating cavity, and the cleaning liquid stays in the accommodating cavity in contact with the semiconductor structure for a long time, which affects the quality of the semiconductor product prepared based on the semiconductor structure.

[0033] In one embodiment, as Figures 1 to 3 shown, the cassette body 10 includes a top wall 11 and a bottom wall 12 which are oppositely arranged, and a first side wall 13 and a second side wall 14 which are oppositely arranged. The space enclosed by the top wall 11, the bottom wall 12, the first side wall 13 and the second side wall 14 is the accommodating cavity 101. The first opening 102 is located on one side of the accommodating cavity 101.

[0034] In one embodiment, one end of the first limiting rod 21 is connected to the first driving member 22, and the other end is rotatably connected to the side of the cassette body 10 away from the first driving member 22.

[0035] In one embodiment, as Figure 1 、 Figure 2 、 Figures 4 to 6 shown, the first driving member 22 includes a driving member 221 and a driven member 222. The driving member 221 and the driven member 222 are respectively rotatably connected to the cassette body 10. The driven member 222 is fixedly connected to the first limiting rod 21. The driving member 221 is provided with a plurality of first engaging teeth 223, the driven member 222 is provided with a plurality of second engaging teeth 224, and the first engaging teeth 223 are engaged with the second engaging teeth 224. As Figure 2 and Figure 5As shown, in the first state of the first limiting portion 23, the driving member 221 can rotate along the predetermined direction X to drive the driven member 222 to rotate, so that the first limiting rod 21 moves away from the first opening 102; when the first limiting portion 23 is in the first state, the driving member 221 can also rotate along the Y direction opposite to the predetermined direction X, and drive the first limiting rod 21 to move to the first opening 102 through the driven member 222. As Figure 1 and Figure 4 shown, in the second state of the first limiting portion 23, the first limiting portion 23 restricts the rotation of the driving member 221 along the predetermined direction.

[0036] By setting the first engaging teeth 223 of the driving member 221 to engage with the second engaging teeth 224 of the driven member 222, the rotation of the driving member 221 can drive the rotation of the driven member 222, and further the driven member 222 can drive the rotation of the first limiting rod 21; when the first limiting portion 23 is in the second state, the first limiting portion 23 restricts the rotation of the driving member 221 along the predetermined direction, then the rotation of the first limiting rod is restricted, which can prevent the first limiting rod from moving away from the first opening and avoid the semiconductor structure falling out of the accommodating cavity. The first driving member 22 is arranged in the above structure, and the structure of the first driving member 22 is simple and easy to implement.

[0037] Further, when the first limiting rod 21 moves to the first opening 102, the first limiting rod 21 abuts against the cartridge body 10. With such a setting, the rotation of the driving member 221 along the Y direction can be restricted, so as to fix the first limiting rod 21 at the first opening 102.

[0038] In one embodiment, as Figure 4 and Figure 5 shown, the driving member 221 includes a first main body portion 2211 and a first extension portion 2212 connected to the first main body portion 2211, and the first engaging teeth 223 are arranged on the side surface of the first main body portion 2211. The first limiting portion 23 can limit the first extension portion 2212 by abutting against the first extension portion 2212 to restrict the rotation of the driving member 221. The driven member 222 includes a second main body portion 2221 and a second extension portion 2222 connected to the second main body portion 2221, and the second engaging teeth 224 are arranged on the side surface of the second extension portion 2222. The end of the second extension portion 2222 far from the second main body portion 2221 is fixedly connected to the first limiting rod 21.

[0039] In one embodiment, as Figure 4 shown, the driving member 221 is provided with a mounting hole, and a first connecting member 225 passes through the mounting hole to rotatably connect the driving member 221 with the cartridge body 10; the driven member 222 is provided with a mounting hole, and a second connecting member 226 passes through the mounting hole to rotatably connect the driven member 222 with the cartridge body 10.

[0040] In one embodiment, as Figure 6 shown, a groove 113 is provided on the surface of the cartridge body 10, and the first limiting portion 23 is disposed in the groove. In the first state, the first limiting portion 23 entirely enters the groove 113; in the second state, at least a part of the first limiting portion 23 exposes out of the groove 113 and abuts against the first driving member 22. Specifically, when the first limiting portion 23 is in the second state, the exposed part of the first limiting portion 23 abuts against the side surface of the first extension portion 2212 of the driving member 221. With such a setting, in the first state, the first limiting portion 23 entirely enters the groove 113 and does not abut against the first driving member 22, so the first driving member 22 is not restricted by the first limiting portion 23 and can rotate along the X direction and the Y direction; in the second state, the exposed part of the first limiting portion 23 out of the groove 113 abuts against the first driving member 22, which can restrict the rotation of the first driving member 22 along the Y direction.

[0041] Further, the first limiting portion 23 is a bounce button. With such a setting, the first limiting portion 23 is easy to obtain; by pressing the first limiting portion 23, the switching between the first state and the second state can be achieved, which is convenient for the operator to operate.

[0042] In another embodiment, the first limiting portion 23 includes a first magnetic member and a second magnetic member. The first magnetic member is a magnetic member capable of generating a magnetic field, and the second magnetic member is a magnetic member capable of generating a magnetic field or a magnetic member that can be magnetized. When the first magnetic member and the second magnetic member face each other, the second magnetic member is subjected to an attractive force; one of the first magnetic member and the second magnetic member is disposed on the surface of the cartridge body 10, and the other is disposed on the side of the first driving member 22 facing the cartridge body; when the first limiting portion 23 is in the first state, the first magnetic member and the second magnetic member are misaligned; when the first limiting portion 23 is in the second state, the first magnetic member and the second magnetic member face each other. When the first magnetic member and the second magnetic member face each other, the second magnetic member is subjected to the attractive force of the first magnetic member, thereby restricting the relative movement between the cartridge body 10 and the first driving member 22, that is, restricting the relative movement of the first limiting rod 21 relative to the cartridge body 10. The operator can apply a force to the driving member 221 of the first driving member 22 to overcome the attractive force received by the second magnetic member, so as to switch the first limiting portion 23 from the second state to the first state. By providing the first limiting portion with the first magnetic member and the second magnetic member, the structure of the first limiting portion is simple and easy to obtain.

[0043] In one embodiment, the first magnetic member may be a permanent magnet, the second magnetic member may be a permanent magnet, or the material of the second magnetic member is iron, cobalt, nickel, and their alloys. When the second magnetic member is a permanent magnet, the magnetic pole of the first magnetic member facing the second magnetic member is opposite to the magnetic pole of the second magnetic member facing the first magnetic member.

[0044] In one embodiment, a receiving groove may be provided on the surface of the cartridge body, and one of the first magnetic member and the second magnetic member may be located in the receiving groove. In this way, the magnetic member located in the receiving groove will not hinder the movement driven by the first driving member.

[0045] In one embodiment, the magnetic member provided on the first driving member 22 may be provided on the surface of the first extension portion 2212 of the driving member 221 facing the cartridge body, or on the surface of the first main body portion 2211 of the driving member 221 facing the cartridge body.

[0046] In one embodiment, as Figure 5 shown, the first limiting portion 23 and the first driving member 22 are provided on the top wall 11. With such a setting, it is convenient for the operator to operate; and compared with the scheme of setting them on the first side wall or the second side wall, setting the first limiting portion 23 and the first driving member 22 on the top wall 11 does not occupy the surfaces of the first side wall and the second side wall, so more through slots (see the subsequent description) can be opened on the first side wall and the second side wall.

[0047] In one embodiment, as Figure 6 shown, a limiting notch 111 is provided on one side of the top wall 11 facing the first opening 102; when the first limiting portion 23 is in the second state, the first limiting rod 21 is clamped in the limiting notch 111. With such a setting, when the first limiting portion 23 is in the second state, the first limiting rod 21 is clamped in the limiting notch 111, which helps to prevent the first limiting rod 21 from moving relative to the cartridge body 10, and can make the distance between the first limiting rod 21 and the semiconductor structure placed in the receiving cavity 101, for example, the first limiting rod 21 can be in direct contact with the semiconductor structure, which can improve the limiting effect of the first limiting rod 21 on the semiconductor structure.

[0048] In one embodiment, as Figure 1 and Figure 2 shown, at least one of the first side wall 13 and the second side wall 14 is provided with a plurality of through slots 104, and the through slots 104 penetrate the thickness of the side wall where they are located. By providing the through slots 104, the cleaning liquid can enter the receiving cavity 101 through the through slots 104 and can flow out of the receiving cavity 101 through the through slots 104, improving the flow degree of the cleaning liquid, which helps to improve the cleaning effect of the cleaning liquid on the semiconductor structure. The through slots 104 may be strip-shaped slots. Figure 1 and Figure 2In the illustrated embodiment, a plurality of through slots 104 are respectively provided on the first sidewall 13 and the second sidewall 14. In other embodiments, the through slot 104 may be provided only on one of the first sidewall 13 and the second sidewall 14.

[0049] In one embodiment, as Figures 1 to 3 shown, a plurality of first limiting slots 131 arranged at intervals are provided on the inner surface of the first sidewall 13, and a plurality of second limiting slots 141 arranged at intervals are provided on the inner surface of the second sidewall 14. The first limiting slots 131 and the second limiting slots 141 are used to limit the opposite ends of the semiconductor structure; when the through slot 104 is provided on the first sidewall 13, the extending direction of the through slot 104 on the first sidewall 13 is the same as the extending direction of the first limiting slot 131, and the through slot 104 and the first limiting slot 131 are arranged at intervals; when the through slot 104 is provided on the second sidewall 14, the extending direction of the through slot 104 on the second sidewall 14 is the same as the extending direction of the second limiting slot 141, and the through slot 104 and the second limiting slot 141 are arranged at intervals. With such an arrangement, the setting of the through slot 104 will not affect the first limiting slot 131 and the second limiting slot 141.

[0050] In one embodiment, as Figure 7 shown, when the through slot 104 is provided on the second sidewall 14, at least two through slots 104 are provided between two adjacent second limiting slots 141, and the through slots 104 between two adjacent second limiting slots 141 are arranged at intervals in the extending direction of the second limiting slot 141. With such an arrangement, compared with the case where only one longer through slot 104 is provided between two adjacent second limiting slots 141, the strength of the second sidewall 14 can be improved on the premise of ensuring the total flow rate of the through slots 104 between two adjacent second limiting slots 141. Figure 7 In the illustrated embodiment, two through slots 104 are provided between two adjacent second limiting slots 141. In other embodiments, three or more through slots 104 may be provided between two adjacent second limiting slots 141.

[0051] In one embodiment, when the first side wall 13 is provided with the through groove 104, at least two through grooves 104 are provided between two adjacent first limiting grooves 131, and the through grooves 104 located between two adjacent first limiting grooves 131 are arranged at intervals in the extending direction of the first limiting groove 131. With this arrangement, compared with the case where only one longer through groove 104 is provided between two adjacent first limiting grooves 131, the strength of the first side wall 13 can be improved on the premise of ensuring the total flow rate of the through grooves 104 located between two adjacent first limiting grooves 131. In some embodiments, two through grooves 104 are provided between two adjacent second limiting grooves 141. In other embodiments, three or more through grooves 104 can be provided between two adjacent second limiting grooves 141.

[0052] In one embodiment, as Figure 1 , Figure 2 and Figure 8 shown, the cartridge body 10 is further provided with a second opening 103 that communicates with the accommodating cavity 101 and is opposite to the first opening 102. The cartridge body further includes a second limiting device 30, and the second limiting device 30 includes a second limiting rod 31, a second driving member 32 that is drivingly connected to the second limiting rod 31, and a second limiting portion 33 for limiting the second driving member 32. The second limiting portion 33 has a first state and a second state; when the second limiting portion 33 is in the first state, the second driving member 32 can drive the second limiting rod 31 to move away from the second opening 103, and the semiconductor structure can enter the accommodating cavity 101 from the second opening 103 or move out of the accommodating cavity 101 through the second opening 103; after the second driving member drives the second limiting rod 31 to move to the second opening 103, the second limiting portion 33 is switched from the first state to the second state to fix the second driving member 32, so that the second limiting rod 31 is fixed at the second opening 103, and the semiconductor structure placed in the accommodating cavity is limited in the accommodating cavity 101. By providing the second opening 103, it is more conducive to the cleaning liquid flowing out of the accommodating cavity; the second limiting device 30 can facilitate the semiconductor structure to be put into the accommodating cavity 101 through the second opening 102 and taken out from the accommodating cavity 101, and can limit the semiconductor structure after the semiconductor structure is put into the accommodating cavity 101, preventing the semiconductor structure from falling out of the accommodating cavity 101 during the cleaning process of the semiconductor structure and during transportation.

[0053] In some embodiments, the structure of the second driving member 32 is the same as the structure of the first driving member 22, and the structure of the second limiting portion 33 is the same as the structure of the first limiting portion 23. For the specific structures and beneficial effects of the second limiting portion 33 and the second driving member 32, reference can be made to the description of the first limiting portion 23 and the first driving member 22, and details will not be repeated here.

[0054] In one embodiment, as Figure 2 shown, the second driving member 32 and the second limiting portion 33 are provided on the top wall 11. A limiting notch 112 is provided on one side of the top wall 11 facing the second opening 103. Such a setting facilitates the operation of the operator on the second limiting portion and the second driving member; and compared with the solution of arranging them on the first side wall or the second side wall, the second limiting portion and the second driving member do not occupy the surfaces of the first side wall and the second side wall, so more through grooves can be opened on the first side wall and the second side wall.

[0055] Further, as Figure 2 shown, a limiting notch 112 is provided on one side of the top wall 11 facing the second opening 103; when the second limiting portion 33 is in the second state, the second limiting rod 31 is clamped in the limiting notch 112. Such a setting, when the second limiting portion 33 is in the second state, the second limiting rod 31 is clamped in the limiting notch 112, which helps to prevent the second limiting rod 31 from moving relative to the cartridge body 10, and can make the second limiting rod 31 closer to the semiconductor structure placed in the accommodating cavity 101, for example, make the second limiting rod 31 contact the semiconductor structure, which can improve the limiting effect of the second limiting rod 31 on the semiconductor structure.

[0056] In one embodiment, as Figure 8 shown, the bottom wall 12 is provided with an opening groove 121 facing the first opening 102. The setting of the opening groove 121 helps the cleaning liquid to drain from the accommodating cavity 101; and when the end of the first limiting rod 21 close to the top wall 11 is clamped in the limiting notch 111, the end of the first limiting rod 21 close to the bottom wall 12 can be accommodated in the opening groove 121.

[0057] In one embodiment, as Figure 8 shown, the bottom wall 12 is provided with an opening groove 122 facing the second opening 103. The setting of the opening groove 122 helps the cleaning liquid to drain from the accommodating cavity 101; and when the end of the second limiting rod 31 close to the top wall 11 is clamped in the limiting notch 112, the end of the second limiting rod 31 close to the bottom wall 12 can be accommodated in the opening groove 122.

[0058] It should be noted that in the accompanying drawings, the dimensions of layers and regions may be exaggerated for clarity of illustration. Also, it will be understood that when an element or layer is referred to as being "on" another element or layer, it can be directly on the other element, or an intermediate layer may be present. Additionally, it will be understood that when an element or layer is referred to as being "under" another element or layer, it can be directly under the other element, or more than one intermediate layer or element may be present. Further, it will be understood that when a layer or element is referred to as being "between" two layers or two elements, it can be the only layer between the two layers or two elements, or more than one intermediate layer or element may also be present. Like reference numerals throughout the specification indicate like elements.

[0059] Other embodiments of the present application will be readily apparent to those skilled in the art upon consideration of the specification and practice of the disclosure herein. The present application is intended to cover any variations, uses, or adaptations of the present application, which follow the general principles of the present application and include common general knowledge or conventional technical means in the technical field not disclosed herein. The specification and examples are only to be considered as exemplary, and the true scope and spirit of the present application are pointed out by the following claims.

[0060] It should be understood that the present application is not limited to the exact structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the present application is only limited by the appended claims.

Claims

1. A cassette for a semiconductor structure, characterized in that, The cassette of the semiconductor structure includes: A cassette body having a receiving cavity for placing the semiconductor structure, and a first opening communicating with the receiving cavity is provided on one side of the cassette body; A first limiting device, including a first limiting rod, a first driving member drivingly connected to the first limiting rod, and a first limiting portion for limiting the first driving member; the first limiting portion has a first state and a second state; in the first state of the first limiting portion, the first driving member drives the first limiting rod to move away from the first opening, and the semiconductor structure can enter the receiving cavity from the first opening or move out of the receiving cavity through the first opening; after the first driving member drives the first limiting rod to move to the first opening, the first limiting portion switches from the first state to the second state to fix the first driving member, so that the first limiting rod is fixed at the first opening to limit the semiconductor structure placed in the receiving cavity within the receiving cavity.

2. The cassette for a semiconductor structure according to claim 1, characterized in that, The first driving member includes a driving member and a driven member, the driving member and the driven member are respectively rotatably connected to the cassette body; the driven member is fixedly connected to the first limiting rod; the driving member is provided with a plurality of first engaging teeth, the driven member is provided with a plurality of second engaging teeth, and the first engaging teeth are engaged with the second engaging teeth; in the first state of the first limiting portion, the driving member can rotate in a predetermined direction to drive the driven member to rotate, so that the first limiting rod moves away from the first opening; In the second state of the first limiting portion, the first limiting portion restricts the rotation of the driving member in the predetermined direction.

3. The cassette for a semiconductor structure according to claim 1, characterized in that, The first limiting portion includes a first magnetic member and a second magnetic member, the first magnetic member is a magnetic member capable of generating a magnetic field, the second magnetic member is a magnetic member capable of generating a magnetic field or a magnetizable member, and the second magnetic member is attracted when the first magnetic member and the second magnetic member face each other; one of the first magnetic member and the second magnetic member is arranged on the surface of the cassette body, and the other is arranged on the side of the first driving member facing the cassette body; when the first limiting portion is in the first state, the first magnetic member and the second magnetic member are misaligned; when the first limiting portion is in the second state, the first magnetic member and the second magnetic member face each other.

4. The cassette for a semiconductor structure according to claim 1, characterized in that, A groove is provided on the surface of the cassette body, and the first limiting portion is arranged in the groove; in the first state, the first limiting portion entirely enters the groove; in the second state, at least a part of the first limiting portion protrudes from the groove and abuts against the first driving member.

5. The cassette for a semiconductor structure according to claim 4, characterized in that, The first limiting portion is a bounce button.

6. The cassette for a semiconductor structure according to claim 1, characterized in that, The cassette body includes opposite first side walls and second side walls; at least one of the first side walls and the second side walls is provided with a plurality of through grooves.

7. The cassette for a semiconductor structure according to claim 6, characterized in that, The inner surface of the first sidewall is provided with a plurality of first limiting grooves arranged at intervals, and the inner surface of the second sidewall is provided with a plurality of second limiting grooves arranged at intervals. The first limiting grooves and the second limiting grooves are used to limit the opposite ends of the semiconductor structure. When the through groove is provided on the first sidewall, the extending direction of the through groove on the first sidewall is the same as the extending direction of the first limiting groove, and the through groove and the first limiting groove are arranged at intervals. When the through groove is provided on the second sidewall, the extending direction of the through groove on the second sidewall is the same as the extending direction of the second limiting groove, and the through groove and the second limiting groove are arranged at intervals.

8. The cassette for a semiconductor structure according to claim 7, characterized in that, When the through groove is provided on the first sidewall, at least two through grooves are provided between two adjacent first limiting grooves, and the through grooves located between two adjacent first limiting grooves are arranged at intervals in the extending direction of the first limiting groove. When the through groove is provided on the second sidewall, at least two through grooves are provided between two adjacent second limiting grooves, and the through grooves located between two adjacent second limiting grooves are arranged at intervals in the extending direction of the second limiting groove.

9. The cassette for a semiconductor structure according to claim 1, characterized in that, The cartridge body is further provided with a second opening that communicates with the accommodating cavity and is opposite to the first opening. The cartridge body further includes a second limiting device, and the second limiting device includes a second limiting rod, a second driving member drivingly connected to the second limiting rod, and a second limiting portion for limiting the second driving member. The second limiting portion has a first state and a second state. When the second limiting portion is in the first state, the second driving member can drive the second limiting rod to move away from the first opening, and the semiconductor structure can enter the accommodating cavity from the second opening or move out of the accommodating cavity through the second opening. After the second driving member drives the second limiting rod to move to the second opening, the second limiting portion switches from the first state to the second state, so that the second driving member is fixed, so that the second limiting rod is fixed at the second opening, and the semiconductor structure placed in the accommodating cavity is limited in the accommodating cavity. The structure of the second driving member is the same as the structure of the first driving member, and the structure of the second limiting portion is the same as the structure of the first limiting portion.

10. The cassette for a semiconductor structure according to claim 1, characterized in that, The cartridge body includes an opposite top wall and bottom wall, and the first limiting portion and the first driving member are provided on the top wall. A limiting notch is provided on one side of the top wall facing the first opening. When the first limiting portion is in the second state, the first limiting rod is clamped in the limiting notch.

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