Ring ring carrier compatible with multi-form size

Abstract

The invention relates to a Ring ring carrier compatible with multi-form sizes, which comprises side plates which are symmetrically arranged at intervals, supporting assemblies are symmetrically arranged at two ends between the two side plates, each supporting assembly comprises an upper supporting plate, a middle supporting plate and a lower supporting plate which are sequentially arranged from top to bottom, and the distance between the two lower supporting plates is smaller than that between the two middle supporting plates. The distance between the two middle supporting plates is smaller than the distance between the two upper supporting plates. The opposite side faces of the supporting assemblies at the two ends are symmetrically provided with inserting grooves, the inserting grooves sequentially penetrate through the upper supporting plate and the middle supporting plate from top to bottom and then extend to the lower supporting plate, and the height of the inserting grooves located in the lower supporting plate is smaller than that of the lower supporting plate. The Ring rings can be inserted into the inserting grooves from top to bottom to be supported and stored, the Ring ring storage device is suitable for storing the Ring rings of different sizes within the preset range, practical operability is greatly facilitated, the Ring ring storage device is particularly suitable for a production line of wafers of different sizes, carrier management is facilitated, and practicability is good.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing auxiliary facilities, and in particular to a Ring carrier compatible with multiple morphological sizes. Background Art

[0002] In the process of semiconductor manufacturing, wafers need to be supported and transported through a specific Ring (ring-shaped carrier) to ensure the stability and safety of the wafers during processing. As a key component for wafer movement, the size of the Ring varies according to the wafer specifications, and common sizes include seven inches, eight inches, twelve inches, thirteen inches, etc.

[0003] In the prior art, most carriers for storing Rings are designed for a single size, resulting in frequent replacement of carriers on production lines that need to process wafers of different sizes. This not only increases the operation complexity but also reduces production efficiency. In addition, the management of Rings after the waste film is peeled off is also a major challenge, lacking effective unified storage tools, which is prone to cause chaos and loss. Summary of the Invention

[0004] To solve the above problems, the present invention provides a Ring carrier with a reasonable structure that is compatible with multiple morphological sizes, so as to be applicable to the storage of Rings of different sizes within a preset range, greatly facilitating practical operability, especially applicable to production lines of wafers of different sizes, and also facilitating the management of carriers, with good practicability.

[0005] The technical solution adopted by the present invention is as follows:

[0006] A Ring carrier compatible with multiple morphological sizes includes side plates arranged symmetrically at intervals. At both ends between the intervals of the two side plates, support components are symmetrically installed. A single set of support components includes an upper support plate, a middle support plate, and a lower support plate arranged in sequence from top to bottom. The distance between the two lower support plates is less than the distance between the two middle support plates, and the distance between the two middle support plates is less than the distance between the two upper support plates; symmetric slots are opened on the opposite sides of the two ends of the support components, and the slots penetrate through the upper support plate and the middle support plate in sequence from top to bottom and extend to the lower support plate. The height of the slot located on the lower support plate is less than the height of the lower support plate.

[0007] As a further improvement of the above technical solution:

[0008] The corresponding slots on the two sets of support components are located in the same vertical plane.

[0009] There is a distance between the upper support plate and the middle support plate in the height direction, and there is a distance between the middle support plate and the lower support plate in the height direction; through holes penetrating inside and outside are opened on the upper support plate, the middle support plate, and the lower support plate.

[0010] Both ends of the upper support plate, both ends of the middle support plate, and both ends of the lower support plate in the support assembly are respectively attached to the side surface of the side plate and fixedly installed.

[0011] The structure of the upper support plate is as follows: it includes an upper plate body. The side surface of the upper plate body is provided with upper slots penetrating from top to bottom. The adjacent upper slots form vertically long strip-shaped upper convex blocks. The upper part of a single upper convex block forms an upper pointed corner structure through two guiding inclined surfaces on both sides; upper through holes are provided through each upper convex block; the top edge of the upper plate body extends towards the direction away from the upper slots to form a flanging; concave openings are respectively formed inwards at the opposite edges in the middle of the tops of the two upper support plates.

[0012] The structure of the middle support plate is as follows: it includes a middle plate body. The side surface of the middle plate body is provided with middle slots penetrating from top to bottom. The adjacent middle slots form vertically long strip-shaped middle convex blocks. The upper part of a single middle convex block forms an upper pointed corner structure through two guiding inclined surfaces on both sides; middle through holes are provided through each middle convex block.

[0013] The structure of the lower support plate is as follows: it includes a lower plate body. The top surface of the lower plate body extends downwards to form lower slots. The lower slots penetrate the lower plate body in the thickness direction. The upper part of a single lower slot forms an upwardly outward-opening through a guiding inclined surface three; lower through holes are provided on the lower plate body below the lower slots.

[0014] A hole penetrating inside and outside is provided in the middle of the side plate.

[0015] The opposite ends of the side plate are respectively provided with upper straight edge parts, middle straight edge parts, and lower straight edge parts from top to bottom. The distance between the two lower straight edge parts is less than the distance between the two middle straight edge parts, and the distance between the two middle straight edge parts is less than the distance between the two upper straight edge parts; the adjacent upper straight edge part and the middle straight edge part are connected by an inclined edge part, and the adjacent middle straight edge part and the lower straight edge part are connected by an inclined edge part; an upper concave opening is provided in the middle of the top edge of the side plate, and a lower concave opening is provided in the middle of the bottom edge of the side plate.

[0016] Support rods are commonly installed in the middle of the bottom edges of the two side plates. There are two or more support rods arranged in parallel at intervals.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] In the present invention, the Ring ring can be inserted into the slot from top to bottom for support and storage, and is suitable for storing Ring rings of different sizes within a preset range, greatly facilitating the actual operability. It is especially suitable for production lines of different-sized wafers, and is also convenient for the management of carriers, realizing the efficient management and transportation of Ring rings used in semiconductor wafer production, improving the efficiency and flexibility of material management on the wafer production line, and having good practicability;

[0019] The present invention also has the following advantages:

[0020] The upper, middle, and lower support plates form a slot from top to bottom, which can provide reliable and stable support for the Ring ring, achieve compatibility with wafers of different sizes. Moreover, due to the spaced arrangement of the upper, middle, and lower support plates from top to bottom, while ensuring the overall structural strength of the carrier, holes penetrating inside and outside are opened on the upper, middle, lower support plates and the side plates, which also facilitates the cleaning of the carrier itself and the carrier carrying the Ring ring. The carrier also serves the role of a cleaning basket;

[0021] In actual use, by adjusting the spacing distance of one or more of the two upper support plates, two middle support plates, and two lower support plates, as well as the spacing distance of the upper, middle, and lower support plates in the height direction, the applicable wafer size range can be changed, effectively improving the flexibility of actual use. Brief Description of the Drawings

[0022] Figure 1 It is a schematic structural diagram of the present invention.

[0023] Figure 2 It is an exploded view of the present invention.

[0024] Figure 3 It is a schematic structural diagram of the upper support plate of the present invention.

[0025] Figure 4 It is a schematic structural diagram of the middle support plate of the present invention.

[0026] Figure 5 It is a schematic structural diagram of the lower support plate of the present invention.

[0027] Figure 6 It is a schematic structural diagram of the side plate of the present invention.

[0028] Wherein: 1, side plate; 2, upper support plate; 3, middle support plate; 4, lower support plate; 5, support rod; 10, large Ring ring; 20, small Ring ring;

[0029] 11, upper straight edge part; 12, inclined edge part; 13, middle straight edge part; 14, lower straight edge part; 15, lower notch; 16, upper notch;

[0030] 21, upper plate body; 22, flanging; 23, first guiding inclined surface; 24, upper convex block; 25, inner notch; 26, upper through hole; 27, upper slot;

[0031] 31, middle plate body; 32, middle slot; 33, middle through hole; 34, middle convex block; 35, second guiding inclined surface;

[0032] 41, lower plate body; 42, lower slot; 43, third guiding inclined surface; 44, lower through hole. Detailed Embodiment

[0033] The following will describe the specific embodiments of the present invention in conjunction with the accompanying drawings.

[0034] As Figure 1 and Figure 2 shown, a Ring ring carrier compatible with multiple form factors and sizes in this embodiment includes side plates 1 arranged symmetrically and at intervals. At both ends between the intervals of the two side plates 1, support components are symmetrically installed. A single set of support components includes an upper support plate 2, a middle support plate 3, and a lower support plate 4 arranged in sequence from top to bottom. The distance between the two lower support plates 4 is less than the distance between the two middle support plates 3, and the distance between the two middle support plates 3 is less than the distance between the two upper support plates 2; slots are symmetrically formed on the opposite sides of the two ends of the support components, and the slots penetrate through the upper support plate 2 and the middle support plate 3 in sequence from top to bottom and extend to the lower support plate 4. The height of the slot located on the lower support plate 4 is less than the height of the lower support plate 4.

[0035] In this embodiment, the Ring ring can be inserted into the slot from top to bottom to achieve support and storage, and it is applicable to the storage of Ring rings of different sizes within a preset range. For example, Figure 1 the use of the twelve-inch large Ring ring 10 and the eight-inch small Ring ring 20 in ; through the carrier, the Ring ring can be effectively fixed to prevent the Ring ring from moving within the carrier, effectively ensuring the safety and stability of the Ring ring loaded in the carrier.

[0036] In actual use, by adjusting the interval distance of one or more of the two upper support plates 2, the two middle support plates 3, and the two lower support plates 4, as well as the interval distance of the upper, middle, and lower support plates in the height direction, the applicable wafer size range can be changed, effectively improving the flexibility of actual use.

[0037] The corresponding slots on the two sets of support components are located in the same vertical plane. When the Ring ring is inserted into the slot, both sides of the Ring ring can be symmetrically and reliably supported by the slots on the two sets of support components, ensuring the reliability of the Ring ring storage support.

[0038] In actual use, according to requirements, a flexible material can also be laid on the inner wall surface of the slot, such as conventional flexible materials like rubber pads and foams, to reduce or even avoid hard contact of the Ring ring in the slot and protect the Ring ring from being scratched or deformed.

[0039] There is a distance between the upper support plate 2 and the middle support plate 3 in the height direction, and there is a distance between the middle support plate 3 and the lower support plate 4 in the height direction; through holes are formed on the upper support plate 2, the middle support plate 3, and the lower support plate 4.

[0040] In this embodiment, the upper, middle, and lower support plates form a slot from top to bottom, which can provide reliable and stable support for the Ring ring, achieve compatibility with wafers of different sizes. Moreover, due to the spaced arrangement of the upper, middle, and lower support plates from top to bottom, while ensuring the overall structural strength of the carrier, holes penetrating inside and outside are opened on the upper, middle, and lower support plates and the side plate 1, which also facilitates the cleaning of the carrier itself and the carrier carrying the Ring ring. The carrier also serves the role of a cleaning basket.

[0041] At both ends of the upper support plate 2, both ends of the middle support plate 3, and both ends of the lower support plate 4 in the support assembly are respectively attached to the side surface of the side plate 1 and firmly installed.

[0042] In actual use, fasteners can be used to install the upper support plate 2, the middle support plate 3, and the lower support plate 4 on the side plate 1 to effectively ensure the stability of the structure. Of course, conventional snap-fasteners, card slots and other fitting structures can also be used alone or in combination, as long as the structural stability of the carrier can be ensured.

[0043] As Figure 3 shown, the structure of the upper support plate 2 is as follows: it includes an upper plate body 21. The side surface of the upper plate body 21 is penetrated from top to bottom to form upper slots 27. The adjacent upper slots 27 form vertically long strip-shaped upper convex blocks 24. The upper part of a single upper convex block 24 forms an upper pointed corner structure through two guiding inclined surfaces 23 on both sides. The guiding inclined surface 23 provides a guiding function for the insertion of the Ring ring into the upper slot 27. Upper through holes 26 are opened through each upper convex block 24, which can effectively reduce weight and contribute to ensuring the cleaning effect while ensuring the structural support. The top edge of the upper plate body 21 extends towards the direction away from the upper slot 27 to form a flanging 22. Concave notches 25 are respectively formed inwards at the middle of the opposite edges at the top of the two upper support plates 2.

[0044] In this embodiment, through the settings of the flanging 22 and the concave notch 25 on the upper support plate 2, it is convenient to apply force and transfer the entire carrier through the upper support plates 2 at both ends. For example, the carrier can be hung and clamped through the flanging 22 and then stably transferred.

[0045] As Figure 4 shown, the structure of the middle support plate 3 is as follows: it includes a middle plate body 31. The side surface of the middle plate body 31 is penetrated from top to bottom to form middle slots 32. The adjacent middle slots 32 form vertically long strip-shaped middle convex blocks 34. The upper part of a single middle convex block 34 forms an upper pointed corner structure through two guiding inclined surfaces 35 on both sides. The guiding inclined surface 35 provides a guiding function for the insertion of the Ring ring into the middle slot 32. Middle through holes 33 are opened through each middle convex block 34, which can effectively reduce weight and contribute to ensuring the cleaning effect while ensuring the structural support.

[0046] In this embodiment, the upper slot 27 on the upper support plate 2 and the middle slot 32 on the middle support plate 3 are respectively formed on the sides of the upper plate body 21 and the middle plate body 31. Thus, while realizing the insertion and support of the Ring ring, it effectively avoids the lateral detachment of the Ring ring from the slot, and is particularly suitable for the storage and compatible use of relatively small-sized Ring rings.

[0047] As Figure 5 shown, the structure of the lower support plate 4 is as follows: it includes a lower plate body 41, and a lower slot 42 is formed on the top surface of the lower plate body 41 extending downward from top to bottom. The lower slot 42 penetrates the lower plate body 41 in the thickness direction. The upper part of a single lower slot 42 forms an upwardly flared opening via a third guiding inclined surface 43, and the third guiding inclined surface 43 provides a guiding effect for inserting the Ring ring into the lower slot 42; a lower through-hole 44 is formed on the lower plate body 41 below the lower slot 42, which effectively reduces the weight while ensuring the structural support and helps to ensure the cleaning effect, etc.

[0048] A hole penetrating through the inside and outside is formed in the middle of the side plate 1.

[0049] As Figure 6 shown, the opposite ends of the side plate 1 are respectively provided with an upper straight edge portion 11, a middle straight edge portion 13, and a lower straight edge portion 14 from top to bottom. The distance between the two lower straight edge portions 14 is less than the distance between the two middle straight edge portions 13, and the distance between the two middle straight edge portions 13 is less than the distance between the two upper straight edge portions 11; the adjacent upper straight edge portion 11 and the middle straight edge portion 13 are connected by an inclined edge portion 12, and the adjacent middle straight edge portion 13 and the lower straight edge portion 14 are connected by an inclined edge portion 12; a upper notch 16 is provided in the middle of the top edge of the side plate 1, and a lower notch 15 is provided in the middle of the bottom edge of the side plate 1.

[0050] In this embodiment, the upper support plate 2 can be installed at the upper straight edge portion 11 of the side plate 1, the middle support plate 3 can be installed at the middle straight edge portion 13, and the lower support plate 4 can be installed at the lower straight edge portion 14, while realizing the structural support and reliability of the carrier itself, ensuring the simplicity and aesthetics of the carrier's appearance.

[0051] Support rods 5 are commonly installed at the middle of the bottom edges of the two side plates 1, and there are two or more support rods 5 arranged at intervals in parallel.

[0052] In this embodiment, the structural stability of the carrier can be further ensured via the support rods 5; or the Ring ring inserted into the slot can be reduced or even prevented from detaching from the bottom surface of the carrier via the support rods 5.

[0053] In this embodiment, not only can the Ring rings within a preset size range be stored and transferred by the carrier, but also by conveniently opening standardized connection interfaces on the carrier. For example, the concave notch 25 and the flanging 22 on the upper support plate 2, the upper concave notch 16 and the lower concave notch 15 on the side plate 1, and other structural features enable the carrier to be smoothly docked with existing semiconductor production equipment, such as wafer transfer systems, cleaning machines, etc., so that it can be seamlessly integrated and connected to the existing production line without additional adaptation or modification, with strong usability.

[0054] In this embodiment, the components including the side plate 1, the upper support plate 2, the middle support plate 3, the lower support plate 4, etc. in the carrier can all be made of high-strength lightweight materials, such as aluminum alloy, carbon fiber composite materials, etc. While ensuring the load-bearing capacity of the carrier, the overall weight is effectively reduced, facilitating manual handling or automated handling by a robotic arm, and effectively enhancing and ensuring the durability and service life of the carrier.

[0055] In actual use, according to actual requirements, such as the size of the Ring ring, etc., the distances between the two upper support plates 2, the two middle support plates 3, the two lower support plates 4, and between the upper support plate 2, the middle support plate 3, and the lower support plate 4 can be adjusted, and they can be adjusted to appropriate positions relative to the side plate 1 to expand the applicable Ring ring size range, with convenient operation, high flexibility in use, and low cost.

[0056] In actual use, an operator can select a suitable slot according to the size of the Ring ring and place the Ring ring into the slot of the carrier from top to bottom. The Ring ring will be automatically aligned and stably placed according to the shape of the slot, and then the Ring ring will be transported and transferred by the carrier.

[0057] The carrier in this embodiment has a simplified structure, a reasonable and ingenious layout, maximizing the internal storage space. At the same time, the Ring ring is easy to pick up and place, with convenient and smooth operation; it is also convenient for cleaning and maintenance.

[0058] The present invention realizes the storage of Ring rings of different sizes within a preset range, greatly facilitating the actual operability. It is especially suitable for production lines of wafers of different sizes, and is also convenient for the management of the carrier, realizing the efficient management and transportation of the Ring rings used in semiconductor wafer production, improving the efficiency and flexibility of material management on the wafer production line, with good practicality and easy to promote and use.

[0059] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts among the various embodiments can be referred to each other.

[0060] The above description is an explanation of the present invention, not a limitation thereof. For the scope defined by the present invention, refer to the claims. Any form of modification may be made within the scope of protection of the present invention.

Claims

1. A Ring carrier compatible with various shapes and sizes, characterized by: The invention comprises side panels (1) arranged symmetrically at intervals, and support components are symmetrically installed at both ends between the intervals of the side panels (1) on both sides, and a single group of support components comprises an upper support plate (2), a middle support plate (3), and a lower support plate (4) arranged in sequence from top to bottom, and the distance between the two lower support plates (4) is smaller than the distance between the two middle support plates (3), and the distance between the two middle support plates (3) is smaller than the distance between the two upper support plates (2); slots are symmetrically provided on the side surfaces of the support components at both ends facing each other, and the slots penetrate the upper support plate (2) and the middle support plate (3) in sequence from top to bottom and then extend to the lower support plate (4), and the height of the slots on the lower support plate (4) is smaller than the height of the lower support plate (4).

2. The Ring carrier compatible with multiple shapes and sizes as claimed in claim 1, characterized in that: The corresponding slots on the two sets of support components are located in the same vertical plane.

3. The Ring carrier compatible with multiple shapes and sizes as claimed in claim 1, characterized in that: There is a distance between the upper supporting plate (2) and the middle supporting plate (3) in the height direction, and there is a distance between the middle supporting plate (3) and the lower supporting plate (4) in the height direction; the upper supporting plate (2), the middle supporting plate (3) and the lower supporting plate (4) are all provided with holes penetrating inside and outside.

4. The Ring carrier compatible with multiple shapes and sizes as claimed in claim 1, characterized in that: The two ends of the upper support plate (2), the two ends of the middle support plate (3), and the two ends of the lower support plate (4) in the support assembly are respectively attached to the side surfaces of the side plates (1) and are fastened and installed.

5. The Ring carrier compatible with multiple shapes and sizes as claimed in claim 1, characterized in that: The structure of the upper support plate (2) is as follows: it comprises an upper plate body (21), an upper slot (27) is provided through the side surface of the upper plate body (21) from top to bottom, a vertical long strip upper protrusion (24) is formed between adjacent upper slots (27), and the upper part of a single upper protrusion (24) is formed into an upper sharp angle structure through guiding inclined surfaces (23) on both sides; an upper through hole (26) is provided through each upper protrusion (24); the top edge of the upper plate body (21) extends in a direction away from the upper slot (27) to form a flange (22); and the middle edges of the tops of the two upper support plates (2) facing each other are respectively concave to form inner concave openings (25).

6. The Ring carrier compatible with multiple shapes and sizes as claimed in claim 1, characterized in that: The structure of the middle support plate (3) is as follows: it comprises a middle plate body (31), a middle slot (32) is provided through the side surface of the middle plate body (31) from top to bottom, a vertical long strip middle protrusion (34) is formed between adjacent middle slots (32), and the upper part of a single middle protrusion (34) forms an upper sharp angle structure through two guide inclined surfaces (35) on both sides; and a middle through hole (33) is provided through each middle protrusion (34).

7. The Ring carrier compatible with multiple shapes and sizes as claimed in claim 1, characterized in that: The structure of the lower support plate (4) is as follows: it comprises a lower plate body (41); a lower slot (42) is provided on the top surface of the lower plate body (41) extending from top to bottom; the lower slot (42) penetrates the lower plate body (41) in the thickness direction; the upper part of a single lower slot (42) is formed into an opening extending upward and outward through a third guide inclined surface (43); and a lower through hole (44) is provided on the lower plate body (41) below the lower slot (42).

8. The Ring carrier compatible with various shapes and sizes as claimed in claim 1, characterized in that: A hole penetrating inside and outside is provided in the middle of the side plate (1).

9. The Ring carrier compatible with multiple shapes and sizes as claimed in claim 1, characterized in that: The opposite ends of the side plate (1) are respectively arranged as an upper straight edge portion (11), a middle straight edge portion (13), and a lower straight edge portion (14) from top to bottom; the distance between the two lower straight edge portions (14) is smaller than the distance between the two middle straight edge portions (13), and the distance between the two middle straight edge portions (13) is smaller than the distance between the two upper straight edge portions (11); adjacent upper straight edge portions (11) and middle straight edge portions (13) are connected via a bevel portion (12), and adjacent middle straight edge portions (13) and lower straight edge portions (14) are connected via a bevel portion (12); an upper notch (16) is arranged in the middle of the top edge of the side plate (1), and a lower notch (15) is arranged in the middle of the bottom edge of the side plate (1).

10. The Ring carrier compatible with multiple shapes and sizes as claimed in claim 1, characterized in that: A support rod (5) is commonly installed at the middle of the bottom edge of the side panels (1) on both sides, and the support rod (5) includes more than two support rods (5) arranged in parallel and spaced apart.

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